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JP3631120B2 - 半導体装置 - Google Patents

半導体装置 Download PDF

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Publication number
JP3631120B2
JP3631120B2 JP2000296328A JP2000296328A JP3631120B2 JP 3631120 B2 JP3631120 B2 JP 3631120B2 JP 2000296328 A JP2000296328 A JP 2000296328A JP 2000296328 A JP2000296328 A JP 2000296328A JP 3631120 B2 JP3631120 B2 JP 3631120B2
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JP
Japan
Prior art keywords
electrode pad
semiconductor element
wire
semiconductor device
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2000296328A
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English (en)
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JP2002110898A (ja
Inventor
充 小宮山
臣介 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP2000296328A priority Critical patent/JP3631120B2/ja
Priority to US09/963,590 priority patent/US7115977B2/en
Publication of JP2002110898A publication Critical patent/JP2002110898A/ja
Priority to US10/171,981 priority patent/US6882056B2/en
Application granted granted Critical
Publication of JP3631120B2 publication Critical patent/JP3631120B2/ja
Priority to US11/540,754 priority patent/US8053278B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Description

【０００１】
【発明の属する技術分野】
本発明は、複数の半導体素子が積層して用いられる半導体装置に関する。
【０００２】
【従来の技術】
従来、マルチチップパッケージと呼ばれる、１つのパッケージ内に複数の半導体素子が封止される技術があり、その形態として、例えば、絶縁基板上に複数の半導体素子を積層して搭載したスタック型マルチチップパッケージがある。
【０００３】
このような半導体装置では、積層された個々の半導体素子の電極パッドと、絶縁基板上の内部電極とがそれぞれワイヤにより接続されている。複数の半導体素子、内部電極、ワイヤは封止樹脂で封止されている。
【０００４】
【発明が解決しようとする課題】
しかしながら、従来のスタック型マルチチップパッケージにおいては、上段の半導体素子と内部電極とが第１の導電ワイヤで接続され、また、下段の半導体装置と内部電極とが第２の導電ワイヤでそれぞれ接続されているため第１の導電ワイヤが第２の導電ワイヤよりも長くなる。
【０００５】
このため、樹脂を注入する際の圧力により、長い側の第１の導電ワイヤが流され、隣り合うワイヤと短絡してしまうという問題点があった。
【０００６】
本発明では、隣り合う導電ワイヤの接触を抑制することのできる、積層された半導体素子を有する半導体装置を提供することを目的とする。
【０００７】
【課題を解決するための手段】
本願発明のうち代表的な半導体装置では、上記課題を解決するために、表面に配線パターンが形成された基板と、基板上に搭載された、第１の電極パッドを備えた第１の半導体素子と、第１の半導体素子上に搭載された、第２の電極パッドを備えた第２の半導体素子と、第１の電極パッドの第１の領域と第２の電極パッドとを接続する第１のワイヤと、第１の電極パッドの第１の領域を除く第２の領域と配線パターンとを接続する第２のワイヤと、を含む。
【０００８】
【発明の実施の形態】
図１および図２は本発明の第１の実施形態の断面図である。
【０００９】
絶縁基板１上には接着剤２により下段の半導体素子３が固定されており、下段の半導体素子３上には接着剤４により上段の半導体素子５が固定されている。半導体素子３は、あらかじめ裏面に絶縁性の接着シートが貼り付けられた半導体素子３を熱圧着にて絶縁基板１の表面にダイスボンドすることにより絶縁基板１上に固定することができる。半導体素子３の裏面への接着シートの貼り付けは、ウエハ状態で行われ、接着シートの貼り付けられたウエハを個々の半導体素子に分割することで、裏面に接着シートの貼り付けられた半導体素子が得られる。なお、半導体素子５を下段の半導体素子３上に固定する場合も同様の手法を用いることが可能である。
【００１０】
絶縁基板１の表面には内部電極としての導電パターン６が、裏面には導電パターン７がそれぞれ形成されている。導電パターン６は絶縁基板１の表面を、半導体素子３が搭載される領域まで引き回されている。導電パターン６と導電パターン７とは、絶縁基板１内に形成された図示しないスルーホールを介して互いに接続されている。スルーホール内には例えば金などの導電材料がメッキ等により形成されており、この導電材料により導電パターン６と導電パターン７とは電気的に接続されている。
【００１１】
導電パターン６を絶縁基板１の表面に引き回し、その一端を導電材料に接続することにより、絶縁基板１の裏面の中央部分に配置される導電パターン７と電気的に接続することが可能となる。絶縁基板１表面で導電パターン６を引き回すことができない場合は、絶縁基板１の裏面で導電パターン７を引き回すことも可能である。
【００１２】
絶縁基板１上に形成されている導電パターン６および導電パターン７はそれぞれソルダレジスト８およびソルダレジスト９で覆われている。
【００１３】
ソルダレジスト９から露出している導電パターン７上には外部電極としての金属バンプ１０が形成されている。金属バンプ１０としては、例えばはんだボールが用いられる。この金属バンプ１０は、この半導体装を実装基板に実装する際の電極として用いられる。
【００１４】
半導体素子３の表面には電極パッド１１が形成されている。半導体素子３の表面は、例えばシリコン窒化膜などのパッシベーション膜１２で覆われており、電極パッド１１はパッシベーション膜１２から露出している。図示はされていないが、通常は電極パッド１１の周囲はパッシベーション膜１２に覆われており、ワイヤがボンディングされる中央部分がパッシベーション膜１２から露出している。
【００１５】
半導体素子５においても、半導体素子３と同様に電極パッド１３およびパッシベーション膜１４が形成されている。
【００１６】
半導体素子５は、半導体素子３よりも小さい外形形状を有しており、半導体素子３の電極パッド１１と重ならないように半導体素子３上に固定されている。すなわち、半導体素子５の各辺は、それぞれ半導体素子３の各辺より短く、それぞれ半導体素子３の各辺よりも内側に配置される。
【００１７】
半導体素子３の電極パッド１１上には金属バンプ１５が形成されている。この金属バンプ１５は、通常のワイヤボンディング技術を用い、ワイヤの先端のボール部分のみを残すことにより形成される。
【００１８】
半導体素子５の電極パッド１３上にも同様に金属バンプ１６が形成されている。
【００１９】
絶縁基板１上の導電パターン６と半導体素子３の電極パターン１１とは、導電ワイヤ１７により電気的に接続されている。導電ワイヤ１７は、ワイヤボンディングの開始点であるファーストボンドが導電パターン６に接続するボールボンディングにより行われ、終了点であるセカンドボンドが金属バンプ１５上に接続される。
【００２０】
半導体素子３の電極パッド１１と半導体素子５の電極パッド１３とは、導電ワイヤ１８により電気的に接続されている。導電ワイヤ１８は、ファーストボンドが電極パッド１１に接続するボールボンディングにより行われ、セカンドボンドが金属バンプ１６上に接続される。
【００２１】
導電ワイヤ１７のセカンドボンドと導電ワイヤ１８のファーストボンドは、電極パッド１１における異なる領域において行われている。
【００２２】
これら半導体素子３、半導体素子５、導電ワイヤ１７、導電ワイヤ１８は、封止樹脂１９により封止されている。
【００２３】
図２は図１の絶縁基板１、半導体素子３、半導体素子５のコーナー部を拡大した部分拡大図であり、半導体素子３の電極パッド１１における導電ワイヤ１７および導電ワイヤ１８の接続がこの図２に示される。
【００２４】
半導体素子３の電極パッド１１は、同一の電極パッド内で２箇所に導電ワイヤを接続するために、通常の電極パッドよりも大きく形成されている。電極パッド１１は、本実施例では、電極パッド１１は半導体素子３の辺近傍に設けられているとともに、この辺に沿って長い矩形形状を有している。電極パッド１１は、半導体素子３の辺近傍に設けられるとともに、この辺と直交する方向に長い矩形形状とすることも可能である。その場合は、下段の半導体素子３と上段の半導体素子５とを接続する導電ワイヤ１８が半導体素子３の辺から遠い側に、絶縁基板１と下段の半導体素子３とを接続する導電ワイヤ１７が半導体素子３の辺に近い側にそれぞれ接続される。電極パッド１１を辺と直交する方向に長く形成する場合は、平行な方向に長く形成する場合に比べて、上段の半導体素子５を搭載する領域が制限されるが、上段と下段の半導体素子を接続する導電ワイヤ１７が、これら半導体素子の辺に対して斜め方向に形成されている場合でも、隣り合う導電ワイヤとの短絡をより効果的に抑制できる。
【００２５】
また、導電ワイヤ１７および導電ワイヤ１８を互いに離間させて電極パッド１１上に接続できる程度に電極パッド１１を大きく形成してもよく、その場合は、導電ワイヤを形成する角度の自由度が向上する。
【００２６】
本実施例では、上段の半導体素子３の電極パッド１３を絶縁基板１の導電パターン６に直接接続せずに、下段の半導体素子５の電極パッド１１を介して導電パターン６に電気的に接続される。このため、電極パッド１３と導電パターン６とを直接接続する長い導電ワイヤを用いる必要がなくなり、隣り合う導電ワイヤ間の短絡を抑制することができる。
【００２７】
また、本実施例では、下段の半導体素子５の電極パッド１１を大きく形成し、上段の半導体素子５と下段の半導体素子３とを接続する導電ワイヤ１８と、下段の半導体素子３と絶縁基板１とを接続する導電ワイヤ１７とを、同一の電極パッド１１における異なる領域でそれぞれ接続している。このため、電極パッド１１におけるワイヤボンディングの際のストレスを低減することができる。
【００２８】
電極パッド１１の周囲は図示しないパッシベーション膜に覆われており、導電ワイヤ１７、導電ワイヤ１８がボンディングされる領域はパッシベーション膜が除去されている。本実施の形態では、矩形形状の電極パッド１１上で導電ワイヤ１７および導電ワイヤ１８による２箇所のボンディングが行われる。このため、パッシベーション膜が除去され、導電ワイヤがボンディングされる領域が電極パッド１１と略同一の矩形形状となる。しかしながら、電極パッド１１上でそれぞれの導電ワイヤの間隔が離れている場合などは、電極パッド１１上のパッシベーション膜に、それぞれの導電ワイヤに対応する２ヶ所の開口部を形成することも可能である。
【００２９】
図３は、本発明の第２の実施形態を示す図であり、図１および図２と同一構成要素には同一の符号が付けられている。
【００３０】
第２の実施形態では、第１の実施形態とは導電ワイヤの接続形態が異なっており、その他の構成は第１の実施形態と同じである。
【００３１】
図３において、下段の半導体素子３の電極パッド１１上には金属バンプ２１が形成されている。金属バンプ２１は、第１の実施形態における金属バンプ１５、１６と同様の方法で形成される。
【００３２】
下段の半導体素子３の電極パッド１１と絶縁基板１の導電パターン６とを接続する導電ワイヤ２２は、ファーストボンドが電極パッド１１で、セカンドボンドが導電パターン６でそれぞれ行われている。
【００３３】
上段の半導体素子５の電極パッド１３と下段の半導体素子３の電極パッド１１とを接続する導電ワイヤ２３は、ファーストボンドが上段の半導体素子５の電極パッド１３で、セカンドボンドが下段の半導体素子３の電極パッド１１上に形成された金属バンプ２１上でにそれぞれ行われる。
【００３４】
本実施形態においては、上段の半導体素子５の電極パッド１３にファーストボンドを行っており、上段の半導体素子５の電極パッド１３上に金属バンプを形成する必要がないため、金属バンプを形成する工数を削減できる。
【００３５】
図４および図５は、本発明の第３の実施形態を説明する図であり、図４は断面図、図５は部分的に拡大した斜視図である。
【００３６】
本実施形態において、図１および図２と同一の構成要件には同一の符号が付けられている。
【００３７】
本実施形態では、下段の半導体素子３の電極パッド３１上に金属バンプ３２が形成されており、下段の半導体素子３の電極パッド３１と絶縁基板１の導電パターン６とを接続する導電ワイヤ３３は、ファーストボンドが導電パターン６で、セカンドボンドが金属バンプ３２でそれぞれ行われている。
【００３８】
上段の半導体素子５の電極パッド３４には金属バンプ３５が形成されており、上段の半導体素子５の電極パッド３４と下段の半導体素子３の電極パッド３１とは、ファーストボンドが導電ワイヤ３３上で行われ、セカンドボンドが金属バンプ３５上で行われた導電ワイヤ３６により接続される。
【００３９】
第３の実施形態によれば、第１の半導体素子３の電極パッド３１上において、同一個所に導電ワイヤ３３のセカンドボンドと導電ワイヤ３６のファーストボンドとが重ねて行われるため、電極パッド３１の面積を大きくせずに上段の半導体素子５、下段の半導体素子３、絶縁基板１を接続することができる。
【００４０】
また、下段の半導体素子３側でファーストボンドを、上段の半導体素子５側でセカンドボンドを行って導電ワイヤ３６が形成されるため、半導体素子５上における導電ワイヤ３６のループが低くなる。このため、上段の半導体素子５上の封止樹脂１９を薄くすることができ、パッケージ全体としての薄型化を達成することができる。
【００４１】
次に、図６を用いて本発明の第４の実施形態を説明する。
【００４２】
図６において、図１および図２と同一の構成要件には同一の符号が付けられている。
【００４３】
第４の実施形態では、下段の半導体素子３の電極パッド４１上に金属バンプ４２が形成されている。
【００４４】
絶縁基板１と下段の半導体素子３とを接続する導電ワイヤ４３は、ファーストボンドが導電パターン６で、セカンドボンドが金属バンプ４２で行われている。
【００４５】
下段の半導体素子３と上段の半導体素子５とを接続する導電ワイヤ４６は、ファーストボンドが半導体素子５の電極パッド４４で、セカンドボンドが導電ワイヤ４３の接続された金属バンプ４２上で行われている。
【００４６】
本実施形態では、下段の半導体素子の電極パッドに形成された金属バンプ上で導電ワイヤ４３および導電ワイヤ４６の両方のセカンドボンドが行われている。
【００４７】
このため、本実施形態では、上段の半導体素子の電極パッドに金属バンプを形成することなく上段の半導体素子と下段の半導体素子、そして、下段の半導体素子と絶縁基板とを接続することが可能となる。このため、金属バンプを形成する工数を削減することができる。
【００４８】
本発明においては、絶縁基板上に半導体素子を積層する実施例について説明したが、これに限らず、一般に用いられるリードフレームを用いることも可能である。リードフレームを用いる場合は、本発明における導電パターン６としてインナーリードが用いられ、下段の半導体素子はダイパッドに固定される。
【００４９】
【発明の効果】
本発明に係る半導体装置では、下段の半導体素子の電極パッドを大きくし、絶縁基板と下段の半導体素子とを接続する導電ワイヤと、下段の半導体素子と上段の半導体素子とを接続する導電ワイヤとを、同一のパッドの異なる領域に形成している。このため、下段の半導体素子の電極パッドにおける導電ワイヤの接続を確実に行うことができるとともに、ワイヤボンディングにより電極パッド下部に与えられるストレスを低減することが可能となる。
【図面の簡単な説明】
【図１】本発明の第１の実施形態における半導体装置の断面図である。
【図２】本発明の第１の実施形態における半導体装置の部分拡大斜視図である。
【図３】本発明の第２の実施形態における半導体装置の部分拡大斜視図である。
【図４】本発明の第３の実施形態における半導体装置の断面図である。
【図５】本発明の第３の実施形態における半導体装置の部分拡大斜視図である。
【図６】本発明の第４の実施形態における半導体装置の部分拡大斜視図である。
【符号の説明】
１ 絶縁基板
２ 接着剤
３ 半導体素子
４ 接着剤
５ 半導体素子
６ 導電パターン
７ 導電パターン
８ ソルダレジスト
９ ソルダレジスト
１０ 金属バンプ
１１ 電極パッド
１２ パッシベーション膜
１３ 電極パッド
１４ パッシベーション膜
１５ 金属バンプ
１６ 金属バンプ
１７ 導電ワイヤ
１８ 導電ワイヤ
１９ 封止樹脂

Claims (13)

  1. 表面に導電パターンが形成された基板と、
    前記基板上に搭載された、第１の電極パッドと、該第１の電極パッドより小さい第２の電極パッドとを備え、該第１の電極パッドと該第２の電極パッドとが同じ辺に沿って整列配置された第１の半導体素子と、
    前記第１の半導体素子上に搭載された、第３の電極パッドを備えた第２の半導体素子と、
    前記第１の電極パッドの第１の領域と前記第３の電極パッドとを接続する第１のワイヤと、
    前記第１の電極パッドの前記第１の領域を除く第２の領域と前記導電パターンのうちの対応するものとを接続する第２のワイヤと、
    前記第２の電極パッドと前記導電パターンのうちの対応するものとを接続する第３のワイヤと、を含み、
    前記第１の電極パッドは、前記第１の半導体素子の辺方向に長い矩形状であることを特徴とする半導体装置。
  2. 表面に導電パターンが形成された基板と、
    前記基板上に搭載された、第１の電極パッドと、該第１の電極パッドより小さい第２の電極パッドとを備え、該第１の電極パッドと該第２の電極パッドとが同じ辺に沿って整列配置された第１の半導体素子と、
    前記第１の半導体素子上に搭載された、第３の電極パッドを備えた第２の半導体素子と、
    前記第１の電極パッドの第１の領域と前記第３の電極パッドとを接続する第１のワイヤと、
    前記第１の電極パッドの前記第１の領域を除く第２の領域と前記導電パターンのうちの対応するものとを接続する第２のワイヤと、
    前記第２の電極パッドと前記導電パターンのうちの対応するものとを接続する第３のワイヤと、を含み、
    前記第１の電極パッドは、前記第１の半導体素子の辺と直交する方向に長い矩形状であることを特徴とする半導体装置。
  3. 請求項１あるいは請求項２のいずれかに記載の半導体装置において、さらに前記基板の裏面に形成された外部端子を含み、前記導電パターンと前記外部端子とは前記基板に設けられた、前記基板の前記表面と前記裏面とを貫通する貫通孔を介して接続されることを特徴とする半導体装置。
  4. 請求項１あるいは請求項２のいずれかに記載の半導体装置において、前記第１のワイヤはファーストボンドが前記第３の電極パッドに接続され、セカンドボンドが前記第１の電極パッドに接続され、前記セカンドボンドは前記第１の電極パッド上に形成されたバンプを介して前記第１の電極パッドに接続されることを特徴とする半導体装置。
  5. 請求項１あるいは請求項２のいずれかに記載の半導体装置において、前記第１のワイヤはファーストボンドが前記第１の電極パッドに接続され、セカンドボンドが前記第３の電極パッドに接続され、前記セカンドボンドは前記第３の電極パッド上に形成されたバンプを介して前記第３の電極パッドに接続されることを特徴とする半導体装置。
  6. 請求項１あるいは請求項２のいずれかに記載の半導体装置において、前記第１の半導体素子は前記第２の半導体素子よりも大きい外形形状を有することを特徴とする半導体装置。
  7. 請求項１〜６のいずれか１項に記載の半導体装置において、前記第１のワイヤと前記第２のワイヤとは、前記第１の電極パッド上において互いに離間して接続されていることを特徴とする半導体装置。
  8. 第１の電極パッドと、該第１の電極パッドより小さい第２の電極パッドとを備え、該第１の電極パッドと該第２の電極パッドとが同じ辺に沿って整列配置された第１の半導体素子と、
    前記第１の半導体素子上に搭載された、第３の電極パッドを有する第２の半導体素子と、
    内部電極と、
    前記第１の電極パッドと前記第３の電極パッドとを接続する第１のワイヤと、
    前記内部電極のうちの対応するものと前記第１の電極パッドとを接続する第２のワイヤと、
    前記第２の電極パッドと前記内部電極のうちの対応するものとを接続する第３のワイヤと、を備え、
    前記第１の電極パッドは前記第１の半導体素子の辺方向に長い矩形状であり、前記第１のワイヤと前記第２のワイヤとは前記第１の電極パッド上で重ならないように配置されることを特徴とする半導体装置。
  9. 第１の電極パッドと、該第１の電極パッドより小さい第２の電極パッドとを備え、該第１の電極パッドと該第２の電極パッドとが同じ辺に沿って整列配置された第１の半導体素子と、
    前記第１の半導体素子上に搭載された、第３の電極パッドを有する第２の半導体素子と、
    内部電極と、
    前記第１の電極パッドと前記第３の電極パッドとを接続する第１のワイヤと、
    前記内部電極のうちの対応するものと前記第１の電極パッドとを接続する第２のワイヤと、
    前記第２の電極パッドと前記内部電極のうちの対応するものとを接続する第３のワイヤと、を備え、
    前記第１の電極パッドは前記第１の半導体素子の辺と直交する方向に長い矩形状であり、前記第１のワイヤと前記第２のワイヤとは前記第１の電極パッド上で重ならないように配置されることを特徴とする半導体装置。
  10. 請求項８あるいは請求項９のいずれかに記載の半導体装置において、前記第１のワイヤと前記第２のワイヤとは、前記第１の電極パッド上で互いに離間してそれぞれ前記第１の電極パッドに接続されていることを特徴とする半導体装置。
  11. 複数の半導体素子が積層され、これら半導体素子を封止する封止樹脂を有する半導体装置において、
    第１の電極パッドを有する第１の半導体素子と、
    前記複数の半導体素子のうちの最上段であり、かつ、前記第１の半導体素子上に搭載された、第２の電極パッドを有する第２の半導体素子と、
    内部電極と、
    前記第１の電極パッド上に形成された第１のバンプと、
    前記第２の電極パッド上に形成された第２のバンプと、
    前記内部電極でファーストボンドが行われ、セカンドボンドが前記第１のバンプ上で行われた第１のワイヤと、
    前記第１のワイヤのセカンドボンド上でファーストボンドが行われ、セカンドボンドが前記第２のバンプ上で行われた第２のワイヤとを含むことを特徴とする半導体装置。
  12. 請求項１１記載の半導体装置において、さらに基板を有し、前記内部電極は前記基板上に形成され、前記第１の半導体素子は前記基板上に搭載されていることを特徴とする半導体装置。
  13. 請求項１２記載の半導体装置において、前記基板の前記内部電極が形成された面と反対側の面に外部電極が形成され、前記外部電極と前記内部電極とは前記基板に形成された貫通孔を介して互いに接続されていることを特徴とする半導体装置。
JP2000296328A 2000-09-28 2000-09-28 半導体装置 Expired - Fee Related JP3631120B2 (ja)

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US7115977B2 (en) 2006-10-03
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US20070048903A1 (en) 2007-03-01
US8053278B2 (en) 2011-11-08

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