JP2018003122A5 - - Google Patents
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- JP2018003122A5 JP2018003122A5 JP2016133685A JP2016133685A JP2018003122A5 JP 2018003122 A5 JP2018003122 A5 JP 2018003122A5 JP 2016133685 A JP2016133685 A JP 2016133685A JP 2016133685 A JP2016133685 A JP 2016133685A JP 2018003122 A5 JP2018003122 A5 JP 2018003122A5
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- JP
- Japan
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- opening end
- port portion
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- evaporation port
- angle
- Prior art date
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- 238000001704 evaporation Methods 0.000 claims 2
- 238000007740 vapor deposition Methods 0.000 claims 1
Claims (1)
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016133685A JP6641242B2 (en) | 2016-07-05 | 2016-07-05 | Evaporator and evaporation source |
| KR1020170084996A KR102182869B1 (en) | 2016-07-05 | 2017-07-04 | Vapor deposition apparatus and evaporation source |
| CN202110723236.8A CN113416930A (en) | 2016-07-05 | 2017-07-05 | Evaporation source and film forming apparatus |
| CN201710539978.9A CN107574411B (en) | 2016-07-05 | 2017-07-05 | Evaporation device and evaporation source |
| KR1020200154533A KR102279411B1 (en) | 2016-07-05 | 2020-11-18 | Vapor deposition apparatus and evaporation source |
| KR1020210091561A KR102458193B1 (en) | 2016-07-05 | 2021-07-13 | Vapor deposition apparatus and evaporation source |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016133685A JP6641242B2 (en) | 2016-07-05 | 2016-07-05 | Evaporator and evaporation source |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2018003122A JP2018003122A (en) | 2018-01-11 |
| JP2018003122A5 true JP2018003122A5 (en) | 2019-02-07 |
| JP6641242B2 JP6641242B2 (en) | 2020-02-05 |
Family
ID=60948366
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016133685A Active JP6641242B2 (en) | 2016-07-05 | 2016-07-05 | Evaporator and evaporation source |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP6641242B2 (en) |
| KR (3) | KR102182869B1 (en) |
| CN (2) | CN113416930A (en) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6686069B2 (en) * | 2018-05-29 | 2020-04-22 | キヤノントッキ株式会社 | Evaporation source device, vapor deposition device, and vapor deposition system |
| JP7179635B2 (en) * | 2019-02-12 | 2022-11-29 | 株式会社アルバック | Evaporation source, vacuum processing apparatus, and deposition method |
| KR102696209B1 (en) * | 2019-03-20 | 2024-08-20 | 가부시키가이샤 코쿠사이 엘렉트릭 | Substrate processing apparatus, process vessel, reflector and method of manufacturing semiconductor device |
| KR20210061639A (en) * | 2019-11-20 | 2021-05-28 | 캐논 톡키 가부시키가이샤 | Film forming apparatus, film forming method and electronic device manufacturing method using the same |
| CN111378933B (en) * | 2020-04-27 | 2022-04-26 | 京东方科技集团股份有限公司 | Evaporation source, evaporation source system |
| JP7242626B2 (en) * | 2020-12-10 | 2023-03-20 | キヤノントッキ株式会社 | Deposition equipment |
| JP7291197B2 (en) * | 2021-07-15 | 2023-06-14 | キヤノントッキ株式会社 | Film forming apparatus, film forming method, and evaporation source unit |
| KR20230012415A (en) * | 2021-07-15 | 2023-01-26 | 캐논 톡키 가부시키가이샤 | Film forming apparatus, film forming method and evaporation source unit |
| JP7372288B2 (en) * | 2021-07-15 | 2023-10-31 | キヤノントッキ株式会社 | Film deposition equipment, film deposition method, and evaporation source |
| JP7509809B2 (en) | 2022-01-28 | 2024-07-02 | キヤノントッキ株式会社 | Evaporation source unit, film forming apparatus and film forming method |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004169066A (en) * | 2002-11-18 | 2004-06-17 | Sony Corp | Vapor deposition system |
| KR100687007B1 (en) * | 2005-03-22 | 2007-02-26 | 세메스 주식회사 | Apparatus for depositing organic film used in manufacturing organicelectro luminescence device |
| JP2010195034A (en) * | 2009-02-02 | 2010-09-09 | Ricoh Co Ltd | Inkjet recording apparatus |
| KR20120061394A (en) * | 2010-12-03 | 2012-06-13 | 삼성모바일디스플레이주식회사 | Evaporator and method for depositing organic material |
| KR20130073407A (en) * | 2011-12-23 | 2013-07-03 | 주식회사 원익아이피에스 | High temperature evaporation having outer heating container |
| WO2014020914A1 (en) * | 2012-08-02 | 2014-02-06 | パナソニック株式会社 | Organic el display panel and method for manufacturing same |
| KR102046440B1 (en) * | 2012-10-09 | 2019-11-20 | 삼성디스플레이 주식회사 | Depositing apparatus and method for manufacturing organic light emitting diode display using the same |
| KR102046441B1 (en) * | 2012-10-12 | 2019-11-20 | 삼성디스플레이 주식회사 | Depositing apparatus and method for manufacturing organic light emitting diode display using the same |
| CN104099571A (en) * | 2013-04-01 | 2014-10-15 | 上海和辉光电有限公司 | Evaporation source component, film deposition device and film deposition method |
| CN104099570B (en) * | 2013-04-01 | 2016-10-05 | 上海和辉光电有限公司 | Single-point linear evaporation origin system |
| KR101599505B1 (en) * | 2014-01-07 | 2016-03-03 | 주식회사 선익시스템 | Evaporation source for deposition apparatus |
| CN105177507B (en) * | 2015-09-08 | 2017-08-11 | 京东方科技集团股份有限公司 | Crucible and evaporated device is deposited |
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2016
- 2016-07-05 JP JP2016133685A patent/JP6641242B2/en active Active
-
2017
- 2017-07-04 KR KR1020170084996A patent/KR102182869B1/en active IP Right Grant
- 2017-07-05 CN CN202110723236.8A patent/CN113416930A/en active Pending
- 2017-07-05 CN CN201710539978.9A patent/CN107574411B/en active Active
-
2020
- 2020-11-18 KR KR1020200154533A patent/KR102279411B1/en active IP Right Grant
-
2021
- 2021-07-13 KR KR1020210091561A patent/KR102458193B1/en active IP Right Grant