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KR20130073407A - High temperature evaporation having outer heating container - Google Patents

High temperature evaporation having outer heating container Download PDF

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Publication number
KR20130073407A
KR20130073407A KR1020110141236A KR20110141236A KR20130073407A KR 20130073407 A KR20130073407 A KR 20130073407A KR 1020110141236 A KR1020110141236 A KR 1020110141236A KR 20110141236 A KR20110141236 A KR 20110141236A KR 20130073407 A KR20130073407 A KR 20130073407A
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KR
South Korea
Prior art keywords
evaporation
support member
high temperature
vessel
evaporation source
Prior art date
Application number
KR1020110141236A
Other languages
Korean (ko)
Inventor
김건
Original Assignee
주식회사 원익아이피에스
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 원익아이피에스 filed Critical 주식회사 원익아이피에스
Priority to KR1020110141236A priority Critical patent/KR20130073407A/en
Publication of KR20130073407A publication Critical patent/KR20130073407A/en

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B14/00—Crucible or pot furnaces
    • F27B14/08—Details peculiar to crucible or pot furnaces
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B14/00—Crucible or pot furnaces
    • F27B14/08—Details peculiar to crucible or pot furnaces
    • F27B14/14—Arrangements of heating devices
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B14/00—Crucible or pot furnaces
    • F27B14/08—Details peculiar to crucible or pot furnaces
    • F27B2014/0837—Cooling arrangements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B14/00—Crucible or pot furnaces
    • F27B14/08—Details peculiar to crucible or pot furnaces
    • F27B2014/0843—Lining or casing

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE: A high temperature evaporation source with an outer heating container is provided to prevent contamination due to evaporation materials even when the heating container is damaged or cracked. CONSTITUTION: A high temperature evaporation source with an outer heating container (400) comprises an inner heating container (200), an evaporation heater (300), and a support member (100). The inner heating container comprises inner and outer heating vessels. The evaporation heater is placed at the outer side of an evaporation container. The support member comprises a coolant path to prevent the heat emission from the evaporation heater. The upper side of the outer heating vessel is open, the inner heating vessel is inserted into the outer heating vessel. The shape of the inner diameter of the outer heating vessel corresponds to the shape of the outer diameter of the inner heating vessel.

Description

HIGH TEMPERATURE EVAPORATION HAVING OUTER HEATING CONTAINER}

The present invention relates to a thin film deposition apparatus, and more particularly, to a high temperature evaporation source capable of evaporating a high temperature material in the thin film deposition apparatus.

Thin film deposition apparatus mainly used in the manufacture of semiconductor devices or flat panel display devices by installing a crucible containing a deposition material in the lower portion of the container, and heating the crucible to evaporate the deposition material inside to deposit the thin film on the substrate located above It is a device for manufacturing.

In general, a thin film is manufactured by a vacuum heating deposition method in a thin film deposition apparatus. In vacuum heating deposition, a crucible containing an evaporation material is placed under a substrate in a vacuum vessel, and the crucible is heated to evaporate the evaporation material to coat the thin film on the substrate. Say how.

In such vacuum heating deposition, a method of heating the evaporation material of the evaporation vessel is used, such as indirect heating using a hot wire, direct heating to directly flow the evaporation vessel, or electron beam (E-beam) heating using an electron beam. Among them, the indirect heating method using a hot wire is widely used because the deposition control is stable.

The indirect heating deposition apparatus requires an evaporation vessel and a heating unit capable of heating it, and generally uses a cylindrical evaporation vessel and a filament-type heating unit surrounding the evaporation vessel. Although there is no great difficulty in heating the evaporation vessel to a temperature of about 800 ° C. by indirect heating using the filament as described above, an evaporation source when more heating is required may be referred to as a high temperature evaporation source. This high temperature evaporation source is mainly used when depositing a metal or inorganic material such as aluminum.

Such a high temperature evaporation source further increases the need for heating efficiency and protection of external devices by heat as compared to a low temperature evaporation source. In general, since the evaporation container receives high temperature heat, there is a risk of cracking or damage due to temperature change or impact, and thus, evaporation material may be introduced into the evaporation source and contaminate the peripheral device.

If such contamination occurs, there is a problem of non-economical cost and time to replace the entire configuration of the evaporation container as well as the high temperature evaporation source, even if the evaporation container is damaged in the high temperature evaporation source of the thin film deposition apparatus, contamination of peripheral devices A request is made for a structure that can prevent this.

An object of the present invention is devised to solve the above problems, including an external heating vessel having a structure that can prevent contamination by evaporation material of the peripheral device even if cracks or breakage of the evaporation vessel in the high temperature evaporation source. It is to provide a high temperature evaporation source.

The present invention is an evaporation vessel; An evaporation heater disposed at an outer circumferential side of the evaporation vessel; In the high temperature evaporation source comprising a support member for supporting the evaporation vessel, the evaporation vessel has a space for storing the evaporation material therein, the inner side of the inner heating vessel, the inner heating vessel is interpolated and the internal heating vessel Disclosed is a high temperature evaporation source comprising an external heating vessel which prevents the evaporation material from leaking out when it breaks.

The internal heating vessel may be spaced apart from each other so as to form a space between the external heating vessel.

The inner heating container includes a body portion in which evaporation material is accommodated in an inner space and a flange portion protruding outward from the upper end of the body portion, and the outer heating container includes an accommodating portion in which the inner heating container is accommodated in the inner space. It may be made of a support portion protruding from the upper end of the portion to the outer peripheral side.

The support part may be disposed in close contact with the lower side of the flange part and supported by the support member.

The support member may be disposed on an outer circumferential side of the evaporation heater, and a coolant flow path may be formed to prevent heat from being evaporated by the evaporation heater.

The support member includes an external support member disposed on an outer circumferential side of the evaporator heater, and an internal support member disposed between the external support member and the evaporator heater, wherein the support portion is supported by the external support member, and the flange portion It may be supported by the inner support member.

The inner support member may prevent heat from being emitted by the evaporator heater to the outside.

The external support member may have a refrigerant passage formed therein to prevent heat from being emitted by the evaporation heater to the outside.

The high temperature evaporation source including the external heating vessel according to the present invention is maintained because an external container is disposed as a protective device on the evaporation vessel, so that even if the evaporation vessel is damaged, contamination due to evaporation materials for the components forming the evaporation source can be prevented. It is effective in improving water retention.

1 is a side cross-sectional view showing a high temperature evaporation source including an external heating vessel according to an embodiment of the present invention.
Figure 2 is a side cross-sectional view showing a high temperature evaporation source including an external heating vessel according to another embodiment of the present invention.

Hereinafter, a high temperature evaporation source including an external heating container according to the present invention will be described in detail with reference to the accompanying drawings.

The high temperature evaporation source including the external heating vessel according to the present invention includes an internal heating vessel 200 as shown in FIG. 1; An evaporation heater 300 disposed at an outer circumferential side of the internal heating vessel 200; In the high temperature evaporation source 10 including a support member 100 for supporting the internal heating vessel 200, the internal heating vessel 200 has a space for storing evaporation material therein and the upper side of the internal heating High temperature, characterized in that the container 200, and the inner heating container 200 is interpolated and the outer heating container 400 to prevent the evaporation material is leaked to the outside when the internal heating container 200 is damaged The evaporation source 10 is disclosed.

The high temperature evaporation source 10 is a device used for vacuum heating deposition, and arranges an internal heating container 200 in the form of a crucible in which evaporation material is accommodated under a substrate in a vacuum container (not shown), and the internal heating container. An apparatus for coating a thin film on a substrate by evaporating an evaporation material by heating the 200 through the evaporation heater 300 may be used in various ways to deposit a metal material or an inorganic material such as aluminum.

In the high temperature evaporation source 10 of the present invention, there is shown an example of using a method of indirect heating by placing an evaporation heater 300 in the form of a hot wire on the outer circumferential side of the internal heating vessel 200 to heat the internal heating vessel 200. The arrangement of the evaporation heater 300 may be variously made according to a selection.

In the high temperature evaporation source 10 of the present invention, the internal heating vessel 200, the evaporation heater 300 and the external heating vessel 400 may be used in a variety of materials that can ensure durability at high temperatures, mutually different materials Or may be made of the same material. For example, a material such as tantalum, AlN, PBN, or tungsten may be used, but is not necessarily limited thereto.

The support member 100 is a member for supporting the internal heating vessel 200, and shields heat transfer from the internal heating vessel 200 and the evaporation heater 300 to the outside forming a housing of the high temperature evaporation source 10. It may mean a configuration such as a heat sink (500 of FIG. 2) or a frame inside the high temperature evaporation source 10 is disposed.

The support member 100 may be disposed on an outer circumferential side of the evaporator heater 300, and a coolant flow path may be formed to prevent heat from the evaporator heater 300 from dissipating to the outside.

The external heating vessel 400 may be open at an upper side thereof, and the internal heating vessel 200 may be inserted into and coupled to the upper side thereof, and the shape of the inner circumference may correspond to the shape of the outer circumference of the inner heating vessel 200.

Since the evaporation heater 300 is disposed on the outer circumferential side of the external heating vessel 400, the heat transferred from the evaporation heater 300 must be transferred to the internal heating vessel 200 to heat the evaporation material contained therein. The material constituting the external heating vessel 400 is preferably made of a material having high thermal conductivity and durability against heat.

In order to improve the thermal conductivity, the inner circumferential surface of the outer heating vessel 400 and the outer circumferential surface of the inner heating vessel 200 may be disposed in close contact with each other, but the inner heating vessel 200 may be disposed between the outer heating vessel 400. It is preferable to be spaced apart to form a space in the.

In addition, the bottom of the external heating vessel 400 may be disposed spaced apart from the bottom of the internal heating vessel 200, in this case, a predetermined distance between the bottom of the internal heating vessel 200 and the bottom of the external heating vessel 400. Space is formed.

The internal heating vessel 200 and the external heating vessel 400 may be made of different materials or may have different thicknesses. In this case, thermal expansion coefficients may be different from each other in the heating process by the evaporation heater 300, and the space may function as a free space in which the internal heating vessel 200 may be deformed.

2 shows an example in which such a spare space is provided, as shown by the arrow, even if the internal heating vessel 200 is deformed downward by thermal expansion, as much as the distance between the bottom surface of the external heating vessel 400. Safety can be ensured.

When the free space is formed as described above, when the bottom of the inner heating vessel 200 and the bottom of the outer heating vessel 400 are in close contact with each other, the risk of breakage caused by having different thermal expansion rates may be eliminated. Note that there is an advantage.

The spaced distance may be selectively made in consideration of the thermal expansion coefficient and the spatial arrangement relationship.

In addition, the internal heating vessel 200 may be composed of a body portion 202, the evaporation material is accommodated in the inner space, and a flange portion 201 protruding to the outer peripheral side from the upper end of the body portion 202, in this case The flange portion 201 may be supported by a supporting member such as a housing.

The external heating container 400 includes an accommodating part 402 for accommodating the internal heating container 200 in an internal space so as to correspond to the shape of the internal heating container 200, and a support part 401 protruding to the outer circumferential side of the accommodating part. It can be made, including.

The flange portion 201 and the support portion 401 may be formed in a ring shape protruding from the upper end of the cylindrical shape to the outer peripheral side.

In the embodiment of FIG. 1, an example in which the lower side of the flange portion 201 is supported on the upper side of the support portion 401 and the support member 100 supports the lower side of the support portion 401 is illustrated. In this case, the support member 100 may mean a heat sink as described above.

However, in such an embodiment, undesirable heat transfer may occur on the upper side of the internal heating vessel 200, so that a phenomenon in which the evaporated material overflows to the outside may occur. Explain.

2 is a side cross-sectional view showing a high temperature evaporation source including an external heating vessel according to another embodiment of the present invention, wherein the support portion 401 of the external heating vessel 400 is a flange portion 201 of the internal heating vessel 200. It may be disposed farther apart.

With such a structure has the advantage of minimizing heat transferred from the external heating vessel 400 to the upper end side of the internal heating vessel 200.

The support portion at the high temperature evaporation source 10 of the internal heating vessel 200 and the external heating vessel 400 may be different from each other. More specifically, the portion supporting the flange portion 201 is the high temperature evaporation source 10. It may be a portion of the cooling unit (not shown) or the housing (not shown) formed on the upper end side of the portion, the portion supporting the support portion 401 may be an internal support member (500).

The inner support member 500 may function as a kind of heat sink that prevents heat generated by the evaporation heater 300 from being scattered to the outside, and the outer support member 100 is formed with a coolant flow path as described above. Heat generated by the evaporation heater 300 may be prevented from being dissipated to the outside.

The support member described in FIG. 1 may include an external support member 100 and an internal support member 500 disposed between the external support member 100 and the evaporation heater 300.

Preferably, the outer support member 100 supporting the flange portion 201 may mean a cooling portion, in which case the temperature of the upper end side of the inner heating vessel 200 is made relatively lower than the body portion 202. Therefore, the phenomenon that the evaporation material boils over to the outside can be prevented, which prevents the evaporation material that is not vaporized on the substrate to improve the operation reliability and prevent the inflow of the evaporation material into the high temperature evaporation source 10. This means that the durability can be improved.

However, the flange portion 201 and the support portion 401 may of course be supported on different portions of the same member.

The inner support member 500 is formed in a cylindrical shape with an open upper side and is disposed to surround the outer circumferential side of the outer heating vessel 400, such that the inner heating vessel 200, the evaporation heater 300, and the outer heating vessel 400 are formed. It blocks the heat emitted from the device to the outside.

The inner support member 500 may be made of one plate or a plurality of plate materials.

In addition, the inner support member 500 may be disposed so as to be spatially shielded from the outside while receiving all the evaporation heater 300 in the space formed between the outer surface of the outer heating container 400.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the invention as defined in the appended claims. It is to be understood that both the technical idea and the technical spirit of the invention are included in the scope of the present invention.

10.High temperature evaporation source 100.Support member
200 ... inner heating vessel 300 ... evaporator
400.External heating vessel

Claims (8)

An evaporation vessel;
An evaporation heater disposed at an outer circumferential side of the evaporation vessel;
In the high temperature evaporation source comprising a support member for supporting the evaporation vessel,
The evaporation vessel has a space for storing evaporation material therein and the upper side is an internal heating vessel,
High temperature evaporation source characterized in that the internal heating container is interpolated and comprises an external heating container to prevent the evaporation material to flow out when the internal heating container is broken. The method according to claim 1,
The internal heating container is a high temperature evaporation source, characterized in that spaced apart so as to form a space between the external heating container. The method according to claim 1,
The inner heating container is composed of a body portion for receiving evaporation material in the inner space and a flange portion protruding to the outer peripheral side from the upper end of the body portion,
The external heating vessel is a high temperature evaporation source, characterized in that consisting of a receiving portion for receiving the inner heating container in the inner space and a support portion protruding from the upper end of the receiving portion to the outer peripheral side. The method according to claim 3,
The support portion is disposed in close contact with the lower side of the flange portion is a high temperature evaporation source, characterized in that supported by the support member. The method of claim 4,
The support member is disposed on the outer circumferential side of the evaporator heater, the coolant flow path is formed, characterized in that the heat by the evaporator heater to prevent the heat dissipation to the outside. The method according to claim 3,
The support member is composed of an outer support member disposed on the outer circumferential side of the evaporator heater, and an inner support member disposed between the outer support member and the evaporator heater,
The support portion is supported by the outer support member, the high temperature evaporation source, characterized in that the flange is supported by the inner support member. The method of claim 6,
The internal support member is a high temperature evaporation source, characterized in that to prevent the heat by the evaporation heater is dissipated to the outside. The method of claim 6,
The external support member is a high temperature evaporation source, characterized in that the refrigerant flow path is formed to prevent the heat by the evaporation heater is dissipated to the outside.
KR1020110141236A 2011-12-23 2011-12-23 High temperature evaporation having outer heating container KR20130073407A (en)

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Application Number Priority Date Filing Date Title
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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104018123A (en) * 2014-06-16 2014-09-03 深圳市华星光电技术有限公司 Heater capable of detecting and preventing leakage of high-temperature metal material
CN104018121A (en) * 2014-05-14 2014-09-03 深圳市华星光电技术有限公司 Heating container for preventing leakage of high-temperature metal material and manufacturing method thereof
KR20150029147A (en) * 2013-09-09 2015-03-18 주식회사 원익아이피에스 evaporation source and thin flim deposition apparatus having the same
WO2017104885A1 (en) * 2015-12-18 2017-06-22 주식회사 선익시스템 Crucible for metal thin film deposition and evaporation source for metal thin film deposition
KR20180005129A (en) * 2016-07-05 2018-01-15 캐논 톡키 가부시키가이샤 Vapor deposition apparatus and evaporation source
KR20180078486A (en) * 2016-12-30 2018-07-10 주식회사 에스에프에이 Heating unit, evaporation source having the same and method for assembling the same

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20150029147A (en) * 2013-09-09 2015-03-18 주식회사 원익아이피에스 evaporation source and thin flim deposition apparatus having the same
CN104018121A (en) * 2014-05-14 2014-09-03 深圳市华星光电技术有限公司 Heating container for preventing leakage of high-temperature metal material and manufacturing method thereof
CN104018123A (en) * 2014-06-16 2014-09-03 深圳市华星光电技术有限公司 Heater capable of detecting and preventing leakage of high-temperature metal material
WO2017104885A1 (en) * 2015-12-18 2017-06-22 주식회사 선익시스템 Crucible for metal thin film deposition and evaporation source for metal thin film deposition
CN108713262A (en) * 2015-12-18 2018-10-26 铣益系统有限责任公司 Crucible for deposit metal films and the evaporation source for deposit metal films
CN108713262B (en) * 2015-12-18 2021-02-26 铣益系统有限责任公司 Crucible for metal film deposition and evaporation source for metal film deposition
KR20180005129A (en) * 2016-07-05 2018-01-15 캐논 톡키 가부시키가이샤 Vapor deposition apparatus and evaporation source
KR20200132814A (en) * 2016-07-05 2020-11-25 캐논 톡키 가부시키가이샤 Vapor deposition apparatus and evaporation source
KR20180078486A (en) * 2016-12-30 2018-07-10 주식회사 에스에프에이 Heating unit, evaporation source having the same and method for assembling the same

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