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JPS56113115A - Sample table for immersion system microscope - Google Patents

Sample table for immersion system microscope

Info

Publication number
JPS56113115A
JPS56113115A JP1693280A JP1693280A JPS56113115A JP S56113115 A JPS56113115 A JP S56113115A JP 1693280 A JP1693280 A JP 1693280A JP 1693280 A JP1693280 A JP 1693280A JP S56113115 A JPS56113115 A JP S56113115A
Authority
JP
Japan
Prior art keywords
sample
recess part
liquid chamber
sample table
immersion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1693280A
Other languages
Japanese (ja)
Other versions
JPS6116048B2 (en
Inventor
Sunao Nishioka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP1693280A priority Critical patent/JPS56113115A/en
Publication of JPS56113115A publication Critical patent/JPS56113115A/en
Publication of JPS6116048B2 publication Critical patent/JPS6116048B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/24—Base structure
    • G02B21/26—Stages; Adjusting means therefor

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Microscoopes, Condenser (AREA)

Abstract

PURPOSE:To easily observe even a sample having a wide area, by forming a recess part for immersion, on the sample table, providing plural communicating holes on the bottom in the recess part, and constituting the table so that a sample is absorbed and fixed. CONSTITUTION:A sample receiving recess part 3 is formed on the upper surface of the base 1 of a sample table, and its bottom face 3a and the lower liquid chamber 4 are connected by plural communicating holes 5. On one end of the liquid chamber is provided a cylinder 6 into which a plunger 7 is inserted. A vacuum suction device 9 is connected to the cylinder 6. Both the recess part 3 and the liquid chamber 4 are filled with a medium for immersion, and a sample 10 is placed in the recess part 3 so that it is observed through the objective lens 11. In this way, even a sample having a large area such as a silicon wafer can be observed easily.
JP1693280A 1980-02-13 1980-02-13 Sample table for immersion system microscope Granted JPS56113115A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1693280A JPS56113115A (en) 1980-02-13 1980-02-13 Sample table for immersion system microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1693280A JPS56113115A (en) 1980-02-13 1980-02-13 Sample table for immersion system microscope

Publications (2)

Publication Number Publication Date
JPS56113115A true JPS56113115A (en) 1981-09-05
JPS6116048B2 JPS6116048B2 (en) 1986-04-28

Family

ID=11929888

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1693280A Granted JPS56113115A (en) 1980-02-13 1980-02-13 Sample table for immersion system microscope

Country Status (1)

Country Link
JP (1) JPS56113115A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1161702A1 (en) * 1999-02-17 2001-12-12 Lucid, Inc. Tissue specimen holder
DE102004033208A1 (en) * 2004-07-09 2006-02-02 Leica Microsystems Semiconductor Gmbh Device for inspecting a microscopic component with an immersion objective
DE102004033195A1 (en) * 2004-07-09 2006-02-23 Leica Microsystems Semiconductor Gmbh Device for inspecting a microscopic component
US7375792B2 (en) 2003-09-23 2008-05-20 Leica Microsystems Semiconductor Gmbh Apparatus for measuring feature widths on masks for the semiconductor industry
WO2023015740A1 (en) * 2021-08-13 2023-02-16 长鑫存储技术有限公司 Measurement standard device and preparation method therefor

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1161702A1 (en) * 1999-02-17 2001-12-12 Lucid, Inc. Tissue specimen holder
JP2002537579A (en) * 1999-02-17 2002-11-05 ルーシド インコーポレーテッド Tissue specimen holder
EP1161702A4 (en) * 1999-02-17 2007-10-24 Lucid Inc Tissue specimen holder
US9128024B2 (en) 1999-02-17 2015-09-08 Caliber Imaging & Diagnostics, Inc. Tissue specimen holder
US7375792B2 (en) 2003-09-23 2008-05-20 Leica Microsystems Semiconductor Gmbh Apparatus for measuring feature widths on masks for the semiconductor industry
DE10343876B4 (en) * 2003-09-23 2011-01-13 Vistec Semiconductor Systems Gmbh Device for measuring feature widths on masks for the semiconductor industry
DE102004033208A1 (en) * 2004-07-09 2006-02-02 Leica Microsystems Semiconductor Gmbh Device for inspecting a microscopic component with an immersion objective
DE102004033195A1 (en) * 2004-07-09 2006-02-23 Leica Microsystems Semiconductor Gmbh Device for inspecting a microscopic component
DE102004033208B4 (en) * 2004-07-09 2010-04-01 Vistec Semiconductor Systems Gmbh Device for inspecting a microscopic component with an immersion objective
WO2023015740A1 (en) * 2021-08-13 2023-02-16 长鑫存储技术有限公司 Measurement standard device and preparation method therefor

Also Published As

Publication number Publication date
JPS6116048B2 (en) 1986-04-28

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