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Hitachi Ltd
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Hitachi Ltd
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Application filed by Hitachi LtdfiledCriticalHitachi Ltd
Priority to JP1426277ApriorityCriticalpatent/JPS5399872A/en
Publication of JPS5399872ApublicationCriticalpatent/JPS5399872A/en
PURPOSE: The upper holding surface of the plate holder which holds several mask plates, semiconductor wafers, etc., upright is slanted to give the difference in level to the upper tips of gates mounted, thereby causing the jig to pick them up easily.