JPS55140126A - Semiconductor pressure sensor - Google Patents
Semiconductor pressure sensorInfo
- Publication number
- JPS55140126A JPS55140126A JP4795379A JP4795379A JPS55140126A JP S55140126 A JPS55140126 A JP S55140126A JP 4795379 A JP4795379 A JP 4795379A JP 4795379 A JP4795379 A JP 4795379A JP S55140126 A JPS55140126 A JP S55140126A
- Authority
- JP
- Japan
- Prior art keywords
- chip
- semiconductor chip
- package
- electrodes
- pressure chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
PURPOSE: To enable the use of small chips and make the assembling work easier by an arrangement wherein lead members for leading out the electrodes of the semiconductor chip are provided in a container in which the semoconductor is airtightly enclosed to form the reference pressure chamber.
CONSTITUTION: A semiconductor chip 13 is placed on the surface of a ceramic plate 11 having a through hole 12 at its center in such a manner that the chip will colse the through hole 12. Lead members 17 are provided at both sides of the chip and connected to electrodes of the semiconductor chip 13. Then, a cap 18 made of ceramic or others is adhered on the ceramic plate 11 with the aid of glass 19 at its upper side so as to airtightly enclose the chip therein. Thus formed inner space is vacuumed. In such a way, the semiconductor chip 13 is assembled into a package and the interior space of the package can be used as a reference pressure chamber. Therefore, design freedom for the chip is increased and chips with small dimension can be used, while providing the simple assembling work.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4795379A JPS55140126A (en) | 1979-04-20 | 1979-04-20 | Semiconductor pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4795379A JPS55140126A (en) | 1979-04-20 | 1979-04-20 | Semiconductor pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS55140126A true JPS55140126A (en) | 1980-11-01 |
Family
ID=12789710
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4795379A Pending JPS55140126A (en) | 1979-04-20 | 1979-04-20 | Semiconductor pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS55140126A (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53125879A (en) * | 1977-04-08 | 1978-11-02 | Toyoda Chuo Kenkyusho Kk | Pressure converter |
-
1979
- 1979-04-20 JP JP4795379A patent/JPS55140126A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53125879A (en) * | 1977-04-08 | 1978-11-02 | Toyoda Chuo Kenkyusho Kk | Pressure converter |
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