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JPS5375866A - Wafer transfer device - Google Patents

Wafer transfer device

Info

Publication number
JPS5375866A
JPS5375866A JP15093976A JP15093976A JPS5375866A JP S5375866 A JPS5375866 A JP S5375866A JP 15093976 A JP15093976 A JP 15093976A JP 15093976 A JP15093976 A JP 15093976A JP S5375866 A JPS5375866 A JP S5375866A
Authority
JP
Japan
Prior art keywords
wafer
transfer device
wafer transfer
holder
grvity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15093976A
Other languages
Japanese (ja)
Inventor
Masakuni Akiba
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP15093976A priority Critical patent/JPS5375866A/en
Publication of JPS5375866A publication Critical patent/JPS5375866A/en
Pending legal-status Critical Current

Links

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  • Delivering By Means Of Belts And Rollers (AREA)

Abstract

PURPOSE: To avert damaging and contaminating of wafers by chucking a wafer with the suction holes provided to a wafer holder and breaking the vacuum when the holder is positioned over a cartridge jig or placement base thereby allowing the wafer tofall into respective grooves by grvity.
COPYRIGHT: (C)1978,JPO&Japio
JP15093976A 1976-12-17 1976-12-17 Wafer transfer device Pending JPS5375866A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15093976A JPS5375866A (en) 1976-12-17 1976-12-17 Wafer transfer device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15093976A JPS5375866A (en) 1976-12-17 1976-12-17 Wafer transfer device

Publications (1)

Publication Number Publication Date
JPS5375866A true JPS5375866A (en) 1978-07-05

Family

ID=15507706

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15093976A Pending JPS5375866A (en) 1976-12-17 1976-12-17 Wafer transfer device

Country Status (1)

Country Link
JP (1) JPS5375866A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0047132A2 (en) * 1980-09-02 1982-03-10 Heraeus Quarzschmelze Gmbh Method of and apparatus for transferring semiconductor wafers between carrier members
JPS5870546A (en) * 1981-10-23 1983-04-27 Hitachi Ltd Articles transfer system
US4457661A (en) * 1981-12-07 1984-07-03 Applied Materials, Inc. Wafer loading apparatus

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0047132A2 (en) * 1980-09-02 1982-03-10 Heraeus Quarzschmelze Gmbh Method of and apparatus for transferring semiconductor wafers between carrier members
US4431361A (en) * 1980-09-02 1984-02-14 Heraeus Quarzschmelze Gmbh Methods of and apparatus for transferring articles between carrier members
JPS5870546A (en) * 1981-10-23 1983-04-27 Hitachi Ltd Articles transfer system
US4457661A (en) * 1981-12-07 1984-07-03 Applied Materials, Inc. Wafer loading apparatus

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