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WO2007125939A1 - 配線接続用クラッド材及びそのクラッド材から加工された配線接続部材 - Google Patents

配線接続用クラッド材及びそのクラッド材から加工された配線接続部材 Download PDF

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Publication number
WO2007125939A1
WO2007125939A1 PCT/JP2007/058913 JP2007058913W WO2007125939A1 WO 2007125939 A1 WO2007125939 A1 WO 2007125939A1 JP 2007058913 W JP2007058913 W JP 2007058913W WO 2007125939 A1 WO2007125939 A1 WO 2007125939A1
Authority
WO
WIPO (PCT)
Prior art keywords
layer
wiring
conductive layer
wiring connection
clad material
Prior art date
Application number
PCT/JP2007/058913
Other languages
English (en)
French (fr)
Inventor
Kazuhiro Shiomi
Masaaki Ishio
Original Assignee
Neomax Materials Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Neomax Materials Co., Ltd. filed Critical Neomax Materials Co., Ltd.
Priority to US12/296,735 priority Critical patent/US20090272577A1/en
Priority to JP2008513230A priority patent/JPWO2007125939A1/ja
Publication of WO2007125939A1 publication Critical patent/WO2007125939A1/ja
Priority to US13/235,674 priority patent/US20120006884A1/en

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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/22—Secondary treatment of printed circuits
    • H05K3/222—Completing of printed circuits by adding non-printed jumper connections
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/34—Strap connectors, e.g. copper straps for grounding power devices; Manufacturing methods related thereto
    • H01L24/36—Structure, shape, material or disposition of the strap connectors prior to the connecting process
    • H01L24/37—Structure, shape, material or disposition of the strap connectors prior to the connecting process of an individual strap connector
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    • H01—ELECTRIC ELEMENTS
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    • H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/34—Strap connectors, e.g. copper straps for grounding power devices; Manufacturing methods related thereto
    • H01L24/39—Structure, shape, material or disposition of the strap connectors after the connecting process
    • H01L24/40—Structure, shape, material or disposition of the strap connectors after the connecting process of an individual strap connector
    • H—ELECTRICITY
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    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L24/84—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a strap connector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R13/00—Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
    • H01R13/02—Contact members
    • H01R13/03—Contact members characterised by the material, e.g. plating, or coating materials
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
    • H05K3/341—Surface mounted components
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    • H01L2224/34—Strap connectors, e.g. copper straps for grounding power devices; Manufacturing methods related thereto
    • H01L2224/39—Structure, shape, material or disposition of the strap connectors after the connecting process
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    • H01L2224/401—Disposition
    • H01L2224/40151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/40221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/40225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
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    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
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    • H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
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    • H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/495—Lead-frames or other flat leads
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    • H01L2924/0001—Technical content checked by a classifier
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    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
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    • H05K2201/10363—Jumpers, i.e. non-printed cross-over connections
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    • H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
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    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
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    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Definitions

  • the present invention relates to a wiring connecting member that electrically connects an electrode portion of a semiconductor element and an external wiring portion and the like, and a wiring connecting clad material suitable as a material for the wiring connecting member.
  • an electrode part of a semiconductor element and an external wiring part are connected by a copper strip wiring material.
  • the connection of the copper strip wiring material is generally performed by soldering. Soldering is performed after placing the end portion of the copper strip wiring material on the electrode portion of the semiconductor element constituting the semiconductor device (intermediate product) and the external wiring portion provided on the substrate of the semiconductor device via the solder material. Force that may be performed by heating the entire semiconductor device in an inert gas furnace Generally, a copper strip that is soldered using a local heating device with a pressure heating unit such as a soldering iron This is done by heating while pressing the end of the wiring material.
  • Patent Document 1 Japanese Patent Laid-Open No. 6-268027
  • Patent Document 2 Japanese Patent Laid-Open No. 11-163045
  • Patent Document 3 Japanese Patent Laid-Open No. 2002-43508
  • the copper strip wiring material is generally soldered to the electrode portion or the external wiring portion of the semiconductor element by heating while pressing the upper surface of the end portion.
  • This method is simple and requires low equipment costs, but has the following problems. That is, when the copper band wiring material is heated while being pressed using a local heating device, the solder material provided between the copper band wiring material and the electrode portion or the like is melted, and the molten solder becomes the copper band wiring material. It is pushed out from between the electrodes and so on, and spreads on the outer surface of the copper strip wiring material. As a result, the molten solder often adheres to the pressure heating part of the local heating device.
  • the present invention has been made in view of an enormous problem, and an object of the present invention is to provide a wiring material excellent in soldering workability and a material thereof in which molten solder does not adhere to the pressing heating portion of the local heating device. To do.
  • the wiring connecting clad material of the present invention is formed of a conductive layer made of a metal having a pure AU and excellent conductivity and a pure A1 or A1 alloy, and is laminated on one surface of the conductive layer. And a surface layer.
  • the wiring connection member of the present invention is soldered to the first connection end portion having a conductive layer soldered to the electrode portion of the semiconductor element, and to the electrode portion of the other semiconductor element or the external wiring portion.
  • a surface layer formed of pure A1 or A1 alloy is provided on the conductor layer. Since a dense oxide film is naturally formed in the air on the surface of the surface layer, a solder material is disposed between the conductor layer of the wiring connection member and the electrode portion of the semiconductor element, and the wiring member.
  • the pressing material is pressed from above the surface layer to melt the solder material and the conductive layer and the electrode part are soldered by the molten solder, the molten solder is connected between the electrode part and the wiring connection member. Even if it is extruded from between, it does not wet and spread on the surface of the surface layer on which the dense A1 oxide film is formed. For this reason, molten solder does not adhere to the pressing and heating unit, and no solder flaw removal work is required for the pressing and heating unit. Therefore, the soldering workability and the productivity are excellent.
  • solder layer can be laminated on the other surface of the conductive layer.
  • This solder layer can be easily formed by melting and soldering the two-layer clad material in which the conductor layer and the surface layer are laminated.
  • preparing a separate solder material and placing it on the part to be soldered can be cumbersome.
  • solder layer in advance, such a complicated operation becomes unnecessary and the soldering workability is further improved.
  • the conductor layer is preferably formed of pure Cu or a Cu alloy.
  • the layer thickness of the surface layer is preferably about 5 to 30 m, and the layer thickness of the conductive layer is preferably about 50 to 25 O ⁇ m.
  • a plurality of first connection ends and Z or a plurality of second connection ends can be provided.
  • FIG. 1 is a cross-sectional view of a clad material for wiring connection according to an embodiment of the present invention.
  • FIG. 2 is a perspective view of a wiring connecting member according to an embodiment of the present invention.
  • FIG. 3 is a partial cross-sectional side view of a semiconductor device soldered to a wiring connection member according to an embodiment.
  • FIG. 4 is a perspective view of another wiring connecting member.
  • FIG. 5 is a partial longitudinal sectional view showing a soldering test procedure.
  • FIG. 1 shows a cross section of a strip-like clad material 1 for wiring connection according to an embodiment.
  • the conductive layer 2 is also excellent in conductivity with pure AU, the surface layer 3 laminated on one surface of the conductive layer 2 by pressure welding and diffusion bonding, and the other layer on the other surface of the conductive layer 2 Solder layer 4 is provided.
  • the conductive layer 2 can be made of various metals having pure AU and low electrical resistance, such as pure Cu, pure Ag, and alloys containing these as main components. In view of material costs, pure Cu is the most preferable, but Cu-Ag alloys, Cu-P alloys, Cu-Sn alloys, Cu-Zn alloys, etc. containing Cu of 95 mass% or more contain the main component of Cu. Can also be used.
  • the thickness of the conductive layer 2 is preferably at least about 50 m in order to ensure a sufficient current capacity. On the other hand, it is not necessary to increase the thickness to more than 300 ⁇ m, and preferably about 100 to 250 ⁇ m.
  • the surface layer is made of pure A1 or A1 alloy.
  • A1 alloy a dense aluminum oxide film is naturally formed on the surface in the atmosphere, and therefore the type thereof is not limited, but a corrosion-resistant A1 alloy having good workability and corrosion resistance is preferable.
  • pure A1 1050, 1060, 1085, 1080, 1070, 1N99, 1N90, etc. specified by JIS can be used, and as corrosion-resistant anoroleum alloy, 5052, 3003, 6061 or the like can be used. Since the surface layer only needs to be formed with a dense aluminum oxide film on its surface, it is sufficient if the thickness is about several / zm which is not important. From the viewpoint of ease of production, the thickness of the surface layer is preferably about 5 to 30 / zm.
  • solder for forming the solder layer 4 a solder having a melting point of about 130 to 300 ° C is preferable.
  • Omass% Ag— 5 to 8 mass% In alloy Sn—1.0 to 5.
  • Omass% Ag—40 to 50 mass% Bi alloy, Sn—40 to 50 mass% Bi alloy, Sn—1.0 to 5.0 mass% Ag —40-50 mass% Bi—5-8 mass% In alloy or the like is used.
  • Pb is harmful to the human body and may contaminate the natural environment.
  • Pb-free Sn-Ag alloys, Sn-Ag-Cu alloys, Sn-Cu alloys, Sn-Ag-In alloys A solder such as Sn—Ag—Bi alloy is preferable.
  • the thickness of the solder layer is usually about 50 to 200.
  • the clad material is manufactured as follows. The conductive layer material sheet and the surface layer material sheet that are the basis of the conductive layer 2 and the surface layer 3 are prepared, and these are overlapped and cold-welded with a roll at a rolling reduction of 60 to 80%, and the obtained pressure-contact is obtained.
  • the conductive layer and the surface layer of the pressure welding material are diffusion bonded to each other.
  • the two-layer clad material thus obtained is slit with an appropriate width (usually about 2 to 4 mm), and the obtained strip material is passed through a molten solder bath, and the solder layer is melted and attached to the surface of the conductive layer. .
  • a clad material having a three-layer structure provided with a solder layer is obtained. Although solder adheres to the side surface of the conductive layer due to the molten solder contact, it is not shown in FIG.
  • the strip-shaped clad material manufactured as described above is cut into an appropriate length, bent as shown in FIG.
  • the wiring connecting member 5 has the same cross-sectional structure because the clad material is also cut, and in FIG. 2, the same components as those of the clad material are denoted by the same reference numerals. ing.
  • the wiring connection member 5 has a flat first connection end 6 and a second connection end 7 formed at both ends thereof, and the first connection end 6 through the first leg 8, the connection 9, The second connection end 7 is coupled via the two legs 10.
  • Insulating layers 12 and 13 are provided on a substrate 11 such as a copper plate, and a power semiconductor element 14 and an external wiring portion 16 also having copper power are provided thereon.
  • the power semiconductor element 14 is provided with an electrode portion 15 such as a metallized layer cover.
  • the electrode portion 15 and the conductive layer 2 of the first connecting end 6 of the wiring connecting member 5 and the external wiring portion. 16 and the conductive layer 2 of the second connection end 7 of the wiring connection member are soldered by melting and solidifying the solder layer 4 so that they are electrically connected. The soldering is performed by bringing a pressing heating portion of a local heating device into contact with the surface layer 3 of the first and second connection end portions 6 and 7 and heating while pressing.
  • the two-layer clad material is slit and force-soldered soldering is performed to form a soldered layer. May be slit to an appropriate width.
  • the strip piece as the material of the wiring connecting member may be manufactured by manufacturing a flat wiring connecting clad material and then punching it.
  • the solder layer it may be laminated by other methods, for example, the clad method or the printing method, without depending on the molten solder contact.
  • the shape of the wiring connecting member is arbitrary.
  • the first leg portion 8, the connecting portion 9, and the second leg portion 10 may be integrally formed in an arch shape.
  • a plurality (two in the illustrated example) of connecting end portions 6 and 7 may be provided in a comb-tooth shape on both sides of the wiring connecting member 5A.
  • a plurality of connection end portions are provided on both sides of the wiring connection member 5A, but a plurality of connection end portions may be provided only on one side.
  • the wiring connecting clad material of the present invention has the conductive layer 2 and the surface layer 3 that do not necessarily require the solder layer 4. Even a two-layer clad material.
  • soldering is performed by placing a solder material between the conductive layer of the wiring connection member and the electrode part of the semiconductor element. To do.
  • a pure Cu sheet with a thickness of 0.95mm and a pure A1 sheet with a thickness of 0.05mm were overlapped and cold-welded with a roll at a rolling reduction of 70%.
  • the pressure-welded material was 400 ° C for 2 minutes.
  • a two-layer clad material was obtained in which the Cu layer (conducting layer) and A1 layer (surface layer) were diffusion bonded. Furthermore, this was cold-rolled to produce a two-layer clad material (Cu layer: 190 m, A1 layer: 10 m) with a thickness of 200 ⁇ m and punched with a press to produce a 6 mm diameter solder. An attached test piece was obtained.
  • soldering test pieces 21 are laminated on a circular solder sheet 22 having a composition shown in Table 1 and having a thickness of 100 / zm and a diameter of 6 mm. Placed on top of 23.
  • the Cu layer was on the solder sheet side.

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Abstract

［課題］局部加熱装置の押圧加熱部に溶融はんだが付着せず、はんだ付け作業性に優れた配線材、その素材を提供する。 ［解決手段］本発明の配線接続用クラッド材１は、純Ａｌよりも導電性に優れた純ＣｕあるいはＣｕ合金で形成された導電層(２)と、純ＡｌあるいはＡｌ合金で形成され、前記導電層(２)の一方の表面に積層された表面層(３)と、前記導電層(２)の他方の表面に溶融はんだめっきされたはんだ層(４)を備える。また、本発明の配線接続部材は、半導体素子の電極部にはんだ付けされる導電層を備えた第１接続端部と、外部配線部等にはんだ付けされる導電層を備えた第２接続端部とを有し、前記配線接続用クラッド材１から加工されたものである。

Description

明 細 書
配線接続用クラッド材及びそのクラッド材カゝら加工された配線接続部材 技術分野
[0001] 本発明は、半導体素子の電極部と外部配線部等とを電気的に接続する配線接続 部材およびその素材として好適な配線接続用クラッド材に関する。
背景技術
[0002] 従来、電力用半導体素子、例えば電力用ダイオードや IGBT(Insulated Gate Bipol ar Transister)の電極部同士、あるいは半導体素子の電極部と外部配線部とを接続 するには、アルミニウムワイヤを用いてその接続端部を電極部や外部配線部に超音 波接合 (ワイヤボンディング)する方法が採られていた。しかし、ワイヤボンディングに よる接合は信頼性が低ぐまたアルミニウムワイヤでは許容電流が大きく取れない、な どの問題があった。
[0003] このため、近年、アルミニウムワイヤによるワイヤボンディングに代わって、特開平 6 — 268027号公報 (特許文献 1)、特開平 11— 163045号公報 (特許文献 2)、特開 2 002— 43508号公報 (特許文献 3)に記載されているように、半導体素子の電極部と 外部配線部とを銅帯配線材により接続することが行われて ヽる。前記銅帯配線材の 接続は、一般的にはんだ付けによって行われる。はんだ付けは、銅帯配線材の端部 をはんだ材を介して半導体装置（中間品）を構成する半導体素子の電極部と前記半 導体装置の基板に設けられた外部配線部に配置した後、その半導体装置全体を不 活性ガス炉にて加熱することにより行われる場合もある力 一般的には、はんだごて などの押圧加熱部を備えた局部加熱装置を用いて、はんだ付けを行う銅帯配線材の 端部を押圧しながら加熱することにより行われる。
特許文献 1：特開平 6 - 268027号公報
特許文献 2：特開平 11― 163045号公報
特許文献 3 :特開 2002— 43508号公報
発明の開示
発明が解決しょうとする課題 [0004] 上記のように、銅帯配線材は、一般的に、その端部の上面を加圧しながら加熱する ことで、半導体素子の電極部や外部配線部にはんだ付けされる。この方法は簡便で あり、設備コストも低廉で済むが、以下の問題がある。すなわち、局部加熱装置を用 いて銅帯配線材を押圧しながら加熱すると、銅帯配線材と電極部等との間に設けら れたはんだ材が溶融し、その溶融はんだが銅帯配線材と電極部等との間から押し出 され、銅帯配線材の外表面に濡れ広がる。その結果、しばしば溶融はんだが局部加 熱装置の押圧加熱部に付着する。このため、繰り返してはんだ付けを行うと、押圧力口 熱部にはんだ滓が堆積して汚損される。このようになると、はんだ滓を除去することが 必要になり、さらに除去作業の間、はんだ付け作業を中断しなければならない。その 結果、生産性の低下を余儀なくされる。
[0005] 本発明は力かる問題に鑑みなされたもので、局部加熱装置の押圧加熱部に溶融 はんだが付着せず、はんだ付け作業性に優れた配線材、その素材を提供することを 目的とする。
課題を解決するための手段
[0006] 本発明の配線接続用クラッド材は、純 AUりも導電性に優れた金属で形成された導 電層と、純 A1あるいは A1合金で形成され、前記導電層の一方の表面に積層された 表面層とを備えたものである。また、本発明の配線接続部材は、半導体素子の電極 部にはんだ付けされる導電層を備えた第 1接続端部と、他の半導体素子の電極部あ るいは外部配線部にはんだ付けされる導電層を備えた第 2接続端部とを有する配線 接続部材であって、前記配線接続用クラッド材から加工されたものである。
[0007] 前記クラッド材及び配線接続部材によれば、その導体層の上に純 A1あるいは A1合 金で形成された表面層を備える。前記表面層の表面には緻密な酸ィ匕皮膜が大気中 で自然に形成されるので、配線接続部材の導体層と半導体素子の電極部等との間 にはんだ材を配置し、前記配線部材の表面層の上から押圧加熱部を押し付けて前 記はんだ材を溶融させ、この溶融はんだにより前記導電層と電極部等をはんだ付け する際、前記溶融はんだが電極部等と配線接続部材との間から押し出されても、緻 密な A1酸ィ匕膜が形成された表面層の表面には濡れ広がらない。このため、前記押圧 加熱部に溶融はんだが付着せず、押圧加熱部に対してはんだ滓の除去作業が不要 となり、はんだ付け作業性ひ 、ては生産性に優れる。
[0008] 前記クラッド材において、前記導電層の他方の表面にはんだ層を積層することがで きる。このはんだ層は、前記導体層と表面層とが積層されたニ層クラッド材を溶融は んだめつきすることにより容易に形成することができる。ニ層クラッド材から切断や打 ち抜きなどにより加工された配線接続材をはんだ付けする場合には、別途、はんだ 材を準備し、これをはんだ付けする部位に配置すると 、うような煩雑な作業が必要と なるが、予めはんだ層を形成することにより、そのような煩雑な作業が不要になり、は んだ付け作業性がより向上する。
[0009] 前記クラッド材にお 、て、前記導体層は純 Cu又は Cu合金で形成することが好まし い。また、前記表面層の層厚は 5〜30 m程度とし、前記導電層の層厚は 50〜25 O ^ m程度とすることが好ましい。また、前記配線接続部材において、複数の第 1接 続端部及び Z又は複数の第 2接続端部を設けることができる。
図面の簡単な説明
[0010] [図 1]本発明の実施形態に力かる配線接続用クラッド材の横断面図である。
[図 2]本発明の実施形態にカゝかる配線接続部材の斜視図である。
[図 3]実施形態に係る配線接続部材をはんだ付けした半導体装置の一部断面側面 図である。
[図 4]他の配線接続部材の斜視図である。
[図 5]はんだ付け試験要領を示す部分縦断面図である。
符号の説明
[0011] 1 配線接続用クラッド材
2 導電層
3 表面層
4 はんだ層
5, 5A 配線接続部材
発明を実施するための最良の形態
[0012] 以下、図面を参照して本発明の実施形態に係る配線接続用クラッド材について説 明する。図 1は、実施形態に係る帯板状の配線接続用クラッド材 1の横断面を示して おり、純 AUりも導電性に優れた導電層 2と、この導電層 2の一方の表面に圧接及び 拡散接合により積層された表面層 3と、前記導電層 2の他の表面に積層されたはん だ層 4とを備えている。
[0013] 前記導電層 2は、純 AUりも電気抵抗の低い各種金属、例えば純 Cu、純 Ag、これ らを主成分とする合金を用いることができる。材料コストを考慮すると、純 Cuが最も好 ましいが、 Cuを 95mass%以上含有する Cu— Ag合金、 Cu— P合金、 Cu— Sn合金、 Cu—Zn合金などの Cuを主成分とする導電性合金も用いることができる。前記導電 層 2の厚さは、十分な電流容量を確保するには、少なくとも 50 m程度確保すること が好ましい。一方、 300 μ mを超えて厚くする必要はなぐ好ましくは 100〜250 μ m 程度でよい。
[0014] また、前記表面層は、純 A1ある 、は A1合金で形成される。 A1合金であれば、その 表面に緻密なアルミニウム酸ィ匕膜が大気中で自然に形成されるので、その種類は問 わないが、加工性、耐食性の良好な耐食 A1合金が好ましい。純 A1としては、 JISに規 定された、 1050, 1060, 1085, 1080, 1070, 1N99, 1N90などを用いること力で き、また耐食ァノレミニゥム合金としては、 JISに規定された、 5052, 3003, 6061など を用いることができる。前記表面層は、その表面に緻密なアルミニウム酸ィ匕膜が形成 されればよいので、その厚さは重要ではなぐ数/ z m程度あれば十分である。製作の 容易さの点では、表面層の厚さは 5〜30 /z m程度が好ましい。
[0015] 一方、前記はんだ層 4を形成するはんだとしては、融点が 130〜300°C程度のもの が好ましぐそのようなはんだとして、例えば、純 Sn、 Sn— Pb合金、 Sn-0. 5〜5ma ss%Ag合金、 Sn— 0. 5〜5mass%Ag— 0. 3〜1. Omass%Cu合金、 Sn— 0. 3〜1 . Omass%Cu合金、 Sn— 1. 0〜5. Omass%Ag— 5〜8mass%In合金、 Sn— 1. 0〜 5. Omass%Ag— 40〜50mass%Bi合金、 Sn— 40〜50mass%Bi合金、 Sn— 1. 0 〜5. 0mass%Ag—40〜50mass%Bi—5〜8mass%In合金などが使用される。 Pb は人体に有害であり、自然環境を汚染するおそれがあるので、汚染防止の観点から は Pbフリーの Sn— Ag合金、 Sn— Ag— Cu合金、 Sn—Cu合金、 Sn—Ag—In合金 、 Sn—Ag— Bi合金などのはんだが好ましい。前記はんだ層の厚さは、通常、 50〜2 00 程度あれば十分である。 [0016] 前記クラッド材は、以下のようにして製造される。前記導電層 2、表面層 3の元になる 導電層材シート、表面層材シートを準備し、これらを重ね合わせて 60〜80%の圧下 率でロールにて冷間圧接し、得られた圧接材を 300〜500°C程度の温度で 1〜3分 程度保持して圧接材の導電層及び表面層を互いに拡散接合する。こうして得られた ニ層クラッド材を適宜の幅 (通常 2〜4mm程度)でスリットし、得られた帯板材を溶融 はんだ浴に通してその導電層の表面にはんだ層を溶融はんだめつきする。これによ り、はんだ層を備えた三層構造のクラッド材が得られる。なお、溶融はんだめつきによ り、導電層の側面にもはんだが付着するが、図 1では図示省略されている。
[0017] 上記のようにして製作された帯板状のクラッド材は、適宜の長さに切断され、図 2に 示すように、曲げ加工されて、配線接続部材 5とされる。この配線接続部材 5は、前記 クラッド材カも切断加工されたものであるので、同様の断面構造を備えており、図 2に おいて、前記クラッド材と同様の構成要素は同符号で示されている。前記配線接続 部材 5は、その両端部に平坦状の第 1接続端部 6と第 2接続端部 7が形成され、前記 第 1接続端部 6から第 1脚部 8、連結部 9、第 2脚部 10を介して第 2接続端部 7が連成 されている。
[0018] 上記配線接続部材 5の半導体装置におけるはんだ付け例を図 3を参照して簡単に 説明する。
銅板等の基板 11に絶縁層 12, 13が設けられ、その上に電力用半導体素子 14、銅 帯力もなる外部配線部 16が設けられている。前記電力用半導体素子 14にはメタライ ズ層カゝらなる電極部 15が設けられており、この電極部 15と配線接続部材 5の第 1接 続端部 6の導電層 2、前記外部配線部 16と配線接続部材の第 2接続端部 7の導電層 2とがはんだ層 4の溶融凝固によってはんだ付けされて、両者が電気的に接続されて いる。前記はんだ付けは、前記第 1、第 2接続端部 6, 7の表面層 3の上に局部加熱 装置の押圧加熱部を当接させ、押圧しながら加熱することにより行われる。この際、 前記電極部 15と第 1接続端部 6の導電層 2あるいは外部配線部 16と第 2接続端部 7 の導電層 2との間から余剰の溶融はんだが押し出されるが、表面層 3の表面には溶 融はんだとの濡れ性の悪 、アルミニウム酸ィ匕膜が形成されて 、るため、表面側に濡 れ広がらない。このため、押圧加熱部に溶融はんだが付着せず、はんだ滓が堆積す るおそれがない。
[0019] 上記実施形態では、ニ層クラッド材をスリットして力 溶融はんだめつきを行っては んだ層を形成したが、ニ層クラッド材を溶融はんだめつきした後、必要に応じて適宜 の幅にスリットしてもよい。また、配線接続部材の素材となる短冊片は、平板状の配線 接続用クラッド材を製造し、これから打ち抜き加工により製作してもよい。また、はんだ 層の形成に際しては、溶融はんだめつきによらず、他の方法、例えばクラッド法や印 刷法によって積層形成してもよ ヽ。
[0020] また、配線接続部材の形状は自由であり、例えば、第 1脚部 8、連結部 9、第 2脚部 10はアーチ状に一体的に形成してもよい。さらに、図 4に示すように、配線接続部材 5Aの両側にそれぞれ複数（図例では 2つ）の接続端部 6, 7を櫛歯状に設けてもよい 。図例では配線接続部材 5Aの両側にそれぞれ複数の接続端部を設けたが、片側の みに複数の接続端部を設けるようにしてもょ ヽ。このように複数の接続端部を設ける ことで、接続部が多点構造となり、電流分布を均一化することができる。
[0021] また、上記実施形態は、三層構造の配線接続用クラッド材を示すが、本発明の配 線接続用クラッド材は、前記はんだ層 4は必ずしも必要ではなぐ導電層 2と表面層 3 の二層構造のクラッド材であってもよ ヽ。このクラッド材からカ卩ェされた配線接続部材 を半導体素子の電極部等にはんだ付けする場合、配線接続部材の導電層と半導体 素子の電極部等との間にはんだ材を配置してはんだ付けする。
[0022] 以下、本発明の配線接続用クラッド材について実施例を挙げて具体的に説明する 力 S、本発明は力かる実施例によって限定的に解釈されるものではない。 実施例
[0023] 厚さ 0. 95mmの純 Cuシートと厚さ 0. 05mmの純 A1シートを重ね合わせて、圧下率 70%でロールにて冷間圧接し、その圧接材を 400°C、 2分間保持し、 Cu層（電導層） と A1層（表面層）とが拡散接合した 2層クラッド材を得た。さらにこれを冷間圧延し、板 厚 200 μ mの配線接続用の 2層クラッド材（Cu層： 190 m、 A1層： 10 m )を製作 し、プレスにて打ち抜き加工して直径 6mmのはんだ付け試験片を得た。一方、比較 のため、板厚 200 mの Cu板を打ち抜きカ卩ェして、直径 6mmのはんだ付け試験片 を得た。 [0024] 次に、図 5に示すように、これらのはんだ付け試験片 21を表 1に示す組成を有する 厚さ 100 /z m、直径 6mmの円形のはんだシート 22にそれぞれ重ね合わせてセラミツ ク板 23の上に載置した。クラッド材の試験片については、 Cu層がはんだシート側に なるよつにした。
[0025] これらの試験片 21の上からはんだごて（出力 100W)の押圧加熱部（先端部直径 3 mm) 24を同心状に押し付けて、はんだシート 22を溶融し、その後溶融はんだを冷却 凝固した。この際、試験片 21の上面における、溶融はんだが濡れ広がった領域の面 積を測定し、下記式にてはんだ濡れ面積率 Rを計算した。これらの測定結果、計算 結果を表 1に併せて示す。
R=はんだ濡れ面積 Z試験片の表面積 X 100%
[0026] 表 1より、試料 No. 3及び 4の試験片（発明例）では、その A1層表面にほとんど溶融 はんだが濡れ広がらな力つたことがわかる力 Cu板力もなる試験片では 20%程度、 溶融はんだが濡れ広がったことがわかる。また、試料 No. 1及び 2では、試験片の外 周端から中心側に向かって最大で試験片の中心から半径 2mm程度の位置まで溶融 はんだの広がりが認められた。
[0027] [表 1] 試料 試験片の構成 はんだ濡れ
No. はんだ組成 備考
面積率 (％)
1 板 Sn-3.5 Ag 17% 比較例
2 板 60%Sn-Pb 21% 比較例
3 A l /Cuクラッド材 Sn-3.5%Ag 3% 実施例
4 A l /Cuクラッド材 60%Sn-Pb 3% 実施例

Claims

請求の範囲
[1] 純 AUりも導電性に優れた金属で形成された導電層と、純 A1あるいは A1合金で形成 され、前記導電層の一方の表面に積層された表面層とを備えた配線接続用クラッド 材。
[2] 前記導電層の他方の表面にはんだ層が積層された、請求項 1に記載した配線接続 用クラッド材。
[3] 前記はんだ層は溶融はんだめつきにより形成された、請求項 2に記載した配線接続 用クラッド材。
[4] 前記導電層が純 Cuあるいは Cu合金で形成された、請求項 1に記載した配線接続用 クラッド、材。
[5] 前記導電層が純 Cuあるいは Cu合金で形成された、請求項 2に記載した配線接続用 クラッド、材。
[6] 前記導電層の層厚を 50〜250 μ mとし、前記表面層の層厚を 5〜30 μ mとした、請 求項 1から 5のいずれか 1項に記載した配線接続用クラッド材。
[7] 半導体素子の電極部にはんだ付けされる導電層を備えた第 1接続端部と、他の半導 体素子の電極部あるいは外部配線部にはんだ付けされる導電層を備えた第 2接続 端部を有する配線接続部材であって、請求項 1から 5の ヽずれか 1項に記載された配 線接続用クラッド材から加工された、配線接続部材。
[8] 前記導電層の層厚を 50〜250 μ mとし、前記表面層の層厚を 5〜30 μ mとした、請 求項 7に記載した配線接続部材。
[9] 複数の第 1接続端部及び Z又は複数の第 2接続端部が設けられた、請求項 7に記載 した配線接続部材。
[10] 複数の第 1接続端部及び Z又は複数の第 2接続端部が設けられた、請求項 8に記載 した配線接続部材。
PCT/JP2007/058913 2006-04-27 2007-04-25 配線接続用クラッド材及びそのクラッド材から加工された配線接続部材 WO2007125939A1 (ja)

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