JP6969944B2 - Cutting method and cutting measures for plate-shaped objects - Google Patents

Description

The present invention relates to a method for cutting a plate-shaped object and a cutting device for dividing a plurality of plate-shaped objects by simultaneously holding them in a holding means.

When cutting a relatively small plate-shaped object and dividing it into individual devices, multiple plate-shaped objects are held in one holding means, and the cutting blade of the cutting unit and each plate-shaped object are planned to be separated. A processing method is used in which each plate-like object is divided into individual devices by moving them relatively along a line (see, for example, Patent Document 1).

Japanese Unexamined Patent Publication No. 2017-92362

However, in the processing method shown in Patent Document 1, there is a possibility that cutting water may be scattered from the cutting blade toward another plate-shaped object due to the rotation of the cutting blade during cutting of the plate-shaped object, and cutting debris in the cutting water may be present. There was a risk of adhering to the plate-like material.

The present invention has been made in view of the above problems, and an object of the present invention is to provide a plate-shaped object cutting method and a cutting apparatus capable of suppressing the adhesion of cutting chips in cutting water to the plate-shaped object. It is to be.

In order to solve the above-mentioned problems and achieve the object, the method for cutting a plate-shaped object of the present invention includes at least a holding means, a cutting means for rotatably holding a cutting blade, and a cutting water supply means. It is a division method that divides a plate-shaped object along an arbitrary scheduled division line using a cutting device, and a plurality of plates are formed so that three or more plate-shaped objects are not adjacent to each other on an extension line of the planned division line. It is provided with a holding step of holding the plate-shaped object in the holding means, and a cutting step of cutting the plate-shaped object while discharging the cutting water supplied to the cutting point in the rotation direction of the cutting blade. In the cutting step, the cutting blade in which the cutting water discharged from the cutting point is rotated in a direction from the cutting point toward the outer periphery of the holding means is divided into the plate-shaped object from the outer peripheral side of the holding means. By cutting into the planned line and moving the holding means so that the cutting blade is directed toward the center of the holding means, the direction in which the cutting water is discharged is not the other adjacent plate-like object. It is characterized in that cutting is performed while rotating the cutting blade so as to face the outer periphery of the holding means.
The cutting device of the present invention has a holding means for holding a plurality of plate-shaped objects in a state where another plate-shaped object is located on an extension line of at least one plate-shaped object to be divided, and a cutting blade can be rotated. A cutting means for holding, a cutting water supply means for supplying cutting water to the cutting blade, a moving means for relatively moving the holding means and the cutting means, and a control unit for controlling each component. The control unit is provided with a cutting device, and when the cutting means cuts a plurality of the plate-shaped objects, the cutting water discharged from the cutting point is discharged from the cutting point to the outer periphery of the holding means. The cutting blade rotated in the direction toward the direction is cut into the planned division line of the plate-shaped object from the outer peripheral side of the holding means, and the moving means is directed so that the cutting blade is directed toward the center of the holding means. By moving the holding means, the direction in which the cutting water is discharged from the cutting blade by the rotation of the cutting blade during cutting is directed toward the outer periphery of the holding means instead of the other plate-like object. It is characterized by controlling at least one of a cutting means and the moving means.

Application onset Ming, cutting chips of the cutting water can be prevented from adhering to the plate-like material, an effect that.

FIG. 1 is a perspective view showing a configuration example of a cutting device used in the method for cutting a plate-shaped object according to the first embodiment. FIG. 2 is a plan view of a workpiece to be machined in the method of cutting a plate-shaped object according to the first embodiment. FIG. 3 is a flowchart showing the flow of the cutting method of the plate-shaped object according to the first embodiment. FIG. 4 is a side view showing a state in which a planned division line of a plate-shaped object, which is one of the cutting steps of the plate-shaped object cutting method shown in FIG. 3, is cut in a partial cross section. FIG. 5 is a plan view showing the plate-shaped object shown in FIG. FIG. 6 is a side view showing a state in which the cutting of the planned division line of one plate-shaped object shown in FIG. 4 is completed in a partial cross section. FIG. 7 is a side view showing a state in which the cutting unit in which the cutting of the planned division line of one plate-shaped object shown in FIG. 6 is completed is raised in a partial cross section. FIG. 8 is a side view showing a state in which a planned division line of another plate-shaped object is cut from the state shown in FIG. 7 in a partial cross section. FIG. 9 is a plan view showing the plate-shaped object shown in FIG. FIG. 10 shows a part of a state in which, in the cutting step of the plate-shaped object cutting method according to the second embodiment, another plate-shaped object scheduled to be split is cut after the cutting of one plate-shaped object scheduled to be split is completed. It is a side view shown in the cross section. FIG. 11 is a plan view showing the plate-shaped object shown in FIG. FIG. 12 is a plan view of the workpiece to be machined by the method of cutting a plate-shaped object according to the modified examples of the first and second embodiments.

An embodiment (embodiment) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited to the contents described in the following embodiments. In addition, the components described below include those that can be easily assumed by those skilled in the art and those that are substantially the same. Furthermore, the configurations described below can be combined as appropriate. In addition, various omissions, substitutions or changes of the configuration can be made without departing from the gist of the present invention.

[Embodiment 1]
The method of cutting a plate-shaped object according to the first embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view showing a configuration example of a cutting device used in the method for cutting a plate-shaped object according to the first embodiment. FIG. 2 is a plan view of a workpiece to be machined in the method of cutting a plate-shaped object according to the first embodiment.

The method for cutting a plate-shaped object according to the first embodiment is a method for dividing the plate-shaped object 100 by using the cutting device 1 shown in FIG. The plate-shaped object 100, which is the object of processing of the plate-shaped object cutting method according to the first embodiment, is formed in a flat plate shape and is, for example, a package substrate such as a CSP (Chip Size Package). As shown in FIG. 2, in the plate-shaped object 100, the device 103 is arranged in a plurality of regions partitioned by a plurality of scheduled division lines 102 that intersect each other (orthogonally in the first embodiment) with the surface 101. The plate-shaped object 100 is integrated with the annular frame 111 by attaching the adhesive tape 110 to the back surface 104 of the front surface 101 and attaching the annular frame 111 to the outer periphery of the adhesive tape 110.

Further, a plurality of plate-shaped objects 100 are attached to one adhesive tape 110, and the plurality of plate-shaped objects 100 are integrated with the annular frame 111. The plurality of plate-like objects 100 to be attached to one adhesive tape 110 are arranged so that three or more plate-like objects 100 are not adjacent to each other on any extension line of the planned division lines 102 that intersect with each other. There is. That is, the plurality of plate-shaped objects 100 to be attached to one adhesive tape 110 are arranged so as to line up at most two on any extension line of the planned division lines 102 that intersect each other.

In the first embodiment, as shown in FIG. 2, four plate-shaped objects 100 are attached to one adhesive tape 110 so as to be lined up on both extension lines of the planned division lines 102 that intersect each other. However, in the present invention, the number of the plate-shaped objects 100 to be attached to one adhesive tape 110 is not limited to four, and the arrangement of the plurality of plate-shaped objects 100 with respect to the adhesive tape 110 is shown in FIG. Not limited to the arrangement shown. In the first embodiment, the plate-shaped material 100 is a package substrate, but in the present invention, the plate-shaped material 100 is not limited to the package substrate, and a disk-shaped semiconductor wafer using silicon, sapphire, gallium, or the like as a base material is used. It may be a wafer such as an optical device wafer, a ceramic plate or a glass plate.

As shown in FIG. 1, the cutting apparatus 1 used in the method for cutting a plate-shaped object according to the first embodiment has a chuck table 10 and a chuck table 10 which are holding means for sucking and holding the plate-shaped object 100 on the holding surface 11. The cutting unit 20 is a cutting means for cutting the plate-shaped object 100 held in the spindle 21 by the cutting blade 22 mounted on the spindle 21, the imaging unit 30 for imaging the plate-shaped object 100 held in the chuck table 10, and the chuck table 10. It has at least a moving unit 40 which is a moving means for relatively moving the cutting unit 20 and a cutting unit 20, and a control unit 50 which controls each component.

The moving unit 40 has a rotation drive source 41 that rotates the chuck table 10 around the axis parallel to the Z-axis direction parallel to the vertical direction, and an X-axis that processes and feeds the chuck table 10 in the X-axis direction parallel to the horizontal direction. A moving unit 42, a Y-axis moving unit (not shown) that indexes and feeds the cutting unit 20 in the Y-axis direction parallel to the horizontal direction and orthogonal to the X-axis direction, and a Z (not shown) that cuts and feeds the cutting unit 20 in the Z-axis direction. It is equipped with at least an axis moving unit.

The chuck table 10 has a disk shape in which the holding surface 11 for holding the plate-shaped object 100 is formed of porous ceramic or the like. Further, the chuck table 10 is movably provided in the X-axis direction by the X-axis moving unit 42 and rotatably around the axis parallel to the Z-axis direction by the rotation drive source 41. The chuck table 10 has a holding surface 11 made of porous ceramic or the like connected to a vacuum suction source (not shown). In the chuck table 10, a plate-shaped object 100 integrated with the annular frame 111 is placed on the holding surface 11 via an adhesive tape 110, and the holding surface 11 is sucked by a vacuum suction source on the annular frame 111. A plurality of integrated plate-shaped objects 100 are sucked and held. In the chuck table 10, a plurality of plate-shaped objects 100 integrated with the annular frame 111 are divided into a plurality of plate-shaped objects in a state where three or more plate-shaped objects 100 are not adjacent to each other on an extension line of the scheduled line 102. Hold 100. Further, a plurality of clamp portions 12 for clamping the annular frame 111 are provided around the chuck table 10.

The cutting unit 20 includes a spindle 21 on which a cutting blade 22 for cutting a plate-shaped object 100 held on the chuck table 10 is mounted. Each of the cutting units 20 is provided so as to be movable in the Y-axis direction by the Y-axis moving unit with respect to the plate-shaped object 100 held by the chuck table 10, and is movable in the Z-axis direction by the Z-axis moving unit. It is provided in.

The cutting unit 20 can position the cutting blade 22 at an arbitrary position on the holding surface 11 of the chuck table 10 by the Y-axis moving unit and the Z-axis moving unit. The cutting blade 22 is an ultra-thin cutting wheel having a substantially ring shape. The spindle 21 cuts the plate-shaped object 100 by rotating the cutting blade 22. The spindle 21 is rotatably housed in the spindle housing 23. The cutting unit 20 rotatably holds the cutting blade 22 by mounting the cutting blade 22 on the spindle 21. The axes of the spindle 21 and the cutting blade 22 of the cutting unit 20 are set to be parallel to the Y-axis direction. The cutting unit 20 is indexed and fed in the Y-axis direction by the Y-axis moving unit, and is cut and fed to the Z-axis moving unit, while the chuck table 10 is cut and fed in the X-axis direction by the X-axis moving unit 42. The plate-shaped object 100 is cut.

Further, the cutting unit 20 is supplied with cutting water 26 (shown in FIG. 4) made of pure water to a cutting point 25 (shown in FIG. 4) for cutting the plate-shaped object 100 of the cutting blade 22 during cutting. A cutting water supply nozzle 24, which is a supply means, is attached. That is, the cutting device 1 includes a cutting water supply nozzle 24 which is a cutting water supply means. The cutting point 25 refers to a portion of the cutting edge of the outer edge of the cutting blade 22 that is cutting the plate-shaped object 100. The cutting water 26 supplied from the cutting water supply nozzle 24 to the cutting point 25 of the cutting blade 22 is discharged from the cutting point 25 in the rotation direction of the cutting blade 22 along the tangential direction at the cutting point 25. NS.

Further, the cutting device 1 includes a cassette elevator 70 on which a cassette 60 accommodating a plate-shaped object 100 before and after cutting is placed and the cassette 60 is moved in the Z-axis direction, and a cleaning unit for cleaning the plate-shaped object 100 after cutting. The 80 is provided with a transport unit 90 for transporting the plate-shaped object 100 between the cassette 60, the chuck table 10, and the cleaning unit 80.

The image pickup unit 30 takes an image of the surface 101 of the plate-shaped object 100 held by the chuck table 10. The image pickup unit 30 includes a CCD (Charge Coupled Device) image pickup device (not shown) that images the surface 101 of the plate-shaped object 100 held on the chuck table 10. The image pickup unit 30 takes an image of the plate-shaped object 100, obtains an image for performing alignment for aligning the plate-shaped object 100 and the cutting blade 22, and outputs the obtained image to the control unit 50.

The control unit 50 controls each of the above-mentioned components of the cutting device 1 to cause the cutting device 1 to perform a machining operation on the plate-shaped object 100. The control unit 50 is a computer. The control unit 50 includes an arithmetic processing unit having a microprocessor such as a CPU (central processing unit), a storage device having a memory such as ROM (read only memory) or RAM (random access memory), and an input / output interface device. And have. The arithmetic processing unit of the control unit 50 performs arithmetic processing according to a computer program stored in the storage device, and sends a control signal for controlling the cutting apparatus 1 to the above-mentioned cutting apparatus 1 via an input / output interface apparatus. Output to the components that have been created. Further, the control unit 50 is connected to a display unit (not shown) composed of a liquid crystal display device for displaying the state of machining operation, an image, or the like, and an input unit (not shown) used when an operator registers machining content information or the like. There is. The input unit is composed of at least one of a touch panel provided on the display unit and an external input device such as a keyboard.

Next, a method of cutting a plate-shaped object using the cutting device 1, that is, a machining operation of the cutting device 1 will be described. FIG. 3 is a flowchart showing the flow of the cutting method of the plate-shaped object according to the first embodiment. FIG. 4 is a side view showing a state in which a planned division line of a plate-shaped object, which is one of the cutting steps of the plate-shaped object cutting method shown in FIG. 3, is cut in a partial cross section. FIG. 5 is a plan view showing the plate-shaped object shown in FIG. FIG. 6 is a side view showing a state in which the cutting of the planned division line of one plate-shaped object shown in FIG. 4 is completed in a partial cross section. FIG. 7 is a side view showing a state in which the cutting unit in which the cutting of the planned division line of one plate-shaped object shown in FIG. 6 is completed is raised in a partial cross section. FIG. 8 is a side view showing a state in which a planned division line of another plate-shaped object is cut from the state shown in FIG. 7 in a partial cross section. FIG. 9 is a plan view showing the plate-shaped object shown in FIG. In the plan view of the plate-shaped object 100 shown in FIGS. 5 and 9, the scheduled division line 102 before cutting is shown by a dotted line, and the scheduled division line 102 that has been cut is shown by a solid line.

The method for cutting a plate-shaped object according to the first embodiment (hereinafter, simply referred to as a cutting method) is a method of dividing the plate-shaped object 100 along an arbitrary scheduled division line 102 by using the cutting device 1 shown in FIG. Is. As for the cutting method, when the operator registers the machining content information in the control unit 50, installs the cassette 60 containing the plate-shaped object 100 in the cassette elevator 70, and the operator gives an instruction to start the machining operation, the cutting device 1 Is started by.

As shown in FIG. 3, the cutting method includes a holding step ST1 and a cutting step ST2. The holding step ST1 is a step of holding a plurality of plate-shaped objects 100 on the holding surface 11 of the chuck table 10. In the holding step ST1, the control unit 50 causes the transport unit 90 to take out the plate-shaped object 100 before cutting from the cassette 60 and place it on the chuck table 10, and sucks the plate-shaped object 100 onto the holding surface 11 of the chuck table 10. While holding it, the annular frame 111 is clamped to the clamp portion 12. In the holding step ST1, by holding a plurality of plate-shaped objects 100 attached to one adhesive tape 110 on the chuck table 10, three or more plate-shaped objects 100 are adjacent to each other on the extension line of the scheduled division line 102. A plurality of plate-shaped objects 100 are held on the chuck table 10 so as not to be arranged, that is, two plates are arranged on an extension line of at least one of the scheduled division lines 102 intersecting with each other. The cutting method proceeds to the cutting step ST2 when a plurality of plate-shaped objects 100 are sucked and held on the holding surface 11 of the chuck table 10.

The cutting step ST2 is a step of cutting the plate-shaped object 100 while discharging the cutting water 26 supplied to the cutting point 25 in the rotation direction of the cutting blade 22. In the cutting step ST2, the control unit 50 supplies the cutting water 26 from the cutting water supply nozzle 24 by the X-axis moving unit 42, the Y-axis moving unit, the Z-axis moving unit, and the rotary drive source 41 based on the machining content information. While moving the rotating cutting blade 22 of the cutting unit 20 and the plate-shaped object 100 relatively along the planned division line 102, the cutting blade 22 is moved to the planned division line 102 of each plate-shaped object 100 with the adhesive tape 110. The plate-like object 100 is cut into individual devices 103.

In the cutting step ST2, the control unit 50 cuts all the scheduled division lines 102 of all the plate-like objects 100 attached to the adhesive tape 110, and all the plate-like objects 100 attached to the adhesive tape 110. Is divided into individual devices 103, the chuck table 10 is retracted from below the cutting unit 20, and then the suction holding of the chuck table 10 is released and the clamp of the clamp portion 12 is released. The control unit 50 transports the plate-shaped object 100 after cutting to the transport unit 90 to the cleaning unit 80, cleans it with the cleaning unit 80, and then houses it in the cassette 60. The control unit 50 repeats the holding step ST1 and the cutting step ST2 until all the plate-shaped objects 100 housed in the cassette 60 are cut, and when all the plate-shaped objects 100 housed in the cassette 60 are cut, the cutting is performed. End the method.

Further, in the cutting step ST2, the control unit 50 captures each plate-shaped object 100 with the image pickup unit 30 before cutting the first scheduled division line 102 of each of the plurality of plate-shaped objects 100 attached to the adhesive tape 110. To take an image. The control unit 50 is subjected to image processing such as pattern matching for aligning the scheduled division line 102 of each plate-shaped object 100 with the cutting blade 22 of the cutting unit 20, and each plate-shaped object 100 and the cutting unit 20 are subjected to image processing. Perform alignment to adjust relative position with.

Further, in the cutting step ST2, for example, among the plurality of plate-shaped objects 100 attached to the adhesive tape 110, the plate-shaped object 100 on the upper left in FIG. 2 (hereinafter referred to by reference numeral 100-1) is in the X-axis direction. Immediately after cutting the planned division line 102 (hereinafter referred to as reference numeral 102-1) located at the uppermost position in FIG. ), Which is the uppermost part of FIG. 2 parallel to the X-axis direction and is located on the same line as or substantially the same as the planned division line 102-1. When cutting, the control unit 50 controls each component as follows.

When cutting the planned division line 102-1 of the plate-shaped object 100-1, the control unit 50 determines that the cutting water 26 discharged from the cutting point 25 is directed from the cutting point 25 toward the outer periphery of the chuck table 10. Rotate the cutting blade 22. The direction in which the cutting water 26 discharged from the cutting point 25 is directed from the cutting point 25 toward the outer periphery of the chuck table 10 is always away from the center of the chuck table 10 without approaching the center of the chuck table 10 from the cutting point 25. The direction toward the outer periphery of the table 10.

Further, when cutting the planned division line 102-1 of the plate-shaped object 100-1, the control unit 50 transfers the cutting blade 22 from the outer peripheral side of the chuck table 10 to the plate-shaped object 100-as shown in FIG. The chuck table 10 is cut from the cassette 60 along the X-axis direction so that the cutting blade 22 faces the center of the chuck table 10 in the X-axis moving unit 42 shown in FIG. Move away. Then, the discharge direction 200 (indicated by an arrow in FIG. 5), which is the direction in which the cutting water 26 is discharged, goes toward the outer periphery of the chuck table 10 without going from the plate-shaped object 100-1 to the plate-shaped object 100-2. It will be.

As shown in FIG. 6, when the control unit 50 finishes cutting the planned division line 102-1 of the plate-shaped object 100-1, the X-axis moving unit 42 shown in FIG. 1 stops the movement of the chuck table 10. As shown in FIG. 7, the control unit 50 raises the cutting unit 20 to the Z-axis moving unit and retracts the cutting blade 22 from the chuck table 10. The control unit 50 rotates the chuck table 10 about 90 degrees around the axis of the rotation drive source 41, and then moves the chuck table 10 to the X-axis moving unit 42 shown in FIG. 1 in a direction approaching the cassette 60. As shown in FIG. 8, the control unit 50 cuts the cutting blade 22 from the outer peripheral side of the chuck table 10 into the planned division line 102-2 of the plate-shaped object 100-2, and cuts the cutting blade into the X-axis moving unit 42. The chuck table 10 is moved in the direction away from the cassette 60 along the X-axis direction so that 22 is directed toward the center of the chuck table 10. Then, the discharge direction 200 (indicated by an arrow in FIG. 9) from which the cutting water 26 is discharged is directed toward the outer periphery of the chuck table 10 without going from the plate-shaped object 100-2 to the plate-shaped object 100-1. .. As described above, in the present invention, the discharge direction 200, which is the direction in which the cutting water 26 is discharged, does not go from the plate-shaped objects 100-1 and 100-2 to the plate-shaped objects 100-2 and 100-2, and the chuck is used. Toward the outer periphery of the table 10 means that the discharge direction 200 is always away from the center of the chuck table 10 and toward the outer periphery of the chuck table 10 without approaching the center of the chuck table 10 from the cutting point 25. ing.

In this way, in the cutting step ST2, the cutting method and the control unit 50 cut the cutting blade 22 from the outer peripheral side to the inner peripheral side of the chuck table 10 in the planned division line 102-1 of one plate-shaped object 100-1. After that, immediately after cutting the scheduled division line 102-1, the scheduled division line 102-2 of another plate-shaped object 100-2 located on the same line as the scheduled division line 102-1 that has been cut immediately before is continuously cut. .. In the cutting step ST2, the cutting method and the control unit 50 continuously cut the plate-shaped object 100-2 into one plate shape immediately after the cutting of the scheduled division line 102-1. After cutting the planned division line 102-1 of the object 100-1, the cutting blade 22 is raised from the chuck table 10 and retracted, and then the chuck table 10 is rotated 90 degrees around the axis. Then, in the cutting step ST2, the cutting method and the control unit 50 cut the cutting blade 22 from the outer peripheral side to the inner peripheral side of the chuck table 10 into the planned division line 102-2 of the other plate-shaped object 100-2.

Thus, in the cutting method according to the first embodiment, when the cutting unit 20 cuts a plurality of plate-shaped objects 100, 100-1, 100-2, the control unit 50 is driven by the rotation of the cutting blade 22 during cutting. The cutting unit 20 and the moving unit 40 so that the discharge direction 200 in which the cutting water 26 is discharged from the cutting blade 22 faces the outer periphery of the chuck table 10 instead of the other plate-shaped objects 100, 100-1, 100-2. Control at least one of them. That is, in the cutting method according to the first embodiment, in the cutting step ST2, the cutting blade is such that the discharge direction 200 in which the cutting water 26 is discharged faces the outer periphery of the chuck table 10 instead of the other adjacent plate-shaped objects 100. Cutting while rotating 22. In the cutting method according to the first embodiment, the cutting blade 22 is retracted from the chuck table 10 after cutting the scheduled division line 102-1 of one plate-shaped object 100-1, and the chuck table 10 is rotated 90 degrees. In the present invention, the angle at which the chuck table 10 is rotated after the cutting blade 22 is retracted is not limited to 90 degrees, and a plurality of plate-shaped objects 100, 100-1, 100 attached to the adhesive tape 110 are not limited to 90 degrees. -2 may be changed as appropriate depending on the positional relationship between the two. For example, the present invention includes all the planned division lines 102 in the same direction as the planned division line 102-1 of the plate-shaped material 100-1 and the plate-shaped material 100-1 held below in FIG. After cutting, the chuck table 10 is rotated 180 degrees in the same direction as the planned division line 102-2 of the plate-shaped material 100-2 and the plate-shaped material 100-2 held below in FIG. All the lines 102 scheduled to be split are cut. After that, in the present invention, the chuck table 10 may be rotated 90 degrees and the same process may be repeated.

In the cutting method according to the first embodiment, in the cutting step ST2, the cutting blade 22 is set so that the discharge direction 200 in which the cutting water 26 is discharged faces the outer periphery of the chuck table 10 instead of the other adjacent plate-shaped objects 100. Since cutting is performed while rotating, it is possible to prevent the cutting water 26 from adhering to the plate-shaped objects 100, 100-1, 100-2 during cutting. As a result, the cutting method can prevent the cutting chips in the cutting water 26 from adhering to the plate-shaped objects 100, 100-1, 100-2.

Further, in the cutting method according to the first embodiment, the cutting blade 22 is cut into the scheduled division line 102-1 of one plate-shaped object 100-1 from the outer peripheral side of the chuck table 10, and one plate-shaped object 100-. Immediately after cutting the scheduled division line 102-1 of 1, before continuously cutting the scheduled division line 102-2 of the other plate-shaped object 100-2, after retracting the cutting blade 22, the chuck table 10 is used as an axis. Rotating around the center, the cutting blade 22 is cut into the scheduled division line 102-2 of the other plate-shaped object 100-2 from the outer peripheral side of the chuck table 10. For this reason, the cutting method is always to cut the cutting blade 22 from the outer peripheral side of the chuck table 10 into the planned division lines 102, 102-1, 102-2 of the plate-shaped objects 100, 100-1, 100-2. Therefore, it is possible to prevent the cutting water 26 from adhering to the plate-shaped objects 100, 100-1, 100-2.

[Embodiment 2]
The cutting method of the plate-shaped object according to the second embodiment of the present invention will be described with reference to the drawings. FIG. 10 shows a part of a state in which, in the cutting step of the plate-shaped object cutting method according to the second embodiment, another plate-shaped object scheduled to be split is cut after the cutting of one plate-shaped object scheduled to be split is completed. It is a side view shown in the cross section. FIG. 11 is a plan view showing the plate-shaped object shown in FIG. In the plan view of the plate-shaped objects 100, 100-1 and 100-2 shown in FIG. 11, the planned division lines 102 and 102-2 before cutting are shown by dotted lines, and the planned division lines 102-1 that have been cut are shown by solid lines. Indicated by. Further, in FIGS. 10 and 11, the same parts as those in the first embodiment are designated by the same reference numerals, and the description thereof will be omitted.

The method for cutting a plate-shaped object according to the second embodiment (hereinafter, simply referred to as a cutting method) is a method for continuously cutting another plate-shaped object 100 immediately after cutting the planned division line 102-1 of one plate-shaped object 100-1. It is the same as the cutting method of the first embodiment except that the operations of the cutting unit 20 and the moving unit 40 when cutting the planned division line 102-2 of -2 are different.

In the cutting step ST2 of the cutting method according to the second embodiment, after cutting the scheduled division line 102-1 of one plate-shaped object 100-1, the cutting unit 20 is raised to the Z-axis moving unit to raise the cutting blade 22. After retracting from the chuck table 10, the control unit 50 rotates the cutting blade 22 in the reverse direction on the spindle 21 of the cutting unit 20 and moves the chuck table 10 in the direction away from the cassette 60 on the X-axis moving unit 42. .. As shown in FIG. 10, the control unit 50 cuts the cutting blade 22 from the outer peripheral side of the chuck table 10 into the planned division line 102-2 of the plate-shaped object 100-2, and cuts the cutting blade into the X-axis moving unit 42. The chuck table 10 is moved along the X-axis direction toward the cassette 60 so that the 22 is directed toward the center of the chuck table 10. Then, the discharge direction 200-2 (indicated by an arrow in FIG. 11) from which the cutting water 26 is discharged faces the outer peripheral direction of the chuck table 10 without going from the plate-shaped object 100-2 to the plate-shaped object 100-1. It will be.

In this way, in the cutting step ST2, the cutting method and the control unit 50 cut the cutting blade 22 from the outer peripheral side to the inner peripheral side of the chuck table 10 in the planned division line 102-1 of one plate-shaped object 100-1. After that, immediately after cutting the scheduled division line 102-1, the scheduled division line 102-2 of another plate-shaped object 100-2 located on the same line as the scheduled division line 102-1 that has been cut immediately before is continuously cut. .. In the cutting step ST2, the cutting method and the control unit 50 continuously cut the plate-shaped object 100-2 into one plate shape immediately after the cutting of the scheduled division line 102-1. After cutting the scheduled division line 102-1 of the object 100-1, the cutting blade 22 is raised from the chuck table 10 and retracted, and then the cutting blade 22 is rotated in the reverse direction. Then, in the cutting step ST2, the cutting method and the control unit 50 cut the cutting blade 22 from the outer peripheral side to the inner peripheral side of the chuck table 10 into the planned division line 102-2 of the other plate-shaped object 100-2.

Thus, in the cutting method according to the second embodiment, when the cutting unit 20 cuts a plurality of plate-shaped objects 100, 100-1, 100-2, the control unit 50 is driven by the rotation of the cutting blade 22 during cutting. At least one of the cutting unit 20 and the moving unit 40 is controlled so that the discharge direction 200-2 from which the cutting water 26 is discharged from the cutting blade 22 faces the outer periphery of the chuck table 10. That is, in the cutting method according to the second embodiment, in the cutting step ST2, the discharge direction 200-2 from which the cutting water 26 is discharged is directed toward the outer periphery of the chuck table 10 instead of the other adjacent plate-shaped objects 100. Cutting while rotating the cutting blade 22.

In the cutting method according to the second embodiment, in the cutting step ST2, the cutting blade so that the discharge direction 200-2 from which the cutting water 26 is discharged faces the outer periphery of the chuck table 10 instead of the other adjacent plate-shaped objects 100. Since the cutting is performed while rotating the 22, it is possible to prevent the cutting water 26 from adhering to the plate-shaped object 100 during cutting. As a result, the cutting method can prevent the cutting chips in the cutting water 26 from adhering to the plate-shaped object 100, as in the first embodiment.

Further, in the cutting method according to the second embodiment, the cutting blade 22 is cut into the scheduled division line 102 of one plate-shaped object 100 from the outer peripheral side of the chuck table 10, and one plate-shaped object 100-1 is scheduled to be divided. Immediately after cutting the line 102-1, the cutting blade 22 is retracted and then the cutting blade 22 is rotated in the reverse direction before cutting the line 102-2 to be continuously divided into the other plate-shaped objects 100-2. Then, the cutting blade 22 is cut into the scheduled division line 102-2 of the other plate-shaped object 100-2 from the outer peripheral side of the chuck table 10. For this reason, the cutting method is always to cut the cutting blade 22 from the outer peripheral side of the chuck table 10 into the planned division lines 102, 102-1, 102-2 of the plate-shaped objects 100, 100-1, 100-2. Therefore, it is possible to prevent the cutting water 26 from adhering to the plate-shaped objects 100, 100-1, 100-2.

[Modification example]
A method of cutting a plate-shaped object according to a modification of the first embodiment and the second embodiment of the present invention will be described with reference to the drawings. FIG. 12 is a plan view of the workpiece to be machined by the method of cutting a plate-shaped object according to the modified examples of the first and second embodiments. In FIG. 12, the same parts as those in the first embodiment are designated by the same reference numerals, and the description thereof will be omitted.

In the method for cutting a plate-shaped object according to the first embodiment and the second embodiment, as shown in FIG. 2, one plate-shaped object 100 is arranged so as to be lined up on both extension lines of the planned division lines 102 intersecting with each other. Four sheets are attached to the adhesive tape 110. However, in the method of cutting a plate-shaped object according to a modified example, as shown in FIG. 12, two plate-shaped objects 100 are arranged side by side on one extension line of a division scheduled line 102 that intersects with each other (that is, the division intersects with each other). Three or more plate-like objects 100 are not adjacent to one extension of the scheduled line 102, and two plates are lined up on the other extension of the scheduled split line 102 that intersect each other (that is, the scheduled split lines 102 that intersect each other). A plurality of sheets (six sheets in the case of FIG. 12) are attached to one adhesive tape 110 so that three or more plate-shaped objects 100 are not adjacent to each other on the other extension line of the above.

In the cutting method according to the modified example, in the cutting step ST2, the cutting blade 22 is rotated so that the discharge direction 200 in which the cutting water 26 is discharged faces the outer periphery of the chuck table 10 instead of the other adjacent plate-shaped objects 100. Since the cutting is performed while the cutting water is being cut, it is possible to prevent the cutting water 26 from adhering to the plate-shaped object 100 during cutting. As a result, the cutting method can prevent the cutting chips in the cutting water 26 from adhering to the plate-shaped object 100, as in the first embodiment.

According to the method for cutting a plate-shaped object according to the above-mentioned first, second and modified examples, the following cutting apparatus can be obtained.
(Appendix 1)
A holding means for holding a plurality of plate-shaped objects in a state where the other plate-shaped objects are located on an extension line of at least one plate-shaped object to be divided.
A cutting means that holds the cutting blade rotatably,
A cutting water supply means for supplying cutting water to the cutting blade,
A moving means for relatively moving the holding means and the cutting means, and a moving means.
A cutting device equipped with a control unit that controls each component.
In the control unit, when the cutting means cuts a plurality of the plate-shaped objects, the direction in which the cutting water is discharged from the cutting blade due to the rotation of the cutting blade during cutting is the other plate-shaped object. Control at least one of the cutting means and the moving means so as to go toward the outer periphery of the holding means instead of the object.
A cutting device characterized by that.

Similar to the cutting method according to the first embodiment, the cutting device cuts the cutting water so that the discharging direction of the cutting water is directed toward the outer periphery of the chuck table instead of the other adjacent plate-like objects. Since cutting is performed while rotating the blade, it is possible to prevent the cutting water from adhering to the plate-like object during cutting. As a result, the cutting apparatus can prevent the cutting chips in the cutting water from adhering to the plate-like object, as in the first embodiment.

The present invention is not limited to the above embodiment. That is, it can be variously modified and carried out within a range that does not deviate from the gist of the present invention.

1 Cutting device 10 Chuck table (holding means)
20 Cutting unit (cutting means)
22 Cutting blade 24 Cutting water supply nozzle (cutting water supply means)
25 Cutting point 26 Cutting water 100,100-1,100-2 Plate-shaped object 102,102-1,102-2 Scheduled division line 200,200-2 Discharge direction (discharge direction)
ST1 holding step ST2 cutting step

Claims (2)

A cutting method for dividing a plate-like object along an arbitrary scheduled division line by using a cutting device having at least a holding means, a cutting means for holding the cutting blade rotatably, and a cutting water supply means. ,
A holding step of holding a plurality of the plate-shaped objects in the holding means so that three or more plate-shaped objects are not adjacent to each other on the extension line of the planned division line.
It is provided with a cutting step for cutting the plate-like object while discharging the cutting water supplied to the cutting point along the rotation direction of the cutting blade.
In the cutting step
The cutting water discharged from the cutting point is rotated in a direction from the cutting point toward the outer periphery of the holding means, and the cutting blade is cut from the outer peripheral side of the holding means into the planned division line of the plate-shaped object. By moving the holding means so that the cutting blade is directed toward the center of the holding means, the direction in which the cutting water is discharged is not the other adjacent plate-like object but the outer periphery of the holding means. A method for cutting a plate-shaped object, which comprises cutting while rotating the cutting blade so as to move toward. A holding means for holding a plurality of plate-shaped objects in a state where the other plate-shaped objects are located on an extension line of at least one plate-shaped object to be divided.
A cutting means that holds the cutting blade rotatably,
A cutting water supply means for supplying cutting water to the cutting blade,
A moving means for relatively moving the holding means and the cutting means, and a moving means.
A cutting device equipped with a control unit that controls each component.
In the control unit, when the cutting means cuts a plurality of the plate-shaped objects, the cutting water discharged from the cutting point is rotated from the cutting point toward the outer periphery of the holding means. By cutting the blade from the outer peripheral side of the holding means into the planned division line of the plate-shaped object and moving the holding means to the moving means so that the cutting blade is directed toward the center of the holding means. The cutting means and the moving means so that the direction in which the cutting water is discharged from the cutting blade by the rotation of the cutting blade during cutting is toward the outer periphery of the holding means instead of the other plate-like object. Control at least one,
A cutting device characterized by that.

Images