JP6570012B2 - Evaporation source and vapor deposition equipment - Google Patents

Description

  The present invention relates to an evaporation source and an evaporation apparatus used for performing vacuum evaporation.

  The evaporation source is provided with a structure that blocks heat from a heating body that heats the crucible. As a conventional structure, there is known a structure in which a pipe-like pipe is wound around a crucible and cooling water is allowed to flow through the pipe (see Patent Document 1).

  However, in the case of such a structure, since the contact area with respect to the crucible etc. of the pipe through which cooling water flows becomes narrow, cooling efficiency was low.

JP-A-6-10118

  The objective of this invention is providing the evaporation source and vapor deposition apparatus which can improve cooling efficiency.

  The present invention employs the following means in order to solve the above problems.

That is, the evaporation source of the present invention is
A crucible for accommodating a timber fee Ru is deposited on the substrate,
A heating body provided so as to surround the crucible and heating the crucible;
A heat shield structure that is provided so as to surround the heating body and blocks heat;
An evaporation source comprising:
A coolant chamber provided inside the heat shield structure along the inner wall surface of the heat shield structure, and through which a coolant flows;
A drainage pipe provided in the cooling liquid chamber for discharging the cooling liquid from below the cooling liquid chamber;
It is characterized by providing.

  As described above, according to the present invention, the cooling efficiency can be increased.

FIG. 1 is a schematic configuration diagram of a vapor deposition apparatus according to Embodiment 1 of the present invention. FIG. 2 is a plan view of the evaporation source according to Embodiment 1 of the present invention. FIG. 3 is a side view of the evaporation source according to Embodiment 1 of the present invention. FIG. 4 is a schematic cross-sectional view of the evaporation source according to Embodiment 1 of the present invention. FIG. 5 is a plan view of the reflector according to the first embodiment of the present invention. FIG. 6 is a schematic configuration diagram of the internal structure of the reflector according to the first embodiment of the present invention. FIG. 7 is a plan view of a reflector according to the second embodiment of the present invention. FIG. 8 is a schematic configuration diagram of the internal structure of the reflector according to the second embodiment of the present invention. FIG. 9 is a schematic configuration diagram of the internal structure of the reflector according to the second embodiment of the present invention. FIG. 10 is a plan view of a reflector according to the third embodiment of the present invention. FIG. 11 is a schematic configuration diagram of the internal structure of the reflector according to the third embodiment of the present invention.

  DESCRIPTION OF EMBODIMENTS Hereinafter, embodiments for carrying out the present invention will be exemplarily described in detail with reference to the drawings. However, the dimensions, materials, shapes, relative arrangements, and the like of the components described in this embodiment are not intended to limit the scope of the present invention only to those unless otherwise specified. .

Example 1
With reference to FIGS. 1-6, the evaporation source and vapor deposition apparatus which concern on Example 1 of this invention are demonstrated. FIG. 1 is a schematic configuration diagram of a vapor deposition apparatus according to Embodiment 1 of the present invention. FIG. 2 is a plan view of the evaporation source according to Embodiment 1 of the present invention. FIG. 3 is a side view of the evaporation source according to the first embodiment of the present invention, and shows a side view of the evaporation source in a state of being disposed in the vapor deposition apparatus. FIG. 4 is a schematic cross-sectional view of the evaporation source according to the first embodiment of the present invention, and corresponds to the A1-A2 cross-sectional view in FIG. FIG. 5 is a plan view of the reflector according to the first embodiment of the present invention, showing a state in which the lid is removed. FIG. 6 is a schematic configuration diagram of the internal structure of the reflector according to the first embodiment of the present invention, and shows the internal structure of the reflector in a simplified cross-sectional view. 1, FIG. 3, FIG. 4 and FIG. 6, the upper part in the figure corresponds to the upper part in the vertical direction when the vapor deposition apparatus is used, and the lower part in the figure corresponds to the lower part in the vertical direction when the vapor deposition apparatus is used.

<Vapor deposition equipment>
With reference to FIG. 1, the vapor deposition apparatus 1 is demonstrated easily. The vapor deposition apparatus 1 includes a chamber 20 configured to be in a state close to a vacuum by a vacuum pump 30 and an evaporation source 10 disposed inside the chamber 20. The evaporation source 10 plays a role of evaporating or sublimating the material by heating the material to be deposited on the substrate 70. A substance evaporated or sublimated by the evaporation source 10 is attached to the substrate 70 installed inside the chamber 20, whereby a thin film is formed on the substrate 70.

  Further, the vapor deposition apparatus 1 includes a first pipe 50 for supplying the coolant supplied from the coolant pump 40 provided outside the chamber 20 to the evaporation source 10, and the evaporation source 10 to the outside of the chamber 20. A second pipe 60 for discharging the coolant is provided.

<Evaporation source>
In particular, the overall configuration of the evaporation source 10 according to the present embodiment will be described with reference to FIGS. The evaporation source 10 is provided so as to surround the material of the substance to be deposited on the substrate 70, the crucible 100 is surrounded by the heating body 200, the crucible 100 is heated, the heating body 200 is surrounded, and the heat source 200 is heated. And a reflector 300 as a heat-shielding structure. Various configurations can be adopted as a method of heating the crucible 100. For example, when an energization heating method is employed, the heating body 200 corresponds to a wire to be energized. When the high frequency induction heating method is employed, the heating body 200 corresponds to a heating coil.

  The reflector 300 includes a cylindrical reflector main body 310, a bottom plate portion 320 provided below the reflector main body 310, and a lid portion 330 provided above the reflector main body 310. The reflector 300 is mounted on the mounting table 350.

In addition, when the reflector 300 is installed inside the chamber 20, an inclination adjusting mechanism is provided for adjusting the inclination of the reflector 300 with respect to the mounting table 350. This tilt adjustment mechanism is configured by a plurality of screw parts 360 that adjust the distance between the mounting table 350 and the reflector 300 at each position. The inclination of the reflector 300 with respect to the mounting table 350 can be adjusted by adjusting the distance between the mounting table 350 and the reflector 300 at each position by the plurality of screw parts 360.

  A cylindrical reflector 410 that reflects heat from the heating body 200 is provided between the inner wall surface 312 of the reflector body 310 and the heating body 200. A plate-like reflector 420 that reflects the heat from the heating body 200 is provided between the heating body 200 and the bottom plate portion 320. The plate-like reflector 420 is constituted by a disk-like member having a hole in the center. In the present embodiment, the cylindrical reflector 410 and the plate reflector 420 are configured to be separated from each other, but may be configured to be connected. Further, the cylindrical reflector 410 and the plate-like reflector 420 may be fixed to various members constituting the reflector 300. Inside the reflector main body 310 of the reflector 300, a cooling liquid chamber 311 provided along the inner wall surface 312 of the reflector main body 310 and through which the cooling liquid L flows is provided. The inner wall surface 312 of the reflector main body 310 according to the present embodiment has a function as a reflection surface that reflects heat from the heating body 200. Further, the coolant chamber 311 according to the present embodiment is formed by a cylindrical space. In the cooling liquid chamber 311, a drain pipe 340 that discharges the cooling liquid L from below the cooling liquid chamber 311 is provided.

  The bottom plate portion 320 of the reflector 300 is provided with a supply passage 321 that is provided so as to extend from the bottom surface of the reflector 300 into the coolant chamber 311 and to which the coolant L is supplied. Further, the bottom plate portion 320 is provided with a discharge passage 322 through which the coolant L is discharged from the coolant chamber 311 to the bottom surface of the reflector 300. The drainage pipe 340 has one end located above the coolant chamber 311 and the other end connected to the discharge passage 322. The opening provided in the end surface on the one end side of the drainage pipe 340 is configured to face upward.

  The first pipe 50 described above is provided so as to pass through the first insertion hole 21 formed in the chamber 20 and the third insertion hole 351 formed in the mounting table 350. One end side of the first pipe 50 is connected to the supply passage 321. The annular gap between the first pipe 50 and the first insertion hole 21 is sealed by the first gasket 26 made of an elastic body, and between the first pipe 50 and the third insertion hole 351. Designed to ensure an annular gap.

  The second pipe 60 is provided so as to pass through the second insertion hole 22 formed in the chamber 20 and the fourth insertion hole 352 formed in the mounting table 350. One end side of the second pipe 60 is connected to the discharge passage 322. The annular gap between the second pipe 60 and the second insertion hole 22 is sealed by the second gasket 27 made of an elastic body, and between the second pipe 60 and the fourth insertion hole 352. Designed to ensure an annular gap. In addition, about the 1st gasket 26 and the 2nd gasket 27, various well-known techniques, such as an O-ring whose cross-sectional shape is circular and a square ring whose cross-sectional shape is a rectangle, are applicable.

  When the tilt of the reflector 300 with respect to the mounting table 350 is changed by the tilt adjusting mechanism described above, the tilt of the first pipe 50 and the second pipe 60 with respect to the chamber 20 and the mounting table 350 is changed. Even in this case, since the annular gap is designed to be ensured between the first pipe 50 and the third insertion hole 351, the change in the inclination of the first pipe 50 with respect to the mounting table 350 is hindered. There is no. Further, since the first gasket 26 is made of an elastic body, even if the inclination of the first pipe 50 with respect to the chamber 20 changes, the annular gap between the first pipe 50 and the first insertion hole 21 is sealed. The maintained state is maintained. The same applies to the relationship between the second piping 60 and the mounting table 350 and the relationship between the second piping 60 and the chamber 20.

<How the coolant flows>
In particular, how the coolant L flows will be described with reference to FIGS. In addition, in FIG. 5, the top view of the state which removed the cover part 330 among the reflectors 300 is shown simply. Further, in FIG. 6, members related to the flow of the cooling liquid L are simply shown in the internal structure of the reflector 300 so that the flow of the cooling liquid L can be easily understood.

  The coolant L supplied from the first pipe 50 is sent into the coolant chamber 311 through the supply passage 321. As the supplied coolant L increases, the liquid level of the coolant L gradually rises in the coolant chamber 311 (see the solid line arrow in FIG. 6). When the liquid level of the cooling liquid L exceeds the upper end position H of the drainage pipe 340, the cooling liquid L enters the drainage pipe 340 from the opening at the upper end (end face on one end side) of the drainage pipe 340. Enter and fall due to gravity (see dotted arrow in FIG. 6). Thereafter, the coolant L passes through the discharge passage 322 and is discharged from the second pipe 60 to the outside of the chamber 20.

<Excellent points of the evaporation source according to this embodiment>
According to the evaporation source 10 according to the present embodiment, the coolant chamber 311 is provided along the inner wall surface 312 of the reflector body 310 inside the reflector 300 (inside the reflector body 310) as the heat shield structure. Yes. Accordingly, the cooling efficiency can be increased by the pipe-shaped tube as compared with the case of flowing the cooling liquid.

  Further, according to the evaporation source 10 according to the present embodiment, the supply passage 321 is provided so as to extend from the bottom surface of the reflector 300 into the coolant chamber 311. Accordingly, the cooling liquid L is supplied from below in the cooling liquid chamber 311.

  The bottom plate 320 provided below the reflector main body 310 is provided with a supply passage 321 and a discharge passage 322. As a result, the first pipe 50 and the second pipe 60 can be connected to the lower side of the reflector 300. That is, it is not necessary to connect a pipe to the side surface side or the upper surface side of the reflector 300. Therefore, the entire apparatus can be reduced in size.

  The drainage pipe 340 provided in the cooling liquid chamber 311 has one end located above the cooling liquid chamber 311 and the other end connected to the discharge passage 322. Thereby, the cooling liquid L can be discharged from the upper part in the cooling liquid chamber 311 to the lower part of the reflector 300 through the drain pipe 340. Therefore, coupled with the supply of the coolant L from below in the coolant chamber 311, the circulation direction of the coolant can be adapted to the temperature distribution required for the crucible 100. In other words, if the upper side of the crucible 100 is cooled too much, the evaporated or sublimated substance adheres to the upper part of the crucible 100 and is solidified. For this reason, it is desirable that the coolant L flowing through the coolant chamber 311 is used to block the heat from the heating element 200 while the upper side of the crucible 100 is not cooled too much. In the present embodiment, the cooling liquid L flows from the lower side to the upper side of the cooling liquid chamber 311 and circulates so as to be discharged from the drain pipe 340. Since the temperature of the cooling liquid L increases as the temperature of the cooling liquid L increases, the temperature of the cooling liquid L in the cooling liquid chamber 311 has a temperature distribution such that the temperature increases from below to above. Therefore, it is suppressed that the upper side of the crucible 100 is cooled too much.

  In the present embodiment, the opening provided on the end surface on one end side of the drainage pipe 340 is configured to face upward. Thereby, when the liquid level of the cooling liquid L exceeds the upper end position H of the drainage pipe 340, the cooling liquid L passes through the opening of the upper end (one end side end face) of the drainage pipe 340 and enters the drainage pipe 340. Enters and falls by gravity. Therefore, the cooling liquid L can be efficiently discharged from the drainage pipe 340 without providing a power source for discharging the cooling liquid L.

  In the present embodiment, the coolant chamber 311 is formed by a cylindrical space. Thereby, heat can be uniformly interrupted around the heating element 200.

  Further, in this embodiment, the cylindrical reflector 410 and the plate-like reflector 420 reflect the heat from the heating body 200, and the reflection body 310 of the reflector 200, which is a heat shield structure, also reflects the heat. It has been adopted. Therefore, it is possible to block the heat from the heating body 200 while increasing the heating efficiency of the crucible 100. Moreover, since the cylindrical reflector 410 and the plate-like reflector 420 are provided, the reflector body 310 is prevented from being heated, and the cooling efficiency by the coolant L can be increased.

(Example 2)
7 to 9 show a second embodiment of the present invention. In the present embodiment, a configuration in which the structure of the reflector as the heat shield structure is different from the case of the first embodiment is shown. Since the configuration described in the first embodiment can be applied to configurations other than the reflector, only the structure of the reflector will be described in the present embodiment.

  In FIG. 7, the top view of the state which removed the cover part among reflector 300X is shown simply. 8 and 9 simply show members related to the flow of the cooling liquid L in the internal structure of the reflector 300X so that the flow of the cooling liquid L can be easily understood. 8 shows a B1-B2 cross section in FIG. 7 in a simplified manner, and FIG. 9 simply shows a C1-C2 cross section in FIG.

  The reflector 300X according to the present embodiment includes a cylindrical first reflector body 310XX, a second reflector body 310XY, and a bottom plate portion 320X provided below the second reflector body 310XY. The reflector 300X according to the present embodiment also includes a partition 315X provided between the first reflector body 310XX and the second reflector body 310XY.

  Further, the reflector 300X according to the present embodiment also includes a lid portion above the first reflector body 310. However, since the lid portion is as described in the first embodiment, illustration and detailed description thereof are omitted. In addition, the point that the reflector 300X according to the present embodiment is mounted on the mounting table and the tilt can be adjusted with respect to the mounting table is the same as described in the first embodiment, and thus the description thereof is omitted. Also in this embodiment, the first pipe 50 and the second pipe 60 shown in the first embodiment are connected to the reflector 300X. In the case of the present embodiment, two first pipes 50 and two second pipes 60 are connected.

  Inside the first reflector body 310XX in the reflector 300X, there is provided a coolant chamber 311XX that is provided along the inner wall surface 312XX of the first reflector body 310XX and through which the coolant L flows. The inner wall surface 312XX of the first reflector body 310XX has a function as a reflection surface that reflects heat from a heating body (not shown). Further, the coolant chamber 311XX according to the present embodiment is formed by a cylindrical space.

  A cooling liquid chamber 311XY that is provided along the inner wall surface 312XY of the second reflector body 310XY and through which the cooling liquid L flows is also provided inside the second reflector body 310XY. The inner wall surface 312XY of the second reflector body 310XY has a function as a reflection surface that reflects heat from a heating body (not shown). Further, the coolant chamber 311XY according to the present embodiment is also formed by a cylindrical space.

  Thus, in the reflector 300X according to the present embodiment, the coolant chambers 311XX and 311XY are provided so as to be divided in the vertical direction.

In the case of the present embodiment, a supply pipe 370X for supplying the coolant L to the coolant chamber 311XX in the first reflector body 310XX is provided so as to pass through the coolant chamber 311XY in the second reflector body 310XY. . Further, in the cooling liquid chamber 311XX in the first reflector body 310XX, a drain pipe 340XX for discharging the cooling liquid L from below the cooling liquid chamber 311XX is provided. The drain pipe 340XX is provided so as to pass through the coolant chamber 311XY in the second reflector body 310XY.

  The bottom plate portion 320X of the reflector 300X is provided with a supply passage 321XX to which the coolant L is supplied and a discharge passage 322XX from which the coolant L is discharged. The drainage pipe 340XX has one end located above the coolant chamber 311XX in the first reflector body 310XX and the other end connected to the discharge passage 322XX. The opening provided on the end surface on one end side of the drainage pipe 340XX is configured to face upward.

  In addition, in the cooling liquid chamber 311XY of the second reflector body 310XY, a drain pipe 340XY that discharges the cooling liquid L from below the cooling liquid chamber 311XY is provided.

  The bottom plate portion 320X of the reflector 300X is provided with a supply passage 321XY that is provided so as to extend from the bottom surface of the reflector 300X into the coolant chamber 311XY of the second reflector body 310XY and to which the coolant L is supplied. The bottom plate portion 320X is provided with a discharge passage 322XY through which the coolant L is discharged from the coolant chamber 311XY in the second reflector body 310XY to the bottom surface of the reflector 300X. The drainage pipe 340XY has one end located above the coolant chamber 311XY and the other end connected to the discharge passage 322XY. The opening provided on the end face on one end side of the drainage pipe 340XY is configured to face upward.

  As described above, the first reflector body 310XX and the second reflector body 310XY are provided with the coolant chambers 311XX and 311XY, respectively. The first reflector body 310XX and the second reflector body 310XY are provided with supply passages 321XX and 321XY, discharge passages 322XX and 322XY, and drainage pipes 340XX and 340XY, respectively. A first pipe 50 is connected to each of the supply passages 321XX and 321XY, and a second pipe 60 is connected to each of the discharge passages 322XX and 322XY. Since the configuration and connection structure of the first pipe 50 and the second pipe 60 are as described in the first embodiment, illustration and detailed description thereof are omitted.

  The flow of the coolant L in the reflector 300X configured as described above will be described for each of the first reflector body 310XX and the second reflector body 310XY.

(About the first reflector body 310XX)
As shown in FIG. 8, the coolant L is supplied from the supply passage 321XX into the coolant chamber 311XX via the supply pipe 370X. As the cooling liquid L increases, the liquid level of the cooling liquid L gradually rises in the cooling liquid chamber 311XX (see solid arrows in FIG. 8). When the liquid level of the cooling liquid L exceeds the upper end position H1 of the drainage pipe 340XX, the cooling liquid L enters the drainage pipe 340XX from the opening at the upper end (end face on one end side) of the drainage pipe 340XX. Enter and fall due to gravity (see dotted arrow in FIG. 8). Thereafter, the coolant L passes through the discharge passage 322XX and is discharged to the outside of the chamber 20.

(About the second reflector body 310XY)
As shown in FIG. 9, the coolant L is supplied from the supply passage 321XY into the coolant chamber 311XY. As the cooling liquid L increases, the liquid level of the cooling liquid L gradually rises in the cooling liquid chamber 311XY (see the solid line arrow in FIG. 9). When the liquid level of the cooling liquid L exceeds the upper end position H2 of the drainage pipe 340XY, the cooling liquid L enters the drainage pipe 340XY from the opening at the upper end (end face on one end side) of the drainage pipe 340XY. Enter and fall due to gravity (see dotted arrow in FIG. 9). Thereafter, the coolant L passes through the discharge passage 322XY and is discharged to the outside of the chamber 20.

  Even when the reflector 300X according to the present embodiment configured as described above is applied to the evaporation source, the same effect as in the case of the first embodiment can be obtained. In the case of the present embodiment, the coolant chambers 311XX and 311XY are provided so as to be divided in the vertical direction. Therefore, the degree of cooling can be changed above and below the reflector 300X by changing the temperature of the cooling liquid L supplied to the cooling liquid chambers 311XX and 311XY. That is, as described above, it is desirable that the upper side of the crucible is not cooled too much. Even in the case of the first embodiment, the temperature of the coolant L in the coolant chamber 311 can be a temperature distribution that increases from the lower side to the upper side. However, when it is desired to further raise the upper temperature and lower the lower temperature, it is effective to employ the reflector 300X according to the present embodiment.

  In the present embodiment, the configuration in which the coolant chamber is divided into two in the vertical direction is shown, but a configuration in which the coolant chamber is divided into three or more in the vertical direction can also be adopted. Also in this embodiment, it is desirable to provide the cylindrical reflector 410 and the plate-like reflector 420 as in the case of the first embodiment.

(Example 3)
10 and 11 show a third embodiment of the present invention. In the present embodiment, a configuration in which the structure of the reflector as the heat shield structure is different from the case of the first embodiment is shown. Since the configuration described in the first embodiment can be applied to configurations other than the reflector, only the structure of the reflector will be described in the present embodiment.

  In FIG. 10, the top view of the state which removed the cover part among reflector 300Y is shown simply. Further, in FIG. 11, members related to the flow of the cooling liquid L are simply shown in the internal structure of the reflector 300Y so that the flow of the cooling liquid L can be easily understood. 11 corresponds to a diagram simply showing the D1-D2 cross section in FIG. 10, and also corresponds to a diagram simply showing the E1-E2 cross section in FIG.

  The reflector 300Y according to the present embodiment includes a first reflector body 310YX and a second reflector body 310YY that are semi-cylindrical (a shape that is cut by a plane that includes the central axis of the cylinder with respect to the cylindrical shape). Since the first reflector body 310YX and the second reflector body 310YY have the same configuration, the following description will be focused on the first reflector body 310YX, and description of the second reflector body 310YY will be omitted as appropriate.

  Also in the reflector 300Y according to the present embodiment, a bottom plate portion 320Y is provided below the first reflector body 310YX. Furthermore, the reflector 300Y according to the present embodiment also includes a lid portion above the first reflector body 310. However, although the shape of the lid portion differs depending on the shape of the reflector body, the basic configuration is the same as that of the first embodiment, and therefore illustration and detailed description thereof are omitted. The point that the reflector 300Y according to the present embodiment is mounted on the mounting table and the tilt can be adjusted with respect to the mounting table is the same as described in the first embodiment, and thus the description thereof is omitted. Also in this embodiment, the first pipe 50 and the second pipe 60 shown in the first embodiment are connected to the reflector 300Y. In the case of the present embodiment, two first pipes 50 and two second pipes 60 are connected. That is, the first pipe 50 and the second pipe 60 are connected to the first reflector body 310YX and the second reflector body 310YY, respectively.

  Inside the first reflector body 310YX in the reflector 300Y, there is provided a coolant chamber 311Y provided along the inner wall surface 312Y of the first reflector body 310YX and through which the coolant L flows. The inner wall surface 312Y of the first reflector body 310YX has a function as a reflecting surface that reflects heat from a heating body (not shown). Further, the coolant chamber 311Y according to the present embodiment is formed by a semi-cylindrical space.

  As described above, the second reflector body 310YY has the same configuration as the first reflector body 310YX. Accordingly, in the present embodiment, the reflector 300Y that is a heat shield structure is provided so as to be divided in the circumferential direction, and the coolant chamber 311Y is provided inside the first reflector body 310YX and the second reflector body 310YY, respectively. Is provided.

  Also in the present embodiment, as in the case of the first embodiment, a drain pipe 340Y that discharges the cooling liquid L from below the cooling liquid chamber 311Y is provided in the cooling liquid chamber 311Y of the first reflector body 310YX. ing.

  The bottom plate portion 320Y of the reflector 300Y is provided with a supply passage 321Y that is provided from the bottom surface of the reflector 300Y into the coolant chamber 311Y and to which the coolant L is supplied. Further, the bottom plate portion 320Y is provided with a discharge passage 322Y through which the coolant L is discharged from the coolant chamber 311Y to the bottom surface of the reflector 300Y. The drainage pipe 340Y has one end located above the coolant chamber 311Y and the other end connected to the discharge passage 322Y. The opening provided on the end surface on one end side of the drainage pipe 340Y is configured to face upward.

  As described above, the second reflector body 310YY has the same configuration as the first reflector body 310YX. Therefore, the first reflector main body 310YX and the second reflector main body 310YY are provided with the coolant chambers 311Y, respectively. The first reflector body 310YX and the second reflector body 310YY are provided with a supply passage 321Y, a discharge passage 322Y, and a drain pipe 340Y, respectively. A first pipe 50 is connected to each supply passage 321Y, and a second pipe 60 is connected to each discharge passage 322Y. Since the configuration and connection structure of the first pipe 50 and the second pipe 60 are as described in the first embodiment, illustration and detailed description thereof are omitted.

  A way of flowing the coolant L in the reflector 300Y configured as described above will be described.

  As shown in FIG. 11, in the first reflector body 310YX, the coolant L is supplied from the supply passage 321Y into the coolant chamber 311Y. As the cooling liquid L increases, the liquid level of the cooling liquid L gradually rises in the cooling liquid chamber 311Y (see the solid line arrow in FIG. 11). When the liquid level of the cooling liquid L exceeds the upper end position H of the drainage pipe 340Y, the cooling liquid L enters the drainage pipe 340Y from the opening at the upper end (end face on one end side) of the drainage pipe 340Y. Enter and fall due to gravity (see dotted arrow in FIG. 11). Thereafter, the coolant L passes through the discharge passage 322Y and is discharged to the outside of the chamber. The same applies to the second reflector body 310YY.

  Even when the reflector 300X according to the present embodiment configured as described above is applied to the evaporation source, the same effect as in the case of the first embodiment can be obtained. In the case of the present embodiment, it is effective when a high frequency induction heating method is employed as a heating method for heating the crucible. The reason will be described below.

  When the high frequency induction heating method is employed, as shown in the first and second embodiments, when a cylindrical reflector body is employed and the reflector body is made of a conductive material, heating is performed. When a current flows through the coil, an eddy current is also generated in the reflector body. On the other hand, in the case of the reflector 300Y according to the present embodiment, since it is divided in the circumferential direction, no eddy current is generated in the reflector 300Y even if a current flows through the heating coil. In the illustrated example, a gap is provided between the first reflector body 310YX and the second reflector body 310YY. However, a configuration in which the first reflector main body 310YX and the second reflector main body 310YY are coupled in a state where a member made of a non-conductive material is provided in the gap may be employed.

  In the present embodiment, a configuration in which the reflector 300Y is divided into two in the circumferential direction is shown, but a configuration in which the reflector is divided into three or more in the circumferential direction can also be adopted. Moreover, after adopting a configuration in which the reflector is divided in the circumferential direction as in this embodiment, it is also possible to adopt a configuration in which the coolant chamber is divided into a plurality of portions in the vertical direction as described in the second embodiment. it can. Also in the present embodiment, as in the case of the first embodiment, heating is performed between the inner wall surface 312Y of the reflector main body (the first reflector main body 310YX and the second reflector main body 310YY) and the heating body (not shown). It is desirable to provide a reflector that reflects heat from the body. Also for the reflector, it is desirable to adopt a reflector made of a semi-cylindrical member so that no eddy current is generated. Also, it is desirable to provide a plate-like reflector that reflects the heat from the heating body between the heating body and the bottom plate portion 320Y. It is desirable to adopt a shape that does not generate eddy currents for this plate-like reflector.

(Other)
As described in the third embodiment, when a high frequency induction heating method is employed, when a cylindrical reflector body is employed and the reflector body is made of a conductive material, a current flows through the heating coil. Eddy currents are also generated in the reflector body. In order to prevent this, it is also possible to employ a reflector body having a shape in which a slit extending in the axial direction is provided at one place in the circumferential direction with respect to the cylindrical shape. In this case, the shape of the reflector body and the coolant chamber viewed from above is a C-shape.

  The cylindrical reflector 410 and the plate-like reflector 420 shown in the first embodiment can be provided in multiple layers, not just one. The same applies to the second and third embodiments. Further, a configuration in which only the cylindrical reflector 410 is provided and the plate-like reflector 420 is not provided may be employed. Moreover, in each said Example, the case where the heat insulation structure was comprised with the reflector was shown. However, when a cylindrical reflector or a plate-like reflector is provided, the heat shield structure does not have to be a reflector. That is, the heat shield structure need not have a function of reflecting heat. Further, when the heat shield structure is a reflector, a configuration in which a cylindrical reflector and a plate reflector are not provided may be employed.

  DESCRIPTION OF SYMBOLS 1 ... Evaporation apparatus 10 ... Evaporation source 20 ... Chamber 70 ... Substrate 100 ... Crucible 200 ... Heating body 300, 300X, 300Y ... Reflector 310, 310XX, 310XY, 310YX, 310YY ... Reflector main body 311, 311XX, 311XY, 311Y ... Coolant Chamber 312, 312XX, 312XY, 312Y ... Inner wall surface 320, 320X, 320Y ... Bottom plate portion 321, 321XX, 321XY, 321Y ... Supply passage 322, 322XX, 322XY, 322Y ... Discharge passage 330 ... Lid portion 340, 340XX, 340XY, 340Y ... Drain pipe, 350 ... Place 360 ... Screw parts L ... Coolant

Claims (11)

A crucible for accommodating a timber fee Ru is deposited on the substrate,
A heating body provided so as to surround the crucible and heating the crucible;
A heat shield structure that is provided so as to surround the heating body and blocks heat;
An evaporation source comprising:
A coolant chamber provided inside the heat shield structure along the inner wall surface of the heat shield structure, and through which a coolant flows;
A drainage pipe provided in the cooling liquid chamber for discharging the cooling liquid from below the cooling liquid chamber;
An evaporation source comprising:   2. The evaporation source according to claim 1, further comprising a supply passage that is provided so as to extend from a bottom surface of the heat shield structure to the cooling liquid chamber and to which the cooling liquid is supplied. Provided from the cooling liquid chamber to the bottom surface of the heat shield structure, provided with a discharge passage for discharging the cooling liquid,
3. The evaporation source according to claim 1, wherein one end of the drainage pipe is located above the coolant chamber and the other end is connected to the discharge passage.   The evaporation source according to claim 1, 2, or 3, wherein an opening provided on an end face on one end side of the drainage pipe faces upward.   The evaporation source according to claim 1, wherein the cooling liquid chamber is formed by a cylindrical space.   The evaporation source according to claim 1, wherein a plurality of the cooling liquid chambers are provided so as to be divided in the vertical direction.   A plurality of the heat shield structures are provided so as to be divided in the circumferential direction, and a cooling liquid chamber is provided in each heat shield structure, respectively. The evaporation source described in 1.   The evaporation source according to any one of claims 1 to 7, wherein a reflector that reflects heat from the heating body is provided between the heat shield structure and the heating body. . The evaporation source according to any one of claims 1 to 8,
A chamber in which the evaporation source is disposed;
A vapor deposition apparatus comprising: A mounting table for the heat shield structure;
An inclination adjusting mechanism for adjusting the inclination of the heat shield structure relative to the mounting table;
A first pipe provided so as to pass through a first insertion hole formed in the chamber and through which a cooling liquid supplied into the cooling liquid chamber flows;
A first gasket made of an elastic material that seals the annular gap between the first pipe and the first insertion hole;
A second pipe that is provided so as to pass through a second insertion hole formed in the chamber and through which the coolant discharged from the coolant chamber flows;
A second gasket made of an elastic material that seals the annular gap between the second pipe and the second insertion hole;
The vapor deposition apparatus according to claim 9, comprising: The tilt adjustment mechanism is
The vapor deposition apparatus according to claim 10, comprising a plurality of screw parts that adjust a distance between the mounting table and the heat shield structure at each position.