CN109972094A - Evaporation source and evaporation coating device - Google Patents
Evaporation source and evaporation coating device Download PDFInfo
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- CN109972094A CN109972094A CN201811070879.1A CN201811070879A CN109972094A CN 109972094 A CN109972094 A CN 109972094A CN 201811070879 A CN201811070879 A CN 201811070879A CN 109972094 A CN109972094 A CN 109972094A
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- China
- Prior art keywords
- reflector
- evaporation source
- coolant liquid
- thermotectonics
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The present invention provides the evaporation source and evaporation coating device that can be improved cooling efficiency.Evaporation source (10) has: the crucible (100) in the material of the substance of substrate will be deposited in receiving；To be arranged in a manner of crucible (100) and the calandria (200) of heating crucible (100)；And it is arranged and interdicts the reflector (300) of heat in a manner of around calandria (200), it is characterized in that, the evaporation source (10) has: being set to the inside of reflector ontology (310) and the cooling liquid chamber (311) for coolant flow in a manner of along the inner wall of reflector ontology (310)；And it is set in cooling liquid chamber (311), the drain pipe (340) that coolant liquid is discharged from the lower section of cooling liquid chamber (311).
Description
Technical field
The present invention relates to the evaporation sources and evaporation coating device that use to carry out vacuum evaporation.
Background technique
Has the construction of the heat of calandria of the blocking from heating crucible in evaporation source.It is constructed as previous, there is known
By the duct-like construction (referring to patent document 1) for being piped around crucible, flowing cooling water in the piping.
But in the case where such construction, due to contact surface of the pipeline relative to crucible etc. of Cooling Water flowing
Product is small, so cooling efficiency is low.
Patent document 1: Japanese Unexamined Patent Publication 6-10118 bulletin
Summary of the invention
Subject to be solved by the invention
The object of the present invention is to provide the evaporation sources and evaporation coating device that can be improved cooling efficiency.
A technical solution to solve project
In order to solve the above problems, the following technical solution is employed by the present invention.
I.e., evaporation source of the invention has:
Crucible, receiving will be deposited in the material of the substance of substrate；
Calandria is arranged in a manner of around the crucible, heats the crucible；And
Thermotectonics body is hidden, is arranged in a manner of around the calandria, blocking heat,
It is characterized in that,
The evaporation source has:
The inside of the screening thermotectonics body is arranged in cooling liquid chamber in a manner of along the inner wall for hiding thermotectonics body,
And for coolant flow；And
Drain pipe is set in the coolant liquid room, and coolant liquid is discharged from the lower section of the cooling liquid chamber.
The effect of invention
As described above, in accordance with the invention it is possible to improve cooling efficiency.
Detailed description of the invention
Fig. 1 is the schematic structural diagram of the evaporation coating device of the embodiment of the present invention 1.
Fig. 2 is the top view of the evaporation source of the embodiment of the present invention 1.
Fig. 3 is the side view of the evaporation source of the embodiment of the present invention 1.
Fig. 4 is the schematical cross-sectional view of the evaporation source of the embodiment of the present invention 1.
Fig. 5 is the top view of the reflector of the embodiment of the present invention 1.
Fig. 6 is the in-built schematic structural diagram of the reflector of the embodiment of the present invention 1.
Fig. 7 is the top view of the reflector of the embodiment of the present invention 2.
Fig. 8 is the in-built schematic structural diagram of the reflector of the embodiment of the present invention 2.
Fig. 9 is the in-built schematic structural diagram of the reflector of the embodiment of the present invention 2.
Figure 10 is the top view of the reflector of the embodiment of the present invention 3.
Figure 11 is the in-built schematic structural diagram of the reflector of the embodiment of the present invention 3.
Specific embodiment
Hereinafter, being based on embodiment referring to drawing, mode for carrying out the present invention being illustratively described in detail.But
The size, material, shape of documented constituent part, its relative configuration etc. in the embodiment, as long as no especially specific note
It carries, the scope of the present invention is just not limited to these.
(embodiment 1)
Referring to Fig.1~Fig. 6 illustrates the evaporation source and evaporation coating device of the embodiment of the present invention 1.Fig. 1 is implementation of the invention
The schematic structural diagram of the evaporation coating device of example 1.Fig. 2 is the top view of the evaporation source of the embodiment of the present invention 1.Fig. 3 is of the invention
The side view of the evaporation source of embodiment 1 is indicated in the side view for being configured at evaporation source in the state of steaming in device.Fig. 4 is
The schematical cross-sectional view of the evaporation source of the embodiment of the present invention 1, the A1-A2 cross-sectional view being equivalent in Fig. 2.Fig. 5 is the present invention
Embodiment 1 reflector top view, indicate to have removed the state of cover.Fig. 6 is the reflector of the embodiment of the present invention 1
In-built schematic structural diagram indicates the internal structure of reflector with simple cross-sectional view.In Fig. 1, Fig. 3, Fig. 4 and Fig. 6,
Top in figure is equivalent to above vertical direction when evaporation coating device uses, and lower section is equivalent to lead when evaporation coating device uses in figure
Below vertical direction.
[evaporation coating device]
Referring to Fig.1, evaporation coating device 1 is simplyd illustrate.Evaporation coating device 1 has: approaching internal become using vacuum pump 30
The chamber 20 of the state of vacuum；And configuration is in the evaporation source 10 of the inside of chamber 20.Evaporation source 10 by heating to be deposited in
The material of the substance of substrate 70 plays the effect for making the material evaporate or distil.By being evaporated or rising using the evaporation source 10
The substance of China is attached to the substrate 70 that the inside of chamber 20 is arranged in, and forms film in substrate 70.
In addition, having in evaporation coating device 1: the 1st piping 50, for supplying to evaporation source 10 from the outside for being set to chamber 20
Coolant pump 40 supply coolant liquid；And the 2nd piping 60, for the external discharge cooling from evaporation source 10 to chamber 20
Liquid.
[evaporation source]
Referring particularly to Fig. 2~Fig. 4, illustrate the overall structure of the evaporation source 10 of the present embodiment.Evaporation source 10 has: receiving
The crucible 100 in the material of the substance of substrate 70 is deposited；It is arranged in a manner of around crucible 100, the heating of heating crucible 100
Body 200；And it is arranged in a manner of around calandria 200, the reflector 300 of the screening thermotectonics body as blocking heat.Heat earthenware
Various structures can be used in the mode of crucible 100.For example, calandria 200, which is equivalent to, to be led to using electrified regulation mode
The wire of electricity.In addition, calandria 200 is equivalent to heating coil using high-frequency induction heating mode.
Reflector 300 by cylindric reflector ontology 310, set on the lower section of reflector ontology 310 base plate 320,
It is constituted with the cover 330 for the top for being set to reflector ontology 310.The reflector 300 is placed in mounting table 350.
In addition, being equipped with adjustment reflector 300 relative to mounting table when reflector 300 to be arranged in the inside of chamber 20
350 inclined tilt adjusting mechanism.The tilt adjusting mechanism is by respective positions adjustment mounting table 350 and reflector 300
Interval multiple thread parts 360 constitute.By adjusting mounting table in respective positions by above-mentioned multiple thread parts 360
350 with the interval of reflector 300, inclination of the reflector 300 relative to mounting table 350 can be adjusted.
Between the inner wall 312 and calandria 200 of reflector ontology 310, equipped with making the heat reflection from calandria 200
Cylindric reflector 410.In addition, between calandria 200 and base plate 320, equipped with making the heat reflection from calandria 200
Plate reflector 420.In addition, plate reflector 420 is made of the disk-shaped component for opening up hole in center.In the present embodiment
In, cylindric reflector 410 is separated with plate reflector 420, but they can also be connected.In addition, cylindric reflector 410
As long as being fixed on the various components for constituting reflector 300 with plate reflector 420.Moreover, in the reflector of reflector 300
The inside of ontology 310, which is equipped with, to be arranged and for the cold of coolant liquid L flowing in a manner of the inner wall 312 along reflector ontology 310
But liquid chamber 311.The inner wall 312 of the reflector ontology 310 of the present embodiment has as making the heat reflection from calandria 200
The function of reflecting surface.In addition, the cooling liquid chamber 311 of the present embodiment is formed by cylindric space.Moreover, in the cooling liquid chamber
In 311, has the drain pipe 340 that coolant liquid L is discharged from the lower section of cooling liquid chamber 311.
In the base plate 320 of reflector 300, equipped with being arranged and supply in from the bottom surface of reflector 300 to cooling liquid chamber 311
To the supply passageway 321 of coolant liquid L.In addition, being equipped with out of cooling liquid chamber 311 in the base plate 320 to the bottom surface of reflector 300
Ground setting and the drain passageway 322 that coolant liquid L is discharged.Moreover, one end of drain pipe 340 is located at the top in cooling liquid chamber 311,
The other end is connect with drain passageway 322.It is configured to set on the opening portion of the end face of the one end of the drain pipe 340 towards upper
Side.
The 1st above-mentioned piping 50 is configured to insert and is formed in the 1st insertion hole 21 of chamber 20 and is formed in mounting table
In 350 the 3rd insertion hole 351.In addition, the one end of the 1st piping 50 is connected to supply passageway 321.Moreover, the 1st piping 50
Annular gap between the 1st insertion hole 21 is sealed by the 1st washer 26 of elastic system, is piped the 50 and the 3rd insertion hole the 1st
Annular gap is designed to ensure that between 351.
It is formed in the 2nd insertion hole 22 of chamber 20 in addition, the 2nd piping 60 is configured to insert and is formed in mounting table
In 350 the 4th insertion hole 352.In addition, the one end of the 2nd piping 60 is connect with drain passageway 322.Moreover, the 2nd piping 60
Annular gap between the 2nd insertion hole 22 is sealed by the 2nd washer 27 of elastic system, is piped the 60 and the 4th insertion hole the 2nd
Annular gap is designed to ensure that between 352.In addition, can be using cross sectional shape about the 1st washer 26 and the 2nd washer 27
The various well-known techniques such as circular O-ring seal, the square sealing ring that cross sectional shape is rectangle.
Pass through above-mentioned tilt adjusting mechanism, when reflector 300 generates variation relative to the inclination of mounting table 350, the 1st
The 50 and the 2nd piping 60 of piping generates variation relative to the inclination of chamber 20 and mounting table 350.Even if in this case, because the 1st
Annular gap is designed to ensure that between the 50 and the 3rd insertion hole 351 of piping, so will not be to the 1st piping 50 relative to mounting
The inclined variation of platform 350 generates obstacle.Further, since the 1st washer 26 is made of elastomer, so even if the 1st 50 phases of piping
Variation is generated for the inclination of chamber 20, the state that is sealed of annular gap between the 1st the 50 and the 1st insertion hole 21 of piping also by
It maintains.2nd piping 60 and the relationship of mounting table 350 and the 2nd piping 60 are also the same with the relationship of chamber 20.
[type of flow of coolant liquid]
Referring particularly to Fig. 4~Fig. 6, illustrate the type of flow of coolant liquid L.In addition, being schematically indicated reflection in Fig. 5
The top view of the state for having removed cover 330 in body 300.In addition, in Fig. 6, in order to easily identify the flowing side of coolant liquid L
Formula is schematically indicated and the associated component of the type of flow of coolant liquid L in the internal structure of reflector 300.
Pass through supply passageway 321 from the coolant liquid L of 50 supply of the 1st piping, is sent into cooling liquid chamber 311.It is cold with supplying
But the increase of liquid L, the liquid level of coolant liquid L gradually rise in cooling liquid chamber 311 (referring to the solid arrow label in Fig. 6).
Moreover, coolant liquid L is from upper end (one end of drain pipe 340 when the liquid level of coolant liquid L is more than the upper end position H of drain pipe 340
The end face of side) opening portion enter in the pipe of drain pipe 340, fallen because of gravity (referring to the dotted arrow label in Fig. 6).It
Afterwards, external discharge of the coolant liquid L by drain passageway 322, from the 2nd piping 60 to chamber 20.
[the advantages of evaporation source of the present embodiment]
According to the evaporation source 10 of the present embodiment, in inside (the reflector ontology as the reflector 300 for hiding thermotectonics body
310 inside), cooling liquid chamber 311 is equipped in a manner of the inner wall 312 along reflector ontology 310.Thus, it is managed with utilizing
The case where pipe of road shape makes coolant flow is compared, and can be improved cooling efficiency.
In addition, according to the evaporation source 10 of the present embodiment, from the bottom surface of reflector 300 to the mode in cooling liquid chamber 311
Has supply passageway 321.Thus, coolant liquid L is supplied to from the lower section in cooling liquid chamber 311.
Moreover, the base plate 320 in the lower section for being set to reflector ontology 310 has supply passageway 321 and drain passageway
322.Thereby, it is possible to the 50 and the 2nd piping 60 of the 1st piping is connected to the lower section of reflector 300.In other words, without making to be piped
It is connected to side, the top side of reflector 300.Thus, it is possible to make device integral miniaturization.
In addition, the one end for the drain pipe 340 having in cooling liquid chamber 311 is located at the top in cooling liquid chamber 311, the other end
It is connected to drain passageway 322.Thereby, it is possible to so that coolant liquid L is passed through drain pipe 340 to reflection from the top in cooling liquid chamber 311
The lower section of body 300 is discharged.Thus, it is supplied to and matches from the lower section in cooling liquid chamber 311 with coolant liquid L, coolant liquid can be made
Loop direction matched with Temperature Distribution required by crucible 100.I.e., in crucible 100, if upper side is excessively cooled down,
Then evaporation or sublimed substance can be attached to the top of crucible 100 and become the state being cured.It is preferred, therefore, that
It is desirable with the coolant liquid L flowed in cooling liquid chamber 311 and interdicts the heat from calandria 200, another aspect prevents crucible
100 upper side is excessively cooled down.In the present embodiment, coolant liquid L is from the lower section of cooling liquid chamber 311 flow direction top and from row
The discharged mode of liquid pipe 340 recycles.Moreover, because the higher coolant liquid L of the temperature of coolant liquid L more rises, so cooling liquid chamber
The temperature of coolant liquid L in 311 is as temperature increases such Temperature Distribution upward from below.Thus, crucible 100 is upper
The situation that square side is excessively cooled down is inhibited.
In addition, in the present embodiment, the opening portion set on the end face of the one end of drain pipe 340 is configured to upward.
As a result, when the liquid level of coolant liquid L is more than the upper end position H of drain pipe 340, coolant liquid L is from upper end (one end of drain pipe 340
The end face of side) opening portion enter in the pipe of drain pipe 340, fall because of gravity.Thus, it is possible to be not provided with for making coolant liquid
Coolant liquid L is discharged efficiently from drain pipe 340 in the ground such as the power source of L discharge.
In addition, in the present embodiment, cooling liquid chamber 311 is formed by cylindric space.Thereby, it is possible in calandria 200
Around equably blocking heat.
Moreover, use is made using cylindric reflector 410 and plate reflector 420 from calandria in the present embodiment
200 heat reflection, and also utilize the structure for making heat reflection as the reflector ontology 310 for the reflector 200 for hiding thermotectonics body.Cause
And it can be improved the heating efficiency of crucible 100, and interdict the heat from calandria 200.Further, since being equipped with cylindric anti-
Beam 410 and plate reflector 420 can be improved so reflector ontology 310 is inhibited the case where being heated based on cooling
The cooling efficiency of liquid L.
(embodiment 2)
Fig. 7~Fig. 9 indicates the embodiment of the present invention 2.In the present embodiment, the structure as the reflector for hiding thermotectonics body
It makes, indicates the structure of the situation different from the case where above-described embodiment 1.About the structure other than reflector, due to that can apply
The structure illustrated in above-described embodiment 1, so only illustrating the construction of reflector in the present embodiment.
In Fig. 7, it is schematically indicated the top view of state in reflector 300X, to have removed cover.In addition, in Fig. 8
In Fig. 9, in order to easily identify the type of flow of coolant liquid L, in the internal structure of reflector 300X, be schematically indicated with it is cold
But the associated component of the type of flow of liquid L.In addition, Fig. 8 is schematically indicated the section B1-B2 in Fig. 7, Fig. 9 is schematically indicated figure
The section C1-C2 in 7.
The reflector 300X of the present embodiment has: the 1st cylindric reflector ontology 310XX and the 2nd reflector ontology
310XY；And the base plate 320X set on the lower section of the 2nd reflector ontology 310XY.In addition, the reflector 300X of the present embodiment
Also has the wall part 315X between the 1st reflector ontology 310XX and the 2nd reflector ontology 310XY.
Moreover, also having cover in the top of the 1st reflector ontology 310 in the reflector 300X of the present embodiment.But
It is, about cover, because with identical, illustration omitted and detailed description is illustrated in above-described embodiment 1.In addition, because closing
Be placed in mounting table in the reflector 300X of the present embodiment, and can be carried out relative to mounting table tilt adjustments this point also with
Illustrate in above-described embodiment 1 it is identical, so the description thereof will be omitted.In addition, in the present embodiment, the 1st shown in above-described embodiment 1
The 50 and the 2nd piping 60 of piping is also connected to reflector 300X.In case of the present embodiment, there are two the 1st 50 Hes of piping for connection
Two the 2nd pipings 60.
In the inside of the 1st reflector ontology 310XX of reflector 300X, equipped with along the 1st reflector ontology 310XX's
The mode of inner wall 312XX is arranged and for the cooling liquid chamber 311XX of coolant liquid L flowing.1st reflector ontology 310XX's is interior
Wall surface 312XX has the function as the reflecting surface for making the heat reflection from calandria (not shown).In addition, the present embodiment is cold
But liquid chamber 311XX is formed by cylindric space.
Moreover, also being provided in the inside of the 2nd reflector ontology 310XY along the inner wall of the 2nd reflector ontology 310XY
The mode of face 312XY is arranged and for the cooling liquid chamber 311XY of coolant liquid L flowing.The inner wall of 2nd reflector ontology 310XY
312XY has the function as the reflecting surface for making the heat reflection from calandria (not shown).In addition, the coolant liquid of the present embodiment
Room 311XY is also formed by cylindric space.
In this way, cooling liquid chamber 311XX, 311XY is configured in above-below direction in the reflector 300X of the present embodiment
Segmentation.
In case of the present embodiment, it is equipped in a manner of the cooling liquid chamber 311XY across the 2nd reflector ontology 310XY
For the supply pipe 370X to the cooling liquid chamber 311XX of the 1st reflector ontology 310XX supply coolant liquid L.In addition, in the 1st reflection
In the cooling liquid chamber 311XX of body ontology 310XX, has the drain pipe that coolant liquid L is discharged from the lower section of cooling liquid chamber 311XX
340XX.Drain pipe 340XX is disposed across the cooling liquid chamber 311XY of the 2nd reflector ontology 310XY.
Moreover, supply passageway 321XX and discharge equipped with supply coolant liquid L are cold in the base plate 320X of reflector 300X
But the drain passageway 322XX of liquid L.Moreover, one end of drain pipe 340XX is located at the cooling liquid chamber of the 1st reflector ontology 310XX
Top in 311XX, the other end are connect with drain passageway 322XX.Opening set on the end face of the one end of drain pipe 340XX
Portion is configured to upward.
In addition, having makes coolant liquid L from cooling liquid chamber in the cooling liquid chamber 311XY of the 2nd reflector ontology 310XY
The drain pipe 340XY of the lower section discharge of 311XY.
Moreover, in the base plate 320X of reflector 300X, equipped with from the bottom surface of reflector 300X to the 2nd reflector ontology
Mode in the cooling liquid chamber 311XY of 310XY is arranged and supplies the supply passageway 321XY of coolant liquid L.In addition, in the base plate
320X, equipped with by the cooling liquid chamber 311XY from the 2nd reflector ontology 310XY to the bottom surface of reflector 300X in a manner of be arranged
And the drain passageway 322XY of coolant liquid L is discharged.Moreover, one end of drain pipe 340XY is located at the top in cooling liquid chamber 311XY,
The other end is connected to drain passageway 322XY.Opening portion set on the end face of the one end of drain pipe 340XY is configured to towards upper
Side.
As described above, being respectively equipped with cooling liquid chamber on the 1st reflector ontology 310XX and the 2nd reflector ontology 310XY
311XX,311XY.In addition, it is logical to be respectively equipped with supply on these the 1st reflector ontology 310XX and the 2nd reflector ontology 310XY
Road 321XX, 321XY, drain passageway 322XX, 322XY and drain pipe 340XX, 340XY.On supply passageway 321XX, 321XY
It is connected separately with the 1st piping 50, the 2nd piping 60 is connected separately on drain passageway 322XX, 322XY.About the 1st piping 50
With the 2nd piping 60 structure and connecting structure because with illustrate in above-described embodiment 1 it is identical, illustration omitted and in detail
Explanation.
The type of flow of coolant liquid L about the reflector 300X constituted above illustrates the 1st reflector ontology respectively
310XX and the 2nd reflector ontology 310XY.
(about the 1st reflector ontology 310XX)
As shown in figure 8, supplying coolant liquid L into cooling liquid chamber 311XX from supply passageway 321XX via supply pipe 370X.
Moreover, the liquid level of coolant liquid L gradually rises in cooling liquid chamber 311XX (referring to the reality in Fig. 8 with the increase of coolant liquid L
Line arrow mark).Moreover, when the liquid level of coolant liquid L is more than the upper end position H1 of drain pipe 340XX, coolant liquid L is from drain pipe
The opening portion of the upper end (end face of one end) of 340XX enters in the pipe of drain pipe 340XX, is fallen because of gravity (referring in Fig. 8
Dotted arrow label).Later, external discharge of the coolant liquid L by drain passageway 322XX, to chamber 20.
(about the 2nd reflector ontology 310XY)
As shown in figure 9, supplying coolant liquid L into cooling liquid chamber 311XY from supply passageway 321XY.Moreover, with coolant liquid
The increase of L, the liquid level of coolant liquid L gradually rise in cooling liquid chamber 311XY (referring to the solid arrow label in Fig. 9).And
And when the liquid level of coolant liquid L is more than the upper end position H2 of drain pipe 340XY, coolant liquid L is from the upper end of drain pipe 340XY (one
The end face of end side) opening portion enter in the pipe of drain pipe 340XY, fallen because of gravity (referring to the dotted arrow mark in Fig. 9
Note).Later, external discharge of the coolant liquid L by drain passageway 322XY, to chamber 20.
In the case where the reflector 300X of the present embodiment constituted above is applied to evaporation source, can also obtain
The case where with above-described embodiment 1 identical effect.In addition, in case of the present embodiment, cooling liquid chamber 311XX, 311XY is set
It is set to and divides in the up-down direction.Thus, by the temperature for changing the coolant liquid L supplied to these cooling liquid chambers 311XX, 311XY
Degree, can be in the cooling degree of the change up and down of reflector 300X.I.e., as described above, it is preferred to which the upper side of crucible is not by excessively cold
But.In the case where above-described embodiment 1, the temperature of the coolant liquid L in cooling liquid chamber 311 is also capable of forming as from below towards upper
Fang Wendu gets higher such Temperature Distribution.But want to further increase the temperature of top and the case where reduce the temperature of lower section
Under, it is effective using the reflector 300X of the present embodiment.
In addition, in the present embodiment, illustrating that cooling liquid chamber carries out the structure of 2 segmentation situations in the up-down direction, still
Cooling liquid chamber also can be using the structure for being divided into 3 segmentations or more in the up-down direction.In addition, in the present embodiment, also as above
The case where stating embodiment 1 is such, is preferably provided with cylindric reflector 410 and plate reflector 420.
(embodiment 3)
The embodiment of the present invention 3 is illustrated in Figure 10 and Figure 11.It is indicated in the present embodiment as screening thermotectonics body
The structure of the construction of the reflector situation different from the case where above-described embodiment 1.About the structure other than reflector, due to can
The structure illustrated in above-described embodiment 1 is applied, so only illustrating the construction of reflector in the present embodiment.
In Figure 10, it is schematically indicated the top view of state in reflector 300Y, to have removed cover.In addition, scheming
In 11, in order to easily identify the type of flow of coolant liquid L, in the internal structure of reflector 300Y, it is schematically indicated and cooling
The associated component of the type of flow of liquid L.In addition, Figure 11 is equivalent to the figure in the section D1-D2 being schematically indicated in Figure 10, and
Also correspond to be schematically indicated the figure in the section E1-E2 in Figure 10.
The reflector 300Y of the present embodiment has semi-circular cylindrical and (cuts off cylinder with the face including the central axis of cylinder
Shape as shape) the 1st reflector ontology 310YX and the 2nd reflector ontology 310YY.In addition, because the 1st reflector sheet
Body 310YX and the 2nd reflector ontology 310YY is identical structure, thus below centered on the 1st reflector ontology 310YX into
Row explanation, the explanation about the 2nd reflector ontology 310YY are suitably omitted.
In the reflector 300Y of the present embodiment, also has base plate 320Y in the lower section of the 1st reflector ontology 310YX.
Moreover, also having cover in the top of the 1st reflector ontology 310 on the reflector 300Y of the present embodiment.But about lid
Portion, although its shape and the shape of reflector ontology are correspondingly different, because basic structure and above-described embodiment 1
Situation is identical, so illustration omitted and detailed description.In addition, the reflector 300Y about the present embodiment be placed in mounting table and
Be able to carry out tilt adjustments this point relative to mounting table because also with illustrate in above-described embodiment 1 identical, omit it
Explanation.In addition, in the present embodiment, the 50 and the 2nd piping 60 of the 1st piping shown in above-described embodiment 1 is also connected to reflector
300Y.In case of the present embodiment, there are two the 1st pipings 50 and two the 2nd pipings 60 for connection.In other words, in the 1st reflection
Body ontology 310YX and the 2nd reflector ontology 310YY is connected separately with the 50 and the 2nd piping 60 of the 1st piping.
In the inside of the 1st reflector ontology 310YX of reflector 300Y, equipped with along the 1st reflector ontology 310YX's
The mode of inner wall 312Y is arranged and for the cooling liquid chamber 311Y of coolant liquid L flowing.The inner wall of 1st reflector ontology 310YX
Face 312Y has the function as the reflecting surface for making the heat reflection from calandria (not shown).In addition, the cooling of the present embodiment
Liquid chamber 311Y is formed by the space of semi-circular cylindrical.
As described above, being structure identical with the 1st reflector ontology 310YX about the 2nd reflector ontology 310YY.By
This is configured to divide in the circumferential, in the 1st reflector sheet as the reflector 300Y for hiding thermotectonics body in the present embodiment
The inside of body 310YX and the 2nd reflector ontology 310YY are respectively equipped with cooling liquid chamber 311Y.
In the present embodiment, with above-described embodiment 1 the case where identically, in the cooling liquid chamber of the 1st reflector ontology 310YX
In 311Y, has the drain pipe 340Y that coolant liquid L is discharged from the lower section of cooling liquid chamber 311Y.
Moreover, in the base plate 320Y of reflector 300Y, equipped with from the bottom surface of reflector 300Y to cooling liquid chamber 311Y
Interior mode is arranged and supplies the supply passageway 321Y of coolant liquid L.In addition, in base plate 320Y, it is equipped with from cooling liquid chamber
Mode in 311Y to the bottom surface of reflector 300Y is arranged and the drain passageway 322Y of coolant liquid L is discharged.Moreover, drain pipe 340Y
One end be located at the top in cooling liquid chamber 311Y, the other end is connect with drain passageway 322Y.Set on the one of drain pipe 340Y
The opening portion of the end face of end side is configured to upward.
As described above, being structure identical with the 1st reflector ontology 310YX about the 2nd reflector ontology 310YY.Cause
And cooling liquid chamber 311Y is respectively equipped in the 1st reflector ontology 310YX and the 2nd reflector ontology 310YY.In addition, these
1 reflector ontology 310YX and the 2nd reflector ontology 310YY are respectively equipped with supply passageway 321Y, drain passageway 322Y and drain pipe
340Y.It is separately connected the 1st piping 50 in each supply passageway 321Y, is separately connected the 2nd piping 60 in each drain passageway 322Y.About
The structure and connecting structure of the 50 and the 2nd piping 60 of 1st piping, because with identical, province's sketch map is illustrated in above-described embodiment 1
Show and is described in detail.
The type of flow of the coolant liquid L of the reflector 300Y constituted above is illustrated.
As shown in Figure 11, in the 1st reflector ontology 310YX, from supply passageway 321Y into cooling liquid chamber 311Y
Supply coolant liquid L.Moreover, the liquid level of coolant liquid L gradually rises (ginseng in cooling liquid chamber 311Y with the increase of coolant liquid L
According to the solid arrow label in Figure 11).Moreover, when the liquid level of coolant liquid L is more than the upper end position H of drain pipe 340Y, it is cooling
Liquid L enters in the pipe of drain pipe 340Y from the opening portion of the upper end (end face of one end) of drain pipe 340Y, falls because of gravity
(the dotted arrow label in 1 referring to Fig.1).Later, external discharge of the coolant liquid L by drain passageway 322Y, to chamber.2nd
The case where reflector ontology 310YY, is also identical.
In the case where the reflector 300X of the present embodiment constituted above is applied to evaporation source, can also obtain
The case where with above-described embodiment 1 same effect.In addition, in case of the present embodiment, as the heating method of heating crucible,
It is effective using high-frequency induction heating mode.Hereinafter, illustrating its reason.
In the case where using high-frequency induction heating mode, as shown in above-described embodiment 1 and embodiment 2,
In the case where being made of using cylindric reflector ontology and reflector ontology the material of electric conductivity, flowed in heating coil
When electric current, eddy current can be also generated in reflector ontology.In contrast, in the case where the reflector 300Y of the present embodiment, by
In being divided in the circumferential, so even if in heating coil streaming current, eddy current will not be generated in reflector 300Y.Separately
Outside, in the example in the figures, gap is equipped between the 1st reflector ontology 310YX and the 2nd reflector ontology 310YY.But
Also can using be equipped in the state of the component that is made of electrical insulator in the gap the 1st reflector ontology 310YX of connection with
The structure of 2nd reflector ontology 310YY.
The structure for the case where illustrating reflector 300Y in the circumferential by 2 segmentation in the present embodiment, but can also adopt
With the structure that reflector is divided into 3 segmentations or more in the circumferential.In addition, as in this embodiment, making reflector using
On the basis of the structure divided in the circumferential, as illustrating in above-described embodiment 2, can also use makes cooling liquid chamber exist
Multiple structures is divided into up and down direction.In addition, in the present embodiment, the case where with above-described embodiment 1 identically, preferably exist
The inner wall 312Y of reflector ontology (the 1st reflector ontology 310YX and the 2nd reflector ontology 310YY) (does not scheme with calandria
Show) between, setting makes the reflector of the heat reflection from calandria.About the reflector, eddy current is generated in order to prevent, it is also excellent
Choosing is using the reflector being made of the component of semi-circular cylindrical.In addition, it is also preferred that setting makes between calandria and base plate 320Y
The plate reflector of heat reflection from calandria.About the plate reflector, it is also preferred that using not generating as eddy current
Shape.
(other)
As illustrating in embodiment 3, in the case where using high-frequency induction heating mode, using cylindric
Reflector ontology and in the case that reflector ontology is made of the material of electric conductivity, in heating coil when streaming current,
Reflector ontology can also generate eddy current.In order to prevent the situation, it can also use relative to cylindrical shape in 1 circumferential portion
Position is equipped with the reflector ontology of the shape of the slit stretched in the axial direction.In this case, reflector ontology viewed from above
Become C word shape with the shape of cooling liquid chamber.
Cylindrical shape reflector 410 and plate reflector 420 shown in above-described embodiment 1, can not only be arranged one,
Multilayer can also be set.It is also identical in the case where embodiment 2,3.It is further possible to using the cylindric reflection of only setting
Structure of the body 410 without plate reflector 420 is arranged.Thermotectonics body is hidden by reflector in addition, illustrating in the various embodiments described above
The case where composition.But in the case where being equipped with cylindric reflector, plate reflector, hiding thermotectonics body may not be instead
Beam.In other words, the function of heat reflection can also be not provided with hiding thermotectonics body.In addition, being reflector hiding thermotectonics body
In the case where, it also can be using the structure for being not provided with cylindric reflector and plate reflector.
The explanation of appended drawing reference
1, evaporation coating device；10, evaporation source；20, chamber；70, substrate；100, crucible；200, calandria；300,300X,
300Y, reflector；310,310XX, 310XY, 310YX, 310YY, reflector ontology；311,311XX, 311XY, 311Y, cooling
Liquid chamber；312,312XX, 312XY, 312Y, inner wall；320,320X, 320Y, base plate；321,321XX, 321XY, 321Y, confession
To access；322,322XX, 322XY, 322Y, drain passageway；330, cover；340,340XX, 340XY, 340Y, drain pipe；
350, mounting table；360, thread part；L, coolant liquid.
Claims (11)
1. a kind of evaporation source, has:
Crucible, receiving will be deposited in the material of the substance of substrate；
Calandria is arranged in a manner of around the crucible, heats the crucible；And
Thermotectonics body is hidden, is arranged in a manner of around the calandria, blocking heat,
It is characterized in that,
The evaporation source has:
Cooling liquid chamber, is arranged in the inside of the screening thermotectonics body in a manner of along the inner wall for hiding thermotectonics body, and supplies
Coolant flow；And
Drain pipe is set in the coolant liquid room, and coolant liquid is discharged from the lower section of the cooling liquid chamber.
2. evaporation source according to claim 1, which is characterized in that
The evaporation source has supply passageway, and the supply passageway is with indoor to the coolant liquid from the bottom surface for hiding thermotectonics body
Mode is arranged, and supplies coolant liquid.
3. evaporation source according to claim 1 or 2, which is characterized in that
The evaporation source has drain passageway, the drain passageway with out of described coolant liquid room to the bottom surface for hiding thermotectonics body
Mode is arranged, and coolant liquid is discharged, also,
One end of the drain pipe is located at the indoor top of the coolant liquid, and the other end is connected to the drain passageway.
4. evaporation source according to claim 1 or 2, which is characterized in that
Set on the end face of the one end of the drain pipe opening portion upward.
5. evaporation source according to claim 1 or 2, which is characterized in that
The cooling liquid chamber is formed by cylindric space.
6. evaporation source according to claim 1 or 2, which is characterized in that
The cooling liquid chamber is arranged multiple in a manner of dividing in the up-down direction.
7. evaporation source according to claim 1 or 2, which is characterized in that
The screening thermotectonics body be arranged in a manner of dividing in the circumferential it is multiple, it is each hide thermotectonics body inside have respectively it is cold
But liquid chamber.
8. evaporation source according to claim 1 or 2, which is characterized in that
Between the screening thermotectonics body and the calandria, equipped with the reflector for making the heat reflection from the calandria.
9. a kind of evaporation coating device, which is characterized in that
The evaporation coating device has:
Evaporation source according to any one of claims 1 to 8；And
Inside configures the chamber of the evaporation source.
10. evaporation coating device according to claim 9, which is characterized in that
The evaporation coating device has:
The mounting table for hiding thermotectonics body；
Tilt adjusting mechanism adjusts the inclination for hiding thermotectonics body relative to the mounting table；
1st piping is arranged with inserting the mode being formed in the 1st insertion hole of the chamber, and fed in the coolant liquid room
The coolant flow of supply；
1st washer of elastic system, the annular gap between the 1st piping of sealing and the 1st insertion hole；
2nd piping is arranged with inserting the mode being formed in the 2nd insertion hole of the chamber, and for out of described coolant liquid room
The coolant flow of discharge；And
2nd washer of elastic system, the annular gap between the 2nd piping of sealing and the 2nd insertion hole.
11. evaporation coating device according to claim 10, which is characterized in that
The tilt adjusting mechanism by respective positions adjust the mounting table with it is described hide thermotectonics body interval it is multiple
Thread part is constituted.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017251332A JP6570012B2 (en) | 2017-12-27 | 2017-12-27 | Evaporation source and vapor deposition equipment |
| JP2017-251332 | 2017-12-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109972094A true CN109972094A (en) | 2019-07-05 |
| CN109972094B CN109972094B (en) | 2022-09-06 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811070879.1A Active CN109972094B (en) | 2017-12-27 | 2018-09-14 | Evaporation source and evaporation device |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP6570012B2 (en) |
| KR (1) | KR102380987B1 (en) |
| CN (1) | CN109972094B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111748773A (en) * | 2020-06-29 | 2020-10-09 | 合肥维信诺科技有限公司 | Evaporation source and evaporation device |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05112864A (en) * | 1991-10-18 | 1993-05-07 | Stanley Electric Co Ltd | Water-cooled crucible for vacuum deposition |
| CN1854332A (en) * | 2005-03-09 | 2006-11-01 | 三星Sdi株式会社 | Multiple vacuum evaporation coating device and method for controlling the same |
| CN1904130A (en) * | 2005-07-28 | 2007-01-31 | 应用薄膜有限公司 | Vapor deposition device |
| CN103361610A (en) * | 2012-03-30 | 2013-10-23 | 株式会社日立高新技术 | Evaporating source and vacuum evaporation device employing the same |
| WO2017033051A1 (en) * | 2015-08-21 | 2017-03-02 | Flisom Ag | Evaporation source |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0610118A (en) | 1992-06-29 | 1994-01-18 | Nec Kansai Ltd | Vapor deposition method and evaporation device |
| JP2011256427A (en) * | 2010-06-09 | 2011-12-22 | Hitachi Zosen Corp | Method for evaporating/sublimating evaporation material in vacuum deposition apparatus and crucible device for vacuum deposition |
-
2017
- 2017-12-27 JP JP2017251332A patent/JP6570012B2/en active Active
-
2018
- 2018-07-31 KR KR1020180089628A patent/KR102380987B1/en active IP Right Grant
- 2018-09-14 CN CN201811070879.1A patent/CN109972094B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05112864A (en) * | 1991-10-18 | 1993-05-07 | Stanley Electric Co Ltd | Water-cooled crucible for vacuum deposition |
| CN1854332A (en) * | 2005-03-09 | 2006-11-01 | 三星Sdi株式会社 | Multiple vacuum evaporation coating device and method for controlling the same |
| CN1904130A (en) * | 2005-07-28 | 2007-01-31 | 应用薄膜有限公司 | Vapor deposition device |
| CN103361610A (en) * | 2012-03-30 | 2013-10-23 | 株式会社日立高新技术 | Evaporating source and vacuum evaporation device employing the same |
| WO2017033051A1 (en) * | 2015-08-21 | 2017-03-02 | Flisom Ag | Evaporation source |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111748773A (en) * | 2020-06-29 | 2020-10-09 | 合肥维信诺科技有限公司 | Evaporation source and evaporation device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2019116663A (en) | 2019-07-18 |
| KR102380987B1 (en) | 2022-03-30 |
| KR20190079472A (en) | 2019-07-05 |
| JP6570012B2 (en) | 2019-09-04 |
| CN109972094B (en) | 2022-09-06 |
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