JP2019116663A - Evaporation source and vapor deposition apparatus - Google Patents

Abstract

To provide an evaporation source and vapor deposition apparatus, capable of enhancing cooling efficiency.SOLUTION: An evaporation source 10 comprises: a crucible 100 for storing a material vapor-deposited on a substrate; a heating body 200 provided so as to surround the crucible 100 and heating the crucible 100; a reflector 300 provided so as to surround the heating body 200 and blocking heat; a cooling fluid chamber 311 provided along the inner wall surface of a reflector body 310 in the inside of the reflector body 310 and passing a cooling fluid; and a waste liquid pipe 340 included in the cooling fluid chamber 311 and discharging the cooling fluid from below the cooling fluid chamber 311.SELECTED DRAWING: Figure 4

Description

  The present invention relates to an evaporation source and a deposition apparatus used to perform vacuum deposition.

  In the evaporation source, a structure is provided which shuts off the heat from the heater which heats the crucible. As a conventional structure, a pipe-like pipe is wound around a crucible, and a structure in which cooling water is allowed to flow in the pipe is known (see Patent Document 1).

  However, in the case of such a structure, the cooling efficiency is low because the contact area of the pipe through which the cooling water flows with respect to the pipe narrows.

JP 6-10118 A

  An object of the present invention is to provide an evaporation source and a deposition apparatus capable of enhancing the cooling efficiency.

  The present invention adopts the following means in order to solve the above problems.

That is, the evaporation source of the present invention is
A crucible containing the material of the substance to be deposited on the substrate;
A heating body provided so as to surround the crucible and heating the crucible;
A heat shielding structure provided so as to surround the heating body and blocking heat;
An evaporation source comprising
A coolant chamber provided inside the heat shield structure along the inner wall surface of the heat shield structure and in which a coolant flows;
A drain pipe provided in the coolant chamber and discharging the coolant from the lower side of the coolant chamber;
And the like.

  As described above, according to the present invention, the cooling efficiency can be enhanced.

FIG. 1 is a schematic block diagram of a vapor deposition apparatus according to a first embodiment of the present invention. FIG. 2 is a plan view of the evaporation source according to the first embodiment of the present invention. FIG. 3 is a side view of the evaporation source according to the first embodiment of the present invention. FIG. 4 is a schematic cross-sectional view of the evaporation source according to the first embodiment of the present invention. FIG. 5 is a plan view of the reflector according to the first embodiment of the present invention. FIG. 6 is a schematic block diagram of the internal structure of the reflector according to the first embodiment of the present invention. FIG. 7 is a plan view of a reflector according to a second embodiment of the present invention. FIG. 8 is a schematic view of the internal structure of a reflector according to a second embodiment of the present invention. FIG. 9 is a schematic view of an internal structure of a reflector according to a second embodiment of the present invention. FIG. 10 is a plan view of a reflector according to a third embodiment of the present invention. FIG. 11 is a schematic view of an internal structure of a reflector according to a third embodiment of the present invention.

  Hereinafter, with reference to the drawings, modes for carrying out the present invention will be exemplarily described in detail based on examples. However, the dimensions, materials, shapes, relative positions, etc. of the components described in this embodiment are not intended to limit the scope of the present invention to them unless otherwise specified. .

Example 1
An evaporation source and a vapor deposition apparatus according to a first embodiment of the present invention will be described with reference to FIGS. 1 to 6. FIG. 1 is a schematic block diagram of a vapor deposition apparatus according to a first embodiment of the present invention. FIG. 2 is a plan view of the evaporation source according to the first embodiment of the present invention. FIG. 3 is a side view of the evaporation source according to the first embodiment of the present invention, and shows a side view of the evaporation source in a state of being disposed in the vapor deposition apparatus. FIG. 4 is a schematic cross-sectional view of the evaporation source according to the first embodiment of the present invention, and corresponds to the A1-A2 cross-sectional view in FIG. FIG. 5 is a plan view of the reflector according to the first embodiment of the present invention, showing a state in which the lid is removed. FIG. 6 is a schematic configuration view of the internal structure of the reflector according to the first embodiment of the present invention, and shows the internal structure of the reflector in a simplified sectional view. In FIGS. 1, 3, 4 and 6, the upper side in the figure corresponds to the upper side in the vertical direction when using the vapor deposition apparatus, and the lower side in the drawing corresponds to the lower side in the vertical direction when using the vapor deposition apparatus.

<Evaporation device>
The vapor deposition apparatus 1 will be briefly described with reference to FIG. The vapor deposition apparatus 1 includes a chamber 20 configured to be close to a vacuum by a vacuum pump 30 and an evaporation source 10 disposed inside the chamber 20. The evaporation source 10 serves to evaporate or sublime the material by heating the material of the substance to be deposited on the substrate 70. The material evaporated or sublimated by the evaporation source 10 is attached to the substrate 70 disposed inside the chamber 20, whereby a thin film is formed on the substrate 70.

  In the vapor deposition apparatus 1, a first pipe 50 for supplying the cooling liquid supplied from the cooling liquid pump 40 provided outside the chamber 20 to the evaporation source 10, and from the evaporation source 10 to the outside of the chamber 20 A second pipe 60 for discharging the coolant is provided.

<Evaporation source>
In particular, with reference to FIGS. 2 to 4, the overall configuration of the evaporation source 10 according to the present embodiment will be described. The evaporation source 10 is provided so as to surround the crucible 100, which contains the material of the substance to be deposited on the substrate 70, surrounds the crucible 100, is provided to surround the heating body 200, and heats the crucible 100. And a reflector 300 as a heat shield structure for blocking the light. Various configurations may be adopted as a method of heating the crucible 100. For example, when the electric heating method is employed, the heating body 200 corresponds to a wire to which electric current is supplied. When the high frequency induction heating method is adopted, the heating body 200 corresponds to a heating coil.

  The reflector 300 includes a cylindrical reflector body 310, a bottom plate 320 provided below the reflector body 310, and a lid 330 provided above the reflector body 310. The reflector 300 is mounted on the mounting table 350.

In addition, when the reflector 300 is installed in the inside of the chamber 20, the inclination adjustment mechanism which adjusts the inclination of the reflector 300 with respect to the mounting base 350 is provided. The tilt adjustment mechanism is configured by a plurality of screw components 360 that adjust the distance between the mounting table 350 and the reflector 300 at each position. The inclination of the reflector 300 with respect to the mounting table 350 can be adjusted by adjusting the distance between the mounting table 350 and the reflector 300 at each position by the plurality of screw parts 360.

  Between the inner wall surface 312 of the reflector main body 310 and the heating body 200, a cylindrical reflector 410 for reflecting the heat from the heating body 200 is provided. In addition, a plate-like reflector 420 for reflecting the heat from the heating body 200 is provided between the heating body 200 and the bottom plate portion 320. The plate-like reflector 420 is formed of a disk-like member having a hole at its center. In the present embodiment, the cylindrical reflector 410 and the plate-like reflector 420 are configured to be separated, but may be configured to be connected. Further, the cylindrical reflector 410 and the plate-like reflector 420 may be fixed to various members constituting the reflector 300. And, inside the reflector main body 310 in the reflector 300, there is provided a cooling liquid chamber 311 which is provided along the inner wall surface 312 of the reflector main body 310 and through which the cooling liquid L flows. The inner wall surface 312 of the reflector main body 310 according to the present embodiment has a function as a reflection surface that reflects the heat from the heating element 200. Further, the coolant chamber 311 according to the present embodiment is formed of a cylindrical space. In the cooling liquid chamber 311, a drain pipe 340 for discharging the cooling liquid L from below the cooling liquid chamber 311 is provided.

  The bottom plate 320 of the reflector 300 is provided so as to extend from the bottom surface of the reflector 300 to the inside of the coolant chamber 311, and is provided with a supply passage 321 to which the coolant L is supplied. Further, the bottom plate portion 320 is provided so as to extend from the inside of the coolant chamber 311 to the bottom surface of the reflector 300, and is provided with a discharge passage 322 through which the coolant L is discharged. One end of the drainage pipe 340 is located above the cooling liquid chamber 311, and the other end is connected to the drainage passage 322. The opening provided at the end face on one end side of the drainage pipe 340 is configured to face upward.

  The first pipe 50 described above is provided so as to pass through the inside of the first insertion hole 21 formed in the chamber 20 and the inside of the third insertion hole 351 formed in the mounting table 350. Further, one end side of the first pipe 50 is connected to the supply passage 321. Further, an annular gap between the first pipe 50 and the first insertion hole 21 is sealed by a first gasket 26 made of an elastic body, and between the first pipe 50 and the third insertion hole 351. It is designed to secure an annular gap.

  The second pipe 60 is provided to pass through the inside of the second insertion hole 22 formed in the chamber 20 and the inside of the fourth insertion hole 352 formed in the mounting table 350. Further, one end side of the second pipe 60 is connected to the discharge passage 322. The annular gap between the second pipe 60 and the second insertion hole 22 is sealed by the second gasket 27 made of an elastic body, and between the second pipe 60 and the fourth insertion hole 352 It is designed to secure an annular gap. Various known techniques such as an O-ring having a circular cross-sectional shape and a square ring having a rectangular cross-sectional shape can be applied to the first gasket 26 and the second gasket 27.

  When the inclination of the reflector 300 with respect to the mounting table 350 is changed by the above-described inclination adjusting mechanism, the inclination of the first pipe 50 and the second pipe 60 with respect to the chamber 20 and the mounting table 350 is changed. Even in this case, an annular gap is designed to be secured between the first pipe 50 and the third insertion hole 351, so that a change in the inclination of the first pipe 50 with respect to the mounting table 350 is disturbed. There is no. Further, since the first gasket 26 is made of an elastic body, the annular gap between the first pipe 50 and the first insertion hole 21 is sealed even if the inclination of the first pipe 50 with respect to the chamber 20 changes. Is maintained. The same applies to the relationship between the second pipe 60 and the mounting table 350 and the relationship between the second pipe 60 and the chamber 20.

<Flow of coolant>
In particular, the flow of the coolant L will be described with reference to FIGS. 4 to 6. In addition, in FIG. 5, the top view of the state which removed the cover part 330 among the reflectors 300 is shown simply. Further, in FIG. 6, members related to the flow of the coolant L are schematically shown in the internal structure of the reflector 300 so that the flow of the coolant L can be easily understood.

  The coolant L supplied from the first pipe 50 is fed into the coolant chamber 311 through the supply passage 321. With the increase of the supplied cooling liquid L, the liquid level of the cooling liquid L gradually rises in the cooling liquid chamber 311 (see the solid arrow in FIG. 6). Then, when the liquid level of the coolant L exceeds the upper end position H of the drain pipe 340, the coolant L enters the drain pipe 340 from the opening of the upper end (end face on one end side) of the drain pipe 340. It enters and falls by gravity (see dotted arrow in FIG. 6). Thereafter, the coolant L is discharged from the second pipe 60 to the outside of the chamber 20 through the discharge passage 322.

<Superior points of the evaporation source according to this embodiment>
According to the evaporation source 10 according to the present embodiment, the coolant chamber 311 is provided inside the reflector 300 as the heat shield structure (inside the reflector main body 310) along the inner wall surface 312 of the reflector main body 310. There is. Therefore, the pipe-like pipe can improve the cooling efficiency as compared to the case of flowing the coolant.

  Further, according to the evaporation source 10 according to the present embodiment, the supply passage 321 is provided to extend from the bottom surface of the reflector 300 to the inside of the coolant chamber 311. Accordingly, the coolant L is supplied from the lower side in the coolant chamber 311.

  A supply passage 321 and a discharge passage 322 are provided in the bottom plate portion 320 provided below the reflector main body 310. As a result, the first pipe 50 and the second pipe 60 can be connected to the lower side of the reflector 300. That is, there is no need to connect piping to the side surface or the upper surface side of the reflector 300. Therefore, the entire device can be miniaturized.

  In addition, one end of the drainage pipe 340 provided in the cooling liquid chamber 311 is located above the cooling liquid chamber 311, and the other end is connected to the discharging passage 322. Thus, the coolant L can be discharged from the upper side in the coolant chamber 311 to the lower side of the reflector 300 through the drain pipe 340. Therefore, coupled with the fact that the cooling fluid L is supplied from the lower side in the cooling fluid chamber 311, it becomes possible to adapt the circulating direction of the cooling fluid to the temperature distribution required for the crucible 100. That is, in the crucible 100, if the upper side is cooled too much, the evaporated or sublimated substance adheres to the upper part of the crucible 100 and is solidified. Therefore, it is desirable that the upper side of the crucible 100 is not excessively cooled while the heat from the heating body 200 is to be blocked by the cooling fluid L flowing through the cooling fluid chamber 311. In the present embodiment, the coolant L flows upward from below the coolant chamber 311 and circulates so as to be discharged from the drain pipe 340. Then, the higher the temperature of the coolant L, the higher the temperature of the coolant L in the coolant chamber 311 becomes such that the temperature becomes higher from the lower side to the upper side. Therefore, excessive cooling of the upper side of the crucible 100 is suppressed.

  Further, in the present embodiment, the opening provided at the end face on one end side of the drainage pipe 340 is configured to face upward. Thereby, when the liquid level of the coolant L exceeds the upper end position H of the drain pipe 340, the coolant L is discharged from the opening of the upper end (end face on one end side) of the drain pipe 340. And fall by gravity. Therefore, the coolant L can be efficiently drained from the drain pipe 340 without providing a power source or the like for draining the coolant L.

  Further, in the present embodiment, the coolant chamber 311 is formed by a cylindrical space. Thereby, the heat can be uniformly blocked around the heater 200.

  Furthermore, in the present embodiment, the cylindrical reflector 410 and the plate-like reflector 420 reflect the heat from the heating body 200 and also reflect the heat by the reflector main body 310 of the reflector 200 which is a heat shielding structure. It is adopted. Therefore, the heat from the heater 200 can be shut off while enhancing the heating efficiency of the crucible 100. Further, since the cylindrical reflector 410 and the plate-like reflector 420 are provided, the reflector main body 310 is prevented from being heated, and the cooling efficiency by the cooling fluid L can be enhanced.

(Example 2)
7 to 9 show a second embodiment of the present invention. The present embodiment shows a configuration in which the structure of the reflector as the heat shield structure is different from that of the first embodiment. The configuration described in the first embodiment can be applied to the configuration other than the reflector, so only the structure of the reflector will be described in the present embodiment.

  FIG. 7 schematically shows a plan view of the reflector 300X with the lid removed. Further, in FIG. 8 and FIG. 9, members related to the flow of the coolant L are schematically shown in the internal structure of the reflector 300X so that the flow of the coolant L can be easily understood. 8 schematically shows a B1-B2 cross section in FIG. 7, and FIG. 9 schematically shows a C1-C2 cross section in FIG.

  The reflector 300X according to this embodiment includes a cylindrical first reflector main body 310XX and a second reflector main body 310XY, and a bottom plate 320X provided below the second reflector main body 310XY. The reflector 300X according to the present embodiment also includes a partition wall 315X provided between the first reflector main body 310XX and the second reflector main body 310XY.

  Further, also in the reflector 300X according to the present embodiment, a lid is also provided above the first reflector main body 310. However, since the lid is as described in the first embodiment, the illustration and the detailed description will be omitted. Further, the reflector 300X according to the present embodiment is mounted on the mounting table, and the inclination adjustment with respect to the mounting table is also possible, as described in the first embodiment, and thus the description thereof will be omitted. Also in the present embodiment, the first pipe 50 and the second pipe 60 described in the first embodiment are connected to the reflector 300X. In the case of the present embodiment, two first pipes 50 and two second pipes 60 are connected.

  Inside the first reflector main body 310XX in the reflector 300X, there is provided a cooling fluid chamber 311XX which is provided along the inner wall surface 312XX of the first reflector main body 310XX and in which the cooling fluid L flows. The inner wall surface 312XX of the first reflector main body 310XX has a function as a reflecting surface to reflect the heat from the heating body (not shown). Further, the coolant chamber 311XX according to the present embodiment is formed by a cylindrical space.

  The cooling fluid chamber 311XY is also provided along the inner wall surface 312XY of the second reflector main body 310XY and in which the cooling fluid L flows, also inside the second reflector main body 310XY. The inner wall surface 312XY of the second reflector main body 310XY has a function as a reflecting surface that reflects the heat from the heating body (not shown). Further, the coolant chamber 311XY according to the present embodiment is also formed by a cylindrical space.

  As described above, in the reflector 300X according to the present embodiment, the coolant chambers 311XX and 311XY are provided to be divided in the vertical direction.

In the case of the present embodiment, the supply pipe 370X for supplying the cooling fluid L to the cooling fluid chamber 311XX in the first reflector main body 310XX is provided so as to pass through the cooling fluid chamber 311XY in the second reflector main body 310XY. . Further, in the coolant chamber 311XX in the first reflector main body 310XX, a drain pipe 340XX for draining the coolant L from the lower side of the coolant chamber 311XX is provided. The drain pipe 340XX is provided to pass through the coolant chamber 311XY in the second reflector main body 310XY.

  In the bottom plate portion 320X of the reflector 300X, a supply passage 321XX to which the coolant L is supplied and a discharge passage 322XX to which the coolant L is discharged are provided. The drain pipe 340XX has one end located above the cooling liquid chamber 311XX in the first reflector main body 310XX, and the other end connected to the discharge passage 322XX. The opening provided at the end face on one end side of the drainage pipe 340XX is configured to face upward.

  Further, in the coolant chamber 311XY in the second reflector main body 310XY, a drain pipe 340XY for discharging the coolant L from below the coolant chamber 311XY is provided.

  The bottom plate 320X of the reflector 300X is provided so as to extend from the bottom surface of the reflector 300X to the inside of the coolant chamber 311XY in the second reflector main body 310XY, and is provided with a supply passage 321XY to which the coolant L is supplied. Further, the bottom plate portion 320X is provided so as to reach from the inside of the cooling fluid chamber 311XY in the second reflector main body 310XY to the bottom surface of the reflector 300X, and is provided with a discharge passage 322XY through which the cooling fluid L is discharged. One end of the drainage pipe 340XY is located above the cooling liquid chamber 311XY, and the other end is connected to the drainage passage 322XY. The opening provided at the end face on one end side of the drainage pipe 340XY is configured to face upward.

  As described above, the coolant chambers 311XX and 311XY are provided in the first reflector main body 310XX and the second reflector main body 310XY, respectively. Further, in the first reflector main body 310XX and the second reflector main body 310XY, supply passages 321XX, 321XY, discharge passages 322XX, 322XY, and liquid discharge pipes 340XX, 340XY are provided, respectively. The first pipe 50 is connected to the supply passages 321XX and 321XY, and the second pipe 60 is connected to the discharge passages 322XX and 322XY. The configuration and connection structure of the first pipe 50 and the second pipe 60 are the same as described in the first embodiment, and therefore the illustration and the detailed description will be omitted.

  The flow of the coolant L in the reflector 300X configured as described above will be described for each of the first reflector main body 310XX and the second reflector main body 310XY.

(About the first reflector main body 310XX)
As shown in FIG. 8, the cooling fluid L is supplied from the supply passage 321XX into the cooling liquid chamber 311XX via the supply pipe 370X. Then, as the coolant L increases, the liquid level of the coolant L gradually rises in the coolant chamber 311XX (see the solid arrow in FIG. 8). Then, when the liquid level of the coolant L exceeds the upper end position H1 of the drain pipe 340XX, the coolant L enters the drain pipe 340XX from the opening of the upper end (end face on one end side) of the drain pipe 340XX. It enters and falls by gravity (see the dotted arrow in FIG. 8). Thereafter, the coolant L is discharged to the outside of the chamber 20 through the discharge passage 322XX.

(About the second reflector main body 310XY)
As shown in FIG. 9, the coolant L is supplied from the supply passage 321XY into the coolant chamber 311XY. Then, as the coolant L increases, the liquid level of the coolant L gradually rises in the coolant chamber 311XY (see solid arrows in FIG. 9). Then, when the liquid level of the cooling fluid L exceeds the upper end position H2 of the drainage tube 340XY, the cooling fluid L is introduced into the drainage tube 340XY from the opening of the upper end (end face on one end side) of the drainage tube 340XY. It enters and falls by gravity (see the dotted arrow in FIG. 9). Thereafter, the coolant L is discharged to the outside of the chamber 20 through the discharge passage 322XY.

  Even when the reflector 300X according to the present embodiment configured as described above is applied to an evaporation source, the same effect as that of the first embodiment can be obtained. Further, in the case of the present embodiment, the coolant chambers 311XX and 311XY are provided so as to be divided in the vertical direction. Therefore, by changing the temperature of the coolant L supplied to the coolant chambers 311XX and 311XY, the degree of cooling can be changed above and below the reflector 300X. That is, as mentioned above, it is desirable not to overcool the upper side of the crucible. Even in the case of the first embodiment, the temperature of the cooling fluid L in the cooling fluid chamber 311 can be a temperature distribution such that the temperature rises from the lower side to the upper side. However, when it is desired to further raise the upper temperature and lower the lower temperature, it is effective to adopt the reflector 300X according to the present embodiment.

  In the present embodiment, the configuration in the case where the coolant chamber is divided into two in the vertical direction is shown, but it is also possible to employ a configuration in which the coolant chamber is divided into three or more in the vertical direction. Also in the present embodiment, as in the case of the first embodiment, it is desirable to provide the cylindrical reflector 410 and the plate-like reflector 420.

(Example 3)
10 and 11 show a third embodiment of the present invention. The present embodiment shows a configuration in which the structure of the reflector as the heat shield structure is different from that of the first embodiment. The configuration described in the first embodiment can be applied to the configuration other than the reflector, so only the structure of the reflector will be described in the present embodiment.

  FIG. 10 schematically shows a plan view of the reflector 300Y with the lid removed. Further, in FIG. 11, in order to make it easy to understand how the coolant L flows, members related to the flow of the coolant L are schematically shown in the internal structure of the reflector 300Y. 11 corresponds to a view schematically showing the D1-D2 cross section in FIG. 10, and also corresponds to a view schematically showing the E1-E2 cross section in FIG.

  The reflector 300Y according to the present embodiment includes a first reflector main body 310YX and a second reflector main body 310YY that are semi-cylindrical (a shape that is cut by a plane including the central axis of the cylinder with respect to a cylindrical shape). In addition, since the first reflector main body 310YX and the second reflector main body 310YY have the same configuration, hereinafter, the first reflector main body 310YX will be mainly described, and the description of the second reflector main body 310YY will be appropriately omitted.

  Also in the reflector 300Y according to the present embodiment, a bottom plate portion 320Y is provided below the first reflector main body 310YX. Furthermore, also in the reflector 300Y according to the present embodiment, a lid is also provided above the first reflector main body 310. However, although the shape of the lid differs depending on the shape of the reflector main body, the basic configuration is the same as that of the first embodiment, so the illustration and the detailed description will be omitted. Further, the reflector 300Y according to the present embodiment is mounted on the mounting table, and the inclination adjustment with respect to the mounting table is also possible, as described in the first embodiment, and thus the description thereof will be omitted. Also in the present embodiment, the first pipe 50 and the second pipe 60 described in the first embodiment are connected to the reflector 300Y. In the case of the present embodiment, two first pipes 50 and two second pipes 60 are connected. That is, the first pipe 50 and the second pipe 60 are connected to the first reflector body 310YX and the second reflector body 310YY, respectively.

  Inside the first reflector main body 310YX in the reflector 300Y, there is provided a cooling liquid chamber 311Y which is provided along the inner wall surface 312Y of the first reflector main body 310YX and through which the cooling liquid L flows. The inner wall surface 312Y of the first reflector main body 310YX has a function as a reflection surface that reflects the heat from the heating body (not shown). Further, the coolant chamber 311Y according to the present embodiment is formed by a semi-cylindrical space.

  As described above, the second reflector main body 310 YY has the same configuration as the first reflector main body 310 YX. Thus, in the present embodiment, the reflector 300Y, which is a heat shielding structure, is provided so as to be divided in the circumferential direction, and the coolant chamber 311Y is provided inside the first reflector main body 310YX and the second reflector main body 310YY. Is provided.

  Also in the present embodiment, as in the case of the first embodiment, in the coolant chamber 311Y of the first reflector main body 310YX, a drain pipe 340Y for discharging the coolant L from below the coolant chamber 311Y is provided. ing.

  The bottom plate portion 320Y of the reflector 300Y is provided so as to extend from the bottom surface of the reflector 300Y into the cooling liquid chamber 311Y, and is provided with a supply passage 321Y to which the cooling liquid L is supplied. Further, the bottom plate portion 320Y is provided so as to extend from the inside of the coolant chamber 311Y to the bottom surface of the reflector 300Y, and is provided with a discharge passage 322Y through which the coolant L is discharged. One end of the drainage pipe 340Y is located above the cooling liquid chamber 311Y, and the other end is connected to the drainage passage 322Y. The opening provided at the end face on one end side of the drainage pipe 340Y is configured to face upward.

  As described above, the second reflector main body 310 YY has the same configuration as the first reflector main body 310 YX. Therefore, the coolant chamber 311Y is provided in each of the first reflector main body 310YX and the second reflector main body 310YY. Further, a supply passage 321Y, a discharge passage 322Y and a drainage pipe 340Y are provided in the first reflector main body 310YX and the second reflector main body 310YY, respectively. A first pipe 50 is connected to each supply passage 321Y, and a second pipe 60 is connected to each discharge passage 322Y. The configuration and connection structure of the first pipe 50 and the second pipe 60 are the same as described in the first embodiment, and therefore the illustration and the detailed description will be omitted.

  The flow of the coolant L in the reflector 300Y configured as described above will be described.

  As shown in FIG. 11, in the first reflector main body 310YX, the cooling fluid L is supplied from the supply passage 321Y into the cooling liquid chamber 311Y. Then, as the coolant L increases, the liquid level of the coolant L gradually rises in the coolant chamber 311 Y (see solid arrows in FIG. 11). Then, when the liquid level of the coolant L exceeds the upper end position H of the drain pipe 340Y, the coolant L is introduced into the drain pipe 340Y from the opening of the upper end (end face on one end side) of the drain pipe 340Y. It enters and falls by gravity (see the dotted arrow in FIG. 11). Thereafter, the coolant L is discharged to the outside of the chamber through the discharge passage 322Y. The same applies to the case of the second reflector main body 310 YY.

  Even when the reflector 300X according to the present embodiment configured as described above is applied to an evaporation source, the same effect as that of the first embodiment can be obtained. Further, in the case of the present embodiment, it is effective when the high frequency induction heating method is adopted as the heating method for heating the crucible. The reason will be described below.

  When a high frequency induction heating system is adopted, as shown in the above-mentioned Example 1 and Example 2, when a cylindrical reflector main body is adopted and the reflector main body is made of a conductive material, heating is carried out. When a current flows in the coil, an eddy current is also generated in the reflector body. On the other hand, in the case of the reflector 300Y according to the present embodiment, since it is divided in the circumferential direction, no eddy current is generated in the reflector 300Y even if current flows through the heating coil. In the illustrated example, a gap is provided between the first reflector main body 310YX and the second reflector main body 310YY. However, it is also possible to employ a configuration in which the first reflector main body 310YX and the second reflector main body 310YY are connected in a state in which a member made of a non-conductive material is provided in the gap.

  Although the configuration in the case where the reflector 300Y is divided into two in the circumferential direction is shown in the present embodiment, a configuration in which the reflector is divided into three or more in the circumferential direction may be employed. Further, as in the present embodiment, it is also possible to adopt a configuration in which the cooling fluid chamber is divided into a plurality of parts in the vertical direction as described in the second embodiment after adopting a configuration in which the reflector is divided in the circumferential direction. it can. Also in the present embodiment, as in the case of the first embodiment, heating is performed between the inner wall surface 312Y of the reflector body (the first reflector body 310YX and the second reflector body 310YY) and the heating body (not shown). It is desirable to provide a reflector that reflects heat from the body. Also for the reflector, it is desirable to employ a reflector formed of a semi-cylindrical member so as not to generate an eddy current. Further, it is desirable to provide a plate-like reflector for reflecting the heat from the heating body also between the heating body and the bottom plate portion 320Y. Also for this plate-like reflector, it is desirable to adopt a shape that does not generate an eddy current.

(Others)
As described in the third embodiment, when a high frequency induction heating method is adopted, a cylindrical reflector main body is adopted, and when the reflector main body is made of a conductive material, a current flows in the heating coil. Eddy current is also generated in the reflector body. In order to prevent this, it is also possible to adopt a reflector main body having a shape in which a slit extending in the axial direction is provided at one place in the circumferential direction with respect to the cylindrical shape. In this case, the shape of the reflector body and the coolant chamber as viewed from above is C-shaped.

  The cylindrical reflector 410 and the plate-like reflector 420 shown in the first embodiment can be provided not only in one but in multiple layers. The same applies to the second and third embodiments. Moreover, the structure which provides only the cylindrical reflector 410 and does not provide the plate-like reflector 420 is also employable. Moreover, in each said Example, the case where the heat-insulation structure was comprised with a reflector was shown. However, when a cylindrical reflector or a plate-like reflector is provided, the heat shield structure may not be a reflector. That is, the heat shield structure may not have the function of reflecting heat. In addition, when the heat shield structure is a reflector, a configuration in which the cylindrical reflector and the plate reflector are not provided may be employed.

  DESCRIPTION OF SYMBOLS 1 ... Vapor deposition apparatus 10 ... Evaporation source 20 ... Chamber 70 ... Substrate 100 ... 200 200 ... Heating body 300, 300X, 300Y ... Reflector 310, 310XX, 310YX, 310YY ... Reflector main body 311, 311XX, 311XY, 311Y ... Cooling fluid Chambers 312, 312XX, 312XY, 312Y ... inner wall surfaces 320, 320X, 320Y ... bottom plate sections 321, 321XX, 321XY, 321Y ... supply channels 322, 322XX, 322XY, 322Y ... discharge channels 330 ... lid sections 340, 340XX, 340XY, 340Y ... Drainage pipe, 350 ... Mounting table 360 ... Screw parts L ... Coolant

That is, the evaporation source of the present invention is
A crucible for accommodating a timber fee Ru is deposited on the substrate,
A heating body provided so as to surround the crucible and heating the crucible;
A heat shielding structure provided so as to surround the heating body and blocking heat;
An evaporation source comprising
A coolant chamber provided inside the heat shield structure along the inner wall surface of the heat shield structure and in which a coolant flows;
A drain pipe provided in the coolant chamber and discharging the coolant from the lower side of the coolant chamber;
And the like.

Claims (11)

A crucible containing the material of the substance to be deposited on the substrate;
A heating body provided so as to surround the crucible and heating the crucible;
A heat shielding structure provided so as to surround the heating body and blocking heat;
An evaporation source comprising
A coolant chamber provided inside the heat shield structure along the inner wall surface of the heat shield structure and in which a coolant flows;
A drain pipe provided in the coolant chamber and discharging the coolant from the lower side of the coolant chamber;
An evaporation source characterized by comprising.   The evaporation source according to claim 1, further comprising: a supply passage which is provided so as to reach the cooling liquid chamber from the bottom surface of the heat shield structure and to which the cooling liquid is supplied. A discharge passage is provided to extend from the coolant chamber to the bottom surface of the heat shield structure and from which the coolant is discharged.
The evaporation source according to claim 1 or 2, wherein one end of the drainage pipe is located above the cooling liquid chamber and the other end is connected to the drainage passage.   The evaporation source according to claim 1, 2 or 3, wherein the opening provided at the end face on one end side of the drainage pipe is directed upward.   The evaporation source according to any one of claims 1 to 4, wherein the cooling liquid chamber is formed by a cylindrical space.   The evaporation source according to any one of claims 1 to 5, wherein a plurality of the cooling liquid chambers are provided so as to be divided in the vertical direction.   A plurality of the heat shielding structures are provided so as to be divided in the circumferential direction, and a cooling liquid chamber is provided in each of the heat shielding structures. Sources of evaporation described in   The evaporation source according to any one of claims 1 to 7, wherein a reflector for reflecting heat from the heating body is provided between the heat shielding structure and the heating body. . The evaporation source according to any one of claims 1 to 8,
A chamber in which the evaporation source is disposed;
An evaporation apparatus comprising: A mounting table for the heat shield structure;
An inclination adjusting mechanism for adjusting an inclination of the heat shielding structure with respect to the mounting table;
A first pipe which is provided to be inserted through a first insertion hole formed in the chamber, and through which a cooling fluid supplied into the cooling fluid chamber flows;
An elastic first gasket for sealing an annular gap between the first pipe and the first insertion hole;
A second pipe which is provided to be inserted through the second insertion hole formed in the chamber, and through which the cooling fluid discharged from the cooling fluid chamber flows;
An elastic second gasket for sealing an annular gap between the second pipe and the second insertion hole;
The vapor deposition apparatus according to claim 9, comprising: The tilt adjustment mechanism
11. The vapor deposition apparatus according to claim 10, comprising a plurality of screw parts for adjusting the distance between the mounting table and the heat shielding structure at each position.