EP3135919A1 - Pompe à vide - Google Patents

Pompe à vide Download PDF

Info

Publication number: EP3135919A1
Authority: EP; European Patent Office
Prior art keywords: housing; vacuum pump; pump according; material recesses; recesses
Prior art date: 2015-08-24
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

EP15182138.6A

Other languages

German (de)

English (en)

Other versions

EP3135919B1 (fr

Inventor

Jan Hofmann

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Pfeiffer Vacuum GmbH

Original Assignee

Pfeiffer Vacuum GmbH

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2015-08-24

Filing date

2015-08-24

Publication date

2017-03-01

2015-08-24 Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH

2015-08-24 Priority to EP15182138.6A priority Critical patent/EP3135919B1/fr

2016-08-23 Priority to JP2016162586A priority patent/JP6298858B2/ja

2017-03-01 Publication of EP3135919A1 publication Critical patent/EP3135919A1/fr

2019-02-20 Application granted granted Critical

2019-02-20 Publication of EP3135919B1 publication Critical patent/EP3135919B1/fr

Status Active legal-status Critical Current

2035-08-24 Anticipated expiration legal-status Critical

Images

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/58—Cooling; Heating; Diminishing heat transfer
- F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
- F04D29/5853—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps heat insulation or conduction
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps

Definitions

the present invention relates to a vacuum pump, in particular turbomolecular pump, with a housing, a stator and a rotor having a rotor shaft which is supported by a first bearing provided in the region of the suction side of the housing and a further bearing provided in the region of the opposite side of the housing.
Vacuum pumps e.g. Turbomolecular pumps are used in various fields of technology to create a vacuum necessary for a particular process.
Turbomolecular pumps comprise a stator having a plurality of stator disks successive in the direction of a rotor axis and a rotor mounted rotatably relative to the stator about the rotor axis, comprising a rotor shaft and a plurality of arranged on the rotor shaft, axially successive and arranged between the stator disks rotor disks, wherein the stator disks and the rotor disks each have a pump-active structure.
the rotor shaft on the suction side ie in the vacuum or high vacuum range, (UHV) usually supported by a UHV-suitable permanent magnet bearing and on the opposite side by a lubricated rolling bearing.
UHV vacuum or high vacuum range
the highest possible temperature should prevail on the suction side or in the high vacuum region of the vacuum pump in order to prevent gases from condensing.
the pump section with the roller bearing should be relatively cold in order to prevent that provided for lubricating the bearing lubricant, especially oil, loses its lubricating properties.
the invention has for its object to provide a vacuum pump, in particular turbomolecular pump, of the type mentioned, with which the aforementioned problem is eliminated. It should be ensured with the least possible effort and the least possible use of energy as large a temperature difference between the suction-side housing portion and the opposite housing portion of the vacuum pump.
the vacuum pump according to the invention in particular turbomolecular pump, comprises a housing, a stator and a rotor with a rotor shaft, which is supported by a first bearing provided in the region of the suction side of the housing and a further bearing provided in the region of the opposite side of the housing.
a first bearing provided in the region of the suction side of the housing
a further bearing provided in the region of the opposite side of the housing.
the suction-side region or the high-vacuum region of the vacuum pump can be relatively strongly tempered, for example to avoid condensation of toxic gases, without the corresponding housing section being heated accordingly, in particular in the region of a bearing of the rotor shaft located there.
the opposite housing section must therefore be cooled at least less or not at all.
the labyrinth-type heat flow path which is produced by the material recesses in the pump housing according to the invention and is extended by a plurality of changes in direction, results in a type of thermal barrier between the suction-side housing section and the opposite housing section.
the remote from the suction side, provided with the material recesses part of the housing generally has a limited by an inner wall central bore whose central axis coincides in particular with the axis of rotation of the rotor shaft.
the material recesses are introduced both from the inner wall and from the outer peripheral surface of the housing into the housing.
the material recesses are alternately introduced into the housing starting from the inner wall and starting from the outer peripheral surface of the housing.
the material recesses can mesh in particular like a comb.
At least one and preferably a plurality of material recesses may extend at least partially in the radial direction. It is ensured in particular by a vote of the radial depth of the or each material recess on the housing diameter or on the wall thickness of the housing that no excessive mechanical weakening of the housing takes place and the so-called "crash safety" of the housing or the pump is guaranteed.
the radial thickness or wall thickness of the portion of the housing provided with the material recesses is expediently greater than three times the radial dimension or depth of a radially extending material recess.
a radially extending material recess introduced into the housing from the outer peripheral surface of the housing has a radial dimension or depth which ends at a diameter of the part of the housing provided with the material recesses which is smaller than 0, 75 times the outer diameter of this housing part and is greater than 1.1 times the inner diameter of this housing part.
the material recesses may extend at least partially in the axial direction. In this case too, it will again be ensured that no excessive mechanical weakening of the housing takes place. Also conceivable is a combination of radially extending and axially extending material recesses.
the extension of the material recesses can eg run obliquely to the radial direction and / or axial direction and, for example, also have a skewed course with respect to the longitudinal axis of the housing or the axis of rotation of the rotor shaft.
the width and / or height measured transversely to a longitudinal and / or circumferential extent of e.g. formed as a recess or slot material recess, i. in a radially extending, lying in an axial plane slot, for example, its axial height or clear width, is preferably in a range of about 1 mm to 6mm, but may in principle be less than 1 mm or greater than 6mm.
the material recesses are at least partially introduced in the form of recesses, slots and / or holes in the housing.
At least one material recess is provided as completely, partially or in sections extending around a longitudinal axis of the housing around the recess or slot.
Such a groove or slot may e.g. be made by means of a disc cutter or the like.
the material recesses may at least partially form free spaces filled only with air or gas.
the solid in question expediently has a lower thermal conductivity than the material of the housing and as air or gas.
a heating device In the area of the suction-side housing section, a heating device can be provided.
a heating device comprises at least one heating tape or the like.
vacuum pump 10 comprises a pump inlet 14 surrounded by an inlet flange 12 and a plurality of pumping stages for conveying the gas present at the pump inlet 14 to a in Fig. 1 not shown pump outlet.
the vacuum pump 10 comprises a stator with a static housing 16 and a rotor arranged in the housing 16 with a rotor shaft 20 rotatably mounted about a rotation axis 18.
the vacuum pump 10 is designed as a turbomolecular pump and comprises a plurality of pump-connected with each other in series turbomolecular pumping stages with a plurality of connected to the rotor shaft 20 turbomolecular rotor disks 22 and a plurality of axially disposed between the rotor disks 22 and fixed in the housing 16 turbomolecular stator disks 24 by spacer rings 26 at a desired axial distance held each other.
the rotor disks 22 and stator disks 24 provide in a scooping region 28 an axial pumping action directed in the direction of the arrow 30.
the vacuum pump 10 also comprises three Holweck pumping stages which are arranged one inside the other in the radial direction and which are pumpingly connected to one another in series.
the rotor-side part of the Holweck pump stages comprises a rotor hub 32 connected to the rotor shaft 20 and two cylinder shell-shaped Holweck rotor sleeves 34, 36 fastened to and supported by the rotor hub 32, which are oriented coaxially with the rotor axis 18 and are nested in the radial direction.
two cylindrical jacket-shaped Holweck stator sleeves 38, 40 are provided, which are also oriented coaxially to the rotor axis 18 and are nested in the radial direction.
the pump-active surfaces of the Holweck pump stages are each formed by the radial lateral surfaces of a Holweck rotor sleeve 34, 36 and a Holweck stator sleeve 38, 40 opposite each other, forming a narrow radial Holweck gap.
one of the pump-active surfaces is smooth, in the present case, for example, the Holweck rotor sleeve 34 and 36, wherein the opposite pump-active surface of the respective Holweck stator 38 and 40 a structuring with helical about the rotation axis 18 around in the axial direction extending grooves, in which the gas is driven by the rotation of the rotor and thereby pumped.
the rotatable mounting of the rotor shaft 20 is effected by a roller bearing 42 in the region of the pump outlet and a permanent magnet bearing 44 in the region of the pump inlet 14.
the permanent magnet bearing 44 comprises a rotor-side bearing half 46 and a stator-side bearing half 48, each comprising a ring stack of a plurality of axially stacked permanent magnetic rings 50, 52, wherein the magnetic rings 50, 52 facing each other to form a radial bearing gap 54.
an emergency or fishing camp 56 is provided, which is designed as an unlubricated rolling and idle in normal operation of the vacuum pump without touching and passes only at an excessive radial deflection of the rotor relative to the stator into engagement to a radial stop for to form the rotor, which prevents a collision of the rotor-side structures with the stator-side structures.
a conical injection nut 58 is provided on the rotor shaft 20 with an outer diameter increasing towards the rolling bearing 42, which with a scraper one more with a resource such. a lubricant, soaked absorbent disks 60 in operative resource storage is in sliding contact.
the operating means is transferred by capillary action from the working fluid reservoir via the scraper to the rotating injection nut 58 and due to the centrifugal force along the injection nut 58 in the direction of increasing outer diameter of the injection nut 58 is conveyed to the rolling bearing 42, where it is e.g. fulfills a lubricating function.
the vacuum pump includes a drive motor 62 for rotatably driving the rotor whose rotor is formed by the rotor shaft 20.
a control unit 64 controls the drive motor 62.
the turbomolecular pumping stages provide a pumping action in the direction of the arrow 30 in the scooping region 28.
Fig. 2 shows a schematic representation of the side facing away from the suction, provided with material recesses 66, 68 part of the housing 16 of an exemplary Embodiment of a vacuum pump 10 according to the invention, which is in particular a turbomolecular pump in the Fig. 1 represented type can act.
the vacuum pump 10 also comprises a housing 16, a stator and a rotor, not shown here, with a rotor shaft which is supported by a first bearing provided in the region of the suction side of the housing 16 and a further bearing provided in the region of the opposite side of the housing 16 is. It may be in the two camps not shown here as shown in FIG Fig. 1 For example, again act around a suction-side permanent magnet bearing and a provided on the opposite side bearings. This rolling bearing can eg in the field of in Fig. 2 be shown central bore 76 arranged.
the part 70 of the housing 16 facing away from the suction side is provided with material recesses 66, 68 which are inserted into the housing 16 in such a way that they become labyrinth-like, by a plurality of changes in direction extended heat flow path 72 results.
the invention is for example in a vacuum pump in the Fig. 1 shown applicable. Due to the material recesses according to the invention, the suction-side housing section of the vacuum pump can be correspondingly tempered to avoid condensation of gases, without thereby also heating the opposite housing section 70 of the pump containing the further bearing.
the rolling bearing containing housing portion 70 can thus be kept sufficiently cold with minimal cooling or possibly even without cooling, to ensure that the oil required for lubrication of the bearing retains its lubricating properties. Accordingly, the energy required hitherto for cooling is at least reduced.
the side facing away from the suction, provided with the material recesses 66, 68 part 70 of the housing 16 has a limited by an inner wall 74 central bore 76.
the material recesses 66, 68 as in the example of Fig. 2 shown, both starting from the inner wall 74 and starting from the outer peripheral surface 78 of the housing 16 may be introduced into the housing 16.
the material recesses 66, 68 can, as in the Fig. 2 shown, in the axial direction of the housing 16 viewed in particular alternately starting from the inner wall 74 and starting from the outer peripheral surface 78 of the housing 16 may be introduced into the housing 16. As also shown, the material recesses 66, 68 in this case, in particular comb-like mesh.
the material recesses 66, 68 may extend at least partially in the radial direction and / or at least partially in the axial direction. In this case, for example, a combination of extending in the radial direction and extending in the axial direction material recesses 66, 68 conceivable. I'm in the Fig. 2 In the case illustrated, the material recesses 66, 68 each extend in the radial direction, that is, they lie in different height planes with respect to the axis of rotation 18 of the rotor shaft, not shown.
the material recesses 66, 68 may be introduced into the housing 16 at least partially in the form of recesses, slots and / or bores.
at least one material recess 66, 68 can be provided as a recess or slot extending completely around the axis of rotation 18.
Both recesses 66, 68 are each formed as such a recess or slot.
the facing away from the suction side portion 70 of the housing 16 is provided only with two successive material recesses 66, 68 in the axial direction, more than two material recesses may be introduced into these facing away from the suction side portion 70 of the housing 16.
the material recesses in the axial direction of the housing 16 can in particular also be alternately introduced, starting from the inner wall 74 and starting from the outer circumferential surface 78 of the housing 16, into the housing 16 and intermesh in a comb-like manner.
the material recesses 66, 68 can at least partially form only free spaces filled with air or gas, as shown in FIG Fig. 2 is shown in the recess 68 introduced from the outside. As in Fig. 2 in the other, introduced from the inside recess 66, however, at least partially, a heat-insulating solid may be introduced into the material recesses, which expediently higher thermal insulation than air or gas and as the material of which the housing 16 consists.
the housing material is in particular aluminum.
the radial depths into which the in Fig. 2 shown recesses 66, 68 each are shown purely by way of example and are selected in concrete applications depending on eg the wall thickness of the housing portion 70 and the ratio of the inner diameter in the bore 76 and the outer diameter of the housing portion 70, in each case such that the "crash safety" of the pump remains guaranteed.
Regarding possible Dimensions of the recesses 66, 68 is hereby also referred to the introduction part.
the vacuum pump 10 according to the invention can be designed, for example, as described with reference to FIG Fig. 1 has been described.
a heating device may be provided in the region of the suction-side housing section.
Such a heater may include, for example, at least one heater band or the like.

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Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
General Engineering & Computer Science (AREA)
Physics & Mathematics (AREA)
Thermal Sciences (AREA)
Non-Positive Displacement Air Blowers (AREA)

EP15182138.6A 2015-08-24 2015-08-24 Pompe à vide Active EP3135919B1 (fr)

Priority Applications (2)

Application Number	Priority Date	Filing Date	Title
EP15182138.6A EP3135919B1 (fr)	2015-08-24	2015-08-24	Pompe à vide
JP2016162586A JP6298858B2 (ja)	2015-08-24	2016-08-23	真空ポンプ

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
EP15182138.6A EP3135919B1 (fr)	2015-08-24	2015-08-24	Pompe à vide

Publications (2)

Publication Number	Publication Date
EP3135919A1 true EP3135919A1 (fr)	2017-03-01
EP3135919B1 EP3135919B1 (fr)	2019-02-20

Family

ID=53969270

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
EP15182138.6A Active EP3135919B1 (fr)	2015-08-24	2015-08-24	Pompe à vide

Country Status (2)

Country	Link
EP (1)	EP3135919B1 (fr)
JP (1)	JP6298858B2 (fr)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
EP0408791A1 (fr) *	1989-07-20	1991-01-23	Leybold Aktiengesellschaft	Pompe à effet visqueux à rotor en forme de cloche
EP1508700A2 (fr) *	2003-08-21	2005-02-23	Ebara Corporation	Pompe à vide turbo-moléculaire
EP1619395A1 (fr) *	2004-07-20	2006-01-25	VARIAN S.p.A.	Pompe à vide rotative et son procédé d'équilibrage
JP2006037951A (ja) *	2004-06-25	2006-02-09	Osaka Vacuum Ltd	複合分子ポンプの断熱構造
JP2010025122A (ja) *	2003-02-18	2010-02-04	Osaka Vacuum Ltd	分子ポンプの断熱構造

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE3508483A1 (de) *	1985-03-09	1986-10-23	Leybold-Heraeus GmbH, 5000 Köln	Gehaeuse fuer eine turbomolekularvakuumpumpe
JP5420323B2 (ja) *	2009-06-23	2014-02-19	株式会社大阪真空機器製作所	分子ポンプ

2015
- 2015-08-24 EP EP15182138.6A patent/EP3135919B1/fr active Active
2016
- 2016-08-23 JP JP2016162586A patent/JP6298858B2/ja active Active

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
EP0408791A1 (fr) *	1989-07-20	1991-01-23	Leybold Aktiengesellschaft	Pompe à effet visqueux à rotor en forme de cloche
JP2010025122A (ja) *	2003-02-18	2010-02-04	Osaka Vacuum Ltd	分子ポンプの断熱構造
EP1508700A2 (fr) *	2003-08-21	2005-02-23	Ebara Corporation	Pompe à vide turbo-moléculaire
JP2006037951A (ja) *	2004-06-25	2006-02-09	Osaka Vacuum Ltd	複合分子ポンプの断熱構造
EP1619395A1 (fr) *	2004-07-20	2006-01-25	VARIAN S.p.A.	Pompe à vide rotative et son procédé d'équilibrage

Also Published As

Publication number	Publication date
JP2017082760A (ja)	2017-05-18
EP3135919B1 (fr)	2019-02-20
JP6298858B2 (ja)	2018-03-20

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