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EP3034882A2 - Pompe à vide - Google Patents

Pompe à vide Download PDF

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Publication number
EP3034882A2
EP3034882A2 EP15195879.0A EP15195879A EP3034882A2 EP 3034882 A2 EP3034882 A2 EP 3034882A2 EP 15195879 A EP15195879 A EP 15195879A EP 3034882 A2 EP3034882 A2 EP 3034882A2
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
pumping
holweck
gap
rotor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP15195879.0A
Other languages
German (de)
English (en)
Other versions
EP3034882B1 (fr
EP3034882A3 (fr
Inventor
Bernd Hofmann
Jan Hofmann
Mirko Mekota
Johannes Schnarr
Michael Schweighöfer
Tobias Stoll
Peter Vorwerk
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP3034882A2 publication Critical patent/EP3034882A2/fr
Publication of EP3034882A3 publication Critical patent/EP3034882A3/fr
Application granted granted Critical
Publication of EP3034882B1 publication Critical patent/EP3034882B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F04D25/0606—Units comprising pumps and their driving means the pump being electrically driven the electric motor being specially adapted for integration in the pump

Definitions

  • the present invention relates to a vacuum pump, in particular turbomolecular pump, with at least one pumping mechanism for pumping gas along a pumping channel extending from an inlet to an outlet of the vacuum pump, the pumping channel extending through at least a first gap in which a pumping function is performed during operation of the vacuum pump is provided, and wherein at least one second gap is provided, in which no pumping function is fulfilled during operation of the vacuum pump, wherein preferably the pumping channel extends through the second gap.
  • Vacuum pumps of the type mentioned initially provide high compression, high allowable backing pressure, and / or short ramp-up times to minimize process cycle times. For some applications, however, it is advantageous if a vacuum pump in operation only reaches a low pump body temperature, can handle high gas loads, can be used at high ambient temperatures and / or has a low uptake of electrical power, in particular at backpressure pressures of 1 to 10 mbar.
  • the present invention is therefore based on the object to provide an improved vacuum pump, which offers at least one of the aforementioned advantages.
  • a vacuum pump with the features of claim 1 and in particular by the fact that a vacuum pump of the type mentioned is further developed in that in the vacuum pump of the second Gap at least one factor, especially 2 times, 3 times, 4 times, 5 times, 6 times, 7 times, 8 times, 9 times or 10 times, is greater than the first gap.
  • the second gap in which no pumping function is effected during pump operation, is thus made relatively large in the vacuum pump according to the invention in comparison to the first gap, in which a pumping function occurs during operation.
  • the gas friction in the region of the second gap can be kept low.
  • the pump according to the invention can thus achieve a certain final pressure while receiving a lower electrical power. Due to the reduced power consumption, the vacuum pump heats up less during operation. Thereby, the temperature of the pump body during operation of the vacuum pump can be kept low, which is advantageous in some applications.
  • the first gap in which a pumping function is effected during operation of the vacuum pump and thus a pumping effect, be designed so small that a proper pumping function, in particular a sufficiently high compression or a sufficiently high suction through which the first gap can be provided forming components.
  • the second gap is preferably a gap through which the pumping channel runs. However, no pumping function occurs during operation of the vacuum pump in the second gap. By making the second gap comparatively large in comparison with the first gap in which a pumping function occurs during operation of the vacuum pump, the resistance to the gas to be delivered through the second gap can be kept low.
  • the second gap may also be outside of the pumping channel.
  • the second gap may be, for example, a gap in a barrier labyrinth.
  • a second gap provided outside the pumping channel can in particular be arranged between a rotating component and a stationary component.
  • the second gap in particular if it is located outside the pumping channel, be formed between two stationary components.
  • the second gap may not be arranged in the pumping channel, there may be a gas-conducting connection between the second gap and the pumping channel, as in the case of a sealing gas labyrinth.
  • the second gap can thus be connected to the pumping channel to some extent in the manner of a shunt or be in gas-conducting communication with the pumping channel.
  • said factor indicating the size ratio between the first and second gaps relates to the width of the first and second gaps, respectively.
  • the second gap thus has a width which is greater than the width of the first gap multiplied by the factor.
  • the gap width is preferably measured perpendicular to the conveying direction of the gas to be pumped through the gap.
  • gap is not seen in the pumping direction of the gas to be conveyed arbitrarily short space or an arbitrarily short gap, for example. between two components of the vacuum pump, but a respective section, e.g. the pumping channel and / or between two components, which, in particular with at least substantially constant width, at least over a predetermined length, e.g. of at least 5 mm or at least 10 mm or at least 15 mm.
  • a pumping function is fulfilled or effected in the first gap
  • a pumping effect or a pumping action occurs in the gap during pump operation.
  • the gas to be pumped is thus actively conveyed through the gap and not only flows along the pumping channel from the gap entrance to the gap exit.
  • the first gap between a rotating member and a stationary component of the vacuum pump is provided, wherein the two components during pump operation cooperate in such a way that they effect the pumping function in the first gap.
  • the two components during pump operation cooperate in such a way that they effect the pumping function in the first gap.
  • the second gap may be provided between two components of the vacuum pump, which do not cooperate in the operation of the pump so that they fulfill a pumping function.
  • the two components, between which the second gap is provided are a rotating and a stationary component.
  • the two components do not fulfill a pumping function in the region of the second gap.
  • the two components may also be static components.
  • all gaps in which no pumping function is fulfilled by at least the factor are greater than those gaps through which the pumping channel extends and in which a pumping function is fulfilled.
  • the first gap is for example a Holweckspalt formed between a pump-active surface of a Holweck rotor and a pump-active surface of a Holweck stator.
  • the second gap is a gap between a smooth side of a Holweck rotor, which, for example, forms the rear side to a pump-active surface of the Holweck rotor, and an opposite smooth surface of a stationary component, so that, when the Holweck is rotating Rotor between the smooth back of the Holweck rotor and the smooth surface of the stationary component no or at most only a small pumping effect sets.
  • a vacuum pump in particular turbomolecular pump, at least one pumping mechanism for pumping gas along a running from an inlet to an outlet of the vacuum pump pumping channel, wherein the pumping channel through at least a first Gap in which a pumping function is fulfilled during operation of the vacuum pump, wherein the pumping mechanism comprises a Holweck pumping mechanism with a Holweck rotor and a Holweck stator, wherein the first column is a Holweck gap which is between the lateral surface of Holweck- Stator and the lateral surface of the Holweck rotor is provided, and wherein the Holweck gap, in particular at rated speeds of the Holweck pump mechanism, a width of less than 0.5 mm, preferably less than 0.3 mm.
  • such a narrow Holweck gap is used in a vacuum pump whose inlet has an inlet flange with a diameter of DN 100 or DN 160.
  • the pumping mechanism comprises a Holweck pumping mechanism with only a single Holweck stage or with a maximum of two Holweck stages.
  • the vacuum pump in particular from the installation space ago, designed for more than two, in particular nested, Holweck stages, but in fact only one Holweck stage or a maximum of two Holweck stages are realized while the rest Holweck stages are not realized, eg by omitting the Holweck stage or by omitting one of two Holweck rotors.
  • the pump mechanism comprises a Holweck pumping mechanism
  • the pump-active surface in particular seen along the axial direction of the pump, has an overall length which is less than 120 mm, preferably less than 95 mm.
  • the gas friction in the Holweck pump mechanism can be reduced, whereby a lower electrical power consumption of the vacuum pump is required.
  • the Holweck pumping mechanism has at least one and preferably exactly one Holweck rotor whose length, seen in the axial direction of the pump, is a maximum of 60 mm, preferably a maximum of 55 mm, more preferably a maximum of 48 mm.
  • the Holweck pumping mechanism can thus be designed relatively short viewed in the axial direction, whereby a lower gas friction is effected in the Holweck pumping mechanism. This has an advantageous effect on the required electrical power consumption of the vacuum pump to reach a certain final pressure.
  • a vacuum pump in particular turbomolecular pump, at least one pumping mechanism for pumping gas along a running from an inlet to an outlet of the vacuum pump pumping channel, wherein the pumping mechanism at least one turbomolecular pumping stage with a plurality of rotor disks fixed to a rotor shaft and in the axial direction between the rotor disks rotatably arranged stator disks, wherein the pumping channel extends through the turbomolecular pumping stage, and wherein in the turbomolecular pumping stage at least one rotor disk and / or at least one stator disk is omitted, so that the Pumping stage at the location of the omitted rotor disk or stator disk has a free space.
  • the vacuum pump thus offers space for more rotor and / or stator than are actually installed in the vacuum pump and has a corresponding space instead of the disc omitted.
  • the gas friction in the turbomolecular pumping stage can be reduced.
  • the proper operation of the vacuum pump can thus be carried out with lower power consumption, whereby excessive heating of the vacuum pump can be avoided and the power consumption of the vacuum pump can be reduced.
  • At least one disk pair consisting of a rotor disk and the adjacent stator disk cooperating with the rotor disk is omitted.
  • the disc pair omitted is the outermost pair of outermost disc pairs of the turbomolecular pumping stage because, by omitting this disc pair, a good compromise between a reduction in gas friction on the one hand and a reduction in the suction or compressibility of the turbomolecular pumping stage on the other hand can be achieved.
  • the rotor disks and / or the stator disks of at least one turbomolecular pumping stage preferably have a spherical disk geometry.
  • a stepped disc geometry may be provided.
  • the vacuum pump comprises at least one and preferably exactly one single turbomolecular pumping stage, which is equipped with a maximum of six rotor disks, wherein a flange provided at the inlet of the vacuum pump has a flange diameter of DN 100.
  • the vacuum pump comprises at least one and preferably exactly one single turbomolecular pumping stage, which is equipped with a maximum of 4 rotor discs, wherein a flange provided at the inlet of the vacuum pump has a flange diameter of DN 160.
  • a vacuum pump in particular turbomolecular pump, has at least one pumping mechanism for pumping gas along a pumping channel extending from an inlet to an outlet of the vacuum pump and an electric motor for driving the pumping mechanism.
  • the electric motor comprises a stator and a rotor cooperating with the stator and rotatable about a rotation axis, the stator having a package of steel sheets and / or the iron yoke of the rotor comprising a package of steel sheets, and the steel sheets of the package of steel sheets of the iron yoke of the Rotor and / or the stator are connected to each other by means of baked enamel and not welded or riveted together.
  • the package of steel sheets of the rotor and / or the stator is thus held together exclusively by baked enamel, so that - in particular because welding and riveting is dispensed with - eddy current losses can be minimized during operation of the electric motor in the respective sheet steel package.
  • the heating of the electric motor and concomitantly the heating of the vacuum pump can be reduced during its operation.
  • the required electrical power consumption of the electric motor to achieve a certain final pressure can be reduced.
  • the steel sheets are in particular iron sheets or electrical steel sheets.
  • each steel sheet of the package of steel sheets of the rotor and / or the stator has a thickness of less than 0.4 mm, preferably less than 0.36 mm. With such thin designed sheets eddy current losses in the steel core of the rotor and / or the stator can be kept particularly low.
  • the electric motor has a maximum motor power, which is above the predetermined for the operation of the vacuum pump engine power by a predetermined value, in particular by at least substantially 10 watts.
  • the electric motor thus has a relatively low drive power, in particular compared to electric motors used in vacuum pumps according to the prior art, which are designed for the shortest possible start-up time and thus can temporarily provide far more than 10 watts above the motor power required for the operating point.
  • the reduction of the maximum engine power to the predetermined value, such as 10 watts, above the provided for the intended operation of the vacuum pump engine power has in particular the advantage that the electric motor can be made compact and occurring during operation of the electric motor eddy current losses can be reduced.
  • the use of copper, which is used in particular on the rotor side to form electrical windings, can be reduced.
  • the electric motor may be designed for a drive voltage of at least approximately 48 volts.
  • the electric motors are usually designed for a drive voltage of 24 volts, so that in the inventive variant of the electric motor, the drive voltage is doubled to at least approximately 48 volts over the normal drive voltage of 24 volts.
  • the maximum drive voltage is equal to the safety extra-low voltage of 50 volts in the rail voltage operation (50 volts DC).
  • the doubling of the drive voltage from 24 volts to 48 volts leads with the same power consumption to a halving of the currents flowing through the electric motor and thus also to a reduction of drive losses.
  • the vacuum pump has a sealing gas labyrinth with a maximum of three labyrinth stages.
  • the vacuum pump can be designed for more than three labyrinth stages, the reduction to a maximum of three labyrinth stages is achieved in that further labyrinth stages omitted and thus - despite the space provided for this purpose - were not installed.
  • those labyrinth stages are preferably omitted which have the largest diameter, since in these, the relative velocities between the rotor and the stator of the sealing gas labyrinth largest and thus the friction losses are highest.
  • the reduction of the labyrinth stages can be achieved, in particular, by virtue of the fact that the sealing gas labyrinth is separated from a rotating surface, for example the surface of a part of the hub extending in the radial direction Holweck rotor, and a fixed surface, for example, the rotor hub facing surface is formed, and that the two surfaces have interlocking, annular elevations, wherein one of the surfaces has more elevations than the other surface.
  • a rotating surface for example the surface of a part of the hub extending in the radial direction Holweck rotor
  • a fixed surface for example, the rotor hub facing surface is formed
  • a small barrier gas flow which lies in particular below a predetermined threshold, in particular below 15 sccm, flows through the barrier gas labyrinth.
  • the pump according to the invention may be a side channel pump or a side channel high vacuum pump.
  • a side channel high vacuum pump is a vacuum pump that operates from the atmosphere to the high vacuum range and normally includes a combination of side channel pump and Holweck stages.
  • the pumping system of the side channel pump consists of a rotor disk having outer peripheral blades and an annular working space, the side channel extending between the blades and a housing wall external to the blades.
  • the side channel is narrowed at one point by a breaker on the disc profile.
  • the breaker separates an inlet provided in the housing into the side channel of the outlet also provided on the housing.
  • the pumping effect is caused by a helical flow from the inlet to the outlet caused by the blades of the rotating rotor. This creates a pressure difference between the inlet and the outlet. Lower final pressures can be achieved by connecting several pumping stages in series.
  • An advantage of embodiments of a vacuum pump according to the invention is in particular that the maximum power consumption compared to known from the prior art vacuum pumps is reduced, in particular by measures that lead to a reduction of the eddy current losses in the electric motor and the gas friction of the funded by the vacuum pump gas. Excessive heating of the vacuum pump during operation can thus be avoided, so that embodiments of the vacuum pump according to the invention can be used in combination with air cooling instead of a much more complicated water cooling.
  • an air-cooled insert is at higher ambient temperatures, e.g. greater than 40 ° C, possible.
  • higher gas loads can be handled with the same power consumption.
  • the vacuum pump shown comprises a pump inlet 70 surrounded by an inlet flange 68 and a plurality of pumping stages for conveying the gas present at the pump inlet 70 through a pumping channel 10 to a pump outlet, not shown, into which a pump inlet Fig. 1 shown outlet region 71 opens.
  • the outlet region 71 is the portion of the pumping channel 10 located at the downstream end of the internal Holweck stage in the illustrated example.
  • the vacuum pump includes a stator having a static housing 72 and a housing 72 disposed in the housing Rotor with a about a rotational axis 14 rotatably mounted rotor shaft 12th
  • the vacuum pump is designed as a turbomolecular pump and comprises a pumping mechanism, which is formed by a plurality of pump-effective, connected in series, turbomolecular pumping stages.
  • the turbomolecular pumping stages have a plurality of turbomolecular rotor disks 16 connected to the rotor shaft 12 and a plurality of turbomolecular stator disks 26 arranged in the axial direction between the rotor disks 16 and fixed in the housing 72.
  • the stator 26 are held by spacers 36 at a desired axial distance from each other.
  • the rotor disks 16 and the stator disks 26 provide in a scooping region 50 an axial pumping action directed in the direction of the arrow 58, that is to say in the pumping direction.
  • Pumping channel 10 extends through the turbomolecular pumping stages and further through a Holweck pumping mechanism downstream of the turbomolecular pumping stages.
  • the Holweck pumping mechanism comprises Holweck pumping stages which are arranged one inside the other in the radial direction and which are pump-connected with one another in series.
  • the rotor-side part of the Holweck pump stages comprises a rotor hub 74 connected to the rotor shaft 12 and two cylinder shell-shaped Holweck rotor sleeves 76, 78 fastened to and carried by the rotor hub 74, which are oriented coaxially with the axis of rotation 14 and nested in the radial direction.
  • two cylindrical jacket-shaped Holweck stator sleeves 80, 82 are provided, which are also oriented coaxially to the rotation axis 14 and nested in the radial direction.
  • the pump-active surfaces of the Holweck pump stages are characterized by the radial lateral surfaces of a Holweck rotor sleeve 76, 78 and a Holweck stator sleeve opposite each other, forming a narrow radial Holweck gap 80, 82 formed.
  • one of the pump-active surfaces is smooth - in the present case that of the Holweck rotor sleeve 76 or 78 - and the opposite pump-active surface of the Holweck stator sleeve 80, 82 comprises a Holweck thread with helically around the rotation axis 14 in the axial direction extending grooves in which, by the rotation of the respective rotor sleeve 76, 78, the gas is propelled and thereby pumped.
  • a second Holweck gap 83b extends between the Holweck rotor sleeve 76 and the inner Holweck stator sleeve 82.
  • a third Holweck gap 83c extends between the inner Holweck stator sleeve 82 and the inner Holweck rotor sleeve 78.
  • the pump channel 10 opens into the outlet region 71, via which the gas delivered by the inlet 70 is pumped into the outlet (not shown) becomes.
  • a further gap 85a which opens in shunt into the outlet region 71 and connects the outlet region 71 with a labyrinth seal 130.
  • the gap 85 a is thus not part of the pumping channel 10.
  • the gap 85a in which at least substantially no pumping function occurs during operation of the vacuum pump, is at least a predetermined factor, e.g. 2 times, 3 times, 4 times, 5 times, 6 times, 7 times, 8 times, 9 times or 10 times, larger than each of Holweck's column 83a, 83b and 83c.
  • the grooves form the pumping channel for the gas to be pumped.
  • the Holweck pump stages provide, in particular due to the Holweck thread, a pumping action to further convey the gas pumped along the pumping channel from the turbomolecular pumping stages through the Holweck pumping stages to the outlet.
  • the rotatable mounting of the rotor shaft 12 is effected by a rolling bearing 84 in the region of the pump outlet and a permanent magnet bearing 86 in the region of the pump inlet 70.
  • the permanent magnet bearing 86 comprises a rotor-side bearing half 88 and a stator-side bearing half 90, which each comprise a ring stack of a plurality of stacked in the axial direction of permanent magnetic rings 92, 94.
  • the magnetic rings 92, 94 lie opposite one another with the formation of a radial bearing gap.
  • the stator-side magnetic rings 94 are supported by a stator-side support portion which extends through the magnetic rings 94 and is suspended from radial struts 108 of the housing 72.
  • the stator-side magnetic rings 94 are fixed on the end of the magnetic ring stack facing the inside of the pump by a compensating element 114 and a fastening ring 116.
  • an emergency or catch bearing 98 is provided, which is designed as an unlubricated rolling bearing.
  • the backup bearing 98 is engaged. It only engages and rotates with excessive radial deflection of the rotor relative to the stator to form a radial stop for the rotor which prevents collision of the rotor-side structures with the stator-side structures ,
  • a conical spray nut 100 with an outer diameter increasing towards the rolling bearing 84 is provided on the rotor shaft 12.
  • the spray nut 100 is in sliding contact with a scavenger of an operating fluid storage medium comprising a plurality of absorbent discs 102 impregnated with a resource such as a lubricant.
  • the resource is transferred by capillary action of the resource storage on the scraper on the rotating spray nut 100 and due to the centrifugal force along the spray nut 100 in the direction of growing Outside diameter promoted to the rolling bearing 84 where it fulfills, for example, a lubricating function.
  • the rolling bearing 84 and the working fluid reservoir are enclosed by a trough-shaped insert 124 and a cover element 126 of the vacuum pump.
  • the vacuum pump comprises a drive motor 104 configured as an electric motor for rotationally driving the rotor, the rotor of which is formed by the rotor shaft 12.
  • a control unit 106 controls the motor 104.
  • Seals may be provided between individual components of the vacuum pump, of which several seals are designated by the reference numeral 107 for illustration purposes.
  • the vacuum pump further comprises a sealing gas inlet 122 which is closed by a closure element 120 and which connects the storage space for the rolling bearing 84 provided in the vacuum pump with the outside of the pump and via which a sealing gas can be supplied to the storage space.
  • a labyrinth seal 130 is formed in the region between the rotor hub 74 and a partition wall 128, through which the rotor shaft 12 extends, forming a radial gap.
  • Such a labyrinth seal 130 is also referred to as a seal gas labyrinth.
  • the seal gas labyrinth 130 is formed by a rotating surface 132 formed on the rotor hub 74 and a complementary fixed surface 134 formed on the dividing wall 128.
  • the surfaces 132 and 134 have interlocking, annular shaped elevations, such as Fig. 1 shows. At the vacuum pump the Fig. 1 are on each surface 132, 134 provided five annular elevations, so in this context is also referred to by a five-stage barrier gas labyrinth.
  • the basic structure of the vacuum pump the Fig. 2 corresponds to the structure of the vacuum pump Fig. 1 ,
  • the vacuum pump is the Fig. 2 further optimized for reduced power consumption, in particular to minimize the heating of the pump during air cooling operation to reduce the power consumption of the vacuum pump and to allow higher gas loads with the same power consumption.
  • the inner Holweck rotor sleeve (see reference numeral 78 in FIG Fig. 1 ) omitted, so that the vacuum pump the Fig. 2 only two nested, the Holweck rotor sleeve 76 comprehensive Holweck pump stages has.
  • the Holweck levels By reducing the Holweck levels to eg two levels, the gas friction can be reduced.
  • the barrier gas labyrinth 130 reduced in three stages by in the pump-active surface 134 on the side of the partition 128 instead of the five annular projections (see. Fig. 1 ) only the three inner annular elevations are provided. It was thus omitted to minimize the gas friction in the sealing gas labyrinth 130 on the two outer labyrinth stages, since in these the relative velocities between the fixed partition 128 and the rotating during operation of the pump rotor hub 74 largest and thus the gas friction losses are highest. By omitting sealing gas labyrinth stages thus the gas friction can be reduced. In addition, the required power consumption of the electric motor 104 can be reduced to reach a certain final pressure.
  • the electric motor 104 may have both a stator and a rotor side a package of coated with baked enamel and held together by baked enamel electrical sheets, so that the steel sheets of each package of steel sheets are connected only by means of baked enamel and not held together by welding or riveting.
  • the rotor-side package of electrical steel sheets is, in particular, the iron yoke of the rotor of the electric motor 104.
  • the coating of the electrical steel sheets with baked enamel isolates the electrical steel sheets from one another, thereby reducing eddy current losses in the packages.
  • each steel sheet of the package of steel sheets of the iron yoke of the rotor and / or the stator has a thickness of less than 0.4 mm, preferably less than 0.36 mm, and more preferably a thickness of at least approximately 0.35 mm.
  • the Fig. 2 was also the remaining Holweck rotor sleeve 76 relative to the axial direction of the vacuum pump, for example shortened to 46 mm, resulting in a total of 92 mm due to the remaining two Holweckpump processn a pump active. Due to the short pump-active length of Holweckpumpstimpgen a further reduction of the gas friction and thus the required power consumption of the electric motor 104 can be achieved to reach a certain final pressure.
  • the electric motor 104 has been designed so that its maximum motor power is at most 10 watts above the motor power required for the operating point and / or that it receives a drive voltage of 48 volts.
  • those gaps through which the pumping channel extends and which each are between a rotating and a stationary component of the vacuum pump, the two components cooperating in such a way that they provide a pumping action, have been designed such that such gaps at least by a factor, such as 5 times, smaller than those gaps of the vacuum pump in which no pumping effect occurs.
  • All the gaps in which no pumping effect occurs are, in particular, gaps through which the pumping channel runs and / or gaps between a movable and a stationary component. But it can also be a column, which are provided between two stationary components.
  • both the Holweck gap 83a extending between the outer Holweck stator sleeve 80 and the outer Holweck rotor sleeve 76, as well as the Holweck gap 83b extending between the inner Holweck stator sleeve 82 and the outer Holweck rotor sleeve 76, has been designed to be radially within the Holweck stator sleeve 82 extending gap 85 by the factor, eg 5 times, larger than the gap 83a and the gap 83b.
  • the Holweck gaps 83a and 83b are designed so that they at nominal speeds of the Holweck hub 74 a Have a width of less than 0.3 mm. This leads to lower Kochströmholden in the Holweck pumping stage and in particular to higher compression, whereby the performance of the vacuum pump can be improved.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP15195879.0A 2014-12-17 2015-11-23 Pompe à vide Active EP3034882B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102014118881.0A DE102014118881A1 (de) 2014-12-17 2014-12-17 Vakuumpumpe

Publications (3)

Publication Number Publication Date
EP3034882A2 true EP3034882A2 (fr) 2016-06-22
EP3034882A3 EP3034882A3 (fr) 2016-10-26
EP3034882B1 EP3034882B1 (fr) 2024-08-14

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EP15195879.0A Active EP3034882B1 (fr) 2014-12-17 2015-11-23 Pompe à vide

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EP (1) EP3034882B1 (fr)
JP (1) JP2016114061A (fr)
DE (1) DE102014118881A1 (fr)

Families Citing this family (2)

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Publication number Priority date Publication date Assignee Title
EP3473858B1 (fr) * 2017-10-17 2020-07-01 Pfeiffer Vacuum Gmbh Procédé d'optimisation de durée de vie des paliers à rouleaux d'une pompe à vide
GB2579028A (en) * 2018-11-14 2020-06-10 Edwards Ltd Molecular drag stage

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EP3034882B1 (fr) 2024-08-14
EP3034882A3 (fr) 2016-10-26

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