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EP0408791A1 - Pompe à effet visqueux à rotor en forme de cloche - Google Patents

Pompe à effet visqueux à rotor en forme de cloche Download PDF

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Publication number
EP0408791A1
EP0408791A1 EP89113317A EP89113317A EP0408791A1 EP 0408791 A1 EP0408791 A1 EP 0408791A1 EP 89113317 A EP89113317 A EP 89113317A EP 89113317 A EP89113317 A EP 89113317A EP 0408791 A1 EP0408791 A1 EP 0408791A1
Authority
EP
European Patent Office
Prior art keywords
rotor
housing part
pump according
outlet
bell
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP89113317A
Other languages
German (de)
English (en)
Other versions
EP0408791B1 (fr
Inventor
Frank Fleischmann
Hans-Peter Dr. Kabelitz
Hans Kriechel
Martin Mühlhoff
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Priority to EP89113317A priority Critical patent/EP0408791B1/fr
Priority to DE89113317T priority patent/DE58907244D1/de
Priority to US07/554,722 priority patent/US5165872A/en
Priority to JP2190868A priority patent/JP2877914B2/ja
Publication of EP0408791A1 publication Critical patent/EP0408791A1/fr
Application granted granted Critical
Publication of EP0408791B1 publication Critical patent/EP0408791B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps

Definitions

  • the invention relates to a friction pump with an inlet, an outlet and a bell-shaped rotor, the outside of which, together with a first housing part surrounding the rotor, forms an annular gas delivery channel, which extends from the inlet to the outlet, either the outside of the rotor or the inside of the Stator is equipped at least in the area near the outlet with a threaded structure, and with a second housing part protruding into the space formed by the bell-shaped rotor, which serves to hold the rotor and the drive motor.
  • Friction pumps include molecular and turbomolecular pumps.
  • a moving rotor wall and a stationary stator wall are designed and spaced apart such that the impulses transmitted from the walls to gas molecules located between them have a preferred direction.
  • the rotor and / or stator wall are equipped with threaded depressions or projections.
  • Turbomolecular pumps have interlocking rows of stator and rotor blades in the manner of a turbine. You need a backing pressure of around 10 ⁇ 2 mbar. In contrast, molecular pumps deliver pressures of up to 10 mbar and more, so that the effort required for generating the forevacuum is considerably less.
  • Friction pumps of the type mentioned at the outset are often used for evacuating chambers in which etching, coating or other vacuum treatment or manufacturing processes are carried out. These processes run the risk of solids getting into the pump. In some processes there is even the possibility that such solids only arise during the compression of the gases, that is, during the passage of the gases to be pumped through the vacuum chamber. Examples are the formation of aluminum chloride in aluminum etching, ammonium chloride in coating processes, etc.
  • the present invention is based on the object the task of designing a friction pump of the type mentioned in such a way that the assembly work required for cleaning the gas delivery channels can be carried out simply and quickly. On the other hand, the risk of contamination of the bearings should be largely eliminated. Finally, the construction of the friction pump should enable measures to prevent the formation of dusts within the gas delivery channels.
  • the second housing part which serves to hold the rotor and the drive motor, forms together with the rotor a separately mountable unit which can be removed as a whole from the first housing part.
  • the pump-active surfaces inside the stator or first housing part, outside the rotor are freely accessible and can be cleaned in a simple manner, preferably on site.
  • this unit can only be replaced on site.
  • the vacuum pump is ready for operation again. The defects found on the unit can be remedied by the manufacturer. Complex installation and commissioning measures, such as balancing processes, no longer have to be carried out at the customer's.
  • the invention allows the direct contacts between the first and the second housing part to be restricted to small areas (narrow fitting guide areas with 0-rings). In the area of such contact points, temperature gradients of 30 ° C and more can be maintained for aluminum components. This makes it possible, for example, to heat the first housing part or the stator to a temperature of 80 ° C. without having to fear that the drive and bearing unit will heat up to harmful temperatures. If the flow-carrying components of a vacuum pump have temperatures of approximately 80 ° C., the described phenomenon of dust formation does not occur during the passage of an originally exclusively gaseous medium through the pump.
  • All of the friction pumps 1 shown in the figures have a first housing part 2.
  • Part of this first housing part 2 is the outer cylinder 3, which is equipped with the flange 4. With the aid of the flange 4, the friction pump 1 is connected to the recipient to be evacuated either directly or via an attachment flange 5 (only shown in FIG. 5).
  • the friction pumps according to FIGS. 1 to 5 have a second housing part 6, which serves to hold the rotor 7 and the stator of the drive motor 8.
  • the rotor 7 is bell-shaped. It comprises the hub part 9 and the cylindrical section 10.
  • the second housing part 6 protrudes into the space 11 formed by the bell-shaped rotor 7, in which the Drive motor 8 and at least the upper bearing of the two rotor bearings 12 is located.
  • the outside of the rotor 7 forms, together with the inside of the outer cylinder 3, the pump-active surfaces or the annular gas delivery channel 20.
  • the gases to be pumped are conveyed from the inlet 13 to the outlet 14.
  • a forevacuum pump, not shown, is connected to the outlet 14 during operation.
  • the two housing parts 2 and 6 are designed in such a way that they can be separated and joined together in a simple manner.
  • a locking ring 15 serves to lock each other in the assembled state.
  • the rotor 7 is each equipped with a central shaft 16 which is supported in the bearings 12.
  • the bearings 12 are in turn supported by annular disks in a cylindrical section 17 which is part of the second housing part 6.
  • the first housing part 2 has an inner cylindrical section 18 which directly surrounds the cylindrical section 17 of the second housing part 6.
  • the cylindrical section 17 is equipped with an edge 19 which rests on the upper end face of the cylindrical section 18.
  • the cylindrical section 17 projects downward from the cylindrical section 18 or the first housing part 2, so that there is the possibility of locking the two housing parts 2 and 6 against one another with the aid of the clamping ring 15. After loosening the clamping ring 15, the unit consisting of the rotor 7 and the second housing part 6 can be pulled up out of the first housing part 2.
  • the first housing part 2 consists of the cylindrical section 3, which is equipped in the lower area with an outwardly directed step 21.
  • the second housing part 6 has a corresponding gradation 22.
  • the lower edge of the housing part 2 protrudes from the Housing part 6 slightly out, so that there is again the possibility of locking ring locking. After loosening the clamping ring 15, the unit comprising the housing part 6 and the rotor 7 can be pulled down out of the housing part 2.
  • the rotor 7 is supported via an inner cylindrical section 23 and the bearings 12 on a fixed pin 24, which is part of the second housing part 6.
  • a cylinder section 25, which is also part of the second housing part 6, projects into the annular space formed by the inner cylinder section 23 and the outer cylinder section 10 of the bell-shaped rotor 7. This creates a kind of labyrinth seal, with the help of which the goal of preventing dust particles from entering the storage space is particularly well achieved.
  • the drive motor 8 is designed as an external rotor motor. It can be arranged between the pin 24 and the cylinder section 23 (FIG. 3) or in the region of the lower edge of the bell-shaped rotor 7 (FIG. 4).
  • means are used which comprise the clamping ring 15 and corresponding gradations 21, 22 (FIG. 4), as described for FIGS. 1 and 2.
  • FIG. 5 shows that a lubricating oil supply for the bearings 12 of the shaft 16 is provided within the largely outwardly sealed space 11, formed by the rotor 7 and the housing part 6.
  • the shaft 16 projects with a conical lower section 31 into an oil sump 32 and is equipped with a central oil channel 33.
  • the oil rising in the central channel 33 reaches the bearings 12 via lateral bores 34 and 35 as a result of the centrifugal forces. These are supported on the annular disks 36 and 37 in the cylindrical section 17 of the housing part 6.
  • the sealing of the space 11 to the rotor 7 serves a fitting 41 which is screwed to the upper area of the cylindrical section 17 (screws 42). Otherwise, this adapter 41 is adapted to the shape of the underside of the hub part 9 of the rotor 7 in such a way that a gap seal 43 results.
  • This gap seal opens above the bearing 12.
  • the upper bearing is equipped with an annular cover cap 44. This cap 44 is attached to the shaft 16 and covers the upper bearing 12.
  • the components of the housing part 6 (cylinder 17, fitting 41, bottom 45 of the oil sump 32) are equipped with bores 46, 47 and 48, respectively, through which a flushing gas (inert gases such as nitrogen, argon, etc.) can be let into the space 11 .
  • the purge gas passes through the gap seal 43 and through the gap (gap seal 48) formed between the inside of the cylindrical section 10 of the rotor 7 and the outside of the cylinder section 18 and reaches the outlet 14.
  • a purge gas flow prevents gases laden with dust particles from entering reach the engine and storage room 11.
  • a particular advantage is that the purge gas flow can also be maintained during the disassembly of the pump, so that the motor and storage space 11 is also protected from dust particles in this phase.
  • the cylindrical section 10 of the rotor 7 has a relatively thin wall, so that the rotating mass is small.
  • the threaded structures that produce the gases are part of the stator.
  • the two rings 52 and 53 are equipped on their inner sides with threaded structures 56 and 57. Together with the outer surface of the cylinder section 10 of the rotor 7, these cause the gases to be conveyed in the direction of the outlet 14.
  • the rings 51, 52, 53 are held in their position in the assembled state. After loosening the top flange 5, the rotor 7 and the housing can first Part 6 existing unit and then the rings 51, 52, 53 are removed upwards from the housing part 3.
  • the ring 51 has a smooth inner surface.
  • the structures 58 which produce the gases are provided on the rotor itself. For example, they can be designed as described in European patent application 88116749.8, i. H. radially extending webs are provided, the width and pitch of which decrease from the suction side to the pressure side. This results in an effective filling stage 51, 58 with improved delivery performance.
  • the first housing part consists of the outer cylinder 3 and the inner cylinder 18. In the region of the outlet side 14, these cylinder sections 3, 18 have flange-like edges 61, 62 which are screwed together (screws 63).
  • the housing part 6 protrudes downward from the housing part 2 and is equipped with a groove 64 for the clamping ring 15.
  • a ring 65 surrounding the housing part 6 is provided, which is supported on the clamping ring 15. After assembly of the components, the ring 65 is pushed on and the clamping ring 15 is inserted into its groove 64. Securing the position of the components against one another is achieved with the aid of screws 66. These are guided in a thread in ring 65. After complete assembly, the desired mutual position of the two components 2 and 6 is secured by turning the screws 66.
  • the cylinder section 17 of the housing part 6 is guided in the cylinder section 18 of the housing part 2.
  • two relatively narrow fitting guide areas 71, 72 are provided. In these areas there are the sealing rings 73 and 74, which are embedded in corresponding grooves. Otherwise, the two parts 17 and 18 are spaced apart from one another by the gap 75.
  • This embodiment makes it possible to maintain a temperature gradient between the two parts 17 and 18. Heating the stator parts to 80 ° C. to prevent dust formation does not lead to excessive thermal stress on the bearing and motor components located in the housing part 6.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP89113317A 1989-07-20 1989-07-20 Pompe à effet visqueux à rotor en forme de cloche Expired - Lifetime EP0408791B1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
EP89113317A EP0408791B1 (fr) 1989-07-20 1989-07-20 Pompe à effet visqueux à rotor en forme de cloche
DE89113317T DE58907244D1 (de) 1989-07-20 1989-07-20 Reibungspumpe mit glockenförmigem Rotor.
US07/554,722 US5165872A (en) 1989-07-20 1990-07-19 Gas friction pump having a bell-shaped rotor
JP2190868A JP2877914B2 (ja) 1989-07-20 1990-07-20 鐘状ロータを備えた摩擦ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP89113317A EP0408791B1 (fr) 1989-07-20 1989-07-20 Pompe à effet visqueux à rotor en forme de cloche

Publications (2)

Publication Number Publication Date
EP0408791A1 true EP0408791A1 (fr) 1991-01-23
EP0408791B1 EP0408791B1 (fr) 1994-03-16

Family

ID=8201650

Family Applications (1)

Application Number Title Priority Date Filing Date
EP89113317A Expired - Lifetime EP0408791B1 (fr) 1989-07-20 1989-07-20 Pompe à effet visqueux à rotor en forme de cloche

Country Status (4)

Country Link
US (1) US5165872A (fr)
EP (1) EP0408791B1 (fr)
JP (1) JP2877914B2 (fr)
DE (1) DE58907244D1 (fr)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1994025759A1 (fr) * 1993-05-03 1994-11-10 Leybold Aktiengesellschaft Pompe a vide a friction munie d'un support de palier
EP0773367A1 (fr) * 1995-11-10 1997-05-14 VARIAN S.p.A. Pompe turbomoléculaire
WO1999046510A1 (fr) * 1998-03-10 1999-09-16 Varian, Inc. Pompe a vide a systeme de palier magnetique et a paliers amortisseurs
EP0962264A2 (fr) 1998-05-27 1999-12-08 VARIAN S.p.A. Pompe à vide compacte
DE10004263A1 (de) * 2000-02-01 2001-08-02 Leybold Vakuum Gmbh Dynamische Dichtung
WO2006089823A1 (fr) * 2005-02-25 2006-08-31 Oerlikon Leybold Vacuum Gmbh Pompe a vide holweck
EP3135919A1 (fr) * 2015-08-24 2017-03-01 Pfeiffer Vacuum Gmbh Pompe à vide

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05209589A (ja) * 1992-01-31 1993-08-20 Matsushita Electric Ind Co Ltd 流体回転装置
DE4216237A1 (de) * 1992-05-16 1993-11-18 Leybold Ag Gasreibungsvakuumpumpe
GB9525337D0 (en) * 1995-12-12 1996-02-14 Boc Group Plc Improvements in vacuum pumps
DE19901340B4 (de) * 1998-05-26 2016-03-24 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit Chassis, Rotor und Gehäuse sowie Einrichtung, ausgerüstet mit einer Reibungsvakuumpumpe dieser Art
JP4520636B2 (ja) * 1998-05-26 2010-08-11 ライボルト ヴァークウム ゲゼルシャフト ミット ベシュレンクテル ハフツング シャシ、ロータ及びケーシングを有する摩擦真空ポンプ並びにこの形式の摩擦真空ポンプを備えた装置
DE19846189A1 (de) * 1998-10-07 2000-04-13 Leybold Vakuum Gmbh Reibungsvakuumpumpe
US6213736B1 (en) * 1998-11-28 2001-04-10 G Louis Weisser Electric motor pump with magnetic coupling and thrust balancing means
GB9927493D0 (en) * 1999-11-19 2000-01-19 Boc Group Plc Improved vacuum pumps
JP5149472B2 (ja) * 2000-05-15 2013-02-20 プファイファー・ヴァキューム・ゲーエムベーハー ガス摩擦ポンプ
DE10111546A1 (de) 2000-05-15 2002-01-03 Pfeiffer Vacuum Gmbh Gasreibungspumpe
JP4156830B2 (ja) 2001-12-13 2008-09-24 エドワーズ株式会社 真空ポンプ
DE10308420A1 (de) * 2003-02-27 2004-09-09 Leybold Vakuum Gmbh Testgaslecksuchgerät
JP2005163713A (ja) * 2003-12-04 2005-06-23 Toyota Industries Corp 流体圧縮機
DE602004025916D1 (de) * 2004-07-20 2010-04-22 Varian Spa Rotationsvakuumpumpe und ihr Auswuchtverfahren
JP5758303B2 (ja) * 2009-12-11 2015-08-05 エドワーズ株式会社 ネジ溝排気部の筒形固定部材と、これを使用した真空ポンプ
DE102010015151A1 (de) * 2010-04-16 2011-10-20 Knorr-Bremse Systeme für Schienenfahrzeuge GmbH Verdichterflansch für Schraubenverdichter
JP2020112080A (ja) * 2019-01-10 2020-07-27 エドワーズ株式会社 真空ポンプ

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR887499A (fr) * 1941-11-04 1943-11-15 Brown Pompe moléculaire
DE2408256A1 (de) * 1974-02-21 1975-09-04 Leybold Heraeus Gmbh & Co Kg Turbomolekularvakuumpumpe
FR2611818A1 (fr) * 1987-02-26 1988-09-09 Cit Alcatel Pompe rotative a vide moleculaire du type a canal de gaede

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2526164A1 (de) * 1975-06-12 1976-12-30 Leybold Heraeus Gmbh & Co Kg Turbomolekularvakuumpumpe mit zumindest teilweise glockenfoermig ausgebildetem rotor
DE3039196A1 (de) * 1980-10-17 1982-05-13 Leybold-Heraeus GmbH, 5000 Köln Verfahren zur montage einer einflutigen turbomolekular-vakuumpumpe und nach diesem verfahren montierte turbomolekular-vakuumpumpe
NL8105614A (nl) * 1981-12-14 1983-07-01 Ultra Centrifuge Nederland Nv Hoog-vacuum moleculair pomp.
NL8303927A (nl) * 1983-11-16 1985-06-17 Ultra Centrifuge Nederland Nv Hoog-vacuum moleculair pomp.
SU1285198A1 (ru) * 1985-01-04 1987-01-23 Предприятие П/Я А-1614 Двухступенчатый турбомолекул рный вакуумный насос
JPS63154891A (ja) * 1986-12-18 1988-06-28 Osaka Shinku Kiki Seisakusho:Kk ねじ溝式真空ポンプ
JPS63159695A (ja) * 1986-12-23 1988-07-02 Shimadzu Corp タ−ボ分子ポンプ
DE3728154C2 (de) * 1987-08-24 1996-04-18 Balzers Pfeiffer Gmbh Mehrstufige Molekularpumpe
DE3791053T1 (de) * 1987-12-25 1989-12-21 Valerij Borisovic Solochov Vakuum-molekularpumpe

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR887499A (fr) * 1941-11-04 1943-11-15 Brown Pompe moléculaire
DE2408256A1 (de) * 1974-02-21 1975-09-04 Leybold Heraeus Gmbh & Co Kg Turbomolekularvakuumpumpe
FR2611818A1 (fr) * 1987-02-26 1988-09-09 Cit Alcatel Pompe rotative a vide moleculaire du type a canal de gaede

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN, Band 10, Nr. 346 (M-537)[2402], 21. November 1986; & JP-A-61 145 394 (TOKUDA SEISAKUSHO) 03-07-1986 *
PATENT ABSTRACTS OF JAPAN, Band 12, Nr. 419 (M-760)[3266], 8. November 1988; & JP-A-63 154 891 (OSAKA SHINKU KIKI SEISAKUSHO) 28-06-1988 *

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1994025759A1 (fr) * 1993-05-03 1994-11-10 Leybold Aktiengesellschaft Pompe a vide a friction munie d'un support de palier
US5662456A (en) * 1993-05-03 1997-09-02 Leybold Aktiengesellschaft Friction vacuum pump with bearing support
EP0773367A1 (fr) * 1995-11-10 1997-05-14 VARIAN S.p.A. Pompe turbomoléculaire
WO1999046510A1 (fr) * 1998-03-10 1999-09-16 Varian, Inc. Pompe a vide a systeme de palier magnetique et a paliers amortisseurs
EP0962264A2 (fr) 1998-05-27 1999-12-08 VARIAN S.p.A. Pompe à vide compacte
DE10004263A1 (de) * 2000-02-01 2001-08-02 Leybold Vakuum Gmbh Dynamische Dichtung
WO2001057403A1 (fr) * 2000-02-01 2001-08-09 Leybold Vakuum Gmbh Joint dynamique
US6705844B2 (en) 2000-02-01 2004-03-16 Leybold Vakuum Gmbh Dynamic seal
WO2006089823A1 (fr) * 2005-02-25 2006-08-31 Oerlikon Leybold Vacuum Gmbh Pompe a vide holweck
EP3135919A1 (fr) * 2015-08-24 2017-03-01 Pfeiffer Vacuum Gmbh Pompe à vide

Also Published As

Publication number Publication date
EP0408791B1 (fr) 1994-03-16
JPH03138484A (ja) 1991-06-12
JP2877914B2 (ja) 1999-04-05
DE58907244D1 (de) 1994-04-21
US5165872A (en) 1992-11-24

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