EP2933497A2 - Pompe à vide - Google Patents

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Info

Publication number: EP2933497A2
Authority: EP; European Patent Office
Prior art keywords: pumping; holweck; vacuum pump; pump; thread
Prior art date: 2014-04-17
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

EP15159512.1A

Other languages

German (de)

English (en)

Other versions

EP2933497A3 (fr

EP2933497B1 (fr

Inventor

Tobias Stoll

Jan Hofmann

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Pfeiffer Vacuum GmbH

Original Assignee

Pfeiffer Vacuum GmbH

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2014-04-17

Filing date

2015-03-17

Publication date

2015-10-21

2015-03-17 Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH

2015-04-16 Priority to JP2015084159A priority Critical patent/JP6185957B2/ja

2015-10-21 Publication of EP2933497A2 publication Critical patent/EP2933497A2/fr

2015-12-02 Publication of EP2933497A3 publication Critical patent/EP2933497A3/fr

2020-10-07 Application granted granted Critical

2020-10-07 Publication of EP2933497B1 publication Critical patent/EP2933497B1/fr

Status Active legal-status Critical Current

2035-03-17 Anticipated expiration legal-status Critical

Images

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/044—Holweck-type pumps
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/54—Fluid-guiding means, e.g. diffusers
- F04D29/541—Specially adapted for elastic fluid pumps
- F04D29/542—Bladed diffusers

Definitions

the present invention relates to a vacuum pump, in particular a turbomolecular pump, comprising at least one pumping mechanism for pumping gas along a pumping channel extending from a main inlet to an outlet for the gas.
Vacuum pumps in which an intermediate inlet for the gas opens into the pumping channel are used, for example, in conjunction with a mass spectrometer to pump different pressure chambers to different pressure levels.
one of the pressure chambers can be pumped out via the main inlet and each further pressure chamber via an intermediate inlet.
Such vacuum pumps are also referred to as split-flow pumps.
the present invention is therefore based on the object to provide an improved vacuum pump, wherein the flow of gas counter to the pumping direction is minimized.
the pumping mechanism is designed such that a first pump-effective section of the pump mechanism, which is provided upstream with respect to a second pump-effective section of the pumping mechanism, has a higher compressibility than the second pump-effective section , and / or in that the pumping mechanism is designed such that the second pump-effective section has a higher pumping speed than the first pump-effective section.
the invention opens at least one intermediate inlet and / or at least one flood opening in the pumping channel, wherein the first pump-effective portion upstream of the mouth of the intermediate inlet and / or the flood opening and wherein the second pump-effective portion downstream of the mouth of the intermediate inlet and / or the flood opening is located.
an undesired flow of the gas entering the pumping channel through an intermediate inlet or a flood opening can be reduced in contrast to the pumping direction directed from the main inlet to the outlet, in that the inflowing gas downstream of the intermediate inlet or the flood opening by a pumping mechanism is pumped away with a high pumping speed and / or that the return flow of the gas can be suppressed or at least reduced by a high compressibility of the muzzle upstream pumping effective first section against the pumping direction.
the volume flow which can be conveyed per unit of time through a cross-sectional area of the pumping channel is regarded as the pumping speed.
the first pump-effective section is designed such that it conveys a lower volume flow per unit time through the pump channel than the second pump-effective section.
the compressibility is preferably based on the length, i. it is turned off on the compressibility per length.
the pumping mechanism is thus preferably designed such that the first pump-effective section has a higher compressive capacity per overall length than the second pump-effective section.
the compression ratio can be considered, which can be achieved by the respective pump effective first and second section at its respective downstream end.
the first pump-effective section can thus achieve a higher compression ratio than the second pump-effective section.
the pump mechanism comprises a Holweck pumping mechanism.
the Holweck pumping mechanism is a well-known pumping mechanism used in turbomolecular pumps and is particularly effective in the molecular flow regime.
a Holweck pumping mechanism has one or more Holweck pumping stages connected in series or in parallel and normally downstream of the turbomolecular pumping stages in turbomolecular pumps.
a Holweck pumping stage typically comprises a cylinder jacket-shaped stator element and a likewise cylinder jacket-shaped rotor element, wherein a Forming surface of the stator and a lateral surface of the rotor element form a pump-active surface of the Holweck pumping stage and face each other to form a narrow gap, which is referred to as Holweck gap.
a plurality of helically extending webs and arranged between the webs, also helically extending grooves are formed in the lateral surface of the stator, which form the pumping channel for the gas in the Holweck pumping stage.
the opposite lateral surface of the rotor element is smooth.
the webs and grooves can also be provided on the lateral surface of the rotor element and the lateral surface of the stator element can be smooth. However, this rarely happens in practice.
the pumping action of the Holweck pumping stage is based on the fact that the gas molecules to be pumped are driven by the rotating movement of the rotor element within the grooves and thereby conveyed in the axial direction.
the webs formed between the grooves seal the grooves and prevent or reduce leakage or backflow of the gas molecules against the pumping direction.
the helically extending webs and grooves form a Holweck thread, wherein a helical shape is also a form that forms only a partial revolution of a helix.
the stator element may have a Holweck thread on the outer or inner lateral surface.
the stator element may also have such a pump-active surface on both lateral surfaces.
Each pump-active surface can form a Holweck pumping stage with a pump-active lateral surface of a rotor element that is rotating relative to the stator element and likewise essentially cylindrical.
the mouth of the intermediate inlet and / or the mouth of the flood opening is located in the pumping channel within a Holweck pumping stage of a Holweck pumping mechanism.
a Holweck pump stage can be achieved by appropriate training of the Holweck thread downstream or upstream of the mouth of the intermediate inlet and / or the mouth of the flood opening that before the mouth of a higher compressibility and / or downstream of the mouth a higher pumping speed of the Holweck Pumping stage is effected.
the first pump effective portion is formed by the part of the Holweck pumping stage upstream of the orifice and the second pumping effective portion is formed by the part of the Holweck pumping stage downstream of the orifice.
the Holweck pumping stage or Holweck stator of the pumping stage may thus be divided into two into the first pumping section with high compressibility upstream of the mouth and into the second pumping section with high pumping speed downstream of the mouth. This can be realized structurally simple.
the mouth of the intermediate inlet and / or the mouth of the flood opening in the pumping channel between two serially arranged, in particular nested, Holweck pump stages of a Holweck pumping mechanism is particularly advantageous.
the first pumping effective portion of the upstream of the mouth lying Holweck pumping stage and the second pumping effective portion may be formed by the lying downstream of the mouth Holweck pumping stage.
the first, upstream pumping stage may thus be designed to have a higher compressive capacity than the downstream, downstream Holweck pumping stage downstream from the orifice.
the downstream Holweck pumping stage may be configured such that its pumping speed is higher than the pumping speed of the Holweck pumping stage upstream of the mouth.
the first pump active portion may have a first Holweck thread and the second pump active portion may have a second Holweck thread.
the first Holweck thread is designed such that it achieves a higher compressive capacity than the second Holweck thread.
the first Holweck thread and the second Holweck thread may also be configured such that the second Holweck thread reaches the higher suction capacity than the first Holweck thread.
the respective Holweck thread can be formed on a lateral surface of a stator element or of a rotor element of the respective pump-active section cooperating with the stator element and can be formed by webs with grooves lying between them in a helical manner on the lateral surface.
the higher compressive capacity of the first Holweck thread and / or the higher pumping speed of the second Holweck thread can be achieved in that the two Holweck threads differ in at least one of the following parameters: the number of grooves, the pitch angle of the grooves or of the webs, the size of a Holweck gap between the respective stator element and the associated rotor element, the depth of the grooves, the height of the webs, the width of the grooves and the width of the webs.
the first pump-effective section with the first Holweck thread and / or the second pump-effective section with the second Holweck thread can be designed such that upstream to the mouth of the intermediate inlet and / or the mouth Flood opening a higher compressibility and / or downstream to the mouth a higher pumping speed is provided.
the invention also relates to a vacuum apparatus, in particular a leak detector or a mass spectrometer, with a vacuum pump according to the invention integrated into the vacuum apparatus or arranged on the vacuum apparatus.
the invention also relates to a vacuum pump, in particular a turbomolecular pump, comprising at least one pumping mechanism for pumping gas along a pumping channel extending from a main inlet to an outlet for the gas, at least one intermediate inlet and / or one orifice for the gas discharging into the pumping channel the pumping mechanism is configured such that a first pumping effective portion of the pumping mechanism located upstream of the mouth of the intermediate inlet and / or the flood port has a higher compressive capacity than a second pumping effective portion of the pumping mechanism located downstream of the mouth, and / or wherein the pumping mechanism is configured such that the second pumping effective portion has a higher pumping speed than the first pumping effective portion.
a vacuum pump in particular a turbomolecular pump, comprising at least one pumping mechanism for pumping gas along a pumping channel extending from a main inlet to an outlet for the gas, at least one intermediate inlet and / or one orifice for the gas discharging into the pumping channel the pump
the vacuum pump shown comprises a pump inlet 70 surrounded by an inlet flange 68 as well as a plurality of pump stages for conveying the gas present at the pump inlet 70 through a pumping channel 10 to a pump inlet 10 Fig. 1 not shown pump outlet.
the vacuum pump comprises a stator with a static housing 72 and a rotor arranged in the housing 72 with a rotor shaft 12 rotatably mounted about a rotation axis 14.
the vacuum pump is designed as a turbomolecular pump and comprises a pumping mechanism, which is formed by a plurality of pump-effective, connected in series, turbomolecular pumping stages.
the turbomolecular Pumping stages have a plurality of turbomolecular rotor disks 16 connected to the rotor shaft 12 and a plurality of turbomolecular stator disks 26 arranged in the axial direction between the rotor disks 16 and fixed in the housing 72.
the stator 26 are held by spacers 36 at a desired axial distance from each other.
the rotor disks 16 and the stator disks 26 provide in the scoop region 50 an axial pumping action directed in the direction of the arrow 58, ie in the pumping direction.
the pumping channel 10 extends through the turbomolecular pumping stages and further through a Holweck pumping mechanism downstream of the turbomolecular pumping stages.
the Holweck pumping mechanism comprises three Holweck pumping stages which are arranged one inside the other in the radial direction and which are pumpingly connected to one another in series.
the rotor-side part of the Holweck pump stages comprises a rotor hub 74 connected to the rotor shaft 12 and two cylinder shell-shaped Holweck rotor sleeves 76, 78 fastened to the rotor hub 74 and oriented coaxially with the axis of rotation 14 and nested in the radial direction.
two cylindrical jacket-shaped Holweck stator sleeves 80, 82 are provided, which are also oriented coaxially to the rotation axis 14 and are nested in the radial direction.
the pump-active surface of the Holweck pump stages are each formed by the radial lateral surfaces of a Holweck rotor sleeve 76, 78 and a Holweck stator sleeve 80, 82 opposite each other, forming a narrow radial Holweck gap.
one of the pump-active surfaces is smooth - in the present case that of the Holweck rotor sleeve 76 or 78 - and the opposite pump-active surface of the Holweck stator sleeve 80, 82 comprises a Holweck thread with helically around the rotation axis 14 in the axial direction extending grooves in which by the rotation the respective rotor sleeve 76, 78, the gas is propelled and thereby pumped.
the grooves form the pumping channel for the gas to be pumped.
the Holweck pump stages provide, in particular due to the Holweck thread, a pumping action to further convey the gas pumped along the pumping channel from the turbomolecular pumping stages through the Holweck pumping stages to the outlet.
the rotatable mounting of the rotor shaft 12 is effected by a rolling bearing 84 in the region of the pump outlet and a permanent magnet bearing 86 in the region of the pump inlet 70.
the permanent magnet bearing 86 comprises a rotor-side bearing half 88 and a stator-side bearing half 90, which each comprise a ring stack of a plurality of stacked in the axial direction of permanent magnetic rings 92, 94.
the magnetic rings 92, 94 lie opposite one another with the formation of a radial bearing gap 96.
an emergency or catch bearing 98 is provided, which is designed as an unlubricated rolling bearing.
the backup bearing 98 runs empty. It engages only with excessive radial deflection of the rotor relative to the stator to form a radial stop for the rotor, which prevents a collision of the rotor-side structures with the stator-side structures.
a conical spray nut 100 with an outer diameter increasing towards the rolling bearing 84 is provided on the rotor shaft 12.
the spray nut 100 is in sliding contact with a scraper of a resource storage device, which is in multiple contact with a resource, such as a lubricant, impregnated absorbent discs 102 comprises.
the operating means is transferred by capillary action of the resource storage on the scraper on the rotating spray nut 100 and promoted due to the centrifugal force along the spray nut 100 in the direction of increasing outer diameter to the rolling bearing 84 toward, where it fulfills, for example, a lubricating function.
the vacuum pump includes a drive motor 104 for rotationally driving the rotor whose rotor is formed by the rotor shaft 12.
a control unit 106 controls the motor 104.
FIG. 2 Statorelement shown can as Holweck stator sleeve 82 in the vacuum pump Fig. 1 be used.
the stator element has a substantially cylinder jacket-shaped basic shape and comprises three separate stator parts which divide the stator element into three angular sections.
the separating surfaces between the individual stator parts 108, 108 ', 108 "are in Fig. 2 Nos. 110, 112, and 114 are substantially parallel to the longitudinal axis 116 of the stator member, such that each stator member 108, 108 ', 108 "forms a cylinder jacket segment having a substantially rectangular outline as viewed from its flat side but also be formed in one piece.
Each stator part 108, 108 ', 108 “comprises both on its outside and on its inner side in each case a plurality of web portions 118, 118', 118", which together form helical webs extending in the direction of the longitudinal axis 116 webs, which on the inner and the outer lateral surface arranged of the stator are, and between which each helically extending in the direction of the longitudinal axis 116 grooves 120 are formed.
the webs and grooves 120 each form a Holweck thread on the inner and outer lateral surface of the stator, which is suitable, with a relative to the respective lateral surface rotating, designed as Holweck cylinder rotor element (see, the Holweck rotor sleeves 76, 78th in Fig. 1 ) to form a Holweck pumping stage.
the respective rotor element in particular has a smooth pump-active surface.
stator element considerably simplifies its production, since the individual stator parts 108, 108 ', 108 "can be produced without undercuts and can be easily deformed, but the stator element can also be made in one piece, for example by milling out of a solid or hollow cylinder a vacuum-compatible metal or plastic.
the preferred flow path 148 of the gas pumped by the Holweck pumping stages is along the grooves 120 and is in Fig. 2 characterized.
an intermediate inlet 122 may be provided, which opens into the pumping channel 10 (cf. Fig. 3 . 4A and 5 ).
At least one pumping mechanism is configured such that a first pumping effective portion of the pumping mechanism located upstream of the mouth of the intermediate inlet 122 has a higher compressive capacity than a second pumping effective portion downstream of the mouth, and / or the second pumping effective portion has a higher pumping speed than the first pumping section.
first and second pump-effective section is meant in particular that portion or region of a pumping mechanism which lies directly in front of or behind the mouth.
the mouth 134 of the intermediate inlet 122 is located in the pumping channel 10 within a Holweck pumping stage 124 having an outer stator 126 and an inner rotor 128 cooperating with the stator 126.
the stator 126 may be like that Fig. 2 be described stator element and thus have a cylinder shell-shaped basic shape.
the intermediate inlet 122 extends in the manner of a channel having a circular cross-section transverse to the longitudinal axis 116 through the stator 126 and flows into the pump channel 10 passing through the Holweck pumping stage.
the channel forming the intermediate inlet 122 can also be oval or angular Have cross-section.
the stator element 126 which, with respect to the pumping channel 10, is upstream of the orifice 134 forms the first pumping effective portion 136, and the downstream part of the stator 126 forms the second pumping effective portion 138.
the stator 126 is thus divided in two into the first pumping effective portion 136, which causes a higher compressive capacity than the second pumping effective portion 138, and the second pumping effective portion 136 with a higher pumping speed.
the Holweck threads 140, 142 formed on the respective pump-effective section 136, 138 differ from each other.
the first Holweck thread 140 on the inner circumferential surface of the first pump-effective portion 136 is formed by helical webs 130 with grooves 132 therebetween.
the second Holweck thread 142, which is provided on the inner circumferential surface of the second pump-effective section 138, is formed by helically extending webs 130 'with grooves 132' lying therebetween.
the first Holweck thread 140 has a tighter and flatter structure than the second Holweck thread 142, which has an open, coarse, and steep structure.
the respective structure of the first and second Holweck thread 140, 142 is achieved in that the grooves 132 are narrower than the grooves 132 ', that the slope of the webs 130 and the grooves 132 is less than the pitch of the webs 130 'and the grooves 132' that the webs 130 are higher than the webs 130 ', that the grooves 132 are deeper than the grooves 132', and / or that the Holweck gap in the first Holweck thread 140 is smaller as the Holweck gap of the second Holweck thread 142.
the first pump effective portion 136 has a high compressive capacity in the pumping channel 10 in the region of the mouth 134 and the second pumping portion 138 reaches a high pumping speed in the region of the mouth 134 in the pumping channel 10.
an undesirable The flow of the gas flowing in via the intermediate inlet 122 against the pumping direction can be avoided or at least reduced, since the gas is effectively "sucked away" by the second pumping section 138 or the high compressibility caused by the first pumping section 136 causes the gas to flow in the opposite direction to the pumping direction prevented.
the first high efficiency pumping portion 136 is formed by the portion of the Holweck pumping stage 124 located upstream of the orifice 134, while the second high efficiency pumping portion 138 is formed by the portion of the Holweck pumping stage 124 downstream of the orifice 134 becomes.
the Holweck pump stage 124 with the outer stator 126 and the inner, rotatable about the longitudinal axis or rotation axis 116 rotor 128 with the Holweck rotor sleeve 144 can be used as a Holweck pumping stage in a vacuum pump according to Fig. 1 be used, in particular - with respect to the pumping channel 10 - downstream of one or more turbomolecular pumping stages and in series with other Holweck pumping stages.
the vacuum pump can also be designed without an intermediate inlet, cf. the variant according to Fig. 4B in which compared to the variant of Fig. 4A no intermediate inlet 122 is provided.
At least one pumping mechanism, and in particular the radially outward Holweck pumping stage is configured such that a first pumping effective portion of the pumping mechanism located upstream of a second pumping effective portion of the pumping mechanism has a higher compressive capacity than the second pumping effective portion, and / or second pumping portion has a higher pumping speed than the first pumping effective portion. This allows a back flow of gas against the pumping direction be avoided or at least reduced during pump operation.
the performance of the vacuum pump can be improved as a whole.
the orifice 134 of the intermediate inlet 122 is located in the pumping channel 10 between a first Holweck pumping stage 124 'and a second Holweck pumping stage 124 ".
the two pumping stages 124', 124" are arranged in series and nested one inside the other.
the pumping channel 10 therefore has each, as in Fig. 5 is indicated, in the region of the mouth 134 of the intermediate inlet 122 of the first Holweck pumping stage 124 'in the second Holweck pumping stage 124 "and in pumping direction 146 following the second Holweck pumping stage 124", a deflection of 180 degrees.
the first Holweck pumping stage 124 ' has a cylinder-jacket-shaped stator 126' whose inner circumferential surface, together with an outer circumferential surface of a Holweck rotor sleeve 144 of the rotor 128, forms the actual pump-active surface of the pumping stage 124 '.
a first Holweck thread 140 is provided on the inner circumferential surface of the stator 126 ', such as Fig. 5 shows.
the second Holweck pump stage 124 has a cylinder jacket-shaped stator 126", the outer surface together with the inner surface of the Holweck rotor sleeve 144, the actual pump-active surface of the second Holweck pump stage 124 "forms, with a second Holweck thread 142 at the outer circumferential surface of the stator 126 "is provided.
the first pump effective portion is formed by the first Holweck pumping stage 124 'and the second pumping effective portion is formed by the second Holweck pumping stage 124''.
the first pumping effective portion or first Holweck pumping stage 124' has a higher compressive capacity than the second pump-effective section or the second Holweck pumping stage 124 ", the pumping speed is greater.
the higher compressibility or In particular, the higher pumping speed can be achieved by differences in the structure of the first or second Holweck thread 140, 142.
the first Holweck thread 140 has a tighter and flatter structure than the second Holweck thread 142, which has an open, coarse, and steep structure.
the structure of the first or second Holweck thread 140, 142 can be realized in that the grooves 132 are narrower than the grooves 132 ', that the slope of the webs 130 and the grooves 132 is smaller from the pitch of the webs 130th or the grooves 132 'that the webs 130 are higher than the webs 130', that the grooves 132 are deeper than the grooves 132 ', and / or that the Holweck gap in the first Holweck thread 140 is smaller than the Holweck gap at the second Holweck thread 142.
the two nested Holweck pumping stages 124 ', 124 "can in a vacuum pump according to Fig. 1 are used, in particular - with respect to the pumping channel 10 - downstream of the turbomolecular pumping stages.
the vacuum pump the Fig. 6 is like the vacuum pump the Fig. 1 built up. In contrast to the vacuum pump the Fig. 1 has in the vacuum pump the Fig. 6 However, the radially outer Holweck stator sleeve 80 on its outer side 150 a circumferential flow channel 152 which connects a provided on the pump housing 72 flood channel inlet 154 with two flood openings 156.
the flood openings 156 run at least substantially in the radial direction through the Holweck stator sleeve 80 and open into the Holweck gap between the Holweck stator sleeve 80 and the Holweck rotor sleeve 76.
the flood channel inlet 154 is normally closed during pump operation.
the flood channel inlet 154 is normally opened only after the vacuum pump has been switched off in order to ventilate the pump.
the radially outer Holweck pumping stage formed by the Holweck stator sleeve 80 and the Holweck rotor sleeve 76 comprises a first pumping effective portion, which upstream of the mouths of the flood openings 156 lies in relation to the flow direction of the gas to be pumped through the Holweck gap, and a second pumping section located downstream of the orifices.
the first pump-effective section has a higher compressibility and a lower pumping speed than the second pump-effective Abschitt on.
a gas flow from the flood openings 156 in the direction of the upstream turbomolecular pump stages is thereby reduced, in particular at a point in time, while the rotor shaft 12 is still rotating at a high speed. Damage to the blades of the turbomolecular pumping stages by gas flowing in at high speeds can thus be avoided. At lower speeds, however, the incoming gas is harmless to the turbomolecular pumping stages. As the speed decreases, the pumping effect caused by the first and second pumping effective portions decreases, so that as the speed decreases, more and more gas entering through the flow orifices 156 flows to the turbomolecular pumping stages.
An unillustrated variant of a vacuum pump can also have at least one flood opening 156 and one intermediate inlet 120 in a Holweck gap of a Holweck pumping stage.
the transition between the first pump-effective section and the second pump-effective section of the Holweck pumping stage is in the region of the mouth of the intermediate inlet or in the region of the mouth of the flood opening.
the respective first pump-effective section has a higher compressibility than the respective second pump-effective section, the pumping speed of which is higher.
variants are also conceivable in which only the compressibility of the first pumping effective portion is higher than that of the second pumping effective portion, or in which only the pumping speed of the second pumping effective portion is greater than that of the first pumping effective portion.

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EP15159512.1A 2014-04-17 2015-03-17 Pompe à vide Active EP2933497B1 (fr)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP2015084159A JP6185957B2 (ja)	2014-04-17	2015-04-16	真空ポンプ

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
DE102014105582.9A DE102014105582A1 (de)	2014-04-17	2014-04-17	Vakuumpumpe

Publications (3)

Publication Number	Publication Date
EP2933497A2 true EP2933497A2 (fr)	2015-10-21
EP2933497A3 EP2933497A3 (fr)	2015-12-02
EP2933497B1 EP2933497B1 (fr)	2020-10-07

Family

ID=52672214

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
EP15159512.1A Active EP2933497B1 (fr)	2014-04-17	2015-03-17	Pompe à vide

Country Status (3)

Country	Link
EP (1)	EP2933497B1 (fr)
JP (1)	JP6185957B2 (fr)
DE (1)	DE102014105582A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP2019502048A (ja) *	2015-11-19	2019-01-24	レイボルドゲーエムベーハー	運動エネルギーを貯蔵するための装置
EP3845764A3 (fr) *	2021-03-31	2021-10-27	Pfeiffer Vacuum Technology AG	Pompe à vide et système de pompe à vide
EP4273405A1 (fr) *	2023-09-20	2023-11-08	Pfeiffer Vacuum Technology AG	Pompe à vide avec un étage de pompage de type holweck avec une géométrie holweck variable

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
EP3670924B1 (fr) *	2019-11-19	2021-11-17	Pfeiffer Vacuum Gmbh	Pompe à vide et procédé de fabrication d'une telle pompe à vide
EP4155549B1 (fr)	2022-11-14	2024-09-04	Pfeiffer Vacuum Technology AG	Pompe à vide à capacité d'aspiration améliorée de l'étage de pompage holweck

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2014
- 2014-04-17 DE DE102014105582.9A patent/DE102014105582A1/de active Pending
2015
- 2015-03-17 EP EP15159512.1A patent/EP2933497B1/fr active Active
- 2015-04-16 JP JP2015084159A patent/JP6185957B2/ja active Active

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Publication number	Priority date	Publication date	Assignee	Title
JP2019502048A (ja) *	2015-11-19	2019-01-24	レイボルドゲーエムベーハー	運動エネルギーを貯蔵するための装置
US10944308B2 (en)	2015-11-19	2021-03-09	Leybold Gmbh	Device for storing kinetic energy
EP3845764A3 (fr) *	2021-03-31	2021-10-27	Pfeiffer Vacuum Technology AG	Pompe à vide et système de pompe à vide
EP4273405A1 (fr) *	2023-09-20	2023-11-08	Pfeiffer Vacuum Technology AG	Pompe à vide avec un étage de pompage de type holweck avec une géométrie holweck variable

Also Published As

Publication number	Publication date
JP6185957B2 (ja)	2017-08-23
DE102014105582A1 (de)	2015-10-22
JP2015206362A (ja)	2015-11-19
EP2933497A3 (fr)	2015-12-02
EP2933497B1 (fr)	2020-10-07

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DE102008056106B4 (de)	2011-02-17	Seitenkanalgebläse, insbesondere Sekundärluftgebläse für eine Verbrennungskraftmaschine
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