KR100917001B1 - Tray supplying and collecting apparatus for test handler and tray transferring method using the same - Google Patents

Abstract

The present invention relates to a tray supply recovery device for a test handler, comprising: a loading stacking unit for storing a tray on which a test target semiconductor device is loaded, a loading seat for supplying the tray to a loading area and recovering an empty tray from the loading area; An empty tray stacking unit for storing empty trays, an unloading seat for supplying the empty trays to the unloading area, and recovering the tray on which the tested semiconductor device is loaded from the unloading area, and the loaded semiconductor device And an unloading stacking unit for storing the trays, and first and second conveying units for holding and conveying the trays independently.

According to the present invention, since the first and second transfer parts can hold the trays and transfer them independently, the trays can be prepared for the collection and recovery operations of the trays, and at the same time, the preparation and supply operations for the other trays can be performed. Improve the test handler's unit per hour (UPH) by increasing the feed and withdraw rate.

Test handler, tray, supply, recovery and transfer method

Description

Tray supplying and collecting apparatus for test handler and tray transferring method using the same}

The present invention relates to a tray feed recovery device for a test handler and a tray transfer method using the same, and more particularly, the tray preparation and supply operation of other trays can be performed simultaneously with the preparation and recovery operations of the tray. The present invention relates to a tray supply recovery device for a test handler capable of increasing a supply and recovery speed of a tray and a tray transport method using the same.

In general, in a subsequent process of manufacturing a semiconductor device, a plurality of semiconductor chips cut from a wafer and separated separately are attached to an auxiliary substrate, and then the semiconductor device completed by wrapping the outside with a molding material is located inside the chamber. They are then tested for electrical performance in a range of temperatures ranging from high to low temperatures.

This test process is performed by a test handler including a tray feed recovery device and a test unit.

The tray supply recovery device supplies a customer tray loaded with a semiconductor device under test to a loading area, and recovers a customer tray on which the tested semiconductor device is seated from an unloading area.

The test unit includes a tester for performing an electrical performance test on the semiconductor device under test. The test unit transfers the test target semiconductor device, which is loaded on the customer tray and supplied to the loading area, into an empty test tray, and the test target semiconductor device loaded on the test tray is transferred to the tester for testing.

When the test is completed, the test unit classifies the tested semiconductor device according to the test result and transfers the loaded semiconductor device to an empty customer tray located in the unloading area of the test tray.

Thereafter, the customer tray loaded with the tested semiconductor device is recovered from the unloading area by the tray supply recovery device as described above.

As shown in FIG. 1, a conventional tray supply and recovery device for performing such an operation includes a loading stacking unit 10 and a customer tray CT1 in which a customer tray CT1 on which a test target semiconductor device is loaded is stored. ) A loading seat 20 for supplying the loading area LA to the loading area LA, an unloading seat 30 for recovering the empty customer tray CT2 from the unloading area UA, and a customer tray The unloading stacking unit 40 in which CT3) is classified and stored according to the grade of the tested semiconductor device loaded therein, the empty tray stacking unit 50 in which the empty customer tray CT2 is stored, and each of the above-described components. It is composed of a transfer unit 60 for moving between the elements and conveying the customer tray (CT).

Here, the transfer unit 60, as shown in Figure 2, a pair of grippers (61a, 61b) for holding the customer tray (CT), the transfer body 62 is connected so that the gripper 61 can be lifted, A material for elevating the gripper 61 including a first guide portion 63 for guiding the elevating of the gripper 61, the motors 64a-1 and 64b-1 and the ball screws 64a-2 and 64b-2. One drive unit 64, a second guide unit 65 for reciprocating the transfer body 62, and the motor 66-1 and the ball screw 66-2 including the reciprocating the transfer body 62 It consists of the 2nd drive part 66 which conveys.

3A to 3D, the empty customer tray CT2 of the loading area LA is collected and stored in the empty tray stacking unit 50, stored in the loading stacking unit 10, and the semiconductor device under test is loaded. The operation of the conventional tray supply and recovery device described above will be described by taking the loaded customer tray CT1 into the loading area LA as an example.

First, as shown in FIG. 3A, one of the pair of grippers 61 is transferred to the loading stacking unit 10 and lowered to hold the customer tray CT1 on which the semiconductor device under test is loaded. . And, as shown in Figure 3b, the transport body 62 is avoided from the lifting path of the loading seat 20 so that the loading seat 20 can be lowered to recover the empty customer tray (CT2).

Thereafter, as illustrated in FIG. 3C, one of the pair of grippers 61 grips and transfers the empty customer tray CT2 of the loading seat 20 to the pair of grippers 61. The customer tray CT1 on which the test target semiconductor device is held by any one 61a is mounted on the loading seat 20.

Thereafter, as shown in FIG. 3D, the transfer body 62 is loaded and mounted so that the loading seat 20 may be raised to supply the customer tray CT1 loaded with the semiconductor device under test to the loading area LA. It is avoided from the lifting path of the part 20, and the loading seat part 20 raises. The gripper 61 holding the empty customer tray CT2 stores the empty customer tray CT2 in the empty tray stacking unit 50.

In the conventional tray feed recovery device operating in this way, the pair of grippers 61 are provided on one transfer body 62 to move the other grippers 61b together for the movement of any one gripper 61a. There are disadvantages that must be made.

Therefore, since the pair of grippers 61 move between all the components and transfer the customer tray CT, there is a problem that the operation and the speed of supplying and retrieving the customer tray CT are slow because there is no choice but to perform the operations in order. .

In addition, the transfer body 62 is provided to have a width wide enough to be provided with a pair of grippers 61, the transfer body having a large width during the lifting and lowering of the loading and unloading seating portion (20, 30) The distance that 62 must be moved to completely escape from the lifting path is long, and the time taken for the avoidance movement of the transfer body 62 is long.

As described above, the conventional tray supply recovery device reduces the transfer efficiency of the customer tray CT by the pair of grippers 61 to supply the customer tray CT to the loading and unloading areas LA and UA. Recovery rate is slow.

Therefore, the speed at which the semiconductor device to be tested is transferred to the tester and the speed at which the tested semiconductor device is collected from the tester are slow, resulting in a poor throughput per unit (UPH) of the test handler.

In order to solve the problems as described above, the present invention, while performing the recovery preparation and recovery operation of the customer tray, it is possible to perform the supply preparation and supply operation of the other customer tray required, so that the customer tray supply and recovery speed To provide a tray feed recovery device for a test handler that can increase the and a tray transport method using the same.

In order to solve the above problems, the present invention, after the quality test is carried out in the state in which the test target semiconductor device supplied to the loading area in the state loaded in the customer tray to the test tray, and then the tested semiconductor device is frozen. It is attached to a test handler which transfers to the customer tray supplied to the loading area and discharges it, supplies the customer tray loaded with semiconductor elements to the loading area, and then recovers the empty customer tray from the loading area, and then empty customer tray. A tray supply recovery device for a test handler which supplies a to the unloading area and then recovers a customer tray loaded with semiconductor devices from the unloading area, wherein the plurality of test device semiconductor devices are arranged side by side in a row. One or more loading stacks to store the customer trays in the bin Stove at least one empty tray for storing Murray tray loading area, and tested for a number of stacked unit including the semiconductor device is loaded with one or more coarse tomeo tray loading and unloading of storing units; One or more loading seats configured to move up and down in the loading area, supply a customer tray loaded with a semiconductor device under test to the loading area, and recover an empty customer tray from the loading area; At least one unloading seating part which supplies an empty customer tray to the unloading area while lifting at the unloading area, and recovers the customer tray loaded with the tested semiconductor device from the unloading area; And independently of each other, horizontally movable along the loading stacker, the empty tray stacker, and the unloading stacker, which are aligned in a row, and are configured to be gripped and lifted up and down of the customer tray. Transporting the customer trays stored in the loading stacking unit and the empty tray stacking unit to the loading seating unit and the unloading seating unit, or stacking the customer trays recovered from the loading seating unit and the unloading seating unit, respectively. And a first and a second transfer unit which transfers the unit to the unloading loading unit and stores the unit.

The tray supply recovery device for the test handler is a customer tray stored in the loading stacking unit when the first transporting unit transfers the empty customer tray located in the loading seating unit to the empty tray stacking unit. It may be provided to transport the seat to the loading seat.

The tray supply and recovery device for the test handler may include the second transfer unit when the first transfer unit is located in the unloading seat and transfers the customer tray loaded with the tested semiconductor device to the unloading stack. The empty customer tray stored in the empty tray stacking unit may be provided to be transported to the unloading seating unit.

The tray supply and recovery device for the test handler further includes a check unit for checking whether the semiconductor device remains in the empty customer tray transferred from the loading seat, and wherein the first transfer unit is located at the loading seat. When transferring the toomer tray to the check unit, the second transfer unit may be provided to transfer the customer tray stored in the loading stacking unit to the loading seating portion.

The tray feed recovery device for the test handler may include the first transfer unit when the second transfer unit is located in the unloading seat and transfers the customer tray loaded with the tested semiconductor device to the unloading stack. It may be provided to transfer the empty customer tray confirmed by the identification unit to the unloading seating portion to be seated.

On the other hand, the present invention, each independently, is movable horizontally along a plurality of loads, including a line-loaded loading stack, an empty tray stack, and an unloading stack, and at each stack of the customer tray Transfer the customer tray stored in the loading stacking portion to the loading seat through the first conveying unit and the second conveying unit is formed to enable the gripping and lifting movement, and the empty customer tray located in the loading seating unit to the empty tray Transfer to the loading unit or to the confirmation unit to check whether the semiconductor element remains in the empty customer tray, transfer the empty customer tray stored in the empty tray loading unit to the unloading seat, and located in the unloading seat Tray handler for the test handler, which transfers the customer tray loaded with the tested semiconductor device to the unloading stack. In the tray transfer method using a recovery apparatus, when the first transfer unit transfers the empty customer tray located in the loading seat to the empty tray stacking unit, the second transfer unit stores the customer tray stored in the loading stacking unit. It provides a tray transport method comprising a; transporting to the loading seating portion.

In the tray transfer method, when the first transfer unit is located in the unloading seat and transfers the customer tray loaded with the tested semiconductor device to the unloading stack, the second transfer unit is stored in the empty tray stack. The method may further include transferring the empty customer tray to the unloading seat and seating it.

In the tray conveying method, when the first conveyer transfers the empty customer tray positioned in the loading seat to the checker, the second conveyer transports the customer tray stored in the loading stacker to the loading seat. It may comprise the step of seating.

The tray transfer method may include the first transfer unit when the second transfer unit is located in the unloading seat and transfers the customer tray loaded with the semiconductor element, which has been tested, to the unloading load unit. The method may further include transferring the seated empty consumer tray to the unloading seating unit.

According to the tray feed recovery device for the test handler of the present invention and the tray conveying method using the same, the first and second conveying parts can be independently transported by holding the customer trays so that the recovery preparation and recovery operations of the customer trays can be performed. At the same time, it is possible to perform supply preparation and supply operations of other customer trays as necessary.

In addition, when the loading and unloading seats are lifted, the first and second transport parts are independently transferred to avoid the lifting path of the loading and unloading seats, thereby reducing the time required for avoiding the first and second transport parts. Can be.

Therefore, the hourly output of the test handler can be improved by simultaneously performing the recovery preparation and supply preparation operations of the customer tray and quickly avoiding the lifting and lowering paths of the loading and unloading seats, thereby increasing the supply and recovery speed of the customer tray. .

DETAILED DESCRIPTION Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art may easily implement the present invention. As those skilled in the art would realize, the described embodiments may be modified in various different ways, all without departing from the spirit or scope of the present invention.

The tray feed recovery device for a test handler according to the present invention is provided in a test handler including a test unit. The tray supply recovery device transfers the customer tray loaded with the semiconductor device under test to the loading area, and recovers the customer tray loaded with the tested semiconductor device from the unloading area.

The test unit transfers the test target semiconductor device loaded on the customer tray to the empty test tray, loads the test target semiconductor device, and performs an electrical performance test on the test target semiconductor device loaded on the test tray. When the test is completed, the tested semiconductor device is moved back to the customer tray. Thereafter, the customer tray loaded with the tested semiconductor element is recovered from the unloading area by the supply and recovery device as described above.

Hereinafter, with reference to the accompanying Figures 4 and 5, the configuration and effect of the tray supply recovery device for a test handler according to a preferred embodiment of the present invention will be described in detail. The tray supply recovery device includes a loading stacking unit 100, a loading seating unit 200, an empty tray stacking unit 300, an unloading seating unit 400, an unloading stacking unit 500, a checking unit 600, and First and second transfer parts 700a and 700b are included.

The loading stacking unit 100 is where the customer tray CT1 on which the test target semiconductor device is loaded is stored. The loading stacking unit 100 may be provided in plural numbers. In this case, each of the loading stacking units 100 stores the customer tray CT1 on which the same test target semiconductor device is loaded.

The loading seating part 200 may be provided as a plurality of places where the customer tray CT1 on which the test target semiconductor device of the loading mounting part 100 is mounted is supplied to the loading area LA.

In addition, the loading seating part 200 is provided to be able to move up and down, and when the customer tray CT1 on which the test target semiconductor device is loaded by the first and second transfer parts 700a and 700b is seated. Ascends and transfers it to the loading area LA. In addition, when the customer tray CT1 on which the test target semiconductor device is loaded becomes the empty customer tray CT2, the battery is lowered to recover the empty customer tray CT2 from the loading area LA.

The empty tray stacking unit 300 is a place where the empty customer tray CT2 is transferred and stored from the loading seating unit 200 or the checking unit 600.

The unloading seating unit 400 is provided with a plurality of empty customer trays CT2 where the tested semiconductor devices are to be classified and loaded according to predetermined grades. In this case, the semiconductor devices are classified and loaded into the plurality of empty customer trays CT2 positioned in the unloading seating portions 400 according to the grades according to the test results.

The unloading seating unit 400 is provided to be elevated like the loading seating unit 200, and the empty customer tray CT2 is seated by the first and second transfer units 700a and 700b in a lowered state. And ascends and supplies it to the unloading area UA. When all the tested semiconductor devices are loaded into the empty customer tray CT2, the tester descends to recover the customer tray CT3 loaded with the tested semiconductor devices from the unloading area UA.

The unloading loading part 500 may include a customer tray CT3 loaded with the tested semiconductor device of the lowered unloading seating part 400 transferred by the first and second transfer parts 700a and 700b. This is where. The unloading stacking unit 230 is provided in plural numbers, and each of the customer trays CT3 loaded with the tested semiconductor devices having the same grade are separately stored.

The identification unit 600 determines whether the semiconductor device remains in the empty customer tray CT2 recovered from the loading area LA. The checker 600 inverts the recovered empty customer tray CT2, and when the semiconductor device remains, the remaining semiconductor device is discharged to the lower side, and the lower side collects the semiconductor device discharged as described above (not shown). H) is provided.

The first and second transfer units 700a and 700b respectively hold the customer trays CT and transfer them independently to thereby transfer the customer trays CT between the respective components as described above. To this end, the first and second transfer parts 700a and 700b may include the first and second grippers 710a and 710b, the first and second transfer bodies 720a and 720b, and the first and second transfer parts 700a and 700b. 1st and 2nd guide parts 730a and 730b, 1st and 2nd lifting drive parts 740a and 740b, a support plate (SP), a center guide part (MGP; Main Guiding Part), and 1st and 2nd The drive unit 750a, 750b is included, respectively.

The first and second grippers 710a and 710b are provided to grasp or separate the customer tray CT from above, and are respectively provided on the first and second transfer bodies 720a and 720b so as to be elevated. . The first and second transfer bodies 720a and 720b are provided on the support plate SP so as to be able to reciprocate horizontally.

The first and second guide portions 730a and 730b are provided in the first and second transfer bodies 720a and 720b, respectively, to guide the lifting of the first and second grippers 710a and 710b. The first and second lift driving units 740a and 740b include motors 740a-1 and 740b-1, pulleys 740a-2 and 740b-2, and belts 740a-3 and 740b-3. The first and second grippers 710a and 710b are respectively elevated.

The support plate SP is fixedly installed on the body of the test handler installed on the bottom surface, and the center guide part MGP is horizontally reciprocated conveyance of the first and second transfer bodies 720a and 720b with respect to the support plate SP. To guide. The first and second driving units 750a and 750b include motors 750a-1 and 750b-1, pulleys 750a-2 and 750b-2, and belts 750a-3 and 750b-3. The first and second transfer bodies 720a and 720b are horizontally transferred, respectively.

In a preferred embodiment of the present invention, the first and second lift driving units 740a and 740b and the first and second driving units 750a and 750b are motors 740a-1, 740b-1, 750a-1 and 750b, respectively. -1), the pulleys (740a-2, 740b-2, 750a-2, 750b-2) and the belt (740a-3, 740b-3, 750a-3, 750b-3), but the configuration is the first If the second gripper 710a, 710b can be raised or lowered or the first and second transfer bodies 720a, 720b can be transported, the present invention is not limited thereto.

As described above, the tray feed recovery device according to the present invention is provided in each of the first and second transfer bodies 720a and 720b in which the first and second grippers 710a and 710b can be independently horizontally transferred. Different customer tray (CT) transfer operations can be performed at the same time, can also be transferred in the opposite direction can be quickly avoided in the lifting path of the loading and unloading seating portion (200, 400).

6A to 7D, a tray transfer method using the tray feed recovery device for a test handler according to an exemplary embodiment of the present invention will be described in detail.

In general, the test unit (not shown) takes out the supplied test target semiconductor device from the customer tray CT1 in order to perform an electrical test. Therefore, the transfer of the customer trays CT1 and CT2 supplied or recovered to the loading area LA is relatively regular.

However, since the tested semiconductor devices are classified according to the grade of the test result and loaded into the empty customer tray CT2 of the unloading area UA, the semiconductor devices having a large number of grades are loaded or have a small number of semiconductors. The recovery time of the customer trays CT3 loaded with the tested semiconductor devices positioned in the plurality of unloading seating portions 400 varies depending on whether the devices are loaded. Therefore, the transfer of the customer trays CT2 and CT3 supplied or recovered to the unloading area UA is irregular.

Therefore, the loading / unloading seating portions 200 and 400 and the first and second conveying portions 700a and 700b for supplying and recovering the customer tray CT to the loading area LA and the unloading area UA. Movement is irregular. Therefore, the test handler is provided with a central controller (not shown) in consideration of the signal that the supply or recovery of the customer tray CT is required, and the positions of the first and second transfer units 700a and 700b when the signal is received. The optimized transfer paths of the first and second transfer units 700a and 700b are calculated and a transfer command is issued.

As a result, there are many cases in which the first and second transfer units 700a and 700b transfer the customer tray. However, in the following description, the tray transfer method using the tray feed recovery device of the present invention will be described. When used, the customer tray transfer time can be significantly shortened as compared with the case of using a conventional tray feed recovery device.

First, referring to FIGS. 6A to 6D, the empty customer tray CT2 located in the loading seat 200 is collected, and the customer tray CT1 on which the test target semiconductor device is loaded is loaded into the loading seat 200. The tray conveying method to supply to a process is demonstrated.

First, when a signal indicating that the customer tray CT needs to be collected and supplied to the loading seat 200 is detected, the first and second transfer parts 700a and 700b may allow the corresponding loading seat 200 to descend. Evade in elevation paths. In this case, as shown in FIG. 6A, the first and second transfer parts 700a and 700b are preferably avoided to the left and right sides of the loading seating part 200 for subsequent operation.

Next, as shown in FIG. 6B, when the loading seating unit 200 descends, the first transporting unit 700a moves to the loading seating unit 200 and grips the empty customer tray CT2. In this case, the second transfer part 700b grips the customer tray CT1 stored in the loading stacking part 100 and loaded with the test target semiconductor device.

As illustrated in FIG. 6C, the first transfer unit 700a transfers the grasped empty customer tray CT2 and stores it in the empty tray stacking unit 300. In this case, the second transfer part 700b transfers the customer tray CT1 loaded with the test target semiconductor device to be seated on the loading seat 200.

Thereafter, as illustrated in FIG. 6D, the second transfer part 700b is avoided from the lifting path of the loading seat 200, and the loading seat 200 is lifted up so that the customer tray (with which the semiconductor device under test is loaded) is loaded. CT1) is supplied to the loading area LA. Of course, at this time, the first transfer unit 700a may be freely transferred for subsequent work.

The transfer of the tray shown in FIGS. 6A to 6D as described above is merely an example. Depending on the situation, the roles of the first transfer unit 700a and the second transfer unit 700b may be changed as appropriate.

In addition, when it is necessary to confirm whether the semiconductor device remains in the empty customer tray CT2 recovered in the loading area LA, the confirmation unit 600 may be used instead of the unloading loading unit 500. You can also transfer That is, after the second transfer part 700b seats the customer tray CT1 on which the semiconductor device to be tested is loaded on the loading seating part 200, it is avoided in the lifting path of the loading seating part 200 and the loading seating part ( While the 200 is rising, the first transfer unit 700a transfers the grasped empty customer tray CT2 to the identification unit 600.

Hereinafter, as another embodiment of the tray transfer method using the tray feed recovery device for the test handler of the present invention, with reference to Figures 7a to 7d, the customer is located in the unloading seat 400 and loaded with the tested semiconductor device A tray conveying method for collecting the tray CT3 and supplying the empty customer tray CT2 to the unloading seat 400 will be described.

First, when a signal indicating that the customer tray CT needs to be collected and supplied to the unloading seating unit 400 is detected, as shown in FIG. 7A, the first and second transfer parts 700a and 700b are unloaded. The seating unit 400 avoids the elevating path to descend.

Subsequently, as shown in FIG. 7B, when the unloading seat 400 descends, the first transfer part 700a moves to the unloading seat 400 and the customer tray loaded with the tested semiconductor device ( Grip CT3). At this time, the second transfer unit 700b grips the empty customer tray CT2 stored in the empty tray stacking unit 300.

As illustrated in FIG. 7C, the first transfer unit 700a transfers the customer tray CT3 loaded with the held test semiconductor element and stores the same in the unloading loading unit 500. At this time, the second transfer part 700b transfers the gripped empty customer tray CT2 to the unloading seating part 400.

Thereafter, as shown in FIG. 7D, the second transfer part 700b is avoided from the lifting path of the unloading seat 400, and the unloading seat 400 is raised to free the empty customer tray CT2. Supply to the loading area UA. In this case, the second transfer unit 700b may independently avoid the first transfer unit 700a at the time of avoidance, and in this case, the first transfer unit 700a may be freely transferred for subsequent work.

In the case of the transfer of the customer tray CT shown in FIGS. 7A to 7D as described above, the roles of the first transfer unit 700a and the second transfer unit 700b may be changed according to circumstances. In addition, when the confirmation unit 600 needs to check whether the semiconductor device remains in the empty customer tray CT2 and transfer the empty customer tray CT2 of the confirmation unit 600, the empty tray stacking unit Instead of the empty customer tray CT2 stored in the 300, the empty customer tray CT2 of the identification unit 600 may be seated on the unloading seating unit 400.

That is, when the unloading seating unit 400 descends, when the second transfer unit 700b grips the customer tray CT3 on which the tested semiconductor device is loaded, the first transfer unit 700a checks the confirmation unit 600. The first transfer part when the empty customer tray CT2 is held and the customer tray CT3 loaded with the tested semiconductor element held by the second transfer part 700b is stored in the unloading loading part 500. The empty customer tray CT2 held by the 700a may be seated on the unloading seating portion 400.

As described above, in the tray transfer method using the tray feed recovery device for the test handler of the present invention, the first and second transfer units 700a and 700b may be independently transferred to perform different customer tray transfers simultaneously. Therefore, the supply and recovery speed of the customer tray CT can be improved.

Although the present invention has been described in detail only with respect to the described embodiments, it will be apparent to those skilled in the art that various modifications and variations are possible within the technical spirit of the present invention, and such modifications and variations belong to the appended claims. will be.

1 is a schematic view showing a tray feed recovery device for a conventional test handler,

Figure 2 is a schematic diagram showing a transfer unit provided in the tray feed recovery device for a conventional test handler,

3A to 3D are schematic views showing an operation sequence of a tray supply recovery device for a conventional test handler recovering an empty tray seated on a loading seat, and supplying a tray loaded with a semiconductor device under test to a loading seat;

4 is a schematic view showing a tray supply recovery apparatus for a test handler according to a preferred embodiment of the present invention;

5 is a schematic view showing a first and a second transfer unit provided in a tray feed recovery device for a test handler according to an embodiment of the present invention;

6A to 6D illustrate an empty tray seated on a loading seat using a tray supply recovery device for a test handler according to a preferred embodiment of the present invention, and supplying a tray on which the semiconductor device under test is loaded to the loading seat. Schematic showing the tray transport method,

7A to 7D illustrate a tray loaded on an unloading seat and loaded with a tested semiconductor device by using a tray feed recovery device for a test handler according to a preferred embodiment of the present invention, and an empty tray on the unloading seat It is a schematic diagram showing the tray conveying method.

＊ Explanation of symbols for main part of drawing ＊

100: loading loading part 200: loading seat

300: empty tray loading part 400: unloading seat

500: unloading loading part 600: confirmation part

700a: first transfer unit 700b: second transfer unit

710a: first gripper 710b: second gripper

720a: first transfer body 720b: second transfer body

730a: first guide part 730b: second guide part

740a: first lift drive 740b: second lift drive

750a: first driving unit 750b: second driving unit

740a-1, 740b-1, 750a-1, 750b-1: motor

740a-2, 740b-2, 750a-2, 750b-2: pulley

740a-3, 740b-3, 750a-3, 750b-3: belt

CT: Tray

CT1: Tray on which the semiconductor device under test is loaded

CT2: empty tray

CT3: Tray loaded with tested semiconductor elements

SP: Support Plate

MGP: Center Guide Section

Claims (9)

A test handler which carries out a quality test while transferring a test target semiconductor device, which is loaded in a customer tray, into a loading area, is transferred to a test tray, and then transferred to a customer tray that is supplied to an unloading area. A customer tray loaded with a semiconductor device to the loading area, and then an empty customer tray from the loading area, a blank customer tray supplied to the unloading area, and then a semiconductor device loaded A tray feed recovery device for a test handler which recovers a customer tray from the unloading area, One or more loading stacks for storing a plurality of customer trays loaded with the semiconductor devices under test, arranged in parallel, one or more empty tray stacks for storing empty customer trays, and the semiconductor devices tested A plurality of stacks comprising one or more unloading stacks for storing the customized customer trays; One or more loading seats configured to move up and down in the loading area, supply a customer tray loaded with a semiconductor device under test to the loading area, and recover an empty customer tray from the loading area; At least one unloading seating part which supplies an empty customer tray to the unloading area while lifting at the unloading area, and recovers the customer tray loaded with the tested semiconductor device from the unloading area; And Independently of each other, it is horizontally movable along the loading stacking unit, the empty tray stacking unit, and the unloading stacking unit arranged in a row, and is formed to enable the gripping and lifting of the customer tray, Independently, the customer trays stored in the loading stacking unit and the empty tray stacking unit are transferred to the loading seating and the unloading seating, respectively, or the customer trays recovered from the loading seating and the unloading seating, respectively. First and second conveying sections for transporting and storing the empty tray stacking section and the unloading stacking section; Tray feed recovery device for a test handler comprising a. The method of claim 1, The first transfer unit, When transferring the empty customer tray located in the loading seat to the empty tray stacking unit, The second transfer unit, The tray feed recovery device for the test handler, characterized in that for transporting the customer tray stored in the loading loading unit to the loading seat. The method of claim 1, The first transfer unit, When transferring the customer tray loaded on the unloading seating part and the tested semiconductor device to the unloading stacking part, The second transfer unit, The tray supply recovery device for the test handler, characterized in that for transporting the empty customer tray stored in the empty tray loading portion to the unloading seating portion. The method of claim 1, A confirmation unit for confirming whether the semiconductor device remains in the empty customer tray transferred from the loading seating portion; The first transfer unit, When transferring the empty customer tray located in the loading seat to the confirmation unit, The second transfer unit, The tray feed recovery device for the test handler, characterized in that for transporting the customer tray stored in the loading loading unit to the loading seat. The method of claim 4, wherein The second transfer unit, When transferring the customer tray loaded on the unloading seating part and the tested semiconductor device to the unloading stacking part, The first transfer unit, The tray supply and recovery device for the test handler, characterized in that the transfer to the unloading seating portion is transferred to the empty customer tray confirmed in the confirmation unit. Independently move horizontally along a plurality of loads, including in a line-loaded loading stack, an empty tray stack, and an unloading stack, each of which holds and lifts the customer tray. Through the first transfer unit and the second transfer unit is formed to, Confirming whether to transfer the customer tray stored in the loading stack to the loading seat and to transfer the empty customer tray located in the loading seat to the empty tray stack or to check whether the semiconductor device remains in the empty customer tray. And transferring the empty customer tray stored in the empty tray stacking unit to the unloading seating unit, and transferring the customer tray loaded with the tested semiconductor elements located in the unloading seating unit to the unloading stacking unit. In the tray transfer method using the tray feed recovery device for the test handler, When the first conveyer transfers the empty customer tray positioned in the loading seat to the empty tray stacking unit, the second transport unit transports the customer tray stored in the loading stack to the loading seat; Tray conveying method comprising a. The method of claim 6, When the first transfer unit transfers the customer tray loaded with the tested semiconductor device located in the unloading seat to the unloading stack, the empty transport tray stored in the empty tray stacking unit. Transferring the seat to the unloading seat; The tray transport method further comprises. The method of claim 6, When the first transfer unit transfers the empty customer tray positioned in the loading seat to the check unit, the second transfer unit transfers the customer tray stored in the loading stack to the loading seat; The tray transport method comprising a. The method of claim 6, When the second transfer part is located in the unloading seating part and transfers the customer tray loaded with the tested semiconductor device to the unloading loading part, the first transfer part checks the empty customer tray checked by the confirmation part. Transporting and seating the unloading seat; The tray transport method further comprises.

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