KR100401014B1 - Test Handler - Google Patents

Abstract

According to the disclosed test handler, the test trays are conveyed in two rows simultaneously in a direction perpendicular to the ground in the test chamber, and all devices in two test trays, for example 64 (32 + 32) or 128, in one test head. (64 + 64) devices are simultaneously contacted and tested. Therefore, the number of devices that can be processed per unit time can be doubled. In addition, the present invention is not located inside the handler body, the test head is located in the vertical position perpendicular to the ground to contact the devices of the test tray. Therefore, the size of the handler can be reduced, and in particular, since the space occupied by the existing test head in the handler can be used as a space of a tray stocker or a control box, a separate user tray supply unit and a shipping unit can be added. It can double the size of the lot, which can improve the utilization rate of the equipment. In addition, the present invention increases the number of devices picked by the Cartesian coordinate robot, and since the presetting operation at the time of device loading is deleted, the device loading time can be reduced, and the unloading-only robot after the first sorting by the sorting-only robot Since unloading is performed by the device, the device unloading time can be reduced, thereby increasing the number of devices that can be processed per unit time.

Description

Test handler

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to test handlers used for testing electronic components (hereinafter, collectively referred to as "devices") such as integrated circuits (ICs), semiconductor chips, and the like.

A device manufactured through a predetermined assembly process in the manufacturing process of a semiconductor device undergoes a test process of checking whether or not finally exhibiting a predetermined function. The test handler is used in the test process as described above, the test is carried out by carrying a certain amount of semiconductor devices and contact with the test head, and the devices are classified and loaded according to the test results. These test handlers return the devices to the test head for testing 32 to 64 devices at the same time, and allow the test to be run in a special temperature environment, either low or high temperature.

One typical example of a test handler as described above is schematically illustrated in FIG. 1. FIG. 2 is a plan view illustrating a chamber arrangement of the test handler illustrated in FIG. 1, and FIG. 3 is a flowchart illustrating a test tray for explaining an operation of a general test handler.

1 and 2, the front portion of the handler main body 1 includes a user tray supply unit 10 in which a plurality of user trays containing devices to be tested are loaded and devices which have been tested and sorted according to grades. The user tray shipping section 20 on which the user tray is loaded is disposed, respectively. In addition, a loading side set plate 30 and an unloading side set plate 40, which are waiting places for loading and unloading devices, are disposed on the user tray supply unit 10 and the user tray shipping unit 20, respectively. do. The user tray loaded on the user tray supply unit 10 is sequentially transferred to the loading side set plate 30 by a transfer arm (not shown), and the user tray located on the unloading side set plate 40 is also The transfer arms are sequentially transferred to the user tray shipping section 20.

In addition, a soak chamber 50 and a desoak chamber 60 are disposed at both sides of the rear portion of the handler body 1, respectively, and the handler body 1 between the chambers 50 and 60 is disposed. At the bottom is a test chamber (not shown). In addition, first, second and third tray alignment stations 80, 80 ', and 80 "in which the test tray 70 is positioned are disposed on the upper side of the test chamber. Circulating through the alignment station 80 through the inner chamber 50, the two test chambers, the desorption chamber 60, the third tray alignment station 80 "and the second tray alignment station 80 'sequentially .

In addition, an orthogonal robot for loaders that picks up devices from the user tray located on the loading side set plate 30 and transfers them to the test tray 70 located in the first tray alignment station 80 on the handler body 1. Two devices for picking the device from the test tray 70 located at the 90 and the second and third tray alignment stations 80 'and 80 "and transferring the device to the user tray located at the unloading side set plate 40; Unloading orthogonal robots 90 'and 90 "are installed.

Here, the inner chamber 50 is a part for heating or cooling the device contained in the test tray 70 to a desired temperature. The test chamber 70 is provided by elevating-down the test tray 70 and supplying it to the test chamber. The test chamber is a part that maintains a constant temperature environment and performs a test by connecting the device and the test heads 100 and 100 '. The test is performed on 32 devices in the first test chamber and the remaining 32 in the second test chamber. Tests are carried out on two devices. The desorption chamber is a part for reducing the heated or cooled device to room temperature, and in contrast to the inner chamber 50, the desorption chamber is elevated by feeding up the test tray 70 to the third tray alignment station 80 ". The orthogonal robots 90, 90 ', 90 "have a plurality of hands for attracting the device and move continuously and repeatedly between the user tray and the test tray 70 while being driven by the servomotor and the timing belt. As a result, the device is transferred from the user tray to the test tray 70 or from the test tray 70 to the user tray.

On the other hand, although not shown in the drawings, the test handler includes a conveyor device for circulating the test tray 70 into a loader area, a faster area, a test area, and an unloader area, a driving source thereof, and a control circuit for controlling the devices. Equipped with a main controller.

In the conventional test handler as described above, one user tray loaded in the user tray supply unit 10 is transferred to the loading side set plate 30 by a transfer arm. After the pre-sizing operation is performed by the orthogonal robot 90 for the loader, the presizing operation is performed by the loader orthogonal robot 90 to exactly match the position of the socket in the test tray 70. 80 is transferred to the test tray 70 located at (1). The test tray 70 containing a plurality of devices is transferred to the inner chamber 50 while being lowered and heated or cooled to the temperature of the test condition (②) and then transferred to the test chamber (③). In the test chamber, a plurality of devices on the test tray 70 and the sockets of the test heads 100 and 100 ′ are connected to each other to perform a test (④), and the test tray 70 having completed the test is transferred to the desorption chamber 60. The test tray 70 reduced to room temperature while passing through the sub-chamber 60 is transferred to the second and third tray alignment stations 80 'and 80 ", where each device is an orthogonal robot for two unloaders. The grades are sorted according to the test result by 90 ', 90 "and transferred to the bin tray located on the unloading side set plate 40. When the device is filled in the bin tray located on the set plate, the bin tray is transferred to the user tray shipping unit 20 for each grade by the transfer arm and loaded. The transfer arm then transfers the new bin tray to the unloading side set plate 40 and repeats the above operation until the inspection of one lot is complete.

However, in the general test handler as described above, as shown in the flow chart of the test tray 70 shown in FIG. 3, the test tray 70 must not only be transferred in one row but also must pass through the first and second test chambers in order. Since the test for 64 devices contained in one test tray 70 is completed, there is a problem that the number of devices that can be processed per unit time is reduced by increasing the index time of the test tray 70.

In addition, the conventional test handler not only takes a lot of time to load the device of the user tray or more into the test tray 70, but also the unloading orthogonality in unloading the device on the test tray 70 that has been tested to the user tray. Since the robot proceeds sorting in parallel, there is a problem that the amount of devices that can be processed per unit time is reduced because the unloading of the device takes a relatively long time.

In addition, the conventional test handler has a structure in which the test tray 70 is docked with the test head while being transported horizontally with respect to the handler main body 1, so that entry / exit of the test head into the handler main body 1 is prevented. There is a problem that the size of the handler increases inefficiently, because a path for the network must be secured.

Moreover, the conventional test handler has a problem that the test head used is extremely limited due to the horizontal docking structure between the test tray 70 and the test head as described above, and the test head is provided inside the handler body 1. Since the space of the other part is narrow because it is located, for example, the space of the user tray supply part 10 and the user tray shipment part 20 is narrow, and a large number of user trays cannot be loaded, it can run once. There was also a problem that the size of the existing lot was limited and the equipment utilization rate was lowered.

The present invention has been made to solve the above problems, by adopting a two-row simultaneous transfer system of the test tray, and by employing a vertical docking structure of the test head to reduce the indexing time of the test tray, one head The purpose is to provide a test handler that can double the number of devices that can be processed per unit time by contacting two test trays simultaneously.

Another object of the present invention is to improve the hand structure of the orthogonal robot for the loader, picking 16 devices at a time, shortening the loading time of the device, and improving the structure of the test tray and the positioning device to eliminate the presizing operation of the device. By shortening the device loading time and dividing the device unloading into two stages, sorting part and unloading part, the device unloading time can be shortened to increase the number of devices that can be processed per unit time. To provide a test handler.

Still another object of the present invention is to provide a test handler which can shorten the operation time required to check the initial tray loading stage by mounting two sensors on each of two hand units that transfer upward and downward of the transfer arm.

Another object of the present invention is to reduce the size of the appearance by adopting the two-row simultaneous contact mechanism of the test tray in the vertical docking structure of the test head, there is no need to provide a space for the entry / exit of the test head inside the handler body To provide a test handler that can

Still another object of the present invention is to provide a test handler that can be used in combination with various types of test heads by simply changing a change kit by docking the test head with the test head positioned outside the handler body.

Another object of the present invention is to configure the user tray supply unit and the delivery unit in the upper and lower two stages, which allows a larger number of user trays to be loaded, thereby doubling the size of the lot that can be run at a time. The lower tray can be loaded and discharged without stopping, so the lot size can be operated indefinitely, thereby providing a test handler that can improve the equipment utilization rate.

It is still another object of the present invention to provide a test handler that can double the stackable types of trays containing devices that have been tested and classified from five to eleven by using a multi-loading unit.

It is still another object of the present invention to provide a test handler capable of maintaining the inside of the test chamber and other wiring maintenance without detaching the head by separating the de-chamber chamber.

1 is a perspective view schematically showing a typical test handler;

2 is a plan view showing a chamber arrangement of the test handler shown in FIG. 1;

3 is a test tray flow chart for explaining the operation of a general test handler;

4 is a perspective view showing the arrangement of a rectangular coordinate robot for loading, unloading and sorting of a test handler according to the present invention;

5 is a perspective view illustrating the test handler in connection with the flow of the test tray according to the present invention;

6 is a perspective view showing the appearance of a test handler according to the present invention;

7 is a front view showing a stocker of the test handler according to the present invention;

8 is a front view showing the multi-loading portion of the test handler according to the present invention;

9 is a plan view showing a chamber arrangement of a test handler according to the present invention;

10 is a front view showing a hand of a test handler according to the present invention;

11 is a side view showing a hand of a test handler according to the present invention;

12 is a front view showing a state in which a device is loaded into a test tray in a test handler according to the present invention;

13 is a flowchart of a test tray for explaining the operation of the test handler according to the present invention;

14 is a plan view for explaining the device unloading operation of the test handler according to the present invention;

15 is a front view showing the indexing mechanism of the test handler according to the present invention;

16 is a side view showing an indexing mechanism of a test handler according to the present invention;

Figure 17 is a side view showing the de-chamber chamber separation structure of the test handler according to the present invention.

* Description of Signs of Main Parts of Drawings *

100: test head 110: test handler

120: stocker 120a: user tray

121: user tray supply unit 121a: auxiliary supply unit

122: user tray shipping unit 123: multi-loading unit

128: auxiliary delivery unit 131: loading side set plate

132: unloading side set plate 140: transfer arm

141: first sensor 142: second sensor

150: test tray 151: insert

153: positioning device 160: loading side tray alignment station

161: first tray inverting means 162: inner chamber

163: test chamber 164: desequence chamber

165: second tray inverting means 166: unloading side tray alignment station

167: sorter table 171: Cartesian robot for the loader

172: first single axis robot for sorting 173: second single axis robot for sorting

174: Cartesian Robot 180 for the Unloader: Hand

187: vacuum pad 200: indexing mechanism

201: electric 202: linear guide

The test handler according to the present invention for achieving the above object is a user tray supply unit in which a plurality of user trays containing a certain amount of devices to be tested is loaded, and a plurality of devices classified by class according to the test results A stocker partitioned by a user tray shipment unit on which a user tray is loaded; A plurality of test trays arranged to move in the main circuit; Device loading means for moving the device from the user tray of the user tray supply unit to the test tray; First tray inverting means configured to vertically erect a test tray containing a device configured to be transported in a horizontal state in the main circuit; An inner chamber configured to receive the test trays vertically set by the first tray inverting means and sequentially transfer the test trays to a predetermined step, and to arrange and discharge the test trays in a vertical two-row arrangement; At least one test chamber for connecting a device in the two test trays discharged from the inner chamber with a test head to perform a test; A de-chamber for receiving the test trays discharged in two rows from the test chamber in one row and reducing the temperature of the device while transferring them to a predetermined step; Second tray reversing means for retracting the test tray discharged from the de-chamber chamber in a vertical state to a horizontal state again; And device unloading means for classifying the devices on the test tray in a horizontal state by the second tray inverting means into classes according to test results and moving them to a plurality of empty trays.

According to this, the test trays are arranged in a vertical two-row arrangement up and down, and are simultaneously transferred to the test chamber, in which 64 or 128 devices in two test trays are simultaneously connected to the test head and the test proceeds. This can double the number of devices that can be processed per hour.

According to the present invention, the stocker has a built-in multi-loading unit for storing a plurality of user trays in a tray loading space of one row.

In addition, the multi-loading unit is moved up and down by a driving means mounted on the lower part so that a predefined stocker can receive the user tray at a desired position, and is discharged to the outside of the main body by a discharge cylinder and a transfer guide when necessary.

In addition, the stocker is provided with an auxiliary supply part and an auxiliary delivery part at the lower part of the user tray supply part and the user tray supply part, and when the user tray is exhausted in the user tray loading part disposed at the upper part, the user tray is automatically transferred to the user tray supply part. When loading is completed, the user tray is lowered to the secondary shipping unit when the loading is completed, and the user tray can be fed and discharged without stopping the main body if necessary.

The device loading means may include: a plurality of loading side set plates disposed on an upper side of the user tray supply part and in which a user tray for device loading is located; A transfer arm for sequentially moving the user tray in the user tray supply unit to the loading side set plate; And a first rectangular coordinate robot for transferring a device of a user tray or more to the test tray while continuously and repeatedly moving between the loading side set plate and the loading side tray alignment station in which the test tray is located.

In addition, the device loading means further comprises a positioning device with a positioning pin protruding and the guide wall tapered to the left and right, and to raise the positioning device in the fixing hole of the insert that is movable to the test tray A positioning pin is inserted to secure the insert, and the guide wall guides the device so that it is accurately seated on the insert when the device being inserted is inserted into the insert.

In addition, the transfer arm has a first sensor attached to the upper side and a second sensor attached to the upper surface of the transfer arm so as to quickly detect the position of the user tray approximately loaded by the first sensor in the loading portion of the user tray supply unit. Lower When the first sensor detects the second sensor installed on the upper surface while slowly descending accurately detects the user tray, after picking, and moves to the set plate.

In addition, the first Cartesian coordinate robot is equipped with eight vacuum pads in the front row and eight vacuum pads in the rear row, and 16 devices at a time by mounting a hand for adjusting the vacuum pad spacing at a predetermined distance by a moving means. Can be picked.

In addition, the moving means comprises a front and rear moving part for adjusting the distance by moving the front and rear rows back and forth, and the left and right moving parts for adjusting the interval of each vacuum pad while moving the cam plate up and down, wherein the left and right moving parts are respectively The cam plate formed with the long hole is coupled to the horizontal distance to move the pad of the pin, and each of the vacuum pads has a pin that protrudes and is inserted into the long hole of the cam plate. do.

In addition, the inner chamber is mounted on the guide bar and mounted on the guide bar while simultaneously moving the test tray while pushing the upper and lower test trays with the pushers coupled to the moving shaft and the moving means by mounting the test trays on the vertically arranged guide bars. Has an indexing mechanism to eject the test tray.

In addition, the test chamber is not located inside the body of the test head, but located outside to contact the devices of the test tray.

In addition, the de-chamber chamber is equipped with a linear guide at its lower end and a linear block is mounted on the main body to facilitate maintenance by taking the linear block of the main body out of the main body in case of failure.

The device unloading means may include: first and second single axis robots for classifying and transferring devices on a test tray positioned at an unloading side tray alignment station according to a test result according to a class; At least two sorter tables for temporarily storing the devices transferred by the first and second single axis robots by unit quantity or judgment grade; A second rectangular coordinate robot for simply transferring the device stored in the sorter table by unit quantity and judgment grade; A plurality of unloading side set plates disposed above the user tray shipping unit and in which a plurality of bin trays for storing devices carried by the second rectangular coordinate robot are located; And a transfer arm for moving a corresponding bin tray to the user tray shipment unit when the bin is located on the unloading side set plate.

In addition, the device unloading means shortens the device unloading time by configuring the sorting part for sorting the device according to a test result and the sorted device in two stages of simply unloading part from the sorting table. .

Hereinafter, with reference to the accompanying drawings will be described in detail a preferred embodiment of the present invention.

Figure 4 is a perspective view showing the center of the placement of the Cartesian robot for loading, unloading and sorting the test handler according to the present invention, Figure 5 is a perspective view showing the test handler in conjunction with the flow of the test tray according to the present invention, Figure 6 is a perspective view showing the appearance of the test handler according to the invention, Figure 7 is a front view showing a stocker of the test handler according to the invention, Figure 8 is a front view showing a multi-loading portion of the test handler according to the invention, 9 is a plan view showing a chamber arrangement of the test handler according to the present invention, FIG. 10 is a front view showing a hand of the test handler according to the present invention, FIG. 11 is a side view showing a hand of the test handler according to the present invention, and FIG. Front view showing a state in which a device is loaded into a test tray in a test handler according to the present invention, FIG. A plan view for explaining the device unloading action of the test handler, FIG. 15 is a front view showing the indexing mechanism of the test handler according to the present invention, FIG. 16 is a side view showing the indexing mechanism of the test handler according to the present invention, and FIG. A side view showing a desorption chamber separation structure of a test handler according to the present invention.

As shown in FIGS. 4, 5, 6, 7 and 8, the stocker 120 is disposed at the front of the handler body 110. The stocker 120 includes a user tray supply unit 121 in which a plurality of user trays 120a containing devices to be tested are loaded, and a user tray in which a plurality of user trays 120a containing devices sorted according to grades are loaded. The shipping unit 122 is divided into a multi-loading unit 123 capable of storing the various types of user trays 120a. Here, the user tray supply unit 121 may be composed of two to three tray loading unit, the user tray shipping unit 122 may be composed of 11 to 12 by classification class.

In addition, the auxiliary supply unit 121a is disposed under the user tray supply unit 121, and when the user tray 120a loaded in the user tray supply unit 121 is exhausted, the auxiliary supply unit 121a always supplies a new user tray. Therefore, it is not necessary to stop the operation of the handler body 110 and supply the user tray 120a again. That is, the auxiliary supply part 121a is installed at the lower part of the front of the handler body 110, and the auxiliary door 125, which can be opened by the user at any time, is automatically opened when the button is pressed, and the auxiliary door 125 is opened, and the entrance cylinder 126a is mounted. The auxiliary supply part 121a is moved to the front side by the moving part 126 so that the user can conveniently load the user tray 120a. When the loading is completed, the auxiliary supply part 121a is returned to its original position again. When the user tray 120a is exhausted by the user tray supply unit 121 disposed above, the auxiliary supply unit 121a automatically loads the user loaded by the vertical movement unit 127 on which the up and down cylinders 127a are mounted. The tray 120a is mounted on the user tray supply unit 121 and loaded. In addition, in the user tray shipping unit 122, the auxiliary shipping unit 128 is disposed in the lower portion in the same structure as the auxiliary supply unit 121a, and the user tray 120a, which is loaded in the user tray shipping unit 122, is stored in the auxiliary shipping unit ( 128) can be shipped at any time without stopping the main body 110 to increase the size of the lot that can be run at a time, or to increase indefinitely to improve the equipment utilization rate.

In addition, the multi stacking unit 123 is provided with a plurality of stacking units 129 to store seven kinds of user trays 120a in a space in which one kind of user tray 120a can be loaded. It is moved up and down by the motor driving unit 129a mounted on the lower side to receive a predetermined user tray 120a at a desired position. In addition, the stacking units 129 are connected to three or four blocks 129b, and when the stacking is completed, the stacking unit 129 is discharged to the outside of the main body 110 by the discharge cylinder 129c and the transfer guide 129d so that the worker easily trays. 120a can be taken out.

Meanwhile, as shown in FIG. 9, the upper side of the stocker 120 of the handler body 110 is tested with several loading side set plates 131, which are waiting places of the user tray 120a containing the device to be tested. Several unloading side set plates 132 are arranged, which are waiting places of empty trays for sorting devices by grade. The user tray 120a containing the device to be tested in the user tray supply unit 121 is sequentially moved to the set plate 131 by a transfer arm. That is, the transfer arm 140 descends the user tray supply unit and detects to which height the user tray 120a is loaded. The transfer arm 140 descends rapidly until the approximate position is detected by the first sensor 141 mounted on the side. When the first sensor 141 detects the first sensor 141, the second sensor 142 installed on the upper surface detects and picks the user tray 120a accurately and moves to the set plate 131. In addition, the transfer arm 140, when the device is filled in the bin tray located on the loading side set plate 131, also serves to move it to the loading portion of the user tray shipping unit 122.

In addition, the test handler according to the present invention includes a plurality of test trays 150 arranged to move in the main circuit of the handler body 110. This test tray 150 is initially located in the loading side tray alignment station 160, where it is carried a plurality of devices to be tested. One test tray 150 accommodates 64 devices. The rectangular Cartesian robot 171 for the loader is a user tray 120a positioned on the set plate 131 while continuously and repeatedly moving between the loading side set plate 131 and the loading side tray alignment station 160. Pick the device from and transfer it to the test tray 150. The loader Cartesian robot 171 includes a hand 180 for picking 16 devices in one operation.

Here, the hand 180 has eight vacuum pads 187a on the front row 193 and eight vacuum pads 187a on the rear row 194 as shown in FIGS. 10 and 11, and the front row 193 and the rear row. The front and rear moving parts 181 for moving the front and rear sides 194 to adjust the gap, and the left and right moving parts 184 for adjusting the gap with the respective vacuum pads 187a while moving the cam plate 189 up and down.

The front and rear movement unit 181 mounts the first cylinder 182 and the first guide rail 183 to move the vacuum pads 187a of the front row 193 and the rear row 194, and the left and right moving unit 184 is made of 2 cylinders 185 are mounted on both sides to move the plate 186 to which the pad portion 187 is horizontally movable, and to move the vacuum pads 187a up and down in front of the pad portion 187. And the cam plate 189 in which the long hole 188 is formed at the horizontal distance is combined. At this time, the cam follower 190 protrudes in each of the vacuum pads 187a and is inserted into the long hole 188 of the cam plate 189, and the bearings 191 are mounted on the respective vacuum pads 187a. It is connected to the horizontal axis 192 penetrating through (191).

Accordingly, when picking a device from the user tray 120a, the front row 193 and the rear row 194 of the hand 180 are narrowed, and the pad unit 187 is lowered to keep the vacuum pads 187a in close contact with each other. When the transfer to the test tray 150 after picking, the first cylinder 182 of the front and rear moving unit 181 is operated in accordance with the interval of the test tray 150 to open the front row 193 and the rear row 194 of the hand. The cam follower 190 of the pad part 187 is guided by the long hole 188 of the cam plate 189 by the operation of the second cylinder 185 of the left and right moving part 184. Widen at intervals.

On the other hand, when transferring a device picked by the hand 180 to the test tray 150 conventionally once transferred to the presizing apparatus, accurately positioned and then picked again to transfer to the test tray 150. However, the present invention eliminates the presizing device and immediately transfers directly to the test tray 150. That is, as shown in FIG. 12, a plurality of inserts 151 fluidly mounted to the test tray 150 are coupled and the tray 150 when the hand 180 picks the device and seats the test tray 150. Positioning device 153 is disposed in the lower portion is raised to insert the positioning pin 154 into the fixing hole 152 of the insert 151 to accurately position the insert 151. In addition, when the device 156 is inserted into the insert 151, the guide walls 154 and 155 of the positioning device 153 tapered inwardly are moved back and forth even if the device 156 held by the hand 180 is slightly shifted. The device 156 is guided so that it can be accurately seated in the insert 151.

5 and 9, the first tray reversing means 161, the inner chamber 162, the test chamber 163, and the descheduling chamber 164 are disposed on the main circuit of the handler body 110. A second tray reversing means 165, an unloading side tray alignment station 166, and a sorter table 167 are comprised.

The first tray inverting means 161 vertically supports the test tray 150 transferred from the loading side tray alignment station 160 to the inner chamber 162.

The inner chamber 162 receives the test tray 150 that is vertically erected by the first tray reversing means 161, and heats or cools the device to a test temperature condition while moving from the front to the rear in a predetermined step. At this time, since each of the device receiving grooves of the test tray 150 is provided with inserts 151 for supporting the devices, the devices are not separated from the storing grooves even when the test tray 150 is vertically placed. Here, as illustrated in FIGS. 15 and 16, the test tray 150a discharged from the inner chamber 162 is finally mounted on the guide bars 195 disposed vertically in two rows, and moved with the moving shaft 196. It moves to the test head 100 by pushing the upper and lower trays 150a with the pusher 198 coupled to the means 197 and at the same time has an indexing mechanism 200 for discharging the tested trays 150b. As a result, compared to the conventional method of discharging the tested tray 150b and then moving the tray 150a located in the inner chamber 162 back to the test chamber 163, the movement time is significantly shortened and complicated. By simplifying the moving devices, the causes of cost reduction and equipment failure are eliminated.

The test chamber 163 accommodates the test tray 150 supplied in the vertical and vertical two-row arrangement as described above, and performs a test by electrically connecting the test head 100 and the 128 devices in the test tray 150. To lose. That is, the test head 100 and the test tray 150 are vertically docked to test 128 devices simultaneously in one test operation.

In addition, since the test tray is transported in a vertically upright state, and the test head 100 is installed outside the handler body 110, the handler body 110 occupies in a manner that the head 100 is docked horizontally. By utilizing the space as a space of the stocker 120, it becomes possible to arrange the auxiliary supply unit and the auxiliary shipping unit.

The de-chamber chamber 164 accommodates the test tray 150 supplied from the test chamber 163 in a single row again, and transfers the test tray 150 to a predetermined step from the rear to the front in a predetermined step, at room temperature. To reduce.

Here, the major electrical and mechanical devices 201 are complexly mounted inside the test chamber 163 or the desorption chamber 164. In the related art, when a failure occurs, the test head 100 is separated and repaired in a narrow space. The castle was very bad. As shown in FIG. 17, the maintenance chamber is easily maintained since the de-chamber chamber 164 is simply moved to the side of the handler body 110 to secure a space for maintenance. That is, the linear guide 202 is mounted on the lower end of the decommission chamber 164 and the linear block 203 is mounted on the main body 110 so that in case of a failure, the operator simply loosens the bolt and pushes the decommission chamber 164 to the side. 164 is taken out of the side of the main body 110 by riding the linear block 203, the operator can enter the main body 110 to facilitate the maintenance of the electrical and mechanical devices 201, the maintenance time is remarkable Can be shortened.

As shown in FIGS. 5, 9, and 14, the second tray reversing means 165 horizontally retracts the test tray 150 discharged from the deep chamber 164, thereby horizontally retracting the test tray 150. The test tray 150 is transferred to and positioned at the unloading side tray alignment station 166.

The sorter table 167 sorts and temporarily stores the devices on the test tray 150 located in the unloading side tray alignment station 166 according to their class.

At this time, the sorting and transfer of the plurality of devices in the test tray 150 to the sorter table 167 are performed by two single axis robots 172 and 173. The two single axis robots 172 and 173 are installed to continuously and repeatedly move between the sorter table 167 in the unloading side tray alignment station 166 as shown in FIG. The devices are picked on the test tray 150 located at 166 and transferred to the sorter table 167 for each class. Accordingly, the sorted device is sorted by class in the sorter table 167 and stored in unit quantity.

Orthogonal coordinates for the unloader installed to temporarily move between the sorter table 167 and the unloading side set plate 132 continuously and sorted when the sorted devices temporarily stored in the sorter table 167. The robot 174 is transferred to a designated position among a plurality of bin trays located on the set plate 132. That is, in the present invention, in the unloading of the tested device, the device unloading time is configured to proceed to two stages of sorting part for sorting the device according to the test result and unloading part for simple sorting from the sorting table. It can be shortened innovatively.

When the device is filled in the bin tray positioned on the unloading side set plate 132 by the above process, the corresponding bin tray is transferred to the tray stacking unit corresponding to the user tray shipping unit 122 by the transfer arm 140. Is moved.

In addition, although not shown in detail in the drawings, the test handler according to the present invention includes a transfer mechanism for moving the test tray 150 to the loader region, the inner chamber, the test chamber, the desequence chamber and the tray alignment station. And a main controller incorporating a driving source thereof and a device for controlling the devices. In addition, the test handler according to the present invention includes a match plate apparatus for allowing a plurality of devices housed in the test tray 150 moved to the test chamber 163 to be smoothly connected to a socket on the test head 100. In the drawings, the illustration is not specifically illustrated.

It is apparent that the cylinders and motors used are not departed from the technical scope of the present invention even if they are changed by other driving means.

Hereinafter, with reference to the accompanying drawings will be described in detail the operation of the test handler according to the present invention.

Figure 4 is a perspective view showing the center of the placement of the Cartesian robot for loading, unloading and sorting the test handler according to the present invention, Figure 5 is a perspective view showing the test handler in conjunction with the flow of the test tray according to the present invention, Figure 6 is a perspective view showing the appearance of the test handler according to the invention, Figure 7 is a front view showing a stocker of the test handler according to the invention, Figure 8 is a front view showing a multi-loading portion of the test handler according to the invention, 9 is a plan view showing a chamber arrangement of the test handler according to the present invention, FIG. 10 is a front view showing a hand of the test handler according to the present invention, FIG. 11 is a side view showing a hand of the test handler according to the present invention, and FIG. 13 is a front view showing a state in which a device is loaded into a test tray in a test handler according to the present invention. Test tray flow chart for explaining the operation of the test handler, Figure 14 is a plan view for explaining the device unloading operation of the test handler according to the present invention, Figure 15 is a front view showing the indexing mechanism of the test handler according to the present invention, 16 is a side view showing the indexing mechanism of the test handler according to the present invention, and FIG. 17 is a side view showing the de-screw chamber separation structure of the test handler according to the present invention.

The user tray supply unit 121 located in the stocker 120 of the handler main body 110 is loaded with a plurality of user trays 120a containing devices to be tested. After determining how much of the user tray 120a is loaded in the supply unit 121 by the first sensor 141 and the second sensor 142, the user tray 120a is sequentially moved by the transfer arm 140. It is moved to the loading side set plate 131. The test tray 150 is located at the loading side tray alignment station 160.

While the loader Cartesian coordinate robot 171 operates in the above state, the device is picked up from the user tray 120a positioned on the set plate 131 and transferred to the test tray 150. When picking, a hand 180 equipped with 16 vacuum pads 187a is used to pick 16 devices from the user tray 120a and move them to the test tray 150. During loading, the front and rear moving parts 181 and the left and right moving parts are mounted. The front row 193 and the rear row 194 are widened using 184, and the distance of each vacuum pad 187a is widened to adjust the distance of the device to fit the gap of the test tray 150 and then load the loaded row.

The insert 151 is movably coupled to the test tray 150, and the positioning device 153 disposed below the test tray 150 ascends to lift the fixing hole 152 of the insert 151. Inserting the positioning pin 154 into the pin 154 to accurately position the insert 151, and the guide walls 154 and 155 of the positioning device 153 tapered inwardly guide the device 156 to It is seated on the insert 151 correctly.

When the device is filled in the test tray 150 (①), the test tray 150 is vertically stood by the first tray inverting means (②) and supplied to the inner chamber 162 (③). The test tray 150 heated or cooled at a predetermined test temperature condition in the inner chamber 162 is finally supplied to the test chamber 163 aligned in a vertical row of two rows (④, ④ '). The test chamber 163 connects the test head 100 and the 128 devices in the supplied test tray 150 to perform a test (⑤, ⑤ '), and the test tray 150 in which the test is completed is returned to one row again. Aligned and supplied to the de-chamber chamber 164 (6, 6 '). Here, the test tray 150a discharged from the inner chamber 162 by the indexing mechanism 200 and the test tray 150b having been tested in the test chamber 163 are vertically arranged in two rows of guide bars 195. Simultaneously moved to the pusher 198 coupled to the moving shaft 196 and the moving means 197 to move to the test head 100 while pushing the tray 150a of the inner chamber 162, and the tested tray Discharge 150b.

In addition, the test tray 150 aligned in the two-row vertical arrangement proceeds in one of the upper and lower rows, that is, the first row according to the condition of the handler body 110, from the inner chamber 162 to the test chamber 163. In some cases, the test head 100 is moved to the test head 100.

The test tray 150 reduced near to room temperature while passing through the de-chamber chamber 164 is horizontally re-divided by the second tray reversing means 165 (⑦) and transferred to the unloading side tray alignment station 166. (⑧).

Thereafter, the first and second single axis robots 172 and 173 operate to classify the devices on the test tray 150 positioned in the tray alignment station 166 by the class according to the test result and transfer them to the sorter table 167. When the transfer of the device is completed, the empty test tray 150 is lowered and then moved to the loading side tray alignment station 160 through the lower end of the sorter table 167 (9, 9). Then, when the sorted devices temporarily stored in the sorter table 167 reach a predetermined quantity, the unloading Cartesian robot 174 operates so that the unloading side set plate by unit quantity, type, and grade ( The bin tray, which is located at 132, is transferred to the corresponding bin tray, and the bin tray full of devices is finally moved to the user tray shipping unit 122 by the transfer arm 140 and loaded. In addition, devices classified as defective according to various criteria are loaded in the multi stacking unit 123 in which a plurality of stacking units 129 are installed so as to store seven types of user trays 120a. That is, the plurality of mounting portions 129 are moved up and down by the motor driving portion 129a to load the sorted devices into the user tray 120a of the predefined loading portion 129.

However, by changing the program of the user, the stacking unit 129 can change its use.

This process is repeated until the inspection of one lot is completed. In the present invention, the test tray 150 is arranged in two vertical rows and transferred to the test chamber 163, where the two test trays 150 128 devices are connected to the test head 100 at the same time and tested.

In addition, in the present invention, since the unloading process of the device proceeds to two stages of sorting by the first and second single-axis robots 172 and 173 and loading by the unloading Cartesian robot 174, the conventional handler In comparison, the device unloading time can be significantly shortened.

Furthermore, the de-chamber chamber 164 is simply separated to the side of the handler body 110 by using the linear guide 202 at the bottom thereof, so that the maintenance of the electrical devices 201 can be easily performed, thereby greatly reducing the maintenance time. Can be.

According to the present invention as described above, the test trays are arranged in a vertical arrangement of two rows and simultaneously supplied to the test heads, and the two test trays supplied in this way are connected to the test heads at the same time so that the test can be performed per unit time. The quantity of devices that can be multiplied can thus increase the yield.

In addition, since the present invention is a vertical docking structure of the test head, since the test head is located outside the handler and connected to the device, there is no need to provide a space for the test head inside the handler as in the prior art. You can configure the handler more compactly. In addition, since the space in which the existing test head is located can be used as the space of the stocker on which the user tray is loaded, the size of the lot that can be run at one time can be increased by providing the auxiliary feeding part or the shipping part. In addition, it is possible to maximize the utilization rate of the equipment.

In addition, since the test head is located outside the main body of the handler, it can be used in combination with a wider variety of test heads by a simple method of changing the change kit, and so on. have.

In addition, the present invention shortens the device loading time since the hand of the Cartesian coordinate robot for the loader picks 16 devices in one operation, and the device needs to be presized in order to directly seat the device inside the insert. In addition, since the unloading process of the device is separated into a sorting part and an unloading part, the device unloading time can be significantly shortened.

Therefore, the number of devices which can be processed per unit time is increased, and there is an effect that the improvement in production can be achieved.

In addition, the present invention, since the pressing unit is retracted after the completion of the test by the test head, the discharge of the tested tray and the entry of a new tray is performed at the same time, so that the indexing time is significantly shortened to improve productivity.

In addition, the present invention can separate the de-chamber chamber to the side by using the linear guide under the de-chamber chamber for maintenance, it is easy to maintain the inside of the test chamber and check the wiring of the central portion of the main body.

In addition, the present invention can easily classify and store 11 or more types of devices without a separate device by using the built-in multi-loading unit.

Since the present invention can be variously modified by those skilled in the art without departing from the scope of the claims claimed in the claims, the technical protection scope of the present invention is limited to the specific preferred embodiments described above. It is not limited.

Claims (14)

The main circuit includes a stocker divided into a user tray supply unit in which a plurality of user trays containing a predetermined number of devices to be tested are loaded, and a user tray shipment unit in which a plurality of user trays containing devices classified by grades are loaded according to the test results. A test tray comprising a plurality of test trays arranged to move in the middle, a device loading means for moving a device from the user tray of the user tray supply unit to the test tray, and a device configured to be transported in a horizontal state in the main circuit; A first chamber inverting means for raising the tray vertically, an inner chamber for receiving a test tray vertically erected by the first tray inverting means and forming and discharging a desired test temperature condition while transferring to a predetermined step; Test the device exiting the chamber At least one test chamber for connecting to the test chamber to perform a test, a de-chamber for receiving a test tray discharged from the test chamber and reducing the temperature of the device while transferring the test tray to a predetermined step, and a state perpendicular to the de-chamber The second tray inverting means for laying the test trays discharged back to the horizontal state again and the devices on the test trays in the horizontal state by the second tray inverting means are classified into classes according to the test results to a plurality of bin trays. A test handler comprising a device unloading means for moving, The stocker is provided with an auxiliary supply part and an auxiliary delivery part under the user tray supply part and the user tray supply part, and when the user tray is exhausted in the user tray supply part disposed above, the user tray is automatically transferred to the user tray supply part. When the loading is completed, the user tray is completed, the user tray is lowered to the secondary shipping unit and shipped, and if necessary, the user tray can be inserted and discharged without stopping the main body. The device loading means is arranged above the user tray supply part and sequentially moves several loading side set plates on which the user tray for device loading is located, and the user tray in the user tray supply part to the loading side set plate. A first rectangular coordinate robot for transferring a device of a user tray or more to the test tray while continuously and repeatedly moving between a transfer arm, the loading side set plate and the loading side tray alignment station in which the test tray is located; and the test tray A positioning device inserted into the fixing hole of the insert, which is movably mounted in the insert, which guides the device when the device is inserted into the insert while fixing the insert, thereby positioning the device accurately on the insert. , The inner chamber is mounted on the guide bar mounted on the guide bar while the test tray is mounted on the guide bar disposed vertically in the upper and lower rows and moved to the test head while pushing the upper and lower test trays by pushers coupled to the moving shaft and the moving means. By the indexing mechanism for discharging the test tray, the test tray, which is vertically erected by the first tray inverting means, is aligned and discharged in a vertical two-row arrangement up and down, The test chamber connects the devices in the two test trays ejected from the inner chamber to the test head so that the devices in the two test trays are tested simultaneously in one test operation, The desequencing chamber receives the test trays discharged in two rows from the test chamber in one row and transfers the test trays to a predetermined step. delete delete delete delete delete The method of claim 1, wherein the transfer arm is The first sensor is attached to the upper side and the second sensor is attached to the upper surface, and descends quickly until the first sensor detects the position of the user tray approximately by the first sensor in the loading portion of the user tray supply unit. When the second sensor is slowly lowered when the second sensor installed on the upper surface accurately detects the user tray, after picking, the test handler, characterized in that for moving to the set plate. delete delete delete delete The method of claim 1, wherein the desorption chamber And a linear guide mounted at a lower end thereof, and a linear block mounted at the main body, in case of a failure, the linear handler of the main body rides out of the main body to facilitate maintenance. delete delete