[go: up one dir, main page]
More Web Proxy on the site http://driver.im/

TWI836205B - Installation method of light-emitting components and display device - Google Patents

Installation method of light-emitting components and display device Download PDF

Info

Publication number
TWI836205B
TWI836205B TW110111788A TW110111788A TWI836205B TW I836205 B TWI836205 B TW I836205B TW 110111788 A TW110111788 A TW 110111788A TW 110111788 A TW110111788 A TW 110111788A TW I836205 B TWI836205 B TW I836205B
Authority
TW
Taiwan
Prior art keywords
light
substrate
emitting element
terminal portion
array substrate
Prior art date
Application number
TW110111788A
Other languages
Chinese (zh)
Other versions
TW202205694A (en
Inventor
浅田圭介
Original Assignee
日商日本顯示器股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商日本顯示器股份有限公司 filed Critical 日商日本顯示器股份有限公司
Publication of TW202205694A publication Critical patent/TW202205694A/en
Application granted granted Critical
Publication of TWI836205B publication Critical patent/TWI836205B/en

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/15Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components having potential barriers, specially adapted for light emission
    • H01L27/153Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components having potential barriers, specially adapted for light emission in a repetitive configuration, e.g. LED bars
    • H01L27/156Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components having potential barriers, specially adapted for light emission in a repetitive configuration, e.g. LED bars two-dimensional arrays
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/48Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/48Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
    • H01L33/62Arrangements for conducting electric current to or from the semiconductor body, e.g. lead-frames, wire-bonds or solder balls
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2933/00Details relating to devices covered by the group H01L33/00 but not provided for in its subgroups
    • H01L2933/0008Processes
    • H01L2933/0033Processes relating to semiconductor body packages
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2933/00Details relating to devices covered by the group H01L33/00 but not provided for in its subgroups
    • H01L2933/0008Processes
    • H01L2933/0033Processes relating to semiconductor body packages
    • H01L2933/0066Processes relating to semiconductor body packages relating to arrangements for conducting electric current to or from the semiconductor body

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Led Device Packages (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Laser Beam Processing (AREA)

Abstract

本發明提供一種利用雷射剝離之發光元件之安裝方法及顯示裝置。 一實施形態之發光元件之安裝方法,係用於將設置於剝離用之藍寶石基板之一側之面之發光元件利用雷射剝離來剝離,並安裝於陣列基板之方法。該方法具備以下步驟:藉由密封件固定陣列基板與藍寶石基板;對陣列基板與藍寶石基板施加壓力而將藍寶石基板平坦化,且,固定陣列基板與藍寶石基板;自藍寶石基板側照射第1波長帯之第1雷射光,將陣列基板之第1端子部與發光元件之端子部接合;及自藍寶石基板側照射第2波長帯之第2雷射光,將發光元件自藍寶石基板剝離。The present invention provides a method for mounting a light-emitting element using laser peeling and a display device. A method for mounting a light-emitting element in one embodiment is used to peel off a light-emitting element disposed on one side of a sapphire substrate for peeling using laser peeling and to mount the light-emitting element on an array substrate. The method comprises the following steps: fixing the array substrate and the sapphire substrate by a sealing member; applying pressure to the array substrate and the sapphire substrate to flatten the sapphire substrate, and fixing the array substrate and the sapphire substrate; irradiating the first laser light of the first wavelength band from the side of the sapphire substrate to join the first terminal portion of the array substrate with the terminal portion of the light-emitting element; and irradiating the second laser light of the second wavelength band from the side of the sapphire substrate to peel the light-emitting element from the sapphire substrate.

Description

發光元件之安裝方法及顯示裝置Installation method of light-emitting components and display device

本發明之實施形態係關於一種發光元件之安裝方法及顯示裝置。Embodiments of the present invention relate to an installation method of a light-emitting element and a display device.

一般而言,已知一種使用作為自發光元件之發光二極體(LED:Light Emitting Diode)之LED顯示器,但近年來,作為更高精細化之顯示裝置,使用稱為微型LED之微小之二極體元件之顯示裝置(以下記作微型LED顯示器)正在開發中。Generally speaking, an LED display using a light emitting diode (LED) as a self-luminous element is known. However, in recent years, a display device using a tiny diode element called a micro LED (hereinafter referred to as a micro LED display) is being developed as a more sophisticated display device.

該微型LED顯示器不同於先前之液晶顯示器或有機EL(Electro Luminescence:電致發光)顯示器,其係於顯示區域安裝晶片狀之多個微型LED而形成,故容易使高精細化與大型化並存,作為下一代顯示器受到注目。This micro LED display is different from the previous liquid crystal display or organic EL (Electro Luminescence) display. It is formed by installing multiple chip-shaped micro LEDs in the display area. Therefore, it is easy to achieve high precision and large size at the same time, and it has attracted attention as the next generation of display.

作為於顯示區域安裝晶片狀之多個微型LED之方法,正在研究利用雷射剝離(LLO:Laser Lift Off)之方法。As a method of mounting a plurality of micro LEDs in a chip form on a display area, a method using laser lift off (LLO) is being studied.

本揭示之目的之一在於提供一種利用雷射剝離之微型LED之安裝方法及微型LED顯示器(發光元件之安裝方法及顯示裝置)。One of the purposes of this disclosure is to provide a method for mounting micro-LEDs using laser lift-off and a micro-LED display (a method for mounting light-emitting elements and a display device).

一實施形態之發光元件之安裝方法係用以藉由雷射剝離講設置於剝離用之藍寶石基板之一側之面之發光元件剝離,並安裝於陣列基板之方法。上述方法具備第1步驟、第2步驟、第3步驟及第4步驟。上述第1步驟進行形成於上述陣列基板之一側之面之第1端子部、與上述發光元件之端子部之對位,且,藉由密封件固定上述陣列基板與上述藍寶石基板。上述第2步驟對上述陣列基板與上述藍寶石基板施加壓力而將上述藍寶石基板平坦化,且,固定上述陣列基板與上述藍寶石基板。上述第3步驟對設置於上述陣列基板之第1端子部之上之接合構件,自上述藍寶石基板側照射第1波長帯之第1雷射光,將上述陣列基板之第1端子部與上述發光元件之端子部接合。上述第4步驟對上述發光元件,自上述藍寶石基板側照射與上述第1波長帯不同之第2波長帯之第2雷射光,將上述發光元件自上述藍寶石基板剝離。A method for mounting a light-emitting element in one embodiment is a method for removing the light-emitting element disposed on a surface of a side of a sapphire substrate for removal by laser stripping and mounting the light-emitting element on an array substrate. The method comprises a first step, a second step, a third step, and a fourth step. In the first step, a first terminal portion formed on a surface of a side of the array substrate and a terminal portion of the light-emitting element are aligned, and the array substrate and the sapphire substrate are fixed by a sealing member. In the second step, pressure is applied to the array substrate and the sapphire substrate to flatten the sapphire substrate, and the array substrate and the sapphire substrate are fixed. In the third step, the bonding member disposed on the first terminal portion of the array substrate is irradiated with the first laser light of the first wavelength band from the sapphire substrate side to bond the first terminal portion of the array substrate to the terminal portion of the light-emitting element. In the fourth step, the light-emitting element is irradiated with the second laser light of the second wavelength band different from the first wavelength band from the sapphire substrate side to peel the light-emitting element from the sapphire substrate.

一實施形態之顯示裝置具備第1基板與第2基板。上述第1基板具備陣列基板、形成於上述陣列基板之一側之面之第1端子部、及設置於上述陣列基板之一側之面且設置於俯視時不與上述第1端子部重疊之位置之密封件。上述第2基板具備藍寶石基板、與設置於上述藍寶石基板之一側之面之發光元件。上述第1基板與上述第2基板藉由上述密封件固定。A display device according to one embodiment includes a first substrate and a second substrate. The first substrate includes an array substrate, a first terminal portion formed on one side surface of the array substrate, and a position disposed on one side surface of the array substrate so as not to overlap with the first terminal portion in plan view. of seals. The second substrate includes a sapphire substrate and a light-emitting element provided on one side surface of the sapphire substrate. The first substrate and the second substrate are fixed by the sealing member.

一實施形態之顯示裝置具備陣列基板、設置於上述陣列基板之一側之面之發光元件、及形成於上述陣列基板之一側之面且形成於俯視時不與上述發光元件重疊之位置之端子部。於上述端子部之至少一部分,附著有用於將上述發光元件自藍寶石基板剝離之雷射剝離時熔化之密封件之殘渣。A display device in one embodiment includes an array substrate, a light emitting element disposed on a side surface of the array substrate, and a terminal portion formed on a side surface of the array substrate and formed at a position not overlapping the light emitting element when viewed from above. A residue of a sealing member melted during laser stripping for stripping the light emitting element from a sapphire substrate is attached to at least a portion of the terminal portion.

一面參照圖式一面說明若干實施形態。Several embodiments will be described with reference to the drawings.

另,揭示僅為一例,關於本領域技術人員就確保發明主旨之適當變更而可容易地想到者,當然包含於本發明之範圍內。又,圖式為更明確地說明,有較實施態樣模式性顯示之情形,但僅為一例,並非限定本發明之解釋者。又,本說明書與各圖中,有時對發揮與已出現之圖相關性敘述者相同或類似之功能之構成要件附加相同之參照符號,並省略重複之詳細說明。In addition, the disclosure is only an example, and those skilled in the art can easily think of appropriate modifications to ensure the gist of the invention, and these are naturally included in the scope of the present invention. In addition, the drawings are for clearer explanation and may schematically show embodiments, but they are only examples and are not intended to limit the interpretation of the present invention. In addition, in this specification and each drawing, the same reference numerals are sometimes attached to the constituent elements that perform the same or similar functions as those described in the figures that have already appeared, and repeated detailed descriptions are omitted.

圖1係概略性顯示一實施形態之顯示裝置1之構成之立體圖。圖1顯示由第1方向X、垂直於第1方向X之第2方向Y、及垂直於第1方向X及第2方向Y之第3方向Z定義之三維空間。另,第1方向X及第2方向Y彼此正交,但亦可以90度以外之角度交叉。本說明書中,將自與第3方向Z平行之方向觀察顯示裝置1稱為俯視。FIG. 1 is a three-dimensional diagram schematically showing the structure of a display device 1 in an embodiment. FIG. 1 shows a three-dimensional space defined by a first direction X, a second direction Y perpendicular to the first direction X, and a third direction Z perpendicular to the first direction X and the second direction Y. In addition, the first direction X and the second direction Y are orthogonal to each other, but may also intersect at an angle other than 90 degrees. In this specification, viewing the display device 1 from a direction parallel to the third direction Z is referred to as a top view.

以下,於本實施形態中,主要說明顯示裝置1為使用作為自發光元件之微型LED之微型LED顯示器之情形。Hereinafter, in the present embodiment, the case where the display device 1 is a micro LED display using micro LEDs as self-luminous elements will be mainly described.

如圖1所示,顯示裝置1具備顯示面板2、第1電路基板3及第2電路基板4等。As shown in FIG. 1 , a display device 1 includes a display panel 2 , a first circuit board 3 , a second circuit board 4 , and the like.

顯示面板2於一例中為矩形狀。圖示之例中,顯示面板2之短邊EX與第1方向X平行,顯示面板2之長邊EY與第2方向平行。第3方向Z相當於顯示面板2之厚度方向。亦可將第1方向X改稱為與顯示裝置1之短邊平行之方向,將第2方向Y改稱為與顯示裝置1之長邊平行之方向,將第3方向Z改稱為顯示裝置1之厚度方向。顯示面板2之主面與由第1方向X與第2方向Y定義之X-Y平面平行。顯示面板2具有顯示區域DA(顯示部)、與該顯示區域DA之外側之非顯示區域NDA(非顯示部)。非顯示區域NDA具有端子區域MT。圖示之例中,非顯示區域NDA包圍顯示區域DA。The display panel 2 is rectangular in one example. In the illustrated example, the short side EX of the display panel 2 is parallel to the first direction X, and the long side EY of the display panel 2 is parallel to the second direction. The third direction Z is equivalent to the thickness direction of the display panel 2. The first direction X may be renamed as a direction parallel to the short side of the display device 1, the second direction Y may be renamed as a direction parallel to the long side of the display device 1, and the third direction Z may be renamed as a thickness direction of the display device 1. The main surface of the display panel 2 is parallel to the X-Y plane defined by the first direction X and the second direction Y. The display panel 2 has a display area DA (display portion) and a non-display area NDA (non-display portion) outside the display area DA. The non-display area NDA has a terminal area MT. In the illustrated example, the non-display area NDA surrounds the display area DA.

顯示區域DA為顯示圖像之區域,具備例如以矩陣狀配置之複數個像素PX。像素PX包含發光元件(微型LED)及用以驅動該發光元件之開關元件(驅動電晶體)等。The display area DA is a region for displaying images, and has a plurality of pixels PX arranged in a matrix, for example. The pixels PX include a light-emitting element (micro LED) and a switch element (driving transistor) for driving the light-emitting element.

端子區域MT沿顯示面板2之短邊EX設置,且包含用以將顯示面板2與外部裝置等電性連接之端子。The terminal region MT is disposed along the short side EX of the display panel 2 and includes terminals for electrically connecting the display panel 2 to external devices or the like.

第1電路基板3安裝於端子區域MT上,與顯示面板2電性連接。第1電路基板3例如為可撓性印刷電路基板(Flexible Printed Circuit Board)。第1電路基板3具備驅動顯示面板2之驅動IC晶片(以下記作面板驅動器)5等。另,圖示之例中,面板驅動器5配置於第1電路基板3上,但亦可配置於第1電路基板3下。或,面板驅動器5亦可安裝於第1電路基板3以外。該情形時,面板驅動器5可安裝於顯示面板2之非顯示區域NDA,亦可安裝於第2電路基板4。第2電路基板4例如為剛性印刷電路基板。第2電路基板4例如於第1電路基板3之下方與該第1電路基板3連接。The first circuit substrate 3 is mounted on the terminal area MT and is electrically connected to the display panel 2. The first circuit substrate 3 is, for example, a flexible printed circuit board (Flexible Printed Circuit Board). The first circuit substrate 3 has a driver IC chip (hereinafter referred to as a panel driver) 5 for driving the display panel 2. In addition, in the example shown in the figure, the panel driver 5 is arranged on the first circuit substrate 3, but it can also be arranged under the first circuit substrate 3. Or, the panel driver 5 can also be mounted outside the first circuit substrate 3. In this case, the panel driver 5 can be mounted on the non-display area NDA of the display panel 2, and can also be mounted on the second circuit substrate 4. The second circuit substrate 4 is, for example, a rigid printed circuit substrate. The second circuit substrate 4 is connected to the first circuit substrate 3, for example, below the first circuit substrate 3.

面板驅動器5例如經由第2電路基板4與未圖示之控制基板連接。面板驅動器5例如藉由基於自控制基板輸出之影像信號驅動複數個像素PX,而執行將圖像顯示於顯示面板2之控制。The panel driver 5 is connected to a control substrate (not shown) via the second circuit substrate 4, for example. The panel driver 5 controls the display panel 2 to display an image by driving a plurality of pixels PX based on an image signal output from the control substrate, for example.

另,顯示面板2亦可具有附加斜線顯示之彎折區域BA。彎折區域BA為將顯示裝置1收納於電子機器等之框體時彎折之區域。彎折區域BA位於非顯示區域NDA中之端子區域MT側。於彎折區域BA被彎折之狀態下,第1電路基板3及第2電路基板4以與顯示面板2對向之方式配置。In addition, the display panel 2 may also have a bending area BA with an additional diagonal line display. The bending area BA is an area that is bent when the display device 1 is accommodated in a housing of an electronic device or the like. The bending area BA is located on the terminal area MT side of the non-display area NDA. In a state where the bending area BA is bent, the first circuit board 3 and the second circuit board 4 are arranged to face the display panel 2 .

以下說明對上述顯示面板2安裝發光元件之方法。更詳細而言,說明藉由雷射剝離(LLO)將發光元件LED自圖3所示之第2基板SUB2剝離,並安裝於圖2所示之第1基板SUB1之方法。首先,參照圖2及圖3,說明安裝發光元件LED之第1基板SUB1、與剝離用之第2基板SUB2之構成。The method of installing light-emitting elements on the above-mentioned display panel 2 will be described below. More specifically, the method of peeling off the light-emitting element LED from the second substrate SUB2 shown in FIG. 3 by laser lift-off (LLO) and mounting it on the first substrate SUB1 shown in FIG. 2 is explained. First, the structure of the first substrate SUB1 on which the light-emitting element LED is mounted and the second substrate SUB2 for peeling is explained with reference to FIGS. 2 and 3 .

圖2係概略性顯示第1基板SUB1之構成之剖視圖。FIG. 2 is a cross-sectional view schematically showing the structure of the first substrate SUB1.

如圖2所示,第1基板SUB1具備陣列基板10、複數個第1端子部11、接合構件12、複數個第2端子部13及密封件14等。As shown in FIG. 2 , the first substrate SUB1 includes an array substrate 10 , a plurality of first terminal portions 11 , a bonding member 12 , a plurality of second terminal portions 13 , a sealing material 14 , and the like.

陣列基板10包含第1主面10A、與位於第1主面10A之相反側之第2主面10B。圖示之例中予以省略,但於陣列基板10形成有用以驅動發光元件LED之開關元件或各種配線圖案。陣列基板10亦可稱為背板。The array substrate 10 includes a first main surface 10A and a second main surface 10B located on the opposite side of the first main surface 10A. Although omitted in the illustrated example, switch elements and various wiring patterns for driving the light-emitting elements LED are formed on the array substrate 10. The array substrate 10 can also be called a backplane.

複數個第1端子部11形成於陣列基板10之第1主面10A。第1端子部11例如形成有與安裝於顯示裝置1之發光元件LED相同之數量。第1端子部11例如以Al(鋁)、Ti(鈦)、Mo(鉬)、W(鎢)等金屬材料及該等金屬材料之積層體形成。第1端子部11亦可稱為第1焊墊或安裝電極。於各第1端子部11上分別配置有接合構件12。A plurality of first terminal portions 11 are formed on the first main surface 10A of the array substrate 10 . For example, the first terminal portion 11 is formed with the same number as the light emitting elements LED mounted on the display device 1 . The first terminal portion 11 is formed of, for example, a metal material such as Al (aluminum), Ti (titanium), Mo (molybdenum), or W (tungsten), or a laminate of these metal materials. The first terminal portion 11 may also be called a first bonding pad or a mounting electrode. A joining member 12 is arranged on each first terminal portion 11 .

接合構件12為用以將第1端子部11、與後述之發光元件LED之端子部22接合之構件。細節將於後述,接合構件12係以被400 nm~3000 nm之波長帶之雷射光照射時利用雷射燒蝕而加熱、熔融之金屬材料形成,例如以Sn(錫)、Ag(銀)等金屬材料形成。接合構件12亦可稱為焊料構件。又,本實施形態中,接合構件12係設置於陣列基板10之第1端子部11,但亦可設置於發光元件LED之端子部22。The bonding member 12 is a member for bonding the first terminal portion 11 to the terminal portion 22 of the light-emitting element LED described later. The details will be described later. The bonding member 12 is formed of a metal material that is heated and melted by laser ablation when irradiated with laser light in a wavelength band of 400 nm to 3000 nm, for example, it is formed of a metal material such as Sn (tin) and Ag (silver). The bonding member 12 can also be called a solder member. In addition, in the present embodiment, the bonding member 12 is provided at the first terminal portion 11 of the array substrate 10, but it can also be provided at the terminal portion 22 of the light-emitting element LED.

複數個第2端子部13形成於陣列基板10之第1主面10A。第2端子部13形成於俯視時不與第1端子部11重疊之位置,例如以包圍設置於顯示裝置1之複數個發光元件LED之方式形成。例如,第2端子部13形成於非顯示區域NDA。第2端子部13具有寬度W1而形成。寬度W1例如設定於0.1 mm~0.5 mm。第2端子部13不與形成於陣列基板10之各種配線圖案等電性連接。但,第2端子部13亦可為於非顯示區域NDA以包圍複數個發光元件LED之方式形成,且與形成於陣列基板10之各種配線圖案電性連接者。細節將於後述,第2端子部13係以藉由用於自後述之藍寶石基板20剝離發光元件LED而照射之雷射光來產生雷射燒蝕之金屬材料形成,例如以Al(鋁)等金屬材料形成。第2端子部13亦可稱為第2焊墊或金屬部或金屬配線等。於各第2端子部13上,以覆蓋第2端子部13之方式分別配置有密封件14。A plurality of second terminal portions 13 are formed on the first main surface 10A of the array substrate 10 . The second terminal portion 13 is formed at a position not overlapping the first terminal portion 11 in a plan view, and is formed, for example, to surround a plurality of light emitting elements LED provided in the display device 1 . For example, the second terminal portion 13 is formed in the non-display area NDA. The second terminal portion 13 is formed to have a width W1. The width W1 is set to 0.1 mm~0.5 mm, for example. The second terminal portion 13 is not electrically connected to various wiring patterns formed on the array substrate 10 . However, the second terminal portion 13 may also be formed in the non-display area NDA to surround a plurality of light-emitting elements LED, and may be electrically connected to various wiring patterns formed on the array substrate 10 . Details will be described later. The second terminal portion 13 is formed of a metal material that causes laser ablation by laser light used to peel off the light-emitting element LED from the sapphire substrate 20 described below. For example, it is made of a metal such as Al (aluminum). Material formation. The second terminal portion 13 may also be called a second bonding pad, a metal portion, a metal wiring, or the like. A seal 14 is disposed on each second terminal portion 13 so as to cover the second terminal portion 13 .

密封件14為用於固定第1基板SUB1與第2基板SUB2之構件。密封件14以讓對第2端子部13照射之雷射光穿透之材料形成。The sealing member 14 is a member for fixing the first substrate SUB1 and the second substrate SUB2. The sealing member 14 is formed of a material that allows the laser light irradiated to the second terminal portion 13 to pass through.

密封件14與第2端子部13亦可為例如以包圍第1基板SUB1之顯示區域DA之整周之方式沿2個短邊EX及2個長邊形成於非顯示區域NDA者。又,密封件14與第2端子部13亦可為僅沿第1基板SUB1之2個短邊EX形成者,又亦可為僅沿2個長邊EY形成者。再者,密封件14與第2端子部13亦可為於非顯示區域於點狀配置複數個,且以固定第1基板SUB1與第2基板SUB2之方式形成者。For example, the sealing member 14 and the second terminal portion 13 may be formed in the non-display area NDA along the two short sides EX and the two long sides so as to surround the entire circumference of the display area DA of the first substrate SUB1. In addition, the sealing member 14 and the second terminal portion 13 may be formed along only the two short sides EX of the first substrate SUB1, or may be formed along only the two long sides EY. Furthermore, a plurality of the sealing members 14 and the second terminal portion 13 may be arranged in a dot shape in the non-display area, and may be formed to fix the first substrate SUB1 and the second substrate SUB2.

圖3係概略性顯示第2基板SUB2之構成之剖視圖。FIG. 3 is a cross-sectional view schematically showing the structure of the second substrate SUB2.

如圖3所示,第2基板SUB2具備藍寶石基板20、與複數個發光元件LED等。發光元件LED包含發光層21與端子部22。As shown in FIG. 3 , the second substrate SUB2 includes a sapphire substrate 20, a plurality of light emitting elements LED, and the like. The light-emitting element LED includes a light-emitting layer 21 and a terminal portion 22 .

剝離用之藍寶石基板20包含第1主面20A、及位於第1主面20A之相反側之第2主面20B。複數個發光元件LED係配置於藍寶石基板20之第1主面20A。複數個發光元件LED包含具有紅色(R)、綠色(G)、藍色(B)之發光色者。The sapphire substrate 20 for peeling includes a first main surface 20A and a second main surface 20B located on the opposite side of the first main surface 20A. A plurality of light emitting elements LED are arranged on the first main surface 20A of the sapphire substrate 20 . The plurality of light-emitting elements LED include those having light-emitting colors of red (R), green (G), and blue (B).

發光層21介隔未圖示之剝離層固定於藍寶石基板20之第1主面20A。發光層21放出R、G、B之光。於發光層21之上配置有端子部22。端子部22藉由配置於第1基板SUB1側之接合構件12接合於第1端子部11。據此,發光元件LED之端子部22與第1端子部11電性連接。端子部22相當於發光元件LED之陽極端子或陰極端子。端子部22亦可稱為凸塊。The light-emitting layer 21 is fixed to the first main surface 20A of the sapphire substrate 20 via a peeling layer not shown in the figure. The light-emitting layer 21 emits R, G, and B light. A terminal portion 22 is arranged on the light-emitting layer 21. The terminal portion 22 is connected to the first terminal portion 11 by a bonding member 12 arranged on the side of the first substrate SUB1. Accordingly, the terminal portion 22 of the light-emitting element LED is electrically connected to the first terminal portion 11. The terminal portion 22 is equivalent to the anode terminal or the cathode terminal of the light-emitting element LED. The terminal portion 22 can also be called a bump.

圖4~圖8係依序顯示發光元件LED之安裝步驟之一例之概略性剖視圖。FIG. 4 to FIG. 8 are schematic cross-sectional views showing an example of the installation steps of the light-emitting element LED in sequence.

首先,進行對位步驟(第1步驟)。具體而言,如圖4所示,以陣列基板10之第1主面10A與藍寶石基板20之第1主面20A對向之方式,使於陣列基板10上配置有複數個第1端子部11、接合構件12、複數個第2端子部13及密封件14之狀態之第1基板SUB1、與於藍寶石基板20上配置有複數個發光元件LED之狀態之第2基板SUB2對向。而且,進行第1基板SUB1之複數個第1端子部11、與第2基板SUB2之複數個發光元件LED之端子部22之對位。又,藉由密封件14固定第1基板SUB1與第2基板SUB2。First, an alignment step (step 1) is performed. Specifically, as shown in FIG. 4 , the first substrate SUB1 on which a plurality of first terminal portions 11, a bonding member 12, a plurality of second terminal portions 13, and a sealing member 14 are arranged on the array substrate 10 is opposed to the second substrate SUB2 on which a plurality of light-emitting elements LED are arranged on the sapphire substrate 20 in such a manner that the first principal surface 10A of the array substrate 10 faces the first principal surface 20A of the sapphire substrate 20. Furthermore, the plurality of first terminal portions 11 of the first substrate SUB1 and the terminal portions 22 of the plurality of light-emitting elements LED of the second substrate SUB2 are aligned. Furthermore, the first substrate SUB1 and the second substrate SUB2 are fixed by the sealing member 14.

另,圖4中,由於假定於第2基板SUB2之藍寶石基板20未產生翹曲之情形,故於該階段,俯視時第1基板SUB1之複數個第1端子部11、與第2基板SUB2之複數個發光元件LED之端子部22重疊,但於該階段,俯視時第1基板SUB1之複數個第1端子部11、與第2基板SUB2之複數個發光元件LED之端子部22亦可不重疊。該階段中,於後述之固定步驟結束之階段,進行用以使第1基板SUB1之複數個第1端子部11、與第2基板SUB2之複數個發光元件LED之端子部22於俯視時重疊之對位。In addition, in FIG. 4, since it is assumed that the sapphire substrate 20 of the second substrate SUB2 does not warp, in this stage, the plurality of first terminal portions 11 of the first substrate SUB1 and the plurality of terminal portions 22 of the light-emitting element LED of the second substrate SUB2 overlap in a plan view, but in this stage, the plurality of first terminal portions 11 of the first substrate SUB1 and the plurality of terminal portions 22 of the light-emitting element LED of the second substrate SUB2 may not overlap in a plan view. In this stage, at the stage where the fixing step described later is completed, alignment is performed so that the plurality of first terminal portions 11 of the first substrate SUB1 and the plurality of terminal portions 22 of the light-emitting element LED of the second substrate SUB2 overlap in a plan view.

接著,進行固定步驟(第2步驟)。具體而言,如圖5所示,於第1基板SUB1之陣列基板10之第2主面10B側依序配置緩衝材料30與固定構件40,於第2基板SUB2之藍寶石基板20之第2主面20B側配置固定構件50。而且,以夾住第1基板SUB1與第2基板SUB2之方式自上下施加壓力(即,將各固定構件40及50彼此向反方向按壓而施加壓力),進行藍寶石基板20所產生之翹曲之平坦化。據此,第1基板SUB1與第2基板SUB2於藍寶石基板20所產生之翹曲被平坦化之狀態,且,俯視時第1基板SUB1之複數個第1端子部11與第2基板SUB2之複數個發光元件LED之端子部22重疊之狀態下被固定。又,於固定步驟中,第1基板SUB1與第2基板SUB2之間隙係藉由密封件14或發光元件LED保持,但亦可藉由於第1基板SUB1或第2基板SUB2設置間隔物(未圖示),而保持第1基板SUB1與第2基板SUB2之間隙。Next, a fixation step (second step) is performed. Specifically, as shown in FIG. 5 , the buffer material 30 and the fixing member 40 are sequentially arranged on the second main surface 10B side of the array substrate 10 of the first substrate SUB1 , and are placed on the second main surface of the sapphire substrate 20 of the second substrate SUB2 . The fixing member 50 is arranged on the surface 20B side. Furthermore, pressure is applied from above and below to sandwich the first substrate SUB1 and the second substrate SUB2 (that is, the fixing members 40 and 50 are pressed in opposite directions to each other to apply pressure), and the warpage caused by the sapphire substrate 20 is controlled. flattened. Accordingly, the first substrate SUB1 and the second substrate SUB2 are in a state where the warpage caused by the sapphire substrate 20 is flattened, and the plurality of first terminal portions 11 of the first substrate SUB1 and the plurality of the second substrate SUB2 are viewed from above. The terminal portions 22 of the two light-emitting elements LED are fixed in a state where they overlap. In addition, in the fixing step, the gap between the first substrate SUB1 and the second substrate SUB2 is maintained by the sealing member 14 or the light-emitting element LED, but a spacer may also be provided on the first substrate SUB1 or the second substrate SUB2 (not shown). shown), while maintaining the gap between the first substrate SUB1 and the second substrate SUB2.

固定構件50係以讓後述之接合步驟中照射之雷射光穿透,且具有施加壓力時不會彎曲之程度之剛性的材料形成,例如以石英玻璃形成。固定構件40係以具有施加壓力時不會彎曲之程度之剛性的材料形成,例如可與固定構件50同樣以石英玻璃形成,亦可以與固定構件50不同之材料形成。The fixing member 50 is made of a material that allows the laser light irradiated in the bonding step described later to pass through and has a rigidity that does not bend when pressure is applied, such as quartz glass. The fixing member 40 is made of a material that has a rigidity that does not bend when pressure is applied, such as quartz glass like the fixing member 50, or can be made of a material different from the fixing member 50.

如上述,藉由於第1基板SUB1與固定構件40之間配置緩衝材料30,而抑制因用以夾住第1基板SUB1與第2基板SUB2之壓力引起之陣列基板10之破損。又,由於藉由密封件14固定第1基板SUB1與第2基板SUB2,故抑制施加壓力時一者之基板滑動等而可能產生之位置偏移。As described above, by arranging the buffer material 30 between the first substrate SUB1 and the fixing member 40, damage to the array substrate 10 caused by the pressure for clamping the first substrate SUB1 and the second substrate SUB2 is suppressed. In addition, since the first substrate SUB1 and the second substrate SUB2 are fixed by the sealing member 14, positional deviation that may occur due to the sliding of one substrate when pressure is applied is suppressed.

接著,進行接合步驟(第3步驟)。具體而言,如圖6所示,自固定構件50側向接合構件12照射400 nm~3000 nm之波長帯之雷射光LZ1,藉由雷射燒蝕使接合構件12加熱、熔融,藉此將第1基板SUB1之複數個第1端子部11、與第2基板SUB2之複數個發光元件LED之端子部22接合。於該接合步驟結束之階段,可將緩衝材料30、固定構件40及固定構件50去除,亦可不於該階段去除。本實施形態中,由於假定使結束接合步驟之狀態之第1基板SUB1及第2基板SUB2移動至載台之後,進行下一步驟之情形,故緩衝材料30、固定構件40及固定構件50於接合步驟結束之階段被去除。Next, a bonding step (third step) is performed. Specifically, as shown in FIG. 6 , laser light LZ1 with a wavelength range of 400 nm to 3000 nm is irradiated from the side of the fixing member 50 to the joining member 12 to heat and melt the joining member 12 by laser ablation, whereby the joining member 12 is heated and melted. The plurality of first terminal portions 11 of the first substrate SUB1 are joined to the plurality of terminal portions 22 of the light-emitting elements LED of the second substrate SUB2. At the end of the joining step, the cushioning material 30, the fixing member 40 and the fixing member 50 may or may not be removed at this stage. In this embodiment, since it is assumed that the first substrate SUB1 and the second substrate SUB2 that have completed the bonding step are moved to the stage and then the next step is performed, the buffer material 30 , the fixing member 40 and the fixing member 50 are placed in the bonding stage. The stage at the end of the step is removed.

然後,進行LLO步驟(第4步驟)。具體而言,如圖7所示,自藍寶石基板20側向複數個發光元件LED及複數個第2端子部13照射200 nm~366 nm之波長帯之雷射光LZ2。據此,藉由雷射燒蝕升華將複數個發光元件LED固定於藍寶石基板20之未圖示之剝離層,自藍寶石基板20剝離複數個發光元件LED。又,當藉由雷射燒蝕加熱複數個第2端子部13時,該熱分別傳導至覆蓋各第2端子部13之密封件14,密封件14被熔化去除。Then, the LLO step (step 4) is performed. Specifically, as shown in FIG. 7 , laser light LZ2 in a wavelength band of 200 nm to 366 nm is irradiated from the side of the sapphire substrate 20 toward the plurality of light-emitting element LEDs and the plurality of second terminal portions 13. Accordingly, the plurality of light-emitting element LEDs are fixed to the unillustrated peeling layer of the sapphire substrate 20 by laser ablation sublimation, and the plurality of light-emitting element LEDs are peeled off from the sapphire substrate 20. Furthermore, when the plurality of second terminal portions 13 are heated by laser ablation, the heat is respectively conducted to the sealing member 14 covering each second terminal portion 13, and the sealing member 14 is melted and removed.

藉由進行圖4~圖7所示之一系列安裝步驟,藍寶石基板20被剝離,如圖8所示,將複數個發光元件LED安裝於第1基板SUB1(陣列基板10)上。By performing a series of mounting steps shown in FIG. 4 to FIG. 7 , the sapphire substrate 20 is peeled off, and as shown in FIG. 8 , a plurality of light-emitting elements LED are mounted on the first substrate SUB1 (array substrate 10 ).

如自以上說明之一系列安裝步驟可知,第2端子部13於上述固定步驟中,係為了藉由雷射燒蝕將為了抑制對第1基板SUB1與第2基板SUB2施加壓力時一者之基板滑動等而可能產生之位置偏移而配置之密封件14熔化而形成。因此,一系列安裝步驟結束以後,第2端子部13基本成為對顯示面板2無用之構成,但例如,亦可於一系列安裝步驟以後作為用於對陣列基板10安裝第1電路基板3或第2電路基板4、面板驅動器5時之對位之對準標記進行利用。As can be seen from the series of mounting steps described above, in the above-mentioned fixing step, the second terminal portion 13 is used to suppress one of the substrates from applying pressure to the first substrate SUB1 and the second substrate SUB2 by laser ablation. The seal 14 is formed by melting and disposing the seal 14 due to positional deviation that may occur due to sliding or the like. Therefore, after a series of mounting steps, the second terminal portion 13 basically becomes a useless structure for the display panel 2. However, for example, it can also be used for mounting the first circuit board 3 or the first circuit board 3 to the array substrate 10 after a series of mounting steps. 2. Use the alignment marks to align the circuit board 4 and panel driver 5.

本實施形態之發光元件LED可如圖9(A)所示,為於發光層21之一側之面並排配置陽極端子22AN、與陰極端子22CA之微型LED,亦可如圖9(B)所示,為於發光層21之一側之面配置陽極端子22AN,於發光層21之另一側之面配置陰極端子CA之微型LED。發光元件LED為圖9(A)所示之形態之微型LED之情形,第1端子部11與發光元件LED數量不相同,與陽極端子22AN與陰極端子22CA數量相同地形成於陣列基板10上。另,關於與一個發光元件LED對應之第1端子部11,與陽極端子22AN接合之第1端子部11、與陰極端子22CA接合之第1端子部11以特定之間隔離開而形成。發光元件LED無論是圖9(A)所示之形態之微型LED,還是圖9(B)所示之形態之微型LED,均可藉由上述一系列安裝步驟,安裝於第1基板SUB1(陣列基板10)上。The light-emitting element LED of this embodiment can be a micro-LED with an anode terminal 22AN and a cathode terminal 22CA arranged side by side on one side of the light-emitting layer 21 as shown in FIG9(A), or can be a micro-LED with an anode terminal 22AN arranged on one side of the light-emitting layer 21 and a cathode terminal CA arranged on the other side of the light-emitting layer 21 as shown in FIG9(B). In the case of the light-emitting element LED being a micro-LED of the form shown in FIG9(A), the number of the first terminal portion 11 is different from that of the light-emitting element LED, and the number of the anode terminal 22AN and the cathode terminal 22CA is the same as that formed on the array substrate 10. In addition, regarding the first terminal portion 11 corresponding to one light-emitting element LED, the first terminal portion 11 connected to the anode terminal 22AN and the first terminal portion 11 connected to the cathode terminal 22CA are formed at a specific interval. The light-emitting element LED can be mounted on the first substrate SUB1 (array substrate 10) through the above series of mounting steps, regardless of whether it is a micro LED in the form shown in FIG. 9 (A) or a micro LED in the form shown in FIG. 9 (B).

圖8中例示有將以覆蓋複數個第2端子部13之方式配置之密封件14藉由上述LLO步驟完全去除之情形,但實際上,預測密封件14並未完全熔化,而如圖10(A)所示,一部分作為殘渣附著於第2端子部13而殘留。然而,如上述,於一系列安裝步驟結束以後,由於第2端子部13基本為對顯示面板2無用之構成,故即使密封件14之一部分作為殘渣附著於第2端子部13而殘留仍無特別問題。又,由於第2端子部13例如配置於非顯示區域NDA,故自顯示品質之觀點等來看,即使密封件14之一部分作為殘渣附著於第2端子部13而殘留仍無特別問題。但,第2端子部13如圖10(B)所示,亦可與作為殘渣附著之密封件14一起被切割。FIG8 illustrates a case where the sealing member 14 arranged to cover a plurality of second terminal portions 13 is completely removed by the above-mentioned LLO step, but in reality, it is estimated that the sealing member 14 is not completely melted, and as shown in FIG10(A), a portion of it remains as residue attached to the second terminal portion 13. However, as described above, after a series of mounting steps are completed, since the second terminal portion 13 is basically a useless structure for the display panel 2, there is no particular problem even if a portion of the sealing member 14 remains as residue attached to the second terminal portion 13. In addition, since the second terminal portion 13 is arranged in the non-display area NDA, for example, from the viewpoint of display quality, there is no particular problem even if a portion of the sealing member 14 remains as residue attached to the second terminal portion 13. However, as shown in FIG. 10(B) , the second terminal portion 13 may be cut together with the sealing member 14 attached as residue.

本實施形態中,假定將第2端子部13形成於陣列基板10上之情形,但不限定於此,例如如圖11所示,第2端子部13亦可形成於藍寶石基板20上。該情形時,亦可藉由上述一系列安裝步驟,將發光元件LED安裝於第1基板SUB1(陣列基板10)上,且,由於在LLO步驟之階段,將第2端子部13藉由雷射燒蝕來加熱,故亦可去除以覆蓋該第2端子部13之方式而配置之密封件14。In the present embodiment, it is assumed that the second terminal portion 13 is formed on the array substrate 10, but the present invention is not limited thereto. For example, as shown in FIG. 11 , the second terminal portion 13 may be formed on a sapphire substrate 20. In this case, the light emitting element LED may be mounted on the first substrate SUB1 (array substrate 10) through the above-mentioned series of mounting steps, and since the second terminal portion 13 is heated by laser ablation in the LLO step, the sealing member 14 arranged so as to cover the second terminal portion 13 may be removed.

以上所說明之一實施形態中,以夾住安裝發光元件LED之第1基板SUB1與剝離用之第2基板SUB2之方式施加壓力,來固定第1基板SUB1與第2基板SUB2。因此,即使於第2基板SUB2(藍寶石基板20)產生翹曲,亦可將該翹曲平坦化,將第1基板SUB1與第2基板SUB2無間隙地固定。又,由於對第1基板SUB1在抵接緩衝材料30後施加壓力,故可抑制因該壓力造成第1基板SUB1之陣列基板10破損。In one of the embodiments described above, the first substrate SUB1 and the second substrate SUB2 are fixed by applying pressure so as to sandwich the first substrate SUB1 on which the light-emitting element LED is mounted and the second substrate SUB2 for peeling. Therefore, even if warpage occurs in the second substrate SUB2 (sapphire substrate 20 ), the warpage can be flattened, and the first substrate SUB1 and the second substrate SUB2 can be fixed without gaps. In addition, since pressure is applied to the first substrate SUB1 after contacting the buffer material 30, damage to the array substrate 10 of the first substrate SUB1 caused by the pressure can be suppressed.

又,以上所說明之一實施形態中,於將安裝有發光元件LED之第1基板SUB1與剝離用之第2基板SUB2藉由密封件14固定後,以夾住第1基板SUB1與第2基板SUB2之方式施加壓力,故可抑制施加壓力時一者之基板滑動等而可能產生之位置偏移。再者,藉由形成由密封件14覆蓋、且利用於LLO步驟時照射之雷射光LZ2來產生雷射燒蝕之第2端子部13,而可於自第2基板SUB2剝離發光元件LED之LLO步驟時去除密封件14。換言之,無須增加僅用於去除密封件14之獨立之步驟,便可實現該密封件14之去除。Furthermore, in one of the embodiments described above, after the first substrate SUB1 on which the light-emitting element LED is mounted and the second substrate SUB2 for peeling are fixed by the sealing member 14, pressure is applied in a manner of clamping the first substrate SUB1 and the second substrate SUB2, so that positional deviation that may occur due to the sliding of one substrate when the pressure is applied can be suppressed. Furthermore, by forming the second terminal portion 13 covered by the sealing member 14 and laser-etched by the laser light LZ2 irradiated during the LLO step, the sealing member 14 can be removed during the LLO step of peeling the light-emitting element LED from the second substrate SUB2. In other words, the sealing member 14 can be removed without adding an independent step for removing the sealing member 14.

根據以上所說明之一實施形態,可提供一種利用雷射剝離之微型LED之安裝方法及微型LED顯示器(發光元件之安裝方法及顯示裝置)。According to one of the embodiments described above, a method for mounting micro-LEDs and a micro-LED display (a method for mounting light-emitting elements and a display device) using laser lift-off can be provided.

以上說明了本發明之若干實施形態,但該等實施形態係作為例示而提出者,無意限定發明之範圍。該等新穎之實施形態可以其他各種形態實施,可於不脫離發明主旨之範圍內進行各種省略、置換、變更。該等實施形態或其變化係包含於發明之範圍或主旨,且同時包含於與申請專利範圍所記載之發明均等之範圍。The above describes several embodiments of the present invention, but these embodiments are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, substitutions, and changes can be made without departing from the scope of the invention. These embodiments or their variations are included in the scope or subject matter of the invention, and are also included in the scope of the invention described in the patent application.

本申請案以日本專利申請案2020-067627(申請日:4/3/2020)為基礎,自該申請案享受優先之利益。本申請案藉由參照該申請案,而包含該申請案之全部內容。This application is based on Japanese Patent Application No. 2020-067627 (filing date: 4/3/2020) and takes advantage of the priority of that application. This application incorporates all the contents of that application by reference.

1:顯示裝置 2:顯示面板 3:第1電路基板 4:第2電路基板 5:面板驅動器 10:陣列基板 10A:第1主面 10B:第2主面 11:第1端子部 12:接合構件 13:第2端子部 14:密封件 20:藍寶石基板 20A:第1主面 20B:第2主面 21:發光層 22:端子部 22AN:陽極端子 22CA:陰極端子 30:緩衝材料 40:固定構件 50:固定構件 BA:彎折區域 CA:陰極端子 DA:顯示區域 EX:短邊 EY:長邊 LED:發光元件 LZ1:雷射光 LZ2:雷射光 MT:端子區域 NDA:非顯示區域 PX:像素 SUB1:第1基板 SUB2:第2基板 W1:寬度1:Display device 2:Display panel 3: 1st circuit board 4: 2nd circuit board 5: Panel driver 10:Array substrate 10A: 1st main surface 10B: 2nd main side 11: 1st terminal part 12:joint components 13: 2nd terminal part 14:Seals 20: Sapphire substrate 20A: 1st main surface 20B: 2nd main side 21: Luminous layer 22:Terminal part 22AN: Anode terminal 22CA: Cathode terminal 30: Cushioning material 40: Fixed components 50: Fixed components BA: bend area CA: cathode terminal DA: display area EX: short side EY:long side LED: light emitting element LZ1: Laser light LZ2: Laser light MT: terminal area NDA: non-display area PX: pixel SUB1: 1st substrate SUB2: 2nd substrate W1: Width

圖1係概略性顯示實施形態之顯示裝置之構成之立體圖。 圖2係概略性顯示實施形態之第1基板之構成之剖視圖。 圖3係概略性顯示實施形態之第2基板之構成之剖視圖。 圖4係概略性顯示實施形態之發光元件之安裝步驟之剖視圖。 圖5係概略性顯示繼圖4後之安裝步驟之剖視圖。 圖6係概略性顯示繼圖5後之安裝步驟之剖視圖。 圖7係概略性顯示繼圖6後之安裝步驟之剖視圖。 圖8係概略性顯示圖4~圖7所示之一系列安裝步驟之結果之剖視圖。 圖9係概略性顯示實施形態之發光元件之構成之剖視圖。 圖10(A)、(B)係概略性顯示圖4~圖7所示之一系列安裝步驟之結果之另一剖視圖。 圖11係概略性顯示實施形態之第2基板之構成之另一剖視圖。FIG. 1 is a perspective view schematically showing the structure of the display device of the embodiment. FIG. 2 is a cross-sectional view schematically showing the structure of the first substrate of the embodiment. FIG. 3 is a cross-sectional view schematically showing the structure of the second substrate of the embodiment. FIG. 4 is a cross-sectional view schematically showing the installation step of the light-emitting element of the embodiment. FIG. 5 is a cross-sectional view schematically showing the installation step after FIG. 4. FIG. 6 is a cross-sectional view schematically showing the installation step after FIG. 5. FIG. 7 is a cross-sectional view schematically showing the installation step after FIG. 6. FIG. 8 is a cross-sectional view schematically showing the result of a series of installation steps shown in FIG. 4 to FIG. 7. FIG. 9 is a cross-sectional view schematically showing the structure of the light-emitting element of the embodiment. FIG. 10 (A) and (B) are another cross-sectional view schematically showing the result of a series of installation steps shown in FIG. 4 to FIG. 7. FIG. 11 is another cross-sectional view schematically showing the structure of the second substrate of the implementation form.

10:陣列基板 10: Array substrate

11:第1端子部 11: Terminal 1

12:接合構件 12:joint components

13:第2端子部 13: 2nd terminal part

14:密封件 14: Seals

20:藍寶石基板 20: Sapphire substrate

21:發光層 21: Luminous layer

22:端子部 22:Terminal part

30:緩衝材料 30: Buffer material

40:固定構件 40:Fixed components

50:固定構件 50:Fixed components

LED:發光元件 LED: light emitting element

Claims (13)

一種發光元件之安裝方法,其係用於將設置於剝離用之藍寶石基板之一側之面之發光元件利用雷射剝離來剝離,並安裝於陣列基板者,且包含:第1步驟,進行形成於上述陣列基板之一側之面之第1端子部、與上述發光元件之端子部之對位,且,藉由密封件固定上述陣列基板與上述藍寶石基板;第2步驟,對上述陣列基板與上述藍寶石基板施加壓力來將上述藍寶石基板平坦化,且,固定上述陣列基板與上述藍寶石基板;第3步驟,對設置於上述陣列基板之第1端子部之上之接合構件,自上述藍寶石基板側照射第1波長帯之第1雷射光,將上述陣列基板之第1端子部與上述發光元件之端子部接合;及第4步驟,對上述發光元件,自上述藍寶石基板側照射與上述第1波長帯不同之第2波長帯之第2雷射光,將上述發光元件自上述藍寶石基板剝離。 A method of mounting a light-emitting element, which is used to peel off a light-emitting element provided on one side of a sapphire substrate for peeling using laser peeling, and install it on an array substrate, and includes: a first step of forming The first terminal portion on one side of the array substrate is aligned with the terminal portion of the light-emitting element, and the array substrate and the sapphire substrate are fixed by a sealing member; in the second step, the array substrate and the sapphire substrate are fixed The above-mentioned sapphire substrate applies pressure to planarize the above-mentioned sapphire substrate, and fix the above-mentioned array substrate and the above-mentioned sapphire substrate; in the third step, the bonding member provided on the first terminal part of the above-mentioned array substrate is moved from the side of the above-mentioned sapphire substrate irradiating the first laser light of the first wavelength to join the first terminal part of the above-mentioned array substrate and the terminal part of the above-mentioned light-emitting element; and the fourth step, irradiating the above-mentioned first wavelength to the above-mentioned light-emitting element from the side of the above-mentioned sapphire substrate The second laser light of a different second wavelength peels off the above-mentioned light-emitting element from the above-mentioned sapphire substrate. 如請求項1之發光元件之安裝方法,其中上述第2步驟包含:於將緩衝材料抵接於上述陣列基板之另一側之面後,進而將固定構件配置於上述陣列基板之另一側之面側與上述藍寶石基板之另一側之面側,將上述各固定構件彼此向反方向按壓,對上述陣列基板與上述藍寶石基板施加壓力。 The method of mounting a light-emitting element according to claim 1, wherein the second step includes: after abutting the buffer material on the other side of the array substrate, and then arranging the fixing member on the other side of the array substrate. Between the surface side and the other side of the sapphire substrate, the fixing members are pressed in opposite directions to apply pressure to the array substrate and the sapphire substrate. 如請求項2之發光元件之安裝方法,其中配置於上述藍寶石基板之另一側之面側之固定構件,讓上述第3步驟中照射之上述第1雷射光穿透。 The method of mounting a light-emitting element according to claim 2, wherein the fixing member disposed on the other side of the sapphire substrate allows the first laser light irradiated in the third step to penetrate. 如請求項1至3中任一項之發光元件之安裝方法,其中上述第4步驟包含:對形成於上述陣列基板之一側之面且藉由上述密封件覆蓋之第2端子部,自上述藍寶石基板側照射上述第2雷射光,加熱上述第2端子部而將上述密封件熔化。 The method of mounting a light-emitting element according to any one of claims 1 to 3, wherein the fourth step includes: removing the second terminal portion formed on one side of the array substrate and covered by the sealing member from the above-mentioned The sapphire substrate side is irradiated with the second laser light to heat the second terminal portion and melt the sealing material. 如請求項1至3中任一項之發光元件之安裝方法,其中上述第4步驟包含:對形成於上述藍寶石基板之一側之面且藉由上述密封件覆蓋之第2端子部,自上述藍寶石基板側照射上述第2雷射光,加熱上述第2端子部而將上述密封件熔化。 A method for mounting a light-emitting element as claimed in any one of claims 1 to 3, wherein the fourth step comprises: irradiating the second terminal portion formed on one side of the sapphire substrate and covered by the sealing member from the sapphire substrate side with the second laser light to heat the second terminal portion and melt the sealing member. 如請求項1至3中任一項之發光元件之安裝方法,其中上述第1波長帯為400nm~3000nm;上述第2波長帯為200nm~366nm。 A method for mounting a light-emitting element as claimed in any one of claims 1 to 3, wherein the first wavelength band is 400nm to 3000nm; and the second wavelength band is 200nm to 366nm. 如請求項1至3中任一項之發光元件之安裝方法,其中上述發光元件為微型LED。 A method for installing a light-emitting element as claimed in any one of claims 1 to 3, wherein the light-emitting element is a micro LED. 一種顯示裝置,其包含:第1基板,其包含陣列基板、形成於上述陣列基板之一側之面之第1端子部、及設置於上述陣列基板之一側之面且設置於俯視時不與上述第1端子部重疊之位置之密封件;及第2基板,其包含藍寶石基板、及設置於上述藍寶石基板之一側之面之發光元件;且上述第1基板與上述第2基板係藉由上述密封件固定;上述第1基板進而包含形成於上述陣列基板之一側之面且藉由上述密封件覆蓋之第2端子部;上述第1端子部形成於顯示圖像之顯示區域;上述第2端子部係形成於以包圍上述顯示區域之方式配置之非顯示區域。 A display device, which includes a first substrate including an array substrate, a first terminal portion formed on one side of the array substrate, and a first terminal portion provided on one side of the array substrate and not in contact with the array substrate when viewed from above. a sealing member at a position where the above-mentioned first terminal portion overlaps; and a second substrate including a sapphire substrate and a light-emitting element provided on one side of the sapphire substrate; and the above-mentioned first substrate and the above-mentioned second substrate are connected by The sealing member is fixed; the first substrate further includes a second terminal portion formed on one side surface of the array substrate and covered by the sealing member; the first terminal portion is formed in a display area where an image is displayed; 2. The terminal portion is formed in a non-display area arranged to surround the display area. 如請求項8之顯示裝置,其中上述發光元件包含放出光之發光層與端子部;上述第1基板之第1端子部與上述發光元件之端子部,係經由接合構件而接合。 The display device of claim 8, wherein the light-emitting element includes a light-emitting layer that emits light and a terminal portion; the first terminal portion of the first substrate and the terminal portion of the light-emitting element are bonded via a bonding member. 如請求項8或9之顯示裝置,其中上述發光元件為微型LED。 A display device as claimed in claim 8 or 9, wherein the light-emitting element is a micro LED. 一種顯示裝置,其包含: 陣列基板;發光元件,其設置於上述陣列基板之一側之面;及端子部,其形成於上述陣列基板之一側之面,且形成於俯視時不與上述發光元件重疊之位置;且於上述端子部之至少一部分,附著有用於將上述發光元件自藍寶石基板剝離之雷射剝離時所熔化之密封件之殘渣。 A display device comprising: An array substrate; a light-emitting element provided on one side of the array substrate; and a terminal portion formed on one side of the array substrate at a position that does not overlap the light-emitting element when viewed from above; and At least part of the terminal portion has residues of the sealing material melted during laser peeling for peeling off the light-emitting element from the sapphire substrate. 如請求項11之顯示裝置,其中上述發光元件設置於顯示圖像之顯示區域;上述端子部形成於以包圍上述顯示區域之方式配置之非顯示區域。 The display device according to claim 11, wherein the light-emitting element is provided in a display area that displays an image; and the terminal portion is formed in a non-display area arranged to surround the display area. 如請求項11或12之顯示裝置,其中上述發光元件為微型LED。 The display device of claim 11 or 12, wherein the light-emitting element is a micro-LED.
TW110111788A 2020-04-03 2021-03-31 Installation method of light-emitting components and display device TWI836205B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020067627A JP7434037B2 (en) 2020-04-03 2020-04-03 Mounting method of light emitting element and display device
JP2020-067627 2020-04-03

Publications (2)

Publication Number Publication Date
TW202205694A TW202205694A (en) 2022-02-01
TWI836205B true TWI836205B (en) 2024-03-21

Family

ID=77997494

Family Applications (1)

Application Number Title Priority Date Filing Date
TW110111788A TWI836205B (en) 2020-04-03 2021-03-31 Installation method of light-emitting components and display device

Country Status (3)

Country Link
JP (1) JP7434037B2 (en)
CN (1) CN113497165B (en)
TW (1) TWI836205B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114122225A (en) * 2021-11-09 2022-03-01 Tcl华星光电技术有限公司 Preparation method of Micro LED display panel
CN117012783A (en) * 2022-04-29 2023-11-07 成都辰显光电有限公司 Display panel and preparation method thereof
TWI848733B (en) * 2023-06-02 2024-07-11 前源科技股份有限公司 Bonding method of electronic device and method of mass transferring electronic devices

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019018988A1 (en) * 2017-07-24 2019-01-31 Goertek.Inc A micro-led display device and a manufacturing method thereof
US20190157523A1 (en) * 2017-11-20 2019-05-23 Kaistar Lighting (Xiamen) Co., Ltd. Micro led display device and method for manufacturing same
US20190181122A1 (en) * 2017-12-13 2019-06-13 Innolux Corporation Electronic device and method of manufacturing the same
TW201937720A (en) * 2018-02-05 2019-09-16 日商V科技股份有限公司 Full-color led display panel and method for producing same
TW201939790A (en) * 2018-02-06 2019-10-01 日商V科技股份有限公司 Method for manufacturing led display

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2216834B1 (en) * 2007-11-29 2017-03-15 Nichia Corporation Light-emitting apparatus
CN101713882B (en) * 2008-10-01 2013-07-17 株式会社日立显示器 Liquid crystal display device
JP6224918B2 (en) * 2013-05-31 2017-11-01 株式会社ジャパンディスプレイ Display device and manufacturing method thereof
JP6200340B2 (en) * 2014-02-04 2017-09-20 株式会社ジャパンディスプレイ Display device and manufacturing method thereof
JP2019522226A (en) * 2016-04-15 2019-08-08 グロ アーベーGlo Ab Integrated backlight unit
JP2019220666A (en) * 2018-06-19 2019-12-26 株式会社ブイ・テクノロジー Sapphire substrate for forming semiconductor element, method of manufacturing the same, and method of transferring semiconductor element
JP2020013954A (en) * 2018-07-20 2020-01-23 株式会社ブイ・テクノロジー Board connection structure, micro led display and component mounting method

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019018988A1 (en) * 2017-07-24 2019-01-31 Goertek.Inc A micro-led display device and a manufacturing method thereof
US20190157523A1 (en) * 2017-11-20 2019-05-23 Kaistar Lighting (Xiamen) Co., Ltd. Micro led display device and method for manufacturing same
US20190181122A1 (en) * 2017-12-13 2019-06-13 Innolux Corporation Electronic device and method of manufacturing the same
TW201937720A (en) * 2018-02-05 2019-09-16 日商V科技股份有限公司 Full-color led display panel and method for producing same
TW201939790A (en) * 2018-02-06 2019-10-01 日商V科技股份有限公司 Method for manufacturing led display

Also Published As

Publication number Publication date
CN113497165A (en) 2021-10-12
JP7434037B2 (en) 2024-02-20
JP2021163945A (en) 2021-10-11
TW202205694A (en) 2022-02-01
CN113497165B (en) 2024-06-18

Similar Documents

Publication Publication Date Title
TWI836205B (en) Installation method of light-emitting components and display device
US11482641B2 (en) Electronic device and method for manufacturing the same
TW201031959A (en) Display panel and repair method thereof
JP3968519B2 (en) Manufacturing method of display device
WO2020262034A1 (en) Electronic component mounting structure, method for mounting same, and method for mounting led chip
JP3543676B2 (en) Multi-chip mounting structure, method of manufacturing the mounting structure, electro-optical device and electronic apparatus
US20220320041A1 (en) Method of mounting electronic component, display device and circuit board
CN114122224B (en) Method for manufacturing display device
CN216054768U (en) Mounting device for electronic component
US20220336250A1 (en) Wafer for electronic components
JP7585048B2 (en) Display device manufacturing method
WO2023100281A1 (en) Display device and method for producing same
US20230343907A1 (en) Method for manufacturing a display device and display device
TWI817633B (en) Display panel
TWI825749B (en) Manufacturing method of display device
US10998525B2 (en) Organic light emitting display device and method for manufacturing the same
WO2024060263A9 (en) Display panel, display device and tiled display device
KR102722114B1 (en) Display Device
JP4270077B2 (en) Electro-optical device, method of manufacturing electro-optical device, and electronic apparatus
JP2024010383A (en) Manufacturing method for display device
JP2023023684A (en) Method of manufacturing display device
CN116190541A (en) Display panel and display device
JP5471990B2 (en) Manufacturing method of display device
JP5352288B2 (en) Manufacturing method of display device
JP2001083899A (en) Manufacture of electrooptical device