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TW330917B - Automated wafer lapping system - Google Patents

Automated wafer lapping system

Info

Publication number
TW330917B
TW330917B TW086106560A TW86106560A TW330917B TW 330917 B TW330917 B TW 330917B TW 086106560 A TW086106560 A TW 086106560A TW 86106560 A TW86106560 A TW 86106560A TW 330917 B TW330917 B TW 330917B
Authority
TW
Taiwan
Prior art keywords
wafer
lapping
wafers
plates
loaders
Prior art date
Application number
TW086106560A
Other languages
English (en)
Inventor
W Gerrne George
d albrecht Peter
D Strittmatter Kenneth
E Hidalgo Rafael
Original Assignee
Memc Electronic Materials Spa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Memc Electronic Materials Spa filed Critical Memc Electronic Materials Spa
Application granted granted Critical
Publication of TW330917B publication Critical patent/TW330917B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • B24B37/08—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/34—Accessories
    • B24B37/345—Feeding, loading or unloading work specially adapted to lapping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B47/00—Drives or gearings; Equipment therefor
    • B24B47/22—Equipment for exact control of the position of the grinding tool or work at the start of the grinding operation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/02—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent
    • B24B49/04—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent involving measurement of the workpiece at the place of grinding during grinding operation

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
TW086106560A 1996-05-31 1997-05-16 Automated wafer lapping system TW330917B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/653,666 US5679055A (en) 1996-05-31 1996-05-31 Automated wafer lapping system

Publications (1)

Publication Number Publication Date
TW330917B true TW330917B (en) 1998-05-01

Family

ID=24621837

Family Applications (1)

Application Number Title Priority Date Filing Date
TW086106560A TW330917B (en) 1996-05-31 1997-05-16 Automated wafer lapping system

Country Status (7)

Country Link
US (1) US5679055A (zh)
EP (1) EP0810066A3 (zh)
JP (1) JPH1098089A (zh)
KR (1) KR970077477A (zh)
CN (1) CN1075422C (zh)
SG (1) SG46778A1 (zh)
TW (1) TW330917B (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI383152B (zh) * 2009-04-03 2013-01-21 Mjc Probe Inc Detection device

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CN102176424B (zh) * 2011-03-16 2013-06-19 哈尔滨工业大学 一种调整双臂机械手fork圆心重合的方法
CN102156053A (zh) * 2011-03-16 2011-08-17 哈尔滨工业大学 一种用于双臂传输机器人装配调整/模拟工位传输的试验台
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CN102581762A (zh) * 2012-04-01 2012-07-18 北京华进创威电子有限公司 一种晶体加工平磨料台
CN103594397B (zh) * 2013-11-11 2016-02-03 厦门市弘瀚电子科技有限公司 一种晶圆片自动刮边机
CN103646903B (zh) * 2013-12-11 2016-07-06 中国电子科技集团公司第二研究所 晶圆片定位及测厚装置
KR101616464B1 (ko) * 2014-11-18 2016-04-29 주식회사 엘지실트론 웨이퍼 연마장비의 웨이퍼 로딩장치 및 웨이퍼 로딩위치 조정 방법
CN104924197A (zh) * 2015-05-28 2015-09-23 海宁奇晟轴承有限公司 一种自动双盘研磨机
CN105021099B (zh) * 2015-07-16 2018-04-03 北京工业大学 一种大尺寸磨削晶圆翘曲测量夹具
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JP6765887B2 (ja) * 2016-07-21 2020-10-07 スピードファム株式会社 研磨装置
CN106338236A (zh) * 2016-09-28 2017-01-18 天津华海清科机电科技有限公司 膜厚度测量装置及具有其的用于制造晶片的系统
CN107598762B (zh) * 2017-10-21 2023-10-31 德清凯晶光电科技有限公司 大尺寸游星轮及其均匀打磨方法
CN108326731A (zh) * 2017-12-30 2018-07-27 铜陵日科电子有限责任公司 一种二氧化硅晶片研磨机
CN108436756B (zh) * 2018-01-30 2021-04-16 深圳市华成工业控制股份有限公司 一种基于旋转编码器精确定位上下料工件的系统及其方法
CN109514421A (zh) * 2019-01-14 2019-03-26 杭州众硅电子科技有限公司 一种化学机械抛光设备
DE102019208704A1 (de) * 2019-06-14 2020-12-17 Siltronic Ag Einrichtung und Verfahren zum Polieren von Halbleiterscheiben
CN110767587B (zh) * 2019-10-21 2022-04-01 西安奕斯伟材料科技有限公司 一种晶圆处理装置和上下料方法
CN110752169B (zh) * 2019-10-21 2022-03-22 西安奕斯伟材料科技有限公司 一种晶圆处理装置和上下料方法
CN111390750B (zh) * 2020-03-25 2021-09-03 福建北电新材料科技有限公司 晶片面型加工装置
CN111251102B (zh) * 2020-04-16 2024-07-09 北京特思迪设备制造有限公司 皮带式双面研磨自动上下料系统
CN112008595A (zh) * 2020-09-02 2020-12-01 珠海市中芯集成电路有限公司 一种晶圆研磨装置及研磨方法
CN115056135B (zh) * 2022-06-20 2023-08-22 苏州富强科技有限公司 晶圆加工装置
CN115609392B (zh) * 2022-09-29 2023-07-25 亚新半导体科技(无锡)有限公司 一种Fab厂用具有智能化自动抓取功能的加工设备

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Publication number Priority date Publication date Assignee Title
TWI383152B (zh) * 2009-04-03 2013-01-21 Mjc Probe Inc Detection device

Also Published As

Publication number Publication date
CN1075422C (zh) 2001-11-28
CN1170655A (zh) 1998-01-21
EP0810066A2 (en) 1997-12-03
JPH1098089A (ja) 1998-04-14
KR970077477A (ko) 1997-12-12
US5679055A (en) 1997-10-21
SG46778A1 (en) 1998-02-20
EP0810066A3 (en) 1998-07-01

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