JPS6063452A - Moisture sensitive element - Google Patents
Moisture sensitive elementInfo
- Publication number
- JPS6063452A JPS6063452A JP17101883A JP17101883A JPS6063452A JP S6063452 A JPS6063452 A JP S6063452A JP 17101883 A JP17101883 A JP 17101883A JP 17101883 A JP17101883 A JP 17101883A JP S6063452 A JPS6063452 A JP S6063452A
- Authority
- JP
- Japan
- Prior art keywords
- lithium chloride
- layer
- heating
- temp
- responsiveness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/121—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid for determining moisture content, e.g. humidity, of the fluid
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の技術分野〕
本発明は、塩化リチウム液を用いて露点検出を行なう感
温素子に関するものでるる。DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a temperature-sensitive element that detects dew point using a lithium chloride solution.
従来加熱用電極を巻きつけて塩化リチウム層で覆った管
の内部に感温素子を収容したこの種の感湿素子に対し、
小形にできるものとして、例えば実公昭４９−３５８３
８号公報に開示されるように電気的絶縁性基板の一工面
に温度検出素子、他面に加熱用電極と塩化リチウム層と
を設けた構造のものがるる。しかし、塩化リチウム層の
平衡温度を、電気的絶縁性基板を介して他面の温度検出
素子で検知するため感度・応答性が悪く、精確ム露点検
出が困難でるるという欠点を有する。ｔ−た、特開昭５
２−７５３８８号公報に開示されるように温度素子部を
、加熱用電極および塩化リチウム１台からなる湿度素子
部２個でサンドインチ状に挾んだ構造のものもめる。す
なわち、塩化リチウム層の平衡温度を、中間に位置する
温度素子によって検出するものでるるか、電気的絶縁性
基板が２個ないし３個介在するために平衡温度の検知に
おける感度・応答性が低下し、精確な露点検出が困難で
るる。さらに、前者は一王面に温度検出素子、他面に加
熱用１１極等を被着した基板を環状の取付枠に張るとい
うもので８シ、また後者は各基板を相互に貼シ合せるな
ど、いずれも構造および製造プロセス〃：複雑となる。In contrast to this type of moisture-sensing device, which conventionally houses a temperature-sensing device inside a tube wrapped around a heating electrode and covered with a lithium chloride layer,
For example, Utility Model Publication No. 49-3583
As disclosed in Japanese Patent No. 8, there is a structure in which a temperature detection element is provided on one side of an electrically insulating substrate, and a heating electrode and a lithium chloride layer are provided on the other side. However, since the equilibrium temperature of the lithium chloride layer is detected by a temperature detecting element on the other side of the electrically insulating substrate, the sensitivity and responsiveness are poor and accurate dew point detection is difficult. t-ta, Japanese Patent Application Publication No. 1973
As disclosed in Japanese Patent No. 2-75388, there is also a structure in which a temperature element part is sandwiched in a sandwich shape between two humidity element parts each consisting of a heating electrode and one lithium chloride unit. That is, either the equilibrium temperature of the lithium chloride layer is detected by a temperature element located in the middle, or the sensitivity and responsiveness in detecting the equilibrium temperature decreases due to the presence of two or three electrically insulating substrates. However, accurate dew point detection becomes difficult. Furthermore, in the former case, a board with a temperature detection element on one side and 11 heating poles on the other side is attached to an annular mounting frame, and in the latter case, each board is pasted together. Both structures and manufacturing processes are complicated.
本発明はこのような事情に鑑みてなされたもので、その
目的は、塩化リチウム層の平衡温度を温１．ｆ検出累子
が検矧する場合の感度・応答性が良好で、しかも製造プ
ロセスが簡単で低価格な感湿素子を提供することにある
。The present invention was made in view of these circumstances, and its purpose is to increase the equilibrium temperature of the lithium chloride layer to 1. It is an object of the present invention to provide a moisture sensing element which has good sensitivity and responsiveness when an f-detection element performs a measurement, and which is manufactured by a simple manufacturing process and is inexpensive.
このような目的を達成するために、本発明は、電気的絶
縁性基板の一方の主面に、膜状の温度検出素子と、膜状
の加熱用電極および塩化リチウム層とをＰ３紅ｉ・と全
弁してｍ層しで設け、他面に加熱用ｋＩ４ｉ極および塩
化リチウム層金設けたものである。In order to achieve such an object, the present invention provides a film-like temperature detection element, a film-like heating electrode, and a lithium chloride layer on one main surface of an electrically insulating substrate. The entire valve is provided with m layers, and the other side is provided with a heating kI4i electrode and a lithium chloride layer.
以下笑′ｈ例を用い−Ｃ本発明の詳細な説明する。The present invention will be described in detail below using examples.
第１図に示すように、アルミナ〃）らなる電気絶縁性基
板１の一王表面上に白金ベースｉｆ所定のパターンにス
クリーン印刷して焼成し、温度検出素子２足形成する。As shown in FIG. 1, a predetermined pattern of a platinum base is screen printed on the surface of an electrically insulating substrate 1 made of alumina and fired to form two temperature sensing elements.
その上に第２図に示すようにガラスハυからなる保簡絶
縁層３ヶ被榎する。次いで、その保わ絶縁層３上および
基板１の裏面にそれぞれ１対のくし状金電極からなる加
熱用電極４を所定パターンのマスクを用いた真空蒸着ま
たはスパッタリングにより形成した後、その表面に塩化
リチウム層５全デイツピングにょシ被覆する。As shown in FIG. 2, three insulating layers made of glass are applied thereon. Next, heating electrodes 4 consisting of a pair of comb-shaped gold electrodes are formed on the insulating layer 3 and on the back surface of the substrate 1 by vacuum evaporation or sputtering using a mask with a predetermined pattern, and then chloride is applied to the surface. The entire lithium layer 5 is coated by dipping.
第３因に断面図全庁す。The third reason is the cross-sectional view.
以上、温度検出素子として白金ベースｌ使用してスクリ
ーン印刷した厚膜を用いた例について説明したが、この
他に、真壁蒸着、スパッタリングなどの薄膜技術により
形成した白金薄膜丑たｔユニッケル、パーマロイなどの
薄膜もしくは厚膜など音用いることもできる。Above, we have described an example in which a screen-printed thick film using a platinum base was used as a temperature detection element, but there are also other platinum thin films formed by thin film techniques such as wall evaporation and sputtering, such as unitel, permalloy, etc. It is also possible to use thin or thick films.
また、絶縁層３および基板１の裏面上にｉ没ける金電極
は、所定パターンの金箔をヒートスタンプで被着する方
法、あるいは金ベース）ｆ用いた厚膜技術などにより形
成してもよい。Further, the gold electrodes sunk onto the insulating layer 3 and the back surface of the substrate 1 may be formed by applying a predetermined pattern of gold foil by heat stamping, or by a thick film technique using a gold base.
さらに、塩化リチウム層５は、ディッピング以外に、は
け塗シ（塗布）、スポイトでの滴下などにより形成して
もよい。Furthermore, the lithium chloride layer 5 may be formed by brushing (coating), dropping with a dropper, etc. in addition to dipping.
上流構成から明らかなように、温度検出素子２を、基板
１に対して塩化リチウムＮＩ５および加熱用電極４と同
一工面上に設けたことにょシ、雰囲気温度と平衡した塩
化リチウム層の温度を感度・応答性良く精確に検印でき
る。また、温度検出素子２を設けない基板１の他面に対
してもさらに塩化リチウム層５および加熱用電極４を設
けたことにより応答性をさらに向上させることができる
。As is clear from the upstream configuration, the temperature detection element 2 is provided on the same surface of the substrate 1 as the lithium chloride NI 5 and the heating electrode 4, so that it is sensitive to the temperature of the lithium chloride layer that is in equilibrium with the ambient temperature.・Highly responsive and accurate stamp verification. Furthermore, by further providing the lithium chloride layer 5 and the heating electrode 4 on the other surface of the substrate 1 on which the temperature detection element 2 is not provided, the responsiveness can be further improved.
さらに、温度検出素子２および加熱用電極４ともに、基
板１に対して通常の厚膜技術、薄膜技術を順次適用する
のみで形成できるため、製造プロセスはきわめて簡単で
ろるとともに低価格化が可能でるる。Furthermore, since both the temperature detection element 2 and the heating electrode 4 can be formed by sequentially applying normal thick film technology and thin film technology to the substrate 1, the manufacturing process is extremely simple and easy, and the cost can be reduced. Ruru.
し発明の効果〕
以上説明したように、本発明によれば、電気的絶縁性基
板の一方の工面に、膜状の温度検出素子と、膜状の加熱
用電極および塩化リチウム層とを絶縁層を介して積層し
て設けるとともに、他面に加熱用電極および塩化リチウ
ム層を設けたことにより、感度・応答性が良好な感湿素
子ｔ、簡単なプロセスで、しかも低価格に実現できる。[Effects of the Invention] As explained above, according to the present invention, a film-like temperature detection element, a film-like heating electrode, and a lithium chloride layer are formed on one side of an electrically insulating substrate as an insulating layer. By layering the two layers with a heating electrode and a lithium chloride layer on the other side, a moisture sensing element with good sensitivity and responsiveness can be realized with a simple process and at a low cost.
第１図は本発明の一実施例の製造途中の状態を示す平面
図、第２図は完成状態を示す平面図、第３図は同じく断
面図である。
１・・・・電気的絶縁性基板、２・・・・温度検出素子
、３・・・・絶縁層、４・・・・加熱用電極、５・・・
・塩化リチウム層。
特許出願人 山武７１ネウエル株式会社代理人 山川政
樹（ほか１名）FIG. 1 is a plan view showing an embodiment of the present invention in the middle of manufacturing, FIG. 2 is a plan view showing the completed state, and FIG. 3 is a sectional view. DESCRIPTION OF SYMBOLS 1... Electrically insulating substrate, 2... Temperature detection element, 3... Insulating layer, 4... Heating electrode, 5...
・Lithium chloride layer. Patent applicant Yamatake 71 Newel Co., Ltd. Agent Masaki Yamakawa (and one other person)
Claims (1)
状の加熱用電極およびこの加熱用電極を檄う塩化リチウ
ム層とを、相互に絶縁層を介して積層して設けるととも
に、上記基板の他王面に膜状の加熱用電極およびこの加
熱用電極を覆う塩化リチウムｍを設けてなる感温素子。A film-like temperature sensing element, a film-like heating electrode, and a lithium chloride layer covering the heating electrode are provided on one side of an electrically insulating substrate by laminating them with an insulating layer interposed therebetween. , a temperature sensing element comprising a film-shaped heating electrode and lithium chloride m covering the heating electrode on the other side of the substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17101883A JPS6063452A (en) | 1983-09-16 | 1983-09-16 | Moisture sensitive element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17101883A JPS6063452A (en) | 1983-09-16 | 1983-09-16 | Moisture sensitive element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6063452A true JPS6063452A (en) | 1985-04-11 |
Family
ID=15915562
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17101883A Pending JPS6063452A (en) | 1983-09-16 | 1983-09-16 | Moisture sensitive element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6063452A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6163149U (en) * | 1984-10-01 | 1986-04-28 | ||
| JPH02228546A (en) * | 1989-03-01 | 1990-09-11 | Tanaka Kikinzoku Kogyo Kk | Temperature/moisture sensor |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5275388A (en) * | 1975-12-18 | 1977-06-24 | Yokogawa Hokushin Electric Corp | Humidity detector |
-
1983
- 1983-09-16 JP JP17101883A patent/JPS6063452A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5275388A (en) * | 1975-12-18 | 1977-06-24 | Yokogawa Hokushin Electric Corp | Humidity detector |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6163149U (en) * | 1984-10-01 | 1986-04-28 | ||
| JPH02228546A (en) * | 1989-03-01 | 1990-09-11 | Tanaka Kikinzoku Kogyo Kk | Temperature/moisture sensor |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4343688A (en) | Method of making humidity sensors | |
| JPH0342566A (en) | Measuring cell for electrochemical gas sensor | |
| US4160969A (en) | Transducer and method of making | |
| JP2000088671A (en) | Electrical resistor having at least two connection contact fields arranged on substrate having at least one recess and its production | |
| US5345821A (en) | Relative humidity sensing apparatus | |
| JPS6063452A (en) | Moisture sensitive element | |
| JPS6063453A (en) | Moisture sensitive element | |
| JP2601409Y2 (en) | Temperature and humidity sensor | |
| JPH0688802A (en) | Ambient gas sensor | |
| CN115308270A (en) | Palladium alloy film hydrogen sensor and preparation method and use method thereof | |
| JPH0720080A (en) | Humidity sensor | |
| JPH0523124U (en) | Capacitance type humidity sensor | |
| JPH04244952A (en) | Humidity sensor | |
| JPS6113121A (en) | Heat flow sensor | |
| GB1570054A (en) | Sensor or detector element for an electrical hygrometer | |
| RU2206082C1 (en) | Semiconductor metal-oxide gas sensor | |
| JPS58102144A (en) | Gas sensor | |
| JPS594553Y2 (en) | sheet heating element | |
| JPH0663852B2 (en) | Non-contact type semiconductor temperature sensor | |
| JPS6117410Y2 (en) | ||
| JPS6348082Y2 (en) | ||
| JPS61112953A (en) | Apparatus for detecting external atmosphere | |
| JP2714006B2 (en) | Gas sensor | |
| JPH045602U (en) | ||
| JP3035368B2 (en) | Gas sensor manufacturing method |