JPS6063453A - Moisture sensitive element - Google Patents
Moisture sensitive elementInfo
- Publication number
- JPS6063453A JPS6063453A JP17101983A JP17101983A JPS6063453A JP S6063453 A JPS6063453 A JP S6063453A JP 17101983 A JP17101983 A JP 17101983A JP 17101983 A JP17101983 A JP 17101983A JP S6063453 A JPS6063453 A JP S6063453A
- Authority
- JP
- Japan
- Prior art keywords
- lithium chloride
- temp
- chloride layer
- layer
- responsiveness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/121—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid for determining moisture content, e.g. humidity, of the fluid
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の技術分野〕
本発明は、塩化リチウム液を用いて露点検出を行なう感
湿素子に関するものでるる。DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a moisture sensitive element that detects dew point using a lithium chloride solution.
従来加熱用電極を巻きつけて塩化リチウム層でＱっだ管
の内部に感湿素子を収容したこの種の感湿素子に対し、
小形にできるものとして、例えば笑公昭４９−３５８３
８号公報に開示されるように電気的絶縁性基板の一生面
に温度検出素子、他面に加熱用電極と塩化リチウム層と
を設けた構造のものがある。しかし、塩化リチウム層の
平衡温度を、電気的絶縁性基板を介して他面の温度検出
素子で検知するため感度・応答性が悪く、精確な露点検
出が困難でるるという欠点を有する。また、特開昭５２
−７５３８８号公報に開示されるように温度素子部を、
加熱用電極および塩化リチウム層からなる湿度素子部２
個でサンドイッチ状に挾んだ構造のものもめる。すなわ
ち、塩化リチウム層の平衡温度を、中間に位置する温度
素子によって検出するものであるが、電気的絶縁性基板
が２個ないし３個介在するために平衡温度の検知におけ
る感度・応答性が低下し、精確な露点検出が困難である
。さらに、前者は一生面に温度検出素子、他面に加熱用
電極等を被着した基板を環状の取付枠に張るというもの
でメク、また後者は各基板を相互に貼り合せるなど、い
ずれも構造および製造プロセスが複雑となる。In contrast to this type of moisture-sensing element, which is conventionally housed inside a Q-shaped tube with a heating electrode wrapped around it and a lithium chloride layer,
As something that can be made small, for example, Shokosho 49-3583
As disclosed in Japanese Patent No. 8, there is a structure in which a temperature detection element is provided on one surface of an electrically insulating substrate, and a heating electrode and a lithium chloride layer are provided on the other surface. However, since the equilibrium temperature of the lithium chloride layer is detected by a temperature detection element on the other side of the electrically insulating substrate, the sensitivity and response are poor, making it difficult to accurately detect the dew point. Also, JP-A-52
-The temperature element part as disclosed in Publication No. 75388,
Humidity element part 2 consisting of a heating electrode and a lithium chloride layer
You can also make things that have a sandwich-like structure. That is, the equilibrium temperature of the lithium chloride layer is detected by a temperature element located in the middle, but because two or three electrically insulating substrates are interposed, the sensitivity and responsiveness in detecting the equilibrium temperature are reduced. However, accurate dew point detection is difficult. Furthermore, in the former, a substrate with a temperature detection element on one side and a heating electrode, etc. on the other side is attached to a ring-shaped mounting frame, and in the latter, each substrate is bonded to each other. and the manufacturing process becomes complicated.
本発明はこのような事情に鑑みてなされたもので、その
目的は、塩化リチウム層の平衡温度を温度検出素子が検
知する場合の感度・応答性が良好で、しかも製造プロセ
スが簡単で低価格な感湿素子を提供することにるる。The present invention was made in view of the above circumstances, and its purpose is to provide a temperature detection element with good sensitivity and responsiveness when detecting the equilibrium temperature of a lithium chloride layer, and to have a simple manufacturing process and low cost. The aim is to provide a moisture-sensitive element.
このような目的を達成するために、本発明は、電気的絶
縁性基板の一方の工面に、膜状の温度検出素子と、膜状
の加熱用電極および塩化リチウムノ偕と全絶縁層全弁し
て積層して設けたものでるる。In order to achieve such an object, the present invention includes a film-like temperature sensing element, a film-like heating electrode, a lithium chloride layer, and an entire insulating layer on one side of an electrically insulating substrate. It is made by laminating layers.
以下、実施例を用いて本発明の詳細な説明する。Hereinafter, the present invention will be explained in detail using Examples.
〔実施例Ｊ
第１図に示すように、アルミナからなる電気絶縁性基板
１の一生表面上に白金ペーストラ所定のパターンにスク
リーン印刷して焼成し、温度検出素子２を形成する。そ
の上に第２図に示すようにガラス層からなる保設絶縁層
３を被覆する。次いで、その保繰絶Ｒ層３上に１対のく
し状金電極からなる加熱用電極４を所定パターンのマス
クを用いた真空蒸着またはスパッタリングによシ形成し
た後、その表面に塩化リチウム層５をディッピングによ
ｐ″Ｗｆｆｌする。第３図に断面図を示す。[Example J As shown in FIG. 1, platinum paste is screen printed in a predetermined pattern on the surface of an electrically insulating substrate 1 made of alumina and fired to form a temperature detection element 2. A preservation insulating layer 3 made of a glass layer is coated thereon as shown in FIG. Next, a heating electrode 4 consisting of a pair of comb-shaped gold electrodes is formed on the thermal insulation R layer 3 by vacuum evaporation or sputtering using a mask with a predetermined pattern, and then a lithium chloride layer 5 is formed on the surface. by dipping. A cross-sectional view is shown in FIG.
以上、温度検出素子として白金ペーストラ使用してスク
リーン印刷した厚膜を用いた例について説明したが、こ
の他に、真空蒸着、スパッタリングなどの薄膜技術によ
シ形成した白金薄膜またはニッケル、パーマロイなどの
薄膜もしくは厚膜などを用いることもできる。In the above, we have described an example in which a thick film screen-printed using platinum paste was used as a temperature detection element. A thin film or a thick film can also be used.
また、絶縁層３および基板１の裏面上に設ける金電極は
、所定パターンの金箔をヒートスタンプで被着する方法
、るるいは金ペーストヲ用いた厚膜技術などにより形成
してもよい。Further, the gold electrodes provided on the insulating layer 3 and the back surface of the substrate 1 may be formed by applying a predetermined pattern of gold foil by heat stamping, or by a thick film technique using lubrication or gold paste.
さらに、塩化リチウム層５は、ディッピング以外に、は
け塗り（塗布）、スポイトでの滴下などにより形成して
もよい。Furthermore, the lithium chloride layer 5 may be formed by brushing (coating), dropping with a dropper, etc. in addition to dipping.
上記構成から明らかなように、温度検出素子２を、基板
１に対して塩化リチウム層５および加熱用電極４と同一
主面上に設けたことにより、雰囲気温度と平衡した塩化
リチウム層の温度を感度・応答性良く精確に検知できる
。As is clear from the above configuration, by providing the temperature detection element 2 on the same main surface of the substrate 1 as the lithium chloride layer 5 and the heating electrode 4, the temperature of the lithium chloride layer that is in equilibrium with the ambient temperature can be adjusted. Accurate detection with good sensitivity and responsiveness.
さらに、温度検出素子２および加熱用電極４と、もに、
基板１に対して通常の厚膜技術、薄膜技術を順次適用す
るのみで形成できるため、製造プロセスはきわめて簡単
であるとともに低価格化が可能でるる。Furthermore, both the temperature detection element 2 and the heating electrode 4,
Since it can be formed by sequentially applying normal thick film technology and thin film technology to the substrate 1, the manufacturing process is extremely simple and the cost can be reduced.
以上説明したように、本発明によれば、電気的絶縁性基
板の一方の工面に、膜状の温度検出素子と、膜状の加熱
用電極および塩化リチウム層とを絶縁層を介して積層し
て設けたことにより、感度・応答性が良好な感湿素子を
、簡単なプロセスでしかも低価格に実現できる。As explained above, according to the present invention, a film-like temperature sensing element, a film-like heating electrode, and a lithium chloride layer are laminated on one side of an electrically insulating substrate with an insulating layer interposed therebetween. By providing this structure, a moisture-sensitive element with good sensitivity and responsiveness can be realized through a simple process and at a low cost.
第１図は本発明の一実施例の製造途中の状態を示す平面
図、第２図は完成状態を示す平面図、第３図は同じく断
面図でめる。
１・・・・電気的絶縁性基板、２・・・・温度検出素子
、３・・・・絶縁層、４・・・・加熱用電極、５１Ｉ壷
・・塩化リチウム層。
特許出願人 山武ハネウェル株式会社
代理人 山川政樹（ほか１名）
第１図
賂２図
第３図FIG. 1 is a plan view showing an embodiment of the present invention in the middle of manufacturing, FIG. 2 is a plan view showing the completed state, and FIG. 3 is a sectional view. DESCRIPTION OF SYMBOLS 1... Electrical insulating substrate, 2... Temperature detection element, 3... Insulating layer, 4... Heating electrode, 51I pot... Lithium chloride layer. Patent Applicant Yamatake Honeywell Co., Ltd. Agent Masaki Yamakawa (and 1 other person) Figure 1 Figure 2 Figure 3
Claims (1)
状の加熱用電極およびこの加熱用電極を覆う塩化リチウ
ム層とを、相互に絶縁層を介して積層して設けてなる感
湿素子。A temperature sensing element is formed by laminating a film-like temperature detection element, a film-like heating electrode, and a lithium chloride layer covering the heating electrode on the entire surface of an electrically insulating substrate, with an insulating layer interposed between them. Wet element.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17101983A JPS6063453A (en) | 1983-09-16 | 1983-09-16 | Moisture sensitive element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17101983A JPS6063453A (en) | 1983-09-16 | 1983-09-16 | Moisture sensitive element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6063453A true JPS6063453A (en) | 1985-04-11 |
Family
ID=15915579
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17101983A Pending JPS6063453A (en) | 1983-09-16 | 1983-09-16 | Moisture sensitive element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6063453A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02228546A (en) * | 1989-03-01 | 1990-09-11 | Tanaka Kikinzoku Kogyo Kk | Temperature/moisture sensor |
| CN118577467A (en) * | 2024-08-06 | 2024-09-03 | 成都能斯特新材料科技有限公司 | Preparation method of insulating isolation layer of temperature sensor |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5275388A (en) * | 1975-12-18 | 1977-06-24 | Yokogawa Hokushin Electric Corp | Humidity detector |
-
1983
- 1983-09-16 JP JP17101983A patent/JPS6063453A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5275388A (en) * | 1975-12-18 | 1977-06-24 | Yokogawa Hokushin Electric Corp | Humidity detector |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02228546A (en) * | 1989-03-01 | 1990-09-11 | Tanaka Kikinzoku Kogyo Kk | Temperature/moisture sensor |
| CN118577467A (en) * | 2024-08-06 | 2024-09-03 | 成都能斯特新材料科技有限公司 | Preparation method of insulating isolation layer of temperature sensor |
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