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JPS53124065A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS53124065A
JPS53124065A JP3928677A JP3928677A JPS53124065A JP S53124065 A JPS53124065 A JP S53124065A JP 3928677 A JP3928677 A JP 3928677A JP 3928677 A JP3928677 A JP 3928677A JP S53124065 A JPS53124065 A JP S53124065A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
sio
damage
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3928677A
Other languages
Japanese (ja)
Inventor
Soichiro Yamashita
Tadahiko Murata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP3928677A priority Critical patent/JPS53124065A/en
Publication of JPS53124065A publication Critical patent/JPS53124065A/en
Pending legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

PURPOSE: To prevent the damage of the electrode pattern by coating a hard insulating film of SiO2 and others over the electrode metal film excluding part or all of the junction pad.
COPYRIGHT: (C)1978,JPO&Japio
JP3928677A 1977-04-05 1977-04-05 Manufacture of semiconductor device Pending JPS53124065A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3928677A JPS53124065A (en) 1977-04-05 1977-04-05 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3928677A JPS53124065A (en) 1977-04-05 1977-04-05 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS53124065A true JPS53124065A (en) 1978-10-30

Family

ID=12548904

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3928677A Pending JPS53124065A (en) 1977-04-05 1977-04-05 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS53124065A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01152673A (en) * 1987-12-09 1989-06-15 Toshiba Corp Semiconductor device and its manufacture

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01152673A (en) * 1987-12-09 1989-06-15 Toshiba Corp Semiconductor device and its manufacture

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