JPS57169088A - Crucible - Google Patents
CrucibleInfo
- Publication number
- JPS57169088A JPS57169088A JP5337181A JP5337181A JPS57169088A JP S57169088 A JPS57169088 A JP S57169088A JP 5337181 A JP5337181 A JP 5337181A JP 5337181 A JP5337181 A JP 5337181A JP S57169088 A JPS57169088 A JP S57169088A
- Authority
- JP
- Japan
- Prior art keywords
- tank
- buffer tank
- crucible
- heaters
- throw
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/246—Replenishment of source material
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
PURPOSE:To uniformly execute continuous vapor-deposition by an electron beam, by providing a throw-in tank, a buffer tank and a vaporizing tank, and holding a passing molten vapor-depositing material at a constant temperature in the buffer tank. CONSTITUTION:A granular material thrown into a throw-in tank 32 is heated and melted by heaters 42, 44, and is put into a buffer tank 36 through the lower part of a partition part 38. It is reheated by heaters 44, 46 in the buffer tank 36, and a temperature change caused by throwing the material 24 into the throw-in tank 32 is corrected to a constant value. Subsequently, this material is put into a carburetting tank 34 through the lower part of a partition part 40, and a vapor-depositing atom 241 is evaporated by irradiating an electron beam 501 from an electron gun 50. A liquid temperature of the buffer tank 36 is detected by a temperature sensor 52, is compared with reference volage Verf by a temperature controller 54, and control voltage V54 corresponding to its difference is applied to the heaters 44, 46. Also, a crucible 30 and a projection 621 are set in advance so as to contact with each other by springs 56, 58 as the material 24 in the crucible 30 decreases, and the material is supplied into the crucible and is adjusted by operating a vibrator 64 suitably.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5337181A JPS57169088A (en) | 1981-04-09 | 1981-04-09 | Crucible |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5337181A JPS57169088A (en) | 1981-04-09 | 1981-04-09 | Crucible |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS57169088A true JPS57169088A (en) | 1982-10-18 |
Family
ID=12940948
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5337181A Pending JPS57169088A (en) | 1981-04-09 | 1981-04-09 | Crucible |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57169088A (en) |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62139868A (en) * | 1985-12-13 | 1987-06-23 | Matsushita Electric Ind Co Ltd | Crucible for electron beam evaporation |
| WO1997030186A1 (en) * | 1996-02-14 | 1997-08-21 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Method and device for control of plasma enhanced vacuum coating processes |
| WO1997030187A1 (en) * | 1996-02-14 | 1997-08-21 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Method and device for control of a vacuum vaporization process |
| WO2000008226A3 (en) * | 1998-08-03 | 2000-12-07 | Coca Cola Co | Vapor deposition system |
| US6223683B1 (en) | 1997-03-14 | 2001-05-01 | The Coca-Cola Company | Hollow plastic containers with an external very thin coating of low permeability to gases and vapors through plasma-assisted deposition of inorganic substances and method and system for making the coating |
| US6599584B2 (en) | 2001-04-27 | 2003-07-29 | The Coca-Cola Company | Barrier coated plastic containers and coating methods therefor |
| US6720052B1 (en) | 2000-08-24 | 2004-04-13 | The Coca-Cola Company | Multilayer polymeric/inorganic oxide structure with top coat for enhanced gas or vapor barrier and method for making same |
| US6740378B1 (en) | 2000-08-24 | 2004-05-25 | The Coca-Cola Company | Multilayer polymeric/zero valent material structure for enhanced gas or vapor barrier and uv barrier and method for making same |
| US6982119B2 (en) | 2002-04-15 | 2006-01-03 | The Coca-Cola Company | Coating composition containing an epoxide additive and structures coated therewith |
| EP1760169A1 (en) * | 2005-08-03 | 2007-03-07 | Applied Materials GmbH & Co. KG | Evaporator for coating of substrates |
| DE102010003106A1 (en) * | 2010-03-22 | 2011-09-22 | Von Ardenne Anlagentechnik Gmbh | Uniform evaporation of evaporation product in evaporator, comprises heating and evaporating the product in evaporator by heating device, and carrying out position change based on weight change of evaporator in relation to heating device |
| WO2012086230A1 (en) * | 2010-12-20 | 2012-06-28 | 三菱重工業株式会社 | Vacuum deposition equipment and vacuum deposition method |
| US11613804B2 (en) | 2018-06-04 | 2023-03-28 | Dyson Technology Limited | Vapour deposition evaporator device |
-
1981
- 1981-04-09 JP JP5337181A patent/JPS57169088A/en active Pending
Cited By (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62139868A (en) * | 1985-12-13 | 1987-06-23 | Matsushita Electric Ind Co Ltd | Crucible for electron beam evaporation |
| WO1997030186A1 (en) * | 1996-02-14 | 1997-08-21 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Method and device for control of plasma enhanced vacuum coating processes |
| WO1997030187A1 (en) * | 1996-02-14 | 1997-08-21 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Method and device for control of a vacuum vaporization process |
| US6086963A (en) * | 1996-02-14 | 2000-07-11 | Fraunhofer-Gesellschaft Zur Forderung Der Angewandten Forschung E.V. | Method and device for control of a vacuum vaporization process |
| US6599569B1 (en) | 1997-03-14 | 2003-07-29 | The Coca-Cola Company | Plastic containers with an external gas barrier coating, method and system for coating containers using vapor deposition, method for recycling coated containers, and method for packaging a beverage |
| US6223683B1 (en) | 1997-03-14 | 2001-05-01 | The Coca-Cola Company | Hollow plastic containers with an external very thin coating of low permeability to gases and vapors through plasma-assisted deposition of inorganic substances and method and system for making the coating |
| US6279505B1 (en) | 1997-03-14 | 2001-08-28 | The Coca-Cola Company | Plastic containers with an external gas barrier coating |
| US6548123B1 (en) | 1997-03-14 | 2003-04-15 | The Coca-Cola Company | Method for coating a plastic container with vacuum vapor deposition |
| US6251233B1 (en) | 1998-08-03 | 2001-06-26 | The Coca-Cola Company | Plasma-enhanced vacuum vapor deposition system including systems for evaporation of a solid, producing an electric arc discharge and measuring ionization and evaporation |
| US6447837B2 (en) | 1998-08-03 | 2002-09-10 | The Coca-Cola Company | Methods for measuring the degree of ionization and the rate of evaporation in a vapor deposition coating system |
| WO2000008226A3 (en) * | 1998-08-03 | 2000-12-07 | Coca Cola Co | Vapor deposition system |
| US6740378B1 (en) | 2000-08-24 | 2004-05-25 | The Coca-Cola Company | Multilayer polymeric/zero valent material structure for enhanced gas or vapor barrier and uv barrier and method for making same |
| US6720052B1 (en) | 2000-08-24 | 2004-04-13 | The Coca-Cola Company | Multilayer polymeric/inorganic oxide structure with top coat for enhanced gas or vapor barrier and method for making same |
| US6808753B2 (en) | 2000-08-24 | 2004-10-26 | The Coca-Cola Company | Multilayer polymeric/inorganic oxide structure with top coat for enhanced gas or vapor barrier and method for making same |
| US6811826B2 (en) | 2000-08-24 | 2004-11-02 | The Coca-Cola Company | Multilayer polymeric/zero valent material structure for enhanced gas or vapor barrier and UV barrier and method for making same |
| US6599584B2 (en) | 2001-04-27 | 2003-07-29 | The Coca-Cola Company | Barrier coated plastic containers and coating methods therefor |
| US6982119B2 (en) | 2002-04-15 | 2006-01-03 | The Coca-Cola Company | Coating composition containing an epoxide additive and structures coated therewith |
| EP1760169A1 (en) * | 2005-08-03 | 2007-03-07 | Applied Materials GmbH & Co. KG | Evaporator for coating of substrates |
| DE102010003106A1 (en) * | 2010-03-22 | 2011-09-22 | Von Ardenne Anlagentechnik Gmbh | Uniform evaporation of evaporation product in evaporator, comprises heating and evaporating the product in evaporator by heating device, and carrying out position change based on weight change of evaporator in relation to heating device |
| DE102010003106B4 (en) * | 2010-03-22 | 2013-11-21 | Von Ardenne Anlagentechnik Gmbh | Process, apparatus and coating system for long-term stable evaporation |
| WO2012086230A1 (en) * | 2010-12-20 | 2012-06-28 | 三菱重工業株式会社 | Vacuum deposition equipment and vacuum deposition method |
| JP2012132049A (en) * | 2010-12-20 | 2012-07-12 | Mitsubishi Heavy Ind Ltd | Vacuum deposition device and vacuum deposition method |
| US11613804B2 (en) | 2018-06-04 | 2023-03-28 | Dyson Technology Limited | Vapour deposition evaporator device |
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