JPS5495253A - Thermal head - Google Patents
Thermal headInfo
- Publication number
- JPS5495253A JPS5495253A JP180678A JP180678A JPS5495253A JP S5495253 A JPS5495253 A JP S5495253A JP 180678 A JP180678 A JP 180678A JP 180678 A JP180678 A JP 180678A JP S5495253 A JPS5495253 A JP S5495253A
- Authority
- JP
- Japan
- Prior art keywords
- resistor
- thermal head
- heating resistor
- boron
- kinds
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 abstract 4
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 abstract 3
- 229910052796 boron Inorganic materials 0.000 abstract 3
- 229910052751 metal Inorganic materials 0.000 abstract 3
- 239000002184 metal Substances 0.000 abstract 3
- 150000002739 metals Chemical class 0.000 abstract 3
- 239000010409 thin film Substances 0.000 abstract 3
- 239000000758 substrate Substances 0.000 abstract 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 1
- 239000012300 argon atmosphere Substances 0.000 abstract 1
- 239000000919 ceramic Substances 0.000 abstract 1
- 239000004020 conductor Substances 0.000 abstract 1
- 238000010894 electron beam technology Methods 0.000 abstract 1
- 229910052735 hafnium Inorganic materials 0.000 abstract 1
- 238000009413 insulation Methods 0.000 abstract 1
- 238000010030 laminating Methods 0.000 abstract 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 abstract 1
- 239000000395 magnesium oxide Substances 0.000 abstract 1
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 abstract 1
- 239000000843 powder Substances 0.000 abstract 1
- 229910052814 silicon oxide Inorganic materials 0.000 abstract 1
- 238000004544 sputter deposition Methods 0.000 abstract 1
- 229910052719 titanium Inorganic materials 0.000 abstract 1
- 229910052726 zirconium Inorganic materials 0.000 abstract 1
Landscapes
- Electronic Switches (AREA)
- Non-Adjustable Resistors (AREA)
Abstract
PURPOSE: To form a thermal head using a thin film heating resistor which is hard to be oxidized and is stable in resistance value by using the layer wherein two or more kinds of metals and boron are mingled in atomic scale as the heating resistor of the thermal head.
CONSTITUTION: In the thermal head formed by laminating a thin film heating resistor 2, an electric conductor 3 supplying electric power to the resistor 2 and a protecting layer composed of silicon oxide or magnesium oxide, etc. on an insulation type substrate 1 such as ceramics, the abovementioned resistor 2 is formed of two or more kinds of metals such as Ti, Zr, Hf and boron. Namely, powder of two or more kinds of the abovementioned metals and boron is pressed over about 100 kg/cm2 to make a tablet and with this as a vapor source, it is electron-beam evaporated on the substrate heated to about 200 to 500°C in a high vacuum above about 1 × 10-4 torr, whereby the thin film heating resistor 2 is formed. Similarly, forming the resistor 2 by using a sputtering method in an argon atmosphere of about 1 × 10-3 to 5 × 10-1 torr will give equally good results.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP180678A JPS5495253A (en) | 1978-01-11 | 1978-01-11 | Thermal head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP180678A JPS5495253A (en) | 1978-01-11 | 1978-01-11 | Thermal head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5495253A true JPS5495253A (en) | 1979-07-27 |
| JPS6145544B2 JPS6145544B2 (en) | 1986-10-08 |
Family
ID=11511808
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP180678A Granted JPS5495253A (en) | 1978-01-11 | 1978-01-11 | Thermal head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5495253A (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52109947A (en) * | 1976-03-11 | 1977-09-14 | Matsushita Electric Ind Co Ltd | Thermal head and its preparation |
-
1978
- 1978-01-11 JP JP180678A patent/JPS5495253A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52109947A (en) * | 1976-03-11 | 1977-09-14 | Matsushita Electric Ind Co Ltd | Thermal head and its preparation |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6145544B2 (en) | 1986-10-08 |
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