JPS5463843A - Thermal head - Google Patents
Thermal headInfo
- Publication number
- JPS5463843A JPS5463843A JP13126177A JP13126177A JPS5463843A JP S5463843 A JPS5463843 A JP S5463843A JP 13126177 A JP13126177 A JP 13126177A JP 13126177 A JP13126177 A JP 13126177A JP S5463843 A JPS5463843 A JP S5463843A
- Authority
- JP
- Japan
- Prior art keywords
- tantalum boride
- resistor
- thermal head
- thin film
- prepared
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- XTDAIYZKROTZLD-UHFFFAOYSA-N boranylidynetantalum Chemical compound [Ta]#B XTDAIYZKROTZLD-UHFFFAOYSA-N 0.000 abstract 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 238000010438 heat treatment Methods 0.000 abstract 2
- 238000004544 sputter deposition Methods 0.000 abstract 2
- 239000010409 thin film Substances 0.000 abstract 2
- 239000000919 ceramic Substances 0.000 abstract 1
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 239000004020 conductor Substances 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 230000005611 electricity Effects 0.000 abstract 1
- 238000010894 electron beam technology Methods 0.000 abstract 1
- 239000011521 glass Substances 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 238000005245 sintering Methods 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
- 238000001771 vacuum deposition Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
- H05B3/12—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
- H01C7/006—Thin film resistors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N97/00—Electric solid-state thin-film or thick-film devices, not otherwise provided for
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Non-Adjustable Resistors (AREA)
- Electronic Switches (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
Abstract
PURPOSE:To make a thermal head difficult to be oxidized and to stabilize the resistanece by using a tantalum boride as a thin film exothermic resistor. CONSTITUTION:A substrate 1 such as ceramic glass, which is prepared by the heat treatment at 200 to 500 deg.C, is formed with a thin film exothermic resistor 2 of tantalum boride in the atmosphere of Ar of 1X10<-3> to 5X10<-1>(preferably, 1X10<-2> to 1X10<-1>) Torrs by the sputtering method using a target which is prepared by sintering tantalum boride in advance at a temperature higher than 1100 deg.C through the vacuum hot press, followed by the heat treatment at 200 to 650 deg.C. An electric conductor 3 for supplying electricity to the resistor 2 is further formed there on, and a protecting layer such as SiO2 is then formed by the vacuum evaporation and sputtering method using electron beams.
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP52131261A JPS6016083B2 (en) | 1977-10-31 | 1977-10-31 | thermal head |
US05/906,359 US4296309A (en) | 1977-05-19 | 1978-05-15 | Thermal head |
DE19782821950 DE2821950A1 (en) | 1977-05-19 | 1978-05-19 | Head for thermal printing with stable resistance - obtd. by sputtering a metal boride resistance heating element onto a glazed substrate |
US06/552,013 US4545881A (en) | 1977-05-19 | 1983-11-16 | Method for producing electro-thermal transducer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP52131261A JPS6016083B2 (en) | 1977-10-31 | 1977-10-31 | thermal head |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5463843A true JPS5463843A (en) | 1979-05-23 |
JPS6016083B2 JPS6016083B2 (en) | 1985-04-23 |
Family
ID=15053779
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP52131261A Expired JPS6016083B2 (en) | 1977-05-19 | 1977-10-31 | thermal head |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6016083B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112789420A (en) * | 2018-11-29 | 2021-05-11 | Nok株式会社 | Sealing device |
US11105374B2 (en) | 2016-04-12 | 2021-08-31 | Ntn Corporation | Rolling bearing unit |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6414988U (en) * | 1987-07-16 | 1989-01-25 |
-
1977
- 1977-10-31 JP JP52131261A patent/JPS6016083B2/en not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11105374B2 (en) | 2016-04-12 | 2021-08-31 | Ntn Corporation | Rolling bearing unit |
CN112789420A (en) * | 2018-11-29 | 2021-05-11 | Nok株式会社 | Sealing device |
Also Published As
Publication number | Publication date |
---|---|
JPS6016083B2 (en) | 1985-04-23 |
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