JPS5463844A - Thermal head - Google Patents
Thermal headInfo
- Publication number
- JPS5463844A JPS5463844A JP13126277A JP13126277A JPS5463844A JP S5463844 A JPS5463844 A JP S5463844A JP 13126277 A JP13126277 A JP 13126277A JP 13126277 A JP13126277 A JP 13126277A JP S5463844 A JPS5463844 A JP S5463844A
- Authority
- JP
- Japan
- Prior art keywords
- titanium boride
- resistor
- thermal head
- thin film
- prepared
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 abstract 3
- 229910052719 titanium Inorganic materials 0.000 abstract 3
- 239000010936 titanium Substances 0.000 abstract 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 238000010438 heat treatment Methods 0.000 abstract 2
- 238000004544 sputter deposition Methods 0.000 abstract 2
- 239000010409 thin film Substances 0.000 abstract 2
- 239000000919 ceramic Substances 0.000 abstract 1
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 239000004020 conductor Substances 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 230000005611 electricity Effects 0.000 abstract 1
- 238000010894 electron beam technology Methods 0.000 abstract 1
- 239000011521 glass Substances 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 238000005245 sintering Methods 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
- 238000001771 vacuum deposition Methods 0.000 abstract 1
Landscapes
- Apparatuses And Processes For Manufacturing Resistors (AREA)
- Non-Adjustable Resistors (AREA)
- Electronic Switches (AREA)
Abstract
PURPOSE: To make a thermal head difficult to be oxidized and to stabilize the resistance by using a titanium boride as a thin film exothermic resistor.
CONSTITUTION: A substrate 1 such as ceramic glass, which is prepared by the heat treatment at 200 to 500°C, is formed with a thin film exothermic resistor 2 of titanium boride in the atmosphere of Ar of 1×10-3 to 5×10-1 (preferably, 1×10-2 to 1×10-1) Torrs by the sputtering method using a target which is prepared by sintering titanium boride in advance at a temperature higher than 1100°C through the vacuum hot press, followed by the heat treatment at 200 to 650°C. An electric conductor 3 for supplying electricity to the resistor 2 is further formed thereon, and a protecting layer such as SiO2 is then formed by the vacuum evaporation and sputtering method using electron beams.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP52131262A JPS6016084B2 (en) | 1977-10-31 | 1977-10-31 | thermal head |
| US05/906,359 US4296309A (en) | 1977-05-19 | 1978-05-15 | Thermal head |
| DE19782821950 DE2821950A1 (en) | 1977-05-19 | 1978-05-19 | Head for thermal printing with stable resistance - obtd. by sputtering a metal boride resistance heating element onto a glazed substrate |
| US06/552,013 US4545881A (en) | 1977-05-19 | 1983-11-16 | Method for producing electro-thermal transducer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP52131262A JPS6016084B2 (en) | 1977-10-31 | 1977-10-31 | thermal head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5463844A true JPS5463844A (en) | 1979-05-23 |
| JPS6016084B2 JPS6016084B2 (en) | 1985-04-23 |
Family
ID=15053804
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP52131262A Expired JPS6016084B2 (en) | 1977-05-19 | 1977-10-31 | thermal head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6016084B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6439996U (en) * | 1987-09-05 | 1989-03-09 | ||
| JPH0280280U (en) * | 1988-12-12 | 1990-06-20 |
-
1977
- 1977-10-31 JP JP52131262A patent/JPS6016084B2/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6016084B2 (en) | 1985-04-23 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| GB1522221A (en) | Resistance element for a resistance thermometer and a process for its production | |
| JPS56130374A (en) | Thermal head | |
| JPS5463844A (en) | Thermal head | |
| JPS5463843A (en) | Thermal head | |
| JPS5492274A (en) | Thermal head | |
| JPS5463842A (en) | Thermal head | |
| JPS5492271A (en) | Thermal head | |
| JPS5492278A (en) | Thermal head | |
| JPS5563287A (en) | Thermal head | |
| JPS5492276A (en) | Thermal head | |
| JPS5417853A (en) | Manufacture of integrated thermal heads | |
| JPS5492270A (en) | Thermal head | |
| JPS5495253A (en) | Thermal head | |
| JPS56130377A (en) | Heat-sensitive recording head | |
| JPS5720371A (en) | Thermal head | |
| JPS5485734A (en) | Thin film type thermal head | |
| JPS5463297A (en) | Thermal head | |
| JPS5492267A (en) | Thermal head | |
| JPS5492277A (en) | Thermal head | |
| JPS5492268A (en) | Thermal head | |
| JPS5727768A (en) | Heat-sensitive recording head | |
| JPS5492266A (en) | Thermal head | |
| JPS54151452A (en) | Thermal head | |
| JPS54107349A (en) | Thermal head | |
| JPS5684980A (en) | Thermal head |