JPS5492274A - Thermal head - Google Patents
Thermal headInfo
- Publication number
- JPS5492274A JPS5492274A JP16014577A JP16014577A JPS5492274A JP S5492274 A JPS5492274 A JP S5492274A JP 16014577 A JP16014577 A JP 16014577A JP 16014577 A JP16014577 A JP 16014577A JP S5492274 A JPS5492274 A JP S5492274A
- Authority
- JP
- Japan
- Prior art keywords
- oxygen
- chromium
- chromium boride
- heating element
- sputtering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 abstract 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 4
- 229910052804 chromium Inorganic materials 0.000 abstract 4
- 239000011651 chromium Substances 0.000 abstract 4
- 238000010438 heat treatment Methods 0.000 abstract 4
- 239000001301 oxygen Substances 0.000 abstract 4
- 229910052760 oxygen Inorganic materials 0.000 abstract 4
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 abstract 2
- 239000004020 conductor Substances 0.000 abstract 2
- 238000004544 sputter deposition Methods 0.000 abstract 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract 1
- 229910052782 aluminium Inorganic materials 0.000 abstract 1
- 229910052786 argon Inorganic materials 0.000 abstract 1
- 239000000919 ceramic Substances 0.000 abstract 1
- 238000010894 electron beam technology Methods 0.000 abstract 1
- 239000011521 glass Substances 0.000 abstract 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 abstract 1
- 229910052737 gold Inorganic materials 0.000 abstract 1
- 239000010931 gold Substances 0.000 abstract 1
- 239000000615 nonconductor Substances 0.000 abstract 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 abstract 1
- 229910052814 silicon oxide Inorganic materials 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- 229910001936 tantalum oxide Inorganic materials 0.000 abstract 1
- 239000010409 thin film Substances 0.000 abstract 1
- 238000007740 vapor deposition Methods 0.000 abstract 1
Landscapes
- Apparatuses And Processes For Manufacturing Resistors (AREA)
- Non-Adjustable Resistors (AREA)
- Electronic Switches (AREA)
Abstract
PURPOSE: To obtain a thermal head which is hard to be oxidized, is stable in resistance value and permits selection of specific resistance up to a high value by using a heating resistor composed of chromium boride and oxygen.
CONSTITUTION: A thin film heating resistor 2 which is composed of chromium boride and oxygen by making sputtering or other of the target of chromium boride in a mixed atmosphere of argon and oxygen to let oxygen be contained at more than 0.005 of the chromium in atom ratio is formed on a substrate 1 composed of an electrical insulator such as ceramics, glass or other. An electric conductor 3 which is formed of good electric doncutor such as aluminum, gold or other and supplies electric power to the heating element 2 is provided thereon. The heating element 2 and conductor 3 are combined with the silicon oxide, tantalum oxide or these having been made by, e.g., electron beam vapor deposition, sputtering or other to form a protecting layer 4. Thereby the life of the head may be made much longer.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP52160145A JPS6038006B2 (en) | 1977-12-28 | 1977-12-28 | thermal head |
US05/906,359 US4296309A (en) | 1977-05-19 | 1978-05-15 | Thermal head |
US06/552,013 US4545881A (en) | 1977-05-19 | 1983-11-16 | Method for producing electro-thermal transducer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP52160145A JPS6038006B2 (en) | 1977-12-28 | 1977-12-28 | thermal head |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5492274A true JPS5492274A (en) | 1979-07-21 |
JPS6038006B2 JPS6038006B2 (en) | 1985-08-29 |
Family
ID=15708832
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP52160145A Expired JPS6038006B2 (en) | 1977-05-19 | 1977-12-28 | thermal head |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6038006B2 (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62229010A (en) * | 1986-03-31 | 1987-10-07 | Agency Of Ind Science & Technol | Automatic measuring method for positional deviation and angle of attitude of object having straight part |
JPS62229011A (en) * | 1986-03-31 | 1987-10-07 | Agency Of Ind Science & Technol | Automatic measuring method for attitude and dimensions of object having straight part |
JPS62229014A (en) * | 1986-03-31 | 1987-10-07 | Agency Of Ind Science & Technol | Automatic measuring method for positional deviations and angle of attitude of object having square part |
EP0580041A2 (en) | 1992-07-10 | 1994-01-26 | Fuji Photo Film Co., Ltd. | Method of processing silver halide photographic material and composition for processing |
EP0589460A1 (en) | 1992-09-24 | 1994-03-30 | Fuji Photo Film Co., Ltd. | Method for processing a black & white silver halide light-sensitive material |
-
1977
- 1977-12-28 JP JP52160145A patent/JPS6038006B2/en not_active Expired
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62229010A (en) * | 1986-03-31 | 1987-10-07 | Agency Of Ind Science & Technol | Automatic measuring method for positional deviation and angle of attitude of object having straight part |
JPS62229011A (en) * | 1986-03-31 | 1987-10-07 | Agency Of Ind Science & Technol | Automatic measuring method for attitude and dimensions of object having straight part |
JPS62229014A (en) * | 1986-03-31 | 1987-10-07 | Agency Of Ind Science & Technol | Automatic measuring method for positional deviations and angle of attitude of object having square part |
EP0580041A2 (en) | 1992-07-10 | 1994-01-26 | Fuji Photo Film Co., Ltd. | Method of processing silver halide photographic material and composition for processing |
EP0589460A1 (en) | 1992-09-24 | 1994-03-30 | Fuji Photo Film Co., Ltd. | Method for processing a black & white silver halide light-sensitive material |
Also Published As
Publication number | Publication date |
---|---|
JPS6038006B2 (en) | 1985-08-29 |
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