JP6265361B2 - 差圧センサ - Google Patents
差圧センサ Download PDFInfo
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- JP6265361B2 JP6265361B2 JP2017533145A JP2017533145A JP6265361B2 JP 6265361 B2 JP6265361 B2 JP 6265361B2 JP 2017533145 A JP2017533145 A JP 2017533145A JP 2017533145 A JP2017533145 A JP 2017533145A JP 6265361 B2 JP6265361 B2 JP 6265361B2
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- JP
- Japan
- Prior art keywords
- chamber
- lead frame
- substrate
- differential pressure
- pressure sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- 239000000758 substrate Substances 0.000 claims description 38
- 230000004888 barrier function Effects 0.000 claims description 13
- 239000000945 filler Substances 0.000 claims description 11
- 239000004020 conductor Substances 0.000 claims description 9
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 claims description 4
- 238000007789 sealing Methods 0.000 claims description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- 239000000919 ceramic Substances 0.000 claims description 3
- 239000003985 ceramic capacitor Substances 0.000 claims description 3
- 238000000034 method Methods 0.000 description 10
- 230000008878 coupling Effects 0.000 description 4
- 238000010168 coupling process Methods 0.000 description 4
- 238000005859 coupling reaction Methods 0.000 description 4
- 238000000926 separation method Methods 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000005856 abnormality Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000013618 particulate matter Substances 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
- G01L13/06—Devices or apparatus for measuring differences of two or more fluid pressure values using electric or magnetic pressure-sensitive elements
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01N—GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES OR ENGINES IN GENERAL; GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNAL COMBUSTION ENGINES
- F01N13/00—Exhaust or silencing apparatus characterised by constructional features ; Exhaust or silencing apparatus, or parts thereof, having pertinent characteristics not provided for in, or of interest apart from, groups F01N1/00 - F01N5/00, F01N9/00, F01N11/00
- F01N13/08—Other arrangements or adaptations of exhaust conduits
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
- G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
- G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
- G01L19/0627—Protection against aggressive medium in general
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01N—GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES OR ENGINES IN GENERAL; GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNAL COMBUSTION ENGINES
- F01N11/00—Monitoring or diagnostic devices for exhaust-gas treatment apparatus, e.g. for catalytic activity
- F01N11/002—Monitoring or diagnostic devices for exhaust-gas treatment apparatus, e.g. for catalytic activity the diagnostic devices measuring or estimating temperature or pressure in, or downstream of the exhaust apparatus
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01N—GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES OR ENGINES IN GENERAL; GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNAL COMBUSTION ENGINES
- F01N13/00—Exhaust or silencing apparatus characterised by constructional features ; Exhaust or silencing apparatus, or parts thereof, having pertinent characteristics not provided for in, or of interest apart from, groups F01N1/00 - F01N5/00, F01N9/00, F01N11/00
- F01N13/18—Construction facilitating manufacture, assembly, or disassembly
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01N—GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES OR ENGINES IN GENERAL; GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNAL COMBUSTION ENGINES
- F01N2560/00—Exhaust systems with means for detecting or measuring exhaust gas components or characteristics
- F01N2560/08—Exhaust systems with means for detecting or measuring exhaust gas components or characteristics the means being a pressure sensor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/142—Multiple part housings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L23/00—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid
- G01L23/24—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid specially adapted for measuring pressure in inlet or exhaust ducts of internal-combustion engines
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Measuring Fluid Pressure (AREA)
Description
まず、図4に示すように、本体(20)の第2チャンバー(12)の周囲の分離壁(13)と支持部(14)などに形成された溝(15)に第2シール部(80)をなす接着剤を塗布する。
第1圧力チャンネル(24)を排気系・後処理装置の前段に接続し、第2圧力チャンネル(25)を後段に接続すると、センサ素子(40)の下部には、基板(30)の開口(33)を介して第2チャンバー(12)(第2圧力チャンネル)の圧力が伝達されて、センサ素子(40)の上部には、センサ素子(40)を覆っているゲル(35)を介して第1チャンバー(11)(第1圧力チャンネル)の圧力が伝達される。センサ素子(40)は、差圧に応じた電気信号を発生させる。この電気信号は、基板(30)の配線と電子部品(31)を介して基板(30)の端子(32)に伝達される。そして、端子(32)とリードフレーム(50)を電気的に接続するリード線(60)を介してリードフレーム(50)に伝達される。リードフレーム(50)に伝達された電気信号は、本体(20)のコネクタ部(16)に接続された外部デバイスに伝達される。外部デバイスは、差圧を測定し、排気系・後処理装置の状態を判断する。
11:第1チャンバー
12:第2チャンバー
13:隔壁
14:支持部
15:ホーム
16:コネクタ部
17:結合溝
18:バリア
19:ガイド
20:本体
21:カバー
24:第1圧力チャンネル
25:第2圧力チャンネル
30:基板
31:電子部品
32:端子
33:開口
34:センサ素子バリア
35:ゲル
40:センサ素子
50:リードフレーム
51:第1リードフレーム
52:第2リードフレーム
53:第3リードフレーム
60:導線
70:第1シール部
80:第2シール部
90:充填剤
Claims (7)
- 本体とカバーを含み、その内部に互いに分離された第1チャンバーと第2チャンバーが形成されたハウジングと、
前記第1チャンバーと連通された第1圧力チャンネル及び前記第2チャンバーと連通した第2圧力チャンネルと、
電子部品が搭載されて端子が形成され、前記第1チャンバーと面する第1面とその第1面と平行して前記第2チャンバーと面する第2面を備えて、前記第2のチャンバーを覆う基板と、
前記基板の第1面に、前記第1チャンバーと第2チャンバーの圧力差に応じた電気信号を発生させるように設置されたセンサ素子と、
前記ハウジングに設置され、その一端が前記第1チャンバーの内部に延長され、前記センサ素子の電気信号を外部装置に転送するように構成されたリードフレームと、
前記センサ素子の電気信号を前記リードフレームに伝達するために、前記基板の端子と前記リードフレームを接続するリード線と、
前記本体とカバーが接する領域に配置されて、前記第1チャンバーを外部に対して密封する第1シール部と、
前記基板と前記本体が接する領域に配置されて、前記第2のチャンバーを前記第1チャンバーに対して密封する第2シール部とを含む差圧センサ。 - 前記基板の電子部品、端子及び導線を保護するために、前記基板の電子部品、端子及び導体を包む充填剤をさらに含む、請求項1に記載の差圧センサ。
- 前記充填剤は、ゲル状態である、請求項2に記載の差圧センサ。
- 前記センサ素子と、前記端子間で、前記基板から前記カバーの方向に突出したバリアをさらに含み、前記充填剤は、前記バリアと前記ハウジングの内壁たちによって囲まれた領域に塗布された、請求項2に記載の差圧センサ。
- 前記電子部品は、積層セラミックコンデンサを含み、前記導線はアルミニウム線の請求項1に記載の差圧センサ。
- 前記基板はセラミック基板である、請求項1に記載の差圧センサ。
- 前記リードフレームは、互いに電気的に分離された第1リードフレーム、第2リードフレーム及び第3リードフレームとを含んでおり、前記第2のリードフレームの一端部の少なくとも一部分と前記第3リードフレームの一端部の少なくとも一部が互いに交錯するよう構成された、請求項1に記載の差圧センサ。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/KR2014/008222 WO2016035903A1 (ko) | 2014-09-03 | 2014-09-03 | 차압센서 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2017526942A JP2017526942A (ja) | 2017-09-14 |
JP6265361B2 true JP6265361B2 (ja) | 2018-01-24 |
Family
ID=55439955
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017533145A Expired - Fee Related JP6265361B2 (ja) | 2014-09-03 | 2014-09-03 | 差圧センサ |
Country Status (4)
Country | Link |
---|---|
US (1) | US10190931B2 (ja) |
JP (1) | JP6265361B2 (ja) |
CN (1) | CN107076630A (ja) |
WO (1) | WO2016035903A1 (ja) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102015107306A1 (de) * | 2015-05-11 | 2016-11-17 | Endress + Hauser Gmbh + Co. Kg | Feldgerät zum Einsatz in der Prozessautomatisierung |
GB2551710B (en) * | 2016-06-24 | 2020-07-01 | Perkins Engines Co Ltd | Housing for sensor assembly of after treatment system |
KR101836282B1 (ko) * | 2016-10-20 | 2018-03-08 | 현대자동차 주식회사 | 차압 센서를 구비한 배기 시스템 |
CN111566463A (zh) * | 2018-02-15 | 2020-08-21 | 三美电机株式会社 | 压力传感器装置 |
CN110553783A (zh) * | 2018-05-31 | 2019-12-10 | 联合汽车电子有限公司 | 用于车辆的压力传感器以及压力测量方法 |
CN109506828A (zh) * | 2018-12-28 | 2019-03-22 | 武汉飞恩微电子有限公司 | 一种检测汽车尾气颗粒捕捉的压力传感器装置 |
CN111912561A (zh) * | 2020-08-27 | 2020-11-10 | 苏州益维蓝电子科技有限公司 | 一种压差式压力传感器 |
CN112611500A (zh) * | 2020-12-31 | 2021-04-06 | 西人马联合测控(泉州)科技有限公司 | 压力传感器 |
Family Cites Families (24)
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US3808480A (en) * | 1973-04-16 | 1974-04-30 | Bunker Ramo | Capacitive pressure transducer |
US3880009A (en) * | 1973-05-24 | 1975-04-29 | Bunker Ramo | Pressure transducer |
KR920005348Y1 (ko) * | 1988-03-01 | 1992-08-03 | 미쓰비시전기주식회사 | 압력센서 |
US4879903A (en) * | 1988-09-02 | 1989-11-14 | Nova Sensor | Three part low cost sensor housing |
ES2048322T3 (es) * | 1989-08-04 | 1994-03-16 | Endress Hauser Gmbh Co | Dispositivo manometrico. |
US5969591A (en) * | 1991-03-28 | 1999-10-19 | The Foxboro Company | Single-sided differential pressure sensor |
JP4072973B2 (ja) * | 1998-09-07 | 2008-04-09 | 日本電産コパル電子株式会社 | 圧力変換器 |
JP2000346737A (ja) | 1999-06-02 | 2000-12-15 | Denso Corp | 圧力センサ |
US6272928B1 (en) * | 2000-01-24 | 2001-08-14 | Kulite Semiconductor Products | Hermetically sealed absolute and differential pressure transducer |
DE10223357A1 (de) * | 2002-05-25 | 2003-12-04 | Bosch Gmbh Robert | Vorrichtung zur Druckmessung |
JP4879899B2 (ja) * | 2005-08-01 | 2012-02-22 | パナソニック株式会社 | 半導体装置 |
ITMI20070099A1 (it) * | 2007-01-24 | 2008-07-25 | St Microelectronics Srl | Dispositivo elettronico comprendente dispositivi sensori differenziali mems e substrati bucati |
US7992441B2 (en) * | 2008-07-31 | 2011-08-09 | Sensata Technologies, Inc. | Pressure sensor for measuring pressure in a medium |
JP2010145341A (ja) | 2008-12-22 | 2010-07-01 | Nabtesco Corp | 圧力センサモジュール |
PL2312290T3 (pl) * | 2009-10-16 | 2020-06-01 | First Sensor Mobility Gmbh | Czujnik ciśnienia i jego zastosowanie w zbiorniku płynu |
KR20120062363A (ko) * | 2010-12-06 | 2012-06-14 | 현대자동차주식회사 | Lp-egr 쿨러 차압 센서 |
JP5853171B2 (ja) * | 2010-12-13 | 2016-02-09 | パナソニックIpマネジメント株式会社 | 半導体圧力センサおよびその製造方法 |
EP2554968B1 (en) * | 2011-08-01 | 2019-01-16 | Sensata Technologies, Inc. | Sensor system for differential pressure measurement |
CN202693192U (zh) * | 2012-06-27 | 2013-01-23 | 龙泉市杰科汽车零部件有限公司 | 一种差压传感器 |
JP5997570B2 (ja) * | 2012-10-15 | 2016-09-28 | アズビル株式会社 | 圧力センサチップ |
CN103278285A (zh) * | 2013-06-08 | 2013-09-04 | 无锡隆盛科技股份有限公司 | 一种压差传感器 |
KR101486518B1 (ko) | 2013-08-06 | 2015-01-27 | 주식회사 코멧네트워크 | 차압센서 |
JP2015165222A (ja) * | 2014-03-03 | 2015-09-17 | 株式会社デンソー | 圧力センサ |
FR3018916B1 (fr) * | 2014-03-19 | 2017-08-25 | Commissariat Energie Atomique | Capteur de mesure de pression differentielle microelectromecanique et/ou nanoelectromecanique |
-
2014
- 2014-09-03 JP JP2017533145A patent/JP6265361B2/ja not_active Expired - Fee Related
- 2014-09-03 US US15/508,403 patent/US10190931B2/en not_active Expired - Fee Related
- 2014-09-03 CN CN201480082462.0A patent/CN107076630A/zh active Pending
- 2014-09-03 WO PCT/KR2014/008222 patent/WO2016035903A1/ko active Application Filing
Also Published As
Publication number | Publication date |
---|---|
WO2016035903A1 (ko) | 2016-03-10 |
JP2017526942A (ja) | 2017-09-14 |
US20170284884A1 (en) | 2017-10-05 |
US10190931B2 (en) | 2019-01-29 |
CN107076630A (zh) | 2017-08-18 |
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