JP4329845B2 - Discharge lamp holding mechanism - Google Patents

Description

  The present invention relates to a discharge lamp holding mechanism, and more particularly to a discharge lamp holding mechanism for a large discharge lamp that is difficult to attach to a holder.

In recent years, an exposure technique using a short arc discharge lamp as a light source for photolithography has been used in the fields of semiconductor and liquid crystal exposure and other fine processing.
As a light source in photolithography, a discharge lamp that efficiently emits light with a wavelength of 365 nm (i-line), which is sensitive to photoresist, is applied, and light with a wavelength of 350 nm to 450 nm is emitted during exposure of liquid crystal and printed circuit boards. A discharge lamp is applied. In the discharge lamp, mercury is enclosed as a luminescent substance, and a rare gas such as argon or xenon is enclosed as a starting gas.

While the light source device has a larger area to be exposed, the processing time (throughput) tends to be shorter, and the discharge lamp, which is a light source, also tends to increase the amount of exposure by increasing the input.
However, an increase in lamp input physically increases the size of the lamp, and the work of assembling the reflecting mirror becomes more complicated. In particular, when the lamp is enlarged, the burden on the operator increases in terms of both dimensions and weight.

FIG. 14 shows a light source device using such a discharge lamp.
The light source device includes a discharge lamp 10, a reflection mirror 20, and a lamp holder 5 in a lamp house 100. The reflection mirror 20 has a concave shape, is installed with the upper opening 21 facing upward, and the lamp holder 5 is installed below the lower opening 22 of the reflection mirror 20, which is attached to the holder fixing base 30. The discharge lamp 10 with the base 4 mounted in the reflection mirror 20 is mounted so as to stand in the vertical direction. In order to mount the discharge lamp 10, the lead wire 15 is first passed through the lower opening 22 of the reflection mirror 20, and then the discharge lamp 10 is inserted and held in the internal space of the reflection mirror 20 with one hand. With one hand, the lamp holder 5 is screwed to the base 4 mounted on the discharge lamp 10 outside the reflecting mirror 20.

In the case of such a structure, when the lead wire 15 is passed through the lower opening 22 of the reflection mirror 20, the reflection mirror 20 may be damaged. Further, the screwing must be performed outside the reflection mirror 20 with the other hand while holding the discharge lamp 10 with one hand, which is very complicated.
No. 7-13171

  An object of the present invention is to provide a discharge lamp holding mechanism capable of easily fixing a discharge lamp even if the discharge lamp is enlarged.

In order to solve the above-mentioned problems, a discharge lamp holding mechanism according to the present invention includes a discharge lamp having a cap attached to at least one end thereof, and the discharge lamp is held in a vertical direction and can be attached and detached. A lamp holder that
A base of the discharge lamp extends along the tube axis of the discharge lamp and is mounted so as to cover an end of the discharge lamp, and a width in a direction perpendicular to the tube axis from the base side of the base Is formed into a small column-shaped base-side temporary fixing mechanism that protrudes from the front end surface of the base-side base portion and extends along the tube axis toward the lamp holder, and an outer peripheral surface on the front-end side of the base-side base portion And a base side fixed mechanism formed on
The lamp holder is engaged with the base-side main fixing mechanism, and a holder-side base portion having a holder-side temporary fixing mechanism including a recess extending along the tube axis for engaging with the base-side temporary fixing mechanism. A cylindrical holder-side main fixing mechanism that is provided on the outer peripheral surface of the holder-side base portion and rotates in the circumferential direction around the holder-side base portion,
The base and the lamp holder are temporarily fixed by engaging the base side temporary fixing mechanism and the holder side temporary fixing mechanism, and the base side main fixing mechanism and the holder side main fixing mechanism are A discharge lamp holding mechanism that is fixed by being engaged,
The base-side temporary fixing mechanism is formed with a proximal-side fitting portion and a distal-side fitting portion at two locations separated in the tube axis direction, and the proximal-side fitting portion and the distal-side fitting portion. A base side insertion part is formed between the joint part,
The holder-side temporary fixing mechanism includes a proximal-side fitting recess for fitting into the proximal-side fitting portion and the distal-side fitting portion at two locations spaced in the central axis direction of the lamp holder. And a distal-side fitting recess, and a holder-side inserted portion for inserting the base-side insertion portion is formed between the proximal-side fitting recess and the distal-side fitting recess. ,
The base and the lamp holder satisfy the relationship shown in the following relationship 1.
(Relationship 1)
The difference between the width in the direction perpendicular to the central axis of the lamp holder in the holder side insertion portion and the width in the direction perpendicular to the tube axis in the base side insertion portion is D,
The difference between the width in the direction perpendicular to the center axis of the lamp holder in the concave portion for fitting on the base end side and the width in the direction orthogonal to the tube axis in the base end side fitting portion is E,
When the difference between the width in the direction perpendicular to the central axis of the lamp holder in the concave portion for fitting on the tip side and the width in the direction perpendicular to the tube axis in the fitting portion on the tip side is F,
D is greater than both E and F.

Furthermore, the discharge lamp holding mechanism of the present invention satisfies the relationship shown in the following relationship 2 in addition to the relationship 1 described above.
(Relationship 2)
The difference between the width in the direction perpendicular to the center axis of the lamp holder in the proximal end fitting recess and the width in the direction perpendicular to the tube axis of the distal fitting part is A,
The difference between the width in the direction perpendicular to the central axis of the lamp holder in the concave portion for fitting on the base end side and the width in the direction perpendicular to the tube axis of the base side insertion portion is B,
When the difference between the width in the direction perpendicular to the central axis of the lamp holder in the holder-side insertion portion and the width in the direction perpendicular to the tube axis of the tip-side fitting portion is C,
All of A, B and C are larger than both E and F.

  The base-side main fixing mechanism has a base-side screw portion formed at a side edge on the tip side of the base-side base portion, and the holder-side main fixing mechanism has a holder-side screw portion formed on the inner peripheral surface thereof. It is characterized by that.

  Furthermore, in the discharge lamp holding mechanism of the present invention, the base and the lamp holder are made of a conductive member, and the distal end surface of the base side of the base and the base end surface of the base of the holder are in contact with each other. An electric power feeding mechanism is formed by permanently fixing the base and the lamp holder.

  Furthermore, in the discharge lamp holding mechanism according to the present invention, the lamp holder is formed with a protrusion protruding from the base end surface of the holder-side base portion toward the base-side base portion, and the base is provided with the base A recess for engaging with the protrusion is formed on the distal end surface of the side base portion.

  Furthermore, the discharge lamp holding mechanism of the present invention is characterized in that the rated current is 50 A or more.

The discharge lamp holding mechanism according to the present invention can be held even if the discharge lamp is released by operating the base-side temporary fixing mechanism and the holder-side temporary fixing mechanism (temporary fixing). It is not necessary to hold the lamp with the other hand while holding the lamp.
Moreover, the base-side temporary fixing mechanism is formed with two base-side fitting portions spaced apart in the tube axis direction, and the holder-side temporary fixing mechanism is separated in the tube axis direction corresponding to each base-side fitting portion. Since the holder-side fitting portion is formed at the two locations, it is possible to reliably recognize that the temporary fixing has been completed in the operation of temporarily fixing the discharge lamp to the lamp holder. Increases efficiency.
In addition, since the base and the lamp holder are configured to satisfy the above relationship 1, the base-side temporary fixing mechanism can freely move in a direction perpendicular to the tube axis inside the holder-side temporary fixing mechanism. Even when the center axis of the base side temporary fixing mechanism is eccentric from the holder central axis during temporary fixing work, the base side temporary fixing mechanism can be changed to the holder side temporary fixing mechanism without damaging the discharge lamp. Engagement can be ensured.

  Furthermore, since the discharge lamp holding mechanism according to the present invention is configured to satisfy the relationship 2 in addition to the relationship 1, the base-side temporary fixing mechanism is orthogonal to the tube axis inside the holder-side temporary fixing mechanism. Since it becomes easier to move freely in the direction, it is possible to more reliably prevent the discharge lamp from being damaged when performing the temporary fixing operation.

Furthermore, since the base-side screw portion is formed on the outer peripheral surface of the tip side of the base-side main fixing mechanism and the holder-side screw portion is formed on the inner peripheral surface of the holder-side main fixing mechanism, the respective screw portions are screwed together. By doing so, the base of the discharge lamp and the lamp holder can be securely fixed.
Further, the base and the lamp holder are made of a conductive member, and the base and the lamp holder are permanently fixed in a state where the distal end surface of the base side base portion and the base end surface of the holder side base portion are in contact with each other. Since an electric power feeding mechanism between the lamp holder and the lamp holder is formed, there is no need to use a lead wire as in the prior art, and there is no possibility of damaging the reflection mirror when the discharge lamp is attached to the reflection mirror.

  Furthermore, the lamp holder is formed with a protrusion that protrudes from the base end surface of the holder-side base portion toward the base-side base portion, and the base engages with the protrusion on the tip surface of the base-side base portion. Therefore, the base rotates in the circumferential direction during the main fixing operation in which the holder side main fixing mechanism is rotated to fix the holder side main fixing mechanism to the base side main fixing mechanism. This will improve the work efficiency of permanent fixing.

FIG. 1 shows a discharge lamp holding mechanism in a state in which a discharge lamp 10 is mounted on a lamp holder 5 attached to a holding table 30 of an exposure apparatus and both are fixed.
The discharge lamp 10 (hereinafter also simply referred to as “lamp”) passes through the lower opening 22 of the reflection mirror 20 and is attached to the lamp holder 5. Here, the lamp 10 and the holder 5 to which the base 4 is attached are used as a discharge lamp holding mechanism, and the lamp 10, the reflection mirror 20, and the lamp holder 5 are referred to as a light source device. The lamp holder 5 is fixed to the holder 30 of the exposure apparatus, for example, by screwing. A pin 31 is provided at the lower part of the lamp holder 5 and is pressed against the side surface of the holding table 30. The reflecting mirror 20 is fixed to an exposure apparatus or the like by a mechanism not shown.

FIG. 2 is a drawing showing the discharge lamp 10 in a state before being fixed to the holder 5. The discharge lamp 10 has an arc tube portion 11 made of, for example, quartz glass at the center in the tube axis direction, and is integrally formed so that rod-shaped sealing portions 12 extend at both ends thereof. The arc tube portion 11 has a spherical shape or a spindle shape elongated in the tube axis direction (vertical direction in the drawing). An airtight space is formed inside the arc tube portion 11 and mercury as a luminescent material, xenon or argon as a starting gas. Is enclosed. In addition, the anode 13 and the cathode 14 are disposed opposite to each other inside the arc tube portion 11, and the interval between the tips is formed as a discharge gap. The discharge gap is also the distance between the electrodes, and is, for example, about 5 mm. A cylindrical base 4 is attached to the tip of the lower sealing portion 12. In addition, although the cylindrical nozzle | cap | die 4 is mounted | worn also at the front-end | tip of the sealing part of the upper side in a figure, it is not essential in this invention.
The lamp 10 has a vertical arrangement in which one of the electrodes is located above and the other electrode is located below. In this embodiment, the cathode 14 is located below and the anode 13 is located above.

  Returning to FIG. 1, the reflecting mirror 20 is formed by coating a reflecting surface of a glass base material with a multilayer film, for example, and has a concave shape as a whole and reflects the emitted light from the lamp 10 satisfactorily. In many cases, an elliptical condensing mirror is used as the reflecting mirror 20. In this case, it is necessary to make the arc of the discharge lamp 10 coincide with the first focal point of the reflecting mirror 20. Since this arc is generally formed between the discharge gaps, the lamp is installed so that the discharge gap is located at the first focal point of the reflection mirror 20. The direction of the reflection mirror 20 is shown as open at the top, but there is also the one at the bottom (on the holder side).

In recent years, the lamp 10 and the reflection mirror 20 have become larger. As described above, the discharge lamp holding mechanism of the present invention is particularly useful when the size of the lamp or the reflecting mirror is increased.
As for numerical values of the lamp 10, the lamp power is rated value 3KW to 40KW, the lamp current is rated value 50A to 200A, and the maximum outer diameter of the arc tube portion 11 (diameter perpendicular to the direction in which the electrode extends) is 50 mm. ~ 250mm. The weight of the lamp is 0.5 kg to 10 kg. As for numerical examples of the reflection mirror 20, the upper opening 21 is φ300 mm to 1000 mm, and the depth in the direction in which the lamp extends is 200 mm to 800 mm.

3 shows a state where the light source device shown in FIG. 1 is viewed from a direction different from that in FIG. 1, and a part of the reflection mirror 20 is cut away to express the internal structure of the reflection mirror 20.
The reflection mirror 20 has a large-diameter upper opening 21 and a small-diameter lower opening 22. The lower opening 22 needs to be at least large enough to allow the sealing part 12 or the base 4 of the lamp 10 to pass through. If the lower opening 22 is too large, the emitted light of the lamp 10 leaks from the lower opening 22 and the light utilization efficiency is lowered.

FIG. 4 is an enlarged view for explaining the configuration of a base attached to the sealing portion of the discharge lamp of the present invention.
The base 4 is formed in a cylindrical shape as a whole, extends along the tube axis of the discharge lamp 10, and is continuously formed on the base side base portion 41 attached to the sealing portion 12 and the base side base portion 41. A column-shaped base side temporary fixing mechanism 42 extending along the axis is provided. The base-side base portion 41 is continuous with the base-side body portion 411 attached to the sealing portion 12 of the lamp 10 and the distal end side of the base-side body portion 411, with respect to the tube axis rather than the base-side body portion 411. And a base-side flange portion 412 formed in a bowl shape so that the width in the orthogonal direction (hereinafter also simply referred to as width) is increased. The base-side base portion 41 and the base-side temporary fixing mechanism 42 are physically constituted by a single member, for example, a conductive member such as brass.

  The base-side flange portion 412 includes a flat base-side power feeding surface 413 on the distal end side, and a base-side screw portion 414 is formed on the outer peripheral surface thereof. In the example shown in FIG. 4, the base-side screw portion 414 formed in the flange portion 412 is a base-side main fixing mechanism. The base-side power supply surface 413 extends in a direction perpendicular to the tube axis of the discharge lamp 10, and forms a power supply mechanism between the lamp 10 and the base 4 by making surface contact with the holder-side power supply surface of the lamp holder 5. .

  The base-side temporary fixing mechanism 42 is formed in a column shape having a width smaller than that of the base-side base portion 41, and is provided at a substantially central position of the base-side power feeding surface 413 formed on the base-side base portion 41, toward the lamp holder side. It extends in a convex shape along the tube axis. The base-side temporary fixing mechanism 42 has a columnar base-side fitting portion 421 formed continuously with the base-side power feeding surface 413 for fitting into the base-side fitting concave portion 531 of the lamp holder 5; A base side insertion portion 422 formed in a columnar shape having a width smaller than that of the base end side fitting portion 421, which is continuous with the base end side fitting portion 421 for passing through the holder side inserted portion 532 of the lamp holder 3. And a front end side fitting portion 423 formed in a columnar shape having a width smaller than that of the base side insertion portion 422 in succession to the base side insertion portion 422 for fitting into the front end side concave portion 533 of the lamp holder 3. I have. That is, the base-side temporary fixing mechanism 42 has base-side fitting portions formed at two locations spaced apart in the tube axis direction with the base-side insertion portion 422 interposed therebetween.

Recesses 415 for engaging projections 517 provided on the holder-side power supply surface 315 of the lamp holder 3 are formed at two locations on the base-side power supply surface 413. By engaging the protrusion 517 with the recess 415 provided on the base-side power supply surface 413, the base attached to the lamp 10 during the work of permanently fixing the lamp 10 and the lamp holder 5 as will be described later. It is possible to prevent 4 from rotating in the circumferential direction.
Further, the discharge lamp 10 having the base 4 that is not suitable for the relationship with the lamp holder 5 is fixed to the lamp holder 5 by engaging the protrusions 520 of the lamp holder 5 at two locations on the base-side power supply surface 413. A recess 416 is formed to prevent this.

FIG. 5 is a view for explaining the configuration of the lamp holder according to the present invention. FIG. 5 is a view of a cross section obtained by cutting the lamp holder in the direction of the central axis when viewed from an oblique direction.
The lamp holder 5 includes a holder-side base portion 51 for engaging with the base-side base portion 41, a rotating portion 52 that is attached to the base end side of the holder-side base portion 51 and rotates around the holder-side base portion 51. It has. The holder-side base 51 is connected to the cylindrical holder-side body 511 electrically connected to the holding table 30 of the exposure apparatus and the base-side of the holder-side body 511, and the holder-side base 511 is connected to the holder-side body 511. And a holder-side flange portion 512 formed in a bowl shape so as to have a width larger than the base end portion 518.

  The holder-side body 511 is formed with a rotating part retainer 513 for preventing the rotating part 52 from dropping downward at a position slightly below the holder-side flange part 512. The rotating part retainer 513 is formed so that the width is slightly larger than the base end part 518 of the holder side body part 511. A mark 514 indicating the position of the rotating part 52 when the rotating part 52 and the base 4 are completely fixed is formed at a position slightly above the rotating part retainer 513. The mark 514 may be anything that can be visually recognized, such as one provided with an annular notch in the circumferential direction of the holder-side body 511 and one obtained by applying a dye on the outer peripheral surface of the holder-side body 511. The front end 515 of the holder side body 511 is attached to the holding table 30 of the exposure apparatus and is electrically connected to the holding table 30. A flat holder-side power feeding surface 516 is formed on the proximal end side of the holder-side flange portion 512.

  The holder side body portion 511 and the holder side flange portion 512 are made of, for example, a conductive material in which copper, brass, or the like is coated with a low oxidation and chemical resistance material such as nickel, silver, or gold. Has been. The base 4 and the lamp holder 5 are electrically connected by bringing the holder-side power supply surface 516 of the holder-side base 51 having conductivity into contact with the base-side power-supplying surface 413 of the base-side base 51 having conductivity. Can be connected to. Therefore, as in the prior art, power can be supplied to the discharge lamp 10 via the lamp holder 5 by merely bringing the base-side power supply surface 413 and the holder-side power supply surface 516 into surface contact without using a lead wire. It becomes possible.

The holder-side flange portion 512 has two projections 517 for insertion into the respective recesses 415 provided on the base-side power supply surface 413 from the two locations on the holder-side power supply surface 516 toward the base-side base portion 41. It is formed to extend in a convex shape. By engaging each protrusion 517 with each recess 415 of the base body 41, the base 32 and the lamp holder 5 are rotated to rotate the rotating portion 32 to fix the base 4 and the lamp holder 5. Since the rotation of 4 in the circumferential direction is restricted, the efficiency of the main fixing work is improved.
Further, the holder-side flange portion 512 has two protrusions 520 for insertion into the respective recesses 416 provided on the base-side power supply surface 413 from two locations on the holder-side power supply surface 516. (FIG. 5 is a cross-sectional view, so that a protrusion 520 is formed only at one location). By engaging the protrusions 520 with the recesses 416, only the base 4 and the lamp holder 5 that are compatible with each other can be fixed. There is no possibility that the discharge lamp 10 provided with the base 4 that does not fit in is fixed to the lamp holder 5.

  The holder-side flange portion 512 includes a holder-side temporary fixing mechanism 53 formed of a concave portion extending toward the distal end portion 515 side of the holder-side trunk portion 511 along the central axis of the lamp holder 5 at a substantially central position. The holder-side temporary fixing mechanism 53 includes a proximal-side fitting recess 531 for fitting into the proximal-side fitting portion 421 of the base 4 and a proximal-side fitting recess for inserting the base-side insertion portion 422. The holder side base part 51 for fitting to the holder side inserted part 532 whose width in the direction orthogonal to the central axis of the holder side base part 51 is larger than 531 and the tip side fitting part 423 of the base 4. And a distal end side fitting concave portion 533 that is smaller than the holder side inserted portion 532 and coincides with the proximal end fitting concave portion 531. That is, the holder-side temporary fixing mechanism 53 is fitted to the holder-side temporary fixing mechanism 42 for fitting the base-side temporary fixing mechanism 42 at two positions spaced in the central axis direction of the holder-side base portion 51 with the holder-side inserted portion 532 interposed therebetween. A combined recess is formed.

  Here, the specifications of the base-side temporary fixing mechanism 42 and the holder-side temporary fixing mechanism 53 will be described below. The proximal end fitting portion 421 has a width (hereinafter also simply referred to as a width) in a direction perpendicular to the central axis of the holder side base portion 51 so as to be in a fitting relationship with the proximal end fitting recess 531. The base end side fitting recess 531 is 0 to 1% (usually 0.05 to 0.3%) smaller. The base side insertion portion 422 is formed to be 0.5 to 100% (usually 5 to 20%) smaller in width than the holder side insertion portion 532 so that the holder side insertion portion 532 is not fitted. Has been. The distal end fitting portion 423 has a width of 0 to 1% (usually 0.05 to 0.3%) than the distal end fitting recess 533 so that the distal end fitting recess 533 is in a fitting relationship. ) It is formed small. By having such a specification, when the base 4 and the lamp holder 5 are temporarily fixed, the base 4 can be prevented from moving eccentrically in the radial direction, and the base 4 can be appropriately disposed in the tube axis direction. Therefore, the discharge lamp 10 can be positioned in the tube axis direction.

Furthermore, according to the example of the discharge lamp holding mechanism, the base side temporary fixing mechanism 42 and the holder side temporary fixing mechanism 53 are configured to satisfy the following relationship.
The difference between the width D1 of the proximal-side fitting concave portion 531 and the width d3 of the distal-side fitting portion 423 is A,
The difference between the width D1 of the proximal-side fitting concave portion 531 and the width d2 of the base-side insertion portion 422 is B,
The difference between the width D2 of the holder side inserted portion 532 and the width d3 of the distal end side fitting portion 423 is C,
The difference between the width D2 of the holder-side inserted portion 532 and the width d2 of the base-side inserted portion 422 is D,
The difference between the width D1 of the proximal-side fitting recessed portion 531 and the width d1 of the proximal-side fitting portion 421 is E,
When the difference between the width D3 of the leading-end fitting recess 533 and the width d3 of the leading-end fitting portion 423 is F,
All of A, B, C and D are larger than both E and F.

  By providing such a configuration, as will be described later, when the base 4 attached to the discharge lamp 10 is inserted into the lamp holder 5 and temporarily fixed, the central axis of the base 4 is the center of the lamp holder 5. Even if the base is inserted while being inclined with respect to the central axis, the sealing portion 12 of the discharge lamp 10 may not be damaged unless the inclination is extremely large.

  In the rotating part 52, the rotating main body part 521 is attached to the outer peripheral surface of the holder side flange part 512, and a part of the base end side of the rotating main body part 521 extends beyond the holder side feeding surface 516 in the tube axis direction. It is manually rotated in the circumferential direction around the holder-side base portion 51. A rotary reduced diameter portion 522 having an outer diameter smaller than that of the rotary main body portion 521 is continuously formed on the distal end side of the rotary main body portion 521, and the rotary reduced diameter portion 522 is a base end portion of the holder side body portion 511. It is attached to the outer peripheral surface of 518. The rotating portion 32 rotates in the circumferential direction, so that the base end surface 523 of the rotating reduced diameter portion 522 abuts on the distal end surface 519 of the holder side flange portion 512 and the distal end surface 524 of the rotating reduced diameter portion 522 is the rotating portion. It can move in the vertical direction between the position where it abuts against the clasp 513.

  A holder-side screw portion 525 for screwing into a base-side screw portion 414 formed on the base 4 is formed on the inner peripheral surface of the rotary main body portion 521. For example, a knurling process is performed on the outer peripheral surface of the rotation unit 521 so that manual rotation is easy. The holder side main fixing mechanism is constituted by a rotating portion 52 including a holder side screw portion 525.

  FIG. 6 is a diagram for explaining a procedure for fixing the base 4 attached to the discharge lamp 10 to the lamp holder 5. The procedure for fixing the base 4 to the lamp holder 5 is in the order of (a) to (c), and the procedure for removing the base 4 from the lamp holder 5 is in the order of (c) to (a). (A) shows a state immediately before the base 4 is inserted into the lamp holder 5. (B) shows a state where the base 4 is inserted into the lamp holder 5 and the temporary fixing is completed. (C) shows a state where the main fixing between the base 4 and the lamp holder 5 is completed.

  As shown in FIG. 6 (b), the discharge lamp 10 is moved to the lamp holder 5 side until the base-side power supply surface 413 of the base 4 abuts on the holder-side power supply surface 516 of the lamp holder 5, thereby fitting the front end side. The portion 423 is fitted into the distal-side fitting recess 533, the base-side insertion portion 422 is inserted into the holder-side inserted portion 532, and the proximal-side fitting portion 421 is fitted into the proximal-side fitting recess 531. In addition, the projections 517 extending in a convex shape from the holder-side power supply surface 516 are inserted into the recesses 415 formed on the base-side power supply surface 413, so that The work of temporarily fixing the base 4 is completed. The base-side temporary fixing mechanism 42 is engaged with the holder-side temporary fixing mechanism 53 in a state where the outer end surface 424 of the distal end side fitting portion 423 is not in contact with the bottom surface 535 of the distal end side fitting concave portion 533. After the temporary fixing is completed, the discharge lamp 10 is held by the lamp holder 5 via the base 4, so that it is not necessary to support the discharge lamp 10 with an operator's hand.

  In this way, by bringing the base-side power supply surface 413 into contact with the holder-side power supply surface 516, the position of the discharge lamp 10 in the tube axis direction is determined, and the front end-side fitting portion 423 is replaced with the front-end-side fitting recess 533. And the tube axis of the discharge lamp 10 is inclined with respect to the central axis of the lamp holder 5 by fitting the base end side fitting portion 421 to the base end side fitting recess 531. In addition, the cap 4 is restricted from moving in a direction perpendicular to the tube axis.

  As described above, the proximal-side fitting portion 421 and the distal-end-side fitting portion 423 formed at two locations separated in the tube axis direction of the base-side temporary fixing mechanism 42 are respectively connected to the holder-side temporary fixing mechanism 53. The base end side fitting concave portion 531 and the distal end side fitting concave portion 533 are fitted in two places separated in the holder central axis direction. As a result, the base-side temporary fixing mechanism 42 is restricted from moving in the direction perpendicular to the tube axis at two positions, the back-side position and the inlet-side position in the holder-side temporary fixing mechanism 53, Since the range in which the discharge lamp 10 is movable with respect to the lamp holder 5 is narrowed, the operator can recognize that the temporary fixing operation has been completed by recognizing this state.

Further, as described above (paragraph 0032), the base-side temporary fixing mechanism 42 and the holder-side temporary fixing mechanism 53 are such that all of A, B, C, and D are larger than both E and F. Since it is configured to satisfy the relationship, even if the base is inserted in a state where the central axis of the base 4 is inclined with respect to the central axis of the lamp holder 5 as described with reference to FIGS. As long as is not extremely large, the sealing portion 12 of the discharge lamp 10 is not damaged.
FIG. 7 shows a state before the base-side temporary fixing mechanism 42 of the base 4 is engaged with the holder-side temporary fixing mechanism 53 of the lamp holder 5. FIG. 8 shows a state where the base-side temporary fixing mechanism 42 is engaged with the holder-side temporary fixing mechanism 53 of the lamp holder 5 with its central axis inclined with respect to the central axis of the lamp holder 5. FIG. 9 shows that a part of the distal end side fitting portion 423 of the mouth side temporary fixing mechanism 42 is fitted into the distal end side fitting concave portion 533 of the holder side temporary fixing mechanism 53 and a proximal end side fitting portion 421. Is shown in a state in which a part of is fitted into the proximal-end fitting recess 531. FIG. 10 shows that the distal end side fitting portion 423 of the mouth side temporary fixing mechanism 42 is completely fitted into the distal end side fitting concave portion 533 of the holder side temporary fixing mechanism 53 and the proximal end side fitting portion 421 is The state which is completely fitted in the concave portion 531 for proximal end fitting is shown.

That is, as shown in FIG. 8, the base-side temporary fixing mechanism 42 is inserted into the holder-side temporary fixing mechanism 53 with the central axis of the base-side temporary fixing mechanism 42 inclined with respect to the central axis of the lamp holder 5. Even so, in the proximal-side fitting recess 531 and the holder-side inserted portion 532 in the lamp holder 5, the distal-side fitting portion 423 and the base-side inserting portion 422 in the base 4 are in a direction perpendicular to the tube axis. Since there is a space that can move freely, stress is not applied to the sealing portion 12 of the discharge lamp 10 unless the inclination of the base side temporary fixing mechanism 42 is extremely large. There is no possibility of causing a problem that the portion 12 is damaged.
As shown in FIG. 9, a part of the distal end side fitting portion 423 is fitted into the distal end side fitting concave portion 533 and a part of the proximal end side fitting portion 421 is a proximal end side fitting concave portion 531. , The position of the discharge lamp 10 in the width direction perpendicular to each central axis is determined, and the base side power supply surface 413 is brought into contact with the holder side power supply surface 516 in this state, so that the tube axis direction The position of the discharge lamp 10 is determined, and the temporary fixing operation is completed.

  On the other hand, as shown in FIG. 11, the base-side temporary fixing mechanism 42 ′ and the holder-side temporary fixing mechanism 53 ′ are fitted to the holder-side temporary fixing mechanism 53 over the entire length of the base-side temporary fixing mechanism 42 ′. In some cases, there is no space for the base-side temporary fixing mechanism 42 ′ to move freely in the direction orthogonal to the tube axis in the holder-side temporary fixing mechanism 53 ′. If the central axis of the mechanism 42 is inclined with respect to the central axis of the lamp holder 5, stress is applied to the sealing portion 12 of the discharge lamp 10, and there is a risk that the sealing portion 12 is damaged. Is expensive.

  Returning to FIG. 6C, the operation of permanently fixing the base 4 and the lamp holder 5 will be described. After the temporary fixing is completed, it is necessary to fix the base 4 attached to the discharge lamp 10 to the lamp holder 5 by screwing the base side screw part 414 and the holder side screw part 525 together. This is because if the base 4 and the lamp holder 5 are only temporarily fixed, the discharge lamp may fall over and be damaged when vibration is applied to the exposure apparatus. In the example shown in the figure, the base-side screw portion 414 is a male screw and the holder-side screw portion 525 is a female screw, but this may be reversed.

  As shown in FIG. 6C, the rotating portion 52 is rotated in the circumferential direction, and the holder side screw portion 525 formed on the inner peripheral surface of the rotating main body portion 521 is screwed into the base side screw portion 414 and rotated. The main fixing operation of the base 4 to the lamp holder 5 is completed by raising the rotating portion 52 until the base end surface 523 of the reduced diameter portion 522 comes into contact with the distal end surface 519 of the holder side flange portion 512.

  In the main fixing operation, the projections 517 that protrude in a convex shape from the holder-side power supply surface 516 are engaged with the recesses 415 formed in the base-side power supply surface 413 at the temporary fixing stage. There is no possibility that the base 4 and the discharge lamp 10 rotate in the circumferential direction when the rotating part 52 is rotated to screw the screw part 525 and the base-side screw part 414 together.

  After the main fixing, the base-side power supply surface 413 and the holder-side power supply surface 516 come into contact with each other, so that the base-side power supply surface 413 presses the holder-side power supply surface 516 downward, and the base end surface 523 of the rotary reduced diameter portion 522 is obtained. Comes into contact with the front end surface 519 of the holder side flange portion 512 so that the base end surface 532 presses the front end surface 519 upward, so that the base side power supply surface 413 and the holder side power supply surface 516 are separated from each other. In addition, the base 4 can be firmly fixed in a state where it is placed on the holder-side base portion 51. Therefore, after the main fixing, the base 4 and the lamp holder 5 are in a conductive state, and there is no fear of the discharge lamp 10 falling over.

  At the end of the main fixing operation, a mark 514 that is hidden between the rotary main body 521 and the rotary diameter-reduced portion 522 and the holder-side body 511 and cannot be visually recognized is the outer peripheral surface of the holder-side body 511. Appearing above, the operator can recognize the completion of the main fixing work by visually recognizing the mark 514.

  When removing the discharge lamp 10 at the end of its life, procedures (c) to (a) in FIG. 6 are performed. That is, the rotating portion 52 is rotated in the opposite direction to that at the time of permanent fixing to release the cap-side screw portion 414 from the holder-side screw portion 525, and the distal end surface 524 of the rotating reduced diameter portion 522 contacts the rotating portion retainer 513. The rotating portion 52 is moved downward until the temporary fixing state shown in FIG. The discharge lamp 10 at the end of its life can be removed from the lamp holder 5 by pulling out the discharge lamp 10 in which the cap 4 is temporarily fixed to the lamp holder 5 upward.

  According to the discharge lamp holding mechanism of the present invention as described above, basically, the base side temporary fixing mechanism 42 is inserted into the holder side temporary fixing mechanism 53 and the base 4 and the lamp holder 5 are temporarily fixed. By doing so, the operator can release his hand from the discharge lamp. Therefore, when fixing the heavy discharge lamp 10 to the lamp holder 5, it is not necessary to perform a complicated operation of supporting the discharge lamp with one hand while fixing the discharge lamp with the other hand. Installation efficiency is improved.

  Further, since the base 4 and the lamp holder 5 can be electrically connected by bringing the base side power supply surface 413 and the holder side power supply surface 516 into contact with each other, power is supplied to the discharge lamp 10 via the lamp holder 5. Can do. Therefore, even when using a large discharge lamp that requires a large current of, for example, 50 to 250 A (amperes), the base side power supply surface 413 is fixed by fixing the base 4 and the lamp holder 5 permanently. Since the holder-side power supply surface 516 can be brought into firm surface contact, a large current can be reliably supplied to the discharge lamp. In addition, since no lead wire for power supply is required unlike the conventional discharge lamp 10, when the discharge lamp 10 is fixed to the lamp holder 5, the reflection surface of the reflection mirror 20 is not damaged. There is no risk of impairing the light reflection characteristics of the surface.

  Furthermore, according to the discharge lamp holding mechanism of the present invention, the tube axis of the discharge lamp 10 is inclined with respect to the center axis of the lamp holder 5 when the base 4 is temporarily fixed to the lamp holder 5. Even if the cap 4 is inserted into the lamp holder 5, the sealing portion 12 of the discharge lamp 10 is not likely to be damaged, and the operator can easily recognize that the temporary fixing operation has been completed.

  Hereinafter, another embodiment of the present invention will be described with reference to FIGS. In the embodiment shown in FIGS. 12 and 13, the configuration other than the configuration of the base side temporary fixing mechanism and the holder side temporary fixing mechanism is the same as that of the embodiment shown in FIGS. The fixing work procedure is also common to the embodiment shown in FIG.

  FIG. 12 is a diagram for explaining another embodiment of the present invention. 12 (a) to 12 (c) are similar to the configuration of the base side temporary fixing mechanism shown in FIG. 4 respectively (paragraph 0032) A, B, C and D are all E and F. Are both larger, and the width d3 of the distal end side fitting portion is smaller than the width d1 of the proximal side fitting portion.

  In the form shown in FIG. 12A, the base-side temporary fixing mechanism 42a has a columnar base end side fitting portion 421a protruding from the center of the base side power supply surface 413a and a width wider than the base end side fitting portion 421a. A base side insertion portion 422a formed continuously with the base end side fitting portion 421a so as to have a small cylindrical shape, and a tip side fitting portion 423a is provided on the distal end side of the base side insertion portion 422a. That is, the base-side temporary fixing mechanism 42a is formed so that the width of the base-side insertion portion 422a matches the front end side fitting portion 423a.

  The holder-side temporary fixing mechanism 53a inserts a base-side fitting recess 531a formed at the center of the holder-side power feeding surface 516a and a base-side insertion portion 422a for fitting into the base-side fitting portion 421a. For this reason, the distal end side having a width smaller than that of the holder side inserted portion 532a for fitting the holder side inserted portion 532a having the same width as the proximal side fitting recessed portion 531a and the distal end side fitting portion 423a. A fitting recess 533a is formed. The base side temporary fixing mechanism 42a is engaged with the base side temporary fixing mechanism 53a so that the outer end surface 425a of the front end side fitting portion 423a does not contact the bottom surface 535a of the front end side fitting concave portion 533a.

  In the form shown in FIG. 12B, the base-side temporary fixing mechanism 42b is connected to the base end part 420b protruding from the center of the base-side power feeding surface 413b, and extends to the base end side in the radial direction. 421b, a base side insertion portion 422b formed continuously with the base end side fitting portion 421b so as to be a columnar shape having a width smaller than that of the base end side fitting portion 421b, and a distal end side of the base side insertion portion 422b. A front end side fitting portion 423b formed so as to have the same width as the base side insertion portion 422b, and formed continuously from the front end side fitting portion 423b so as to have a columnar shape having a smaller width than the front end side fitting portion 423b. A tip end portion 424b.

  The holder-side temporary fixing mechanism 53b inserts a base-side fitting recess 531b formed at the center of the holder-side power feeding surface 516b and a base-side insertion portion 422b for fitting the base-side fitting portion 421b. For this reason, the distal end side having a width smaller than that of the holder side inserted portion 532b for fitting the holder side inserted portion 532b having the same width as the proximal end side fitting recessed portion 531b and the distal end side fitting portion 423b. And a fitting recess 533b. The base-side temporary fixing mechanism 42b is engaged with the holder-side temporary fixing mechanism 53b so that the outer end surface 425b of the distal end portion 424b does not come into contact with the bottom surface 535b of the distal end side fitting recess 533b.

  In the form shown in FIG. 12C, the base-side temporary fixing mechanism 42 c has a base-end-side fitting portion that extends in a bowl shape in a radial direction continuously to the base end portion 420 c protruding from the center side of the base-side power feeding surface 413 c. 421c, a base side insertion portion 422c formed continuously to the base end side fitting portion 421c so as to have a columnar shape smaller than the base end side fitting portion 421c, and a base side insertion portion 422c. And a distal end side fitting portion 423c that spreads in a radial shape in a bowl shape.

  The holder-side temporary fixing mechanism 53c is the same as the proximal-side fitting concave portion 531c for fitting the proximal-side fitting portion 421c and the proximal-side fitting concave portion 531c for inserting the base side insertion portion 422c. A holder-side inserted portion 532c having a width of 5 mm and a tip-side fitting recessed portion 533c having a width smaller than that of the holder-side inserted portion 532c for fitting the tip-side fitting portion 423c.

  FIG. 13 is a diagram for explaining another embodiment of the present invention. The form shown in FIG. 13A satisfies the relationship that all of B, C, and D (paragraph 0032) are larger than E and F, respectively. The above-described form satisfies the relationship that all of B, C, and D described above are larger than E and F. Further, in the configuration shown in FIGS. 13A and 13B, the width d1 of the proximal end side fitting portion 421 in the base side temporary fixing mechanism 42 is equal to the width d3 of the distal end side fitting portion 423. It has characteristics.

  In the form shown in FIG. 13A, the base-side temporary fixing mechanism 42d is connected to the base end 420d projecting from the center side of the base-side power supply surface 413d, and the base end-side fitting portion spreads radially in a bowl shape. 421d, a base side insertion portion 422d formed continuously to the base end side fitting portion 421d so as to have a columnar shape smaller than the base end side fitting portion 421d, and a base side insertion portion 422d. And a distal end side fitting portion 423d that spreads in a radial shape so as to have the same width as the proximal end fitting portion 421d.

  The holder-side temporary fixing mechanism 53d is composed of a recess formed in the center of the holder-side power supply surface 516d, and includes a base-side fitting recess 531d for fitting the base-side fitting portion 421d, and a base side A holder-side inserted portion 532d having a width wider than the proximal-side fitting concave portion 531d for inserting the insertion portion 422d and a distal-side fitting concave portion 533d for fitting the distal-side fitting portion 423d, It is formed continuously in this order.

  In the form shown in FIG. 13 (b), the base-side temporary fixing mechanism 42e is formed in a columnar shape extending in a convex shape from the center of the base-side power supply surface 413e and having the same width over the entire length in the tube axis direction of the discharge lamp. Therefore, a base end side fitting portion 421e, a base side insertion portion 422e, and a distal end side fitting portion 423e are successively formed in this order.

  The holder-side temporary fixing mechanism 53e inserts a base-side fitting recess 531e formed at the center of the holder-side power feeding surface 516e and a base-side insertion portion 422e for fitting the base-side fitting portion 421e. The holder side inserted portion 532e having a width wider than the proximal end side fitting recessed portion 531e and the tip side having a width smaller than the holder side inserted portion 532e for fitting the tip side fitting portion 423e And a fitting recess 533e. The proximal-side fitting recess 531e is formed to have a larger width than the distal-end fitting portion 423e and the base-side insertion portion 422e.

  According to the embodiment shown in FIGS. 12 and 13, the base-side temporary fixing mechanisms 42 a to 42 e and the holder-side temporary fixing mechanisms 53 a to 53 e are separated by 2 in the tube axis direction (the central axis direction of the holder). In order to satisfy the relationship that the above-mentioned (paragraph 0032) B, C, and D are larger than E and F, the same effects as the embodiment shown in FIGS. You can expect.

1 shows a light source device having a discharge lamp holding mechanism according to the present invention. 1 shows a discharge lamp according to the present invention. 1 shows a light source device having a discharge lamp holding mechanism according to the present invention. 1 shows a base according to the present invention. 1 shows a lamp holder according to the present invention. The procedure for fixing the base and the lamp holder according to the present invention will be described. An explanation will be given of the operation of the discharge lamp holding mechanism according to the present invention. An explanation will be given of the operation of the discharge lamp holding mechanism according to the present invention. An explanation will be given of the operation of the discharge lamp holding mechanism according to the present invention. An explanation will be given of the operation of the discharge lamp holding mechanism according to the present invention. 6 shows a discharge lamp holding mechanism according to a comparative example. Another embodiment of the discharge lamp holding mechanism according to the present invention is shown. Another embodiment of the discharge lamp holding mechanism according to the present invention is shown. 1 shows a light source device having a conventional discharge lamp holding mechanism.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Discharge lamp 11 Arc tube part 12 Sealing part 13 Anode 14 Cathode 20 Reflection mirror 4 Base 41 Base side base part 411 Base side body part 412 Base side flange part 413 Base side feeding surface 414 Base side screw part 415 Recess 42 Base Side temporary fixing mechanism 421 Base end side fitting part 422 Base side insertion part 423 Tip side fitting part 5 Lamp holder 51 Holder side base part 511 Holder side body part 512 Holder side flange part 513 Rotating part stay 514 Mark 516 Holder side power supply Surface 517 Projection portion 52 Rotation portion 521 Rotation main body portion 522 Rotation reduced diameter portion 525 Holder side screw portion 53 Holder side temporary fixing mechanism 531 Base end side fitting concave portion 532 Holder side inserted portion 533 Tip side fitting concave portion

Claims (6)

A discharge lamp having a cap attached to at least one end thereof, and a lamp holder that holds the discharge lamp in a vertical direction and can be attached and detached.
A base of the discharge lamp extends along the tube axis of the discharge lamp and is mounted so as to cover an end of the discharge lamp, and a width in a direction perpendicular to the tube axis from the base side of the base Is formed into a small column-shaped base-side temporary fixing mechanism that protrudes from the front end surface of the base-side base portion and extends along the tube axis toward the lamp holder, and an outer peripheral surface on the front-end side of the base-side base portion And a base side fixed mechanism formed on
The lamp holder is engaged with the base-side main fixing mechanism, and a holder-side base portion having a holder-side temporary fixing mechanism including a recess extending along the tube axis for engaging with the base-side temporary fixing mechanism. A cylindrical holder-side main fixing mechanism that is provided on the outer peripheral surface of the holder-side base portion and rotates in the circumferential direction around the holder-side base portion,
The base and the lamp holder are temporarily fixed by engaging the base side temporary fixing mechanism and the holder side temporary fixing mechanism, and the base side main fixing mechanism and the holder side main fixing mechanism are A discharge lamp holding mechanism that is fixed by being engaged,
The base-side temporary fixing mechanism is formed with a proximal-side fitting portion and a distal-side fitting portion at two locations separated in the tube axis direction, and the proximal-side fitting portion and the distal-side fitting portion. A base side insertion part is formed between the joint part,
The holder-side temporary fixing mechanism includes a proximal-side fitting recess for fitting into the proximal-side fitting portion and the distal-side fitting portion at two locations spaced in the central axis direction of the lamp holder. And a distal-side fitting recess, and a holder-side inserted portion for inserting the base-side insertion portion is formed between the proximal-side fitting recess and the distal-side fitting recess. ,
The discharge lamp holding mechanism, wherein the base and the lamp holder satisfy the relationship shown in the following relationship 1.
(Relationship 1)
The difference between the width in the direction perpendicular to the central axis of the lamp holder in the holder side insertion portion and the width in the direction perpendicular to the tube axis in the base side insertion portion is D,
The difference between the width in the direction perpendicular to the center axis of the lamp holder in the concave portion for fitting on the base end side and the width in the direction orthogonal to the tube axis in the base end side fitting portion is E,
When the difference between the width in the direction perpendicular to the central axis of the lamp holder in the concave portion for fitting on the tip side and the width in the direction perpendicular to the tube axis in the fitting portion on the tip side is F,
D is greater than both E and F.
















The discharge lamp holding mechanism according to claim 1, wherein the base and the lamp holder satisfy a relationship represented by the following relationship 2.
(Relationship 2)
The difference between the width in the direction perpendicular to the center axis of the lamp holder in the proximal end fitting recess and the width in the direction perpendicular to the tube axis of the distal fitting part is A,
The difference between the width in the direction perpendicular to the central axis of the lamp holder in the concave portion for fitting on the base end side and the width in the direction perpendicular to the tube axis of the base side insertion portion is B,
When the difference between the width in the direction perpendicular to the central axis of the lamp holder in the holder-side insertion portion and the width in the direction perpendicular to the tube axis of the tip-side fitting portion is C,
All of A, B and C are larger than both E and F. The base side main fixing mechanism has a base side screw portion formed on the outer peripheral surface on the tip side of the base side base portion.
The discharge lamp holding mechanism according to claim 1, wherein the holder side main fixing mechanism has a holder side screw portion formed on an inner peripheral surface thereof.   The base and the lamp holder are made of a conductive member, and the base and the lamp holder are permanently fixed in a state where the distal end surface of the base side of the base and the base end surface of the holder side base are in contact with each other. The discharge lamp holding mechanism according to claim 1, wherein an electric power feeding mechanism is formed. The lamp holder is formed with a protrusion protruding from the base end surface of the holder-side base portion toward the base-side base portion,
2. The discharge lamp holding mechanism according to claim 1, wherein a recess for engaging with the protrusion is formed on a tip surface of the base-side base portion in the base.   The discharge lamp holding mechanism according to claim 1, wherein the discharge lamp has a rated current of 50 A or more.

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