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CN101354122B - Discharge lamp holding mechanism - Google Patents

Discharge lamp holding mechanism Download PDF

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Publication number
CN101354122B
CN101354122B CN2008101084812A CN200810108481A CN101354122B CN 101354122 B CN101354122 B CN 101354122B CN 2008101084812 A CN2008101084812 A CN 2008101084812A CN 200810108481 A CN200810108481 A CN 200810108481A CN 101354122 B CN101354122 B CN 101354122B
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CN
China
Prior art keywords
lamp
mentioned
lamp holder
base part
holder side
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Application number
CN2008101084812A
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Chinese (zh)
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CN101354122A (en
Inventor
松岛竹夫
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Ushio Denki KK
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Ushio Denki KK
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Publication of CN101354122A publication Critical patent/CN101354122A/en
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J5/00Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
    • H01J5/50Means forming part of the tube or lamps for the purpose of providing electrical connection to it
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J5/00Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
    • H01J5/50Means forming part of the tube or lamps for the purpose of providing electrical connection to it
    • H01J5/54Means forming part of the tube or lamps for the purpose of providing electrical connection to it supported by a separate part, e.g. base
    • H01J5/56Shape of the separate part
    • H01J5/565Bases for circular lamps
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00Gas-discharge or vapour-discharge lamps
    • H01J61/02Details
    • H01J61/04Electrodes; Screens; Shields
    • H01J61/06Main electrodes
    • H01J61/073Main electrodes for high-pressure discharge lamps
    • H01J61/0732Main electrodes for high-pressure discharge lamps characterised by the construction of the electrode
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00Gas-discharge or vapour-discharge lamps
    • H01J61/02Details
    • H01J61/30Vessels; Containers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00Gas-discharge or vapour-discharge lamps
    • H01J61/84Lamps with discharge constricted by high pressure
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00Gas-discharge or vapour-discharge lamps
    • H01J61/84Lamps with discharge constricted by high pressure
    • H01J61/86Lamps with discharge constricted by high pressure with discharge additionally constricted by close spacing of electrodes, e.g. for optical projection
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/003Auxiliary devices for installing or removing discharge tubes or lamps

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Fastening Of Light Sources Or Lamp Holders (AREA)
  • Common Detailed Techniques For Electron Tubes Or Discharge Tubes (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

The invention aims to provide a holding mechanism for discharge lamp that is able to easily fix a large-scaled discharge lamp. The holding mechanism for the discharge lamp of the invention consists of a discharge lamp equipped with a lamp head and a lamp base. The lamp head and the lamp base are temporarily fixed by clamping a lamp head side temporary fixing mechanism with a lamp base temporary fixing mechanism, and then are finally fixed by clamping a lamp side final fixing mechanism with a lamp base side final fixing mechanism. The gap between a lamp head side insertion part and a lamp base side inserted part is greater than the gap between a lamp head side embedding part and a lamp base side embedding part under the condition that the lamp head and the lamp base are temporarily fixed.

Description

Discharge lamp holding mechanism
Technical field
The present invention relates to discharge lamp holding mechanism, relate in particular to the discharge lamp holding mechanism of the large-scale discharge lamp of the installation exercise difficulty that is installed to lamp socket.
Background technology
In recent years, at the exposure of semiconductor or liquid crystal, other trickle manufacture field,, utilize the exposure technique that uses short-arc discharge lamp as the light source of photolithography.
The light source of photolithography can use efficient radiating light mask to have the discharge lamp of light of the wavelength 365nm (i line) of sensitivity, perhaps in the exposure of liquid crystal or printed base plate, can use the discharge lamp of the light of radiation wavelength 350nm-450nm.Discharge lamp is enclosed mercury, and as luminescent substance, and inclosure has rare gas such as argon, xenon as startup gas.
Light supply apparatus also has the processing time tendency that (throughput) shortens except having the area change greatly that should expose, also have the tendency of the light exposure of making increase in order to increase input as the discharge lamp of light source.
But the increase of lamp input makes lamp maximize on physical property, and the assembling operation that is assembled on the speculum is more complicated.When especially lamp maximizes, dimensionally or all can increase burden on the weight to the operator.
Figure 14 is the light supply apparatus that above-mentioned discharge lamp is used in expression.
Light supply apparatus is in lampshade 100, possesses discharge lamp 10, speculum 20 and lamp socket 5 and constitutes.Speculum 20 is a concave, will go up side opening 21 and be provided with towards top, and the below of the open lower side portion 22 of speculum 20 is provided with lamp socket 5, and it is installed on the lamp socket fixed station 30.In the speculum 20, the discharge lamp 10 that lamp holder 4 is installed is erected at vertical direction ground and installs.Discharge lamp 10 be installed be open lower side portion 22 from speculum 20 at first by lead 15, insert discharge lamp 10 subsequently, inner space at speculum 20 keeps with one hand, and the another hand is in the outside of speculum 20, for the lamp holder 4 screw thread fixed lamp-sockets 5 that are installed in discharge lamp 10 simultaneously.
Under the situation of above-mentioned structure, during by lead 15, have the danger that injures speculum 20 from the open lower side portion 22 of speculum 20.And, must keep discharge lamp 10 with one hand, carry out above-mentioned screw thread with the another hand in the outside of speculum 20 simultaneously and fix, therefore numerous and diverse in the extreme.
The real fair 7-13171 communique of [patent documentation 1] Japan
Summary of the invention
Even the object of the present invention is to provide a kind of discharge lamp of maximization, also can be easily the fixing use for discharge lamp maintaining body of discharge lamp.
In order to solve above-mentioned problem, use for discharge lamp maintaining body involved in the present invention is by the discharge lamp that lamp holder is installed in a square end portion at least; And the lamp socket formation that this discharge lamp is erect in vertical direction and can be kept removably,
The lamp holder of above-mentioned discharge lamp possesses: the lamp holder side group body that extends and coated by the end of discharge lamp the ground installation along the tubular axis of discharge lamp; Be orthogonal to width on the direction of tubular axis form forr a short time than this lamp holder side group body, outstanding from this lamp holder side group body front end face, and the temporary fixed mechanism of lamp holder side of the cylindricality of extending towards above-mentioned lamp socket along tubular axis; And be formed on the final fixed mechanism of lamp holder side on the front outer peripheral face of this lamp holder side group body,
Above-mentioned lamp socket possesses: have the lamp base part matrix part that engages the temporary fixed mechanism of lamp base part that recess usefulness, that extend along tubular axis constitutes with the temporary fixed mechanism of above-mentioned lamp holder side; And engage on outer peripheral face usefulness, that be located at this lamp base part matrix part with the final fixed mechanism of above-mentioned lamp holder side, be the tubular lamp base part final fixed mechanism of center with this lamp base part matrix part in the Zhou Fangxiang rotation,
Above-mentioned lamp holder is able to temporary fixed by the temporary fixed mechanism of above-mentioned lamp holder side with engaging of the temporary fixed mechanism of above-mentioned lamp base part with above-mentioned lamp socket, and be able to finally fixing by final fixed mechanism of above-mentioned lamp holder side and engaging of the final fixed mechanism of above-mentioned lamp base part, it is characterized in that:
The temporary fixed mechanism of above-mentioned lamp holder side, two places that separate on tube axial direction are formed with base end side fitting portion and front fitting portion, and are formed with lamp holder side insertion section between this base end side fitting portion and this front fitting portion,
The temporary fixed mechanism of above-mentioned lamp base part, two places that on the lamp socket central axis direction, separate, be formed with the base end side of above-mentioned base end side fitting portion and the chimeric usefulness of above-mentioned front fitting portion difference chimeric with recess and the chimeric recess of using of front, and chimeric the chimeric lamp base part that is used to insert above-mentioned lamp holder side insertion section that is formed with between with recess is inserted into portion with recess and this front at this base end side
Above-mentioned lamp holder and above-mentioned lamp socket satisfy the following relation that concerns 1 expression:
Concern 1:
The difference of width that is inserted into the direction that is orthogonal to tubular axis of the width of the direction that is orthogonal to the lamp socket central shaft of portion and above-mentioned lamp holder side insertion section with above-mentioned lamp base part is D,
Difference with the width of the direction that is orthogonal to tubular axis of the width of the chimeric direction that is orthogonal to the lamp socket central shaft with recess of above-mentioned base end side and above-mentioned base end side fitting portion is E,
When being F with the difference of the width of the direction that is orthogonal to tubular axis of the width of the chimeric direction that is orthogonal to the lamp socket central shaft with recess of above-mentioned front and above-mentioned front fitting portion,
D is bigger than E and F.
In addition, use for discharge lamp maintaining body of the present invention satisfies the following relation that concerns 2 expressions except above-mentioned concerning 1.
Concern 2:
Difference with the width of the direction that is orthogonal to tubular axis of the width of the chimeric direction that is orthogonal to the lamp socket central shaft with recess of above-mentioned base end side and above-mentioned front fitting portion is A,
Difference with the width of the direction that is orthogonal to tubular axis of the width of the chimeric direction that is orthogonal to the lamp socket central shaft with recess of above-mentioned base end side and above-mentioned lamp holder side insertion section is B,
When the difference of width that is inserted into the direction that is orthogonal to tubular axis of the width of the direction that is orthogonal to the lamp socket central shaft of portion and above-mentioned front fitting portion with above-mentioned lamp base part is C,
A, B and C are all than any is big among E and the F.
The final fixed mechanism of above-mentioned lamp holder side is characterized in that: the lateral edges in above-mentioned lamp holder side group body front is formed with lamp holder side threaded portion, and the final fixed mechanism of above-mentioned lamp base part is formed with the lamp base part threaded portion on the side face within it.
In addition, use for discharge lamp maintaining body of the present invention, it is characterized in that: above-mentioned lamp holder and above-mentioned lamp socket are made of electroconductive member, under the state of the cardinal extremity face butt of the front end face of above-mentioned lamp holder side group body and above-mentioned lamp socket matrix part, above-mentioned head lamp and above-mentioned lamp socket is finally fixing, thus administration of power supply formed.
In addition, use for discharge lamp maintaining body of the present invention, it is characterized in that: be formed with on above-mentioned lamp socket from the cardinal extremity of above-mentioned lamp base part matrix part and facing the outstanding jut of above-mentioned lamp holder side group body, above-mentioned lamp holder is formed with on the front end face of above-mentioned lamp holder side group body and is used for the recess that engages with above-mentioned jut.
Moreover use for discharge lamp maintaining body of the present invention is characterized in that: rated current is more than the 50A.
The invention effect
Use for discharge lamp maintaining body involved in the present invention makes temporary fixed mechanism of lamp holder side and the temporary fixed mechanism action of lamp base part, also can keep discharge lamp (temporary fixed) even decontrol hand, therefore do not exist in the past and keeping lamp with one hand like that, the while is with the difficulty of another hand fixed light.
And, in the temporary fixed mechanism of lamp holder side, two places that separate on tube axial direction are formed with lamp holder side fitting portion, in the temporary fixed mechanism of lamp base part, in two places that separate on the tube axial direction corresponding to each lamp holder side fitting portion, be formed with the lamp base part fitting portion, therefore on lamp socket, in the operation of temporary fixed discharge lamp, temporary fixed end can be discerned really, temporary fixed operating efficiency can be promoted.
And, lamp holder and lamp socket are the formations that satisfies above-mentioned relation 1, therefore in the inside of the temporary fixed mechanism of lamp base part, the temporary fixed mechanism of lamp holder side can move freely on the direction with respect to the tubular axis quadrature, when therefore carrying out temporary fixed operation, even the central shaft of the temporary fixed mechanism of lamp holder side is during from the state of lamp socket eccentricity of central axis, still injury discharge lamp ground is not fastened on the temporary fixed mechanism of lamp holder side in the temporary fixed mechanism of lamp base part conscientiously.
In addition, use for discharge lamp maintaining body involved in the present invention is except above-mentioned concerning 1, satisfy the formation of above-mentioned relation 2, therefore in the inside of the temporary fixed mechanism of lamp base part, the temporary fixed mechanism of lamp holder side can more easily move freely in the direction with respect to the tubular axis quadrature, therefore when carrying out temporary fixed operation, can prevent the damage of discharge lamp more effectively.
And, on the outer peripheral face of the final fixed mechanism front of lamp holder side, be formed with lamp holder side threaded portion, on the inner peripheral surface of the final fixed mechanism of lamp base part, form the lamp base part threaded portion,, can carry out the lamp holder and the final of lamp socket of discharge lamp really and fix therefore by screwing togather each threaded portion.
Moreover, lamp cap and lamp holder is made of electroconductive member, lamp holder and lamp socket are finally fixed under the state of the cardinal extremity face butt of the front end face of lamp holder side group body and lamp base part matrix part, thereby form the administration of power supply between lamp holder and lamp socket, therefore do not need as in the past, to use lead, therefore when discharge lamp being installed, do not have the danger that injures speculum for speculum.
And on lamp socket, be formed with from the cardinal extremity of lamp base part matrix part and facing the outstanding jut of lamp holder side group body, lamp holder is formed with on the front end face of lamp holder side group body and is used for the recess that engages with above-mentioned jut, therefore the final fixed mechanism of rotary lampholder side is with the final fixed mechanism of lamp base part during with respect to the fixing final fixed operation of the final fixed mechanism of lamp holder side, lamp holder can not rotate at Zhou Fangxiang, can promote final fixing operating efficiency.
Description of drawings
Fig. 1 represents to have the light supply apparatus of the discharge lamp holding mechanism that the present invention relates to.
Fig. 2 represents the discharge lamp that the present invention relates to.
Fig. 3 represents to have the light supply apparatus of the discharge lamp holding mechanism that the present invention relates to.
Fig. 4 represents the lamp holder that the present invention relates to.
Fig. 5 represents the lamp socket that the present invention relates to.
Fig. 6 represents the lamp holder that fixedly the present invention relates to and the order of lamp socket.
Fig. 7 represents the explanation of the effect of the discharge lamp holding mechanism that the present invention relates to.
Fig. 8 represents the explanation of the effect of the discharge lamp holding mechanism that the present invention relates to.
Fig. 9 represents the explanation of the effect of the discharge lamp holding mechanism that the present invention relates to.
Figure 10 is the explanation of the effect of the discharge lamp holding mechanism that the present invention relates to of expression.
Figure 11 represents the discharge lamp holding mechanism that comparative example relates to.
Figure 12 represents other embodiment of the discharge lamp holding mechanism that the present invention relates to.
Figure 13 is other embodiment of the discharge lamp holding mechanism that the present invention relates to of expression.
Figure 14 represents to have the light supply apparatus of the discharge lamp holding mechanism that in the past related to.
The specific embodiment
Fig. 1 installs discharge lamp 10, the discharge lamp holding mechanism of the state that both are fixed on the lamp socket 5 that is illustrated on the maintenance platform 30 that is installed on exposure device.
Discharge lamp 10 (below, also only be called " lamp ") by the open lower side portion 22 of speculum 20, be installed on the lamp socket 5.At this, as discharge lamp holding mechanism, lamp 10, speculum 20 and lamp socket 5 are called light supply apparatus with lamp 10 that lamp holder 4 is installed and lamp socket 5.Lamp socket 5 is for example fixed on the maintenance platform 30 that is fixed on exposure device by screw thread.And being provided with pin 31 in the bottom of lamp socket 5, pushing keeps the side of platform 30.And speculum 20 is fixed on exposure device etc. by omitting illustrated mechanism.
Fig. 2 is the figure of the discharge lamp 10 of the state before expression is fixed on the lamp socket 5.Discharge lamp 10 for example has the luminous tube portion 11 that quartz glass constitutes in the central authorities of tube axial direction, and the sealing 12 extension ground shaft-like at its two ends are integrally formed.Luminous tube portion 11 is ball-types or goes up the spindle-type of elongated extension at tube axial direction (illustrated above-below direction) that its inner airtight space that forms is enclosed as the mercury of luminescent substance or as the xenon or the argon that start with gas.And, the inside in luminous tube portion 11, anode 13 and negative electrode 14 relative configurations, the interval between its front end forms as discharging gap.Discharging gap also is an interelectrode distance, for example is about 5mm.On sealing 12 front ends of lower side cylindric lamp holder 4 is installed.And, cylindric lamp holder 4 also is installed on the front end of the sealing of upper side among the figure, but is not necessary in the present invention.
This lamp 10 is that arbitrary electrode is positioned at the top, and another electrode is positioned at the arranged perpendicular of below, among this embodiment, negative electrode 14 is configured in the below, and anode 13 is configured in the top.
Get back to Fig. 1, speculum 20 for example applies multilayer film on the reflecting surface of glass baseplate, and integral body is concave, can reflect the radiating light from lamp 10 well.Speculum 20 uses elliptical condenser mirror mostly, at this moment, must make the electric arc of discharge lamp 10 consistent with the 1st focus of speculum 20.Therefore this electric arc generally is formed between discharging gap, and the mode that is positioned at first focus of speculum 20 with discharging gap is provided with lamp.Though represented the speculum that the direction of speculum 20 is opened upward, also (lamp base part) opened downwards.
Lamp 10 is maximization in recent years with speculum 20.As mentioned above, discharge lamp holding mechanism of the present invention is particularly useful under the situation of lamp and speculum maximization.
During for lamp 10 expression numerical examples, lamp power is that rated value is that 3KW~40KW, lamp current are that rated value is that the maximum outside diameter (perpendicular to the diameter on the direction of electrode bearing of trend) of 50A~200A, luminous tube portion 11 is 50mm~250mm.And the weight of lamp is 0.5kg~10kg.During for speculum 20 expression numerical examples, upside peristome 21 is φ 300mm~1000mm, and the degree of depth of lamp bearing of trend is 200mm~800mm.
Fig. 3 be expression from observing the state of light supply apparatus shown in Figure 1 with Fig. 1 different directions, cut speculum 20 parts, the internal structure of performance speculum 20.
Speculum 20 has the open lower side portion 22 of upside peristome 21 with the path in big footpath.Open lower side portion 22 must have the sealing 12 of lamp 10 or the size that lamp holder 4 can pass through at least.When open lower side portion 22 was excessive, the radiating light of lamp 10 can leak from open lower side portion 22, reduces the utilization ratio of light.
Fig. 4 is the enlarged drawing of formation that is used to illustrate the lamp holder of the sealing that is installed in discharge lamp of the present invention.
Lamp holder 4 possesses: integral body form cylindric, extend and be installed in lamp holder side group body 41 on the sealing 12 along the tubular axis of discharge lamp 10; And be formed on the lamp holder side group body 41 the temporary fixed mechanism 42 of lamp holder side of the cylindricality of extending along tubular axis continuously.Lamp holder side group body 41, possess: be installed on the sealing 12 of lamp 10 lamp holder side metastomium 411 and continuously in the front of this lamp holder side metastomium 411, be orthogonal to width on the direction of tubular axis (below, also only claim width) the lamp holder side flange portion 412 that form blade of a sword shape bigger than lamp holder side metastomium 411.Lamp holder side group body 41 physically is made of a member with the temporary fixed mechanism 42 of lamp holder side, for example is made of electroconductive members such as brass.
Lamp holder side flange portion 412 has smooth lamp holder side power supply face 413 in front, and is formed with lamp holder side threaded portion 414 on its outer peripheral face.In the example that Fig. 4 represents, the lamp holder side threaded portion 414 that is formed on this flange part 412 is the final fixed mechanisms of lamp holder side.Lamp holder side power supply face 413 expands on the direction with respect to the tubular axis quadrature of discharge lamp 10 to be opened, and be face with the lamp base part power supply face of lamp socket 5 and contact, thus the administration of power supply of formation lamp 10 and lamp holder 4.
The temporary fixed mechanism 42 of lamp holder side forms the cylindricality of width less than lamp holder side group body 41, is arranged on the general center of the lamp holder side power supply face 413 that is formed at lamp holder side group body 41, is convex towards lamp base part along tubular axis and extends.The temporary fixed mechanism 42 of lamp holder side possesses: the cylindrical base end side fitting portion 421 chimeric usefulness of base end side recess 531, that form in lamp holder side power supply face 413 continuously that is used to be entrenched in lamp socket 5; The lamp base part that is used to penetrate lamp socket 3 be inserted into portion 532, continuously in base end side fitting portion 421, form the columniform lamp holder side insertion section 422 of width less than base end side fitting portion 421; And be used to be embedded in lamp socket 3 front recess 533, continuously in lamp holder side insertion section 422, form the columniform front fitting portion 423 of width less than lamp holder side insertion section 422.That is two places that the temporary fixed mechanism 42 of lamp holder side separates on tube axial direction across lamp holder side insertion section 422 are formed with lamp holder side fitting portion.
Two places on the lamp holder side power supply face 413 are formed with and are used for and the lamp base part that is arranged on lamp socket 3 each recess 415 that each jut 517 on the face 315 engages of powering.Engaging protrusion portion 517 on the recess 415 that is arranged at lamp holder side power supply face 413, thus as mentioned below, when lamp 10 and lamp socket 5 are carried out finally fixing operation, prevent that the lamp holder 4 that is installed on lamp 10 from rotating on Zhou Fangxiang.
And the jut 520 of the two places engaging lamp socket 5 on lamp holder side power supply face 413 is fixed in recess 416 on the lamp socket 5 thereby be formed for preventing having discharge lamp 10 with the unaccommodated lamp holder 4 of the relation of lamp socket 5.
Fig. 5 is the figure that is used to illustrate the formation of the lamp socket that the present invention relates to.Fig. 5 observes the figure of lamp socket from the section of its central axis direction cut-out from tilted direction.
Lamp socket 5 possesses: being used for the lamp base part matrix part 51 that engages with lamp holder side group body 41, and being installed on the base end side of lamp socket matrix part 51, is the rotating part 52 of center rotation with lamp base part matrix part 51.Lamp base part matrix part 51 possesses: the columniform lamp base part metastomium 511 that is electrically connected with the maintenance platform 30 of exposure device; And, has the lamp base part flange part 512 that forms blade of a sword shape greater than the width of the base end part 518 of lamp base part metastomium 511 continuously in the base end side of lamp base part metastomium 511.
Lamp base part metastomium 511 is formed with and is used to prevent that rotating part 52 from dropping to the rotating part block piece 513 of below on than the position of lamp base part flange part 512 below a little.Rotating part block piece 513 forms the base end part 518 of width less times greater than lamp base part metastomium 511.This rotating part block piece 513 a little above the position on, be formed with the final fully mark 514 of the position of rotating part 52 fixedly time of expression rotating part 52 and lamp holder 4.Mark 514 is the ring-type breach that are provided with in all directions of lamp base part metastomium 511, applies ringwise dyestuff etc. at lamp base part metastomium 511 outer peripheral faces, if can be visual in addition identification.The leading section 515 of lamp base part metastomium 511 is installed on the maintenance platform 30 of exposure device, is electrically connected with keeping platform 30.Be formed with smooth lamp base part power supply face 516 on the base end side of lamp base part flange part 512.
Lamp base part metastomium 511 and lamp base part flange part 512 for example are made of copper, brass etc. or the conductive material that applies things such as low oxidative such as nickel, silver, gold, the resistance to the action of a drug on these base materials.The lamp base part power supply face 516 of the lamp base part matrix part 51 with electric conductivity is contacted with 413 in the face of lamp holder side power supply of the lamp holder side group body 51 with electric conductivity, thereby lamp holder 4 can be electrically connected with lamp socket 5.Therefore, must not use lead as in the past,, can power via 5 pairs of discharge lamps 10 of lamp socket as long as lamp holder side power supply face 413 is contacted with 516 in face of lamp base part power supply.
On lamp base part flange part 512, two being convex towards lamp holder side group body 41 and extending to form 2 juts 517 that insert each recess 415 usefulness that is arranged on lamp holder side power supply face 413 from the lamp base part power supply face 516.Each jut 517 is fastened on each recess 415 of lamp holder matrix part 41 respectively, and rotation rotating part 32 when carrying out the final fixed operation of lamp holder 4 and lamp socket 5, utilizes the rotation of each jut 517 restriction lamp holder 4 at Zhou Fangxiang, to promote final fixing operating efficiency.
In addition, at lamp base part flange part 512, two being convex towards lamp holder side group body 41 and extending to form 2 juts 520 (Fig. 5 only is formed with 1 place's jut 520 owing to be section) that insert each recess 416 usefulness that is arranged on lamp holder side power supply face 413 from the lamp base part power supply face 516.Engage each jut 520 respectively for each recess 416, only fixedly be in lamp holder that can be fit to concern each other 4 and lamp socket 5 thus, do not have the danger that the discharge lamp 10 that will possess with the unaccommodated lamp holder 4 of the relation of lamp socket 5 is fixed in lamp socket 5.
Lamp base part flange part 512 possesses along the central shaft of lamp socket 5 towards the temporary fixed mechanism 53 of lamp base part that is made of recess that leading section 515 sides of lamp base part metastomium 511 are extended on the position at general center.The temporary fixed mechanism 53 of lamp base part possesses: the base end side of base end side fitting portion 421 that is used to be entrenched in lamp holder 4 is chimeric with recess 531; Be used to insert lamp holder side insertion section 422, the width on the direction of the central shaft that is orthogonal to lamp base part matrix part 51 is inserted into portion 532 greater than the chimeric lamp base part with recess 531 of base end side; And the width that is used to be entrenched on the direction of central shaft front fitting portion 423, that be orthogonal to lamp base part matrix part 51 of lamp holder 4 is inserted into portion 532 less than lamp base part, and chimeric chimeric with recess 533 with the consistent front of recess 531 with base end side.That is the temporary fixed mechanism 53 of lamp base part is being inserted into two places that portion 532 separates on the central axis direction of lamp base part matrix part 51 across lamp base part, is formed with the chimeric recess of using of lamp base part that is used for the temporary fixed mechanism 42 of chimeric lamp holder side.
At this, temporary fixed mechanism 42 carries out following explanation with the specification of the temporary fixed mechanism 53 of lamp base part for the lamp holder side.Base end side fitting portion 421 is chimeric with the chimeric relation of recess 531 with respect to base end side in order to form, form the width (below, also only be called width) of direction that is orthogonal to the central shaft of lamp base part matrix part 51 more chimeric with recess 531 little by 0~1% (being generally 0.05~0.3%) than base end side.Lamp holder side insertion section 422 is not in order to form the engomphosis relation that is inserted into portion 532 with respect to lamp base part, and width forms than lamp base part and is inserted into portion 532 little by 0.5~100% (being generally 5~20%).Front fitting portion 423 forms width more chimeric with recess 533 little by 0~1% (being generally 0.05~0.3%) than front in order to form with respect to the chimeric engomphosis relation with recess 533 of front.By having above specification, when temporary fixed lamp holder 4 and lamp socket 5, lamp holder 4 is moved and not eccentric in diametric(al), and can lamp holder 4 is fixing in position on tube axial direction, therefore can carry out the location of discharge lamp 10 on tube axial direction.
In addition, according to the example of above-mentioned discharge lamp holding mechanism, the temporary fixed mechanism 42 of lamp holder side can satisfy following relation with the temporary fixed mechanism 53 of lamp base part.
Difference with the chimeric width D 1 with recess 531 of base end side and the width d3 of front fitting portion 423 is A,
Difference with the chimeric width D 1 with recess 531 of base end side and the width d2 of lamp holder side insertion section 422 is B,
The width D 2 that is inserted into portion 532 with lamp base part is C with the difference of the width d3 of front fitting portion 423,
The width D 2 that is inserted into portion 532 with lamp base part is D with the difference of the width d2 of lamp holder side insertion section 422,
Difference with the chimeric width D 1 with recess 531 of base end side and the width d1 of base end side fitting portion 421 is E,
When being F with the difference of the chimeric width D 3 with recess 533 of front and the width d3 of front fitting portion 423,
Among A, B, C and the D any is all big than among E and the F any.
By possessing above formation, as mentioned below, when the lamp holder 4 insertion lamp sockets 5 that are installed in discharge lamp 10 are carried out temporary fixed operation, even when the central shaft of lamp holder 4 inserts lamp holder under with respect to the state of the inclined of lamp socket 5, if tilt be not extreme when big the sealing 12 of discharge lamp 10 just not have damaged danger.
Rotating part 52 is that rotating main body portion 521 is installed on the outer peripheral face of lamp base part flange part 512, the part of the base end side of rotating main body portion 521 surpasses lamp base part power supply face 516 extends towards tube axial direction, is that the center rotates at Zhou Fangxiang manually to make it with lamp base part matrix part 51.Have the rotation reducing diameter part 522 of external diameter less than rotating main body portion 521 continuous formation of the front of rotating main body portion 521, rotation reducing diameter part 522 is installed in the outer peripheral face of the base end part 518 of lamp base part metastomium 511.Rotating part 32 is by the rotation at Zhou Fangxiang, position at the front end face 519 of the cardinal extremity face 523 butt lamp base part flange parts 512 of rotation reducing diameter part 522 is connected between the position of rotating part block piece 513 with the front end face 524 that rotates reducing diameter part 522, can move at above-below direction.
Be formed with on the inner peripheral surface of rotating main body portion 521 and be used for and be formed on the lamp base part threaded portion 525 that the lamp holder side threaded portion 414 on the lamp holder 4 screws togather.For example imposing annular knurl processing on the outer peripheral face of rotating part 521 makes it carry out manual rotary operation easily.The final fixed mechanism of lamp base part is made of the rotating part 52 with lamp base part threaded portion 525.
Fig. 6 is used to illustrate the figure that is fixedly mounted on the order of the lamp holder 4 on the discharge lamp 10 with respect to lamp socket 5.Order when being fixed on lamp holder 4 on the lamp socket 5 is the order of (a)~(c), then is the order of (c)~(a) with the order of lamp holder 4 when lamp socket 5 unloads.(a) be that expression lamp holder 4 inserts the state of lamp socket before 5 moments.(b) be that expression lamp holder 4 inserts lamp socket 5, the temporary fixed state of finishing.(c) be the final state of fixedly finishing of expression lamp holder 4 and lamp socket 5.
Represent as Fig. 6 (b), the lamp holder side of lamp holder 4 power supply face 413 makes discharge lamp 10 to lamp socket 5 side shiftings till abutting to the lamp base part power supply face 516 of lamp socket 5, thereby front fitting portion 423 is entrenched in the chimeric recess 533 of using of front, lamp holder side insertion section 422 is inserted into lamp base part and is inserted into portion 532, become base end side fitting portion 421 and be fitted to the chimeric state of base end side with recess 531, and form and to be the state that each jut 517 that convex extends is inserted into each recess 415 that lamp holder side power supply face 413 forms from the lamp base part face 516 of powering, thereby finish operation with respect to lamp socket 5 temporary fixed lamp holders 4.The temporary fixed mechanism 42 of lamp holder side is with respect to the temporary fixed mechanism 53 of lamp base part, with the outer face 424 of front fitting portion 423 not the state of the chimeric bottom surface 535 with recess 533 of butt front engaged.Finish temporary fixed after, discharge lamp 10 is kept by lamp socket 5 via lamp holder 4, therefore must not support discharge lamp 10 with operator's hand.
As mentioned above, lamp holder side power supply face 413 is connected on the lamp base part power supply face 516, thereby the position of the tube axial direction of decision discharge lamp 10, and front fitting portion 423 is entrenched in the chimeric recess 533 of using of front, and it is chimeric with recess 531 that base end side fitting portion 421 is entrenched in base end side, thereby the tubular axis of restriction discharge lamp 10 is with respect to the inclined of lamp socket 5, and can limit lamp holder 4 with respect to moving on the direction of tubular axis quadrature.
As mentioned above, the base end side fitting portion 421 and the front fitting portion 423 that form in two places that separate on the temporary fixed mechanism of lamp holder side 42 tube axial directions are entrenched in the chimeric chimeric recess 533 of using of recess 531 and front of using of the base end side that forms in two places that separate on the lamp socket central axis direction of the temporary fixed mechanism 53 of lamp base part respectively.Thus, the temporary fixed mechanism 42 of lamp holder side is at the depth side position of the temporary fixed mechanism 53 of lamp base part and two places of entrance side position, the restriction discharge lamp is being orthogonal to moving on the direction of tubular axis, dwindle the scope of activities of discharge lamp 10 with respect to lamp socket 5, but so this state of operator's identification and the end of the temporary fixed operation of identification.
In addition, the temporary fixed mechanism of lamp holder side 42 and the temporary fixed mechanism 53 of lamp base part satisfy among A, B, C, the D any as mentioned above all greater than any relation of E, F, therefore shown in the explanation that utilizes Fig. 7~Figure 10, even when the central shaft of lamp holder 4 inserts lamp holder with respect to the state of the inclined of lamp socket 5, not that extremely big situation just not has and makes the danger of sealing 12 breakages of discharge lamp 10 as long as tilt.
Fig. 7 is the temporary fixed mechanism 53 of the lamp base part state before that the temporary fixed mechanism 42 of lamp holder side of expression lamp holder 4 is fastened on lamp socket 5.Fig. 8 is the central shaft of expression lamp holder side temporary fixed mechanism 24 is fastened on the temporary fixed mechanism 53 of lamp base part of lamp socket 5 with respect to the inclined of lamp socket 5 a state.Fig. 9 is the chimeric usefulness of the front recess 533 that the part of the front fitting portion 423 of the temporary fixed mechanism 42 of expression lamp holder side is entrenched in the temporary fixed mechanism 53 of lamp base part, and the part of base end side fitting portion 421 is entrenched in the chimeric state with recess 531 of base end side.Figure 10 is the chimeric usefulness of the front recess 533 that the front fitting portion 423 of the temporary fixed mechanism 42 of expression lamp holder side is fitted to the temporary fixed mechanism 53 of lamp base part fully, and base end side fitting portion 421 is fitted to the chimeric state with recess 531 of base end side fully.
That is, represent as Fig. 8, under the state of central shaft with respect to the inclined of lamp socket 5 of the temporary fixed mechanism 42 of lamp holder side, when even the temporary fixed mechanism of lamp holder side 42 inserts the temporary fixed mechanism 53 of lamp base parts, the base end side of lamp socket 5 is chimeric to be inserted in the portion 532 with recess 531 and lamp base part, the front fitting portion 423 and the lamp holder side insertion section 422 of lamp holder 4 have and can be orthogonal to the space that moves freely on the direction of tubular axis, therefore as long as the inclination of the temporary fixed mechanism 42 of lamp holder side is not extreme big, just can therefore sealing 12 stress applications of discharge lamp 10 not had the danger of the problems such as sealing 12 breakages of discharge lamp 10.
And, represent as Fig. 9, it is chimeric with recess 533 that the part of front fitting portion 423 is entrenched in front, and it is chimeric with recess 531 that the part of base end side fitting portion 421 is entrenched in base end side, thereby can determine to be orthogonal to the position of the discharge lamp 10 on the width of each central shaft, under this state, lamp holder side power supply face 413 is connected to lamp base part power supply face 516, decides the position of the discharge lamp 10 on the tube axial direction, finish temporary fixed operation.
To this, as shown in figure 11, the total length that strides across the temporary fixed mechanism 42 ' of lamp holder side according to temporary fixed mechanism of lamp holder side 42 ' and the temporary fixed mechanism 53 ' of lamp base part is entrenched in the situation of the temporary fixed mechanism 53 ' of lamp base part, the temporary fixed mechanism 42 ' of lamp holder side does not have the space that moves freely on the direction that is being orthogonal to tubular axis in the temporary fixed mechanism 53 ' of lamp base part, therefore when carrying out temporary fixed operation, even the central shaft of the temporary fixed mechanism 42 of lamp holder side tilts a little with respect to the central shaft of lamp socket 5, stress will be applied to the sealing 12 of discharge lamp 10, the dangerous height of sealing 12 breakages.
Get back to Fig. 6 (c), carry out following explanation for the lamp holder 4 and the final fixing operation of lamp socket 5.After the temporary fixed end, need carry out by with the screwing togather of lamp holder side threaded portion 414 and lamp base part threaded portion 525, will be installed in the operation that lamp holder 4 on the discharge lamp 10 is fixed on lamp socket 5.When only temporary fixed lamp holder 4 and lamp socket 5, when applying vibration, have and cause discharge lamp to topple over and damaged danger for exposure device, very dangerous.In the example with the figure expression, lamp holder side threaded portion 414 is an external screw thread, and lamp base part threaded portion 525 is an internal thread, but also can be opposite.
Represent as Fig. 6 (c), rotating part 52 rotates at Zhou Fangxiang, the lamp base part threaded portion 525 that is formed on the inner peripheral surface of rotating main body portion 521 is screwed togather with lamp holder side threaded portion 414, and the cardinal extremity face 523 that makes rotating part 52 rise to rotation reducing diameter part 522 abuts to till the front end face 519 of lamp base part flange part 512, finishes the final fixed operation with respect to the lamp holder 4 of lamp socket 5 thus.
In final fixing operation, owing to be sticked in each recess 415 that is formed on the lamp holder side power supply face 413 from each jut 517 that lamp base part power supply face 516 is the convex extension in the temporary fixed stage, therefore when making rotating part 52 rotations for lamp base part threaded portion 525 and lamp holder side threaded portion 414 are screwed togather, do not have the danger of lamp holder 4 and discharge lamp 10 in the Zhou Fangxiang rotation.
After final the fixing, because lamp holder side power supply face 413 and lamp base part power supply face 516 butts, lamp holder side power supply face 413 pushes the lamp base part face 516 of powering towards lower side, make the cardinal extremity face 523 that rotates reducing diameter part 522 be connected to the front end face 519 of lamp base part flange part 512, forming cardinal extremity face 532 pushes front end face 519 towards upper side, therefore lamp holder side power supply face 413 and lamp base part power supply face 516 can not separate, and can lamp holder 4 be placed under the state on the lamp base part matrix part 51 to be fixed securely.Therefore, after final the fixing, lamp holder 4 becomes the state of conducting with lamp socket 5, and does not have the worry that discharge lamp 10 is toppled over.
During the final fixing end of job, be hidden between rotating main body portion 521 and rotation reducing diameter part 522 and the lamp base part metastomium 511 originally can not visual identification mark 514 appear on the outer peripheral face of lamp base part metastomium 511, the operator can recognize the end of job of finally fixing by visual identification mark 514.
When unloading the discharge lamp 10 of end of lifetime, carry out according to the order of Fig. 6 (c)~(a).That is, with rotating part 52 towards with final fixedly the time rightabout rotate, 525 remove lamp holder side threaded portion 414 from the lamp base part threaded portion, and till the front end face 524 that makes rotating part 52 move to rotation reducing diameter part 522 towards lower side abuts to rotating part block piece 513, form the temporary fixed state shown in Fig. 6 (b).And, be temporarily fixed at discharge lamp 10 under the state on the lamp socket 5 when upper side is pulled out by being in lamp holder 4, the discharge lamp 10 of end of lifetime can be unloaded from lamp socket 5.
According to above discharge lamp holding mechanism of the present invention, basically, the temporary fixed mechanism 42 of lamp holder side is inserted into the temporary fixed mechanism 53 of lamp base part, be in the state that lamp holder 4 and lamp socket 5 is temporary fixed, thereby the operator can decontrol hand from discharge lamp.Therefore, the discharge lamp 10 that weight is big is fixed under the situation of lamp socket 5, owing to need not continue supporting discharge lamp and with the fixedly numerous and diverse operation of discharge lamp of an other hand, can improve the operating efficiency that discharge lamp is installed with one hand.
And, by contacting of lamp holder side power supply face 413 and lamp base part power supply face 516, can conducting lamp holder 4 and lamp socket 5, therefore can power by 5 pairs of discharge lamps of lamp socket 10.Therefore, even under the situation of the large-scale discharge lamp that uses the big electric current for example need to flow through 50~250A (ampere), as long as final fixedly lamp holder 4 and lamp socket 5 can be so that the 413 firm ground contacts of lamp holder side power supply face on lamp base part power supply face 516, can be supplied with big electric current to discharge lamp really.And, owing to can as discharge lamp 10 in the past, not need the lead of power supply usefulness, when discharge lamp 10 is fixed on lamp socket 5, can not injure the reflecting surface of speculum 20, therefore do not have the danger of the reflective character of damage reflecting surface.
In addition, according to discharge lamp holding mechanism of the present invention, when carrying out the temporary fixed operation of lamp holder 4 with respect to lamp socket 5, even when under the state of tubular axis with respect to the inclined of lamp socket 5 of discharge lamp 10, being inserted into lamp socket 5, do not have the danger of sealing 12 breakages that cause discharge lamp 10 yet, but and the temporary fixed operation of operator's easy identification finish.
Below, use Figure 12, Figure 13 that other embodiment of the present invention is described.In the embodiment that Figure 12, Figure 13 represent, except the formation of temporary fixed mechanism of lamp holder side and the temporary fixed mechanism of lamp base part, other formation and above-mentioned Fig. 4, embodiment shown in Figure 5 are common, and, also be that the embodiment represented with Fig. 6 is common for temporary fixed, the final fixing sequence of operation.
Figure 12 is the figure that is used to illustrate other embodiment of the present invention.The mode of Figure 12 (a)~(c) expression be the temporary fixed mechanism of lamp holder side that represents with Fig. 4 respectively formation similarly, satisfy among above-mentioned A, B, C and the D any simultaneously all greater than any the relation among E, the F, and the width d3 of front fitting portion is less than the relation of the width d1 of base end side fitting portion.
The mode of Figure 12 (a) expression is that the temporary fixed 42a of mechanism of lamp holder side possesses: form lamp holder side insertion section 422a in base end side fitting portion 421a from outstanding columned base end side fitting portion 421a and the width of central authorities of lamp holder power supply face 413a continuously less than the cylindrical of base end side fitting portion 421a, the front of lamp holder side insertion section 422a possesses front fitting portion 423a.That is it is consistent with front fitting portion 423a that the temporary fixed 42a of mechanism of lamp holder side forms the width of lamp holder side insertion section 422a.
The temporary fixed 53a of mechanism of lamp base part is formed with: be used to be entrenched in the chimeric recess 531a that uses of base end side base end side fitting portion 421a, that be formed on lamp base part power supply face 516a central authorities; Be used to insert lamp holder side insertion section 422a, have with the chimeric lamp base part of base end side and be inserted into the 532a of portion with the same width of recess 531a; And be used for chimeric front fitting portion 423a, width is inserted into the chimeric recess 533a that uses of front of the 532a of portion less than lamp base part.The temporary fixed 42a of mechanism of lamp holder side engages in the mode that the outer face 425a of front fitting portion 423a is not connected to the chimeric bottom surface 535a with recess 533a of front with respect to the temporary fixed 53a of mechanism of lamp holder side.
The mode that Figure 12 (b) represents is that the temporary fixed 42b of mechanism of lamp holder side possesses: the blade of a sword shape that makes progress in outstanding base end part 420b, the footpath of central authorities from lamp holder side power supply face 413b continuously expands the base end side fitting portion 421b that opens; Width less than the cylindrical of base end side fitting portion 421b continuously in the formed lamp holder side insertion section 422b of base end side fitting portion 421b; Front at lamp holder side insertion section 422b has and the formed front fitting portion of lamp holder side insertion section 422b same widths 423b; And width less than the cylindrical of front fitting portion 423b continuously in the formed leading section 424b of front fitting portion 423b.
The temporary fixed 53b of mechanism of lamp base part possesses: be used for the chimeric recess 531b that uses of base end side chimeric base end side fitting portion 421b, that be formed on lamp base part power supply face 516b central authorities; Be used to insert lamp holder side insertion section 422b, have with the chimeric lamp base part of base end side and be inserted into the 532b of portion with recess 531b same widths; And be used for chimeric front fitting portion 423b, width is inserted into the chimeric recess 533b that uses of front of the 532b of portion less than lamp base part.The temporary fixed 42b of mechanism of lamp holder side engages in the mode that the outer face 425b of leading section 424b is not connected to the chimeric bottom surface 535b with recess 533b of front with respect to the temporary fixed 53b of mechanism of lamp base part.
As the mode of Figure 12 (c) expression, the temporary fixed 42c of mechanism of lamp holder side possesses: the continuous base end side fitting portion 421c that opens in the outstanding base end part 420c of the center side of the face 413c that powers from the lamp holder side, blade of a sword shape expansion diametrically; Width less than the cylindrical of base end side fitting portion 421c continuously in the formed lamp holder side insertion section 422c of base end side fitting portion 421c; And the front fitting portion 423c that opens in lamp holder side insertion section 422c blade of a sword shape expansion diametrically continuously.
The temporary fixed 53c of mechanism of lamp base part possesses: the chimeric recess 531c that uses of base end side that is used for chimeric base end side fitting portion 421c; Be used to insert lamp holder side insertion section 422c, have with the chimeric lamp base part of base end side and be inserted into the 532c of portion with recess 531c same widths; And be used for chimeric front fitting portion 423c, width is inserted into the chimeric recess 533c that uses of front of the 532c of portion less than lamp base part.
Figure 13 is the figure that is used to illustrate other embodiment of the present invention.The mode of Figure 13 (a) expression is for satisfying among above-mentioned B, C, the D any respectively all greater than any the relation among E, the F, and the mode of Figure 13 (b) expression is to satisfy among above-mentioned B, C, the D any all greater than any the relation among E, the F.And the mode that Figure 13 (a) and (b) are represented has the width d1 feature consistent with the width d3 of front fitting portion 423 of the base end side fitting portion 421 of the temporary fixed mechanism 42 of lamp holder side.
In the mode of Figure 13 (a) expression, the temporary fixed 42d of mechanism of lamp holder side possesses: continuously in the base end side fitting portion 421d that opens from the outstanding base end part 420d blade of a sword shape expansion diametrically of the center side of lamp holder side power supply face 413d; For width less than the cylindrical of base end side fitting portion 421d and continuously in the formed lamp holder side insertion section 422d of base end side fitting portion 421d; And continuously in lamp holder side insertion section 422d, having with base end side fitting portion 421d same widths diametrically, blade of a sword shape expands the front fitting portion 423d that opens.
The temporary fixed 53d of mechanism of lamp base part is made of the recess that is formed on lamp base part power supply face 516d central authorities, forms the chimeric recess 531d that uses of base end side that chimeric base end side fitting portion 421d uses in order continuously; Insertion lamp holder side insertion section 422d uses, width is inserted into the 532d of portion greater than the chimeric lamp base part with recess 531d of base end side; And the chimeric recess 533d that uses of front that uses of chimeric front fitting portion 423d.
The temporary fixed 42e of mechanism of lamp holder side is the column that convex tube axial direction total length that extend, that stride discharge lamp has same widths by the central authorities from lamp holder side power supply face 413e and constitutes in the mode of Figure 13 (b) expression, forms base end side fitting portion 421e, lamp holder side insertion section 422e and front fitting portion 423e in order continuously.
The temporary fixed 53e of mechanism of lamp base part possesses: that chimeric base end side fitting portion 421e uses, as the to be formed on lamp base part power supply face 516e central authorities chimeric recess 531e that uses of base end side; Insertion lamp holder side insertion section 422e uses, width is inserted into the 532e of portion greater than the chimeric lamp base part with recess 531e of base end side; And chimeric front fitting portion 423e use, width is inserted into the chimeric recess 533e that uses of front of the 532e of portion less than lamp base part.Base end side is chimeric to form width greater than front fitting portion 423e and lamp holder side insertion section 422e with recess 531e.
According to the embodiment of representing as above-mentioned Figure 12, Figure 13, temporary fixed 42a~the 42e of mechanism of lamp holder side, the temporary fixed 53a~53e of mechanism of lamp base part are chimeric at two places that tube axial direction (central axis direction of lamp socket) upward separates respectively, and satisfy among above-mentioned B, C, the D any all greater than any the relation among E, the F, can expectation and the identical effects of embodiment of Fig. 4,5 expressions.

Claims (6)

1. discharge lamp holding mechanism is equipped with the discharge lamp of lamp holder by at least one end; And the lamp socket formation that this discharge lamp is erect in vertical direction and can be kept removably,
The lamp holder of above-mentioned discharge lamp possesses: the lamp holder side group body that extends and coated by the end of discharge lamp the ground installation along the tubular axis of discharge lamp; Be orthogonal to width on the direction of tubular axis form forr a short time than this lamp holder side group body, outstanding from this lamp holder side group body front end face, and the temporary fixed mechanism of lamp holder side of the cylindricality of extending towards above-mentioned lamp socket along tubular axis; And be formed on the final fixed mechanism of lamp holder side on the front outer peripheral face of this lamp holder side group body,
Above-mentioned lamp socket possesses: have the lamp base part matrix part that engages the temporary fixed mechanism of lamp base part that recess usefulness, that extend along tubular axis constitutes with the temporary fixed mechanism of above-mentioned lamp holder side; And engage on outer peripheral face usefulness, that be located at this lamp base part matrix part with the final fixed mechanism of above-mentioned lamp holder side, be the tubular lamp base part final fixed mechanism of center with this lamp base part matrix part in the Zhou Fangxiang rotation,
Above-mentioned lamp holder is able to temporary fixed by the temporary fixed mechanism of above-mentioned lamp holder side with engaging of the temporary fixed mechanism of above-mentioned lamp base part with above-mentioned lamp socket, and be able to finally fixing by final fixed mechanism of above-mentioned lamp holder side and engaging of the final fixed mechanism of above-mentioned lamp base part, it is characterized in that:
In the temporary fixed mechanism of above-mentioned lamp holder side, two places that separate on tube axial direction are formed with base end side fitting portion and front fitting portion, and are formed with lamp holder side insertion section between this base end side fitting portion and this front fitting portion,
In the temporary fixed mechanism of above-mentioned lamp base part, two places that on the lamp socket central axis direction, separate, be formed with the base end side of above-mentioned base end side fitting portion and the chimeric usefulness of above-mentioned front fitting portion difference chimeric with recess and the chimeric recess of using of front, and chimeric the chimeric lamp base part that is used to insert above-mentioned lamp holder side insertion section that is formed with between with recess is inserted into portion with recess and this front at this base end side
Above-mentioned lamp holder and above-mentioned lamp socket satisfy the following relation that concerns 1 expression:
Concern 1:
The difference of width that is inserted into the direction that is orthogonal to tubular axis of the width of the direction that is orthogonal to the lamp socket central shaft of portion and above-mentioned lamp holder side insertion section with above-mentioned lamp base part is D,
Difference with the width of the direction that is orthogonal to tubular axis of the width of the chimeric direction that is orthogonal to the lamp socket central shaft with recess of above-mentioned base end side and above-mentioned base end side fitting portion is E,
When being F with the difference of the width of the direction that is orthogonal to tubular axis of the width of the chimeric direction that is orthogonal to the lamp socket central shaft with recess of above-mentioned front and above-mentioned front fitting portion,
D is bigger than E and F.
2. discharge lamp holding mechanism according to claim 1 is characterized in that, above-mentioned lamp holder and above-mentioned lamp socket satisfy the following relation that concerns 2 expressions,
Concern 2:
Difference with the width of the direction that is orthogonal to tubular axis of the width of the chimeric direction that is orthogonal to the lamp socket central shaft with recess of above-mentioned base end side and above-mentioned front fitting portion is A,
Difference with the width of the direction that is orthogonal to tubular axis of the width of the chimeric direction that is orthogonal to the lamp socket central shaft with recess of above-mentioned base end side and above-mentioned lamp holder side insertion section is B,
When the difference of width that is inserted into the direction that is orthogonal to tubular axis of the width of the direction that is orthogonal to the lamp socket central shaft of portion and above-mentioned front fitting portion with above-mentioned lamp base part is C,
Among A, B and the C any is all big than among E and the F any.
3. discharge lamp holding mechanism according to claim 1 is characterized in that, the final fixed mechanism of above-mentioned lamp holder side is formed with lamp holder side threaded portion on the outer peripheral face of above-mentioned lamp holder side group body front,
The final fixed mechanism of above-mentioned lamp base part is formed with the lamp base part threaded portion on the side face within it.
4. discharge lamp holding mechanism according to claim 1, it is characterized in that, above-mentioned lamp holder and above-mentioned lamp socket are made of electroconductive member, under the state of the cardinal extremity face butt of the front end face of above-mentioned lamp holder side group body and above-mentioned lamp base part matrix part, above-mentioned lamp holder and above-mentioned lamp socket is finally fixing, thus administration of power supply formed.
5. discharge lamp holding mechanism according to claim 1 is characterized in that, is formed with the jut of giving prominence to towards above-mentioned lamp holder side group body from the cardinal extremity of above-mentioned lamp base part matrix part on above-mentioned lamp socket,
On above-mentioned lamp holder, on the front end face of above-mentioned lamp holder side group body, be formed with and be used for the recess that engages with above-mentioned jut.
6. discharge lamp holding mechanism according to claim 1 is characterized in that, the rated current of above-mentioned discharge lamp is more than the 50A.
CN2008101084812A 2007-06-06 2008-06-06 Discharge lamp holding mechanism Active CN101354122B (en)

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JP2007150285A JP4329845B2 (en) 2007-06-06 2007-06-06 Discharge lamp holding mechanism
JP2007-150285 2007-06-06

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CN101354122B true CN101354122B (en) 2011-05-18

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JP5180854B2 (en) * 2009-01-23 2013-04-10 ウシオ電機株式会社 Light source device and exposure apparatus provided with the light source device
CN102418893B (en) * 2011-09-16 2013-04-24 陈晓庭 Xenon headlamp
JP6029387B2 (en) 2012-08-30 2016-11-24 株式会社オーク製作所 Discharge lamp attachment / detachment mechanism
JP6253891B2 (en) * 2013-04-12 2017-12-27 株式会社オーク製作所 Discharge lamp and method of attaching discharge lamp to power supply member
KR102373531B1 (en) * 2020-02-11 2022-03-17 세메스 주식회사 Lamp holder and light source device

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CN1706019A (en) * 2003-02-26 2005-12-07 优志旺电机株式会社 Discharge lamp, discharge lamp socket, discharge lamp device, and discharge lamp lighting device

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CN2221713Y (en) * 1993-09-13 1996-03-06 电灯专利信托有限公司 Electric lamp
US5659221A (en) * 1996-03-26 1997-08-19 Osram Sylvania, Inc. High intensity discharge headlamp assembly
CN1706019A (en) * 2003-02-26 2005-12-07 优志旺电机株式会社 Discharge lamp, discharge lamp socket, discharge lamp device, and discharge lamp lighting device

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KR100931438B1 (en) 2009-12-11
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CN101354122A (en) 2009-01-28
KR20080107257A (en) 2008-12-10

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