JP3048956B2 - Non-product wafer management equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a non-product wafer management apparatus, and more particularly, to a non-product wafer management system for managing processing including regeneration and disposal of a reference wafer, a dummy wafer, and the like for grasping a state in a manufacturing process of a product wafer. Related to the device.

[0002]

2. Description of the Related Art In the manufacture of a semiconductor device, a non-product wafer such as a reference wafer and a dummy wafer is flowed together with a product wafer in order to grasp the state of the manufacturing process of the wafer and the like. There are many cases in which predetermined information is obtained from.

FIGS. 3 and 4 show an example of a non-product wafer management apparatus which manages such non-product wafer processing in each manufacturing process and processing such as reproduction and disposal (see, for example, Japanese Patent Application Laid-Open No. 5-74675). Reference).

In this example, as shown in FIG. 3, a host computer 11, a database 12 managed by the host computer 11, registration of system parameters and various settings are performed. In accordance with the work order of the series of work, setting of work conditions of each work, execution of each work of a non-product wafer, setting of discarding, etc., a terminal 13 for the designer, and the worker according to the work instruction displayed on the display. And worker terminals 14a and 14b for performing predetermined operations such as operation a (15a) and operation b (15b) on product wafers and non-product wafers.

FIG. 4 is a block diagram for functionally explaining this example. Reference numeral 16 denotes work information registration means, which is a series of works to be performed for each production lot and a lot-specific work for storing the work conditions. It comprises a condition storage unit 17 and a non-product wafer-specific work information storage unit 18 for storing a series of operations to be performed on non-product wafers and the operation conditions.

Reference numeral 19 denotes a work information reading unit for reading the work information from the work information registration means 16;
When the identification number of the production lot is notified from 0, the operation conditions of the production lot and the operation information on the treatment of the non-product wafer included in the production lot are registered in the operation information registration means 1.
6, a work instruction means 2 comprising a display
1 is displayed.

Reference numeral 22 denotes an operation result discriminating unit for judging whether or not the non-product wafer which has finished or approaching the operation is defective. If a result of the defect is obtained, the non-product wafer is checked. Since it is necessary to change future measures, an update signal is input from the work result determination unit 22 to the update input unit 23, and the non-product wafer-specific work information storage unit 19 of the work information registration unit stores the non-product wafer information. Work information is updated.

According to this conventional non-product wafer management apparatus, it is possible to instruct not only the processing of the product wafer but also the processing of the non-product wafer of the production lot, and the operation information of the non-product wafer according to the operation result. Can be instructed as appropriate, and how to process (including reprocessing and discarding) for which non-product wafers can be instructed in a paperless manner (displayed on a display), so that processing errors can be prevented.

As described above, the non-product wafer is used for the purpose of grasping the state of the manufacturing process and the like, but most of the non-product wafer is subjected to a reprocessing after use. Although the number of non-product wafers used for grasping the state is small at one time, in the case of regenerating, it is possible to work in the same procedure (the same number of operations, the order and the working conditions at the time of regenerating) from the viewpoint of improving efficiency etc. In general, the same procedure is performed for a non-product wafer.

[0010]

The conventional non-product wafer management apparatus described above displays various processing instructions including non-product wafer reprocessing and discarding processing on a display, and according to the displayed instructions, the worker performs an operation. Because it is configured to process by its own hands, no matter how concentrated and cautious the workers are, mistakes in mixing foreign wafers, mistakes in non-product wafer reclamation / expiration date checks, and reclamation procedures Inevitably, the occurrence of selection errors and processing errors is inevitable, and these errors lead to self-contamination in equipment for performing the regeneration process and cracking of the wafer. In addition, since non-product wafers are managed for each group divided according to their use, etc., diversion and disposal are not performed efficiently, resulting in a huge number of non-product wafers being used. There is a point.

An object of the present invention is to eliminate a check error, a selection error, a processing error, etc., thereby preventing an accident such as contamination or cracking in a reprocessing apparatus, and reducing the fee for use of non-product wafers. It is an object of the present invention to provide a non-product wafer management apparatus capable of performing the above-mentioned operations.

[0012]

SUMMARY OF THE INVENTION A non-product wafer management apparatus according to the present invention is a non-product wafer management device for flowing to a manufacturing process together with a product wafer, performing a predetermined process, and collecting various information including the status of the manufacturing process. What is claimed is: 1. A non-product wafer management apparatus which manages various processes including a process in a manufacturing process, a regeneration process, and a disposal process, wherein each of the non-product wafers includes a type of the non-product wafer and information of individual identification.
ID marking means for marking the wafer I,
D, individual information holding means for holding individual information including information on the number of times of reproduction and the use period of the non-product wafer corresponding to each of the wafer IDs; Master information registering / holding means for registering and holding master information including information on a reproduction procedure; ID reading means for reading a wafer ID of the non-product wafer; individual information of the wafer ID read by the ID reading means; Comparing / judging means for comparing with the master information and performing various judgments including mixing of different kinds, regenerating processing, and discarding processing; Reproduction processing means for issuing and updating the individual information including the number of reproductions, and the wafer I when the judgment result is discard processing.
And a reject processing means for automatically rejecting the non-product wafer D and rejecting the individual information of the wafer ID.

A host computer for registering information on a reproduction procedure in the master information and controlling each unit, and a master information register for registering information on the number of times of reproduction and the limit of a use period in the master information. A terminal, a server for holding the master information and the individual information, comparing the individual information of the wafer ID with the master information, and performing the various determinations; a laser marker for marking the wafer ID; and reading the wafer ID , A control terminal and a character recognition device that perform the reproduction process, the individual information update process, and the reject process.

[0014]

Embodiments of the present invention will now be described with reference to the drawings.

FIG. 1 is a block diagram of hardware showing one embodiment of the present invention, and FIG. 2 is a functional block diagram for explaining the operation of this embodiment.

In this embodiment, a wafer ID for marking each non-product wafer 100 with a wafer ID including information on the type of the non-product wafer 100 and individual identification is provided.
A marking unit 101; an individual information holding unit 102 corresponding to each of these wafer IDs; and individual information holding unit 102 for holding individual information including information on the number of times of reproduction and use period of the non-product wafer 100 of the wafer ID; Master information registering / holding means 103 for registering and holding master information including information on the number of times of reproduction, use period limit and reproduction procedure, a wafer ID reading means 104 for reading the wafer ID of the non-product wafer 100, The individual information of the wafer ID read by the reading means 104 is read out from the individual information holding means 102 and the master information is read out from the master information registering / holding means 103. Comparing / judging means 105 for performing various judgments of A reproduction processing unit 106 for updating the individual information including the views with constant results when the regeneration process issues a reproduction procedure corresponding to the wafer ID, comparison and
When the result of the determination by the determining means 105 is a discarding process, the non-product wafer 100 having this wafer ID is automatically discarded, and the individual information of the non-product wafer 100 corresponding to this wafer ID held in the individual information holding means 102 is stored. And a reject processing unit 107 for rejecting.

Specific hardware for executing this embodiment includes a host computer 1 for registering information on a reproduction procedure in the master information and controlling each unit, and a reproduction limit number of times in the master information. Master information registration terminal 6 for registering information on the use period limit and the like
A server 2 for holding the master information and the individual information, comparing the individual information of the read wafer ID with the master information, and performing various determinations; a laser marker 3 for marking the wafer ID; It has a configuration including a control terminal 4 and a character recognition device 5 that display information, and perform a reproduction process and a reject process.

In FIG. 1, after marking the wafer ID,
Along with the product wafer, various processing means 111 in each manufacturing process, and means for reading the wafer ID and collecting various data of the non-product wafer 100 of the wafer ID (1
Various processing / data collecting means 110 in the manufacturing process including the step 12) is also included.

Next, the operation of this embodiment will be described.

First, the master maintainer preliminarily inputs a film type (non-product wafer type) from the master information registration terminal 6.
The information to be determined at the time of reproduction, such as the maximum number of times of reproduction for each use, the use period limit, etc., and the reproduction procedure information for each film type from the host computer 1 are registered in the server 2 as master information.
Keep it. The worker marks the wafer ID on the non-product wafer 100 with the laser marker 3.

Next, various processes in each manufacturing process are performed together with the product wafer, and the marked wafer ID is set in the character recognition device 5. The character recognition device 5 transmits the read information to the server 2, and the server 2 holds the received data. The information of the non-product wafer in which the data is registered is used for the purpose of grasping the state of the equipment.

The non-product wafer 100 for which information has been collected is collected according to the film type and becomes a wafer to be reprocessed. At this time, the wafer is set in the character recognition device 5 again. The non-product wafer 100 wafer ID set by the character recognition device 5 is read, and data is transmitted to the server 2. The server 2 determines, based on the received individual information of the wafer ID and the registered master information, whether the information is mixed, discarded due to the limitation of the number of use times, or the use period is not reached, and the processing is performed. The result of the determination is transmitted to the control terminal 4 and displayed on the display. As a result of the determination, the non-product wafer 100 discarded is rejected by the wafer reject function of the character recognition device 5 or the like.

In addition, as for the non-product wafer 100 as a result of the judgment of the regenerating process, the regenerating procedure is displayed on the display. Then, the issuing procedure information is transmitted from the control terminal 4 to the host computer 1, and the issuing of the reproducing procedure of the non-product wafer 100 is completed. For the non-product wafer for which the procedure has been issued, the number of reproductions of the individual information held by the server 2 is counted up and updated.

In this way, the processing from the various determinations in the reproduction processing to the selection of the reproduction procedure can be automatically performed. Therefore, various check errors, procedure selection errors, processing errors, and the like are eliminated, and accidents such as contamination and cracks in the reproduction processing apparatus can be prevented. Also,
Since different types of non-product wafers can be centrally managed,
Management of diversion, disposal, and the like is facilitated, and the amount of non-product wafers used can be reduced.

[0025]

As described above, according to the present invention, the wafer I
D marking, reading of the wafer ID, comparison of the individual information and master information of the read wafer ID, the determination thereof, and the regenerating process and the discarding process based on the determination result are automatically performed. In addition, it is possible to prevent accidents such as contamination and cracks in the reprocessing equipment by eliminating mistakes in the selection of procedures and processing errors, and to centrally manage different types of non-products. There is an effect that the management becomes easy and the usage amount of the non-product wafer can be reduced.

[Brief description of the drawings]

FIG. 1 is a block diagram of hardware showing an embodiment of the present invention.

FIG. 2 is a functional block diagram of the embodiment shown in FIG.

FIG. 3 is a hardware block diagram illustrating an example of a conventional non-product wafer management apparatus.

FIG. 4 is a functional block diagram of the non-product wafer management device shown in FIG. 3;

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Host computer 2 Server 3 Laser marker 4 Control terminal 5 Character recognition device 6 Master information registration terminal 11 Host computer 12 Database 13 Designer terminal 14a, 14b Worker terminal 16 Work information registration means 19 Work information readout unit 20 Manufacturing lot Discriminator 21 Work instructing means 22 Work result discriminator 23 Update input means 100 Non-product wafer 101 Wafer ID marking means 102 Individual information holding means 103 Master information registration / holding means 104 Wafer ID reading means 105 Comparison / judging means 106 Reproduction processing means 107 reject processing means

Claims (2)

(57) [Claims] 1. A non-product wafer manufacturing process for regenerating and discarding a non-product wafer in a manufacturing process for collecting a variety of information including the status of the manufacturing process by flowing the same to a manufacturing process together with a product wafer. A non-product wafer management device for managing a process, comprising: an ID marking unit for marking each of the non-product wafers with a wafer ID including information on a type of the non-product wafer and individual identification; Individual information holding means for holding individual information including information on the number of times of reproduction and the use period of the non-product wafer with the wafer ID; Master information registering / holding means for registering and holding master information including ID, ID reading means for reading a wafer ID of the non-product wafer, Wafer I read by D reading means
A comparison / judgment means for comparing the individual information of D with the master information and performing various judgments including heterogeneous mixing, reproduction processing and discard processing, and a wafer ID when the judgment result by the comparison / judgment means is reproduction processing. Reproduction processing means for issuing the corresponding reproduction procedure and updating the individual information including the number of times of reproduction, and automatically discarding the non-product wafer of this wafer ID when the judgment result is discard processing, and A non-product wafer management apparatus, comprising: reject processing means for rejecting individual information. 2. A host computer for registering information on a reproduction procedure in the master information and controlling each unit, and a master information register for registering information on a reproduction limit number and a use period limit in the master information. A terminal, a server for holding the master information and the individual information, comparing the individual information of the wafer ID with the master information, and performing the various determinations; a laser marker for marking the wafer ID; and reading the wafer ID 2. The non-product wafer management device according to claim 1, further comprising a control terminal and a character recognition device for performing the reproduction process, the update process of the individual information, and the reject process.