JPH0512300A - Result display method for semiconductor equipment production - Google Patents

Abstract

PURPOSE:To prepare a result display chart which can earlier grasp a working situation, etc., by collecting the respective pieces of information of the number of works, a work date/time and a process from a terminal device provided for respective facilities and graphically displaying the number of product works and a target performance at respective dates/times on one screen. CONSTITUTION:A terminal device 2 inputs information on the facilities 1a to 1n respectively production-process a semiconductor equipment. The host computer 3 collects the information from the terminal device 2. A data base processes data obtained by the host computer 3 and prepares the result chart. Then, a graph display terminal 4 plots the result display chart. Thus, the result chart which can grasp a production management situation earlier and which can take a measure corresponding to it.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a performance display method in semiconductor device manufacturing for grasping the progress status of manufacturing, equipment operation performance and manufacturing target achievement level in the manufacture of various types of semiconductor devices.

[0002]

2. Description of the Related Art Generally, there are various kinds of semiconductor devices, even one semiconductor device. Further, even if one kind of semiconductor device is used, the manufacturing process thereof reaches 50 or 500 processes. Furthermore, various conditions are different in one of the manufacturing processes, and different equipment is used. Also, regarding the equipment to be used, it is not a single-purpose machine but various manufacturing processes. For example, even a normal facility entrusts two to ten manufacturing processes.

Therefore, when manufacturing such a variety of semiconductor devices, it is necessary to determine how much work-in-process is put into each facility, how much process processing is performed, or how much the operating rate is improved. In addition, it is important to understand how many work-in-process products are currently being processed. Therefore, in order to grasp these, a performance display table in semiconductor device manufacturing is required for each facility.

Conventionally, in the result display method for creating this result display table, the actual result of each process or facility is simply indicated by the number of inputs or completions for each process or facility, and each semiconductor device is represented by the indicated result table. In this method, the progress status, equipment operation record, and target achievement level were calculated or estimated individually.

[0005]

However, in the above-described conventional result display method for semiconductor devices, the difference between the target number of finished products and the actual number of processed products needs to be calculated each time, which is very troublesome. There is such a problem. Further, even if the difference is found, it is not possible to elucidate what is the cause of the difference, and it is difficult to judge how much the work in process should be put in next. For this reason, there is a problem that an appropriate input cannot be made and the operation rate is lowered.

An object of the present invention is to provide a result display method in a semiconductor device capable of creating a result display table capable of grasping the number of processes of the equipment, the degree of achievement of a target, and the operating status in order to eliminate such drawbacks. is there.

[0007]

A method of displaying results in semiconductor device manufacturing according to the present invention is a method of displaying results in semiconductor device manufacturing in which a plurality of processes are processed by the same manufacturing equipment group, and information is transferred to each equipment to a host computer. Equipped with a terminal, and the number of work at the start and end of the work of each equipment,
A step of exchanging information on a work date and a work process between the terminal and the host computer; a step of the host computer adding and updating the information data in a three-dimensional relational database at any time; And graphically drawing the updated numerical value on one screen of the display terminal.

[0008]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, the present invention will be described with reference to the drawings.

FIG. 1 is a block diagram showing an arrangement of equipment groups for explaining an embodiment of a result display method in manufacturing a semiconductor device according to the present invention, and FIG. 2 is an implementation of a result display method in manufacturing a semiconductor device according to the present invention. FIG. 3 is an example of a table displayed on the graph display terminal of FIG. 1 for explaining an example.

As shown in FIG. 1, the manufacturing line applied to the present invention includes facilities 1a to 1 for processing each semiconductor device.
n, and a terminal device 2 for entering information about these facilities,
The host computer 3 collects information from these terminals 2 and processes the data, and a graph display terminal 4 for drawing a performance display table according to the present invention on the host computer.

Next, the flow of the result display method in manufacturing according to the present invention will be described. As shown in FIG. 2, first, in step 5, this flow is entered into various data terminals such as the number of work processes in each facility and reported to the host computer 3. Next, in step 6, the host computer 3 processes these data. Next, in step 7, the processed data is transferred to and stored in the storage device. Next, in step 8, the table shown in FIG. 3 is drawn on the graph display terminal. The numerical values and graphs in this table are updated with the data from the terminal.

Next, the table in FIG. 3 will be described.
Reference numeral 9 in the figure is a graph of a target value (shown by a dotted line) of the cumulative number for each day that the facility should process and the actual number of processes. 10 in the figure
Is a bar graph showing the number of processes per day. 11 in the figure is
The dates on the horizontal axis of the graphs 9 and 10 are shown, target value items to be processed in different processes, and items with different process names.
Reference numeral 12 in the figure indicates the number of processes per day in different steps. In the figure, 13 indicates the total number of processes per day. Reference numeral 14 in the figure indicates the degree of achievement with respect to the daily target cumulative total.

Looking at the table in FIG. 3, for example, the process A
It can be seen that the work is completed on the 4th day until the 5th day. This means that this facility eliminates the need to process step A on the fifth day. Therefore, only the steps B and C should be processed on the fifth day. In addition, since the number of treatments of this equipment has not reached the target value throughout the entire process, it is necessary to improve the flow of the input and recover the delay of the B and C processes. As described above, when the table shown in FIG. 3 is obtained, the numerical values are diagrammatically formed, and there is an advantage that the processing degree of the equipment, the operating rate and the progress status of the process can be grasped more quickly, and the corresponding processing can be measured.

FIGS. 4, 5 and 6 are diagrams showing the database structure in the host computer. Next, the database in the performance display method in the semiconductor device manufacturing will be described. First, the database A for collecting and organizing the data collected from the terminal device 2 has a tree structure as shown in FIG.
There is a history 16 of each process when the product is processed under the parent 15. The lot number 15 records the product name and the lot number of the product. In the history record, the process name, work start date / time, work end date / time, worker name, number of works, equipment name, etc. are recorded. Therefore, the process name and the work start date and time are collected from the terminal 2 together with the work start report and newly recorded. Further, when the work completion report is transferred from the facility, the blank part of the record is filled with work completion date / time, worker name, work condition, number of works, and work facility data.

FIG. 5 shows a database B used by the host computer 3 when checking the work conditions at the start of the work of the equipment. This database B is
It also has a tree structure, with process procedure 17 as the parent,
Below that is information on working conditions and available equipment 18.
This database B is the database A shown in FIG. 4 when the lot number is reported in the work start report as described above.
The more recent history is searched, and the work conditions and workable equipment of the next process are extracted from the database B based on the search.
In addition, with this database B, it is checked whether the extracted usable equipment can be used, and if there is no problem,
Transfer the working conditions to the available equipment. In addition, if there is a problem, notify the unavailable message.

FIG. 6 shows a database C for transferring graph display data to the graph display terminal shown in FIG. This database C is a three-dimensional relational database, as shown in the figure, and includes A, B, and C, which are process names 19 for each facility, and target fields 20 and dates 21 in respective fields. The number of operations for each is recorded. Then, each time the work is completed, the work completion date and time of each process is obtained from the terminal device 2, and the data value is entered in each field to be updated. Then, after a predetermined route, these data are held in the storage device, transferred to the graph display terminal 4 at the time of data transfer request, and the result table shown in FIG. 3 is drawn.

7 and 8 are flow charts for explaining the procedure of reporting from the terminal to the host computer. FIG. 7 shows the equipment at the start of operation, and FIG. 8 shows the work at the end.

First, as shown in FIG. 7, step 22
Then, the terminal 2 transfers the equipment name and the lot number to the host computer 3 before starting work on the equipment. Next, in step 23, the host computer 3
Receiving it, the lot number of database A shown in FIG.
The latest history of the history 16 for each process is acquired from 15. Next, in steps 24 and 25, information on the next step is obtained from the step 17 of the database B shown in FIG. 5 and the latest history, and the work condition and usable equipment 18 are obtained. Next, the judgment operation 26 checks whether or not the transferred equipment name is usable equipment. If YES at this time, the host computer 3 transfers the work conditions to the equipment 1a to 1n or the terminal 2 in the next step 27. If NO, the error message "Cannot work with this equipment" is transferred in step 28. Next, in step 29, the database A
A record containing only the work start history (process name and work start time) is added as the latest record 16 of each process.

In this way, when the equipment is operated and the work of the product is finished, as shown in FIG.
The equipment name and lot number are transferred from the equipment or terminal 2 to the host computer 3. Next, in step 31, the latest history (process name, work start date and time) of the history 16 for each process in the database A and the in-process process name in the database B are acquired. Next, in step 32, it is checked whether or not the completion report of the reported lot may be received. If YES at this time, in step 33, a request for transmitting the end report data is issued to the facility or the terminal 2. If NO, the error message "This lot is not working" is transferred as an error message in step 34. Next, step 35.
Thus, the equipment or the terminal 2 which has received the transmission request for the end report data transfers the end report data (work end date / time, worker name, work condition, number of works, work equipment data) to the host computer. Next, at step 36, the host computer 3 embeds the end report data in the blank portion of the latest record of the history 16 for each process of the database A. Next, in step 37, the numerical value of the corresponding field of the database C is updated.

In this way, the data obtained by the host computer 3 is processed by the database C, and the result table shown in FIG. 3 is created. In addition, since this performance table is updated for each facility at each work end time, if this performance table is constantly monitored, the operating status of each facility can be ascertained and extremely smooth line operation can be performed. There are advantages.

[0021]

As described above, according to the present invention, each facility is provided with a terminal, and the number of works, work date and time and process name information are collected from the terminal by the host computer, and the process in each process of each facility is collected. The number of work processes is additionally updated by a three-dimensional relational database at any time, and the number of product works to be processed at each date and the target achievement level are graphically displayed on a single screen, so that the manufacturing management status can be grasped more quickly. There is an effect that a result display method in a semiconductor device can be obtained which can create a result table capable of taking appropriate measures.

[Brief description of drawings]

FIG. 1 is a diagram showing an arrangement of equipment groups for explaining an embodiment of a result display method in semiconductor device manufacturing according to the present invention.

FIG. 2 is a main flowchart for explaining a result display method in semiconductor device manufacturing according to the present invention.

3 is an example of a table displayed on the graph display terminal of FIG.

FIG. 4 is a diagram showing a structure of a database A in a host computer.

FIG. 5 is a diagram showing a structure of a database B in a host computer.

FIG. 6 is a diagram showing a structure of a database C in a host computer.

FIG. 7 is a flowchart for explaining a reporting procedure between a terminal and a host computer at the start of work.

FIG. 8 is a flowchart for explaining a reporting procedure between a terminal and a host computer at the end of work.

[Explanation of symbols]

 1a to 1n Equipment 2 Terminal 3 Host computer 4 Graph display terminal

Claims (1)

Claim: What is claimed is: 1. A method of displaying results in semiconductor device manufacturing, wherein a plurality of processes are processed by the same manufacturing equipment group, and each equipment is equipped with a terminal for transferring information to a host computer.
A step of exchanging information relating to the number of works, work date and time, and work process between the terminal and the host computer at the start and end of the work of each facility, and the host computer at any time using the three-dimensional relational database for the information data. To add and update data to
And a step of graphically drawing the added and updated numerical values on one screen of a display terminal, the method for displaying results in semiconductor device manufacturing.