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JP2011243455A - Conductive particle, anisotropic conductive material and connection structure - Google Patents

Conductive particle, anisotropic conductive material and connection structure Download PDF

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JP2011243455A
JP2011243455A JP2010115511A JP2010115511A JP2011243455A JP 2011243455 A JP2011243455 A JP 2011243455A JP 2010115511 A JP2010115511 A JP 2010115511A JP 2010115511 A JP2010115511 A JP 2010115511A JP 2011243455 A JP2011243455 A JP 2011243455A
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JP5940760B2 (en
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Hiroya Ishida
浩也 石田
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Sekisui Chemical Co Ltd
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Abstract

PROBLEM TO BE SOLVED: To provide conductive particles which can reduce connection resistance between electrodes when used for connection between electrodes, and to provide a connection structure using the conductive particles.SOLUTION: Conductive particles 1 have base material particles 2, and a nickel-boron conductive layer 3 provided on the surface 2a of the base material particles 2 and containing nickel and boron. The content of nickel occupies 97 wt% or more of the total 100 wt% content of the nickel-boron conductive layer 3. The connection structure according to the present invention comprises a first member to be connected, a second member to be connected, and a connection part for connecting the first and second members to be connected. The connection part is formed of the conductive particles 1, or an anisotropic conductive material containing the conductive particles 1.

Description

本発明は、基材粒子の表面に導電層が設けられている導電性粒子に関し、より詳細には、例えば、電極間の電気的な接続に用いることができる導電性粒子、並びに該導電性粒子を用いた異方性導電材料及び接続構造体に関する。   The present invention relates to conductive particles in which a conductive layer is provided on the surface of substrate particles, and more specifically, for example, conductive particles that can be used for electrical connection between electrodes, and the conductive particles The present invention relates to an anisotropic conductive material and a connection structure.

異方性導電ペースト、異方性導電インク、異方性導電粘接着剤、異方性導電フィルム及び異方性導電シート等の異方性導電材料が広く知られている。これらの異方性導電材料では、ペースト、インク又は樹脂中に導電性粒子が分散されている。   Anisotropic conductive materials such as anisotropic conductive pastes, anisotropic conductive inks, anisotropic conductive adhesives, anisotropic conductive films and anisotropic conductive sheets are widely known. In these anisotropic conductive materials, conductive particles are dispersed in paste, ink, or resin.

上記異方性導電材料は、ICチップとフレキシブルプリント回路基板との接続、及びICチップとITO電極を有する回路基板との接続等に用いられている。例えば、ICチップの電極と回路基板の電極との間に異方性導電材料を配置した後、加熱及び加圧することにより、これらの電極を電気的に接続できる。   The anisotropic conductive material is used for connection between an IC chip and a flexible printed circuit board, connection between an IC chip and a circuit board having an ITO electrode, and the like. For example, after disposing an anisotropic conductive material between the electrode of the IC chip and the electrode of the circuit board, these electrodes can be electrically connected by heating and pressing.

上記導電性粒子の一例として、下記の特許文献1には、平均粒径1〜20μmの球状の基材粒子の表面に、無電解めっき法によりニッケル導電層又はニッケル合金導電層が形成された導電性粒子が開示されている。この導電性粒子は、導電層の最表層に0.05〜4μmの微小な突起を有する。該導電層と該突起とは実質的に連続的に連なっている。   As an example of the conductive particles, the following Patent Document 1 discloses a conductive material in which a nickel conductive layer or a nickel alloy conductive layer is formed on the surface of spherical base particles having an average particle diameter of 1 to 20 μm by an electroless plating method. Sex particles are disclosed. The conductive particles have minute protrusions of 0.05 to 4 μm on the outermost layer of the conductive layer. The conductive layer and the protrusion are substantially continuously connected.

特開2000−243132号公報JP 2000-243132 A

特許文献1に記載の導電性粒子を用いて電極間を接続した場合には、電極間の接続抵抗が高くなることがある。   When the electrodes are connected using the conductive particles described in Patent Document 1, the connection resistance between the electrodes may increase.

さらに、特許文献1の実施例の導電性粒子では、ニッケルとリンとを含む導電層が形成されている。導電性粒子により接続される電極、及び導電性粒子の導電層の表面には、酸化被膜が形成されていることが多い。ニッケルとリンとを含む導電層を有する導電性粒子を用いて電極間を接続した場合には、ニッケルとリンとを含む導電層が比較的柔らかいので、電極及び導電性粒子の表面の酸化被膜を十分に排除できず、接続抵抗が高くなることがある。   Furthermore, in the electroconductive particle of the Example of patent document 1, the electroconductive layer containing nickel and phosphorus is formed. In many cases, an oxide film is formed on the surfaces of the electrodes connected by the conductive particles and the conductive layer of the conductive particles. When conductive particles having a conductive layer containing nickel and phosphorus are connected between the electrodes, the conductive layer containing nickel and phosphorus is relatively soft. It may not be sufficiently eliminated, and the connection resistance may increase.

また、接続抵抗を低くするために、特許文献1に記載のようなニッケルとリンとを含む導電層の厚みを厚くすると、導電性粒子により接続対象部材又は基板が傷つくことがある。   Moreover, when the thickness of the conductive layer containing nickel and phosphorus as described in Patent Document 1 is increased in order to reduce the connection resistance, the connection target member or the substrate may be damaged by the conductive particles.

本発明の目的は、電極間の接続に用いた場合に、電極間の接続抵抗を低くすることができる導電性粒子、並びに該導電性粒子を用いた異方性導電材料及び接続構造体を提供することである。   An object of the present invention is to provide conductive particles capable of reducing connection resistance between electrodes when used for connection between electrodes, and an anisotropic conductive material and a connection structure using the conductive particles. It is to be.

本発明の広い局面によれば、基材粒子と、該基材粒子の表面に設けられており、かつニッケルとボロンとを含むニッケル−ボロン導電層とを有し、該ニッケル−ボロン導電層の全体100重量%中、ニッケルの含有量が97重量%以上である、導電性粒子が提供される。   According to a wide aspect of the present invention, the nickel-boron conductive layer is provided on the surface of the substrate particle and has a nickel-boron conductive layer containing nickel and boron. Conductive particles having a nickel content of 97% by weight or more in 100% by weight in total are provided.

本発明に係る導電性粒子のある特定の局面では、上記ニッケル−ボロン導電層の外表面から厚み方向に内側に向かって1/2の厚みの領域において、上記ニッケル−ボロン導電層中のボロンの含有量の最大値と最小値との差は、2重量%以下である。   In a specific aspect of the conductive particles according to the present invention, in the region having a thickness of ½ from the outer surface of the nickel-boron conductive layer toward the inside in the thickness direction, the boron in the nickel-boron conductive layer The difference between the maximum value and the minimum value of the content is 2% by weight or less.

本発明に係る導電性粒子の他の特定の局面では、上記ニッケル−ボロン導電層の外表面から厚み方向に内側に向かって1/5の厚みの領域において、上記ニッケル−ボロン導電層中のボロンの含有量の最大値は3重量%以下である。   In another specific aspect of the conductive particles according to the present invention, boron in the nickel-boron conductive layer is formed in a region having a thickness of 1/5 from the outer surface of the nickel-boron conductive layer toward the inside in the thickness direction. The maximum value of the content of is 3% by weight or less.

本発明に係る導電性粒子のさらに他の特定の局面では、上記基材粒子の粒子径が、2〜5μmであり、かつ、上記ニッケル−ボロン導電層の厚みが、50〜300nmである。   In still another specific aspect of the conductive particle according to the present invention, the particle diameter of the base particle is 2 to 5 μm, and the thickness of the nickel-boron conductive layer is 50 to 300 nm.

本発明に係る導電性粒子の別の特定の局面では、導電性粒子は、ニッケル−ボロン導電層の外表面に突起を有する。   In another specific aspect of the conductive particle according to the present invention, the conductive particle has a protrusion on the outer surface of the nickel-boron conductive layer.

本発明に係る異方性導電材料は、本発明に従って構成された導電性粒子と、バインダー樹脂とを含む。   The anisotropic conductive material which concerns on this invention contains the electroconductive particle comprised according to this invention, and binder resin.

本発明に係る接続構造体は、第1の接続対象部材と、第2の接続対象部材と、該第1,第2の接続対象部材を接続している接続部とを備えており、上記接続部が、本発明に従って構成された導電性粒子、又は該導電性粒子とバインダー樹脂とを含む異方性導電材料により形成されている。   A connection structure according to the present invention includes a first connection target member, a second connection target member, and a connection portion connecting the first and second connection target members, and the connection described above. The portion is formed of conductive particles configured according to the present invention or an anisotropic conductive material including the conductive particles and a binder resin.

本発明に係る導電性粒子では、基材粒子の表面に、ニッケルとボロンとを含むニッケル−ボロン導電層が設けられており、かつニッケル−ボロン導電層の全体100重量%中、ニッケルの含有量が97重量%以上であるので、導電性粒子を電極間の接続に用いた場合に、接続抵抗を低くすることができる。   In the conductive particles according to the present invention, a nickel-boron conductive layer containing nickel and boron is provided on the surface of the base particle, and the nickel content in 100% by weight of the entire nickel-boron conductive layer Therefore, when the conductive particles are used for connection between the electrodes, the connection resistance can be lowered.

図1は、本発明の一実施形態に係る導電性粒子を示す断面図である。FIG. 1 is a cross-sectional view showing conductive particles according to an embodiment of the present invention. 図2は、本発明の他の実施形態に係る導電性粒子を示す断面図である。FIG. 2 is a cross-sectional view showing conductive particles according to another embodiment of the present invention. 図3は、本発明の一実施形態に係る導電性粒子を用いた接続構造体を模式的に示す正面断面図である。FIG. 3 is a front sectional view schematically showing a connection structure using conductive particles according to an embodiment of the present invention.

以下、本発明の詳細を説明する。   Details of the present invention will be described below.

本発明に係る導電性粒子は、基材粒子と、該基材粒子の表面に設けられており、かつニッケルとボロンとを含むニッケル−ボロン導電層とを有する。該ニッケル−ボロン導電層の全体100重量%中、ニッケルの含有量は97重量%以上である。   The conductive particles according to the present invention include base particles and a nickel-boron conductive layer provided on the surface of the base particles and containing nickel and boron. The content of nickel is 97% by weight or more in the whole 100% by weight of the nickel-boron conductive layer.

ニッケルを含む導電層を有する導電性粒子により電極間を接続した場合には、電極間の接続抵抗を低くすることができる。本発明に係る導電性粒子は、ニッケルの含有量が97重量%以上であるので、電極間の接続抵抗を低くすることができる。   When the electrodes are connected by conductive particles having a conductive layer containing nickel, the connection resistance between the electrodes can be lowered. Since the conductive particles according to the present invention have a nickel content of 97% by weight or more, the connection resistance between the electrodes can be lowered.

また、ボロンを含まないニッケル導電層を有する導電性粒子では、該ボロンを含まないニッケル導電層が柔らかすぎて、電極間の接続時に、電極及び導電性粒子の表面の酸化被膜を十分に排除できず、接続抵抗が高くなることがある。例えば、ニッケルとリンとを含む導電層を有する導電性粒子では、電極及び導電性粒子の表面の酸化被膜を十分に排除できず、接続抵抗が高くなりやすい。   In addition, in the conductive particles having a nickel conductive layer that does not contain boron, the nickel conductive layer that does not contain boron is too soft, and the oxide film on the surface of the electrode and conductive particles can be sufficiently eliminated when connecting the electrodes. However, the connection resistance may increase. For example, in conductive particles having a conductive layer containing nickel and phosphorus, the oxide film on the surfaces of the electrodes and the conductive particles cannot be sufficiently removed, and the connection resistance tends to be high.

一方で、接続抵抗を低くするために、ニッケルとリンとを含む導電層の厚みを厚くすると、導電性粒子により接続対象部材又は基板が傷つくことがある。   On the other hand, if the thickness of the conductive layer containing nickel and phosphorus is increased in order to reduce the connection resistance, the connection target member or the substrate may be damaged by the conductive particles.

これに対して、本発明では、導電性粒子がニッケル−ボロン導電層を有し、該ニッケル−ボロン導電層は適度な硬さを有するので、電極間の接続抵抗を低くすることができる。例えば、電極間の接続対象部材の際に、電極及び導電性粒子の表面の酸化被膜を十分に排除でき、接続抵抗を低くすることができる。   On the other hand, in the present invention, the conductive particles have a nickel-boron conductive layer, and the nickel-boron conductive layer has an appropriate hardness, so that the connection resistance between the electrodes can be lowered. For example, in the case of a member to be connected between electrodes, an oxide film on the surfaces of the electrodes and the conductive particles can be sufficiently eliminated, and the connection resistance can be lowered.

さらに、上記ニッケル−ボロン導電層は適度な硬さを有するので、導電性粒子により接続対象部材又は電極が傷つくのを抑制できる。   Furthermore, since the said nickel- boron conductive layer has moderate hardness, it can suppress that a connection object member or an electrode is damaged by electroconductive particle.

以下、図面を参照しつつ本発明の具体的な実施形態及び実施例を説明することにより、本発明を明らかにする。   Hereinafter, the present invention will be clarified by describing specific embodiments and examples of the present invention with reference to the drawings.

図1は、本発明の一実施形態に係る導電性粒子を示す断面図である。   FIG. 1 is a cross-sectional view showing conductive particles according to an embodiment of the present invention.

図1に示すように、導電性粒子1は、基材粒子2と、該基材粒子2の表面2aに設けられたニッケル−ボロン導電層3とを有する。ニッケル−ボロン導電層3は、ニッケル−ボロン合金層である。ニッケル−ボロン導電層3は、ニッケルとボロンとを含む。導電性粒子1は、基材粒子2の表面2aがニッケル−ボロン導電層3により被覆された被覆粒子である。   As shown in FIG. 1, the conductive particle 1 has a base particle 2 and a nickel-boron conductive layer 3 provided on the surface 2 a of the base particle 2. The nickel-boron conductive layer 3 is a nickel-boron alloy layer. The nickel-boron conductive layer 3 contains nickel and boron. The conductive particles 1 are coated particles in which the surface 2 a of the base particle 2 is coated with a nickel-boron conductive layer 3.

導電性粒子1は、基材粒子2の表面2aに複数の芯物質4を有する。ニッケル−ボロン導電層3は、芯物質4を被覆している。芯物質4をニッケル−ボロン導電層3が被覆していることにより、導電性粒子1は表面1aに複数の突起5を有する。導電性粒子1は、ニッケル−ボロン導電層3の外表面3aに複数の突起5を有する。芯物質4によりニッケル−ボロン導電層3の外表面3aが隆起されており、突起5が形成されている。   The conductive particle 1 has a plurality of core substances 4 on the surface 2 a of the base particle 2. The nickel-boron conductive layer 3 covers the core material 4. By covering the core substance 4 with the nickel-boron conductive layer 3, the conductive particles 1 have a plurality of protrusions 5 on the surface 1a. The conductive particle 1 has a plurality of protrusions 5 on the outer surface 3 a of the nickel-boron conductive layer 3. An outer surface 3 a of the nickel-boron conductive layer 3 is raised by the core material 4, and a protrusion 5 is formed.

導電性粒子1は、ニッケル−ボロン導電層3の外表面3aに付着された絶縁性樹脂6を有する。ニッケル−ボロン導電層3の外表面3aの少なくとも一部の領域が、絶縁性樹脂6により被覆されている。本実施形態では、絶縁性樹脂6は絶縁樹脂粒子である。このように、導電性粒子は、ニッケル−ボロン導電層3の外表面3aに付着された絶縁性樹脂6を有していてもよい。ただし、本発明に係る導電性粒子は、絶縁性樹脂6を必ずしも有していなくてもよい。   The conductive particles 1 have an insulating resin 6 attached to the outer surface 3 a of the nickel-boron conductive layer 3. At least a part of the outer surface 3 a of the nickel-boron conductive layer 3 is covered with the insulating resin 6. In the present embodiment, the insulating resin 6 is insulating resin particles. Thus, the conductive particles may have the insulating resin 6 attached to the outer surface 3 a of the nickel-boron conductive layer 3. However, the conductive particles according to the present invention do not necessarily have the insulating resin 6.

図2は、本発明の他の実施形態に係る導電性粒子を示す断面図である。   FIG. 2 is a cross-sectional view showing conductive particles according to another embodiment of the present invention.

図2に示す導電性粒子11は、基材粒子2と、該基材粒子2の表面2aに設けられたニッケル−ボロン導電層12とを有する。導電性粒子11は、芯物質4を有さない。導電性粒子11は表面11aに突起を有さない。導電性粒子11は、ニッケル−ボロン導電層12の外表面12aに突起を有さない。このように、本発明に係る導電性粒子は突起を有していなくてもよく、球状であってもよい。また、導電性粒子11は、絶縁性樹脂を有さない。   The conductive particles 11 shown in FIG. 2 have base material particles 2 and a nickel-boron conductive layer 12 provided on the surface 2 a of the base material particles 2. The conductive particles 11 do not have the core material 4. The conductive particles 11 do not have protrusions on the surface 11a. The conductive particles 11 do not have protrusions on the outer surface 12 a of the nickel-boron conductive layer 12. Thus, the electroconductive particle which concerns on this invention does not need to have a processus | protrusion, and may be spherical. Further, the conductive particles 11 do not have an insulating resin.

基材粒子2としては、樹脂粒子、無機粒子、有機無機ハイブリッド粒子及び金属粒子等が挙げられる。   Examples of the base particle 2 include resin particles, inorganic particles, organic-inorganic hybrid particles, and metal particles.

基材粒子2は、樹脂により形成された樹脂粒子であることが好ましい。導電性粒子1,11を用いて電極間を接続する際には、導電性粒子1,11を電極間に配置した後、一般的に導電性粒子1,11を圧縮させる。基材粒子2が樹脂粒子であると、圧縮により導電性粒子1,11が変形しやすく、導電性粒子1,11と電極との接触面積を大きくすることができる。このため、電極間の導通信頼性を高めることができる。   The substrate particles 2 are preferably resin particles formed of a resin. When connecting the electrodes using the conductive particles 1 and 11, the conductive particles 1 and 11 are generally compressed after the conductive particles 1 and 11 are arranged between the electrodes. When the base particle 2 is a resin particle, the conductive particles 1 and 11 are easily deformed by compression, and the contact area between the conductive particles 1 and 11 and the electrode can be increased. For this reason, the conduction | electrical_connection reliability between electrodes can be improved.

上記樹脂粒子を形成するための樹脂としては、例えば、ポリオレフィン樹脂、アクリル樹脂、フェノール樹脂、メラミン樹脂、ベンゾグアナミン樹脂、尿素樹脂、エポキシ樹脂、不飽和ポリエステル樹脂、飽和ポリエステル樹脂、ポリエチレンテレフタレート、ポリスルホン、ポリフェニレンオキサイド、ポリアセタール、ポリイミド、ポリアミドイミド、ポリエーテルエーテルケトン及びポリエーテルスルホン等が挙げられる。圧縮により導電性粒子を適度に変形させることができるので、上記樹脂粒子は、エチレン性不飽和基を有する重合性単量体を1種又は2種以上重合させた重合体により形成されていることが好ましい。   Examples of the resin for forming the resin particles include polyolefin resin, acrylic resin, phenol resin, melamine resin, benzoguanamine resin, urea resin, epoxy resin, unsaturated polyester resin, saturated polyester resin, polyethylene terephthalate, polysulfone, and polyphenylene. Examples thereof include oxides, polyacetals, polyimides, polyamideimides, polyetheretherketones, and polyethersulfones. Since the conductive particles can be appropriately deformed by compression, the resin particles are formed of a polymer obtained by polymerizing one or more polymerizable monomers having an ethylenically unsaturated group. Is preferred.

上記無機粒子を形成するための無機物としては、シリカ及びカーボンブラック等が挙げられる。上記有機無機ハイブリッド粒子としては、例えば、架橋したアルコキシシリルポリマーとアクリル樹脂とにより形成された有機無機ハイブリッド粒子等が挙げられる。   Examples of the inorganic substance for forming the inorganic particles include silica and carbon black. Examples of the organic / inorganic hybrid particles include organic / inorganic hybrid particles formed of a crosslinked alkoxysilyl polymer and an acrylic resin.

基材粒子2が金属粒子である場合に、該金属粒子を形成するための金属としては、銀、銅、ニッケル、ケイ素、金及びチタン等が挙げられる。   When the base particle 2 is a metal particle, examples of the metal for forming the metal particle include silver, copper, nickel, silicon, gold, and titanium.

基材粒子2の粒子径は、1〜100μmの範囲内であることが好ましい。基材粒子の粒子径のより好ましい下限は2μm、より好ましい上限は50μm、更に好ましい上限は30μm、特に好ましい上限は5μmである。基材粒子2の粒子径が上記下限を満たすと、電極間の導通信頼性をより一層高めることができる。基材粒子2の粒子径が上記上限を満たすと、電極間の間隔を小さくすることができる。基材粒子の粒子径は、基材粒子が真球状である場合には、直径を示し、基材粒子が真球状ではない場合には、最大径を示す。   The particle diameter of the base particle 2 is preferably in the range of 1 to 100 μm. The more preferable lower limit of the particle diameter of the substrate particles is 2 μm, the more preferable upper limit is 50 μm, the still more preferable upper limit is 30 μm, and the particularly preferable upper limit is 5 μm. When the particle diameter of the base particle 2 satisfies the above lower limit, the conduction reliability between the electrodes can be further enhanced. When the particle diameter of the base particle 2 satisfies the above upper limit, the distance between the electrodes can be reduced. The particle diameter of the base particle indicates the diameter when the base particle is a true sphere, and indicates the maximum diameter when the base particle is not a true sphere.

基材粒子2の粒子径は、2〜5μmの範囲内であることが好ましい。基材粒子2の粒子径が2〜5μmの範囲内であると、電極間の間隔を小さくすることができ、かつニッケル−ボロン導電層の厚みを厚くしても、小さい導電性粒子を得ることができる。   The particle diameter of the substrate particles 2 is preferably in the range of 2 to 5 μm. When the particle diameter of the base particle 2 is in the range of 2 to 5 μm, the distance between the electrodes can be reduced, and even if the thickness of the nickel-boron conductive layer is increased, small conductive particles can be obtained. Can do.

本実施形態の主な特徴は、ニッケル−ボロン導電層3,12の全体100重量%中、ニッケルの含有量が97重量%以上であることである。ニッケルの含有量が97重量%以上であると、導電性粒子1,11を電極間の接続に用いた場合に、電極間の接続抵抗を低くすることができる。電極間の接続抵抗をより一層低くする観点からは、ニッケル−ボロン導電層3,12の全体100重量%中、ニッケルの含有量は97.5重量%以上であることが好ましく、98重量%以上であることがより好ましい。上記ニッケルの含有量は、ニッケル−ボロン導電層3,12の全体100重量%に占めるニッケルの全体の含有量を示す。   The main feature of this embodiment is that the nickel content is 97% by weight or more in 100% by weight of the entire nickel-boron conductive layers 3 and 12. When the nickel content is 97% by weight or more, the connection resistance between the electrodes can be lowered when the conductive particles 1 and 11 are used for the connection between the electrodes. From the viewpoint of further reducing the connection resistance between the electrodes, the nickel content is preferably 97.5% by weight or more in the total of 100% by weight of the nickel-boron conductive layers 3 and 12, and 98% by weight or more. It is more preferable that The content of nickel indicates the total content of nickel in 100% by weight of the entire nickel-boron conductive layers 3 and 12.

ニッケル−ボロン導電層3,12の全体100重量%中、ボロンの含有量は3重量%以下である。ボロンの含有量が3重量%以下であると、ニッケルの含有量が相対的に多くなるので、導電性粒子1,11を電極間の接続に用いた場合に、電極間の接続抵抗を低くすることができる。電極間の接続抵抗をより一層低くする観点からは、ニッケル−ボロン導電層3,12の全体100重量%中、ボロンの含有量は2.5重量%以下であることが好ましく、2重量%以下であることがより好ましい。上記ボロンの含有量は、ニッケル−ボロン導電層3,12の全体100重量%に占めるボロンの全体の含有量を示す。   The content of boron is 3% by weight or less in the total 100% by weight of the nickel-boron conductive layers 3 and 12. When the boron content is 3% by weight or less, the nickel content is relatively increased, so that when the conductive particles 1 and 11 are used for connection between the electrodes, the connection resistance between the electrodes is lowered. be able to. From the viewpoint of further reducing the connection resistance between the electrodes, the content of boron is preferably 2.5% by weight or less in the total of 100% by weight of the nickel-boron conductive layers 3 and 12, and 2% by weight or less. It is more preferable that The boron content represents the total content of boron in 100% by weight of the entire nickel-boron conductive layers 3 and 12.

なお、ニッケル−ボロン導電層3,12は、ニッケル及びボロン以外の原子を含んでいてもよい。ニッケル−ボロン導電層3,12は、ニッケル以外の他の金属を含んでいてもよい。   The nickel-boron conductive layers 3 and 12 may contain atoms other than nickel and boron. The nickel-boron conductive layers 3 and 12 may contain a metal other than nickel.

上記他の金属として、例えば、金、銀、パラジウム、銅、白金、亜鉛、鉄、鉛、錫、アルミニウム、コバルト、インジウム、クロム、チタン、アンチモン、ゲルマニウム、カドミウム、パラジウム、ビスマス、タリウム、錫−鉛合金、錫−銅合金、錫−銀合金及び錫−鉛−銀合金等が挙げられる。   Examples of the other metal include gold, silver, palladium, copper, platinum, zinc, iron, lead, tin, aluminum, cobalt, indium, chromium, titanium, antimony, germanium, cadmium, palladium, bismuth, thallium, tin- Examples include lead alloys, tin-copper alloys, tin-silver alloys, and tin-lead-silver alloys.

ニッケル−ボロン導電層3,12の外表面3a,12aから厚み方向に内側に向かって1/2の厚みの領域において、ニッケル−ボロン導電層3,12中のボロンの含有量の最大値と最小値との差(以下、差Dと記載することがある)は、2重量%以下であることが好ましい。すなわち、ニッケル−ボロン導電層3,12の厚みをTとしたときに、ニッケル−ボロン導電層3,12の外表面3a,12aから厚み方向に内側に向かって0〜0.5Tの領域において、ニッケル−ボロン導電層3,12中のボロンの含有量の最大値と最小値との差Dは、2重量%以下であることが好ましい。差Dは、1.5重量%以下であることがより好ましく、1重量%以下であることが更に好ましい。   Maximum and minimum contents of boron in the nickel-boron conductive layers 3 and 12 in a region having a thickness of ½ inward in the thickness direction from the outer surfaces 3a and 12a of the nickel-boron conductive layers 3 and 12 The difference from the value (hereinafter sometimes referred to as difference D) is preferably 2% by weight or less. That is, when the thickness of the nickel-boron conductive layers 3 and 12 is T, in the region of 0 to 0.5T inward in the thickness direction from the outer surfaces 3a and 12a of the nickel-boron conductive layers 3 and 12, The difference D between the maximum value and the minimum value of the boron content in the nickel-boron conductive layers 3 and 12 is preferably 2% by weight or less. The difference D is more preferably 1.5% by weight or less, still more preferably 1% by weight or less.

ニッケル−ボロン導電層3,12の外表面3a,12aから厚み方向に内側に向かって1/5の厚みの領域において、ニッケル−ボロン導電層3,12中のボロンの含有量の最大値(以下、最大値Mと記載することがある)は3重量%以下であることが好ましい。すなわち、ニッケル−ボロン導電層3,12の厚みをTとしたときに、ニッケル−ボロン導電層3,12の外表面3a,12aから厚み方向に内側に向かって0〜0.2Tの領域において、ニッケル−ボロン導電層3,12中のボロンの含有量の最大値Mは、3重量%以下であることが好ましい。最大値Mは、2.5重量%以下であることがより好ましく、2重量%以下であることが更に好ましい。   The maximum value of the boron content in the nickel-boron conductive layers 3 and 12 (hereinafter referred to as “thickness”) in the region whose thickness is 1/5 from the outer surfaces 3a and 12a of the nickel-boron conductive layers 3 and 12 inward in the thickness direction The maximum value M may be 3% by weight or less. That is, when the thickness of the nickel-boron conductive layers 3 and 12 is T, in the region of 0 to 0.2T inward in the thickness direction from the outer surfaces 3a and 12a of the nickel-boron conductive layers 3 and 12, The maximum value M of the boron content in the nickel-boron conductive layers 3 and 12 is preferably 3% by weight or less. The maximum value M is more preferably 2.5% by weight or less, and further preferably 2% by weight or less.

ニッケルーボロン導電層3,12におけるニッケルの含有量及びボロンの含有量の測定方法は、既知の種々の分析法を用いることができ特に限定されない。この測定方法として、原子吸光分析法又は原子スペクトル分析法等が挙げられる。上記原子吸光分析法では、フレーム原子吸光光度計及び電気加熱炉原子吸光光度計等を用いることができる。上記原子スペクトル分析法としては、プラズマ発光分析法及びプラズマイオン源質量分析法等が挙げられる。   The method for measuring the nickel content and the boron content in the nickel-boron conductive layers 3 and 12 is not particularly limited, and various known analytical methods can be used. Examples of the measuring method include atomic absorption analysis or atomic spectrum analysis. In the atomic absorption analysis method, a flame atomic absorption photometer, an electric heating furnace atomic absorption photometer, or the like can be used. Examples of the atomic spectrum analysis method include a plasma emission analysis method and a plasma ion source mass spectrometry method.

ニッケル−ボロン導電層3,12の全体100重量%中のニッケルの含有量及びボロンの含有量を測定する際には、ICP発光分析装置を用いることが好ましい。ICP発光分析装置の市販品としては、HORIBA社製のICP発光分析装置等が挙げられる。   When measuring the nickel content and boron content in 100% by weight of the entire nickel-boron conductive layers 3 and 12, it is preferable to use an ICP emission spectrometer. Examples of commercially available ICP emission analyzers include ICP emission analyzers manufactured by HORIBA.

ニッケル−ボロン導電層3,12の厚み方向におけるボロンの含有量の分布を測定する際には、FE−TEM装置を用いることが好ましい。FE−TEM装置の市販品としては、日本電子社製のJEM−2010等が挙げられる。   When measuring the boron content distribution in the thickness direction of the nickel-boron conductive layers 3 and 12, it is preferable to use an FE-TEM apparatus. Examples of commercially available FE-TEM devices include JEM-2010 manufactured by JEOL Ltd.

基材粒子2の表面2aにニッケル−ボロン導電層3,12を形成する方法は特に限定されない。ニッケル−ボロン導電層3,12を形成する方法としては、例えば、無電解めっきによる方法、電気めっきによる方法、物理的蒸着による方法、並びに金属粉末もしくは金属粉末とバインダーとを含むペーストを基材粒子2の表面2aにコーティングする方法等が挙げられる。なかでも、ニッケル−ボロン導電層3の形成が簡便であるので、無電解めっきによる方法が好ましい。上記物理的蒸着による方法としては、真空蒸着、イオンプレーティング及びイオンスパッタリング等の方法が挙げられる。   The method for forming the nickel-boron conductive layers 3 and 12 on the surface 2a of the base particle 2 is not particularly limited. Examples of the method for forming the nickel-boron conductive layers 3 and 12 include, for example, a method using electroless plating, a method using electroplating, a method using physical vapor deposition, and a paste containing metal powder or a metal powder and a binder. And the like. Especially, since formation of the nickel-boron conductive layer 3 is simple, the method by electroless plating is preferable. Examples of the method by physical vapor deposition include methods such as vacuum vapor deposition, ion plating, and ion sputtering.

ニッケル−ボロン導電層3,12におけるニッケルの含有量を上記範囲内にする方法としては、例えば、無電解ニッケルめっきによりニッケル−ボロン導電層3,12を形成する際に、ニッケルめっき液のpHを制御する方法、無電解ニッケルめっきによりニッケル−ボロン導電層を形成する際に、ボロン含有還元剤の濃度を調整する方法、並びにニッケル塩濃度を調整する方法等が挙げられる。   As a method of bringing the nickel content in the nickel-boron conductive layers 3 and 12 within the above range, for example, when the nickel-boron conductive layers 3 and 12 are formed by electroless nickel plating, the pH of the nickel plating solution is adjusted. Examples thereof include a method of controlling, a method of adjusting the concentration of the boron-containing reducing agent, and a method of adjusting the nickel salt concentration when the nickel-boron conductive layer is formed by electroless nickel plating.

無電解めっきにより形成する方法では、一般的に、触媒化工程と、無電解めっき工程とが行われる。以下、無電解めっきにより、樹脂粒子の表面に、ニッケルとボロンとを含む合金めっき層を形成する方法の一例を説明する。   In the method of forming by electroless plating, generally, a catalyzing step and an electroless plating step are performed. Hereinafter, an example of a method for forming an alloy plating layer containing nickel and boron on the surface of resin particles by electroless plating will be described.

上記触媒化工程では、無電解めっきによりめっき層を形成するための起点となる触媒を、樹脂粒子の表面に形成させる。   In the catalyzing step, a catalyst serving as a starting point for forming a plating layer by electroless plating is formed on the surface of the resin particles.

上記触媒を樹脂粒子の表面に形成させる方法としては、例えば、塩化パラジウムと塩化スズとを含む溶液に、樹脂粒子を添加した後、酸溶液又はアルカリ溶液により樹脂粒子の表面を活性化させて、樹脂粒子の表面にパラジウムを析出させる方法、並びに硫酸パラジウムとアミノピリジンとを含有する溶液に、樹脂粒子を添加した後、還元剤を含む溶液により樹脂粒子の表面を活性化させて、樹脂粒子の表面にパラジウムを析出させる方法等が挙げられる。上記還元剤として、ボロン含有還元剤が好適に用いられる。ただし、上記還元剤として、次亜リン酸ナトリウム等のリン含有還元剤を用いてもよい。   As a method of forming the catalyst on the surface of the resin particles, for example, after adding the resin particles to a solution containing palladium chloride and tin chloride, the surface of the resin particles is activated with an acid solution or an alkali solution, A method of depositing palladium on the surface of the resin particles, and after adding the resin particles to a solution containing palladium sulfate and aminopyridine, the surface of the resin particles is activated by a solution containing a reducing agent. Examples thereof include a method of depositing palladium on the surface. As the reducing agent, a boron-containing reducing agent is preferably used. However, a phosphorus-containing reducing agent such as sodium hypophosphite may be used as the reducing agent.

上記無電解めっき工程では、ニッケル塩及び上記ボロン含有還元剤を含むニッケルめっき浴が用いられる。ニッケルめっき浴中に樹脂粒子を浸漬することにより、触媒が表面に形成された樹脂粒子の表面に、ニッケルを析出させることができ、ニッケルとボロンとを含む導電層を形成できる。   In the electroless plating step, a nickel plating bath containing a nickel salt and the boron-containing reducing agent is used. By immersing the resin particles in the nickel plating bath, nickel can be deposited on the surface of the resin particles on which the catalyst is formed, and a conductive layer containing nickel and boron can be formed.

上記ボロン含有還元剤としては、ジメチルアミンボラン、水素化ホウ素ナトリウム及び水素化ホウ素カリウム等が挙げられる。   Examples of the boron-containing reducing agent include dimethylamine borane, sodium borohydride, and potassium borohydride.

導電性粒子1のように、本発明に係る導電性粒子は表面に突起を有することが好ましい。導電性粒子は、ニッケル−ボロン導電層の表面に突起を有することが好ましい。導電性粒子は表面に複数の突起を有することが好ましい。導電性粒子は、ニッケル−ボロン導電層の表面に複数の突起を有することが好ましい。導電性粒子により接続される電極の表面には、酸化被膜が形成されていることが多い。さらに、導電性粒子の導電層の表面には、酸化被膜が形成されていることが多い。突起を有する導電性粒子の使用により、電極間に導電性粒子を配置した後、圧着させることにより、突起により酸化被膜が効果的に排除される。このため、電極と導電性粒子とをより一層確実に接触させることができ、電極間の接続抵抗を低くすることができる。さらに、導電性粒子が表面に絶縁性樹脂を有する場合、又は導電性粒子が樹脂中に分散されて異方性導電材料として用いられる場合に、導電性粒子の突起によって、導電性粒子と電極との間の樹脂を効果的に排除できる。このため、電極間の導通信頼性を高めることができる。   Like the electroconductive particle 1, it is preferable that the electroconductive particle which concerns on this invention has a processus | protrusion on the surface. The conductive particles preferably have protrusions on the surface of the nickel-boron conductive layer. The conductive particles preferably have a plurality of protrusions on the surface. The conductive particles preferably have a plurality of protrusions on the surface of the nickel-boron conductive layer. An oxide film is often formed on the surface of the electrode connected by the conductive particles. Furthermore, an oxide film is often formed on the surface of the conductive layer of the conductive particles. By using the conductive particles having protrusions, the oxide film is effectively eliminated by the protrusions by placing the conductive particles between the electrodes and then pressing them. For this reason, an electrode and electroconductive particle can be contacted still more reliably and the connection resistance between electrodes can be made low. Further, when the conductive particles have an insulating resin on the surface, or when the conductive particles are dispersed in the resin and used as an anisotropic conductive material, the conductive particles and the electrodes are The resin between can be effectively eliminated. For this reason, the conduction | electrical_connection reliability between electrodes can be improved.

導電性粒子の表面に突起を形成する方法としては、基材粒子の表面に芯物質を付着させた後、無電解めっきによりニッケル−ボロン導電層を形成する方法、並びに基材粒子の表面に無電解めっきによりニッケル−ボロン導電層を形成した後、芯物質を付着させ、更に無電解めっきによりニッケル−ボロン導電層を形成する方法等が挙げられる。   As a method of forming protrusions on the surface of the conductive particles, a method of forming a nickel-boron conductive layer by electroless plating after attaching a core substance to the surface of the substrate particles, Examples of the method include forming a nickel-boron conductive layer by electrolytic plating, attaching a core substance, and further forming a nickel-boron conductive layer by electroless plating.

ニッケル−ボロン導電層3,12の厚みは、5〜1000nmの範囲内にあることが好ましい。ニッケル−ボロン導電層3,12の厚みのより好ましい下限は10nm、更に好ましい下限は50nm、より好ましい上限は500nm、更に好ましい上限は300nmである。ニッケル−ボロン導電層3,12の厚みが上記下限を満たすと、導電性粒子1,11の導電性を十分に高めることができる。ニッケル−ボロン導電層3,12の厚みが上記上限を満たすと、基材粒子2とニッケル−ボロン導電層3,12との熱膨張率の差が小さくなり、基材粒子2からニッケル−ボロン導電層3,12が剥離し難くなる。   The thicknesses of the nickel-boron conductive layers 3 and 12 are preferably in the range of 5 to 1000 nm. The more preferable lower limit of the thickness of the nickel-boron conductive layers 3 and 12 is 10 nm, the still more preferable lower limit is 50 nm, the more preferable upper limit is 500 nm, and the still more preferable upper limit is 300 nm. When the thickness of the nickel-boron conductive layers 3 and 12 satisfies the above lower limit, the conductivity of the conductive particles 1 and 11 can be sufficiently increased. When the thicknesses of the nickel-boron conductive layers 3 and 12 satisfy the above upper limit, the difference in thermal expansion coefficient between the base particle 2 and the nickel-boron conductive layers 3 and 12 becomes small, and the nickel-boron conductivity is reduced from the base particle 2. Layers 3 and 12 are difficult to peel off.

ニッケル−ボロン導電層3,12の厚みは、50〜300nmであることが特に好ましい。さらに、基材粒子の粒子径が2〜5μmであり、かつ、上記ニッケル−ボロン導電層の厚みが、50〜300nmであることが特に好ましい。この場合には、導電性粒子を大きな電流が流れる用途により好適に用いることができる。さらに、導電性粒子を圧縮して電極間を接続した場合に、電極が損傷するのをより一層抑制できる。   The thickness of the nickel-boron conductive layers 3 and 12 is particularly preferably 50 to 300 nm. Furthermore, it is particularly preferable that the particle diameter of the base particles is 2 to 5 μm, and the thickness of the nickel-boron conductive layer is 50 to 300 nm. In this case, the conductive particles can be suitably used for applications in which a large current flows. Furthermore, when the conductive particles are compressed to connect the electrodes, it is possible to further suppress the electrodes from being damaged.

基材粒子の表面に芯物質を付着させる方法としては、例えば、基材粒子の分散液中に、芯物質となる導電性物質を添加し、基材粒子の表面に芯物質を、例えば、ファンデルワールス力により集積させ、付着させる方法、並びに基材粒子を入れた容器に、芯物質となる導電性物質を添加し、容器の回転等による機械的な作用により基材粒子の表面に芯物質を付着させる方法等が挙げられる。なかでも、付着させる芯物質の量を制御しやすいため、分散液中の基材粒子の表面に芯物質を集積させ付着させる方法が好ましい。   As a method of attaching the core substance to the surface of the base particle, for example, a conductive substance that becomes the core substance is added to the dispersion of the base particle, and the core substance is applied to the surface of the base particle, for example, a fan. A method of accumulating and adhering by Delwars force, and adding a conductive substance as a core substance to a container containing base particles, and a core substance on the surface of the base particles by mechanical action such as rotation of the container And the like. Among them, a method of accumulating and adhering the core substance on the surface of the base particle in the dispersion is preferable because the amount of the core substance to be attached is easy to control.

芯物質4を構成する導電性物質としては、例えば、金属、金属の酸化物、黒鉛等の導電性非金属及び導電性ポリマー等が挙げられる。導電性ポリマーとしては、ポリアセチレン等が挙げられる。なかでも、導電性を高めることができるので、金属が好ましい。   Examples of the conductive substance constituting the core substance 4 include conductive nonmetals such as metals, metal oxides, and graphite, and conductive polymers. Examples of the conductive polymer include polyacetylene. Among them, metal is preferable because conductivity can be increased.

上記金属としては、例えば、金、銀、銅、白金、亜鉛、鉄、鉛、錫、アルミニウム、コバルト、インジウム、ニッケル、クロム、チタン、アンチモン、ビスマス、ゲルマニウム及びカドミウム等の金属、並びに錫−鉛合金、錫−銅合金、錫−銀合金及び錫−鉛−銀合金等の2種類以上の金属で構成される合金等が挙げられる。なかでも、ニッケル、銅、銀又は金等が好ましい。上記芯物質を構成する金属は、上記ニッケル−ボロン導電層を構成する金属と同じであってもよく、異なっていてもよい。なかでも、上記芯物質を構成する金属は、ニッケル−ボロン導電層のエピキャシタル成長を促進させるのに最適なニッケルであることがより好ましい。   Examples of the metal include gold, silver, copper, platinum, zinc, iron, lead, tin, aluminum, cobalt, indium, nickel, chromium, titanium, antimony, bismuth, germanium and cadmium, and tin-lead. Examples include alloys composed of two or more metals such as alloys, tin-copper alloys, tin-silver alloys, and tin-lead-silver alloys. Of these, nickel, copper, silver or gold is preferable. The metal constituting the core material may be the same as or different from the metal constituting the nickel-boron conductive layer. Especially, it is more preferable that the metal which comprises the said core substance is the optimal nickel for promoting the epitaxial growth of a nickel- boron conductive layer.

上記芯物質の形状は特に限定されない。芯物質の形状は塊状であることが好ましい。芯物質としては、例えば、粒子状の塊、複数の微小粒子が凝集した凝集塊、及び不定形の塊等が挙げられる。   The shape of the core material is not particularly limited. The shape of the core substance is preferably a lump. Examples of the core substance include a particulate lump, an agglomerate in which a plurality of fine particles are aggregated, and an irregular lump.

導電性粒子1のように、本発明に係る導電性粒子は、上記ニッケル−ボロン導電層の表面に付着された絶縁性樹脂を有することが好ましい。この場合には、導電性粒子を電極間の接続に用いると、隣接する電極間の短絡を防止できる。具体的には、複数の導電性粒子が接触したときに、複数の電極間に絶縁性樹脂が存在するので、上下の電極間ではなく横方向に隣り合う電極間の短絡を防止することができる。なお、電極間の接続の際に、2つの電極で導電性粒子を加圧することにより、上記ニッケル−ボロン導電層と電極との間の絶縁性樹脂を容易に排除できる。導電性粒子が上記ニッケル−ボロン導電層の表面に突起を有する場合には、上記ニッケル−ボロン導電層と電極との間の絶縁性樹脂をより一層容易に排除できる。   Like the electroconductive particle 1, it is preferable that the electroconductive particle which concerns on this invention has the insulating resin adhering to the surface of the said nickel- boron conductive layer. In this case, when the conductive particles are used for connection between the electrodes, a short circuit between adjacent electrodes can be prevented. Specifically, when a plurality of conductive particles are in contact with each other, an insulating resin is present between the plurality of electrodes, so that it is possible to prevent a short circuit between electrodes adjacent in the lateral direction instead of between the upper and lower electrodes. . In addition, the insulating resin between the said nickel- boron conductive layer and an electrode can be easily excluded by pressurizing electroconductive particle with two electrodes in the case of the connection between electrodes. In the case where the conductive particles have protrusions on the surface of the nickel-boron conductive layer, the insulating resin between the nickel-boron conductive layer and the electrode can be more easily removed.

上記絶縁性樹脂の具体例としては、ポリオレフィン類、(メタ)アクリレート重合体、(メタ)アクリレート共重合体、ブロックポリマー、熱可塑性樹脂、熱可塑性樹脂の架橋物、熱硬化性樹脂及び水溶性樹脂等が挙げられる。   Specific examples of the insulating resin include polyolefins, (meth) acrylate polymers, (meth) acrylate copolymers, block polymers, thermoplastic resins, crosslinked thermoplastic resins, thermosetting resins, and water-soluble resins. Etc.

上記ポリオレフィン類としては、ポリエチレン、エチレン−酢酸ビニル共重合体及びエチレン−アクリル酸エステル共重合体等が挙げられる。上記(メタ)アクリレート重合体としては、ポリメチル(メタ)アクリレート、ポリエチル(メタ)アクリレート及びポリブチル(メタ)アクリレート等が挙げられる。上記ブロックポリマーとしては、ポリスチレン、スチレン−アクリル酸エステル共重合体、SB型スチレン−ブタジエンブロック共重合体、及びSBS型スチレン−ブタジエンブロック共重合体、並びにこれらの水添化合物等が挙げられる。上記熱可塑性樹脂としては、ビニル重合体及びビニル共重合体等が挙げられる。上記熱硬化性樹脂としては、エポキシ樹脂、フェノール樹脂及びメラミン樹脂等が挙げられる。上記水溶性樹脂としては、ポリビニルアルコール、ポリアクリル酸、ポリアクリルアミド、ポリビニルピロリドン、ポリエチレンオキシド及びメチルセルロース等が挙げられる。なかでも、水溶性樹脂が好ましく、ポリビニルアルコールがより好ましい。   Examples of the polyolefins include polyethylene, ethylene-vinyl acetate copolymer, and ethylene-acrylic acid ester copolymer. Examples of the (meth) acrylate polymer include polymethyl (meth) acrylate, polyethyl (meth) acrylate, and polybutyl (meth) acrylate. Examples of the block polymer include polystyrene, styrene-acrylic acid ester copolymer, SB type styrene-butadiene block copolymer, SBS type styrene-butadiene block copolymer, and hydrogenated compounds thereof. Examples of the thermoplastic resin include vinyl polymers and vinyl copolymers. As said thermosetting resin, an epoxy resin, a phenol resin, a melamine resin, etc. are mentioned. Examples of the water-soluble resin include polyvinyl alcohol, polyacrylic acid, polyacrylamide, polyvinyl pyrrolidone, polyethylene oxide, and methyl cellulose. Of these, water-soluble resins are preferable, and polyvinyl alcohol is more preferable.

上記ニッケル−ボロン導電層の表面に絶縁性樹脂を付着させる方法としては、化学的方法、及び物理的もしくは機械的方法等が挙げられる。上記化学的方法としては、例えば、界面重合法、粒子存在下での懸濁重合法及び乳化重合法等が挙げられる。上記物理的もしくは機械的方法としては、スプレードライ、ハイブリタイゼーション、静電付着法、噴霧法、ディッピング及び真空蒸着による方法等が挙げられる。なかでも、絶縁樹脂粒子が剥離しにくいことから、上記ニッケル−ボロン導電層の表面に、化学結合を介して絶縁樹脂粒子を付着させる方法が好ましい。   Examples of a method for attaching an insulating resin to the surface of the nickel-boron conductive layer include a chemical method and a physical or mechanical method. Examples of the chemical method include an interfacial polymerization method, a suspension polymerization method in the presence of particles, and an emulsion polymerization method. Examples of the physical or mechanical method include spray drying, hybridization, electrostatic adhesion, spraying, dipping, and vacuum deposition. In particular, since the insulating resin particles are difficult to peel off, a method of attaching the insulating resin particles to the surface of the nickel-boron conductive layer through a chemical bond is preferable.

上記絶縁性樹脂は、絶縁樹脂粒子であることが好ましい。この場合には、導電性粒子を電極間の接続に用いると、横方向に隣接する電極間の短絡を防止できるだけでなく、接続された上下の電極間の接続抵抗を低くすることができる。   The insulating resin is preferably insulating resin particles. In this case, when the conductive particles are used for the connection between the electrodes, not only can a short circuit between the electrodes adjacent in the lateral direction be prevented, but also the connection resistance between the connected upper and lower electrodes can be lowered.

(異方性導電材料)
本発明に係る異方性導電材料は、上述した導電性粒子と、バインダー樹脂とを含む。
(Anisotropic conductive material)
The anisotropic conductive material according to the present invention includes the above-described conductive particles and a binder resin.

上記バインダー樹脂は特に限定されない。上記バインダー樹脂として、一般的には絶縁性の樹脂が用いられる。上記バインダー樹脂としては、例えば、ビニル樹脂、熱可塑性樹脂、硬化性樹脂、熱可塑性ブロック共重合体及びエラストマー等が挙げられる。上記バインダー樹脂は1種のみが用いられてもよく、2種以上が併用されてもよい。   The binder resin is not particularly limited. In general, an insulating resin is used as the binder resin. Examples of the binder resin include vinyl resins, thermoplastic resins, curable resins, thermoplastic block copolymers, and elastomers. As for the said binder resin, only 1 type may be used and 2 or more types may be used together.

上記ビニル樹脂としては、例えば、酢酸ビニル樹脂、アクリル樹脂及びスチレン樹脂等が挙げられる。上記熱可塑性樹脂としては、例えば、ポリオレフィン樹脂、エチレン−酢酸ビニル共重合体及びポリアミド樹脂等が挙げられる。上記硬化性樹脂としては、例えば、エポキシ樹脂、ウレタン樹脂、ポリイミド樹脂及び不飽和ポリエステル樹脂等が挙げられる。なお、上記硬化性樹脂は、常温硬化型樹脂、熱硬化型樹脂、光硬化型樹脂又は湿気硬化型樹脂であってもよい。上記硬化性樹脂は、硬化剤と併用されてもよい。上記熱可塑性ブロック共重合体としては、例えば、スチレン−ブタジエン−スチレンブロック共重合体、スチレン−イソプレン−スチレンブロック共重合体、スチレン−ブタジエン−スチレンブロック共重合体の水素添加物、及びスチレン−イソプレン−スチレンブロック共重合体の水素添加物等が挙げられる。上記エラストマーとしては、例えば、スチレン−ブタジエン共重合ゴム、及びアクリロニトリル−スチレンブロック共重合ゴム等が挙げられる。   Examples of the vinyl resin include vinyl acetate resin, acrylic resin, and styrene resin. Examples of the thermoplastic resin include polyolefin resins, ethylene-vinyl acetate copolymers, and polyamide resins. Examples of the curable resin include an epoxy resin, a urethane resin, a polyimide resin, and an unsaturated polyester resin. The curable resin may be a room temperature curable resin, a thermosetting resin, a photocurable resin, or a moisture curable resin. The curable resin may be used in combination with a curing agent. Examples of the thermoplastic block copolymer include a styrene-butadiene-styrene block copolymer, a styrene-isoprene-styrene block copolymer, a hydrogenated product of a styrene-butadiene-styrene block copolymer, and a styrene-isoprene. -Hydrogenated product of a styrene block copolymer. Examples of the elastomer include styrene-butadiene copolymer rubber and acrylonitrile-styrene block copolymer rubber.

上記異方性導電材料は、上記導電性粒子及び上記バインダー樹脂の他に、例えば、充填剤、増量剤、軟化剤、可塑剤、重合触媒、硬化触媒、着色剤、酸化防止剤、熱安定剤、光安定剤、紫外線吸収剤、滑剤、帯電防止剤及び難燃剤等の各種添加剤を含んでいてもよい。   In addition to the conductive particles and the binder resin, the anisotropic conductive material includes, for example, a filler, an extender, a softener, a plasticizer, a polymerization catalyst, a curing catalyst, a colorant, an antioxidant, and a heat stabilizer. Further, various additives such as a light stabilizer, an ultraviolet absorber, a lubricant, an antistatic agent and a flame retardant may be contained.

上記バインダー樹脂中に上記導電性粒子を分散させる方法は、従来公知の分散方法を用いることができ特に限定されない。上記バインダー樹脂中に上記導電性粒子を分散させる方法としては、例えば、上記バインダー樹脂中に上記導電性粒子を添加した後、プラネタリーミキサー等で混練して分散させる方法、上記導電性粒子を水又は有機溶剤中にホモジナイザー等を用いて均一に分散させた後、上記バインダー樹脂中に添加し、プラネタリーミキサー等で混練して分散させる方法、並びに上記バインダー樹脂を水又は有機溶剤等で希釈した後、上記導電性粒子を添加し、プラネタリーミキサー等で混練して分散させる方法等が挙げられる。   The method for dispersing the conductive particles in the binder resin is not particularly limited, and a conventionally known dispersion method can be used. Examples of a method for dispersing the conductive particles in the binder resin include a method in which the conductive particles are added to the binder resin and then kneaded and dispersed with a planetary mixer or the like. The conductive particles are dispersed in water. Alternatively, after uniformly dispersing in an organic solvent using a homogenizer or the like, it is added to the binder resin, kneaded and dispersed with a planetary mixer or the like, and the binder resin is diluted with water or an organic solvent. Then, the method of adding the said electroconductive particle, kneading with a planetary mixer etc. and disperse | distributing is mentioned.

本発明に係る異方性導電材料は、異方性導電ペースト、異方性導電インク、異方性導電粘接着剤、異方性導電フィルム、又は異方性導電シート等として使用され得る。本発明に係る異方性導電材料が、異方性導電フィルム又は異方性導電シート等のフィルム状の接着剤として使用される場合には、該導電性粒子を含むフィルム状の接着剤に、導電性粒子を含まないフィルム状の接着剤が積層されていてもよい。   The anisotropic conductive material according to the present invention can be used as an anisotropic conductive paste, anisotropic conductive ink, anisotropic conductive adhesive, anisotropic conductive film, or anisotropic conductive sheet. When the anisotropic conductive material according to the present invention is used as a film-like adhesive such as an anisotropic conductive film or an anisotropic conductive sheet, the film-like adhesive containing the conductive particles, A film-like adhesive that does not contain conductive particles may be laminated.

異方性導電材料100重量%中、上記バインダー樹脂の含有量は10〜99.99重量%の範囲内であることが好ましい。上記バインダー樹脂の含有量のより好ましい下限は30重量%、更に好ましい下限は50重量%、特に好ましい下限は70重量%、より好ましい上限は99.9重量%である。上記バインダー樹脂の含有量が上記下限及び上限を満たすと、電極間に導電性粒子を効率的に配置でき、異方性導電材料により接続された接続対象部材の接続信頼性をより一層高めることができる。   In 100% by weight of the anisotropic conductive material, the content of the binder resin is preferably in the range of 10 to 99.99% by weight. The more preferable lower limit of the content of the binder resin is 30% by weight, the still more preferable lower limit is 50% by weight, the particularly preferable lower limit is 70% by weight, and the more preferable upper limit is 99.9% by weight. When the content of the binder resin satisfies the above lower limit and upper limit, the conductive particles can be efficiently arranged between the electrodes, and the connection reliability of the connection target member connected by the anisotropic conductive material can be further improved. it can.

異方性導電材料100重量%中、上記導電性粒子の含有量は0.01〜20重量%の範囲内であることが好ましい。上記導電性粒子の含有量のより好ましい下限は0.1重量%、より好ましい上限は10重量%である。上記導電性粒子の含有量が上記下限及び上限を満たすと、電極間の導通信頼性をより一層高めることができる。   In 100% by weight of the anisotropic conductive material, the content of the conductive particles is preferably in the range of 0.01 to 20% by weight. A more preferable lower limit of the content of the conductive particles is 0.1% by weight, and a more preferable upper limit is 10% by weight. When content of the said electroconductive particle satisfy | fills the said minimum and upper limit, the conduction | electrical_connection reliability between electrodes can be improved further.

(接続構造体)
本発明の導電性粒子又は該導電性粒子とバインダー樹脂とを含む異方性導電材料を用いて、接続対象部材を接続することにより、接続構造体を得ることができる。
(Connection structure)
A connection structure can be obtained by connecting the connection target member using the conductive particles of the present invention or an anisotropic conductive material containing the conductive particles and a binder resin.

上記接続構造体は、第1の接続対象部材と、第2の接続対象部材と、第1,第2の接続対象部材を電気的に接続している接続部とを備え、該接続部が本発明の導電性粒子又は該導電性粒子とバインダー樹脂とを含む異方性導電材料により形成されている接続構造体であることが好ましい。導電性粒子が用いられた場合には、接続部自体が導電性粒子である。すなわち、第1,第2の接続対象部材が導電性粒子により接続される。   The connection structure includes a first connection target member, a second connection target member, and a connection portion that electrically connects the first and second connection target members. The connection structure is preferably formed of the conductive particles of the invention or an anisotropic conductive material containing the conductive particles and a binder resin. In the case where conductive particles are used, the connection portion itself is conductive particles. That is, the first and second connection target members are connected by the conductive particles.

図3に、本発明の一実施形態に係る導電性粒子を用いた接続構造体を模式的に正面断面図で示す。   In FIG. 3, the connection structure using the electroconductive particle which concerns on one Embodiment of this invention is typically shown with front sectional drawing.

図3に示す接続構造体21は、第1の接続対象部材22と、第2の接続対象部材23と、第1,第2の接続対象部材22,23を接続している接続部24とを備える。接続部24は、導電性粒子1を含む異方性導電材料を硬化させることにより形成されている。なお、図3では、導電性粒子1は、図示の便宜上、略図的に示されている。   The connection structure 21 shown in FIG. 3 includes a first connection target member 22, a second connection target member 23, and a connection portion 24 connecting the first and second connection target members 22 and 23. Prepare. The connecting portion 24 is formed by curing an anisotropic conductive material including the conductive particles 1. In FIG. 3, the conductive particles 1 are schematically shown for convenience of illustration.

第1の接続対象部材22の上面22aには、複数の電極22bが設けられている。第2の接続対象部材23の下面23aには、複数の電極23bが設けられている。電極22bと電極23bとが、1つ又は複数の導電性粒子1により電気的に接続されている。従って、第1,第2の接続対象部材22,23が導電性粒子1により電気的に接続されている。   A plurality of electrodes 22 b are provided on the upper surface 22 a of the first connection target member 22. A plurality of electrodes 23 b are provided on the lower surface 23 a of the second connection target member 23. The electrode 22b and the electrode 23b are electrically connected by one or a plurality of conductive particles 1. Accordingly, the first and second connection target members 22 and 23 are electrically connected by the conductive particles 1.

上記接続構造体の製造方法は特に限定されない。接続構造体の製造方法の一例として、第1の接続対象部材と第2の接続対象部材との間に上記異方性導電材料を配置し、積層体を得た後、該積層体を加熱及び加圧する方法等が挙げられる。   The manufacturing method of the connection structure is not particularly limited. As an example of a method for manufacturing a connection structure, the anisotropic conductive material is disposed between a first connection target member and a second connection target member to obtain a laminate, and then the laminate is heated and The method of pressurizing is mentioned.

上記加圧の圧力は9.8〜10〜4.9×10Pa程度である。上記加熱の温度は、120〜220℃程度である。 The pressure of the said pressurization is about 9.8-10 < 4 > -4.9 * 10 < 6 > Pa. The temperature of the said heating is about 120-220 degreeC.

上記接続対象部材としては、具体的には、半導体チップ、コンデンサ及びダイオード等の電子部品、並びにプリント基板、フレキシブルプリント基板及びガラス基板等の回路基板等が挙げられる。   Specific examples of the connection target member include electronic components such as semiconductor chips, capacitors, and diodes, and circuit boards such as printed boards, flexible printed boards, and glass boards.

上記接続対象部材に設けられている電極としては、金電極、ニッケル電極、錫電極、アルミニウム電極、銅電極、モリブデン電極及びタングステン電極等の金属電極が挙げられる。上記接続対象部材がフレキシブルプリント基板である場合には、上記電極は金電極、ニッケル電極、錫電極又は銅電極であることが好ましい。上記接続対象部材がガラス基板である場合には、上記電極はアルミニウム電極、銅電極、モリブデン電極又はタングステン電極であることが好ましい。なお、上記電極がアルミニウム電極である場合には、アルミニウムのみで形成された電極であってもよく、金属酸化物層の表面にアルミニウム層が積層された電極であってもよい。上記金属酸化物として、3価の金属元素がドープされた酸化インジウム及び3価の金属元素がドープされた酸化亜鉛等が挙げられる。上記3価の金属元素として、Sn、Al及びGa等が挙げられる。   Examples of the electrode provided on the connection target member include metal electrodes such as a gold electrode, a nickel electrode, a tin electrode, an aluminum electrode, a copper electrode, a molybdenum electrode, and a tungsten electrode. When the connection object member is a flexible printed board, the electrode is preferably a gold electrode, a nickel electrode, a tin electrode, or a copper electrode. When the connection target member is a glass substrate, the electrode is preferably an aluminum electrode, a copper electrode, a molybdenum electrode, or a tungsten electrode. In addition, when the said electrode is an aluminum electrode, the electrode formed only with aluminum may be sufficient and the electrode by which the aluminum layer was laminated | stacked on the surface of the metal oxide layer may be sufficient. Examples of the metal oxide include indium oxide doped with a trivalent metal element and zinc oxide doped with a trivalent metal element. Examples of the trivalent metal element include Sn, Al, and Ga.

以下、実施例及び比較例を挙げて、本発明を具体的に説明する。本発明は、以下の実施例のみに限定されない。   Hereinafter, the present invention will be specifically described with reference to Examples and Comparative Examples. The present invention is not limited only to the following examples.

(実施例1)
粒子径が5.0μmであるジビニルベンゼン共重合体樹脂粒子(積水化学工業社製「ミクロパールSP−205」)を用意した。
Example 1
Divinylbenzene copolymer resin particles having a particle size of 5.0 μm (“Micropearl SP-205” manufactured by Sekisui Chemical Co., Ltd.) were prepared.

パラジウム触媒液を5重量%含むアルカリ溶液100重量部に、上記樹脂粒子10重量部を、超音波分散器を用いて分散させた後、溶液をろ過することにより、樹脂粒子を取り出した。次いで、樹脂粒子をジメチルアミンボラン1重量%溶液100重量部に添加し、樹脂粒子の表面を活性化させた。表面が活性化された樹脂粒子を十分に水洗した後、蒸留水500重量部に加え、分散させることにより、懸濁液を得た。   After dispersing 10 parts by weight of the resin particles in 100 parts by weight of an alkaline solution containing 5% by weight of a palladium catalyst solution using an ultrasonic disperser, the resin particles were taken out by filtering the solution. Next, the resin particles were added to 100 parts by weight of a 1% by weight dimethylamine borane solution to activate the surface of the resin particles. The resin particles whose surface was activated were sufficiently washed with water, and then added to 500 parts by weight of distilled water and dispersed to obtain a suspension.

また、硫酸ニッケル0.23mol/L、ジメチルアミンボラン0.92mol/L、及びクエン酸ナトリウム0.5mol/Lを含むニッケルめっき液(pH8.5)を用意した。   Further, a nickel plating solution (pH 8.5) containing 0.23 mol / L of nickel sulfate, 0.92 mol / L of dimethylamine borane, and 0.5 mol / L of sodium citrate was prepared.

得られた懸濁液を60℃にて攪拌しながら、上記ニッケルめっき液を懸濁液に徐々に滴下し、無電解ニッケルめっきを行った。樹脂粒子の表面に、厚み0.08μm程度の導電層(ニッケルとボロンとを含むニッケル−ボロン導電層)が形成されたときに、無電解めっき液の滴下を終了した。その後、懸濁液を濾過することにより、粒子を取り出し、水洗し、乾燥することにより、樹脂粒子の表面にニッケル−ボロン導電層(厚み0.1μm)が設けられた導電性粒子を得た。   While stirring the obtained suspension at 60 ° C., the nickel plating solution was gradually added dropwise to the suspension to perform electroless nickel plating. When a conductive layer (nickel-boron conductive layer containing nickel and boron) having a thickness of about 0.08 μm was formed on the surface of the resin particles, dropping of the electroless plating solution was terminated. Thereafter, the suspension was filtered to take out the particles, washed with water, and dried to obtain conductive particles having a nickel-boron conductive layer (thickness: 0.1 μm) on the surface of the resin particles.

(実施例2)
硫酸ニッケル濃度を、0.19mol/Lに変更したこと以外は実施例1と同様にして、樹脂粒子の表面にニッケル−ボロン導電層(厚み0.1μm)が設けられた導電性粒子を得た。
(Example 2)
Conductive particles having a nickel-boron conductive layer (thickness: 0.1 μm) provided on the surface of the resin particles were obtained in the same manner as in Example 1 except that the nickel sulfate concentration was changed to 0.19 mol / L. .

(実施例3)
懸濁液の温度を、55℃に変更したこと以外は実施例1と同様にして、樹脂粒子の表面にニッケル−ボロン導電層(厚み0.1μm)が設けられた導電性粒子を得た。
(Example 3)
Except having changed the temperature of suspension to 55 degreeC, it carried out similarly to Example 1, and obtained the electroconductive particle by which the nickel- boron conductive layer (thickness 0.1 micrometer) was provided in the surface of the resin particle.

(実施例4)
(1)パラジウム付着工程
粒子径が5.0μmであるジビニルベンゼン樹脂粒子(積水化学工業社製「ミクロパールSP−205」)を用意した。この樹脂粒子をエッチングし、水洗した。次に、パラジウム触媒を8重量%含むパラジウム触媒化液100mL中に樹脂粒子を添加し、攪拌した。その後、ろ過し、洗浄した。pH6の0.5重量%ジメチルアミンボラン液に樹脂粒子を添加し、パラジウムが付着された樹脂粒子を得た。
Example 4
(1) Palladium adhesion process The divinylbenzene resin particle ("Micropearl SP-205" by Sekisui Chemical Co., Ltd.) whose particle diameter is 5.0 micrometers was prepared. The resin particles were etched and washed with water. Next, resin particles were added to 100 mL of a palladium-catalyzed solution containing 8% by weight of a palladium catalyst and stirred. Then, it filtered and wash | cleaned. Resin particles were added to 0.5 wt% dimethylamine borane solution at pH 6 to obtain resin particles to which palladium was attached.

(2)芯物質付着工程
パラジウムが付着された樹脂粒子をイオン交換水300mL中で3分間攪拌し、分散させ、分散液を得た。次に、金属ニッケル粒子スラリー(平均粒子径200nm)1gを3分間かけて上記分散液に添加し、芯物質が付着された樹脂粒子を得た。
(2) Core substance adhesion step The resin particles to which palladium was adhered were stirred and dispersed in 300 mL of ion exchange water for 3 minutes to obtain a dispersion. Next, 1 g of metal nickel particle slurry (average particle diameter 200 nm) was added to the dispersion over 3 minutes to obtain resin particles to which the core substance was adhered.

(3)無電解ニッケルめっき工程
芯物質が付着された樹脂粒子にイオン交換水500mLを加え、樹脂粒子を十分に分散させて懸濁液を得た。この懸濁液を攪拌しながら、硫酸ニッケル6水和物50g/L、ジメチルアミンボラン0.32g/L及びクエン酸50g/Lを含むpH5.0の無電解ニッケルめっき液を徐々に添加し、無電解ニッケルめっきを行った。このようにして、樹脂粒子の表面にニッケル−ボロン導電層(厚み0.1μm)が設けられており、ニッケル−ボロン導電層の表面に突起を有する導電性粒子を得た。
(3) Electroless nickel plating step 500 mL of ion-exchanged water was added to the resin particles to which the core substance was adhered, and the resin particles were sufficiently dispersed to obtain a suspension. While stirring this suspension, an electroless nickel plating solution having a pH of 5.0 containing nickel sulfate hexahydrate 50 g / L, dimethylamine borane 0.32 g / L and citric acid 50 g / L was gradually added. Electroless nickel plating was performed. In this way, a nickel-boron conductive layer (thickness 0.1 μm) was provided on the surface of the resin particles, and conductive particles having protrusions on the surface of the nickel-boron conductive layer were obtained.

(実施例5)
(1)絶縁樹脂粒子の作製
4ツ口セパラブルカバー、攪拌翼、三方コック、冷却管及び温度プローブが取り付けられた1000mLのセパラブルフラスコに、メタクリル酸メチル100mmolと、N,N,N−トリメチル−N−2−メタクリロイルオキシエチルアンモニウムクロライド1mmolと、2,2’−アゾビス(2−アミジノプロパン)二塩酸塩1mmolとを含むモノマー組成物を固形分率が5重量%となるようにイオン交換水に秤取した後、200rpmで攪拌し、窒素雰囲気下70℃で24時間重合を行った。反応終了後、凍結乾燥して、表面にアンモニウム基を有し、平均粒子径220nm及びCV値10%の絶縁樹脂粒子を得た。
(Example 5)
(1) Production of insulating resin particles In a 1000 mL separable flask equipped with a four-neck separable cover, a stirring blade, a three-way cock, a condenser tube and a temperature probe, 100 mmol of methyl methacrylate and N, N, N-trimethyl Ion-exchanged water containing a monomer composition containing 1 mmol of -N-2-methacryloyloxyethylammonium chloride and 1 mmol of 2,2'-azobis (2-amidinopropane) dihydrochloride so that the solid content is 5% by weight. Then, the mixture was stirred at 200 rpm and polymerized at 70 ° C. for 24 hours under a nitrogen atmosphere. After completion of the reaction, freeze drying was performed to obtain insulating resin particles having an ammonium group on the surface, an average particle diameter of 220 nm, and a CV value of 10%.

絶縁樹脂粒子を超音波照射下でイオン交換水に分散させ、絶縁樹脂粒子の10重量%水分散液を得た。   The insulating resin particles were dispersed in ion exchange water under ultrasonic irradiation to obtain a 10 wt% aqueous dispersion of insulating resin particles.

実施例4で得られた導電性粒子10gをイオン交換水500mLに分散させ、絶縁樹脂粒子の水分散液4gを添加し、室温で6時間攪拌した。3μmのメッシュフィルターでろ過した後、更にメタノールで洗浄し、乾燥し、絶縁樹脂粒子が付着した導電性粒子を得た。   10 g of the conductive particles obtained in Example 4 were dispersed in 500 mL of ion exchange water, 4 g of an aqueous dispersion of insulating resin particles was added, and the mixture was stirred at room temperature for 6 hours. After filtration through a 3 μm mesh filter, the particles were further washed with methanol and dried to obtain conductive particles having insulating resin particles attached thereto.

走査電子顕微鏡(SEM)により観察したところ、導電性粒子の表面に絶縁樹脂粒子による被覆層が1層のみ形成されていた。画像解析により導電性粒子の中心より2.5μmの面積に対する絶縁樹脂粒子の被覆面積(即ち絶縁樹脂粒子の粒子径の投影面積)を算出したところ、被覆率は30%であった。   When observed with a scanning electron microscope (SEM), only one coating layer of insulating resin particles was formed on the surface of the conductive particles. When the coated area of the insulating resin particles (that is, the projected area of the particle diameter of the insulating resin particles) with respect to the area of 2.5 μm from the center of the conductive particles was calculated by image analysis, the coverage was 30%.

(比較例1)
ニッケルめっき液におけるジメチルアミンボラン0.92mol/Lを、次亜リン酸ナトリウム0.5mol/Lに変更したこと以外は実施例1と同様にして、樹脂粒子の表面にニッケルとリンとを含む導電層(厚み0.1μm)が設けられた導電性粒子を得た。
(Comparative Example 1)
Conductivity containing nickel and phosphorus on the surface of the resin particles in the same manner as in Example 1 except that 0.92 mol / L of dimethylamine borane in the nickel plating solution was changed to 0.5 mol / L of sodium hypophosphite. Conductive particles provided with a layer (thickness 0.1 μm) were obtained.

(比較例2)
硫酸ニッケル濃度を、0.11mol/Lに変更に変更したこと以外は実施例1と同様にして、樹脂粒子の表面にニッケル−ボロン導電層(厚み0.1μm)が設けられた導電性粒子を得た。
(Comparative Example 2)
Conductive particles in which a nickel-boron conductive layer (thickness: 0.1 μm) was provided on the surface of the resin particles were the same as in Example 1 except that the nickel sulfate concentration was changed to 0.11 mol / L. Obtained.

(実施例6)
滴下速度を半分に遅く変更したこと以外は実施例2と同様にして、樹脂粒子の表面にニッケル−ボロン導電層(厚み0.1μm)が設けられた導電性粒子を得た。
(Example 6)
Conductive particles having a nickel-boron conductive layer (thickness 0.1 μm) provided on the surface of the resin particles were obtained in the same manner as in Example 2 except that the dropping speed was changed to half.

(実施例7)
攪拌回転数を1/3に変更したこと以外は実施例3と同様にして、樹脂粒子の表面にニッケル−ボロン導電層(厚み0.1μm)が設けられた導電性粒子を得た。
(Example 7)
Except having changed the stirring rotation speed to 1/3, it carried out similarly to Example 3, and obtained the electroconductive particle by which the nickel- boron conductive layer (thickness 0.1 micrometer) was provided in the surface of the resin particle.

(評価)
(1)導電層の全体100重量%中のニッケル及びボロンの含有量
60%硝酸5mLと37%塩酸10mLとの混合液に、導電性粒子5gを加え、導電層を完全に溶解させ、溶液を得た。得られた溶液を用いて、ニッケル及びボロンの含有量をICP−MS分析器(日立製作所社製)により分析した。
(Evaluation)
(1) Content of nickel and boron in 100% by weight of the entire conductive layer 5 g of conductive particles are added to a mixed solution of 5 mL of 60% nitric acid and 10 mL of 37% hydrochloric acid to completely dissolve the conductive layer. Obtained. Using the obtained solution, the contents of nickel and boron were analyzed with an ICP-MS analyzer (manufactured by Hitachi, Ltd.).

(2)ニッケル−ボロン導電層の厚み方向におけるボロンの含有量
ニッケル−ボロン導電層の外表面から厚み方向におけるボロンの含有量の分布を測定した。ニッケル−ボロン導電層の外表面から厚み方向に内側に向かって1/2の厚みの領域において、ニッケル−ボロン導電層中のボロンの含有量の最大値と最小値との差を「差D」として、結果を下記の表1に示した。ニッケル−ボロン導電層の外表面から厚み方向に内側に向かって1/5の厚みの領域において、ニッケル−ボロン導電層中のボロンの含有量の最大値を「最大値M」として、結果を下記の表1に示した。
(2) Content of boron in the thickness direction of the nickel-boron conductive layer The distribution of the content of boron in the thickness direction from the outer surface of the nickel-boron conductive layer was measured. The difference between the maximum value and the minimum value of the boron content in the nickel-boron conductive layer in the region having a thickness of ½ from the outer surface of the nickel-boron conductive layer toward the inside in the thickness direction is “difference D”. The results are shown in Table 1 below. In the region of 1/5 thickness inward in the thickness direction from the outer surface of the nickel-boron conductive layer, the maximum value of the boron content in the nickel-boron conductive layer is defined as “maximum value M”, and the results are shown below. It showed in Table 1.

(3)めっき状態
得られた導電性粒子50個のめっき状態を、走査型電子顕微鏡により観察した。めっき割れ又はめっき剥がれ等のめっきむらの有無を観察した。めっきむらが確認された導電性粒子が4個以下の場合を「良好」、めっきむらが確認された導電性粒子が5個以上の場合を「不良」として、結果を下記の表1に示した。
(3) Plating state The plating state of 50 conductive particles obtained was observed with a scanning electron microscope. The presence or absence of plating unevenness such as plating cracking or plating peeling was observed. The results are shown in Table 1 below, assuming that the number of conductive particles in which plating unevenness is confirmed is 4 or less is “good” and the case in which there are 5 or more conductive particles in which uneven plating is confirmed is “bad”. .

(4)接続構造体の作製
ビスフェノールA型エポキシ樹脂(ジャパンエポキシレジン社製「エピコート1009」)10重量部と、アクリルゴム(重量平均分子量約80万)40重量部と、メチルエチルケトン200重量部と、マイクロカプセル型硬化剤(旭化成ケミカルズ社製「HX3941HP」)50重量部と、シランカップリング剤(東レダウコーニングシリコーン社製「SH6040」)2重量部とを混合し、導電性粒子を含有量が3体積%となるように添加し、分散させ、樹脂組成物を得た。
(4) Preparation of connection structure 10 parts by weight of bisphenol A type epoxy resin (“Epicoat 1009” manufactured by Japan Epoxy Resin Co., Ltd.), 40 parts by weight of acrylic rubber (weight average molecular weight of about 800,000), 200 parts by weight of methyl ethyl ketone, Mixing 50 parts by weight of a microcapsule type curing agent (“HX3941HP” manufactured by Asahi Kasei Chemicals) and 2 parts by weight of a silane coupling agent (“SH6040” manufactured by Toray Dow Corning Silicone), the content of conductive particles is 3 It added so that it might become volume%, it was made to disperse | distribute and the resin composition was obtained.

得られた樹脂組成物を、片面が離型処理された厚さ50μmのPET(ポリエチレンテレフタレート)フィルムに塗布し、70℃の熱風で5分間乾燥し、異方性導電フィルムを作製した。得られた異方性導電フィルムの厚さは12μmであった。   The obtained resin composition was applied to a 50 μm-thick PET (polyethylene terephthalate) film whose one surface was released from the mold, and dried with hot air at 70 ° C. for 5 minutes to produce an anisotropic conductive film. The thickness of the obtained anisotropic conductive film was 12 μm.

得られた異方性導電フィルムを5mm×5mmの大きさに切断した。切断された異方性導電フィルムを、一方に抵抗測定用の引き回し線を有するアルミニウム電極(高さ0.2μm、L/S=20μm/20μm)が設けられたガラス基板(幅3cm、長さ3cm)のアルミニウム電極側のほぼ中央に貼り付けた。次いで、同じアルミニウム電極が設けられた2層フレキシブルプリント基板(幅2cm、長さ1cm)を、電極同士が重なるように位置合わせをしてから貼り合わせた。このガラス基板と2層フレキシブルプリント基板との積層体を、10N、180℃、及び20秒間の圧着条件で熱圧着し、接続構造体を得た。なお、ポリイミドフィルムにアルミニウム電極が直接形成されている2層フレキシブルプリント基板を用いた。   The obtained anisotropic conductive film was cut into a size of 5 mm × 5 mm. A glass substrate (width 3 cm, length 3 cm) provided with an aluminum electrode (height 0.2 μm, L / S = 20 μm / 20 μm) having a lead wire for resistance measurement on one side of the cut anisotropic conductive film. ) On the aluminum electrode side. Subsequently, the two-layer flexible printed circuit board (width 2cm, length 1cm) provided with the same aluminum electrode was bonded after aligning so that electrodes might overlap. The laminated body of the glass substrate and the two-layer flexible printed circuit board was thermocompression bonded under pressure bonding conditions of 10 N, 180 ° C., and 20 seconds to obtain a connection structure. A two-layer flexible printed board in which an aluminum electrode is directly formed on a polyimide film was used.

(5)接続抵抗
上記(4)接続構造体の作製で得られた接続構造体の対向する電極間の接続抵抗を4端子法により測定した。また、接続抵抗を下記の評価基準で評価した。
(5) Connection resistance The connection resistance between the electrodes facing each other of the connection structure obtained in the preparation of the connection structure (4) was measured by a four-terminal method. The connection resistance was evaluated according to the following evaluation criteria.

〔接続抵抗の評価基準〕
○○:接続抵抗が2.0Ω以下
○:接続抵抗が2.0Ωを超え、3.0Ω以下
△:接続抵抗が3.0Ωを超え、5.0Ω以下
×:接続抵抗が5.0Ωを超える
[Evaluation criteria for connection resistance]
○○: Connection resistance is 2.0Ω or less ○: Connection resistance exceeds 2.0Ω, 3.0Ω or less △: Connection resistance exceeds 3.0Ω, 5.0Ω or less ×: Connection resistance exceeds 5.0Ω

結果を下記の表1に示す。   The results are shown in Table 1 below.

Figure 2011243455
Figure 2011243455

上記表1において、差Dは、ニッケル−ボロン導電層の外表面から厚み方向に内側に向かって1/2の厚みの領域において、上記ニッケル−ボロン導電層中のボロンの含有量の最大値と最小値との差を示す。最大値Mは、ニッケル−ボロン導電層の外表面から厚み方向に内側に向かって1/5の厚みの領域において、ニッケル−ボロン導電層中のボロンの含有量の最大値を示す。   In Table 1, the difference D is the maximum value of the boron content in the nickel-boron conductive layer in a region having a thickness of 1/2 from the outer surface of the nickel-boron conductive layer toward the inside in the thickness direction. Indicates the difference from the minimum value. The maximum value M indicates the maximum value of the boron content in the nickel-boron conductive layer in a region having a thickness of 1/5 from the outer surface of the nickel-boron conductive layer toward the inside in the thickness direction.

1…導電性粒子
1a…表面
2…基材粒子
2a…表面
3…ニッケル−ボロン導電層
3a…外表面
4…芯物質
5…突起
6…絶縁性樹脂
11…導電性粒子
12…ニッケル−ボロン導電層
12a…外表面
21…接続構造体
22…第1の接続対象部材
22a…上面
22b…電極
23…第2の接続対象部材
23a…下面
23b…電極
24…接続部
DESCRIPTION OF SYMBOLS 1 ... Conductive particle 1a ... Surface 2 ... Base material particle 2a ... Surface 3 ... Nickel-boron conductive layer 3a ... Outer surface 4 ... Core substance 5 ... Protrusion 6 ... Insulating resin 11 ... Conductive particle 12 ... Nickel-boron conductive Layer 12a ... outer surface 21 ... connection structure 22 ... first connection target member 22a ... upper surface 22b ... electrode 23 ... second connection target member 23a ... lower surface 23b ... electrode 24 ... connection portion

Claims (7)

基材粒子と、
前記基材粒子の表面に設けられており、かつニッケルとボロンとを含むニッケル−ボロン導電層とを有し、
前記ニッケル−ボロン導電層の全体100重量%中、ニッケルの含有量が97重量%以上である、導電性粒子。
Substrate particles,
A nickel-boron conductive layer provided on the surface of the substrate particles and containing nickel and boron;
The electroconductive particle whose content of nickel is 97 weight% or more in 100 weight% of the whole nickel- boron conductive layer.
前記ニッケル−ボロン導電層の外表面から厚み方向に内側に向かって1/2の厚みの領域において、前記ニッケル−ボロン導電層中のボロンの含有量の最大値と最小値との差が、2重量%以下である、請求項1に記載の導電性粒子。   The difference between the maximum value and the minimum value of the boron content in the nickel-boron conductive layer is 2 in the region having a thickness of ½ inward in the thickness direction from the outer surface of the nickel-boron conductive layer. The electroconductive particle of Claim 1 which is weight% or less. 前記ニッケル−ボロン導電層の外表面から厚み方向に内側に向かって1/5の厚みの領域において、前記ニッケル−ボロン導電層中のボロンの含有量の最大値が3重量%以下である、請求項1又は2に記載の導電性粒子。   The maximum boron content in the nickel-boron conductive layer is 3% by weight or less in a region having a thickness of 1/5 from the outer surface of the nickel-boron conductive layer toward the inside in the thickness direction. Item 3. The conductive particle according to Item 1 or 2. 前記基材粒子の粒子径が、2〜5μmであり、かつ、
前記ニッケル−ボロン導電層の厚みが、50〜300nmである、請求項1〜3のいずれか1項に記載の導電性粒子。
The particle size of the substrate particles is 2 to 5 μm, and
The electroconductive particle of any one of Claims 1-3 whose thickness of the said nickel- boron conductive layer is 50-300 nm.
ニッケル−ボロン導電層の外表面に突起を有する、請求項1〜4のいずれか1項に記載の導電性粒子。   The electroconductive particle of any one of Claims 1-4 which has a processus | protrusion on the outer surface of a nickel- boron conductive layer. 請求項1〜5のいずれか1項に記載の導電性粒子と、バインダー樹脂とを含む、異方性導電材料。   An anisotropic conductive material containing the electroconductive particle of any one of Claims 1-5, and binder resin. 第1の接続対象部材と、第2の接続対象部材と、該第1,第2の接続対象部材を接続している接続部とを備え、
前記接続部が、請求項1〜5のいずれか1項に記載の導電性粒子、又は該導電性粒子とバインダー樹脂とを含む異方性導電材料により形成されている、接続構造体。
A first connection target member, a second connection target member, and a connection part connecting the first and second connection target members;
The connection structure in which the said connection part is formed with the anisotropic conductive material containing the electroconductive particle of any one of Claims 1-5, or this electroconductive particle and binder resin.
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