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DE102009004402A1 - Oberflächen-Behandlungsmaterial für Halbleiter-Herstellungssystem und Verfahren zur Herstellung desselben - Google Patents

Oberflächen-Behandlungsmaterial für Halbleiter-Herstellungssystem und Verfahren zur Herstellung desselben Download PDF

Info

Publication number
DE102009004402A1
DE102009004402A1 DE102009004402A DE102009004402A DE102009004402A1 DE 102009004402 A1 DE102009004402 A1 DE 102009004402A1 DE 102009004402 A DE102009004402 A DE 102009004402A DE 102009004402 A DE102009004402 A DE 102009004402A DE 102009004402 A1 DE102009004402 A1 DE 102009004402A1
Authority
DE
Germany
Prior art keywords
fluorine
anodic oxidation
oxidation coating
substrate
enriched layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE102009004402A
Other languages
German (de)
English (en)
Inventor
Takayuki Kobe-shi Tsubota
Jun Kobe-shi Hisamoto
Koji Kobe-shi Wada
Mamoru Kobe-shi Hosokawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kobe Steel Ltd
Original Assignee
Kobe Steel Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kobe Steel Ltd filed Critical Kobe Steel Ltd
Publication of DE102009004402A1 publication Critical patent/DE102009004402A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • A—HUMAN NECESSITIES
    • A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
    • A47J—KITCHEN EQUIPMENT; COFFEE MILLS; SPICE MILLS; APPARATUS FOR MAKING BEVERAGES
    • A47J27/00—Cooking-vessels
    • A47J27/04—Cooking-vessels for cooking food in steam; Devices for extracting fruit juice by means of steam ; Vacuum cooking vessels
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/02—Anodisation
    • C25D11/04—Anodisation of aluminium or alloys based thereon
    • C25D11/18—After-treatment, e.g. pore-sealing
    • C25D11/24—Chemical after-treatment
    • C25D11/246—Chemical after-treatment for sealing layers
    • A—HUMAN NECESSITIES
    • A23—FOODS OR FOODSTUFFS; TREATMENT THEREOF, NOT COVERED BY OTHER CLASSES
    • A23L—FOODS, FOODSTUFFS, OR NON-ALCOHOLIC BEVERAGES, NOT COVERED BY SUBCLASSES A21D OR A23B-A23J; THEIR PREPARATION OR TREATMENT, e.g. COOKING, MODIFICATION OF NUTRITIVE QUALITIES, PHYSICAL TREATMENT; PRESERVATION OF FOODS OR FOODSTUFFS, IN GENERAL
    • A23L5/00—Preparation or treatment of foods or foodstuffs, in general; Food or foodstuffs obtained thereby; Materials therefor
    • A23L5/10—General methods of cooking foods, e.g. by roasting or frying
    • A23L5/13—General methods of cooking foods, e.g. by roasting or frying using water or steam
    • A—HUMAN NECESSITIES
    • A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
    • A47J—KITCHEN EQUIPMENT; COFFEE MILLS; SPICE MILLS; APPARATUS FOR MAKING BEVERAGES
    • A47J27/00—Cooking-vessels
    • A47J27/14—Cooking-vessels for use in hotels, restaurants, or canteens
    • A47J27/16—Cooking-vessels for use in hotels, restaurants, or canteens heated by steam
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24C—DOMESTIC STOVES OR RANGES ; DETAILS OF DOMESTIC STOVES OR RANGES, OF GENERAL APPLICATION
    • F24C15/00—Details
    • F24C15/32—Arrangements of ducts for hot gases, e.g. in or around baking ovens
    • F24C15/322—Arrangements of ducts for hot gases, e.g. in or around baking ovens with forced circulation
    • F24C15/327—Arrangements of ducts for hot gases, e.g. in or around baking ovens with forced circulation with air moisturising

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Food Science & Technology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Nutrition Science (AREA)
  • Polymers & Plastics (AREA)
  • General Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Electrochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Drying Of Semiconductors (AREA)
DE102009004402A 2008-02-26 2009-01-13 Oberflächen-Behandlungsmaterial für Halbleiter-Herstellungssystem und Verfahren zur Herstellung desselben Withdrawn DE102009004402A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2008-044144 2008-02-26
JP2008044144 2008-02-26

Publications (1)

Publication Number Publication Date
DE102009004402A1 true DE102009004402A1 (de) 2009-09-03

Family

ID=40911493

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102009004402A Withdrawn DE102009004402A1 (de) 2008-02-26 2009-01-13 Oberflächen-Behandlungsmaterial für Halbleiter-Herstellungssystem und Verfahren zur Herstellung desselben

Country Status (6)

Country Link
JP (1) JP5452034B2 (ko)
KR (1) KR20090092228A (ko)
CN (1) CN101521145A (ko)
DE (1) DE102009004402A1 (ko)
SG (1) SG155111A1 (ko)
TW (1) TW200942643A (ko)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI741320B (zh) * 2018-07-18 2021-10-01 日商日本發條股份有限公司 電漿處理裝置用構件
JP6585863B1 (ja) * 2019-01-23 2019-10-02 株式会社Uacj アルミニウム部材及びその製造方法
CN115449777A (zh) * 2022-09-28 2022-12-09 上海积塔半导体有限公司 半导体反应部件及其制造方法

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04263093A (ja) 1990-06-07 1992-09-18 Applied Materials Inc アルミニウム支持体上の耐蝕性保護被膜とその製造方法
JPH07273053A (ja) 1994-03-31 1995-10-20 Tokyo Electron Ltd 処理装置及びアルミ系部材のコーティング方法
JPH08181048A (ja) 1994-08-15 1996-07-12 Applied Materials Inc 半導体プロセス装置用の耐腐食性アルミニウム物品
JP2831488B2 (ja) 1990-06-07 1998-12-02 アプライド マテリアルズ インコーポレイテッド アルミニウム基材に耐蝕性保護被膜を形成する方法
JPH1161410A (ja) 1997-06-09 1999-03-05 Kobe Steel Ltd 真空チャンバ部材及びその製造方法
JPH1192912A (ja) 1997-09-12 1999-04-06 Showa Denko Kk フッ化表面層を有する金属材料もしくは金属皮膜ならびにフッ化方法
JP2003119540A (ja) 2001-10-12 2003-04-23 Showa Denko Kk 皮膜形成処理用アルミニウム合金、ならびに耐食性に優れたアルミニウム合金材およびその製造方法
JP2003119539A (ja) 2001-10-12 2003-04-23 Showa Denko Kk 皮膜形成処理用アルミニウム合金、ならびに耐食性に優れたアルミニウム合金材およびその製造方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU8248198A (en) * 1997-07-11 1999-02-08 Magnesium Technology Limited Sealing procedures for metal and/or anodised metal substrates
JPH11229185A (ja) * 1998-02-13 1999-08-24 Kobe Steel Ltd 耐熱割れ性および耐食性に優れたＡｌ材料
JP4744099B2 (ja) * 2004-06-15 2011-08-10 株式会社アルバック 真空容器の内壁用のアルミニウム材の表面処理方法

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04263093A (ja) 1990-06-07 1992-09-18 Applied Materials Inc アルミニウム支持体上の耐蝕性保護被膜とその製造方法
JP2831488B2 (ja) 1990-06-07 1998-12-02 アプライド マテリアルズ インコーポレイテッド アルミニウム基材に耐蝕性保護被膜を形成する方法
JPH07273053A (ja) 1994-03-31 1995-10-20 Tokyo Electron Ltd 処理装置及びアルミ系部材のコーティング方法
JPH08181048A (ja) 1994-08-15 1996-07-12 Applied Materials Inc 半導体プロセス装置用の耐腐食性アルミニウム物品
JPH1161410A (ja) 1997-06-09 1999-03-05 Kobe Steel Ltd 真空チャンバ部材及びその製造方法
JPH1192912A (ja) 1997-09-12 1999-04-06 Showa Denko Kk フッ化表面層を有する金属材料もしくは金属皮膜ならびにフッ化方法
JP2003119540A (ja) 2001-10-12 2003-04-23 Showa Denko Kk 皮膜形成処理用アルミニウム合金、ならびに耐食性に優れたアルミニウム合金材およびその製造方法
JP2003119539A (ja) 2001-10-12 2003-04-23 Showa Denko Kk 皮膜形成処理用アルミニウム合金、ならびに耐食性に優れたアルミニウム合金材およびその製造方法

Also Published As

Publication number Publication date
KR20090092228A (ko) 2009-08-31
JP2009228132A (ja) 2009-10-08
TW200942643A (en) 2009-10-16
CN101521145A (zh) 2009-09-02
JP5452034B2 (ja) 2014-03-26
SG155111A1 (en) 2009-09-30

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee

Effective date: 20110802