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TW200942643A - Surface treatment material for semiconductor manufacturing system and method for producing same - Google Patents

Surface treatment material for semiconductor manufacturing system and method for producing same

Info

Publication number
TW200942643A
TW200942643A TW097148769A TW97148769A TW200942643A TW 200942643 A TW200942643 A TW 200942643A TW 097148769 A TW097148769 A TW 097148769A TW 97148769 A TW97148769 A TW 97148769A TW 200942643 A TW200942643 A TW 200942643A
Authority
TW
Taiwan
Prior art keywords
fluorine
anodic oxidation
oxidation coating
treatment material
semiconductor manufacturing
Prior art date
Application number
TW097148769A
Other languages
English (en)
Inventor
Takayuki Tsubota
Jun Hisamoto
Koji Wada
Mamoru Hosokawa
Original Assignee
Kobe Steel Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kobe Steel Ltd filed Critical Kobe Steel Ltd
Publication of TW200942643A publication Critical patent/TW200942643A/zh

Links

Classifications

    • A—HUMAN NECESSITIES
    • A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
    • A47J—KITCHEN EQUIPMENT; COFFEE MILLS; SPICE MILLS; APPARATUS FOR MAKING BEVERAGES
    • A47J27/00—Cooking-vessels
    • A47J27/04—Cooking-vessels for cooking food in steam; Devices for extracting fruit juice by means of steam ; Vacuum cooking vessels
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/02—Anodisation
    • C25D11/04—Anodisation of aluminium or alloys based thereon
    • C25D11/18—After-treatment, e.g. pore-sealing
    • C25D11/24—Chemical after-treatment
    • C25D11/246—Chemical after-treatment for sealing layers
    • A—HUMAN NECESSITIES
    • A23—FOODS OR FOODSTUFFS; TREATMENT THEREOF, NOT COVERED BY OTHER CLASSES
    • A23L—FOODS, FOODSTUFFS, OR NON-ALCOHOLIC BEVERAGES, NOT COVERED BY SUBCLASSES A21D OR A23B-A23J; THEIR PREPARATION OR TREATMENT, e.g. COOKING, MODIFICATION OF NUTRITIVE QUALITIES, PHYSICAL TREATMENT; PRESERVATION OF FOODS OR FOODSTUFFS, IN GENERAL
    • A23L5/00—Preparation or treatment of foods or foodstuffs, in general; Food or foodstuffs obtained thereby; Materials therefor
    • A23L5/10—General methods of cooking foods, e.g. by roasting or frying
    • A23L5/13—General methods of cooking foods, e.g. by roasting or frying using water or steam
    • A—HUMAN NECESSITIES
    • A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
    • A47J—KITCHEN EQUIPMENT; COFFEE MILLS; SPICE MILLS; APPARATUS FOR MAKING BEVERAGES
    • A47J27/00—Cooking-vessels
    • A47J27/14—Cooking-vessels for use in hotels, restaurants, or canteens
    • A47J27/16—Cooking-vessels for use in hotels, restaurants, or canteens heated by steam
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24C—DOMESTIC STOVES OR RANGES ; DETAILS OF DOMESTIC STOVES OR RANGES, OF GENERAL APPLICATION
    • F24C15/00—Details
    • F24C15/32—Arrangements of ducts for hot gases, e.g. in or around baking ovens
    • F24C15/322—Arrangements of ducts for hot gases, e.g. in or around baking ovens with forced circulation
    • F24C15/327—Arrangements of ducts for hot gases, e.g. in or around baking ovens with forced circulation with air moisturising

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Food Science & Technology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Nutrition Science (AREA)
  • Polymers & Plastics (AREA)
  • General Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Electrochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Drying Of Semiconductors (AREA)
TW097148769A 2008-02-26 2008-12-15 Surface treatment material for semiconductor manufacturing system and method for producing same TW200942643A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008044144 2008-02-26

Publications (1)

Publication Number Publication Date
TW200942643A true TW200942643A (en) 2009-10-16

Family

ID=40911493

Family Applications (1)

Application Number Title Priority Date Filing Date
TW097148769A TW200942643A (en) 2008-02-26 2008-12-15 Surface treatment material for semiconductor manufacturing system and method for producing same

Country Status (6)

Country Link
JP (1) JP5452034B2 (zh)
KR (1) KR20090092228A (zh)
CN (1) CN101521145A (zh)
DE (1) DE102009004402A1 (zh)
SG (1) SG155111A1 (zh)
TW (1) TW200942643A (zh)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI741320B (zh) * 2018-07-18 2021-10-01 日商日本發條股份有限公司 電漿處理裝置用構件
JP6585863B1 (ja) * 2019-01-23 2019-10-02 株式会社Uacj アルミニウム部材及びその製造方法
CN115449777A (zh) * 2022-09-28 2022-12-09 上海积塔半导体有限公司 半导体反应部件及其制造方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5192610A (en) 1990-06-07 1993-03-09 Applied Materials, Inc. Corrosion-resistant protective coating on aluminum substrate and method of forming same
US5069938A (en) 1990-06-07 1991-12-03 Applied Materials, Inc. Method of forming a corrosion-resistant protective coating on aluminum substrate
JPH07273053A (ja) 1994-03-31 1995-10-20 Tokyo Electron Ltd 処理装置及びアルミ系部材のコーティング方法
US5756222A (en) 1994-08-15 1998-05-26 Applied Materials, Inc. Corrosion-resistant aluminum article for semiconductor processing equipment
JP3608707B2 (ja) 1997-06-09 2005-01-12 株式会社神戸製鋼所 真空チャンバ部材及びその製造方法
AU8248198A (en) * 1997-07-11 1999-02-08 Magnesium Technology Limited Sealing procedures for metal and/or anodised metal substrates
JP3094000B2 (ja) 1997-09-12 2000-10-03 昭和電工株式会社 フッ化表面層を有する金属材料もしくは金属皮膜ならびにフッ化方法
JPH11229185A (ja) * 1998-02-13 1999-08-24 Kobe Steel Ltd 耐熱割れ性および耐食性に優れたＡｌ材料
JP3891815B2 (ja) 2001-10-12 2007-03-14 昭和電工株式会社 皮膜形成処理用アルミニウム合金、ならびに耐食性に優れたアルミニウム合金材およびその製造方法
JP3871544B2 (ja) 2001-10-12 2007-01-24 昭和電工株式会社 皮膜形成処理用アルミニウム合金、ならびに耐食性に優れたアルミニウム合金材およびその製造方法
JP4744099B2 (ja) * 2004-06-15 2011-08-10 株式会社アルバック 真空容器の内壁用のアルミニウム材の表面処理方法

Also Published As

Publication number Publication date
KR20090092228A (ko) 2009-08-31
JP2009228132A (ja) 2009-10-08
CN101521145A (zh) 2009-09-02
DE102009004402A1 (de) 2009-09-03
JP5452034B2 (ja) 2014-03-26
SG155111A1 (en) 2009-09-30

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