CN114937713B - Plasmon mid-infrared linearly polarized light narrow-band perfect absorption super-surface device - Google Patents
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Abstract
The invention relates to a plasmon mid-infrared linearly polarized light narrow-band perfect absorption super surface device which comprises a substrate layer, supermolecule units and a surface metal layer, wherein the supermolecule units are periodically arrayed on the substrate, and the surface metal layer is arranged on the substrate and the supermolecule units. The supermolecule unit comprises two upright posts which are arranged at a certain interval and a cross rod which is arranged on one side of the two upright posts, the two upright posts are consistent in shape, the height is sub-wavelength, the length direction of the cross rod is the same as the arrangement direction of the upright posts, the distance between the cross rod and the two upright posts is equal, the upright posts are cones, the radiuses of the cross sections of the upright posts gradually shrink from the base sides to the top sides of the upright posts, the height of the cross rod is smaller than that of the upright posts, and the longitudinal sections of the cross rods are semi-elliptical surfaces with consistent sizes; the device presents a narrow linewidth perfect absorption peak under the normal incidence condition of the mid-infrared polarized light, and the device is needed to be obliquely incident in comparison, so that the practicability and the usability of the device are greatly improved.
Description
Technical Field
The invention relates to the field of novel micro-nano photonic devices, in particular to a plasmon intermediate infrared linearly polarized light narrowband perfect absorption super-surface device.
Background
The optical super surface is a novel artificial two-dimensional microstructure thin-layer optical device, can realize the regulation and control of the amplitude, phase and polarization of an incident light field, has the characteristics of sub-wavelength thickness, multifunctional integration, simple preparation process and the like compared with the traditional three-dimensional metamaterial, and becomes a research hotspot in the field of international nanophotonics in recent years. In the nanoresonators, the narrow linewidth resonance curve means that the mode photons have a long lifetime, which significantly enhances the interaction of light with matter. Compared with a broadband resonance curve, the sensitivity of precise spectral analysis can be greatly improved (for example, an FP cavity has a very narrow resonance curve, and the detection sensitivity is higher compared with a relatively wide-spectrum device such as a Michelson interferometer). The metal plasmon resonance type super-surface binds the electromagnetic field intensity to the interface of metal and medium, has strong surface electric field enhancement effect, can obviously enhance the interaction of light and the surrounding environment material of the structure, and is widely applied to the research fields of surface Raman enhancement, refractive index sensing, biomolecule sensing, precise spectrum analysis and the like. However, the metal loss in the optical band inevitably widens the metal microstructure resonance curve, and the quality factor of the device is generally low (Q < 10), so that the sensitivity of the device is low, which is not favorable for practical application. Therefore, a new method is found for restraining or balancing the loss of the metal plasmon resonance type super surface, and the development of the plasmon resonance type super surface device with narrow line width has important practical application value.
Recently, bound states in the continuum in the spectrum (BIC) is applied to the research of plasmon resonance type super-surface, and some plasmon resonance type super-surface devices with excellent performance are designed. The previous work in this group proposed a perfect absorption resonance super-surface device based on the Accidental boundary states in the coherent mass and having a narrow line width and a high quality factor (Q value) in the momentum space, which is disclosed in Nano Letters (DOI:10.1021/acs.nanolett.0c01752). However, the super-surface requires that incident light must be incident at a specific angle to excite the accidental quasi-BIC mode, resulting in a perfect absorption spectrum with a narrow line width. In practical application, the requirement of 'oblique incidence' increases the complexity of an optical system, a multi-axis precision adjustment mechanical system is required to be introduced to accurately control the incidence and reflection angles of light and the angles of other optical elements, the optical path is complex and difficult to adjust, and meanwhile, the mechanical stability of the system is poor, which is not beneficial to the practical use of devices; when the light is incident perpendicularly, the incident light cannot be coupled into the BIC mode and is almost totally reflected.
Disclosure of Invention
The incident light vertical incidence device is reflected to the detection system to be received, the simplest and most efficient working mode of the optical system is provided, the complexity of the optical system can be greatly simplified, and the practicability and the usability of the device are greatly improved. Accordingly, a metal microstructure plasmon resonance type super-surface device is provided according to the Symmetry protected BIC principle (Symmetry protected substrates in the continuous). When the incident linearly polarized light is normally incident to the device, the reflection spectrum presents a narrow line width perfect absorption peak. The narrow-band absorption device overcomes the limitation that narrow-band perfect absorption can be realized only by oblique incidence, has a simple light path, is easy to adjust, and has higher practicability and usability. The method has potential application values in the aspects of optical filtering, refractive index sensing, spectral analysis, surface Raman enhancement, biomolecule detection, solar energy utilization and the like.
A plasmon mid-infrared linearly polarized light narrow-band perfect absorption super surface device comprises a substrate, a 'supermolecule' unit and a surface metal layer, wherein the 'supermolecule' unit is arranged on the substrate in a periodic array mode, and the surface metal layer is arranged on the substrate and the 'supermolecule' unit;
the supermolecule unit comprises two upright columns arranged at a certain interval and a cross rod arranged on one side of the two upright columns, the two upright columns are consistent in shape and have a subwavelength height, the length direction of the cross rod is the same as the arrangement direction of the upright columns, the distance between the cross rod and the two upright columns is equal, the upright columns are cone-like bodies, the radiuses of the cross sections of the upright columns gradually shrink from the base sides to the top sides of the upright columns, the height of the cross rod is smaller than that of the upright columns, and the longitudinal sections of the cross rod are semi-elliptical surfaces with consistent sizes;
a narrow-band perfect absorption peak occurs when the polarization direction of incident linearly polarized light is parallel to the substrate and perpendicular to the center lines of the two posts.
The incident linearly polarized light is intermediate infrared linearly polarized light, and the wavelength range of the incident linearly polarized light is 4-10 micrometers.
The thickness of the surface metal layer is larger than the skin depth of the mid-infrared linearly polarized light.
The surface metal layer is a gold layer, and the thickness of the gold layer is 100nm.
The number of the periodic arrangement of the supermolecule units in the transverse direction and the longitudinal direction is more than or equal to 10.
Preferably, the number of periodic arrangements of said "supramolecular" units in the transverse and longitudinal directions is equal to 10.
The supermolecule unit is formed by a femtosecond laser direct writing process by selecting a photoresist layer which is spin-coated on a substrate.
The radius of the upright is 0.3 micron, and the height of the upright is 1.7 micron; the width of the bottom surface of the short rod is 0.5 micron, and the height of the short rod is 0.6 micron.
The center distance of the two upright posts is 1.15 microns, and the cycle size of the supermolecule unit is 3.2 microns multiplied by 3.2 microns.
When the wavelength of the incident light is 4.783 microns and a narrow-band perfect absorption peak appears, the quality factor Q is approximately equal to 64, and the maximum value of the field enhancement factor of the sharp top of the upright post is (| E 2 /|E 0 | 2 ) max ≈ 12000 times.
The substrate is a silicon dioxide substrate.
Compared with the prior art, the technical scheme provided by the invention at least has the following beneficial effects:
the super-surface device has a simple structure and a simple processing technology, and can be prepared by utilizing the existing laser direct writing technology and atomic layer deposition technology. Under the condition of specified linear polarized light normal incidence, the reflected light of the super-surface device presents a narrow line width perfect absorption peak and has higher quality factors and strong electric field enhancement factors. Compared with the oblique incidence condition, the method greatly simplifies the detection light path, reduces the difficulty of light path debugging and improves the practicability, the usability and the mechanical stability of the system of the device under the condition of not increasing the complexity of manufacturing and processing the device.
Drawings
FIG. 1 is a schematic diagram of the structure of a "supramolecular" unit and a super-surface device according to an embodiment of the invention.
FIG. 2 is a schematic diagram of a process for fabricating a super-surface device in accordance with an embodiment of the present invention.
FIG. 3 is a schematic view of a test optical path of a super-surface device in accordance with an embodiment of the present invention.
FIG. 4 shows the simulation result of the absorption spectrum of the linearly polarized light in the x-axis direction at normal incidence of the super-surface device according to the embodiment of the invention.
FIG. 5 is a simulation result of electric field enhancement of a super-surface device in accordance with an embodiment of the present invention.
Fig. 6 is a schematic analysis diagram (polar analysis) of a narrow line width perfect absorption resonance curve of a super-surface device according to an embodiment of the present invention.
Fig. 7 is a diagram illustrating a reflection peak shift of a super-surface device according to an embodiment of the present invention applied to ambient refractive index sensing (n = 1.00-1.03).
FIG. 8 is an absorption spectrum diagram of a normal incidence y-axis linearly polarized light of a super-surface device in accordance with an embodiment of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings, and the described embodiments are only a part of the embodiments of the present invention, but not all of the embodiments. Based on the embodiments of the present invention, other embodiments obtained by persons of ordinary skill in the art without any creative effort belong to the protection scope of the present invention. The experimental methods described in the following examples are all conventional methods unless otherwise specified; the reagents and materials, unless otherwise indicated, are commercially available from a public disclosure.
Spatially relative terms, such as "below," "lower," "above," "over," "upper," and the like, may be used in this specification to explain the positioning of one element relative to a second element. These terms are intended to encompass different orientations of the device in addition to different orientations than those depicted in the figures.
In addition, terms such as "first", "second", and the like, are used to describe various elements, layers, regions, sections, and the like and are not intended to be limiting. The use of "having," "containing," "including," and the like, are open-ended terms that indicate the presence of stated elements or features, but do not exclude additional elements or features. Unless the context clearly dictates otherwise.
The novel plasmon super-surface structure provided by the invention can realize that mid-infrared linearly polarized light presents a narrow line width perfect absorption peak under the condition of normal incidence. As shown in FIG. 1, the super-surface device comprises a substrate, a periodic array of artificial "supramolecular" units disposed on the substrate, and a metal film layer disposed on the substrate and the "supramolecular" units. In this embodiment, the substrate is a silicon dioxide substrate, and the thickness of the silicon dioxide substrate is not limited. The periodic arrays of the supramolecular units are arranged on the silicon dioxide substrate, the larger the number of the transverse and longitudinal periods of the supramolecular units is, the better the number of the transverse and longitudinal periods of the supramolecular units is, the limited number of the periods is during actual processing, and when the number of the periodic arrays in the transverse and longitudinal directions is more than or equal to 10, the spectral curve is very close to an ideal value. In this example, the number of cycles of the "supramolecular" unit in the transverse and longitudinal directions is 10, and the arrangement is 10 rows and 10 columns, and fig. 1 shows a part of the arrangement of the array.
Firstly, a photoresist layer with a certain thickness is formed on a substrate, and then a 'supermolecule' unit structure is processed by adopting a femtosecond laser direct writing process to form 'supermolecule' units which are arranged in a periodic array. Each supermolecule unit consists of two identical upright columns and a cross rod, and the distance between the cross rod and the two upright columns is equal. As shown in fig. 1, in the "supramolecular" unit, two columns are located at the position of x =0 of the "supramolecular" unit along the direction of y axis, the center distance Δ y =1.15 microns between the two columns, the cross bar is located at the same side of the two columns, and the whole structure of the "supramolecular" unit is symmetrical about the plane where y =0 is located. The cross-section (i.e. xy-plane, as shown in fig. 1) of the pillar gradually decreases in radius from the base side to the side away from the base side (i.e. the tip side of the pillar), and the pillar as a whole is cone-like. The longitudinal cross-section of the cross-bar (i.e., xz-plane, as shown in fig. 1) is a semi-ellipsoid of uniform size. In this example, the base radius of the posts is 0.3 microns and the height H is 1.7 microns. As shown in fig. 1, the width of the bottom of the crossbar (along the x-axis) is 0.5 microns and the height h (along the z-axis) is 0.6 microns. The distance between the central lines of two upright columns of the supermolecule unit and the central line of the cross bar is 0.45 micrometer. The "supramolecular" unit size was 3.2 microns by 3.2 microns. The device structure of the invention is arranged by 'supermolecular' units in a periodic array in an x plane and a y plane, and the number of cycles in the transverse direction and the longitudinal direction is more than or equal to 10. In one embodiment, only a portion of the device array structure (5 × 5) is schematically presented in fig. 1. The thickness of the supermolecule unit structure and the metal film layer covered on the surface of the substrate is larger than the skin depth of incident light, so that the light cannot be transmitted. In this embodiment, the metal film is a gold film with a thickness of 100nm.
FIG. 2 is a schematic diagram of a process for fabricating a super-surface device according to the present invention. As shown, a "supramolecular" cell array structure is first processed on a glass (silica) substrate using a femtosecond laser processing technique, and then a gold film layer having a thickness of about 100nm, which is greater than a skin depth of an operating wavelength of incident light, is deposited on a surface of the "supramolecular" cell array structure using an atomic layer deposition technique for preventing transmission of the incident light.
FIG. 3 is a schematic diagram of a typical device test optical path of the super-surface device. After the incident light is normally incident to the super-surface device through the objective lens, the reflected light is received through the objective lens and respectively enters the photoelectric detector and the CCD for receiving. The light path has a simple structure, and compared with an oblique incident light path, the light path greatly reduces the complexity of the use of optical elements in the light path and the adjustment of a system, and is easier to apply to an actual working scene.
Fig. 4 shows the simulation result of the absorption spectrum of normal incidence vertically linearly polarized light (polarization in the x direction). It can be seen that there is a narrow band resonance absorption peak around 4.783 microns, with higher quality factor and spectral resolution, meaning that the resonance mode has a longer photon lifetime, which will greatly enhance the interaction of light and substance.
FIG. 5 shows the simulation result of the electric field enhancement at 4.783 microns of the resonant absorption peak. Maximum electric field enhancement (| E |/| E) 0 |) max is 109.22 times, the maximum value of light intensity enhancement (| E |) 2 /|E 0 | 2 ) max is 11929.88 times, and the super-surface device can provide a detection mode with higher sensitivity for the fields of refractive index sensing, biosensing and the like.
Fig. 6 is a schematic analysis diagram (polar analysis) of a narrow line width perfect absorption resonance curve. In fig. (a), the reflection spectrum is shown at an ambient refractive index n =1. Graph (b) is a multipole analysis of the device operating at a resonant wavelength of 4.783 microns showing the more dominant scattering component. It can be seen that, in each component, the scattering intensity I _ Pz of the electric dipole along the z direction and the scattering intensity I _ Tz of the ring magnetic dipole along the z direction are far greater than those of other electromagnetic components, and are the main scattering components of the system. In the graph (c), the phase relationship between the electric dipole z-direction scattering intensity I _ Pz and the ring magnetic dipole z-direction scattering intensity I _ Tz is uniform. Let Ep and Hp be electric dipole electric field and magnetic field components, respectively, and E be annular dipole electric field and magnetic field components T And H T The electric field of the main scattering component of the resonance mode can be obtained according to the superposition principleAnd the magnetic field is:
in the above formula, r is a position vector, P is an electric dipole moment, T is a ring magnetic dipole moment, k is a wave number, c is an optical velocity, ω is an angular frequency, and i is an imaginary unit.
As can be seen from equations (1) and (2), when (P-ikT) =0 is satisfied, that is: the electric dipole and the ring magnetic dipole have equal strength and have the same phase, and the electric dipole and the ring magnetic dipole have destructive interference and have no radiation to a far field in the z direction to form a narrow-band resonance absorption spectral line. The method has potential application values in the aspects of refractive index sensing, spectral analysis, surface Raman enhancement, biomolecule detection, solar energy utilization and the like.
Fig. 7 shows the reflection peak shift of the device applied to ambient refractive index sensing (n = 1.00-1.03). In order to verify that the device has good environmental sensing and refractive index sensing capabilities, the moving conditions of resonant peaks of the device with environmental refractive indexes n =1.00, n =1.01, n =1.02 and n =1.03 are shown in the figure, and simulation results show that the device has good environmental refractive index detection capability.
FIG. 8 is a graphical representation of the absorption lines for normal incidence horizontally polarized light (y-direction polarization). The figure shows that the linearly polarized light in the y direction also has a resonance absorption peak at the working wavelength of 6.289 microns, but the quality factor is relatively low (Q ≈ 20).
The above embodiments are preferred embodiments of the present invention, but the present invention is not limited to the above embodiments, and any other changes, modifications, substitutions, combinations, and simplifications which do not depart from the spirit and principle of the present invention should be construed as equivalents thereof, and all such changes, modifications, substitutions, combinations, and simplifications are intended to be included in the scope of the present invention.
Claims (5)
1. A plasmon mid-infrared linearly polarized light narrow-band absorption super-surface device is characterized by comprising a substrate, 'supermolecule' units and a surface metal layer, wherein the 'supermolecule' units are periodically arrayed on the substrate, and the surface metal layer is arranged on the substrate and the 'supermolecule' units;
the supermolecule unit comprises two upright columns arranged at a certain interval and a cross rod arranged on one side of the two upright columns, the two upright columns are consistent in shape and have a subwavelength height, the length direction of the cross rod is the same as the arrangement direction of the upright columns, the distance between the cross rod and the two upright columns is equal, the upright columns are cone-like bodies, the cross section radiuses of the upright columns gradually shrink from the base side to the top end side of the upright columns, the height of the cross rod is smaller than that of the upright columns, the longitudinal sections of the cross rods are semi-elliptical surfaces with consistent sizes, the number of the supermolecule unit in the transverse direction and the longitudinal direction is larger than or equal to 10, the radius of the bottom surfaces of the upright columns is 0.3 micrometers, and the height of the upright columns is 1.7 micrometers; the width of the bottom surface of the cross rod is 0.5 micron, and the height of the bottom surface of the cross rod is 0.6 micron;
the thickness of the surface metal layer is larger than the skin depth of the intermediate infrared linearly polarized light, a gold layer is selected, and the thickness of the gold layer is selected to be 100nm;
when the polarization direction of incident linearly polarized light is parallel to the substrate and is vertical to the central lines of the two upright posts, a narrow-band absorption peak appears, and the incident linearly polarized light is intermediate infrared linearly polarized light with the wavelength range of 4-10 micrometers.
2. A device according to claim 1, wherein the number of periodic alignments of said "supramolecular" units in the transverse and longitudinal directions is equal to 10.
3. The super-surface device according to claim 1 or 2, wherein the "supramolecular" units are formed by a femtosecond laser direct writing process using a photoresist layer spin-coated on a substrate.
4. A device according to claim 1 or 2, wherein the distance between the centers of the two pillars is 1.15 microns, and the "supramolecular" unit period size is 3.2 microns by 3.2 microns.
5. The super surface device of claim 1 or 2, wherein the substrate is a silicon dioxide substrate.
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| JP4887502B2 (en) * | 2005-02-17 | 2012-02-29 | 国立大学法人北海道大学 | Metal structure and manufacturing method thereof |
| JP5622215B2 (en) * | 2013-10-29 | 2014-11-12 | 独立行政法人産業技術総合研究所 | Microplate having periodic structure, surface plasmon excitation enhanced fluorescence microscope, fluorescence microplate reader using the same, and method for detecting specific antigen-antibody reaction |
| CN111308588B (en) * | 2020-03-23 | 2022-03-25 | 中北大学 | Multi-band perfect absorber based on surface plasmons |
| CN111552014B (en) * | 2020-05-17 | 2022-04-29 | 桂林电子科技大学 | Horizontal MIM grid dot matrix plasmon absorber |
| CN114166799A (en) * | 2021-11-30 | 2022-03-11 | 大连海事大学 | Refractive index sensor based on asymmetric nanostructure perfect absorber, sensing test device and method |
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