CN101294806B - Surface plasma excimer slow-ray gyroscope and method for producing the same - Google Patents

Abstract

A surface plasmon slow-light gyroscope and a preparation method thereof are provided. The surface plasmon waveguide transmission signal is adopted so as to realize the high sensitivity of the slow-light gyroscope. The surface plasmon slow-light gyroscope includes an interference type surface plasmon waveguide optic gyroscope and a resonance type surface plasmon waveguide optic gyroscope, wherein the interference type waveguide structure gyroscope is composed of an open-ring waveguide and the resonance type waveguide structure gyroscope is composed of a closed-ring waveguide. The surface plasmon slow-light gyroscope is characterized in that light-wave signal is replaced by the surface plasmon wave and optical waveguide loop is replaced by the surface plasmon waveguide loop with a structureof metallic nanometer defect, nano-particle, nano-wire, nano-film or nano-lattice. The preparation process is described as follows: a. the open-ring metallic nano-wire is introduced to the interference type surface plasmon slow-light gyroscope, so as to form the surface plasmon waveguide structure, and further form the signal channel in the optical gyroscope; and b. the closed-ring metallic nano-wire is introduced to the resonance type surface plasmon slow-light gyroscope, so as to form the surface plasmon waveguide structure and further form the signal channel in the optical gyroscope.

Description

Surface plasma excimer slow-ray gyroscope and preparation method thereof

Technical field

The present invention proposes a kind of optical gyroscope implementation of waveguiding structure, particularly realizes high-precision optical gyroscope with surface plasma excimer and slower rays characteristic thereof.

Background technology

Optical gyroscope is a kind of novel photoelectric gyroscope based on the Sagnac effect, the Sagnac effect is a kind of general correlation effect of propagates light in the closed loop light path of relative inertness spatial rotation, be to be divided into the light wave that two bundle reverse directions are propagated after light beam enters system, they in phase return the beam splitting point through same optical path after propagating in the opposite direction.If wind axis perpendicular to plane, light path place, exist rotational angular velocity with respect to inertial space, the light path difference that the light beam that then positive and negative direction is propagated is passed by, thus produce optical path difference.Can prove that in theory its optical path difference is directly proportional with the angular velocity of rotation.Thereby, know optical path difference and phase information correspondingly, can record corresponding angular velocity.

Optical gyroscope has experienced the evolution of the first generation " laser gyro " and the second generation " optical fibre gyro " and the third generation " integrated optical gyroscope " in notion proposition nearly 30 years by now.At present " laser gyro " and " optical fibre gyro " represent medium accuracy and high-precision inertia angular-rate sensor respectively, all, in various navigation field such as auto navigation, aircraft navigation, obtained widespread use to realize ripe commercialization.

In recent years, along with the development of photoelectron technology, the progress of integrated optics and optoelectronic device production technology, Chinese scholars has proposed third generation optical gyroscope, i.e. " integrated optical gyroscope ".At present, external many well-known research institution is all in the research dynamics that strengthens integrated optical gyroscope.Integrated optics is being represented the developing direction of advanced optical electron device as an optoelectronic frontier.Lose the ripple signal by integrated optical waveguide and prepare the optical waveguide gyro, each photoelectron subassembly height is integrated, utilize the planar technology production line to realize producing in batches, can significantly improve the production rate and the stability of gyro, and reduce cost and price.

Surface plasma excimer (surface plasmon polaritons-SPPs) is the electromagnet mode that interacts and produce between light wave and the transportable surface charge (as the free electron in the metal), can realize propagating in the waveguide that the metal and the dielectric substance of ad hoc structure are formed.The SPPs mould has the wave number greater than photon under the same frequency, its velocity of propagation is determined jointly by the structure of metal and dielectric physical parameter (as specific inductive capacity), metal surface, by suitable design, can reduce SPPs effectively in different interval propagation phase velocities, even realize the static of light signal.The research of SPPs has reached the history in more than 100 year, owing to be subjected to make in early days the restriction of the technological level of electronic component, process micron, the element and the loop of nano-scale, and SPPs does not cause the extensive concern of scientific circles.In the last few years, along with the rapid progress of technology, preparation micro-nano fine structure had not become technical limitation, became focus again based on the surface plasma Study on Effect.Devices such as SPPs coupling mechanism, modulator, long Distance Transmission waveguiding structure all have relevant experiment report.

Summary of the invention

Technical matters: the objective of the invention is to propose a kind of surface plasmon wave guide that utilizes and realize optical gyroscope and preparation method thereof, with the distinctive slower rays characteristic of surface plasma SPPs ripple, realize high-precision optical gyroscope, defectives such as it is low to solve existing integrated light guide Gyro Precision, and volume is big.

Technical scheme: surface plasma excimer slow-ray gyroscope of the present invention is characterized in that this surface plasma excimer SPPs optical gyroscope comprises interfere type waveguide gyro and mode of resonance waveguide gyro; Described optical gyroscope comprises SPPs waveguide, SPPs coupling mechanism, detector, SPPs metal waveguide, and wherein, the SPPs waveguide is connected with detector with the SPPs metal waveguide by the SPPs coupling mechanism.

The SPPs waveguide of described interfere type waveguide gyro is the SPPs waveguide of an open loop shape, and the SPPs coupling mechanism is a beam splitter, and detector is positioned on the SPPs metal waveguide.The SPPs waveguide of described mode of resonance waveguide gyro is the SPPs waveguide of a closed loop, and an end of SPPs coupling mechanism connects the SPPs waveguide, and the other end connects two SPPs metal waveguides respectively, all is provided with a detector on each SPPs metal waveguide.The SPPs metal waveguide is the metal nanoparticle of periodicity projection, or nanometer defective, or one-dimensional nano line, two-dimensional nano film, or nano-dot matrix, described metal is included in the metal that visible light, near infrared light wave band present negative permittivity, and the dielectric substance that matches comprises the high organic polymer material of optical transparence, glass material, metal oxide materials.

Adopt vacuum vapour deposition or whirl coating or vacuum sputtering to prepare dielectric and metal nanometer thin film, utilize Mechanical Method or chemical etching method or laser hologram photoetching technique or plasma etching method, metallic film is carried out retrofit, preparation has metal nano defective, nano particle, nano wire, nano thin-film, the nano-dot matrix loop of ad hoc structure, form SPPs waveguide, SPPs coupling mechanism, detector, SPPs metal waveguide, make surface plasma excimer slow-ray gyroscope.

Beneficial effect: the present invention has following advantage compared with prior art:

1, the present invention adopts SPPs ripple signal to replace the normal optical signal to realize optical gyroscope, realizes traditional integrated light guide gyro high sensitivity characteristic that is beyond one's reach.With the resonance type optical gyroscope is example: its limiting snesibility can be by following formulate:

$\mathrm{\&delta;\&Omega;}\&cong;\frac{\mathrm{\&lambda;L}}{4\mathrm{<figure-callout\; id="2"\; label="A"\; filenames="S2008100253279E00022.png,S2008100253279E00032.png"\; state="\{\{state\}\}">A</figure-callout>}}\frac{\sqrt{2}\mathrm{\&delta;}{f}_{1/2}}{\mathrm{SNR}}=\frac{\mathrm{\&lambda;}}{2\mathrm{<figure-callout\; id="2"\; label="R"\; filenames="S2008100253279E00022.png,S2008100253279E00032.png"\; state="\{\{state\}\}">R</figure-callout>}}\frac{\sqrt{2}{\mathrm{\&delta;f}}_{1/2}}{\mathrm{SNR}}---\left(1\right)$

Half high value of harmonic peak: $T_{\mathrm{half}}=\frac{T_{\max }+T_{\min }}{2}---\left(2\right)$

The harmonic peak halfwidth:

${\mathrm{\&delta;f}}_{1/2}=\frac{c}{{2n}_{\mathrm{eff}}\mathrm{\&pi;L}}[2\mathrm{\&pi;}-{2\cos }^{-1}\left(\frac{2M\sqrt{1-K}}{M^2(K-1)-1}\right)]---\left(3\right)$

The signal to noise ratio (S/N ratio) of detection system:

$\mathrm{SNR}=\sqrt{\frac{{\mathrm{\&eta;t}}_0{I}_1}{2\mathrm{hf}}}\frac{T_{\max }-T_{\min }}{\sqrt{T_{\max }}}---\left(4\right)$

In the formula: T is the transmission coefficient of resonant ring, and A is the area of ring cavity, η and t ₀Be the quantum coefficient and the integral time of photo-detector, h is a Planck's constant, and K is the coupling ratio of resonant ring, and M is ring internal loss coefficient.

Following relation is arranged between the velocity of propagation of SPPs ripple and same frequency light wave:

$C_{\mathrm{spp}}=C\sqrt{\frac{1}{{\mathrm{\&epsiv;}}_d}+\frac{1}{{\mathrm{\&epsiv;}}_m}}---\left(5\right)$

ε _d, ε _mBe respectively the specific inductive capacity of dielectric substance and metal material, work as ε _m→-1 o'clock, C _Spp→ 0, with formula (5) substitution formula (1)-(2) as can be known, when by controlling ε effectively _d, ε _mMake C _SppDuring＜＜C, the limiting snesibility of gyro will realize the raising (raising that reduces to represent limiting snesibility of δ Ω numerical value) on the order of magnitude.Thereby realize the optical waveguide high sensitivity that gyro is beyond one's reach of transmitting optical signal.

For the interfere type optical gyroscope, the same and light velocity of its limiting snesibility keeps relation in proportion, and its principle is identical with resonance type optical gyroscope, also can be by transmitting SPPs ripple signal realization high sensitivity.

2, since the sensitivity of gyro and the radius of resonant ring be directly proportional, the present invention adopts SPPs ripple signal to replace the normal optical signal to realize optical gyroscope, under equal sensitivity, the radius of surface plasma slow-ray gyroscope resonant ring will reduce greatly, this waveguiding structure, may realize also comprising that light source, detector, optical-waveguide-type gyro and all optical components such as beam splitter, phase place and frequency modulator are all integrated, thereby constitute the integrated optical gyroscope of a brand-new meaning.Therefore, it can realize the raising of gyro sensitivity and reducing of gyro size simultaneously.

Description of drawings

Fig. 1 is an interfere type surface plasma wave guide structure optical gyroscope synoptic diagram.

Fig. 2 is a mode of resonance surface plasma wave guide structure optical gyroscope synoptic diagram.

Fig. 3 is the plan structure synoptic diagram of the SPPs waveguide of metal nanoparticle formation.

Fig. 4 is along the waveguide direction, metal level nanometer defective and metal nanoparticle structural representation.

Fig. 5 is the one-dimensional metal nano wire, the plan structure synoptic diagram of the film formed SPPs waveguide of two-dimensional metallic nanometer thin.

Fig. 6 is the waveguide cross-section direction, one-dimensional metal nano wire, the structural representation of two-dimensional metallic nano thin-film.

Fig. 7 is the plan structure synoptic diagram of the SPPs waveguide of metallic nanodots formation one-tenth.

Fig. 8 is the structural representation of the oblique 45 ° of transmission direction metal nano dot matrix of waveguide cross-section direction, waveguide.

Particle 31, metal level nanometer defective 32, one-dimensional metal nano wire 33, the two-dimensional metallic that has substrate 1, dielectric layer 2, SPPs metal waveguide 3, metal nano projection to form among the above figure received film 34, metal nano dot matrix 35, open loop SPPs waveguide 41, closed loop SPPs waveguide 42, SPPs coupling mechanism 43, SPPs beam splitter 44, detector 45.

Embodiment

Technical scheme of the present invention is achieved in that on structure traditional optical fibre gyro can be divided into interfere type and resonator fiber optic gyroscope.Its core is made up of the optical fiber loop of open loop or closed loop, and in order to the transmission lightwave signal, the key technical index of gyro---limiting snesibility is determined parameters such as the transmission spectrum of light signal, optical wavelength, phase velocities jointly by optical fiber loop.Same, surface plasma excimer slow-ray gyroscope, its transmission waveguide is made up of the metal and the dielectric substance mixing of micrometer structure, transmission signals is the SPPs ripple of phase velocity much smaller than the same frequency lightwave signal, also can utilize the detection principle identical with optical fibre gyro, suitable, counterclockwise SPPs ripple signal is surveyed, realized interfere type or mode of resonance optical gyroscope.

Surface plasma excimer slow-ray gyroscope of the present invention, at visible light, the lightwave signal of near-infrared band, choose suitable low-loss metal material thin-layer (as gold, silver, copper etc.), cooperate suitable dielectric substance (as silicon dioxide, organic polymer etc.), surface structure by the optimal design thin metal layer, regulate the specific inductive capacity of dielectric substance, realize low-loss, the SPPs ripple signal transmission of long Distance Transmission, reduce its phase velocity simultaneously, thereby realized having highly sensitive surface plasma excimer slow-ray gyroscope, this surface plasma excimer slow-ray gyroscope comprises interfere type and mode of resonance slow-ray gyroscope; Interfere type surface plasma wave guide structure optical gyroscope is that an open-ring waveguide constitutes, mode of resonance surface plasma wave guide structure optical gyroscope is that a closed loop waveguide resonant cavity and a SPPs coupling mechanism constitute, wherein the SPPs coupling mechanism is positioned at a side of resonator cavity, the SPPs ripple is carried out beam splitting, be used to regulate the intensity that enters SPPs ripple signal in the resonator cavity.Described SPPs waveguide comprises various at optical band presents the metal material of negative permittivity characteristic and the dielectric substance with positive specific inductive capacity that is complementary is with it formed metal nano defective, nano particle, nano-dot matrix with different structure and geometrical property, or one-dimensional nano line, two-dimensional nano membrane structure.

The preparation method of surface plasma excimer slow-ray gyroscope of the present invention, the metal nano defective of employing manufacturing cycle ad hoc structure on thin dielectric film, or nano particle, or nano wire, or nano thin-film, or nano-dot matrix formation loop, can utilize the very ripe microelectronics manufacture of development on silicon chip or glass substrate, to make.Promptly utilize vacuum vapour deposition or methods such as whirl coating or vacuum sputtering to prepare dielectric and metal nanometer thin film, utilize Mechanical Method or chemical etching method or laser hologram photoetching technique or plasma etching method, preparation to have the metal nano line loop of ad hoc structure, make surface plasma excimer slow-ray gyroscope.

The manufacture craft of preparation SPPs waveguide is:

A, for interfere type surface plasma slow-ray gyroscope, by making the metal nano defective of open loop, or nano particle, or nano wire, or nano thin-film, or nano-dot matrix, to form the open-ring waveguide transmission path of surface plasma excimer, thereby the open loop light-path in the formation optical gyroscope is made the optical gyroscope of leading preparation with surface plasma wave;

B, for resonant mode surface plasma slow-ray gyroscope, by making the metal nano defective of closed loop, or nano particle, or nano wire, or nano thin-film, or nano-dot matrix, to form the resonance loop of surface plasma excimer, thereby the closed loop light circuit in the formation optical gyroscope is made the optical gyroscope of leading preparation with surface plasma wave.

It below is the mode that adopts surface plasma excimer slow-ray gyroscope.

The principle of work of interfere type and mode of resonance optical gyroscope makes light beam propagate in the SPPs of ring type structure waveguide in opposite direction in ring-like metal waveguide all based on the Sagnac effect.

The metal nanoparticle 31 of optical gyroscope employing on the thin layer of dielectric 2 of substrate 1 with the surface plasmon wave guide preparation, or metal level nanometer defective 32, or one-dimensional metal nano wire 33, or two-dimensional metallic nano thin-film 34, or metal nano dot matrix 35 is made the SPPs metal waveguide 3 that can guide low-loss, low phase velocity, thereby realized surface plasma excimer slow-ray gyroscope, comprised interfere type and mode of resonance surface plasma excimer slow-ray gyroscope; Interfere type SPPs waveguiding structure optical gyroscope is open loop SPPs waveguide 41, SPPs beam splitter 44, detector 45 formations, mode of resonance SPPs waveguiding structure optical gyroscope is that closed loop SPPs waveguide 42, SPPs coupling mechanism 43, two detectors 45 constitute, wherein SPPs coupling mechanism 43 is positioned at a side of closed loop optical waveguide 42, and two detectors 45 are connected to two output waveguides 3.

The implementation method that is used to reduce the SPPs phase velocity of wave is the sectional dimension by design metal nanometer line, nano thin-film, or introducing periodicity nano-dot matrix structure, at incident light wave, select the thin layer of dielectric of suitable specific inductive capacity to match, realize the long Distance Transmission of low-loss and the slower rays transport property of SPPs ripple simultaneously.

The specific implementation method of SPPs coupling mechanism and SPPs beam splitter is to combine having the metal nanoparticle of specific period structure or metal grating structure and SPPs waveguide; by temperature or extra electric field dielectric specific inductive capacity is regulated, realized meeting the coupling ratio and the splitting ratio of design needs.

Employing prepares SPPs waveguide and related device in the method that the thin dielectric film surface increases metal nanometer line, be that vacuum vapour deposition or methods such as whirl coating or vacuum sputtering prepare dielectric and metal nanometer thin film, utilize Mechanical Method or chemical etching method or laser hologram photoetching technique or plasma etching method, metallic film is carried out retrofit, preparation has the metal nano defective of ad hoc structure, or nano particle, or nano-dot matrix, or nano wire, or nano thin-film, form loop, the preparation surface plasma excimer slow-ray gyroscope.

For example, utilize whirl coating on glass substrate material, to make polymethyl acrylate (PMMA) film that the surface is even, optical transparence is good, utilize vacuum vapour deposition to make the silver layer of nano thickness at the PMMA film surface, by the plasma etching method, silver layer is processed, make the one dimension nano silver wire of ad hoc structure, form the endless metal waveguiding structure of guiding SPPs ripple transmission.

Again for example, utilize whirl coating on silicon substrate material, to make polycarbonate (PC) film that the surface is even, optical transparence is good, utilize vacuum vapour deposition to make the gold layer of nano thickness at the PC film surface, utilize the laser hologram photoetching technique, on the gold layer, inscribe out metal nano defective, form the endless metal waveguiding structure of guiding SPPs ripple transmission with cyclic array structure.

The manufacture craft of interfere type, mode of resonance surface plasma excimer slow-ray gyroscope is:

1, to backing material clean, polishing, surfaceness is 10 nanometer scale.

2, utilize whirl coating, preparation one deck thin dielectric film is handled film surface by the reactive ion etching method, makes the thickness of thin dielectric film meet the index of design needs.By the method for high temperature heating, reach the glass temperature of dielectric substance, be used to reduce the roughness of film surface.

3, utilize controlled vacuum vapour deposition, the even metallic film of evaporation one layer thickness on the thin layer of dielectric that processes.

4, cover mask, sample is carried out laser lithography, make metal and receive with SPPs waveguiding structure

5, rice lattice wave guide structure forms the mode of resonance surface plasma excimer slow-ray gyroscope that has the interfere type surface plasma excimer slow-ray gyroscope of open loop structure or have closed loop configuration.Or utilize the mask of SPPs waveguiding structure, sample is carried out plasma etching, make the metal nanometer line waveguiding structure, form the mode of resonance surface plasma excimer slow-ray gyroscope that has the interfere type surface plasma excimer slow-ray gyroscope of open loop structure or have closed loop configuration.

Claims (5)

1. a surface plasma excimer slow-ray gyroscope is characterized in that this surface plasma excimer slow-ray gyroscope comprises interfere type waveguide gyro and mode of resonance waveguide gyro; Described slow-ray gyroscope comprises SPPs waveguide (41), SPPs coupling mechanism (43,44), detector (45), SPPs metal waveguide (3), wherein, SPPs waveguide (41) is connected with detector (45) with SPPs metal waveguide (3) respectively by SPPs coupling mechanism (43,44).

2. according to the described surface plasma excimer slow-ray gyroscope of claim 1, the SPPs waveguide (41) that it is characterized in that described interfere type waveguide gyro is the SPPs waveguide of an open loop shape, SPPs coupling mechanism (44) is a beam splitter, and detector (45) is positioned on the SPPs metal waveguide (3).

3. according to the described surface plasma excimer slow-ray gyroscope of claim 1, the SPPs waveguide (41) that it is characterized in that described mode of resonance waveguide gyro is the SPPs waveguide of a closed loop, one end of SPPs coupling mechanism (43) connects SPPs waveguide (41), the other end connects two SPPs metal waveguides (3) respectively, all is provided with a detector (45) on each SPPs metal waveguide (3).

4. according to claim 1 or 2 or 3 described surface plasma excimer slow-ray gyroscopes, it is characterized in that metal nanoparticle (31), nanometer defective (32), one-dimensional nano line (33), two-dimensional nano film (34) or the nano-dot matrix (35) of SPPs metal waveguide (3) for the periodicity projection, described metal is included in the metal that visible light, near infrared light wave band present negative permittivity, comprises the high organic polymer material of optical transparence, glass material or metal oxide materials with the dielectric substance (2) of SPPs metal waveguide (3) coupling.

5. preparation method who is used for the described surface plasma excimer slow-ray gyroscope of claim 1, it is characterized in that adopting vacuum vapour deposition, or whirl coating, or vacuum sputtering prepares dielectric and metal nanometer thin film, utilize Mechanical Method, the chemical etching method, laser hologram photoetching technique or plasma etching method are carried out retrofit to metallic film, preparation has the metal nano defective of ad hoc structure, nano particle, nano wire, nano thin-film or nano-dot matrix loop, form SPPs waveguide (41), SPPs coupling mechanism (43,44), detector (45), SPPs metal waveguide (3) is made surface plasma excimer slow-ray gyroscope.

Images