CN110926667A - Pressure sensing device based on asymmetric periodic surface plasmon lattice resonance - Google Patents
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
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Abstract
The invention relates to a pressure sensor based on asymmetric periodic surface plasmon lattice resonance, which comprises a lower PDMS substrate and a nano-structure unit array positioned above the upper PDMS substrate, wherein the nano-structure unit is formed by closely laminating and overlapping a top metal ridge, a middle medium layer and a bottom metal ridge which are sequentially arranged from top to bottom; in a plane parallel to the lower PDMS substrate, the array period parameter Lx of the nanostructure unit along the x direction and the array period parameter Ly along the y direction are different from each other. External pressure acts on the lower-layer PDMS substrate, so that the surface plasmon resonance wavelength is changed, and a pressure signal is converted into an optical signal for detection. The optical device structure has a high quality factor, can realize accurate detection of micro deformation pressure, and has less limitation on the structure size and wider application range of sensing.
Description
Technical Field
The invention belongs to the technical field of integrated optics and pressure sensing, and particularly relates to a pressure sensing device based on asymmetric periodic surface plasmon polariton lattice resonance.
Background
Localized Surface Plasmon Resonances (LSPRs) supported by a single metal nanostructure have been widely used in the technical fields of spectroscopy and sensing due to their local electromagnetic field enhancement in deep sub-wavelength volumes. However, LSPRs also have problems of low quality factor and limited enhancement of local field, and there is a strong need to find surface plasmon lattice resonances with lower radiation loss, higher quality factor and stronger local field to meet the application. Currently, the technical end of demand places increasingly higher demands on the performance of the sensors. The miniaturization, high integration and high quality factor of the sensor become important reference indexes for designing a novel sensor. Plasmon surface lattice resonances supported by arrays of metal nanostructures are attractive in a variety of applications today including biochemical sensors, nonlinear optics, due to the narrow linewidths and enhanced local fields exhibited. With the development of nanotechnology, the novel nano optical sensor designed by fusing the optical and optical fiber sensor with nanotechnology has excellent sensing performance and can meet the index requirements of the novel sensor more and more.
Patent CN110441843A discloses an optical device based on surface plasmon lattice point resonance. The array is periodically and uniformly distributed and can be applied to the field of pressure sensing. Although the structure of the optical sensing device has superior performance in a uniform periodic array distribution and a non-uniform medium environment, the following problems still need to be solved.
1. The device structure is implemented under the conditions of non-uniform medium environment and symmetrical periodic array distribution, and has strict requirements on the equal period of the nano-pillar array structure of the device in the x direction and the y direction, so that the pressure measurement can only be carried out on the uniform environment with equal pressure in the x direction and the y direction, the pressure in the single x direction or the y direction cannot be measured, and the deformation quantity generated when the substrate of the scheme is subjected to the pressure is small, so that the variation period of the substrate is limited, the transverse pressure measurement cannot be supported, and the application range of the substrate is limited.
2. The quality factor of the device structure at vertical incidence still cannot meet the high resolution requirement that the micro-pressure rapidly changes in a small range under the specific inhomogeneous medium environment. The quality factor of the patent CN110441843A can reach 62 at most under the excitation of the space visible light direct incidence condition, and a higher quality factor is needed in the fields such as liquid micro-pressure sensing measurement and the like which need fine measurement.
The pressure sensor of narrow-band surface plasmon lattice resonance under the asymmetric period with high quality factor can effectively solve the problems.
Disclosure of Invention
Aiming at the defects in the prior art, the invention provides a pressure sensor based on asymmetric periodic surface plasmon lattice resonance, which adopts the pressure sensing technology of surface plasmon lattice resonance to realize the detection of tiny pressure. The core part of the pressure sensor is based on the structural design of a Metal-dielectric-Metal (MIM) nano array, and the micro pressure change on the surface of a sensing device is represented by using reflection spectra of different array periods in the structure so as to achieve the purpose of high-performance sensing. The optical device structure improves the performance and the application range of a measuring system, and can realize higher quality factor (Q value) under the medium environment with asymmetric period and asymmetric (non-uniform).
Specifically, the pressure sensor based on the asymmetric periodic surface plasmon lattice resonance comprises a lower Polydimethylsiloxane (PDMS) substrate and a nanostructure unit array positioned above the lower PDMS substrate, wherein the coordinate axis is set to be vertical to the x direction and the y direction, the x direction and the y direction are parallel to the lower PDMS substrate, and the z direction is vertical to the lower PDMS substrate; the nano-structure unit is formed by closely overlapping a top metal ridge, a middle medium layer and a bottom metal ridge which are sequentially arranged from top to bottom; the top metal ridge, the middle dielectric layer and the bottom metal ridge have the same cross section shape parallel to the lower PDMS substrate; the top metal ridge and the bottom metal ridge are made of the same material; the nanostructure units are respectively arranged above the lower-layer PDMS substrate in an array mode along the x direction and the y direction, and the array period parameter Lx along the x direction is different from the array period parameter Ly along the y direction.
Further, it is preferable that when Lx is 450nm, the Ly range is 200-400 nm; or when the Ly is 450nm, the Lx range is 200-450 nm.
Preferably, the refractive index of the lower PDMS substrate is 1.52, the middle dielectric layer is silicon dioxide with a refractive index equal to 1.45, and the top metal ridge and the bottom metal ridge are gold, silver, or aluminum.
Further, the cross-sectional shapes of the top metal ridge, the middle dielectric layer and the bottom metal ridge parallel to the lower PDMS substrate may be square. The sides of the square are preferably 180 nm.
The width and length variation ranges of the top metal ridge, the middle dielectric layer and the bottom metal ridge can be 60 nm-100 nm. The thickness variation range of the top metal ridge and the bottom metal ridge is 130 nm-150 nm, and the thickness variation range of the middle medium layer is 140 nm-180 nm. Further preferably, the thickness of the top metal ridge and the bottom metal ridge is 140nm, and the thickness of the intermediate medium layer is 160 nm.
Correspondingly, the invention also provides a pressure detection system using the pressure sensor, which comprises the pressure sensor, an optical fiber, a coupler, a demodulation system, a light source and a data processing system; the light source transmits light to the position above the pressure sensor through optical fiber coupling, and the light is vertically incident on the sensor array structure; when the lower polydimethylsiloxane substrate in the pressure sensor is subjected to transverse pressure, the period of the nanostructure unit array is changed, the optical signal carrying the pressure information is reflected back to the optical fiber and reaches a demodulation system through coupling, the optical signal carrying the pressure information is demodulated through the demodulation system to obtain the relation between the electric field strength and the pressure, and finally, a corresponding pressure value is obtained through calculation of a data processing system.
Further, the system also comprises a metal support column, and the pressure sensor is coupled and fixed with the optical fiber through the metal support column; the position of the metal supporting column is a position which does not influence the performance of the device outside the nanostructure unit array.
The pressure sensor is mainly used for high-sensitivity optical fiber pressure sensing in a specific environment, and is suitable for a plurality of application scenes such as blood vessel micro-pressure measurement and the like which need to carry out fine measurement on pressure. Under the excitation of the vertical incidence condition of the space visible light, the quality factor can reach 91 at most, which is about 50% higher than that of the patent CN110441843A, and the method has more excellent performance in the application field of fine measurement. Meanwhile, in the pressure sensing device structure based on surface plasmon lattice resonance under the designed asymmetric period, the MIM nano array structure has different periods in the x direction and the y direction, the size limitation is less, for example, the period in the x direction is 200nm, for the asymmetric structure, the period in the y direction can take any value in the interval of 180-220nm, the fine measurement of pressure in multiple directions can be realized, and the application range of sensing is wider.
The foregoing description is only an overview of the technical solutions of the present application, and in order to make the technical solutions of the present application more clear and clear, and to implement the technical solutions according to the content of the description, the following detailed description is made with reference to the preferred embodiments of the present application and the accompanying drawings.
Drawings
The following describes embodiments of the present invention in further detail with reference to the accompanying drawings;
FIG. 1 is a diagram of a design structure of a surface plasmon lattice resonance pressure sensing device based on asymmetric periodicity;
FIG. 2 is a reflectance spectrum of a device structure with an array period of 250nm in the x-axis direction;
FIG. 3 is a reflectance spectrum of a device structure with an array period of 200nm in the y-axis direction;
FIG. 4 is a graph of electric field strength at different periods;
FIG. 5 is a schematic view of a pressure sensing detection system.
Reference numerals:
the device comprises a top metal ridge-1, a middle dielectric layer-2, a bottom metal ridge-3, a lower polydimethylsiloxane substrate-4, a pressure sensor 5-1, a metal support pillar 5-2, an optical fiber 5-3, a coupler 5-4, a demodulation system 5-5, a light source 5-6 and a data processing system 5-7.
Detailed Description
In order to make the technical solutions of the present invention better understood, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be obtained by a person skilled in the art without any inventive step based on the embodiments of the present invention, shall fall within the scope of protection of the present invention.
The surface plasmon belongs to the field of nanophotonics, is a surface wave mode localized at a metal-medium interface, and can realize the control of light propagation behavior in a nanometer range, namely the traditional optical diffraction limit is broken through. Surface plasmons provide a platform for controlling the interaction between light and a substance in a sub-wavelength scale, and are now widely applied to enhancing nonlinear effects, surface-enhanced raman scattering, and surface-enhanced fluorescence effects. The two remarkable characteristics of surface plasmons, namely space scale compression and local field enhancement, are benefited, and the surface plasmons are continuously applied and developed in the field of sensing technologies. Among the numerous surface plasmon structures, a metal-dielectric-metal (MIM) waveguide structure is a common structure that can achieve the simultaneous guidance, coupling, localization, and focusing of electromagnetic waves at the nanoscale.
The MIM metal nano-pillar structure supports surface plasmon resonance, greatly enhances the local optical field intensity and improves the interaction between light and substances. Under the action of vertical incident light, surface plasmons are generated between the metal surface and the medium, and when the surface plasmons are transmitted along the metal surface, the surface plasmons are coupled into the resonant cavity. When the optical wave and the surface plasmon wave satisfy the phase cancellation condition, the reflection spectrum generates a reflection peak. The asymmetric period brings local optical field enhancement, and an electric dipole or a four-dipole can be excited to form local surface plasmon resonance. When the metal nano-pillar structures are arranged in a specific period and the period is equal to the wavelength of light, long-distance coupling can be realized between local surface plasmons of each metal nano-pillar structure through a diffraction mode of the array structure, and surface plasmon lattice resonance is formed. The characteristics are applied to a micro-pressure sensor, and high-quality-factor and low-drift pressure sensing can be realized.
Therefore, the pressure sensor based on the surface plasmon lattice resonance with the asymmetric period can accurately detect the tiny pressure in a fine measurement application scene, such as a human body, and the spectrum of the reflected light under different periods is utilized to represent the tiny change of the surface pressure of the sensing device, so that the purpose of high-quality factor sensing is achieved.
The structure of the pressure sensing device based on the surface plasmon polariton lattice resonance with asymmetric periods is shown in the attached figure 1 in the specification, and mainly comprises the following components: the MIM nano-pillar array is composed of a top metal ridge 1, a middle dielectric layer 2 and a bottom metal ridge 3, and a lower Polydimethylsiloxane (PDMS) substrate 4. The intermediate medium layer 2 of the sensing device structure adopts a refractive index nsio21.45 silica, refractive index n used for the lower PDMS substrate 4siThe outside of the MIM nano-pillar array can be ambient air with the refractive index n of the air being 1.52 of polydimethylsiloxaneairIs 1.0. The top metal ridge 1 and the bottom metal ridge 3 are made of the same material and can be made of one of gold, silver or aluminum, and the preferred metal material is gold.
The elastic property of PDMS is utilized, which is helpful for greatly changing the period of the lattice point array when pressure acts on PDMS, and enhancing the measurement range. The light is localized in a nanoscale range by adopting an MIM nano-pillar array structure on PDMS, so that the interaction of optical substances is enhanced. A coordinate system is established in which the coordinate axes are set such that the x-direction is perpendicular to the y-direction, and both are parallel to the lower PDMS substrate 4, and the z-direction is perpendicular to the lower PDMS substrate 4. Light can be vertically incident through an optical fiber, for example, as described later, the lattice point array structure generates a strong electromagnetic field, when pressure in the x direction and pressure in the y direction act on PDMS respectively, the lattice point array structure will generate asymmetry, and the period of the two directions changes, so that the strong electric field of the lattice point array structure changes, and pressure values in the x direction and the y direction are obtained through the relationship between the pressure and the strong electric field, thereby realizing pressure measurement in the x direction and the y direction.
In this embodiment, the dimensional parameters of each part in the device structure are preferably as follows: the metal-dielectric-metal MIM nano column presents a preferred square shape on the section parallel to the x-y plane, and the side length w of the square nano column is 180 nm; thickness h of top metal ridge 1 and bottom metal ridge 31And h2Equal, in the range of 130-150nm, preferably 140 nm; thickness h of the intermediate dielectric layer 2, e.g. silicon dioxide layerdThe range is 140-180nm, preferably 160 nm; thus, the MIM nanopillar array in the designed device structure preferably has a total height of 440 nm. The MIM nanopillar array is located on an underlying PDMS substrate 4 having a refractive index of 1.52 and a thickness of about 500 nm. During use, the upper surface of the lower layer PDMS substrate 4 of the structure is vertically incident with an incident angle θ of 0 °.
Different from the prior art, the arrangement period of the nano-pillar array is changed. The array period parameter Lx along the x-axis and the array period parameter Ly along the y-axis are: when Lx is fixed at 450nm, Ly is constant on the PMDS substrate, and the constant range is only required to be between 200 and 400 nm. When Ly is fixed at 450nm, Lx is constant on the PMDS substrate, and the constant value range is only between 200 and 450 nm. Since, exceeding this range, the sensor quality factor decreases sharply, affecting the sensor resolution, and adversely affecting the measurement of the micro-pressure by the sensor. And the period of the lattice point array cannot be changed in a larger period range due to the limitation of the elastic range of the PDMS material.
MIM nanopillar arrays may be fabricated using advanced nano-fabrication processes. According to the structure shown in fig. 1, a thick intermetallic multilayer compound is first deposited by electron beam evaporation, and then a mask is prepared on top by electron beam lithography and electron beam deposition. Then, the MIM nanopillar array may be obtained by a multiple dry etching process (sequentially etching the top metal ridge 1, the middle dielectric layer 2, and the bottom metal ridge 3), and then by a lift-off process.
External pressure can act on the side surface of the lower-layer PDMS substrate 4, so that the side surface of the lower-layer PDMS substrate 4 deforms, the distance between periods of the MIM nano-pillar array changes, the surface plasmon resonance wavelength changes, and a pressure signal is converted into an optical signal for detection. The corresponding pressure values acting on the lower layer PDMS substrate 4 are determined by the peak position changes of the lattice resonance of the plasma surface in the x direction and the y direction. In this embodiment, the influence of the deformation of the lower layer PDMS substrate 4 on the optical signal is simulated by simulation. The calculations were performed using a full vector Rigorous coupled wave Analysis software package (RCWA), specifically with planar wave incidence per unit electric field strength (| E0| ═ 1) impinging on the nanostructure array in the above example, and simulated experimental data were obtained.
Referring to the specification and the attached figure 2, the reflectivity spectrum of the device structure with the array period of 250nm in the x-axis direction is shown, when the period of the MIM nano-pillar array structure in the y-direction is 450nm, and when the period of the MIM nano-pillar array structure in the x-direction is 250nm, the peak value is 689nm, and the quality factor can be as high as 81. Referring to the specification, fig. 3 shows a reflectivity spectrum of a device structure with an array period of 200nm in the y-axis direction, when the period of an MIM nano-pillar array structure in the x-axis direction is 450nm, the period of the y-axis direction is 200nm, the peak value is 702nm, and the quality factor can reach 91.
The MIM nano-column array structure is constructed on the PDMS, when light emitted by a light source is directly irradiated to the PDMS through the coupler to construct the MIM nano-column array structure, a strong electromagnetic field is generated, and the light is localized in a nanoscale range, so that the interaction of optical substances is enhanced. When pressure in the x direction or the y direction is applied to the PDMS, the period of the array structure changes, which results in the electric field varying with the period, and the pressure can be measured through the change of the electric field. When pressure in the x direction or the y direction acts on PDMS, the electric field generated by the pressure in the x direction or the y direction is shown in the attached figure 4 in the specification. Therefore, the pressure can be distinguished through the change of the electric field intensity, and whether the received pressure comes from the x direction or the y direction can be distinguished through the difference of the generated electric field.
The pressure sensor is connected with each component part through optical fibers to form a pressure detection system, and the system is shown in the attached figure 5 of the specification and mainly comprises a pressure sensor 5-1, a metal support column 5-2, optical fibers 5-3, a coupler 5-4, a demodulation system 5-5, a light source 5-6 and a data processing system 5-7. The pressure sensor 5-1 is fixedly coupled with the optical fiber 5-3 through the metal supporting column 5-2 and the UV glue, and the position of the metal supporting column 5-2 is a position which does not affect the performance of the device outside the array periodic structure. The light source 5-6 transmits light to the upper side of the pressure sensor 5-1 through optical fiber coupling, the light is vertically incident on a sensor array structure, when a PDMS substrate in the pressure sensor 5-1 is subjected to transverse pressure, the period of an MIM nano structure unit array changes, an optical signal carrying pressure information is reflected back to the optical fiber 5-3, the optical signal carrying the pressure information is demodulated through the coupling to reach a demodulation system 5-5, the optical signal carrying the pressure information is demodulated through the demodulation system, the relation between the electric field intensity and the pressure is obtained, and finally, a corresponding pressure value is obtained through calculation of a data processing system 5-7.
The pressure sensor can be used for high-sensitivity optical fiber pressure sensing in a specific environment, and is suitable for a plurality of application scenes such as micro-pressure measurement and the like which need to carry out fine measurement on pressure. Under the excitation of the vertical incidence condition of the space visible light, the quality factor can reach 91 at most, which is about 50% higher than that of the patent CN110441843A, and the method has more excellent performance in the application field of fine measurement. Meanwhile, the pressure sensing device structure based on surface plasmon lattice resonance under the designed asymmetric period has different periods of the MIM nano array structure in the x direction and the y direction, the limitation on the size of the device is less, and the application range of sensing is wider.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.
Claims (10)
1. A pressure sensor based on surface plasmon lattice resonance, comprising a lower polydimethylsiloxane substrate (4) and a nanostructure unit array positioned above the lower polydimethylsiloxane substrate (4), wherein the coordinate axes are set to be vertical to the x direction and the y direction, the x direction and the y direction are parallel to the lower polydimethylsiloxane substrate (4), the z direction is vertical to the lower polydimethylsiloxane substrate (4),
the nano-structure unit is formed by closely overlapping a top metal ridge (1), a middle medium layer (2) and a bottom metal ridge (3) which are sequentially arranged from top to bottom;
the top metal ridge (1), the middle dielectric layer (2) and the bottom metal ridge (3) are the same in cross-sectional shape parallel to the lower polydimethylsiloxane substrate (4);
the top metal ridge (1) and the bottom metal ridge (3) are made of the same material;
the nanostructure units are respectively arrayed above the lower polydimethylsiloxane substrate (4) along the x direction and the y direction, and the array period parameter Lx along the x direction and the array period parameter Ly along the y direction are different from each other.
2. The pressure sensor of claim 1, wherein: when Lx is 450nm, the range of Ly is 200-400 nm; or when the Ly is 450nm, the Lx range is 200-450 nm.
3. The pressure sensor of claim 1, wherein: the refractive index of the lower polydimethylsiloxane substrate (4) is 1.52, the middle medium layer (2) is silicon dioxide with the refractive index equal to 1.45, and the top metal ridge (1) and the bottom metal ridge (3) are made of gold, silver or aluminum.
4. The pressure sensor of claim 3, wherein: the cross sections of the top metal ridge (1), the middle dielectric layer (2) and the bottom metal ridge (3) parallel to the lower polydimethylsiloxane substrate (4) are square.
5. The pressure sensor of claim 3, wherein: the width and length variation ranges of the top metal ridge (1), the middle dielectric layer (2) and the bottom metal ridge (3) are 60 nm-100 nm.
6. The pressure sensor of claim 4, wherein: the side length of the square is 180 nm.
7. A pressure sensor according to any one of claims 1-3, wherein: the thickness variation range of the top metal ridge (1) and the bottom metal ridge (3) is 130 nm-150 nm, and the thickness variation range of the middle dielectric layer (2) is 140 nm-180 nm.
8. The pressure sensor of claim 7, wherein: the thickness of the top metal ridge (1) and the bottom metal ridge (3) is 140nm, and the thickness of the middle dielectric layer (2) is 160 nm.
9. A pressure detection system using a pressure sensor according to any of claims 1-8, characterized by comprising a pressure sensor (5-1), an optical fiber (5-3), a coupler (5-4), a demodulation system (5-5), a light source (5-6) and a data processing system (5-7);
the light source (5-6) transmits light to the position above the pressure sensor (5-1) through optical fiber coupling, and the light is vertically incident on the sensor array structure; when the lower polydimethylsiloxane substrate in the pressure sensor (5-1) is subjected to transverse pressure, the period of the nanostructure unit array changes, optical signals carrying pressure information are reflected back to the optical fiber (5-3) and reach a demodulation system (5-5) through coupling, the optical signals carrying the pressure information are demodulated through the demodulation system to obtain the relation between the electric field intensity and the pressure, and finally, corresponding pressure values are obtained through calculation of a data processing system (5-7).
10. The pressure detection system according to claim 9, further comprising a metal support column (5-2), wherein the pressure sensor (5-1) is coupled and fixed with the optical fiber (5-3) through the metal support column (5-2);
the position of the metal supporting column (5-2) is a position which does not influence the performance of the device outside the nanostructure unit array.
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111694078A (en) * | 2020-06-05 | 2020-09-22 | 桂林电子科技大学 | MIM grid lattice plasmon absorber |
| CN111879728A (en) * | 2020-07-15 | 2020-11-03 | 常州机电职业技术学院 | Structure for improving quality factor of refractive index sensing device and testing method |
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| CN111694078A (en) * | 2020-06-05 | 2020-09-22 | 桂林电子科技大学 | MIM grid lattice plasmon absorber |
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| CN113173554B (en) * | 2021-03-24 | 2024-03-26 | 中山大学附属第一医院 | Preparation method and application of flexible elastic conductive micro-nano column |
| CN114609084A (en) * | 2022-02-08 | 2022-06-10 | 大连海事大学 | Refractive index sensor based on metal-medium-metal nano cylindrical structure array perfect absorber |
| CN114858340A (en) * | 2022-04-26 | 2022-08-05 | 中国科学院上海微系统与信息技术研究所 | Pressure sensor and preparation method thereof |
| CN115389070A (en) * | 2022-09-05 | 2022-11-25 | 南京信息工程大学 | Dual-mode triaxial stress sensor of optical waveguide structure and preparation method thereof |
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