WO2023013363A1

WO2023013363A1 - Workpiece holding jig and surface processing device

Info

Publication number: WO2023013363A1
Application number: PCT/JP2022/027203
Authority: WO
Inventors: 勝己石井
Original assignee: 株式会社アルメックステクノロジーズ
Priority date: 2021-08-04
Filing date: 2022-07-11
Publication date: 2023-02-09
Also published as: CN117795136A; JP7529277B2; TW202309351A; JP2023023068A

Abstract

A workpiece holding jig (30) comprises: a holding unit (320) that holds a workpiece such that the front surface and rear surface thereof are vertical; two power supply receiving units (340A, 340B) that are insulated from each other, and that are provided for setting the workpiece to be a negative pole; and two conductive units (370A, 370B) that allow conduction between the two power supply receiving units and the holding unit, and that are insulated from each other. The holding unit includes: two conductive plates (321A, 321B) that are arranged parallel to one side of the workpiece, and that are insulated from each other; and a clamper (325) that clamps and holds the workpiece. The clamper includes a conductive first clamp piece (325A) that contacts the front surface of the workpiece and a conductive second clamp piece (325B) that contacts the rear surface of the workpiece. The first clamp piece is electrically connected to one of the two power supply receiving units, one of the two conductive units, and one of the two plates, and the second clamp piece is electrically connected to the other of the two power supply receiving units, the other of the two conductive units, and the other of the two plates.

Description

Work holding jig and surface treatment device

The present invention relates to a work holding jig, a surface treatment apparatus, and the like.

The inventor of the present invention has proposed a workpiece holding jig including N (N is a plurality) power-supplied parts and N conductive paths insulated from each other (Patent Document 1). The N conduction paths insulated from each other are conducted to N different cathode setting parts including the work, and as one aspect, the front and back of the work (two cathode setting parts) are illustrated. . The inventor of the present invention has also proposed a surface treatment apparatus including this work holding jig (Patent Document 2).

On the other hand, the applicant of the present application has proposed that five workpiece holding jigs that hold up to five workpieces that can be immersed in the treatment liquid of one surface treatment tank at the same time are provided with different rectifiers (five rectifiers in FIG. 1, A surface treatment apparatus has been proposed in which power is supplied by contacting five rows of power supply rails connected to five rectifiers on the front and back of a workpiece (total of ten rectifiers) (Patent Document 3).

Japanese Patent No. 6820626 Japanese Patent No. 6744646 Japanese Patent No. 5457010

However, Patent Documents 1 to 3 do not disclose a specific structure of a workpiece holding jig having two electrically conductive paths electrically connected to the front and back surfaces of a workpiece, which are insulated from each other, and a surface treatment apparatus using the same.

SUMMARY OF THE INVENTION An object of the present invention is to provide a work holding jig that utilizes the structure of a holding portion that is essential to a work holding jig and that has conduction paths that are connected to the front and back of a work with low resistance and are insulated from each other, and a work holding jig that uses the same. Another object of the present invention is to provide a surface treatment apparatus that is
Another object of the present invention is to provide a surface treatment apparatus capable of avoiding an excessive increase in size while maintaining the throughput while individually adjusting the amount of current applied to the front and back surfaces of the work.

(1) One aspect of the present invention is
a holding part for holding a rectangular workpiece to be immersed in the treatment liquid with the front and back surfaces of the workpiece vertical;
two power-supplied parts insulated from each other for setting the workpiece as a cathode;
two conductive portions that provide electrical continuity between the two power-supplied portions and the holding portion and are insulated from each other;
has
The holding part is
two electrically conductive plates extending parallel to one side of the workpiece and insulated from each other;
a clamper that sandwiches and holds the work, including a first conductive clamp piece that contacts the front surface of the work and a second conductive clamp piece that contacts the back surface of the work;
including
the first clamp piece is electrically connected to each one of the two power-supplied parts, the two conducting parts, and the two plates;
The second clamp piece relates to a work holding jig electrically connected to the other of the two power-supplied parts, the two conducting parts, and the two plates.

According to one aspect of the present invention, the holding section, which is an essential structure of the work holding jig, includes two conductive plates and a clamper including conductive first and second clamp pieces. Each one of the two power-supplied parts, the two conducting parts and the two plates conducts with the surface of the workpiece via the first clamping piece of the clamper. The other of the two power-supplied parts, the two conducting parts and the two plates are electrically connected to the back surface of the workpiece via the second clamping piece of the clamper. In this way, by utilizing the structure necessary for a work holding jig, a work holding jig having conduction paths connected to the front and back of the work with low resistance and insulated from each other is provided.

(2) In aspect (1) of the present invention, the holding section may include an upper frame, a lower frame, and two vertical frames. In this case, each of the upper frame, the lower frame and the two vertical frames includes the two plates, and a total of eight plates are provided. The clamper is provided on each of the upper frame and the lower frame. One of the two plates provided on each of the two vertical frames is electrically connected to one of the two plates provided on the lower frame, and the two plates provided on each of the two vertical frames The other of the plates is electrically connected to the other of the two plates provided on the lower frame. Each one of the two power-supplied parts, the two conducting parts, and the two plates of the upper frame is electrically connected to the surface of the workpiece via the first clamp piece provided on the upper frame. The two power-supplied parts, the two conducting parts, and the other of the two plates provided on the upper frame are electrically connected to the back surface of the work via the second clamp piece provided on the upper frame. Each one of the two power-supplied parts, the two conducting parts, and the two plates of the two vertical frames and the lower frame are electrically connected to the surface of the workpiece via a first clamping piece provided on the lower frame. do. The other of the two power-supplied parts, the two conducting parts, and the two plates provided on each of the two vertical frames and the lower frame is connected to the workpiece via a second clamping piece provided on the lower frame. conductive with the back surface of In this way, by using the structure necessary for the work holding jig, including the upper frame, the lower frame, and the two vertical frames, it is possible to provide conductive paths that are connected to the front and back of the work with low resistance and are insulated from each other.

(3) In one aspect (2) of the present invention, the two vertical frames may be supported by the upper frame via an insulating member, and one of the two plates provided on the upper frame may be: The other of the two plates provided on the upper frame is insulated from the two plates provided on each of the two vertical frames, and the other of the two plates provided on each of the two vertical frames is insulated from the two plates provided on each of the two vertical frames. insulated. Thus, in the holding part, one conductive path is electrically connected to the front and back surfaces of the workpiece via the upper frame, and another conductive path is electrically connected to the front and back surfaces of the workpiece via the two vertical frames and the lower frame. can be electrically isolated from each other.

(4) In aspect (3) of the present invention, the two conductive portions may include first to eighth conductive portions. In this case, the first conducting part conducts between one of the two power-supplied parts and one end of one of the two plates provided on the upper frame, and the second conducting part conducts the One of the two power-supplied portions and the other end of one of the two plates provided on the upper frame are electrically connected, and the third conductive portion connects the other of the two power-supplied portions with the The fourth conductive portion provides electrical continuity between the other end of the two plates provided on the upper frame, and the fourth conductive portion connects the other of the two power-supplied portions and the two plates provided on the upper frame. The fifth conductive portion conducts between one of the two power-supplied portions and one of the two plates provided on one of the two vertical frames. the sixth conducting portion conducts between one of the two power-supplied portions and one of the two plates provided on the other of the two vertical frames; and the seventh conducting portion: The other of the two power-supplied parts and the other of the two plates provided on one of the two vertical frames are electrically connected, and the eighth conductive part is connected to the other of the two power-supplied parts. , and the other of the two plates provided on the other of the two vertical frames. In this way, the two power-supplied parts and both ends (four ends in total) of the two plates provided on the upper frame can be electrically connected by the first to fourth conductive parts. Also, the two power receiving parts and one end of each of the two plates provided on the two vertical frames (four other ends in total) are electrically connected by the fifth to eighth conducting parts. can be done.

(5) In one aspect (4) of the present invention, each of the first to fourth conducting portions can have a higher electrical resistance than each of the fifth to eighth conducting portions. By doing this, the electrical resistance of the path that conducts from the first to fourth conductive parts to the front and back surfaces of the work via the upper frame, and the work from the fifth to eighth conductive parts via the two vertical frames and the lower frame It is possible to set the electric resistance of the path that conducts between the front and back surfaces of the .

(6) Another aspect of the present invention is
a processing tank in which a rectangular workpiece is immersed in a processing liquid;
an anode disposed in the treatment bath, including a first anode facing the front surface of the work and a second anode facing the back surface of the work;
eight rows of feed rails insulated from each other;
Four rectifiers respectively connected between four of the eight rows of power supply rails and the first anode; a total of eight rectifiers, including four other rectifiers each connected between two anodes;
four movable workpiece holding jigs each holding the workpiece and electrically connected to each two of the eight rows of power supply rails;
including
Each of the four work holding jigs relates to the surface treatment apparatus, which is the work holding jig according to any one of aspects (1) to (5) of the present invention.

According to another aspect of the present invention, the work holding jig according to any one of the aspects (1) to (5) of the present invention is used to individually adjust the amount of current to the front and back surfaces of the work. can be used to treat the front and back surfaces of the workpiece. In order to individually adjust the amount of current to the front and back of the work, the maximum number of work holding jigs that can pass through the treatment tank at the same time is set to 4, so that the number of power supply rails and rectifiers can be set to 8 each. , thereby avoiding excessive upsizing of the surface treatment apparatus while maintaining throughput.

(7) In another aspect (6) of the present invention, the four rectifiers are respectively connected to the four power supply rails in odd-numbered columns among the eight power supply rails, and the other four rectifiers are connected to the It may be connected to the other four power supply rails in even-numbered columns among the eight power supply rails. In this way, the distance between the two power-supplied parts provided on the work holding jig can be made wider than the distance between the adjacent power supply rails. As a result, it becomes easier to secure a space for connecting the two conductive portions to the two power-supplied portions.

(8) In another aspect (6) of the present invention, the four rectifiers are respectively connected to the four power supply rails of the first to fourth rows adjacent to each other among the eight rows of power supply rails, and the other The four rectifiers may be connected to the other four power supply rails of adjacent fifth to eighth lines among the eight lines of power supply rails, respectively. In this way, the gap between the two power-supplied parts provided on the work holding jig can be narrowed to match the gap between the adjacent power supply rails.

1 is a schematic plan view of a surface treatment apparatus according to one embodiment of the present invention; FIG. 1 is a schematic perspective view showing the basic structure of a work holding jig according to one embodiment of the present invention; FIG. FIG. 4 is a diagram for explaining conduction paths through which current flows through the upper frame to the front and rear surfaces of the work; FIG. 5 is a diagram for explaining conduction paths through which current flows through the front and back surfaces of the work via the upper frame and the lower frame; 5 is a diagram showing the structure of the conducting path shown in FIG. 4; FIG. It is a figure which shows the structure of a clamper. FIG. 4 is a schematic plan view of a surface treatment apparatus according to another embodiment of the invention;

Preferred embodiments of the present invention will be described in detail below. It should be noted that the present embodiment described below does not unduly limit the content of the present invention described in the claims, and all of the configurations described in the present embodiment are essential as means for solving the present invention. Not necessarily.

1. Surface Treatment Apparatus FIG. 1 is a plan view schematically showing a surface treatment apparatus 1 according to an embodiment of the present invention. 1, the surface treatment apparatus 1 includes a treatment tank 10, an anode 20 provided in the treatment tank 10, a work holding jig 30 for conveying a work (not shown in FIG. 1), a rectifier 40, and a power supply. rails 50; The processing tank 10 contains a processing liquid, such as a plating liquid, in which rectangular workpieces are immersed. A plurality of processing tanks 10 may be connected and provided, in which

case openings

11 and 12 are provided at both ends of the processing tank 10 in the longitudinal direction to allow workpieces to pass between the adjacent processing tanks 10 .

The anode 20 provided in the processing tank 10 includes a first anode 21 facing the surface of the work and a second anode 22 facing the back surface of the work. Eight rectifiers 40 (41 to 48) are provided outside the treatment tank 10. As shown in FIG. Eight rows of power supply rails 50 (51 to 58) insulated from each other are provided outside the processing bath 10 along the longitudinal direction of the processing bath 10, for example, on one side of the processing bath 10. As shown in FIG. The four rectifiers 41 to 44 are connected between, for example, four power supply rails 51 to 54 of the eight rows of power supply rails 50 (51 to 58) and the first anode 21, respectively. The other four rectifiers 45-48 are connected between the four power supply rails 55-58 and the second anode 22 respectively.

In the processing tank 10, a maximum of four work holding jigs 31 to 34 are installed as work holding jigs 30 each holding a work and electrically connected to each two of the power supply rails 50 in eight rows. It is provided movably along the longitudinal direction of the bath 10 . These work holding jigs 31 to 34 are successively carried into the processing bath 10 from the upstream side in the transport direction A (for example, an upstream processing bath not shown), and after continuously moving the processing bath 10, are moved in the transport direction A. They are sequentially carried out to the downstream side (for example, a downstream processing tank not shown).

Here, each of the maximum four work holding jigs 31 to 34 is connected to two different rows of power supply rails among the eight rows of power supply rails 50 (51 to 58). In the state shown in FIG. 1, the most downstream work holding jig 31 is connected to the power supply rails 51 and 55 of the odd-numbered first and fifth rows, for example. The work holding jig 32 is connected to the power supply rails 52 and 56 of even-numbered second and sixth rows, for example. The work holding jig 33 is connected to the power supply rails 53 and 57 of the odd-numbered third and seventh rows, for example. The work holding jig 34 is connected to the power supply rails 54 and 58 of even-numbered fourth and eighth rows, for example. At this time, the rectifier 41 was connected to the first anode 21 facing the surface of the work held by the work holding jig 31 and the power supply rail 51 in the first row, and was held by the work holding jig 31. Adjust the current flowing on the work surface. The rectifier 45 is connected to the second anode 22 facing the back surface of the work held by the work holding jig 31 and the power supply rail 55 in the fifth row, and is connected to the back surface of the work held by the work holding jig 31. adjust the current flowing through Similarly, the currents flowing through the front and back surfaces of the workpiece held by the workpiece holding jig 32 are individually adjusted by the

rectifiers

42 and 46 . The currents flowing through the front and back surfaces of the workpiece held by the workpiece holding jig 33 are individually adjusted by the

rectifiers

43 and 47 . The currents flowing through the front and back surfaces of the workpiece held by the workpiece holding jig 34 are individually adjusted by the rectifiers 44 and 48 .

Here, among the maximum four work holding jigs 31 to 34 that can pass through the processing tank 10 at the same time, the work held by at least one of the most upstream work holding jig 31 and the most downstream work holding jig 34 is A maximum of three workpieces partially immersed in the processing liquid in the processing tank 10 and held by a maximum of three workpiece holding jigs 31 to 33 or 32 to 34 are fully immersed in the processing liquid in the processing tank 10 . In FIG. 1, two works held by both the most upstream work holding jig 31 and the most downstream work holding jig 34 are partially immersed in the treatment liquid in the treatment bath 10, and the remaining work holding jigs 32, Two works held by 33 are entirely immersed in the processing liquid in the processing tank 10 . Partial immersion refers to a state in which a portion of the processing surface of the work is immersed in the processing liquid in the processing tank 10 . Full immersion means a state in which the entire surface of the workpiece to be processed is completely immersed in the processing liquid in the processing tank 10 . In other words, the longitudinal length of the processing bath 10 is set to a length sufficient for up to three workpieces held by a maximum of three workpiece holding jigs 30 to be fully immersed.

When the number of workpieces that can be transported in the processing tank 10 in the state of full immersion at the same time is N), the number of each of the rectifiers 40 and the power supply rails 50 is 2×(N+1). =3 is an example. In order to achieve the desired throughput while individually adjusting the amount of current to the front and back surfaces of the work, if N is 2 or less, the number of connected processing tanks 10 increases, and if N is 4 or more, the processing tanks 10 and The width of the surface treatment apparatus 1 including the power supply rail 50 is increased. When N=3 in this embodiment, it is possible to avoid an excessive increase in the size of the surface treatment apparatus 1 while maintaining individual adjustment of the amount of current to the front and back surfaces of the work and throughput. The rectifiers 41 to 48 adopt the method described in Patent Document 3 when the work is carried in and out of the processing tank 10, and the current flowing through the work is gradually increased according to the processing area (at the time of carrying in). Or it can be gradually decreased (at the time of export).

2. Work holding jig 2.1. Basic Structure The basic structure of the workpiece holding jig 30 is roughly the same as that shown in FIG. 4 of Patent Documents 1 and 2, and the basic structure is shown in FIG. The workpiece holding jig 30 includes a horizontal arm portion 300, a vertical arm portion 310, a holding portion 320 for holding a workpiece, a guided portion 330, a power-supplied portion 340, a pushed piece 350, and an engaged portion. a portion 360; The horizontal arm portion 300 extends along a direction B orthogonal to the transport direction A. As shown in FIG. The vertical arm portion 310 is suspended from the horizontal arm portion 300 and the holding portion 320 is fixed to the vertical arm portion 310 via the support frame 311 . The holding part 320 includes an upper frame 321 , two

vertical frames

322 and 323 supported by the upper frame 321 so as to be able to move up and down, and a lower frame 324 fixed to the two

vertical frames

322 and 323 . The upper frame 321 is provided with a plurality of upper clampers 325 for clamping the upper edge of the work. The lower frame 324 is provided with a plurality of lower clampers 326 for clamping the lower edge of the work. A downward tension is applied to the work by a lower clamper 326 . However, the two

vertical frames

322, 323, the lower frame 324 and the lower clamper 326 may be omitted if the workpiece is thick and/or power is not supplied from the bottom of the workpiece.

The guided portion 330 is guided by a guide rail (not shown) provided in the surface treatment apparatus 1 to linearly guide the workpiece holding jig 30 . The guided portion 330 can include a roller 331 that rolls in contact with the top surface of the guide rail, and a roller 332 that rolls in contact with both side surfaces of the guide rail (only the rollers in rolling contact with one side are shown in FIG. 2).

The first and second power-supplied

portions

340A and 340B as power-supplied portions 340 come into contact with two different power-supply rails among the eight power-supply rails 50 (51 to 58) shown in FIG. The front and back surfaces are individually set as cathodes. The first and second

power receiving portions

340A and 340B have two

contactors

342 and 343 supported on the upstream and downstream sides of the first and

second support arms

341A and 341B extending along the conveying direction A, respectively. include. The

contacts

342 and 343 are supported by the support arm 341 via a parallel link mechanism and are biased by springs so as to be pressed against the eight rows of power supply rails 50 shown in FIG. The four workpiece holding jigs 31 to 34 shown in FIG. 1 are arranged so that the positions of the first and second power-supplied

parts

340A and 340B in the direction B shown in FIG. It can contact two different rows of power supply rails of the rails 50 (51-58). For this reason, it is preferable that the workpiece holding jig 30 can adjust the positions at which the first and

second support arms

341A and 341B are fixed to the horizontal arm portion 300 in the direction B shown in FIG. In this way, by adjusting one type of work holding jig 30, four types of work holding jigs 31 to 34 shown in FIG. 1 can be prepared.

The workpiece holding jig 30 can have both the pushed piece 350 and the engaged portion 360 . The engaged portion 360 can continuously convey the work holding jig 30 by being engaged with, for example, a chain that moves continuously. The pushed piece 350 is pushed in the direction of arrow C by the intermittent conveying device and transmits intermittent conveying force to the work holding jig 30 . Thus, the workpiece holding jig 30 can be used both for intermittent transportation and for continuous transportation. However, the workpiece holding jig 30 may be used only for one of intermittent transfer and continuous transfer.

2.2. A structure for individually adjusting the currents flowing in the front and back of the work In FIG. The two conductive portions provided in the holding portion 320 and the conductive path provided in the holding portion 320 are omitted. 3 and 6 show conductive paths for setting the workpiece to the cathode through the upper frame 321 of the holding portion 320. FIG.

In FIG. 3, for example, the upper frame 321 of the holding portion 320 of the work holding jig 30 has two

conductive plates

321A and 321B insulated from each other, as shown in FIG. A clamper 325 supported by the upper frame 321 of the work holding jig 30 has electrically conductive first and

second clamp pieces

325A and 325B insulated from each other. The work holding jig 30 further has two conducting

parts

370A and 370B that conduct electricity between the two power-supplied

parts

340A and 340B and the upper frame 321 (holding part 320) and that are insulated from each other. The negative terminal of the rectifier 41 is electrically connected to the work surface via the power supply rail 51, the first power receiving portion 340A, the conducting portion 370A, the plate 321A and the first clamping piece 325A. On the other hand, the negative terminal of the rectifier 45 is electrically connected to the back surface of the work via the power supply rail 55, the second power-supplied portion 340B, the conductive portion 370B, the plate 321B and the second clamp piece 325B. Thus, the current flowing from the rectifier 41 to the front surface of the work and the current flowing from the rectifier 45 to the back surface of the work can be adjusted independently by the

rectifiers

41 and 45, respectively.

4 and 5 show a path through which current flows from the upper edge of the work to the front and back surfaces of the work via the upper frame 321 of the work holding jig 30, two

vertical frames

322, 323 of the work holding jig 30 and and a path through which the current flows from the lower edge of the work to the front and back surfaces of the work via the lower frame 324 are more specifically shown. The two conducting

portions

370A and 370B shown in FIG. 3 are configured including members 371 to 376 and first to eighth conducting portions 381 to 388 shown in FIGS.

The two

contacts

342, 343 provided on the first power-supplied portion 340A are electrically connected to a common connection portion 373 by

cables

371, 372, for example. Similarly, two

contacts

342 and 343 provided on the second power-supplied portion 340B are electrically connected to a common connection portion 376 by

cables

374 and 375, for example. The

cables

371, 372, 374, 375 are supported by, for example, the vertical arm portion 310 of the workpiece holding jig 30 or the support frame 311 via between the first and

second support arms

341A, 341B shown in FIG. It can be routed up to the

common connection portions

373 and 376 . At this time, as shown in FIG. 1, for example, if the workpiece holding jig 31 is brought into contact with the power supply rail 51 of the first row and the power supply rail 55 of the fifth row, the first and

second support arms

341A and 341B are displaced. The intervals are widened, and the

cables

371, 372, 374, and 375 can be easily routed.

Here, as shown in FIG. 5, the vertical frame 322 is configured by arranging two parallel

conductive plates

322A and 322B in parallel with a gap therebetween. Vertical frame 323 consists of two parallel

conductive plates

323A, 323B spaced apart in parallel. The bottom frame 324 consists of two parallel

conductive plates

324A, 324B spaced apart in parallel. One end of the plate 324A is connected with the lower end of the plate 322A, and the other end of the plate 324A is connected with the lower end of the plate 323A. Similarly, one end of plate 324B is connected to the lower end of plate 322B, and the other end of plate 324B is connected to the lower end of plate 323B. The upper frame 321 also consists of two parallel

conductive plates

321A, 321B spaced apart in parallel, as shown in FIGS. Insulating material 321C (FIG. 6) may be arranged between

plates

321A and 321B in order to secure the strength of upper frame 321. As shown in FIG. It should be noted that the plate 321A of the upper frame 321 is connected to a vertically extending conductive member 391, as shown in FIG. A plate 321B of the upper frame 321 is connected to a vertically extending conductive member 392 .

Conductive members

391 and 392 extend in parallel in the longitudinal direction. Also, the two

vertical frames

322 and 323 may be electrically insulated from the upper frame 321 and supported by the upper frame 321 . In this embodiment, the

plates

322A and 323A in the

vertical frames

322 and 323 are supported by the conductive member 391 and an insulator (not shown), and the

plates

322B and 323B in the

vertical frames

322 and 323 are connected to the conductive member 391. It is supported via an insulator (not shown). The two

vertical frames

322 and 323 may be electrically insulated from the upper frame 321 and supported by the upper frame 321 so as to be able to move up and down. By doing so, tension can be applied to the lower end of the work.

The first conductive portion 381 is connected to one end of the plate 321A between the common connection portion 373 connected to the first power-supplied portion 340A and one end (for example, the left end) of the plate 321A provided on the upper frame 321. Conduction is made through the conductive member 391 that is connected to the terminal. The second conductive portion 382 connects between the common connection portion 373 connected to the first power-supplied portion 340A and the other end (for example, the right end) of the plate 321A provided on the upper frame 321 to the other end of the plate 321A. Conduction is established via the connected conductive member 391 (illustration is omitted in FIG. 5). In this way, the first power-supplied portion 340A and both ends of the plate 321A provided on the upper frame 321 can be electrically connected by the first and second

conductive portions

381 and 382. FIG.

The third conductive portion 383 is connected to one end of the plate 321B between the common connection portion 376 connected to the second power-supplied portion 340B and one end (for example, the left end) of the plate 321B provided on the upper frame 321. Conduction is established through a conductive member 392 (which overlaps the conductive member 391 and cannot be seen in FIG. 5). The fourth conductive portion 384 connects between the common connection portion 376 connected to the second power-supplied portion 340B and the other end (for example, the right end) of the plate 321B provided on the upper frame 321 to the other end of the plate 321B. It is conducted through the connected conductive member 392 . In this way, the second power-supplied portion 340B and both ends of the plate 321B provided on the upper frame 321 can be electrically connected by the third and fourth

conductive portions

383 and 384. FIG.

The fifth conducting portion 385 conducts between the common connecting portion 373 connected to the first power-supplied portion 340A and the plate 322A provided on the vertical frame 322. The sixth conducting portion 386 conducts between the common connecting portion 373 connected to the first power-supplied portion 340A and the plate 323A provided on the vertical frame 323. As shown in FIG. Thus, the first power-supplied portion 340A and the upper ends of the

plates

322A and 323A provided on the two

vertical frames

322 and 323 can be electrically connected by the fifth and sixth

conductive portions

385 and 386. . Since the

plates

322A and 323A are connected to both ends of the plate 324A of the lower frame 324, the first power-supplied portion 340A and the plate 324A of the lower frame 324 can be electrically connected.

The seventh conducting portion 387 conducts between the common connecting portion 376 connected to the second power-supplied portion 340B and the plate 322B provided on the vertical frame 322. The eighth conducting portion 388 conducts between the common connecting portion 376 connected to the second power-supplied portion 340B and the plate 323B provided on the vertical frame 323 . Thus, the second power-supplied portion 340B and the upper ends of the

plates

322B and 323B provided on the two

vertical frames

322 and 323 can be electrically connected by the seventh and eighth

conductive portions

387 and 388. . Since the

plates

322B and 323B are connected to both ends of the plate 324B of the lower frame 324, the second power-supplied portion 340B and the plate 324B of the lower frame 324 can be electrically connected.

Here, each of the first to fourth conducting portions 381 to 384 can have a greater electrical resistance than each of the fifth to eighth conducting portions 385 to 388. Each of the first to fourth conductive parts 381 to 384 is electrically connected to the upper frame 321 which is relatively close, while the fifth to eighth conductive parts 385 to 388 are connected via the two

vertical frames

322 and 323. Conducts with the lower frame 324 . Therefore, in order to equalize the electrical resistance of the conductive path from the

common connection portions

373 and 376 to the upper frame 321 and the electrical resistance of the conductive path from the

common connection portions

373 and 376 to the lower frame 324, the first to fourth The electrical resistance of each of the conducting portions 381-384 is increased. Specifically, each of the first to fourth conducting portions 381 to 384 is formed of a metal plate bent in an L-shape, for example, as shown in FIG. 385-388 consist of electrical cables.

FIG. 6 shows a clamper, eg upper clamper 325 . Lower clamper 326 may be similarly configured. The upper clamper 325 is supported by a pair of

plates

321A, 321B of the upper frame 321. As shown in FIG. The upper clamper 325 can include a first clamping piece 325A supported, eg fixed, on the plate 321A and a second clamping piece 325B movably supported on the plate 321B. The second clamp piece 325B is rotationally biased in the direction of arrow D by, for example, a coil spring 325C, and is rotatably supported around a fulcrum 325D provided on the plate 321B. In FIG. 6, since no workpiece exists, the first and

second clamp pieces

325A and 325B are in pressure contact. After the second clamp piece 325B is rotated in the direction opposite to the direction of the arrow D by an external force, the workpiece is placed between the first and

second clamp pieces

325A and 325B, and the external force is released. A workpiece is held between the

pieces

325A and 325B. Thereby, the first and

second clamp pieces

325A, 325B are electrically insulated by the work. In this way, the current flowing through the front surface of the work via the plate 321A and the first clamping piece 325A can be electrically separated from the current flowing through the back surface of the work via the plate 321B and the second clamping piece 325B.

3. MODIFIED EXAMPLE Unlike FIG. 1, the electrical connection between the work holding jig 30 and the power supply rail 50 may be as shown in FIG. In FIG. 7, the four rectifiers 41 to 44 are respectively connected to the four power supply rails 51 to 54 of the first to fourth rows adjacent to each other among the eight rows of power supply rails 51 to 58, and the other four rectifiers 45 to 48 are connected to four power supply rails 55 to 58 of adjacent fifth to eighth rows of the eight power supply rails 51 to 58, respectively. In this way, the gap between the two power-supplied

parts

340A and 340B provided on the workpiece holding jig 30 can be narrowed to match the gap between the adjacent power supply rails.

Also, as disclosed in Japanese Patent No. 6909526 by the present applicant, a conductive dummy plate is provided that is positioned close to the edge of the workpiece between two

adjacent clampers

325 and 326. can be In this case, two dummy plates can be provided corresponding to the front and rear surfaces of the work. The conducting path to the two dummy plates may also serve as the conducting path to the first and second clamp pieces of the clampers located on both sides of the two dummy plates.

Reference Signs List 1 surface treatment apparatus 10

treatment bath

11, 12 opening 20 anode 21 first anode 22 second anode 30 (31 to 38) 8 power supply rails 40 (41 to 48) Rectifier 50 (51 to 54) work holding jig 320 holding part 321

upper frame

321A, 321B two

plates

322, 323 two

vertical frames

322A, 322B two

Plates

323A, 323B... Two plates 324...

Lower frame

324A, 324B... Two plates 325... Clamper 326... Clamper 325A... First clamp piece 325B...

Second clamp piece

340A, 340B... Second 1, second power-supplied portion, 370A, 370B... two conducting parts, 381 to 388... first to eighth conducting parts

Claims

a holding part for holding a rectangular workpiece to be immersed in the treatment liquid with the front and back surfaces of the workpiece vertical;
two power-supplied parts insulated from each other for setting the workpiece as a cathode;
two conductive portions that provide electrical continuity between the two power-supplied portions and the holding portion and are insulated from each other;
has
The holding part is
two electrically conductive plates extending parallel to one side of the workpiece and insulated from each other;
a clamper that sandwiches and holds the work, including a first conductive clamp piece that contacts the front surface of the work and a second conductive clamp piece that contacts the back surface of the work;
including
the first clamp piece is electrically connected to each one of the two power-supplied parts, the two conducting parts, and the two plates;
The work holding jig, wherein the second clamp piece is electrically connected to the other of the two power-supplied parts, the two conducting parts, and the two plates.
In claim 1,
The holding part includes an upper frame, a lower frame, and two vertical frames,
Each of the upper frame, the lower frame, and the two vertical frames includes the two plates, and a total of eight plates are provided;
The clamper is provided on each of the upper frame and the lower frame,
One of the two plates provided on each of the two vertical frames is electrically connected to one of the two plates provided on the lower frame,
A workpiece holding jig, wherein the other of the two plates provided on each of the two vertical frames is electrically connected to the other of the two plates provided on the lower frame.
In claim 2,
The two vertical frames are supported by the upper frame via an insulating member,
one of the two plates provided on the upper frame is electrically insulated from the two plates provided on each of the two vertical frames;
A workpiece holding jig, wherein the other of the two plates provided on the upper frame is electrically insulated from the two plates provided on each of the two vertical frames.
In claim 3,
The two conductive portions include first to eighth conductive portions, and the first conductive portion connects one of the two power-supplied portions and one end of one of the two plates provided on the upper frame. to conduct between
the second conductive portion conducts between one of the two power-supplied portions and the other end of one of the two plates provided on the upper frame;
the third conducting portion conducts between the other of the two power-supplied portions and the other end of the two plates provided on the upper frame;
the fourth conducting portion conducts between the other of the two power-supplied portions and the other end of the other of the two plates provided on the upper frame;
the fifth conducting part conducts between one of the two power-supplied parts and one of the two plates provided on one of the two vertical frames;
the sixth conducting portion conducts between one of the two power-supplied portions and one of the two plates provided on the other of the two vertical frames;
the seventh conducting portion conducts between the other of the two power-supplied portions and the other of the two plates provided on one of the two vertical frames;
The eighth conducting part is a work holding jig that conducts between the other of the two power-supplied parts and the other of the two plates provided on the other of the two vertical frames.
In claim 4,
A workpiece holding jig, wherein each of the first to fourth conductive portions has a higher electrical resistance than each of the fifth to eighth conductive portions.
a processing tank in which a rectangular workpiece is immersed in a processing liquid;
an anode disposed in the treatment bath, including a first anode facing the front surface of the work and a second anode facing the back surface of the work;
Eight rows of power supply rails insulated from each other and arranged in parallel;
Four rectifiers respectively connected between four of the eight rows of power supply rails and the first anode; a total of eight rectifiers, including four other rectifiers each connected between two anodes;
four movable workpiece holding jigs each holding the workpiece and electrically connected to each two of the eight rows of power supply rails;
including
A surface processing apparatus, wherein each of the four work holding jigs is the work holding jig according to any one of claims 1 to 5.
In claim 6,
the four rectifiers are connected to each of the four power supply rails in odd-numbered columns among the eight power supply rails;
The surface treatment apparatus, wherein the other four rectifiers are connected to the other four power supply rails in even-numbered rows among the eight power supply rails.
In claim 6,
the four rectifiers are respectively connected to the four power supply rails in the first to fourth columns adjacent to each other among the eight power supply rails;
The surface treatment apparatus, wherein the other four rectifiers are connected to the other four power supply rails in the fifth to eighth rows adjacent to each other among the eight rows of power supply rails.