JP6793966B2 - Work holding jig and surface treatment device - Google Patents

Description

The present invention relates to a work holding jig, a surface treatment device, and the like used in a surface treatment device such as a continuous plating device.

In a surface treatment device such as a continuous plating device, the work is hung down and held by a work holding jig, and the work is continuously conveyed in the liquid in the surface treatment tank. As shown in Patent Document 1, for example, the work holding jig is generally held by chucking the upper end of the work and hanging the work.

Further, another function of the work holding jig is to set the work as a cathode (cathode) with respect to the anode (anode) arranged in the surface treatment tank. An electric field is formed between the cathode and the anode to electrolyze the plating solution and plate the work surface. Therefore, the chuck member that chucks the upper end of the work is formed of a conductive member, and the work is set as a cathode via a work holding jig.

However, there is a limit in ensuring the in-plane uniformity of the surface treatment of the work only by securing the energization route at the upper end of the work. Therefore, the applicant of the present application has developed a work holding jig that supplies power from the vertical direction of the work via a chuck member that chucks the upper end and the lower end of the work (Patent Document 2).

JP-A-2009-132965 Japanese Patent No. 5898540

According to the technique disclosed in Patent Document 2, the in-plane uniformity of the current distribution of the work can be improved, but for example, the resistance difference of the energization route for energizing the upper and lower ends of the work can be further reduced, or the work can be made. It is desired to further improve the in-plane uniformity by reducing the resistance difference of the energization route that energizes the front and back surfaces of the above.

In some aspects of the present invention, the resistance difference of the energization route for energizing the upper and lower ends or the front and back surfaces of the work can be further reduced to further improve the in-plane uniformity of the current distribution of the work. It is an object of the present invention to provide a tool and a surface treatment apparatus.

(1) One aspect of the present invention is a work holding jig that holds a rectangular work in a vertical state in a treatment liquid in a treatment tank and sets the work as a cathode.
A conductive frame-shaped member including a horizontal frame member including an upper frame member and a lower frame member, and a pair of vertical frame members electrically connected to the lower frame member, and arranged around the work. ,
A plurality of conductive first chuck members supported by the upper frame member and gripping the upper side of the work, and
A plurality of conductive second chuck members supported by the lower frame member and gripping the lower side of the work,
Common power supply and
A first energizing unit that energizes the upper frame member from the common power feeding unit,
A second energizing unit having a resistance value smaller than that of the first energizing unit, which energizes the pair of vertical frame members from the common feeding unit,
Have,
The first energizing unit is
A pair of first conductive members that are electrically connected and fixed to both ends of the upper frame member and guide the pair of vertical frame members vertically and vertically via insulating members.
A pair of second conductive members that electrically connect the common power feeding unit and the pair of first conductive members,
The work holding jig including.

According to one aspect of the present invention, a plurality of first chuck members are energized from a common power feeding unit via a pair of first and second conductive members, which are first energizing portions, and an upper frame member, and are common. A plurality of second chuck members are energized from the power feeding unit via a second energizing portion having a resistance value smaller than that of the first energizing portion, a pair of vertical frame members, and a lower frame member.

Here, the first energizing portion does not directly energize the upper frame member by the shortest route as in Patent Document 2, but via a pair of first and second conductive members that also serve as an elevating guide for the pair of vertical frame members. Is energized. Therefore, it becomes easy to set the resistance value of the first energizing portion to be substantially equal to the total resistance value of the second energizing portion and the pair of vertical frame members. As a result, the current flowing from the plurality of first chuck members to the work can be made substantially equal to the current flowing from the plurality of second chuck members to the work, and the in-plane uniformity of the current distribution of the work can be further improved. Further, the pair of first conductive members that are electrically connected and fixed to both ends of the upper frame member can also be used as a member that guides the pair of vertical frame members so as to be vertically movable via the insulating member. .. As a result, the lower frame member and the plurality of second chuck members supported by the pair of vertical frame members move downward due to their own weight to apply tension to the work and prevent bending that may occur especially in the thin plate-shaped work. can do. Moreover, since the upper frame member, the pair of first conductive members, and the pair of vertical frame members are electrically insulated by the insulating member, the energization routes of the first and second energizing portions should be electrically insulated. Can be done.

(2) In one aspect of the present invention, each of the pair of second conductive members is redundantly formed by bypassing each shortest route between each of the pair of first conductive members and the common feeding portion. be able to. In this way, it becomes easier to set the resistance value of the first energizing portion to be substantially equal to the total resistance value of the second energizing portion and the pair of vertical frame members.

(3) In one aspect of the present invention, each of the pair of first conductive members may be provided with a vertically elongated hole, and each of the pair of vertically frame members may be provided with the insulating member guided along the vertically elongated holes. it can. By doing so, the resistance value of the pair of first conductive members having the vertically elongated holes increases, so that the resistance value of the first energizing portion is set to be substantially equal to the total resistance value of the second energizing portion and the pair of vertical frame members. Becomes even easier.

(4) In one aspect of the present invention, the second energizing portion may include two conductive cables that electrically connect the common feeding portion and the upper end portions of the pair of vertical frame members. By reducing the resistance value of the second energizing portion in this way, it becomes easier to set the resistance value of the first energizing portion to be substantially equal to the total resistance value of the second energizing portion and the pair of vertical frame members.

(5) In one aspect of the present invention
The work holding jig energizes the work and processes both sides of the work.
Each of the plurality of first chuck members and the plurality of second chuck members
A fixed chuck piece fixed to the horizontal frame member and
A movable chuck piece that is freely supported by the fixed chuck piece and
An elastic member that maintains the holding state of the work sandwiched between the fixed chuck piece and the movable chuck piece, and
Including
The elastic member can be at least a conductive leaf spring that is electrically connected and fixed to the horizontal frame member and the movable chuck piece.

(6) Another aspect of the present invention is
A work holding jig that energizes the work and processes both sides of the work.
A fixed chuck piece fixed to a conductive member and
A movable chuck piece that can swing with respect to the fixed chuck piece,
An elastic member that maintains a holding state of the work sandwiched between the fixed chuck piece and the movable chuck piece, and
Including
The elastic member relates to a work holding jig which is a conductive leaf spring which is electrically conducted and fixed to at least the conductive member and the movable chuck piece.

According to the above-described aspects (5) and (6), the movable chuck piece can be energized from the horizontal frame member (conductive member) via the leaf spring. Generally, the movable chuck piece is oscillatedly supported by the shaft portion supported by the fixed chuck piece, and is inserted into the shaft portion through an elastic member that maintains the holding state of the work sandwiched between the fixed chuck piece and the movable chuck piece. A torsion coil spring is used. In this case, a fixed chuck piece, a shaft portion, and a torsion coil spring are interposed in the energizing route between the conductive member and the movable chuck piece. However, the shaft portion and the intervening member, which is the torsion coil spring, only locally contact the fixed chuck piece and the movable chuck piece. Therefore, the resistance value of the energization route from the conductive member to the movable chuck piece via the intervening member is significantly larger than the resistance value of the energization route from the conductive member to the fixed chuck piece. When both sides of the work were energized to perform surface treatment on both sides of the work, the uniformity of treatment on the front and back surfaces of the work could not be ensured due to the above-mentioned difference in resistance value. According to the above-described aspects (4) and (5), the uniformity of processing on the front and back surfaces of the work can be improved by energizing the movable chuck piece from the electric member via the leaf spring. Moreover, the number of parts does not increase by using the leaf spring that maintains the holding state of the work sandwiched between the fixed chuck piece 7 and the movable chuck piece 7 as the energizing member.

(7) In still another aspect of the present invention,
The leaf spring
A first fixing portion that is electrically conductively fixed to the movable chuck piece,
A second fixing portion that is electrically conducted and fixed to the conductive member,
A pair of arms connecting the first fixing portion and the second fixing portion,
Including
A part of the pair of arms arranged on both sides of the fixed chuck piece and the movable chuck piece in a plan view can include a U-shaped curved portion.

By doing so, the leaf spring has a line-symmetrical shape in a plan view, and the holding force of the leaf spring can be applied line-symmetrically and evenly, and the energization route of the leaf spring from the conductive member to the movable chuck piece is also line-symmetrical. Can be secured. As a result, the in-plane uniformity of the current distribution of the work is enhanced.

(8) In still another aspect of the present invention,
The fixed chuck piece is electrically insulated and fixed to the conductive member.
The leaf spring
A first fixing portion that is electrically conductively fixed to the movable chuck piece,
A second fixing portion that is electrically conducted and fixed to the conductive member,
A third fixing portion that is electrically conducted and fixed to the fixed chuck piece,
A pair of arms connecting the first fixing portion and the second fixing portion,
Including
The second fixing portion is located between the first fixing portion and the third fixing portion in the longitudinal direction of the leaf spring.
The pair of arms may include a partially U-shaped curved portion arranged on both sides of the fixed chuck piece and the movable chuck piece in a plan view.

In this way, the conductive member forms an axisymmetric energization route on the movable chuck piece via the second fixed portion, the pair of arm portions, and the first fixed portion, so that the in-plane uniformity of the current distribution of the work is improved. .. Further, an energizing route is formed in the fixed chuck piece from the conductive member electrically insulated from the fixed chuck piece via the second fixed portion and the third fixed portion of the leaf spring. As a result, both the first energization route from the conductive member to the fixed chuck piece and the second energization route from the conductive member to the movable chuck piece are formed by the leaf spring, and the resistance value between the first and second energization routes. The difference can be made smaller. As a result, the uniformity of processing on the front and back surfaces of the work can be further improved.

(9) In another aspect of the present invention, the shaft portion is supported by the fixed chuck piece and swingably supports the movable chuck piece, and the first fixed portion is set with respect to the position of the shaft portion. It can be fixed to the movable chuck piece at a position biased toward the chuck end side of the movable chuck piece.

By doing so, the chuck end of the movable chuck piece can be moved and urged to one side of the fixed chuck by the leaf spring, and the resistance value of the second energization route via the U-shaped curved portion of the leaf spring can be increased by the first fixed portion. It can be offset by shortening the distance from the movable chuck piece to the chuck end of the movable chuck piece.

(10) In another aspect of the present invention, the shaft portion is supported by the fixed chuck piece and swingably supports the movable chuck piece, and the first fixed portion is the shaft in the plan view. The movable chuck piece is fixed to the movable chuck piece at a position biased toward the chuck end side of the movable chuck piece from the position of the portion, and the third fixed portion is the fixed chuck with respect to the position of the shaft portion in the plan view. It can be fixed to the fixed chuck piece at a position biased toward the end opposite to the chuck end of the piece.

By doing so, the length of the first energizing route from the second fixing portion of the leaf spring to the chuck end of the fixed chuck piece via the third fixing portion is increased, so that the second fixing portion of the leaf spring is U-shaped. The difference between the resistance value of the second energization route and the resistance value of the first energization route from the curved portion and the first fixing portion to the chuck end of the movable chuck piece can be reduced.

(11) Yet another aspect of the present invention is
A surface treatment tank that houses the treatment liquid and has an upper end opening,
The work holding jig according to any one of (1) to (10), wherein the work immersed in the treatment liquid of the surface treatment tank is hung down and held, and the work is set as a cathode.
An anode electrode arranged at a position facing the work in the surface treatment tank,
Defines a surface treatment device with.

It is a vertical sectional view of the surface treatment apparatus which concerns on embodiment of this invention. It is a partially enlarged view of FIG. It is a perspective view of the work holding jig of the comparative example. It is a figure which shows the two guide rails and the work holding jig of a comparative example. It is a figure which shows the energized part of the work holding jig which concerns on embodiment of this invention. It is a front view which shows the energizing part and the work holding part of the work holding jig which concerns on embodiment of this invention. FIG. 7 (A) is a partially connected view showing a support structure of the pair of conductive members that guide the pair of vertical frame members so as to be able to move up and down, and FIG. 7 (B) is formed on the first conductive member. It is a figure which shows the vertical hole. It is a figure which shows the 2nd feeding part of Patent Document 2. It is a side view of the 1st and 2nd chuck members. It is a top view of the 1st and 2nd chuck members. It is a bottom view of the 1st and 2nd chuck members. It is a schematic diagram which shows the anode electrode part arranged in the processing tank of FIG.

Hereinafter, preferred embodiments of the present invention will be described in detail. It should be noted that the present embodiment described below does not unreasonably limit the content of the present invention described in the claims, and all of the configurations described in the present embodiment are essential as a means for solving the present invention. Is not always.

1. 1. Outline of Surface Treatment Device FIG. 1 is a vertical cross-sectional view of a surface treatment device, for example, a continuous plating treatment device. In the continuous plating processing apparatus 10, a plurality of transfer jigs 30A for holding the work 20 such as a circuit board are circulated and transported in a direction perpendicular to the paper surface of FIG. In FIG. 1, one of the circulation transport paths 100 shows two parallel linear transport paths 110 and 120. The two straight transport paths 110 and 120 are connected at both ends to form a loop-shaped circulation transport path 100.

In the circulation transport path 100, a plating tank (in a broad sense, a surface treatment tank) 200 for surface-treating the work 20 held by each of the plurality of work holding jigs 30A, for example, and a circulation transport path rather than the plating tank 200. Untreated work 20 provided upstream of 100 A carry-in portion (not shown) to be carried into a plurality of transfer jigs 30A, and a processed work 20 provided downstream of the circulation transfer path 100 from the plating tank 200. Is provided with a carry-out portion (not shown) for carrying out the work from the plurality of work holding jigs 30A.

In the present embodiment, the plating tank 200 is provided along the second straight transport path 120, and the carry-in portion and the carry-out portion are provided in the first straight transport path 110. The circulation transport path 100 further includes a pretreatment tank group 230 arranged on the upstream side of the plating tank 200 and a posttreatment tank group (not shown) arranged on the downstream side of the plating tank 200.

The pretreatment tank group 230 is configured by arranging, for example, a degreasing tank, a hot water washing tank, a water washing tank, a shower tank, a pickling tank, and the like in order from the upstream side between the carry-in portion and the plating tank 200. The post-treatment tank is configured by arranging, for example, a shower tank and a flush tank in order from the upstream side between the plating tank 200 and the carry-out portion. The number and types of the pretreatment tank group 230 and the posttreatment tank group can be changed as appropriate.

As shown in FIG. 1, the continuous plating processing apparatus 10 has a plating tank (surface treatment tank in a broad sense) 200 containing a plating liquid Q (treatment liquid in a broad sense) and having an upper end opening 201. The continuous plating processing apparatus 10 is further parallel to the longitudinal direction of the plating tank 200 at a position deviated from above the upper end opening 201 of the plating tank 200, as shown in FIG. 2 in which a part of FIG. 1 is enlarged. It has, for example, two first guide rails 130 and a second guide rail 140 extending along a first direction (direction perpendicular to the paper surface). The plurality of transfer jigs 30A are arranged in the processing liquid of the plating tank 200 to hold the work 20 respectively, and are supported by the first and second guide rails 130 and 140. The number of guide rails may be one or three or more.

As shown in FIG. 3, each of the plurality of work holding jigs 30A has a transport portion 300 and a work holding portion 500. The transport portion 300 of the work holding jig 30A shown in FIG. 1 can be shared with the work holding jig 30B of the present embodiment described later. Of the work holding jig 30A shown in FIG. 1, the energizing portion 330 and the work holding portion 500 show comparative examples, and the power feeding portion 650 and the work holding portion 600 of the work holding jig 30B of the present embodiment shown in FIG. It's different.

The work holding jig 30A shown in FIG. 1 has a conveying unit 300 and an energizing unit 330. The transport portion 300 includes a horizontal arm portion 301, a first guided portion 310, and a second guided portion 320. As shown in FIG. 3, the horizontal arm portion 301 extends along a second direction B orthogonal to (in a broad sense) a first direction (transportation direction) A, for example, two first and second horizontal arms 301A. , 301B. As shown in FIG. 4, the first guided portion 310 is supported by one end side of the horizontal arm portion 301 and guided by the first guide rail 130. As shown in FIG. 4, the second guided portion 320 is supported on the other end side of the horizontal arm portion 301 and guided by the second guide rail 140.

As shown in FIG. 3, the energizing portion 330 is supported by a conductive horizontal arm portion 301 (301A, 301B) that is also used as a transport portion 300, a conductive support plate 331, and a support plate 331 hanging from the support plate 331. For example, it has two conductive vertical arm portions 332A and 332B (332). As shown in FIG. 3, the support plate 331 is fixed to the horizontal arm portion 301 at a position between the first guided portion 310 and the second guided portion 320.

As described above, in each of the plurality of jigs 30A, the first and second guided portions 310 and 320 on both end sides of the second direction B sandwiching the vertical arm portion 332 holding the work 20 are the first and first. 2 It has the form of a double-sided beam supported by guide rails 130 and 140. Therefore, in the present embodiment, the work 20 can be stably held and conveyed by suppressing the vertical movement during the transportation of the work holding jig 30A. Moreover, since the first and second guide rails 130 and 140 and the first and second guided portions 310 and 320, which are sliding portions, are located outside the upper end opening 201 of the plating tank 200, dust and the like are present. Does not fall into the plating tank 200 and contaminate the plating solution.

In the plating processing apparatus 10, the work 20 is used as a cathode, and the plating tank 200 accommodates anodes (anodes: for example, copper-based anode balls) 410L and 410R on both sides of the transport path of the work 20. Part) 202, 203 is provided, an electric field is formed between the cathode and the anode, the plating solution is electrolyzed, and the work 20 is electroplated. Therefore, it is necessary to energize the work 20 that is immersed in the plating solution Q and conveyed. In order to energize the work 20, for example, at least one of the first and second guide rails 130 and 140 can be an energizing rail. In this case, among the members constituting the work holding jig 30A, the material of the path for energizing the work 20 from the first and second guide rails 130 and 140 via the energizing portion 330 may be formed of an electric conductor.

Alternatively, as shown in FIGS. 1 and 2, the plating processing apparatus 10 may be provided with at least one energizing rail 210 separately from the first and second guide rails 130 and 140. In particular, the energizing rail 210 of the present embodiment has a plurality of, for example, four divided energizing rails 210A to be insulated from each other, as shown in FIG. 2, in order to carry out the current control method disclosed in JP-A-2009-132999. It has 210D. Each of the plurality of work holding jigs 30A has an energized portion 340 (FIGS. 2 and 3) which is energized in contact with any one of the four divided energizing rails 210A to 210D. The energized portion 340 is fixed to the horizontal arm portions 301 (301A, 301B) which are components of the energized portion 330.

As described above, in each of the plurality of jigs 30A, the first and second guided portions 310 and 320 on both end sides of the second direction B with the energized portion 340 sandwiched are the first and second guide rails 130. It has a form of double-sided support supported by 140. Therefore, it is possible to stably maintain contact with the energized rail 210 by suppressing the vertical movement of the energized portion 340 during the transfer of the work holding jig 30A.

FIG. 5 shows the details of the energized portion 340. The energized portion 340 connects the conductive support plate 350 fixed to the horizontal arm portion 301 (301A, 301B) and the conductive contact portion 341 with, for example, two conductive parallel links 342A, 342B. It has a parallel link mechanism 342 of a node rotation chain. The two links 342A and 342B are constantly moved and urged in the clockwise direction by the torsion coil springs 343 and 343 which are urging members. As a result, the contact portion 341 can be brought into contact with the energizing rail 210 with an appropriate contact pressure.

Further, the two parallel links 342A and 342B are inclined so that the upper fulcrum precedes and the lower fulcrum follows. As a result, the contact portion 341 travels in a form of being pulled by the transfer jig 30A, so that the traveling is stable.

2. 2. Current-carrying part and work holding part of the comparative example As described above, the current-carrying part 330 of the work holding jig 30A of the comparative example includes the conductive horizontal arm part 301 and the conductive support plate 331 as shown in FIG. , With conductive vertical arm portions 332A, 332B (332). Further, a work holding portion 500 as a comparative example is hung and supported on the two vertical arm portions 332A and 332B.

As shown in FIG. 3, the work holding portion 500 includes a plurality of conductive first chuck members 510 that grip the upper side 20a of the rectangular work 20, and a lower 20b that faces the upper side 20a of the rectangular work 20 in the vertical direction C. It has a plurality of conductive second chuck members 520 for gripping, and a frame-shaped member 530 which is arranged so as to surround the rectangular work 20 and supports the plurality of first chuck members 510 and the plurality of second chuck members 520. ..

The frame-shaped member 530 includes a conductive upper frame member 531 that supports a plurality of first chuck members 510, a conductive lower frame member 532 that supports a plurality of second chuck members 520, and both ends of the upper frame member 531. It has two conductive vertical frame members 533, 534 that connect the portion and both ends of the lower frame member 532, respectively.

As described above, in the frame-shaped member 530 of the comparative example, the upper frame member 531 and the lower frame member 532 are electrically conducted by the two vertical frame members 533 and 534. In order to energize the lower frame member 532 from the two vertical arm portions 332A and 332B that function as the energizing portion, the upper frame member 531 was passed through. Therefore, conventionally, the resistance value of the energization route to the lower frame member 532 is inevitably larger than the resistance value of the energization route to the upper frame member 531. Therefore, the current distribution in the work 20 has a higher current value as the upper side 20a and a lower current value as the lower side 20b, and the in-plane uniformity is not good.

3. 3. Work holding part related to work holding jig in this embodiment 3.1. The first and second chuck members, the frame-shaped member, and the first and second current-carrying parts FIG. 6 show the work holding jig 30B according to the embodiment of the present invention, and have a configuration different from that of the work holding jig 30A of the comparative example. The work holding portion 600 having the above is shown. The work holding jig 30A of the comparative example and the work holding jig 30B of the present embodiment can share the transport unit 300 shown in FIG. The work holding jig 30B of FIG. 6 is different from the work holding jig 30A of FIG. 3 in the structure of the work holding portion 600 including the common feeding portion 650. The common power feeding unit 650 is transferred from the contact portion 341 (FIG. 5) of the transport portion 300 shown in FIG. 3 to the work holding portion 600 via the support plate 350, the horizontal arm portions 301 (301A, 301B), and the support plate 331. It is connected to the energizing route to reach. FIG. 6 shows a structure that replaces the vertical arm portions 332 (332A, 332B) and the work holding portion 500 shown in FIG. 3, and the common feeding portion 650 shown in FIG. 6 is connected to the support plate 331 shown in FIG. ..

The work holding portion 600 shown in FIG. 6 has a plurality of conductive first chuck members 610 for gripping the upper side 20a of the rectangular work 20 and a plurality of conductive second chuck members 620 for gripping the lower side 20b of the rectangular work 20. A frame-shaped member 630 that is arranged around the rectangular work 20 and supports a plurality of first chuck members 610 and a plurality of second chuck members 620, a common power feeding unit 650, a first energizing unit 660, and a second energizing unit. It has a part 670 and. In the present embodiment, the work holding portion 600 connects the common power feeding portion 650 and the frame-shaped member 630 with, for example, two insulating arms 601, 601.

Here, when a particularly thin work is targeted for surface treatment, the work 20 is transported in the processing tank 200 when the work 20 is lowered and charged into the processing tank 200 or in the transport direction A of FIG. At that time, the hanging state of the work 20 cannot be maintained due to the hydraulic pressure.

Since the work holding portion 600 of the present embodiment chucks the upper and lower sides 20a and 20b of the work 20, the vertical posture of the work 20 can be held even when hydraulic pressure acts. The second chuck member 620 is movable in the vertical direction. This point will be described later.

In this embodiment, deformation can be prevented even with an ultra-thin work 20 having a thickness of 100 μm or less, preferably 60 μm or less. In the present embodiment, the thickness of the work 20 is, for example, 40 μm = 0.04 mm. Since the work holding portion 500 of the comparative example also has the upper and lower first and second chuck members 510 and 520, the work 20 can be prevented from being deformed, which is the same as that of the present embodiment.

However, when the frame-shaped member 530 and the first and second chuck members 510 and 520 are made conductive as in the work holding portion 500 of the comparative example, the lower frame member 532 that supports the second chuck member 520 is connected. The resistance value of the energization route is inevitably larger than the resistance value of the energization route to the upper frame member 531 that supports the first chuck member 510. This is because the energization route to the lower frame member 532 always passes through the energization route to the upper frame member 531. Further, when only the upper end of the work is chucked by the holding jig as in the prior art of Patent Document 1, the energization route is limited to the upper frame member only. Therefore, the current flowing from the anode to the work and the frame-shaped member via the liquid (or the flow of electrons in the opposite direction) becomes easier to flow toward the upper end side of the work chucked by the work holding jig, and is inside the work. The current distribution becomes non-uniform in the work surface. The in-plane uniformity of the work current distribution affects the surface treatment quality of the work.

In the present embodiment, the frame-shaped member 630 arranged so as to surround the rectangular work 20 includes a conductive upper frame member (horizontal frame member) 631 that supports a plurality of first chuck members 610 and a plurality of second chuck members. It can have a conductive lower frame member (horizontal frame member) 632 that supports 620, and a pair of conductive vertical frame members 633 and 634. The plurality of first chuck members 610 have a frame-shaped member 630 with respect to the upper frame member (horizontal frame member) 631, and the plurality of second chuck members 620 have a frame-shaped member 630 with respect to the upper frame member (horizontal frame member) 632. It is arranged line-symmetrically with respect to the vertical center line. Further, in the present embodiment, the first energizing unit 660 that supplies power from the common power feeding unit 650 to the upper frame member 631 is shared with the pair of first conductive members 661 and 662 provided at both ends of the upper frame member 631. It may have a pair of second conductive members 663,664 that electrically connect the portion 650 and the pair of first conductive members 640A and 640B. The second energizing unit 670 that supplies power from the common power feeding unit 650 to the pair of vertical frame members 633 and 634 has, for example, two vertical frame energizing cables 671A and 671B.

The energization route from the common power supply unit 650 to the first chuck member 610 via the first energization unit 660 and the energization route from the common power supply unit 650 to the second chuck member 620 via the second energization unit 670 will be described later. It is electrically insulated by the insulating member 640, and the resistance value can be set independently. As a result, the in-plane uniformity of the current distribution of the work 20 is improved, and the surface treatment quality of the work 20 is further improved.

In the present embodiment, the plurality of first chuck members 610 and the plurality of second chuck members 620 are electrically insulated from each other. Moreover, the energization from the common power feeding unit 650 to the first and second chuck members 610 and 620 is also separated into the first and second energizing units 660 and 670 which are electrically insulated from each other. The first energizing unit 660 energizes a plurality of first chuck members 610 from the common power feeding unit 650 via the upper frame member 531 which is a part of the frame-shaped member 630. The second energizing unit 670 energizes a plurality of second chuck members 620 from the common power feeding unit 650 via the pair of vertical frame members 533, 534 and the lower frame member 532, which are other parts of the frame-shaped member 630.

Therefore, the energization route from the common power supply unit 650 to the first chuck member 610 via the first energization unit 660 and the energization route from the common power supply unit 650 to the second chuck member 620 via the second energization unit 670 are , The resistance value can be set independently. As a result, the resistance value of the energizing route from the common feeding unit 650 to the plurality of first chuck members 610 and the resistance value of the energizing route from the common feeding unit 650 to the plurality of second chuck members 620 are substantially equal. Can be set. As a result, the in-plane uniformity of the current distribution of the work 20 can be improved, and the surface treatment quality of the work 20 can be further improved.

In particular, in the present embodiment, the first energizing unit 660 that energizes the upper frame member 631 from the common power feeding unit 650 has a pair of first conductive members 661 and 662 and a pair of second conductive members 663 and 664. The pair of first conductive members 661 and 662 are electrically connected and fixed to both ends of the upper frame member 631, and the pair of vertical frame members 533 and 534 can be moved up and down via an insulating member 640 described later. invite. The pair of second conductive members 663,664 electrically connects the common power feeding unit 650 and the pair of first conductive members 661,662. In this way, the first energizing unit 660 is redundantly formed. Further, each of the pair of second conductive members 663 and 664 is redundantly formed by bypassing each shortest route between each of the pair of first conductive members 661 and 662 and the common power feeding unit 650. In the present embodiment, each of the pair of second conductive members 663 and 664 is connected to one of the vertical piece 665 whose upper end is connected to the common feeding portion 650 and one end of the pair of first conductive members 661 and 662. It has a horizontal piece 666 and an inclined piece 667 that connects the lower end of the vertical piece 665 and the other end of the horizontal piece 666, and is formed redundantly.

Here, according to FIG. 6 of Patent Document 2, the first energizing portion 660 directly energizes the upper frame member 631 from the common energizing portions 301A and 301B, and moreover, a part of the constituent elements of the first energizing portion 660. The conductive connecting portion 662 (662A, 662B) is linear downward, which is the shortest route between the insulating connecting portion 661 supporting the common energizing portions 301A and 301B and the upper frame member 631. Extends to. On the other hand, as shown in FIG. 6, the first energizing unit 660 of the present embodiment does not directly supply power to the upper frame member 631 from the common power feeding unit 650, but instead connects the pair of first conductive members 661 and 662. Power is supplied to the upper frame member 631 by interposing it. In addition, the pair of second conductive members 663 and 664 that feed the pair of first conductive members 661 and 662 from the common power feeding unit 650 are redundantly formed as described above. Therefore, the resistance value of the power feeding path from the common power feeding unit 650 to the upper frame member 631 can be easily set larger in the first energizing unit 660 of the present embodiment than in the first energizing unit 660 of Patent Document 2. it can.

On the other hand, both Patent Document 2 and the present embodiment have in common that the second energizing unit 670 has two vertical frame energizing cables 671A and 671B. However, in the second energizing portion 670 of Patent Document 2, as shown in FIG. 8, the vertical frame energizing cable 671A (671B) is connected to the vertical frame member 633 (634) via the compression coil spring 643 and the fixing member 644. Has been done. The fixing member 644 fixes the vertical frame energizing cables 671A and 671B to the insulating guide member 641 fixed to the upper frame member 631. In the insulating guide member 641, two horizontal pieces 641B and 641C are connected to the vertical piece 641A, and the vertical frame energizing cables 671A and 671B are fixed to the horizontal piece 641C by bolts 644A, nuts 644B and washers 644C and 644D. Below the horizontal piece 641B, an insulating tubular member 642 that movably guides the upper end portion 633A (634A) of the vertical frame member 633 (634) is provided. The upper end portion 633A (634A) has a flange 633B (634B) at a position where it is inserted into a hole 642A or the like of the insulating tubular member 642 and protrudes upward from the horizontal piece 641B. The compression coil spring 643 is arranged between the washer 644D and the flange 633B (634B), and applies tension to the work 20 by pushing down the vertical frame member 633 (634). Therefore, the second energizing unit 670 has a feeding path in the present embodiment as compared with Patent Document 2 which requires a compression coil spring 643 or the like in the feeding path from the common feeding section 650 to the pair of vertical frame members 633 and 634. The resistance value can be easily set small.

From the above, the resistance value in the first energizing unit 660 of the present embodiment can be set substantially equal to the total resistance value of the second energizing unit 670 and the vertical frame member 633 (634). As a result, the resistance value of the energizing route from the common feeding unit 650 to the plurality of first chuck members 610 and the resistance value of the energizing route from the common feeding unit 650 to the plurality of second chuck members 620 are substantially equal. Can be set.

3.2. Liftable support structure for a pair of vertical frame members The pair of vertical frame members 633 and 634 are vertically supported by a pair of first conductive members 661 and 662. FIG. 7A shows a support structure that can be raised and lowered, and FIG. 7B shows at least one, for example, two vertically elongated holes 661A formed in the first conductive member 661. The first conductive member 662 is also provided with a vertically elongated hole 662A (see FIG. 7A).

FIG. 7A shows a vertical frame member 634 that is vertically supported by the first conductive member 662. The vertical frame member 633 is also supported by the first conductive member 661 by the same support structure as in FIG. 7A. The vertical frame member 664 has an insulating member 635 guided along a vertically elongated hole 662A formed in the first conductive member 662. The insulating member 635 allows the vertical frame member 664 to move up and down along the vertically elongated hole 662A formed in the first conductive member 662, and is electrically insulated from the first conductive member 662.

The insulating member 635 can include, for example, a shaft portion 635B with a flange 635A and an insulating washer 635C. The flange 635A is arranged between the vertical frame member 634 and the first conductive member 662, and the shaft portion 635B is inserted into the vertically elongated hole 662A. The shaft length of the shaft portion 635B is set to be longer than the thickness t of the first conductive member 662. The insulating washer 635C is arranged on the free end surface of the shaft portion 635B slightly protruding from the vertically elongated hole 662A. In this state, the insulating member 635 is fixed to the vertical frame member 634. For example, fasteners 636 such as screws, tapping screws or bolts are fastened to the vertical frame member 634 via holes formed in the insulating washer 635C, the shaft portion 635B and the flange 635A.

As shown in FIG. 7A, the shaft portion 635B of the insulating member 635 has a degree of freedom that allows it to move up and down along the vertically elongated hole 662A. Therefore, the vertical frame member 634 moves within the range of the vertically elongated hole 662A due to the weight of the vertical frame member 634, the lower frame member 632, and the second chuck member 620, so that tension can be applied to the work 20. In order not to bend the work 20 moved in the liquid, the tension applied to the work 20 is sufficient by the weights of the vertical frame member 634, the lower frame member 632, and the second chuck member 620. Therefore, in the present embodiment, an elastic member such as a spring that applies tension to the work 20 is unnecessary.

The advantage of the elevating support structure shown in FIG. 7A is that the processing for increasing the electrical resistance of the vertical frame members 633 and 634 is unnecessary or minimized. This is because when screws or bolts are used as the fasteners 636, it is only necessary to provide screw holes in the vertical frame members 633 and 634, and the screws or bolts are screwed into the screw holes. When a tapping screw is used as the fastener 636, it is only necessary to provide a pilot hole in the vertical frame member 633 and 634, and the tapping screw is screwed into the pilot hole. In addition, when the flange 635A of the insulating member 635 is fixed to the vertical frame members 633 and 634 by adhesion or the like, the processing of the vertical frame members 633 and 634 becomes unnecessary.

Here, the second energizing unit 670 and the vertical frame member 633, 634 are conductive members arranged between the common power feeding unit 650 and the lower frame member 632, and the common power feeding unit 650 and the upper frame member 631 It is required to have the same electric resistance as the first energizing unit 660 arranged between them. For that purpose, it is necessary to reduce the electric resistance of the vertical frame members 633 and 634. In the present embodiment, the vertical frame members 633 and 634 have, for example, a constant rectangular cross section over the entire length, and it is not necessary to provide an elongated hole, a spring, or the like to increase the electrical resistance.

3.3. Chuck Structure The structures of the first and second chuck members 610 and 620 will be described with reference to FIGS. 9 to 11. In the present embodiment, as shown in FIGS. 9 to 11, each of the plurality of first chuck members 610 and the plurality of second chuck members 620 is a horizontal frame member 700 (upper frame member 631 or lower frame) which is a conductive member. It has a fixed chuck piece 710 fixed to the member 632) and a movable chuck piece 720 that is movable with respect to the fixed chuck piece 710. The movable chuck piece 720 is swingably supported by a shaft portion 740 supported by the fixed chuck piece 710. As shown in FIG. 9, the work 20 can be sandwiched between the chuck ends 711 and 721 in a state where the chuck end 711 of the fixed chuck piece 710 and the chuck end 721 of the movable chuck piece 720 are closed. The pinched state of the work 20 can be released by operating the operation unit 722 located on the opposite side of the shaft portion 740 from the chuck end 721 to move the chuck end 721 away from the chuck end 711.

The work 20 is sandwiched by, for example, a fixed chuck piece 710 that contacts the front surface of the work 20 and a movable chuck piece 720 that contacts the back surface of the work 20. The sandwiched state of the work 20 can be maintained by the elastic member 730. In the present embodiment, the elastic member 730 is a conductive leaf spring that is electrically connected and fixed to at least the horizontal frame member 700 (upper frame member 631 or lower frame member 632) and the movable chuck piece 720. Can be done.

Here, as an elastic member that maintains the sandwiched state of the work sandwiched between the fixed chuck piece 710 and the movable chuck piece 720, a torsion coil spring inserted through the shaft portion 740 is generally used. In this case, the fixed chuck piece 710, the shaft portion 740, and the torsion coil spring are interposed in the energizing route between the conductive member 700 and the movable chuck piece 720. However, the shaft portion 740 and the intervening member, which is the torsion coil spring, only locally contact the fixed chuck piece 710 and the movable chuck piece 720. Therefore, the resistance value of the second energization route from the conductive member 700 to the movable chuck piece 720 via the intervening member is significantly larger than the resistance value of the first energization route from the conductive member 700 to the fixed chuck piece 710. When both sides of the work 20 are energized and both sides of the work 20 are surface-treated, the uniformity of the treatment on the front and back surfaces of the work 20 cannot be ensured due to the above-mentioned difference in resistance value. According to the structure of the present embodiment, by energizing the movable chuck piece 720 from the conductive member 700 (upper frame member 631 or lower frame member 632) via the leaf spring 730, the processing on the front and back surfaces of the work 20 is uniform. The sex can be improved. Moreover, by using the leaf spring 730 that maintains the holding state of the work 20 sandwiched between the fixed chuck piece 710 and the movable chuck piece 720 as the energizing member, the number of parts does not increase.

Here, the leaf spring 730 may have at least a pair of arm portions 733A and 733B connecting the first fixing portion 731, the second fixing portion 732, and the first fixing portion 731 and the second fixing portion 732. it can. The first fixing portion 731 of the leaf spring 730 is electrically conductive and fixed to the movable chuck piece 720 by the bolt 750. The second fixing portion 732 of the leaf spring 730 is formed by the bolt 751 and, if necessary, the conductive plates 752 and 753 on the front and back sides of the second fixing portion 732 to form a conductive member 700 (upper frame member 631 or lower frame member 632). , Electrically conducted and fixed. A conductive or insulating plate 754 may be provided between the conductive member 700 and the fixed chuck piece 71. When the plate 754 is an insulating plate, as shown in FIG. 9 or 11, the third fixing portion 733 of the leaf spring 730 can be electrically conductive and fixed to the fixing chuck piece 710. However, if the plate 754 is a conductive plate or the plate 754 is not provided, the third fixing portion 733 does not necessarily have to be provided. This is because the fixed chuck piece 710 conducts with the conductive member 700 without passing through the third fixing portion 733. In any case, the pair of arm portions 733A and 733B are partially arranged on both sides of the fixed chuck piece 710 and the movable chuck piece 720 in the plan view shown in FIG. 10 or 11, as shown in FIG. A curved portion curved in a U shape is formed.

In this way, the leaf spring 730 has a line-symmetrical shape in a plan view, and the holding force of the leaf spring 730 can be applied evenly in line symmetry, and the energization route of the leaf spring 730 from the conductive member 700 to the movable chuck piece 720. Can also be secured with line symmetry. As a result, the in-plane uniformity of the current distribution of the work 20 is enhanced.

Here, in the example shown in FIG. 9, the second fixing portion 732 is located between the first fixing portion 731 and the third fixing portion 733 in the longitudinal direction when the leaf spring 730 is deployed. Then, an energization route is formed from the conductive member 700 electrically insulated from the fixed chuck piece 710 to the fixed chuck piece 710 via the second fixed portion 732 and the third fixed portion 733 of the leaf spring 730. As a result, both the first energization route from the conductive member 700 to the fixed chuck piece 710 and the second energization route from the conductive member 700 to the movable chuck piece 720 are formed by the leaf spring 730, and the first and second energization routes are formed. The difference in resistance between routes can be made smaller. As a result, the uniformity of processing on the front and back surfaces of the work 20 can be further improved.

Further, in the present embodiment, as is clear from FIGS. 9 and 10, the first fixing portion 731 is provided at a position biased toward the chuck end 721 of the movable chuck piece 720 from the position of the shaft portion 740 in a plan view. ing. In this way, the leaf spring 730 can move and urge the chuck end 721 of the movable chuck piece 720 toward the fixed chuck piece 710. In addition, the resistance value of the second energization route via the U-shaped curved portion of the pair of arm portions 733A and 733B of the leaf spring 730 is increased from the first fixed portion 731 to the chuck end 721 of the movable chuck piece 720. It can be offset or mitigated by shortening the distance.

Further, in the present embodiment, as is clear from FIGS. 9 and 11, the position of the fixed chuck piece 710 is biased toward the end opposite to the chuck end 711 of the fixed chuck piece 710 from the position of the shaft portion 740 in a plan view. A third fixing portion 733 is provided. By doing so, the length of the first energizing route from the second fixing portion 732 of the leaf spring 730 to the chuck end 711 of the fixed chuck piece 710 via the third fixing portion 733 can be increased. As a result, the resistance of the second energization route to the chuck end of the movable chuck piece 720 via the second fixing portion 732 of the leaf spring 730, the U-shaped curved portion of the pair of arm portions 733A and 733B, and the first fixing portion 731. The difference between the value and the resistance value of the first energization route can be reduced.

4. Anode electrode for improving in-plane uniformity of current distribution in the work FIG. 12 schematically shows anode electrodes (anodes) 410R (410L) arranged on both sides of the transport path of the work 20 shown in FIG. .. The anode electrode 410R (410L) is energized by the anode bar 400 extending along the longitudinal direction of the treatment tank 200. Normally, the anode electrode 410R (410L) is directly connected to the anode bar 400, but in the present embodiment, the anode bar 400 is interposed between the anode bar 400 and the anode electrode 410R (410L) with an insulator 430. The anode electrode 410R (410L) is fixed to. A relay energizing unit 420 hanging from the anode bar 400 is provided. The contact member 420A at the lower end of the relay energizing unit 420 is provided at a position lower than the liquid level Q1 of the processing liquid Q in the processing tank 200. The contact member 420A is connected to, for example, an intermediate position in the vertical direction of the anode electrode 410R (410L), and is configured to energize the anode electrode 410R (410L).

The vertical intermediate position of the anode electrode 410R (410L) to which the relay energizing portion 420 is connected is preferably a position that divides the vertical dimension of the work 20 hanging and held by the work holding jig 30B into two. When a plurality of types having different vertical dimensions are used as the work 20, the vertical position of the contact member 420A can be adjusted by using a well-known elevating mechanism for the relay energizing unit 420. The contact member 420A can be brought into contact with the anode electrode 410R (410L) at a predetermined length in a direction perpendicular to the paper surface of FIG.

In the anode electrode 410R (410L), when the current from the contact member 420A flows through the treatment liquid in the treatment tank 200 to the work 20 which is the cathode (cathode), the current flows on the anode electrode 410L (410L). The current branches from the height position of the contact member 420A into the upward direction E1 and the downward direction E2. By using the anode electrode 410R (410L) shown in FIG. 9 in combination with the work holding jig 30B having the work holding portion 600 described above, the work 20 facing the relay current-carrying portion 420 of the anode electrode 410R (410L) Current flows evenly from the center position in the vertical direction to the first chuck member 610 and the second chuck member 620 on the cathode side, and the current flowing with respect to the work 20 improves the non-uniformity of the current distribution in the vertical direction. Will be done.

Although the present embodiment has been described in detail as described above, those skilled in the art will easily understand that many modifications that do not substantially deviate from the novel matters and effects of the present invention are possible. Therefore, all such modifications are included in the scope of the present invention. For example, a term described at least once in a specification or drawing with a different term in a broader or synonymous manner may be replaced by that different term anywhere in the specification or drawing. Further, all combinations of the present embodiment and modifications are also included in the scope of the present invention.

For example, the energizing portion 330 of the jig 30B can connect the energized portion 340 and the common feeding portion 650 with a cable without passing through the horizontal arm portion 301 or the like.

10 Surface treatment equipment (continuous plating equipment), 20 works, 20a upper side,
20b lower side, 30A, 30B work holding jig, 200 surface treatment tank (plating tank),
201 Top opening, 210 energizing rail, 210A-210D split energizing rail,
301, 301A, 301B 1st and 2nd horizontal arms, 340 Energized part,
410L, 410R anode electrode, 600 work holder, 610 first chuck member,
620 2nd chuck member, 630 frame-shaped member,
631 Upper frame member (horizontal frame member, conductive member), 632 Lower frame member (horizontal frame member, conductive member), 633,634 Pair of vertical frame members, 635 insulating member, 640 insulating member,
641 insulation plate, 642 insulation pin, 643 retaining flange, 650 common power supply part,
660 1st conductive part, 661,662 A pair of 1st conductive members,
663,664 A pair of second conductive members, 670 second energizing part,
671A, 671B Vertical frame energizing cable, 700 conductive members (upper frame member, lower frame member),
710 fixed chuck piece, 711 chuck end, 720 movable chuck piece,
721 chuck end, 730 elastic member (leaf spring), 731 first fixing part,
732 Second fixing part, 733A, 733B Pair of arms, 740 shaft part,
A 1st direction (transportation direction), B 2nd direction, C vertical direction, Q processing liquid (plating liquid),
Q1 Liquid level

Claims (9)

A work holding jig that holds a rectangular work vertically in the processing liquid in the treatment tank and sets the work as a cathode.
A conductive frame-shaped member including a horizontal frame member including an upper frame member and a lower frame member, and a pair of vertical frame members electrically connected to the lower frame member, and arranged around the work. ,
A plurality of conductive first chuck members supported by the upper frame member and gripping the upper side of the work, and
A plurality of conductive second chuck members supported by the lower frame member and gripping the lower side of the work,
Common power supply and
A first energizing unit that energizes the upper frame member from the common power feeding unit,
A second energizing unit having a resistance value smaller than that of the first energizing unit, which energizes the pair of vertical frame members from the common feeding unit,
Have,
The first energizing unit is
A pair of first conductive members that are electrically connected and fixed to both ends of the upper frame member and guide the pair of vertical frame members vertically and vertically via insulating members.
A pair of second conductive members that electrically connect the common power feeding unit and the pair of first conductive members,
A work holding jig characterized by containing. In the work holding jig according to claim 1,
Each of the pair of second conductive members is redundantly formed by bypassing each shortest route between each of the pair of first conductive members and the common power feeding portion. .. In the work holding jig according to claim 1 or 2.
A vertically elongated hole is provided in each of the pair of first conductive members.
A work holding jig characterized in that each of the pair of vertical frame members is provided with the insulating member guided along the vertically elongated hole. In the work holding jig according to any one of claims 1 to 3,
The work holding jig is characterized in that the second energizing portion includes two conductive cables that electrically connect the common feeding portion and the upper end portions of the pair of vertical frame members. In the work holding jig according to any one of claims 1 to 4.
The work holding jig energizes the work and processes both sides of the work.
Each of the plurality of first chuck members and the plurality of second chuck members
A fixed chuck piece fixed to the horizontal frame member and
A movable chuck piece that is freely supported by the fixed chuck piece and
An elastic member that maintains the holding state of the work sandwiched between the fixed chuck piece and the movable chuck piece, and
Including
A work holding jig characterized in that the elastic member is at least a conductive leaf spring that is electrically connected and fixed to the horizontal frame member and the movable chuck piece. A work holding jig that energizes the work and processes both sides of the work.
A fixed chuck piece that is electrically insulated and fixed to a conductive member,
A movable chuck piece that can swing with respect to the fixed chuck piece,
A leaf spring that maintains the holding state of the work sandwiched between the fixed chuck piece and the movable chuck piece, and
Including
The leaf spring
A first fixing portion that is electrically conductively fixed to the movable chuck piece,
A second fixing portion that is electrically conducted and fixed to the conductive member,
A third fixing portion that is electrically conducted and fixed to the fixed chuck piece,
A pair of arms connecting the first fixing portion and the second fixing portion,
Including
The second fixing portion is located between the first fixing portion and the third fixing portion in the longitudinal direction of the leaf spring.
The work holding jig is characterized in that the pair of arms includes a U-shaped curved portion that is partially arranged on both sides of the fixed chuck piece and the movable chuck piece in a plan view . In claim 6 ,
It has a shaft portion that is supported by the fixed chuck piece and swingably supports the movable chuck piece.
The work holding is characterized in that the first fixing portion is fixed to the movable chuck piece at a position biased toward the chuck end side of the movable chuck piece from the position of the shaft portion in the plan view. jig. In claim 6 ,
It has a shaft portion that is supported by the fixed chuck piece and swingably supports the movable chuck piece.
The first fixing portion is fixed to the movable chuck piece at a position biased toward the chuck end side of the movable chuck piece from the position of the shaft portion in the plan view.
The third fixing portion is fixed to the fixed chuck piece at a position biased toward the end opposite to the chuck end of the fixed chuck piece from the position of the shaft portion in the plan view. Work holding jig characterized by. A surface treatment tank that houses the treatment liquid and has an upper end opening,
The work holding jig according to any one of claims 1 to 8 , wherein a rectangular work immersed in the treatment liquid of the surface treatment tank is hung down and held, and the work is set as a cathode. ,
An anode electrode arranged at a position facing the work in the surface treatment tank,
A surface treatment apparatus characterized by having.