JP7529277B2 - Workpiece holding fixture and surface treatment device - Google Patents

Description

The present invention relates to a workpiece holding jig and a surface treatment device, etc.

The inventor has proposed a workpiece holding jig including N (N is plural) powered parts and N conductive paths insulated from one another (Patent Document 1). The N conductive paths insulated from one another are conducted to N different cathode setting parts including the workpiece, and one embodiment thereof is the front and back of the workpiece (two cathode setting parts). The inventor has also proposed a surface treatment device including this workpiece holding jig (Patent Document 2).

Meanwhile, the applicant of the present application has proposed a surface treatment device that supplies power to five workpiece holding jigs that hold up to five workpieces that can be simultaneously immersed in the treatment liquid of one surface treatment tank by contacting five rows of power supply rails that are each connected to a different rectifier (five rectifiers in Figure 1, five on each side of the workpiece, for a total of ten rectifiers in Figure 7) (Patent Document 3).

Patent No. 6820626 Patent No. 6744646 Patent No. 5457010

However, Patent Documents 1 to 3 do not disclose the specific structure of a workpiece holding jig having two mutually insulated conductive paths that connect the front and back of the workpiece, or a surface treatment device that uses the same.

The object of the present invention is to provide a work holding jig that utilizes the structure of the holding part essential to the work holding jig to have conductive paths that are connected to the front and back of the work with low resistance and are insulated from each other, and a surface treatment device using the same.
Another object of the present invention is to provide a surface treatment apparatus that can adjust the amount of current to the front and back surfaces of a workpiece individually while maintaining throughput and avoiding excessive size increase.

(1) One aspect of the present invention is
A holder that holds a rectangular workpiece to be immersed in a processing liquid with the front and back surfaces of the workpiece vertical;
Two mutually insulated power-receiving parts for setting the work as a cathode;
two conductive parts that conduct electricity between the two power-receiving parts and the holding part and are insulated from each other;
having
The holding portion is
Two conductive plates extending parallel to one side of the workpiece and insulated from each other;
A clamper including a conductive first clamp piece that contacts the front surface of the workpiece and a conductive second clamp piece that contacts the back surface of the workpiece, and clamping and holding the workpiece;
Including,
the first clamp piece is electrically connected to one of the two power receiving portions, the two conductive portions, and the two plates;
The second clamp piece relates to a workpiece holding jig that is electrically connected to the other of the two power receiving parts, the two conductive parts, and the two plates.

According to one aspect of the present invention, the holding part, which is an essential structure for a workpiece holding jig, includes two conductive plates and a clamper including first and second conductive clamp pieces. One of the two powered parts, two conductive parts, and two plates is electrically connected to the front surface of the workpiece via the first clamp piece of the clamper. The other of the two powered parts, two conductive parts, and two plates is electrically connected to the back surface of the workpiece via the second clamp piece of the clamper. In this way, by utilizing the structure required for the workpiece holding jig, a workpiece holding jig is provided that has conductive paths that are connected to the front and back surfaces of the workpiece with low resistance and are insulated from each other.

(2) In one aspect (1) of the present invention, the holding portion may include an upper frame, a lower frame, and two vertical frames. In this case, the upper frame, the lower frame, and the two vertical frames each include the two plates, and a total of eight plates are provided. The clamper is provided on each of the upper frame and the lower frame. One of the two plates provided on each of the two vertical frames is conductive with one of the two plates provided on the lower frame, and the other of the two plates provided on each of the two vertical frames is conductive with the other of the two plates provided on the lower frame. One of the two power-supplied parts, the two conductive parts, and the two plates of the upper frame is conductive with the surface of the workpiece via a first check piece provided on the upper frame. The other of the two power-supplied parts, the two conductive parts, and the two plates provided on the upper frame is conductive with the back surface of the workpiece via a second check piece provided on the upper frame. One of the two powered parts, the two conductive parts, and the two plates on each of the two vertical frames and the lower frame is electrically connected to the surface of the workpiece via a first check piece provided on the lower frame. The other of the two powered parts, the two conductive parts, and the two plates on each of the two vertical frames and the lower frame is electrically connected to the back surface of the workpiece via a second check piece provided on the lower frame. In this way, by utilizing the structure required for the workpiece holding jig, which is the upper frame, lower frame, and two vertical frames, it is possible to provide a conductive path that is connected to the front and back of the workpiece with low resistance and is insulated from each other.

(3) In one aspect of the present invention (2), the two vertical frames may be supported on the upper frame via an insulating member, and one of the two plates provided on the upper frame is insulated from the two plates provided on each of the two vertical frames, and the other of the two plates provided on the upper frame is insulated from the two plates provided on each of the two vertical frames. In this way, in the holding part, one conductive path that conducts electricity to the front and back surfaces of the workpiece via the upper frame and another conductive path that conducts electricity to the front and back surfaces of the workpiece via the two vertical frames and the lower frame can be electrically insulated from each other.

(4) In one aspect (3) of the present invention, the two conductive parts may include first to eighth conductive parts. In this case, the first conductive part provides conduction between one of the two powered parts and one end of one of the two plates provided on the upper frame, the second conductive part provides conduction between one of the two powered parts and the other end of one of the two plates provided on the upper frame, the third conductive part provides conduction between the other of the two powered parts and one end of the other of the two plates provided on the upper frame, the fourth conductive part provides conduction between the other of the two powered parts and the other end of the other of the two plates provided on the upper frame, and the fifth conductive part provides conduction between the other of the two powered parts and the other end of the other of the two plates provided on the upper frame. The conductive part provides electrical continuity between one of the two power-supplied parts and one of the two plates provided on one of the two vertical frames, the sixth conductive part provides electrical continuity between one of the two power-supplied parts and one of the two plates provided on the other of the two vertical frames, the seventh conductive part provides electrical continuity between the other of the two power-supplied parts and the other of the two plates provided on one of the two vertical frames, and the eighth conductive part provides electrical continuity between the other of the two power-supplied parts and the other of the two plates provided on the other of the two vertical frames. In this way, the two power-supplied parts and both ends (four ends in total) of the two plates provided on the upper frame can be electrically connected by the first to fourth conductive parts. In addition, the two power-receiving parts and one end of each of the two plates provided on the two vertical frames (a total of four other ends) can be electrically connected by the fifth to eighth conductive parts.

(5) In one aspect (4) of the present invention, each of the first to fourth conductive parts can have a larger electrical resistance than each of the fifth to eighth conductive parts. This makes it possible to set the electrical resistance of the path that conducts electricity from the first to fourth conductive parts through the upper frame to the front and back surfaces of the workpiece and the electrical resistance of the path that conducts electricity from the fifth to eighth conductive parts through the two vertical frames and the lower frame to the front and back surfaces of the workpiece, to be approximately equal.

(6) Another aspect of the present invention is
a processing tank in which a rectangular workpiece is immersed in a processing solution;
an anode disposed in the treatment tank, the anode including a first anode facing the front surface of the workpiece and a second anode facing the rear surface of the workpiece;
Eight rows of mutually insulated power supply rails;
a total of eight rectifiers including four rectifiers respectively connected between four of the eight power supply rails and the first anode, and four other rectifiers respectively connected between the other four of the eight power supply rails and the second anode;
Four movable workpiece holding jigs each holding the workpiece and electrically connected to two of the eight rows of power supply rails, respectively;
Including,
Each of the four workpiece holding jigs relates to a surface treatment device, which is a workpiece holding jig according to any one of aspects (1) to (5) of the present invention.

According to another aspect of the present invention, the front and back surfaces of a workpiece can be surface-treated by individually adjusting the amount of current to the front and back surfaces of the workpiece using a workpiece holding jig described in any one of aspects (1) to (5) of the present invention. In order to individually adjust the amount of current to the front and back surfaces of the workpiece, the maximum number of workpiece holding jigs that can pass through the treatment tank at the same time is set to four, so that the number of power supply rails and rectifiers can be eight each, thereby avoiding excessive size increase in the surface treatment device while maintaining throughput.

(7) In another aspect (6) of the present invention, the four rectifiers may be connected to the four odd-numbered power supply rails of the eight rows of power supply rails, respectively, and the other four rectifiers may be connected to the other four even-numbered power supply rails of the eight rows of power supply rails, respectively. In this way, the distance between the two power supply parts provided on the work holding jig can be made wider than the distance between adjacent power supply rails. This makes it easier to ensure space for connecting two conductive parts to two power supply parts.

(8) In another aspect (6) of the present invention, the four rectifiers may be connected to the four adjacent power supply rails in the first to fourth rows of the eight rows of power supply rails, respectively, and the other four rectifiers may be connected to the other four adjacent power supply rails in the fifth to eighth rows of the eight rows of power supply rails, respectively. In this way, the spacing between the two power-supplied parts provided on the workpiece holding jig can be narrowed to match the spacing between the adjacent power supply rails.

1 is a schematic plan view of a surface treatment apparatus according to an embodiment of the present invention; 1 is a schematic perspective view showing a basic structure of a work holding jig according to an embodiment of the present invention; 13 is a diagram for explaining a conduction path for passing current to the front and back surfaces of a workpiece via an upper frame. FIG. 13 is a diagram for explaining a conduction path for passing current to the front and back surfaces of a workpiece via an upper frame and a lower frame. FIG. FIG. 5 is a diagram showing a structure of the conductive path shown in FIG. 4 . FIG. 4 is a diagram showing the structure of a clamper. FIG. 11 is a schematic plan view of a surface treatment apparatus according to another embodiment of the present invention.

The following describes in detail a preferred embodiment of the present invention. Note that the embodiment described below does not unduly limit the content of the present invention described in the claims, and not all of the configurations described in the embodiment are necessarily essential as a means of solving the problem of the present invention.

1. Surface Treatment Apparatus Fig. 1 is a plan view showing a surface treatment apparatus 1 according to an embodiment of the present invention. In Fig. 1, the surface treatment apparatus 1 includes a treatment tank 10, an anode 20 provided in the treatment tank 10, a workpiece holding jig 30 for transporting a workpiece (not shown in Fig. 1), a rectifier 40, and a power supply rail 50. The treatment tank 10 contains a treatment liquid, such as a plating liquid, in which a rectangular workpiece is immersed. A plurality of treatment tanks 10 can be connected together, and in this case, openings 11 and 12 are provided at both ends of the longitudinal direction of the treatment tank 10 to allow the workpiece to pass between adjacent treatment tanks 10.

The anode 20 provided in the treatment tank 10 includes a first anode 21 facing the front surface of the workpiece and a second anode 22 facing the rear surface of the workpiece. Eight rectifiers 40 (41-48) are provided outside the treatment tank 10. Eight rows of mutually insulated power supply rails 50 (51-58) are provided outside the treatment tank 10 along the longitudinal direction of the treatment tank 10, for example, on one side of the treatment tank 10. The four rectifiers 41-44 are respectively connected between, for example, four of the eight rows of power supply rails 50 (51-58) and the first anode 21. The other four rectifiers 45-48 are respectively connected between the four power supply rails 55-58 and the second anode 22.

In the treatment tank 10, up to four workpiece holding jigs 31 to 34 are provided as workpiece holding jigs 30 that are movable along the longitudinal direction of the treatment tank 10 and each hold a workpiece and are electrically connected to two of the eight rows of power supply rails 50. These workpiece holding jigs 31 to 34 are sequentially carried into the treatment tank 10 from the upstream side in the transport direction A (e.g., an upstream treatment tank, not shown), and after moving, for example, continuously through the treatment tank 10, they are sequentially carried out to the downstream side in the transport direction A (e.g., a downstream treatment tank, not shown).

Here, each of the maximum four workpiece holding jigs 31 to 34 is connected to two different rows of power supply rails out of the eight rows of power supply rails 50 (51 to 58). In the state shown in FIG. 1, the most downstream workpiece holding jig 31 is connected to, for example, the odd-numbered first and fifth rows of power supply rails 51, 55. The workpiece holding jig 32 is connected to, for example, the even-numbered second and sixth rows of power supply rails 52, 56. The workpiece holding jig 33 is connected to, for example, the even-numbered third and seventh rows of power supply rails 53, 57. The workpiece holding jig 34 is connected to, for example, the even-numbered fourth and eighth rows of power supply rails 54, 58. At this time, the rectifier 41 is connected to the first anode 21 facing the surface of the workpiece held by the workpiece holding jig 31 and the first row of power supply rails 51 to adjust the current flowing through the surface of the workpiece held by the workpiece holding jig 31. The rectifier 45 is connected to the second anode 22 facing the back surface of the workpiece held by the workpiece holding jig 31 and to the fifth row of power supply rails 55, and adjusts the current flowing to the back surface of the workpiece held by the workpiece holding jig 31. Similarly, the current flowing to the front and back surfaces of the workpiece held by the workpiece holding jig 32 is individually adjusted by the rectifiers 42 and 46. The current flowing to the front and back surfaces of the workpiece held by the workpiece holding jig 33 is individually adjusted by the rectifiers 43 and 47. The current flowing to the front and back surfaces of the workpiece held by the workpiece holding jig 34 is individually adjusted by the rectifiers 44 and 48.

Here, among the maximum four workpiece holding jigs 31-34 that can pass through the treatment tank 10 at the same time, the workpiece held by at least one of the most upstream workpiece holding jig 31 and the most downstream workpiece holding jig 34 is partially immersed in the treatment liquid in the treatment tank 10, and the maximum three workpieces held by the maximum three workpiece holding jigs 31-33 or 32-34 are fully immersed in the treatment liquid in the treatment tank 10. In FIG. 1, two workpieces held by both the most upstream workpiece holding jig 31 and the most downstream workpiece holding jig 34 are partially immersed in the treatment liquid in the treatment tank 10, and the two workpieces held by the remaining workpiece holding jigs 32 and 33 are fully immersed in the treatment liquid in the treatment tank 10. Partial immersion refers to a state in which a part of the treatment surface of the workpiece is immersed in the treatment liquid in the treatment tank 10. Full immersion refers to a state in which the entire treatment surface of the workpiece is completely immersed in the treatment liquid in the treatment tank 10. In other words, the longitudinal length of the treatment tank 10 is long enough to fully immerse up to three workpieces held by up to three workpiece holding jigs 30.

When the number of workpieces that can be transported in the treatment tank 10 at the same time in a fully immersed state is N, the number of rectifiers 40 and power supply rails 50 is 2 × (N + 1), and this embodiment is an example of N = 3. In order to achieve the desired throughput while individually adjusting the amount of current to the front and back surfaces of the workpieces, if N is set to 2 or less, the number of connected treatment tanks 10 will increase, and if N is set to 4 or more, the width of the surface treatment device 1 including the treatment tanks 10 and power supply rails 50 will increase. With N = 3 in this embodiment, it is possible to avoid excessive size increase of the surface treatment device 1 while maintaining the individual adjustment of the amount of current to the front and back surfaces of the workpieces and the throughput. In addition, when the workpieces are carried in and out of the treatment tank 10, the rectifiers 41 to 48 can gradually increase (when carried in) or gradually decrease (when carried out) the current flowing through the workpiece according to the treatment area by adopting the method described in Patent Document 3.

2. Workpiece holding jig 2.1. Basic structure The basic structure of the workpiece holding jig 30 is roughly the same as that shown in FIG. 4 of Patent Documents 1 and 2, and the basic structure is shown in FIG. 2. This workpiece holding jig 30 has a horizontal arm section 300, a vertical arm section 310, a holding section 320 that holds a workpiece, a guided section 330, a power-supplied section 340, a pushed piece 350, and an engaged section 360. The horizontal arm section 300 extends along a direction B perpendicular to the conveying direction A. The vertical arm section 310 is suspended from the horizontal arm section 300 and held by the holding section 320, which is fixed to the vertical arm section 310 via a support frame 311. The holding section 320 includes an upper frame 321, two vertical frames 322 and 323 supported on the upper frame 321 so as to be capable of being raised and lowered, and a lower frame 324 fixed to the two vertical frames 322 and 323. The upper frame 321 is provided with a plurality of upper clampers 325 that clamp the upper edge of the workpiece. The lower frame 324 is provided with a plurality of lower clampers 326 that clamp the lower edge of the workpiece. Downward tension is applied to the workpiece by the lower clampers 326. However, if the workpiece is thick and/or if power is not supplied from the bottom of the workpiece, the two vertical frames 322, 323, the lower frame 324, and the lower clampers 326 may be omitted.

The guided portion 330 is guided by a guide rail (not shown) provided in the surface treatment device 1, and linearly guides the workpiece holding jig 30. The guided portion 330 can include rollers 331 that roll against the top surface of the guide rail, and rollers 332 that roll against both side surfaces of the guide rail (only the rollers that roll against one side surface are shown in FIG. 2).

The first and second power-supplied parts 340A and 340B as the power-supplied part 340 contact two different rows of the eight rows of power supply rails 50 (51 to 58) shown in Figure 1, and set the front and back surfaces of the workpiece to cathodes individually. The first and second power-supplied parts 340A and 340B each include two contacts 342 and 343 supported on the upstream and downstream sides of the first and second support arms 341A and 341B extending along the conveying direction A. The contacts 342 and 343 are supported by the support arm 341 via a parallel link mechanism and are spring-loaded so as to be pressed against the eight rows of power supply rails 50 shown in Figure 1. The four workpiece holding jigs 31 to 34 shown in FIG. 1 can contact two different rows of the eight rows of power supply rails 50 (51 to 58) shown in FIG. 1 by varying the positions of the first and second power receiving parts 340A, 340B in the direction B shown in FIG. 2. For this reason, it is preferable that the positions at which the first and second support arms 341A, 341B of the workpiece holding jig 30 are fixed relative to the horizontal arm portion 300 can be adjusted in the direction B shown in FIG. 2. In this way, the four types of workpiece holding jigs 31 to 34 shown in FIG. 1 can be prepared by adjusting one type of workpiece holding jig 30.

The workpiece holding jig 30 can have both a pushed piece 350 and an engaged part 360. The engaged part 360 can be engaged with a continuously moving part, such as a chain, to continuously transport the workpiece holding jig 30. The pushed piece 350 is pushed in the direction of arrow C by an intermittent transport device, transmitting an intermittent transport force to the workpiece holding jig 30. In this way, the workpiece holding jig 30 can be used for both intermittent transport and continuous transport. However, the workpiece holding jig 30 may be used for only one of intermittent transport or continuous transport.

2.2 Structure for individually adjusting the current flowing on the front and back of the workpiece In Fig. 2, two conductive parts that conduct electricity between the first and second power-receiving parts 340A, 340B of the workpiece holding jig 30 and the holding part 320 and are insulated from each other, and a conductive path provided in the holding part 320 are omitted. Figs. 3 and 6 show a conductive path that sets the workpiece as a cathode via the upper frame 321 of the holding part 320.

3, for example, the upper frame 321 of the holding portion 320 of the workpiece holding jig 30 has two conductive plates 321A, 321B insulated from each other, as shown in FIG. 6. The clamper 325 supported by the upper frame 321 of the workpiece holding jig 30 has a first clamp piece 325A and a second clamp piece 325B that are conductive and insulated from each other. The workpiece holding jig 30 further has two conductive parts 370A and 370B that conduct electricity between the two power-supplied parts 340A, 340B and the upper frame 321 (holding portion 320) and are insulated from each other. The negative terminal of the rectifier 41 is electrically connected to the surface of the workpiece via the power supply rail 51, the first power-supplied part 340A, the conductive part 370A, the plate 321A, and the first clamp piece 325A. On the other hand, the negative terminal of the rectifier 45 is electrically connected to the back surface of the workpiece via the power supply rail 55, the second power receiving portion 340B, the conductive portion 370B, the plate 321B, and the second clamp piece 325B. In this way, the current flowing from the rectifier 41 to the front surface of the workpiece and the current flowing from the rectifier 45 to the back surface of the workpiece can be adjusted independently by the rectifiers 41 and 45.

4 and 5 show in more detail the path through which current flows from the upper edge of the workpiece to the front and back surfaces of the workpiece via the upper frame 321 of the workpiece holding jig 30, and the path through which current flows from the lower edge of the workpiece to the front and back surfaces of the workpiece via the two vertical frames 322, 323 and the lower frame 324 of the workpiece holding jig 30. The two conductive parts 370A and 370B shown in FIG. 3 are composed of members 371-376 and first to eighth conductive parts 381-388 shown in FIG. 4 and FIG. 5.

The two contacts 342, 343 provided on the first power receiving portion 340A are electrically connected to the common connection portion 373, for example, by cables 371, 372. Similarly, the two contacts 342, 343 provided on the second power receiving portion 340B are electrically connected to the common connection portion 376, for example, by cables 374, 375. The cables 371, 372, 374, 375 can be routed between the first and second support arms 341A, 341B shown in FIG. 2 to the common connection portions 373, 376 supported by, for example, the vertical arm portion 310 or the support frame 311 of the work holding jig 30. In this case, as shown in FIG. 1, for example, if the workpiece holding jig 31 is in contact with the first row of power supply rails 51 and the fifth row of power supply rails 55, the distance between the first and second support arms 341A and 341B will increase, making it easier to route the cables 371, 372, 374, and 375.

Here, as shown in FIG. 5, the vertical frame 322 is formed by arranging two parallel conductive plates 322A and 322B in parallel with a gap. The vertical frame 323 is formed by arranging two parallel conductive plates 323A and 323B in parallel with a gap. The lower frame 324 is formed by arranging two parallel conductive plates 324A and 324B in parallel with a gap. One end of the plate 324A is connected to the lower end of the plate 322A, and the other end of the plate 324A is connected to the lower end of the plate 323A. Similarly, one end of the plate 324B is connected to the lower end of the plate 322B, and the other end of the plate 324B is connected to the lower end of the plate 323B. The upper frame 321 is also formed by arranging two parallel conductive plates 321A and 321B in parallel with a gap, as shown in FIG. 5 and FIG. 6. In order to ensure the strength of the upper frame 321, an insulating material 321C (FIG. 6) may be disposed between the plates 321A and 321B. The plate 321A of the upper frame 321 is connected to a conductive member 391 extending vertically as shown in FIG. 5. The plate 321B of the upper frame 321 is connected to a conductive member 392 extending vertically. The conductive members 391 and 392 extend parallel to each other in the vertical direction. The two vertical frames 322 and 323 may be electrically insulated from the upper frame 321 and supported by the upper frame 321. In this embodiment, the plates 322A and 323A in the vertical frames 322 and 323 are supported via the conductive member 391 and an insulator (not shown), and the plates 322B and 323B in the vertical frames 322 and 323 are supported via the conductive member 391 and an insulator (not shown). The two vertical frames 322, 323 may be electrically insulated from the upper frame 321 and supported on the upper frame 321 so that they can be raised and lowered. In this way, tension can be applied to the bottom end of the workpiece.

The first conductive part 381 provides electrical continuity between the common connection part 373 connected to the first power receiving part 340A and one end (e.g., the left end) of the plate 321A provided on the upper frame 321 via a conductive member 391 connected to one end of the plate 321A. The second conductive part 382 provides electrical continuity between the common connection part 373 connected to the first power receiving part 340A and the other end (e.g., the right end) of the plate 321A provided on the upper frame 321 via a conductive member 391 (omitted in FIG. 5) connected to the other end of the plate 321A. In this way, the first power receiving part 340A and both ends of the plate 321A provided on the upper frame 321 can be electrically connected by the first and second conductive parts 381 and 382.

The third conductive part 383 provides electrical continuity between the common connection part 376 connected to the second power receiving part 340B and one end (e.g., the left end) of the plate 321B provided on the upper frame 321 via a conductive member 392 (not visible in FIG. 5 as it overlaps with the conductive member 391) connected to one end of the plate 321B. The fourth conductive part 384 provides electrical continuity between the common connection part 376 connected to the second power receiving part 340B and the other end (e.g., the right end) of the plate 321B provided on the upper frame 321 via a conductive member 392 connected to the other end of the plate 321B. In this way, the second power receiving part 340B and both ends of the plate 321B provided on the upper frame 321 can be electrically connected by the third and fourth conductive parts 383 and 384.

The fifth conductive part 385 provides electrical continuity between the common connection part 373 connected to the first power receiving part 340A and the plate 322A provided on the vertical frame 322. The sixth conductive part 386 provides electrical continuity between the common connection part 373 connected to the first power receiving part 340A and the plate 323A provided on the vertical frame 323. In this way, the first power receiving part 340A and the upper ends of the plates 322A and 323A provided on the two vertical frames 322 and 323 can be electrically connected by the fifth and sixth conductive parts 385 and 386. Since the plates 322A and 323A are connected to both ends of the plate 324A of the lower frame 324, the first power receiving part 340A and the plate 324A of the lower frame 324 can be electrically connected.

The seventh conductive part 387 provides electrical continuity between the common connection part 376 connected to the second power receiving part 340B and the plate 322B provided on the vertical frame 322. The eighth conductive part 388 provides electrical continuity between the common connection part 376 connected to the second power receiving part 340B and the plate 323B provided on the vertical frame 323. In this way, the second power receiving part 340B and the upper ends of the plates 322B and 323B provided on the two vertical frames 322 and 323 can be electrically connected by the seventh and eighth conductive parts 387 and 388. Since the plates 322B and 323B are connected to both ends of the plate 324B of the lower frame 324, the second power receiving part 340B and the plate 324B of the lower frame 324 can be electrically connected.

Here, each of the first to fourth conductive parts 381 to 384 can have a larger electrical resistance than each of the fifth to eighth conductive parts 385 to 388. Each of the first to fourth conductive parts 381 to 384 is electrically connected to the upper frame 321, which is relatively close, while the fifth to eighth conductive parts 385 to 388 are electrically connected to the lower frame 324 via the two vertical frames 322 and 323. Therefore, in order to make the electrical resistance of the conductive path from the common connection parts 373 and 376 to the upper frame 321 equal to the electrical resistance of the conductive path from the common connection parts 373 and 376 to the lower frame 324, the electrical resistance of each of the first to fourth conductive parts 381 to 384 is made large. Specifically, each of the first to fourth conductive parts 381 to 384 is made of a metal plate bent, for example, in an L-shape as shown in FIG. 5, while the fifth to eighth conductive parts 385 to 388 are made of an electrical cable.

Figure 6 shows a clamper, for example the upper clamper 325. The lower clamper 326 can be configured in a similar manner. The upper clamper 325 is supported by a pair of plates 321A, 321B of the upper frame 321. The upper clamper 325 can include a first clamp piece 325A supported, for example fixed, by the plate 321A, and a second clamp piece 325B movably supported by the plate 321B. The second clamp piece 325B is rotatably biased in the direction of arrow D by, for example, a coil spring 325C, and is rotatably supported around a fulcrum 325D provided on the plate 321B. In Figure 6, since no workpiece is present, the first and second clamp pieces 325A, 325B are in pressure contact. After the second clamp piece 325B is rotated by an external force in the direction opposite to the direction of arrow D, the workpiece is placed between the first and second clamp pieces 325A and 325B, and when the external force is released, the workpiece is clamped between the first and second clamp pieces 325A and 325B. As a result, the first and second clamp pieces 325A and 325B are electrically insulated by the workpiece. In this way, the current flowing to the front surface of the workpiece via the plate 321A and the first clamp piece 325A can be electrically separated from the current flowing to the back surface of the workpiece via the plate 321B and the second clamp piece 325B.

3. Modifications Unlike Fig. 1, the electrical connection between the workpiece holding jig 30 and the power supply rail 50 may be as shown in Fig. 7. In Fig. 7, the four rectifiers 41-44 are connected to the four adjacent power supply rails 51-54 in the first to fourth rows of the eight rows of power supply rails 51-58, respectively, and the other four rectifiers 45-48 are connected to the four adjacent power supply rails 55-58 in the fifth to eighth rows of the eight rows of power supply rails 51-58, respectively. In this way, the distance between the two power-supplied parts 340A and 340B provided on the workpiece holding jig 30 can be narrowed to match the distance between the adjacent power supply rails.

Also, as in Patent No. 6909526 by the present applicant, a conductive dummy plate may be provided that is placed close to the edge of the workpiece between two adjacent clampers 325, 326. In this case, two dummy plates can be provided corresponding to the front and back surfaces of the workpiece. The conductive paths to the two dummy plates may also share the conductive paths to the first and second clamp pieces of the clampers located on both sides of the two dummy plates.

1... surface treatment device, 10... treatment tank, 11, 12... opening, 20... anode, 21... first anode, 22... second anode, 30 (31-38)... eight rows of power supply rails, 40 (41-48)... rectifier, 50 (51-54)... workpiece holding jig, 320... holding portion, 321... upper frame, 321A, 321B... two plates, 322, 323... two vertical frames, 322A, 322 B...two plates, 323A, 323B...two plates, 324...lower frame, 324A, 324B...two plates, 325...clamper, 326...clamper, 325A...first clamp piece, 325B...second clamp piece, 340A, 340B...first and second powered parts, 370A, 370B...two conductive parts, 381-388...first to eighth conductive parts

Claims (7)

A holder that holds a rectangular workpiece to be immersed in a processing liquid with the front and back surfaces of the workpiece vertical;
Two mutually insulated power-receiving parts for setting the work as a cathode;
two conductive parts that conduct electricity between the two power-receiving parts and the holding part and are insulated from each other;
having
The holding portion includes an upper frame, a lower frame, and two vertical frames,
Each of the upper frame, the lower frame, and the two vertical frames extends parallel to one side of the workpiece and includes two conductive plates that are insulated from each other, and the holding portion is formed by a total of eight plates;
One of the two plates provided on each of the two vertical frames is supported on the upper frame via an insulating member, and each lower end is connected to both ends of one of the two plates provided on the lower frame,
The other of the two plates provided on each of the two vertical frames is supported on the upper frame via an insulating member, and each lower end is connected to both ends of the other of the two plates provided on the lower frame,
Each of the upper frame and the lower frame is provided with a clamper that clamps and holds the workpiece,
The clamper includes a conductive first clamp piece that contacts the front surface of the workpiece and a conductive second clamp piece that contacts the back surface of the workpiece,
the first clamp piece is electrically connected to one of the two power receiving portions, the two conductive portions, and the two plates;
The second clamp piece is electrically connected to the other of the two power-receiving parts, the two conductive parts, and the two plates, a workpiece holding jig. In claim 1,
the two conductive parts include first to eighth conductive parts ,
the first conductive portion provides electrical continuity between one of the two power-receiving portions and one end of one of the two plates provided on the upper frame;
the second conductive portion provides electrical continuity between one of the two power-receiving portions and the other end of one of the two plates provided on the upper frame,
the third conductive portion provides electrical continuity between the other of the two power-receiving portions and one end of the other of the two plates provided on the upper frame,
the fourth conductive portion provides electrical continuity between the other of the two power-receiving portions and the other end of the other of the two plates provided on the upper frame,
the fifth conductive portion provides electrical continuity between one of the two power-receiving portions and one of the two plates provided on one of the two vertical frames;
the sixth conductive portion provides electrical continuity between one of the two power-receiving portions and one of the two plates provided on the other of the two vertical frames;
the seventh conductive portion provides electrical continuity between the other of the two power-receiving portions and the other of the two plates provided on one of the two vertical frames;
The eighth conductive portion provides electrical conductivity between the other of the two power-receiving portions and the other of the two plates provided on the other of the two vertical frames. In claim 2,
The first to fourth conductive portions each have a higher electrical resistance than the fifth to eighth conductive portions, respectively. a processing tank in which a rectangular workpiece is immersed in a processing solution;
an anode disposed in the treatment tank, the anode including a first anode facing the front surface of the workpiece and a second anode facing the rear surface of the workpiece;
Eight rows of power supply rails arranged in parallel and insulated from each other;
a total of eight rectifiers including four rectifiers respectively connected between four of the eight power supply rails and the first anode, and four other rectifiers respectively connected between the other four of the eight power supply rails and the second anode;
Four movable workpiece holding jigs each holding the workpiece and electrically connected to two of the eight rows of power supply rails, respectively;
Including,
4. A surface treatment device, wherein each of the four workpiece holding jigs is a workpiece holding jig as defined in claim 1. In claim 4,
The four rectifiers are connected to the four power supply rails in odd-numbered columns of the eight power supply rails, respectively;
The other four rectifiers are respectively connected to the other four power supply rails in even-numbered columns among the eight columns of power supply rails. In claim 4,
The four rectifiers are respectively connected to the four power supply rails in first to fourth columns adjacent to each other among the eight columns of power supply rails;
the other four rectifiers are respectively connected to the other four power supply rails in fifth to eighth rows adjacent to each other among the eight rows of power supply rails. In any one of claims 4 to 6,
Each of the four workpiece holding jigs is
A first support arm that supports one of the two power-supplied parts;
a second support arm that supports the other of the two power-supplied parts;
a horizontal arm portion to which the first and second support arms are fixed;
and
the positions at which the first and second support arms are fixed to the horizontal arm portion are adjustable in a direction perpendicular to a direction in which the eight rows of power supply rails extend to match the two positions of the eight rows of power supply rails.

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