WO2014171575A1 - 캐니스터용 칠러 - Google Patents
캐니스터용 칠러 Download PDFInfo
- Publication number
- WO2014171575A1 WO2014171575A1 PCT/KR2013/004184 KR2013004184W WO2014171575A1 WO 2014171575 A1 WO2014171575 A1 WO 2014171575A1 KR 2013004184 W KR2013004184 W KR 2013004184W WO 2014171575 A1 WO2014171575 A1 WO 2014171575A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- canister
- tray
- chiller
- inner casing
- dew
- Prior art date
Links
- 239000000498 cooling water Substances 0.000 claims abstract description 37
- 238000007789 sealing Methods 0.000 claims description 112
- 238000000034 method Methods 0.000 claims description 20
- 238000007791 dehumidification Methods 0.000 claims description 16
- 238000004891 communication Methods 0.000 claims description 5
- 230000002093 peripheral effect Effects 0.000 claims description 4
- 238000003825 pressing Methods 0.000 claims description 3
- 230000005494 condensation Effects 0.000 abstract description 12
- 238000009833 condensation Methods 0.000 abstract description 12
- 239000002826 coolant Substances 0.000 description 25
- 230000008878 coupling Effects 0.000 description 16
- 238000010168 coupling process Methods 0.000 description 16
- 238000005859 coupling reaction Methods 0.000 description 16
- 239000011810 insulating material Substances 0.000 description 7
- 238000003780 insertion Methods 0.000 description 4
- 230000037431 insertion Effects 0.000 description 4
- 238000009413 insulation Methods 0.000 description 4
- 150000002736 metal compounds Chemical class 0.000 description 3
- 230000000903 blocking effect Effects 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 239000012774 insulation material Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 230000004308 accommodation Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D81/00—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents
- B65D81/38—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents with thermal insulation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D1/00—Rigid or semi-rigid containers having bodies formed in one piece, e.g. by casting metallic material, by moulding plastics, by blowing vitreous material, by throwing ceramic material, by moulding pulped fibrous material or by deep-drawing operations performed on sheet material
- B65D1/34—Trays or like shallow containers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D25/00—Details of other kinds or types of rigid or semi-rigid containers
- B65D25/38—Devices for discharging contents
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
- F25D1/00—Devices using naturally cold air or cold water
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
- F25D21/00—Defrosting; Preventing frosting; Removing condensed or defrost water
- F25D21/14—Collecting or removing condensed and defrost water; Drip trays
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
- F25D15/00—Devices not covered by group F25D11/00 or F25D13/00, e.g. non-self-contained movable devices
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
- F25D17/00—Arrangements for circulating cooling fluids; Arrangements for circulating gas, e.g. air, within refrigerated spaces
- F25D17/02—Arrangements for circulating cooling fluids; Arrangements for circulating gas, e.g. air, within refrigerated spaces for circulating liquids, e.g. brine
Definitions
- the present invention relates to a chiller for canisters.
- Canisters are containers for storing organic and inorganic metal compounds used in manufacturing processes related to semiconductors and transfer materials. Many of the organic and inorganic metal compounds and the like are expensive specially designed high purity compounds. Since most of these precursors are very sensitive to air or moisture, the canister is provided with a metal storage container having airtightness and chemical resistance.
- the canister needs to be kept at a constant temperature for the storage of organic and inorganic metal compounds stored therein.
- a chiller is used to cool the canister.
- the chiller accommodates the canister therein and circulates cooling water to cool the canister.
- the chiller has been disclosed in Patent No. 10-0773474, "Chiller System of Semiconductor Manufacturing Equipment.”
- the chiller 10 includes a tray 11 and an inner casing 13 inserted into the tray 11 and in which the canister 20 is accommodated. As shown by the arrow, the cooling water introduced through the inlet pipe 15 flows between the inner casing 13 and the caseter 20 and then is discharged through the discharge pipe 17.
- the chiller 10 is discharged to the discharge pipe 17 after the cooling water discharged from the inner casing 13 is collected in the space (S1) between the tray 11 and the inner casing (13). At this time, since the temperature of the cooling water and the temperature of the external atmosphere are different from each other, dew condensation occurs on the outer wall of the tray 11, resulting in the formation of dew M.
- a canister chiller capable of preventing dew from occurring on the outer wall of the tray.
- a canister chiller capable of blocking external leakage of cooling water by improving the coupling structure of the cover and the sealing member.
- a canister chiller capable of fixing the canister and the tray to prevent the flow of the canister.
- a canister chiller capable of collecting dew generated on an upper surface of the cover to prevent dew from flowing down to the bottom.
- the upper tray is open in the shape of an enclosure; An inner casing inserted into the tray to be spaced apart from the inner wall surface of the tray by a canister; And a drain box disposed between the inner casing and the tray and collecting the cooling water discharged from the inner casing.
- the drain box may be spaced apart from the inner wall surface of the tray by a predetermined interval.
- a heat insulation layer may exist in the space between the drain box and the inner wall surface of the tray.
- all the coolant discharged from the inner casing through the tray and connected to the drain box may be discharged to the outside through the coolant discharge pipe after being collected in the drain box.
- the drain box may have a ring shape surrounding the inner casing.
- the upper inner surface of the inner casing, a plurality of inverted triangular overflow grooves in communication with the drain box is formed at a predetermined interval, the cooling water flowing in the inner casing is the overflow It may be moved to the catch through the groove.
- the upper inner surface of the inner casing, a plurality of inverted triangular overflow grooves in communication with the drain box is formed at a predetermined interval, the cooling water flowing in the inner casing is the overflow It may be moved to the catch through the groove.
- the bottom of the inner casing, the bottom of the canister may be formed with a locking skirt that can be coupled to the lock bar extending a predetermined length in the circumferential direction.
- a canister chiller includes: an upper sealing part fixedly coupled to an upper portion of the tray and the inner casing, and a detachable sealing member detachably coupled to an upper surface of the upper sealing part; And a sealing cover coupled to an upper portion of the detachable sealing member to pressurize the detachable sealing member to prevent external leakage of the cooling water.
- the upper surface of the upper sealing portion is formed to be recessed to a certain height stepped mounting surface on which the detachable sealing member is seated, the lower portion of the sealing cover so that the length is longer toward the outside from the radially inner side
- the protrusion may be provided with a pressure inclination protrusion for pressing the detachable sealing member.
- the upper surface of the sealing cover is formed in the trench shape along the outer periphery to a predetermined depth recessed dew receiving groove is formed, the upper outer peripheral surface of the tray of the dew receiving groove Dehumidifying pockets that can accommodate the may be combined.
- the canister chiller may further include a pocket connector tube having one end disposed in the dew receiving groove and the other end detachably coupled to the dehumidification pocket.
- condensation may be prevented from occurring outside of the canister chiller.
- the inclined surface of the pressure inclination protrusion of the sealing cover presses the detachable sealing member, it is possible to effectively block the external leakage of the cooling water.
- the lower portion of the inner casing is provided with a locking skirt that can prevent the rotation of the canister can be stably fixed to the position of the canister.
- FIG. 1 is a cross-sectional view showing a cross-sectional configuration of a conventional canister chiller
- Figure 2 is a perspective view showing the external configuration of the canister chiller according to the present invention
- FIG. 3 is an exploded perspective view showing an exploded configuration of the canister chiller according to the present invention.
- Figure 4 is a cross-sectional view showing a cross-sectional configuration of the canister chiller according to the present invention and the movement path of the coolant
- Figure 5 is an enlarged view showing an enlarged upper sealing structure of the canister chiller according to the present invention.
- tray body 113 internal inlet pipe
- bonding plate 120 inner casing
- mounting surface 160 detachable sealing member
- sealing cover 171 sealing cover body
- dew inlet 185 level gauge
- dew discharge pipe 200 canister
- FIG. 2 is a perspective view showing the external configuration of the canister chiller 100 according to an embodiment of the present invention
- Figure 3 is an exploded view showing the configuration of the canister chiller 100 according to an embodiment of the present invention
- 4 is a cross-sectional view illustrating a cross-sectional configuration of the canister chiller 100 and a flow of cooling water
- FIG. 5 is an enlarged cross-sectional view illustrating an enlarged upper sealing structure of the canister chiller 100.
- the canister chiller 100 accommodates the canister 200 therein and circulates the coolant to cool the canister 200 to a predetermined temperature.
- the canister chiller 100 may be provided with a circulation pump (not shown) for circulating the coolant although not shown in the drawing.
- the canister chiller 100 includes a tray-shaped tray 110, an inner casing 120 disposed inside the tray 110, and the canister 200 is accommodated therein, and the tray 110. And the drain box 130 disposed between the inner casing 120, the inlet pipe 140 for introducing the cooling water into the inner casing 120, and the discharge pipe 145 for discharging the cooling water of the drain box 130 to the outside.
- the tray 110 may be formed, for example, in a cylindrical shape having a predetermined diameter to accommodate the inner casing 120 and the canister 200 therein.
- the tray 110 may include a tray main body 111, an inner inflow pipe 113 connecting the tray main body 111 and an inner casing 120, and a movement 115 coupled to a lower portion of the tray 110. It may include.
- the tray body 111 may support the flow of the cooling water to be stable and the canister 200 is stably received.
- Inlet pipe 140 is coupled to the lower portion of the tray body 111, the discharge pipe 145 is coupled to the top.
- Inlet pipe 140 is connected to the inner inlet pipe (113).
- the inner inflow pipe 113 may be connected to the inlet 122 of the bottom surface of the inner casing 120 to supply the coolant to the inner casing 120.
- the moving box 115 is coupled to the bottom of the tray 110, for example, to support the tray 110 to be moved.
- a plurality of wheels 116 may be coupled to the lower portion of the moving box 115.
- the upper portion of the tray body 111 is provided with a coupling plate 118 to couple the inner casing 120 and the tray body 111.
- the upper sealing part 150 is coupled to the upper surface of the coupling plate 118.
- the inner casing 120 is inserted into the tray 110 at a predetermined interval.
- An accommodation space in which the canister 200 is accommodated is formed inside the inner casing 120.
- the inner casing 120 is, for example, formed through the inner casing body 121 inserted into the tray body 111 and the inner wall surface of the inner casing body 121 to drain the cooling water 130. It may include an overflow groove 123 and a plurality of lock skirt 125 formed on the bottom surface of the inner casing body 121.
- the inner casing body 121 accommodates the canister 200 therein, and the coolant existing between the inner casing body 12 and the canister 200 flows to allow heat exchange between the canister 200 and the cooling water. .
- the inner casing body 121 is disposed so that its outer diameter is spaced apart from the tray body 111 by a predetermined interval.
- Insulating material A is inserted into the space between the inner casing body 121 and the tray body 111.
- the heat insulating material A prevents the temperature of the coolant from being transferred to the outer wall surface of the tray 110, thereby contributing to blocking condensation from occurring on the outer wall surface of the tray 110.
- the separation distance L2 between the inner casing body 121 and the tray body 111 may be adjusted in consideration of the temperature of the cooling water.
- the type of the heat insulating material A inserted therein may also be selected according to the temperature of the cooling water.
- the inner diameter of the inner casing body 121 may be formed to be larger by a predetermined length d1 than the outer diameter of the canister 200.
- the inner casing body 121 according to an embodiment of the present invention is formed to be 1 mm larger than the outer diameter of the canister 200. Cooling water flows into the space between the outer diameter of the canister 200 and the inner diameter of the inner casing body 121 and heat exchanges with the canister 200.
- Overflow groove 123 is formed through the upper inner wall surface of the inner casing body 121.
- the overflow groove 123 discharges the coolant heat exchanged with the canister 200 to the drain box 130.
- the coolant is blocked from moving upward by the upper sealing block 151 and overflows to the overflow groove 123.
- the overflow groove 123 may be formed in an inverted triangle shape as shown in FIG. As such, the overflow groove 123 is formed to have a narrower cross-sectional area from the top to the bottom thereof, thereby reducing the generation of vortices when the coolant moves to the drain box 130 through the overflow groove 123.
- the lock skirt 125 allows the position of the canister 200 accommodated in the inner casing body 121 to be fixed.
- the locking skirt 125 protrudes from the lower sidewall of the inner casing body 121 as shown in an enlarged view of FIG. 4.
- the lock skirt 125 is bent in the vertical direction with the end region 125a protruding radially inward from the side wall.
- a coupling groove 125b into which the lock bar 210 of the canister 200 is inserted may be formed between the end region 125a and the side wall.
- the lower sidewall 211 of the canister 200 may be coupled to the locking bar 210 protruding along the inner circumference.
- An end of the locking bar 210 may be formed with a locking protrusion 210a protruded stepwise.
- the protruding length of the locking protrusion 210a may be larger than the width of the coupling groove 125b. Accordingly, when the operator inserts the canister 200 into the inner casing 120, the sidewall 211 of the canister 200 is inserted into the coupling groove 125b of the lock skirt 125.
- the locking bar 210 is inserted into the coupling groove 125b, the locking protrusion 210a contacts the end region 125a, and the rotation is limited.
- the positions of the canister 200 and the inner casing 120 are fixed so that the coolant and the canister 200 may be heat-exchanged even if the coolant flows into the inner casing 120.
- the drain box 130 is interposed between the tray 110 and the inner casing 120 to collect the coolant and then discharge it to the discharge pipe 145.
- the drain box 130 is formed in a ring shape and is coupled in a form surrounding the outer wall surface of the inner casing 120 corresponding to the overflow groove 123.
- the width of the drain box 130 is formed to be spaced apart from the inner wall surface of the tray 110 by a predetermined interval.
- the heat insulating material A may be inserted between the drain box 130 and the inner wall surface of the tray 110.
- the drain box 130 Since the drain box 130 is provided separately between the tray 110 and the inner casing 120, and the coolant is discharged to the discharge pipe 145 through the drain box 130, it is compared with the conventional chiller 10 shown in FIG. 1. When the coolant is in direct contact with the tray 110 is blocked. In addition, since the heat insulating material A is disposed between the drain box 130 and the tray 110, condensation may be prevented from occurring on the outer wall surface of the tray 110.
- the inlet pipe 140 is coupled to the outside of the tray 110 to introduce the coolant into the tray 110.
- Inlet pipe 140 is connected to the inner inlet pipe 113 to supply the cooling water.
- the discharge pipe 145 is connected to the drain box 130 to discharge the cooling water having completed the heat exchange to the outside.
- the discharge pipe 145 is connected by the connection pipe 135 of the drain box 130.
- the upper sealing unit 150 includes an upper sealing block 151 integrally coupled to the upper portion of the coupling plate 118, and a plurality of lower sealing members 153 disposed between the upper sealing block 151 and the coupling plate 118. It includes.
- the upper sealing block 151 is fixedly coupled to the coupling plate 118.
- the lower sealing member 153 is fixedly coupled between the coupling plate 118 and the upper sealing block 151 to block leakage of the coolant in the lateral direction (that is, the direction radiated outward from the center of the canister chiller 100). do.
- the lower sealing member 153 may be implemented with, for example, an O ring.
- the inner peripheral surface of the upper sealing block 151 has a seating surface 157, which is formed to be recessed to a certain height, has a predetermined area.
- the detachable sealing member 160 may be seated on the seating surface 157.
- Fastening member insertion grooves 155 are formed at regular intervals on the outer circumferential surface of the upper sealing block 151 so that interference with the seating surface 157 does not occur.
- the fastening member 179 is inserted into the fastening member insertion groove 155 to fix the positions of the upper sealing block 151 and the sealing cover 170.
- the detachable sealing member 160 is detachably coupled to the upper sealing part 150.
- the detachable sealing member 160 is seated on the seating surface 157 and is in close contact with the seating surface 157 by the pressure of the sealing cover 170 to block external leakage of the coolant.
- the detachable sealing member 160 may also be implemented in the form of an O-ring.
- the sealing cover 170 may be coupled to an upper portion of the upper sealing part 150.
- the sealing cover 170 is pressed downward from the upper portion of the upper sealing portion 150 to allow the detachable sealing member 160 to be in close contact with the upper sealing portion 150.
- the sealing cover 170 has a sealing cover body 171, a pocket for connecting the dew receiving groove 173 recessed in the outer circumference of the sealing cover body 171, the dew receiving groove 173, and the dehumidification pocket 180. It includes a connecting pipe 175 and a pressure inclined protrusion 177 protruding to the lower portion of the sealing cover 170 to press the removable sealing member 160.
- the sealing cover body 171 is formed in a ring shape to cover the upper portion of the upper sealing portion 150.
- the dew accommodating groove 173 may be formed in a trench in a trench shape along the outer circumference of the sealing cover body 171.
- Insulation material A is inserted between the tray 110 and the inner casing 120, but insulation material A is not inserted between the upper sealing part 150 and the sealing cover 170 and is sealed by the temperature difference between the cooling water and the room temperature. Condensation may occur on the top surface of the cover body 171. Since the dew accommodating groove 173 is formed to have a predetermined depth step with respect to the sealing cover body 171, the dew generated by condensation is collected. By the presence of the dew accommodating groove 173, it is possible to prevent the dew from falling along the sealing cover 170 and falling to the bottom.
- One end of the pocket connector 175 is disposed in the dew receiving groove 173 and the other end is detachably coupled to the dehumidification pocket 180.
- the dew received in the dew accommodating groove 173 is moved to the dehumidifying pocket 180 through the pocket connector 175.
- the pressure inclination protrusion 177 is formed to protrude to the lower portion of the sealing cover body 171. At this time, the pressure inclination protrusion 177 is spaced apart by the diameter of the detachable sealing member 160 in the radially outer side in the inner boundary region of the sealing cover body 171. In addition, the pressure inclination protrusion 177 is formed to be inclined to gradually increase in the radially outward length.
- the detachable sealing member 160 is coupled to the inclined surface of the pressure inclined protrusion 177.
- the sealing force may be improved by being closely adhered between the plates 118.
- the pressure inclination protrusion 177 is in contact with the seating surface 157, the outflow of the cooling water may be more effectively prevented.
- the dehumidification pocket 180 is coupled to the upper outer wall of the tray 110 to accommodate the dew generated in the sealing cover 170 therein.
- the dehumidification pocket 180 may include, for example, a pocket main body 181 having a chamber capable of accommodating dew therein, and a level gauge 185 formed at one side of the pocket main body 181 to indicate the level of dew. And, it may include a dew discharge pipe 187 for discharging the dew to the outside of the pocket body 181.
- the pocket body 181 is coupled to the outer wall of the tray 110, for example.
- the upper portion of the pocket body 181 is formed with a dew inlet hole 183 to which the pocket connecting pipe 175 is coupled. As a result, dew flows into the pocket body 181.
- the canister 200 is inserted into the inner casing 120.
- the detachable sealing member 160 and the sealing cover 170 is in a separated state from the tray 110.
- the side wall 211 of the canister 200 is inserted into the coupling groove 125b of the lock skirt 125 and is enlarged as shown in FIG. 4. Rotate clockwise or counterclockwise.
- the locking bar 210 is inserted into the coupling groove 125b by the rotation, and the locking protrusion 210a comes into contact with the end region 125a, thereby limiting the movement of the canister 200. Therefore, the position of the canister 200 is stably fixed during the heat exchange process by the inflow and outflow of the cooling water.
- the canister 200 is inserted into the inner casing 120 in a state where the detachable sealing member 160 is coupled to the outer circumferential surface. As the canister 200 is inserted, the detachable sealing member 160 may be seated on the seating surface 157 of the upper sealing block 151.
- the sealing cover 170 When the position of the canister 200 is fixed, the sealing cover 170 is disposed above the detachable sealing member 160. Then, the plurality of fastening members 179 are fastened to fix the sealing cover 170 to the upper sealing block 151. At this time, the pressure inclination protrusion 177 pressurizes the detachable sealing member 160 by the pressing force to increase the sealing force between the upper sealing block 151 and the sealing cover 170, and the external outflow of the coolant is blocked twice. Will be.
- Cooling water is introduced into the inner casing 120 through a path as shown by an arrow in FIG. 4 through the inlet pipe 140 and the inner inlet pipe 113.
- the coolant moves along the spaced space between the inner wall of the inner casing 120 and the canister 200 and is collected into the drain box 130 through the overflow groove 123.
- the coolant collected in the drain box 130 is discharged to the outside through the connection pipe 135 and the discharge pipe 145.
- the insulating material (A) is inserted into the spaced space between the inner casing 120 and the tray 110 during the movement of the coolant to block the contact between the outside air and the coolant. Therefore, since the outer wall surface of the tray 110 is maintained at the same or almost the same as the temperature of the outside air, no condensation is generated.
- the drain box 130 is also disposed to be spaced apart from the inner wall surface of the tray 110, the heat insulating material (A) is inserted between the condensation does not occur over the entire area of the tray 110.
- Condensation is generated on the surface of the sealing cover 170 by the temperature difference between the cooling water and the air.
- Dew generated by condensation is collected in the dew receiving groove 173 formed stepped.
- the pocket connector 175. Dew accommodated in the dehumidification pocket 180 is discharged to the outside by the dew discharge pipe 145.
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Abstract
Description
Claims (19)
- 상부가 개방된 함체형상의 트레이;상기 트레이의 내벽면과 일정 간격 이격되게 상기 트레이에 삽입되며 내부에 캐니스터가 수용되는 내부케이싱; 및상기 내부케이싱과 상기 트레이 사이에 배치되며 상기 내부케이싱으로부터 배출되는 냉각수를 집수하는 배수함;을 포함하는 캐니스터용 칠러.
- 제1항에 있어서,상기 배수함은 상기 트레이의 내벽면과 일정 간격 이격되어 있는 것인, 캐니스터용 칠러.
- 제2항에 있어서,상기 배수함과 상기 트레이의 내벽면 사이의 이격 공간에는 단열층이 존재하는 것인, 캐니스터용 칠러.
- 제2항 또는 제3항에 있어서,상기 트레이를 관통하여 상기 배수함과 연결되어 있고,상기 내부케이싱으로부터 배출되는 모든 냉각수는 상기 배수함에 집수된 후에, 상기 냉각수 배출관을 통해서 외부로 배출되는 것인, 캐니스터용 칠러.
- 제4항에 있어서,상기 배수함은 상기 내부케이싱을 둘러싸는 링 형상을 가진 것인, 캐니스터용 칠러.
- 제1항에 있어서,상기 내부케이싱의 상부 내측면에는, 상기 배수함과 연통된 역삼각형 형상의 오버플로우홈이 일정 간격으로 복수개 형성되고,상기 내부케이싱에서 유동하는 냉각수는 상기 오버플로우홈을 통해서 상기 집수함으로 이동되는 것인, 캐니스터용 칠러.
- 제4항에 있어서,상기 내부케이싱의 상부 내측면에는, 상기 배수함과 연통된 역삼각형 형상의 오버플로우홈이 일정 간격으로 복수개 형성되고,상기 내부케이싱에서 유동하는 냉각수는 상기 오버플로우홈을 통해서 상기 집수함으로 이동되는 것인, 캐니스터용 칠러.
- 제4항에 있어서,상기 내부케이싱의 바닥에는, 상기 캐니스터의 하부에 원주방향으로 일정길이 연장된 잠금바와 결합될 수 있는 잠금스커트가 형성되어 있는 것인, 캐니스터용 칠러.
- 제4항에 있어서,상기 트레이와 상기 내부케이싱의 상부에 고정결합되는 상부실링부,상기 상부실링부의 상면에 착탈가능하게 결합되는 착탈실링부재;상기 착탈실링부재의 상부에 결합되며 상기 착탈실링부재를 가압하여 상기 냉각수의 외부 유출을 방지하는 실링커버;를 더 포함하는 것인 캐니스터용 칠러.
- 제9항에 있어서,상기 상부실링부의 상면에는 상기 착탈실링부재가 안착되는 안착면이 일정높이 단차지게 함몰 형성되고,상기 실링커버의 하부에는 반경방향 내측에서 외측으로 갈수록 길이가 길어지도록 돌출형성되어 상기 착탈실링부재를 가압하는 가압경사돌기가 구비된 것인, 캐니스터용 칠러.
- 제10항에 있어서,상기 실링커버의 상면에는 외주연을 따라 트렌치형상으로 일정 깊이 함몰형성되어 이슬이 저수되는 이슬수용홈이 형성되고,상기 트레이의 상부 외주면에는 상기 이슬수용홈의 이슬을 수용할 수 있는 제습포켓이 결합되어 있는 것인, 캐니스터용 칠러.
- 제11항에 있어서,일단부는 상기 이슬수용홈에 배치되고 타단부는 상기 제습포켓에 착탈가능하게 결합되는 포켓연결관을 더 포함하는 것인, 캐니스터용 칠러.
- 제1항에 있어서,상기 트레이와 상기 내부케이싱의 상부에 고정결합되는 상부실링부;상기 착탈실링부재의 상부에 결합되는 실링커버; 및상기 실링커버에 생긴 이슬을 수용할 수 있는 제습포켓;을 더 포함하는 것인, 캐니스터용 칠러.
- 제13항에 있어서,상기 제습포켓은 상기 트레이의 상부 외주면에 결합되어 있는 것인, 캐니스터용 칠러.
- 제14항에 있어서,상기 상부실링부의 상면에 착탈가능하게 결합되는 착탈실링부재;를 더 포함하며,상기 실링커버가 상기 착탈실링부재를 가압하는 것인, 캐니스터용 칠러.
- 제13항에 있어서,상기 실링커버의 상면에는 외주연을 따라 트렌치형상으로 일정 깊이 함몰형성되어 이슬이 저수되는 이슬수용홈이 형성되어 있고,상기 이슬수용홈과 상기 제습포켓은 포켓 연결관에 의해 연결되어 있는 것인, 캐니스터용 칠러.
- 제13항에 있어서,상기 배수함은 상기 트레이의 내벽면과 일정 간격 이격되어 있는 것인, 캐니스터용 칠러.
- 제17항에 있어서,상기 트레이를 관통하여 상기 배수함과 연결되어 있고,상기 내부케이싱으로부터 배출되는 모든 냉각수는 상기 배수함에 집수된 후에, 상기 냉각수 배출관을 통해서 외부로 배출되는 것인, 캐니스터용 칠러.
- 제13항에 있어서,상기 내부케이싱의 상부 내측면에는, 상기 배수함과 연통된 역삼각형 형상의 오버플로우홈이 일정 간격으로 복수개 형성되고,상기 내부케이싱에서 유동하는 냉각수는 상기 오버플로우홈을 통해서 상기 집수함으로 이동되는 것인, 캐니스터용 칠러.
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EP13882185.5A EP2988319B1 (en) | 2013-04-15 | 2013-05-10 | Chiller for canister |
JP2016507872A JP6026052B2 (ja) | 2013-04-15 | 2013-05-10 | キャニスタ用チラー |
US14/771,529 US9469461B2 (en) | 2013-04-15 | 2013-05-10 | Chiller for canister |
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CN107267389B (zh) * | 2017-08-23 | 2020-06-19 | 湖南开启时代生物科技有限责任公司 | 一种细胞扩增装置 |
JP7296116B2 (ja) * | 2019-10-04 | 2023-06-22 | 国立研究開発法人宇宙航空研究開発機構 | 保温保冷装置 |
KR102224227B1 (ko) | 2019-11-05 | 2021-03-05 | 김평태 | 반도체 제조설비용 진공칠러탱크 |
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Publication number | Publication date |
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KR20140123879A (ko) | 2014-10-23 |
CN105247655B (zh) | 2018-04-13 |
EP2988319A1 (en) | 2016-02-24 |
EP2988319A4 (en) | 2017-02-08 |
TW201518187A (zh) | 2015-05-16 |
JP2016518027A (ja) | 2016-06-20 |
CN105247655A (zh) | 2016-01-13 |
KR101466484B1 (ko) | 2014-12-02 |
TWI530442B (zh) | 2016-04-21 |
US20160016719A1 (en) | 2016-01-21 |
EP2988319B1 (en) | 2018-02-14 |
JP6026052B2 (ja) | 2016-11-16 |
US9469461B2 (en) | 2016-10-18 |
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