WO2013141325A1

WO2013141325A1 - Pellicle, pellicle frame, and method for manufacturing pellicle

Info

Publication number: WO2013141325A1
Application number: PCT/JP2013/058173
Authority: WO
Inventors: 岩村　賢一郎; 洋文内村; 雅弘塚本; 隆徳廣瀬; 政勝平野
Original assignee: 旭化成イーマテリアルズ株式会社
Priority date: 2012-03-21
Filing date: 2013-03-21
Publication date: 2013-09-26
Also published as: CN104204943B; KR101688713B1; KR20140130172A; CN111580339A; JPWO2013141325A1; CN104204943A; JP5876927B2; KR20160087927A

Abstract

A pellicle provided with a pellicle frame (10) formed in a substantially rectangular frame shape by a pair of long side parts (10a) and a pair of short side parts (10b), and a pellicle film (11) stretchingly supported by the pellicle frame (10). The ratio of the long-side width/long-side length ratio of the side part is 0.3% to 2.2% inclusive. The short-side width/short-side length ratio of the side part is 0.3% to 3.8% inclusive. At least one side part of the long side parts (10a) and short side parts (10b) bulge to the outer side of the pellicle frame (10). The bulging side part elastically deforms toward the inner side of the pellicle film (10). In this state, the pellicle film (11) is affixed to the pellicle frame (10).

Description

Pellicle, pellicle frame, and method for manufacturing pellicle

In the present invention, foreign matter adheres to an exposure base such as a photomask or a reticle used in a lithography process when manufacturing a thin film transistor (TFT), a color filter (CF), or the like constituting an LSI or a liquid crystal display (LCD). The present invention relates to a pellicle, a pellicle frame, and a method for manufacturing the pellicle that are used to prevent this.

For example, in a lithography process when manufacturing circuit patterns such as semiconductor devices and liquid crystal displays, a dust cover, commonly called a pellicle, is attached to the exposure substrate for the purpose of preventing foreign matter from adhering to the exposure substrate such as a photomask or reticle. Is done.

This pellicle is usually a transparent polymer material such as nitrocellulose, a cellulose derivative or a fluoropolymer having a thickness of 10 μm or less on the upper edge surface of a pellicle frame having a shape matched to the shape of the substrate for exposure and having a thickness of about several millimeters. A film made of (hereinafter referred to as “pellicle film”) is spread and adhered, and an adhesive is applied to the lower edge surface of the pellicle frame, and a protective film is adhered to the surface of the adhesive with a predetermined adhesive force. It has been made.

The adhesive material is for fixing the pellicle to the exposure substrate, and the protective film protects the adhesive surface of the adhesive material in order to maintain the adhesive force of the adhesive material until the adhesive material is used. To do.

By the way, in an exposure apparatus having an exposure substrate on which a pellicle is mounted, in order to perform exposure processing with high dimensional accuracy, it is necessary to prevent the pellicle film through which light passes from being bent by its own weight. In particular, in recent years, the size of the exposure base for the size and improving productivity of the liquid crystal panel becomes large, the pellicle film is also 5,000 cm ² in conjunction therewith, 10,000cm ^{^2,} 15,000cm ² and year by year large area For this reason, the amount of bending is increased correspondingly, and the bending of the pellicle film is becoming a serious problem.

As a pellicle frame applicable to a large photomask or reticle used in a photolithography process such as a large TFTLCD (Thin Film Transistor Liquid Crystal Display), a rectangular shape having a long side and a short side is generally used. When a pellicle film is attached to this frame, the side of the frame is distorted inward due to the tension of the pellicle film, and the effective exposure area of the photomask or reticle may be reduced due to this distortion. The phenomenon becomes more prominent as the stretched area of the pellicle film increases (the pecryl film increases). Such a phenomenon has been solved by increasing the rigidity of the pellicle frame while maintaining the area inside the pellicle frame (hereinafter referred to as an effective area) as much as possible (for example, Patent Documents 1 to 4). 4).

Also, in recent years, it has been studied to take a large panel of multiple images so that a plurality of small screen patterns such as a personal computer or a mobile phone can be taken from a large panel. Therefore, there is a demand for making the effective exposure area wider than before. However, since the conventional apparatus itself is used, there is a new problem that the effective exposure area is made wider than before without changing the outer dimension of the pellicle.

JP 2001-109135 A JP 2001-42507 A JP 2002-296863 A JP 2006-56544 A

When the pellicle film is attached as described above, the side of the frame is distorted inward due to the tension of the pellicle film. By using the technique described in the above-mentioned literature, the pellicle frame The amount of deformation was smaller than the amount of deformation due to the tension of the pellicle membrane, and a balance could be achieved.

However, if the pellicle frame width is narrowed and the conventional fabrication is performed in order to cope with a new problem, the deformation amount of the pellicle frame becomes larger than the deformation amount due to the tension of the pellicle film. For this reason, when the pellicle film is cut, the pellicle frame is not simply distorted inward, but the pellicle frame is deformed up and down, and the corners of the pellicle frame are deformed. Further, since the rigidity of the pellicle frame is small, the force that balances with the tension of the pellicle film is small, so that the tension of the pellicle film cannot be maintained and film wrinkles are generated, and further, the film tension is weakened. Therefore, a new problem has occurred that the film swells during handling and is difficult to handle.

Particularly pellicle area, 3,000 cm ^2, further 6,000 ^2, more particularly problematic in large pellicle within 30,000 ² the maximum that exceeds the 8,000cm ^2.

It is an object of the present invention to provide a pellicle, a pellicle frame, and a method for manufacturing the pellicle that do not affect exposure using a thin pellicle frame that has not been expected to be used in the market.

As a result of diligent study by the inventors of the present application, after making a substantially rectangular pellicle frame in which at least a pair of sides with a narrow width bulge outside the pellicle frame is bent by applying stress to the inside of the frame body, It has been surprisingly found that the film tension and the frame stress are balanced in a state where the frame is substantially rectangular by pasting and spreading the pellicle film. And until now, the frame was cut out in a drum shape protruding outside the frame body, and the pellicle film was stretched there to balance the frame into a substantially rectangular shape. When used, it has been found that in order to make the frame substantially rectangular after the pellicle film is stretched, it is important that the pellicle frame is bent in advance by applying stress to the inside of the frame.

The present invention solves the above problems based on such knowledge.

That is, the pellicle frame according to the present invention is a pellicle frame that is formed in a substantially rectangular frame shape by four sides to support the pellicle film, and the ratio of the long side width / long side length of the side is 0.3% or more and 2.2% or less, the ratio of the short side width / short side length of the side part is 0.3% or more and 3.8% or less, and at least a pair of side parts are outside the pellicle frame. Bulges.

According to the pellicle frame of the present invention, the ratio of the long side width / long side length of the side portion is 0.3% or more and 2.2% or less, and the ratio of the short side width / short side length is 0.3%. By reducing the thickness of the pellicle to not less than% and not more than 3.8%, the effective exposure area can be made wider than before without changing the outer dimension of the pellicle. In addition, even if the width of the side portion is reduced in this way, at least a pair of the side portions bulge outside the pellicle frame, so that the bulged side portions are elastically deformed toward the inside of the pellicle frame. In this state, by attaching the pellicle film to the pellicle frame, the restoring force of the pellicle frame and the expansion tension of the pellicle film can be balanced. As a result, wrinkles can be suppressed from occurring in the pellicle film.

In the pellicle frame according to the present invention, the long side length of the side portion may be 400 mm or more and 2000 mm or less, and the short side length of the side portion may be 200 mm or more and 1800 mm or less. If the area is the length of the long side at 20,000 cm ² or more 30,000 ² or less is more than 1500 mm, in terms of wrinkle prevention with exposure area secured pellicle film, the long side width of the side portion is preferably more than 15mm below 8mm More preferably, it is 9 mm or more and 14.5 mm or less, further 10 mm or more and 14 mm or less, and the short side width of the side part is preferably 7 mm or more and 15 mm or less, more preferably 8 mm or more and 14.5 mm or less, and further 9 mm or more and 14 mm or less. It is. When the pellicle area is 12,000 cm ² or more and 20,000 cm ² or less and the length of the long side is 1200 mm or more and 1500 mm or less, the long side width of the side part is preferably 5 mm or more and 11 mm or less, more preferably 6 mm or more and 11 mm or less. Furthermore, it is 7 mm or more and 10.5 mm or less, and the short side width of the side portion is 4 mm or more and 11 mm or less, preferably 5 mm or more and 10.5 mm or less, and further 6 mm or more and 10 mm or less. When the pellicle area is 5,000 cm ² or more and 12,000 cm ² or less and the length of the long side is 700 mm or more and 1400 mm or less, the long side width of the side part is preferably 4 mm or more and 10 mm or less, more preferably 5 mm or more and 9 mm or less. 0.5 mm or less, further 5.5 mm or more and 9 mm or less, and the short side width of the side portion is preferably 3 mm or more and 10 mm or less, more preferably 4 mm or more and 9 mm or less, and further preferably 5 mm or more and 8 mm or less.

Further, in the pellicle frame according to the present invention, the pair of long side portions of the side portion bulges outside the pellicle frame, and the bulge amount of the pair of long side portions is 3 mm or more and 20 mm or less. Is preferred. Thus, when the pellicle film is affixed to the pellicle frame with the bulged sides elastically deformed toward the inside of the pellicle frame, the restoring force of the pellicle frame and the expansion tension of the pellicle film are balanced. Therefore, the generation of wrinkles in the pellicle film can be more effectively suppressed.

Also, the pellicle frame according to the present invention can be formed of a material having a Young's modulus of 1 GPa or more and 80 GPa. Thus, by forming the pellicle frame with a material having a Young's modulus of 1 GPa or more and 80 GPa, the pellicle frame becomes a substantially rectangular shape when the pellicle film formed of a general material is attached to the pellicle frame. In the state, the restoring force of the pellicle frame and the film tension of the pellicle film can be appropriately balanced.

A pellicle according to the present invention is a pellicle having the above-described pellicle frame and a pellicle film that is stretched and supported by the pellicle frame, and at least a bulged side portion is elastically deformed toward the inside of the pellicle frame. In the state, the pellicle film is attached to the pellicle frame.

According to the pellicle of the present invention, the effective exposure area can be made wider than before without changing the outer dimension of the pellicle, and the restoring force of the pellicle frame and the expansion tension of the pellicle film are balanced. Therefore, wrinkles can be prevented from occurring in the pellicle film.

In addition, the pellicle according to the present invention can be such that the bulged side portion is formed in a substantially linear shape by the balance between the restoring force of the side portion and the film tension of the pellicle membrane. In this way, the balance between the restoring force of the side part and the film tension of the pellicle film forms the side part in a substantially linear shape, thereby securing the perforated exposure area and the restoring force of the pellicle frame and the pellicle film. The film tension can be balanced appropriately.

Further, in the pellicle according to the present invention, it is preferable that the pellicle film is given a film tension having a magnitude that satisfies all of the following conditions A, B, and C.

Condition A: In a state where the pellicle is arranged so that the pellicle film is substantially horizontal, the first reference point on the pellicle film is the center point of the inner edge of the long side part of the side part of the pellicle frame in plan view. When a 10.6 g weight is placed on the first reference point 30 mm away in the direction orthogonal to the inner edge of the long side, the sinking amount of the first reference point is 0.4 mm or more and 2.4 mm or less.

Condition B: in a state where the pellicle is arranged so that the pellicle film is substantially horizontal, the second reference point on the pellicle film, which is a plan view from the center point of the inner edge of the short side part of the side part of the pellicle frame When a 10.6 g weight is placed on the second reference point 30 mm away in the direction orthogonal to the short side, the sinking amount of the second reference point is 0.3 mm or more and 2.3 mm or less.

Condition C: The absolute value of the difference between the sinking amount of the first reference point and the sinking amount of the second reference point is 0.4 mm or less.

In this way, by providing the pellicle film with a film tension having such a size as to satisfy the conditions A, B, and C, it is possible to suppress wrinkles on the pellicle film more effectively while ensuring a wide effective exposure area. can do.

If the sinking amount at the first reference point and the sinking amount at the second reference point are within the range defined by the conditions A to C, the pellicle film is effectively prevented from loosening. It is preferable that wrinkles occur in the pellicle film near the center and short sides, and it is preferable to suppress the pellicle film from being broken by slight vibrations because the film tension applied to the pellicle film is too strong. Therefore, it is preferable.

Since the pellicle frame has relatively strong corner rigidity, it is assumed that the film tension of the pellicle film is relatively strong along the diagonal line from the corner. Therefore, even when a thin pellicle frame is used, it is considered that the film tension of the pellicle film on the diagonal line can be maintained relatively strong.However, in contrast, the film of the pellicle film is near the center of the frame. Since the frame loses its tension and the sides are easily bent, the film tension of the pellicle film near the center of the frame decreases, so that when the pellicle film is attached to the pellicle frame, wrinkles are generated on the pellicle film. In the handling of the pellicle, wrinkles are likely to occur in the pellicle film. Therefore, if the sinking amount at the first reference point and the sinking amount at the second reference point are within the range defined by the conditions A to C, the center of the long side and the short side of the pellicle frame The film tension of the pellicle film at the first reference point and the second reference point that are near the portion is increased, and the film tension of the pellicle film at the first reference point and the second reference point can be balanced. The present inventors have found that the balance of the overall tension is improved and a pellicle capable of using a narrow pellicle frame can be manufactured.

A method for manufacturing a pellicle according to the present invention includes: (a) a step of attaching a pellicle film made of a polymer material formed on a substrate to a frame having an opening so as to cover the opening; ) A step of peeling the pellicle film attached to the frame from the substrate; and (c) a pellicle frame formed in a substantially rectangular frame shape by four sides, and at least a pair of sides is a pellicle frame. The ratio of the long side width / long side length of the side part is 0.3% to 2.2%, and the short side width / short side length ratio of the side part is 0. 0%. A step of preparing a pellicle frame that is not less than 3% and not more than 3.8%, and (d) applying at least one external force to the at least one pair of sides of the pellicle frame so that the at least one pair of sides is substantially linear. Elastically deforming the at least one pair of sides so that (E) After step (d), the frame body is so formed as to cover the opening of the pellicle frame on the pellicle frame that is elastically deformed so that the at least one pair of sides are substantially linear. A step of affixing the pellicle film affixed to the substrate, and (f) after the step (e), the pellicle film is stretched and supported by the pellicle frame by removing the external force applied to the at least one pair of sides. And (g) after the step (e), a step of removing an excess portion of the pellicle film and a frame body. In addition, the substantially linear shape in the step (d) means a state in which the bulge P has approached the L straight line even slightly from the bulge P to the outside of FIG. Is preferred. On the other hand, the pellicle after the step (e) has a substantially rectangular shape, which means that the shape is rectangular so as not to hinder the attachment to the exposure apparatus.

According to the pellicle manufacturing method of the present invention, the ratio of the long side width / long side length in the step (c) is 0.3% or more and 2.2% or less, and the short side width of the side portion. / Since a pellicle frame having a short side length ratio of 0.3% or more and 3.8% or less is prepared, a pellicle having a wider effective exposure area than the conventional one can be obtained. In addition, in step (d), the at least one pair of sides is elastically deformed so that the at least one pair of sides is substantially linear, and in step (e), a pellicle film is attached to the pellicle frame in this state. Therefore, the restoring force of the pellicle frame and the spreading tension of the pellicle film can be balanced. As a result, wrinkles can be suppressed from occurring in the pellicle film.

The present invention can expand the effective exposure area without any problem even if a thin pellicle frame that was not expected to be used in the market is used, and there is no film wrinkle. Even if it is thin, sufficient film tension can be secured, and furthermore, a pellicle that does not have a problem in handling and a method for manufacturing such a pellicle can be provided.

It is a perspective view of a pellicle. It is a longitudinal cross-sectional view of a pellicle. It is explanatory drawing of the shape of a frame. It is explanatory drawing which shows the manufacturing process of a pellicle. It is explanatory drawing of the shape of a pellicle frame. It is explanatory drawing which shows the other manufacturing process of a pellicle. It is a typical perspective view for demonstrating the measuring method of the film sink amount of a long side and the film sink amount of a short side. It is typical sectional drawing for demonstrating the measuring method of the film sink amount of a long side and the film sink amount of a short side. It is explanatory drawing which shows the definition of the bulging amount. It is a figure which shows the evaluation result of an Example and a comparative example.

Embodiments of the present invention will be described. The embodiments described below are examples of the configuration of the present invention, and the present invention is not limited to the following embodiments. Further, in the present specification and the drawings, the same reference numerals are given to constituent elements having substantially the same functional configuration, and redundant description is omitted.

1 and 2 show the pellicle 1. The pellicle 1 includes, for example, a pellicle frame 10 that has a rectangular frame shape and has an opening F, and a pellicle film 11 that is attached to the upper surface of the pellicle frame 10 so as to cover the opening F and is stretched and supported on the pellicle frame 10. The adhesive 12 applied to the lower surface of the pellicle frame 10 and the protective film 13 covering the surface of the adhesive 12 are provided.

The pellicle film 11 is made of a transparent polymer film such as nitrocellulose, cellulose derivative, cycloolefin resin, or fluorine polymer. The film thickness is preferably 1 μm or more and 10 μm or less, more preferably 2 μm or more and 8 μm or less. More preferably, it is 2.5 μm or more and 7 μm or less. Further, the opening area of the opening F of the pellicle frame 10 is, for example, 1000 cm ² or more, and the pellicle 1 in the present embodiment is a so-called large pellicle. When the opening area of the opening F of the pellicle frame 10 is 1000 cm ² or more, if the film tension is weak during handling in the pellicle manufacturing process, film wrinkles may occur due to the weight of the pellicle frame or it may come off from the handling jig. However, by using this embodiment, the possibility of drastic film wrinkling during handling and removal from the handling jig is suppressed. Particularly pellicle area 3,000 cm ^2, and more is exhibited in the case of a large-sized pellicle exceeding 6,000 ^2.

Incidentally, when the pellicle 1 in which the pellicle film 11 is stretched on the thin pellicle frame 10 is manufactured, the rigidity of the pellicle frame 10 is lost due to the film tension of the pellicle film 11, and the pellicle film 11 is greatly deformed. Therefore, stress is applied to the pellicle frame 10 first, and the pellicle film 11 is attached to the pellicle frame 10 having this stress, so that the film tension of the pellicle film 11 and the stress of the pellicle frame 10 are balanced. It is important to make it. As will be described later, before the pellicle film 11 is attached to the pellicle frame 10, the pellicle film 11 is attached to the frame. To further increase the film tension of the pellicle film 11, the film tension in the frame is increased. It can also be left. By doing so, a pellicle that has film tension and can secure an effective exposure area can be manufactured.

First, a method for increasing the film tension in the frame will be described. The pellicle 1 is manufactured using the frame 20 shown in FIG. The frame body 20 is formed in a substantially rectangular frame shape, and has four side portions including a pair of opposed long side portions 20a and a pair of opposed short side portions 20b. The frame 20 has, for example, four sides that are linear as shown in FIG. 3A, and a pair of long sides 20a that protrude outward from the frame 20 as shown in FIG. A curved and bulging drum shape, or a curved and bulging drum shape such that the paired short side portions 20b are convex outward of the frame body 20 as shown in FIG. A pair of long side portions 20a and a pair of short side portions 20b that are all side portions as shown in D) are formed in a drum-like shape that is curved and bulged so as to protrude outward from the frame body 20. Can do. As the shape that protrudes outward, it may be a drum shape from one corner to the adjacent corner, and only the vicinity of the center of the long side 20a and the pair of short sides 20b is gently convex. It may be.

FIG. 4 is an explanatory diagram showing an outline of an example of a method for manufacturing the pellicle 1. As shown in FIG. 4A, first, a frame 20 having an opening G is prepared. Next, as shown in FIG. 4B, the vicinity of the center of the pair of long side portions 20a and the pair of short side portions 20b of the frame body 20 is pressed inward using a jig or the like. Accordingly, an external force is applied from the outside to the inside, and the pair of long side portions 20a and the pair of short side portions 20b of the frame body 20 are elastically deformed toward the inside.

Further, a substrate 30 on which the pellicle film 11 is formed by a film forming technique such as CVD or sputtering is prepared. Then, the pellicle film 11 formed on the substrate 30 is attached to the frame 20 in a state where the pair of long side portions 20a and the pair of short side portions 20b are elastically deformed inward. . At this time, adhesion between the pellicle film 11 and the frame body 20 is performed by an adhesive applied on the frame body 20. Thereafter, the external force that has elastically deformed the pair of long side portions 20a and the pair of short side portions 20b of the frame body 20 is removed. In FIG. 4B, for the sake of explanation, the amount of deformation inward of the frame body 20 is drawn large, but the actual pushing amount of the frame body 20 is an elastic deformation region of the frame body material. It can be pressed with any force. In addition, as shown in FIGS. 3B, 3C, and 3D, in the case of the frame body 20 that is curved and bulged so that the side portion protrudes outward, the side is pressed by pressing from the outside. The portion may be elastically deformed so as to be substantially linear.

The material of the frame member 20, for example, aluminum, an aluminum alloy (5000 series, 6000 series, 7000 series, etc.) or the like of metal, ceramics _{_{(SiC, A1N, A1 2 0}} 3 , etc.), ceramics and metal composites (Al -SiC, Al-A1N, AL-A1 ₂ 0 ₃ etc.), resin, etc., among which aluminum and its alloys can be mentioned, more specifically, aluminum and magnesium alloys, aluminum and magnesium and silicon Alloys that cause elastic deformation such as alloys of aluminum, zinc, and magnesium are preferred.

Next, as shown in FIG. 4C, the pellicle film 11 to which the frame body 20 is attached is peeled from the substrate 30. At this time, by removing the force that maintained the elastic deformation of the frame body 20, the pair of long side portions 20a and the pair of short side portions 20b of the frame body 20 are restored to their original shapes by elastic restoring force (expansion force). Displaces outward to return. As a result, a tensile force toward the outer side of the four sides acts on the pellicle film 11, and the film tension increases.

Next, as shown in FIG. 4D, a pellicle frame 10 is prepared. An adhesive is applied to the upper surface of the pellicle frame 10. Next, as shown in FIG. 4E, the pellicle film 11 with the frame 20 attached is attached to the upper surface of the pellicle frame 10 so as to cover the opening F. As a result, the pellicle film 11 is attached to the pellicle frame 10 in a state where the film tension is maintained. Thereafter, an excess portion of the pellicle film 11 including the frame body 20 is removed.

According to the present embodiment, since the film tension of the pellicle film 11 made of a polymer material can be improved without causing a temperature change, the physical properties of the pellicle film 11 can be prevented from changing, and exposure using the pellicle 1 can be performed. Processing can be performed appropriately. In addition, it is not necessary to use materials that can withstand temperature changes such as the pellicle frame 10, the adhesive 12, and the pellicle film 11, and the degree of freedom in selecting the material is increased. Further, there is no need for expensive equipment for imparting temperature changes or performing air conditioning accompanying temperature changes, and the control process is facilitated. Furthermore, since it is not exposed to high or low temperatures, the adhesive 12 and the like are not deteriorated by heat, the flatness and dimensional accuracy of the pellicle 1 are ensured, and highly accurate exposure processing can be performed.

The pellicle 1 described in the present embodiment is a large pellicle with an opening area F of the pellicle frame 10 of 1000 cm ² or more. However, since the film tension can be improved, Deflection due to its own weight can be suppressed. Therefore, even with a large pellicle, highly accurate exposure processing can be realized. Further, the swelling of the pellicle film 11 caused by the surrounding atmosphere involved when being mounted on the exposure substrate can be suppressed. Thereby, the waiting time until the swelling of the pellicle film 11 returns is reduced, and the manufacturing time can be shortened.

Furthermore, as shown in FIGS. 3B to 3D, when the frame 20 has an initial shape that is curved and bulged so that at least one side of the frame 20 protrudes outward, the frame A large amount of deformation toward the inside of the 20 side portions can be ensured, and accordingly, a large amount of deformation can be secured when returning to the original state by an elastic restoring force (expansion force). Therefore, the pellicle film 11 can be pulled more strongly, and the film tension can be further increased.

In the present embodiment, when the pellicle film 11 is attached, all of the pair of long side portions 20a and the pair of short side portions 20b of the frame body 20 may be elastically deformed inward. Any side may be elastically deformed inward. Thus, the film tension can be increased only in the direction in which the tension in the long side direction or the short side direction of the pellicle film 11 is desired to be expressed. When the pellicle film 11 is rectangular, a strong tension is applied in the long side direction. For example, the tension balance in the four directions can be equalized. In particular, when the rigidity of the pellicle frame 10 is high, it is preferable that an arbitrary side portion of the frame body 20 is elastically deformed inward. Here, the range of high rigidity is the range of 90 to 450 Young's modulus. Specifically, they are fine ceramics (for example, alumina, silicon carbide, etc.), iron, SUS, titanium and the like.

In the present embodiment, the external force that deforms the pair of long sides 20a and the pair of short sides 20b of the frame 20 is applied to the pellicle film 11 from the substrate 30 after the pellicle film 11 is attached to the frame 20. 11 may be removed before the pellicle film 11 is detached from the substrate 30 and before the pellicle film 11 is attached to the pellicle frame 10. Further, the external force may be removed after the pellicle film 11 is attached to the pellicle frame 10.

In the above embodiment, the frame 20 is elastically deformed when the pellicle film 11 is attached, but the pellicle frame 10 may be elastically deformed.

FIG. 5 shows the shape of the pellicle frame 10 used in this example. As shown in FIG. 5, the pellicle frame 10 is formed in a substantially rectangular frame shape, and has four sides including a pair of opposed long sides 10 a and a pair of opposed short sides 10 b. Yes. The pellicle frame 10 is formed in a drum-like shape, for example, as shown in FIG. 5B, in which a pair of long side portions 10a are curved and bulged so as to protrude outward from the pellicle frame 10. A pair of short sides 10b formed in a drum-like shape that is curved and bulged so as to protrude outward from the pellicle frame 10, and a pair of long sides that are all sides as shown in (D) It is possible to use a drum-like shape in which the side portion 10 a and the pair of short side portions 10 b are curved and bulged so as to protrude outward from the pellicle frame 10.

The material of the pellicle frame 10 may be anything as long as the Young's modulus is 1 GPa or more and 80 GPa or less. When this Young's modulus is less than 1 GPa, there is a problem that the tension of the film is too strong and the restoring force of the frame cannot be used. On the other hand, when the Young's modulus is larger than 80 GPa, there is a problem that it is difficult to elastically deform due to high rigidity and a high restoring force cannot be expected. For this reason, there exists an advantage that the moderate restoring force which balances a film | membrane tension can be utilized by making this Young's modulus 1 GPa or more and 80 GPa or less. For example, any material generally used for a pellicle frame such as aluminum, an alloy thereof, ceramics, or resin may be used. The material of the pellicle frame 10 is preferably lightweight and rigid considering the increase in its own weight due to an increase in size, and is preferably aluminum or an alloy thereof.

The thickness of the pellicle frame 10 (thickness of the long side portion 10a and the short side portion 10b) is 2.5 mm or more and 10 mm or less, preferably 3.0 mm or more and 8 mm or less, more preferably 4.0 mm or more and 7. 0 mm or less. This is because when the thickness is within this range, even if the foreign matter adheres to the pellicle film 11, the foreign matter and the pattern of the exposure base are not drawn as substantially the same image. This is because the transmittance of the glass is not substantially lowered. The width of the pellicle frame 10 (the width of the long side portion 10a and the short side portion 10b) is such that the ratio of the long side width / the long side length is 0.3% or more and 2.2% or less. 5% or more and 2.2% or less, more preferably 0.55% or more and 2.1% or less, and further preferably 0.6% or more and 2.0% or less. Another preferable example is 0.4% or more and 2.1% or less, more preferably 0.5% or more and 2.0% or less, and further preferably 0.9% or less, and further preferably Is 0.8% or less. The ratio of short side width / short side length is 0.3% to 3.8%, preferably 0.5% to 3.8%, preferably 0.55% to 3. 5% or less, more preferably 0.6% or more and 3.0% or less, and other preferable examples of the ratio are 0.3% or more and 2.2% or less, and more preferably 0.4% or less. % Or more and 2.1% or less, more preferably 0.5% or more and 2.0% or less, further preferably 1.0% or less, and further preferably 0.9% or less.

The long side length means the outer dimension of the long side portion 10a in the pellicle frame 10, and the short side length means the outer dimension of the short side portion 10b in the pellicle frame 10.

The long side length of the pellicle frame 10 is, for example, 400 mm or more and 2000 mm or less, preferably 700 mm or more and 1800 mm or less, more preferably 900 mm or more and 1600 mm or less, and particularly preferably 1200 mm or more and 1400 mm or less. The short side length is, for example, 200 mm or more and 1800 mm or less, preferably 500 mm or more and 1600 mm or less, and further 700 mm or more and 1200 mm or less.

The long side width of the pellicle frame 10 (width of the long side portion 10a) can be, for example, 5 mm or more and 15 mm or less, and the short side width of the pellicle frame 10 (width of the short side portion 10b) is, for example, 4 mm or more. It can be 15 mm or less.

FIG. 6 is an explanatory diagram showing an outline of a method for manufacturing the pellicle 1 of this example. As shown in FIG. 6A, first, a pellicle frame 10 is prepared. An adhesive is applied to the upper surface of the pellicle frame 10. Next, as shown in FIG. 6B, the vicinity of the center of the pair of long side portions 10a and the pair of short side portions 10b of the pellicle frame 10 is suppressed using a jig or the like. Thereby, an external force is applied from the outside to the inside, and the pair of long side portions 10a and the pair of short side portions 10b of the pellicle frame 10 are elastically deformed inward. In this state, the pellicle film 11 attached to the frame body 20 is attached to the upper surface of the pellicle frame 10 so as to cover the opening F. The pellicle film 11 is formed on the substrate 30 first and then attached to the frame 20 as in the above-described embodiment, and then the substrate 30 is removed. In the present embodiment, it is not necessary to elastically deform the frame body 20 by applying an external force as in the above-described embodiment. Further, in FIG. 6, the amount of deformation toward the inside of the pellicle frame 10 is drawn large for the sake of explanation, but the actual amount of push-in of the pellicle frame 10 is depressed by an arbitrary force as long as it is an elastic deformation region of the frame material. be able to. Further, as shown in FIGS. 5B, 5C, and 5D, in the case of the pellicle frame 10 that is curved and bulged so that the side is convex outward, the side is pressed by pressing from the outside. The portion may be elastically deformed so as to be substantially linear.

Next, as shown in FIG. 6C, the external force applied to the pellicle frame 10 is removed. Then, the pair of long side portions 10a and the pair of short side portions 10b of the pellicle frame 10 are displaced outward so as to return to the original shape by an elastic restoring force (expansion force). As a result, a tensile force directed toward the outer side of the four sides acts on the pellicle film 11 to increase the film tension. Thereafter, the excess portion of the pellicle film 11 is removed.

Thus, by applying a force in the direction opposite to the direction of tension applied to the pellicle film 11 to the pellicle frame 10, the tension of the pellicle film 11 is increased. Note that if the pellicle frame 10 is made thin, the amount of deformation is large, so the membrane tends to deform greatly. However, since the membrane cannot be deformed indefinitely, the restoring force (expansion) of the pellicle frame 10 as described above. Force) increases the tension of the pellicle film 11.

When a pellicle is manufactured using a narrow pellicle frame, if the film tension of the pellicle film is weak, wrinkles may occur in the pellicle film during manufacturing or handling of the pellicle. When a pellicle in such a state is attached to a mask and used, the pellicle will bend and come into contact with a foreign substance inspection device, etc., or when handling a mask with a pellicle, there is a high possibility that the pellicle film will come into contact with the case. The optical path of the exposure light at the time may be bent, and there is a possibility that normal exposure cannot be performed.

Therefore, it is necessary to maintain the film tension of the pellicle film 11 at a certain level when the pellicle 1 is configured using the narrow pellicle frame 10. Incidentally, since the pellicle frame 10 has relatively strong corners, it is assumed that the film tension of the pellicle film 11 is relatively strong along the diagonal line from the corners. Therefore, even when the narrow pellicle frame 10 is used, it is considered that the film tension of the pellicle film 11 on the diagonal line can be maintained relatively strong, but in contrast, the vicinity of the center portion of the frame body 20 is near the pellicle. When the frame body 20 is defeated by the film tension of the film 11 and the sides are easily bent, the film tension of the pellicle film 11 in the vicinity of the center portion of the frame body 20 is reduced so that the pellicle film 11 is attached to the pellicle frame 10 In addition, wrinkles are likely to occur in the pellicle film 11 and wrinkles are likely to occur in the pellicle film 11 when the pellicle 1 is handled. Therefore, if the sinking amount at the first reference point and the sinking amount at the second reference point are within the range defined by the following conditions A to C as described below, the long side and the short side of the pellicle frame 10 are reduced. The film tension of the pellicle film 11 at the first reference point and the second reference point in the vicinity of the central portion on the side is increased, and the film tension of the pellicle film 11 at the first reference point and the second reference point is balanced. Therefore, the present inventors have found that the balance of tension of the entire pellicle film 11 is improved, and the pellicle 1 capable of using the narrow pellicle frame 10 can be manufactured.

That is, it is preferable that the pellicle film 11 is given a film tension having a magnitude that satisfies all of the following conditions A, B, and C.

Condition A: In a state where the pellicle 1 is arranged so that the pellicle film 11 is substantially horizontal, it is the first reference point on the pellicle film 11 and the inner edge of the long side portion 10a of the side portion of the pellicle frame 10 in plan view Of the first reference point when a weight of 10.6 g is placed on the first reference point 30 mm away in the direction orthogonal to the inner edge of the long side portion 10a from the center point (hereinafter referred to as “long side side”) Is sometimes 0.4 mm or more and 2.4 mm or less, preferably 0.5 mm or more and 2.0 mm or less, more preferably 0.8 mm or more and 1.9 mm or less.

Condition B: a second reference point on the pellicle film 11 in a state where the pellicle film 1 is arranged so that the pellicle film 11 is substantially horizontal, and the inner edge of the short side portion 10b of the side portion of the pellicle frame 10 in plan view Of the second reference point when a weight of 10.6 g is placed on the second reference point 30 mm away from the central point in the direction orthogonal to the short side portion 10b (hereinafter referred to as “film on the short side side”). Is sometimes 0.3 mm or more and 2.3 mm or less, preferably 0.4 mm or more and 1.9 mm or less, more preferably 0.7 mm or more and 1.7 mm or less.

Condition C: The absolute value of the difference between the sinking amount at the first reference point and the sinking amount at the second reference point (that is, the difference between the film sinking amount on the long side and the film sinking amount on the short side) is 0 0.4 mm or less, preferably 0.3 mm or less, more preferably 0.25 mm or less.

If the film tension applied to the pellicle film 11 satisfies the above conditions A, B and C, film wrinkles are less likely to occur in the pellicle film 11 after the pellicle film 11 is attached to the pellicle frame 10. is there. When the pellicle 1 is attached to the mask, the pellicle film 11 comes into contact with the mask when the pellicle 1 is handled, or when the pellicle film 11 attached to the pellicle 1 receives an external pressure such as wind pressure. This is because the pellicle film 11 is prevented from contacting the mask. Furthermore, the inventors of the present application, in the pellicle using a narrow pellicle frame, the difference between the film sinking amount on the short side and the film sinking amount on the long side is compared with the difference in the conventional pellicle, I found it very small. Therefore, unlike the case of the conventional pellicle, since the balance of the film tension is maintained throughout the rectangular pellicle film 11, the product can be used as a pellicle even if the width of the side of the pellicle frame is narrow.

Next, a method for measuring the film sinking amount on the long side and the film sinking amount on the short side will be described. FIG. 7 is a schematic perspective view for explaining a method of measuring the film sinking amount on the long side and the film sinking amount on the short side. FIG. 8 shows the film sinking amount on the long side and the short side. It is typical sectional drawing for demonstrating the measuring method of the film sinking amount. 8A shows a longitudinal section of the pellicle 1 at the center point in the length direction of the long side portion 10a of the pellicle frame 10, and FIG. 8B shows the length of the short side portion 10b of the pellicle frame 10. A longitudinal section of the pellicle 1 at the center point in the vertical direction is shown. Further, as the pellicle mounting table 50, a pellicle storage container tray was used.

When measuring the amount of film sink on the long side, first, the pellicle 1 with the adhesive 12 and the protective film 13 (not shown in FIG. 7) is placed on the pellicle on the frame so that the pellicle film 11 is substantially horizontal. Place on the mounting table 50. Then, the two first reference points 111 in the pellicle film 11 are lightly marked so as not to break the pellicle film 11. Here, the first reference point 111 is the inner edge of the long side portion 10a from the center point 10ac of the long side portion 10a of the side portion of the pellicle frame 10 in plan view (as viewed from the thickness direction of the pellicle film 11). It is a point 30 mm away in the direction orthogonal to.

Next, a 10.6 g weight 55 is placed on one of the first reference points 111, and the amount of sinking 111D of the pellicle film 11 (the amount of film sinking on the long side 111D) relative to the position before placing the weight is laser-displaced. Measure with a meter. More specifically, a weight 55 having a hole shape such as a donut shape is prepared, and the weight 55 is placed on one first reference point such that the center of gravity of the weight 55 is positioned on the first reference point 111. The laser deformation sensor 57 is controlled so as to be positioned above the weight 55 by the stand 61. Then, the first reference point 111 is irradiated with laser light from the sensor 57 through the hole in the center of the weight 55, and the size of the film sinking amount 111D on the long side of the pellicle film 11 is measured. The controller 63 transmits a control signal to the sensor 57, and the position of the sensor 57, the timing of laser irradiation, and the like are controlled by this control signal. The measurement data of the sensor 57 is transmitted to the computer 65 via the controller 63. The computer 65 controls the controller 63 and calculates the value of the film sinking amount 111D on the long side from the measurement data transmitted through the controller 63. Similarly, the amount of film sink on the long side is also measured for the other first reference point 111. Then, the average value of the long-side film sinking amount for one first reference point 111 and the long-side film sinking amount for the other first reference point 111 is calculated, and the average value is calculated as the long-side film sinking amount. The amount of film sinking on the side.

Measure the amount of film sinking on the short side in the same way. That is, when measuring the film sinking amount on the short side, first, the pellicle 1 with the adhesive 12 and the protective film 13 (not shown in FIG. 7) is placed on the frame so that the pellicle film 11 is substantially horizontal. The pellicle mounting table 50 is left still. Then, the two second reference points 112 in the pellicle film 11 are lightly marked so as not to break the pellicle film 11. Here, the second reference point 112 is a plan view (as viewed from the thickness direction of the pellicle film 11) from the center point 10bc of the inner edge of the short side portion 10b of the side portion of the pellicle frame 10 to the inner edge of the short side portion 10b. It is a point 30 mm away in the direction orthogonal to.

Next, a 10.6 g weight 55 is placed on one of the first reference points 112, and the amount of sinking 112D of the pellicle film 11 (the amount of film sinking 112D on the long side) relative to before placing the weight is laser-displaced. Measure with a meter. More specifically, the weight 55 is placed on one second reference point 112 so that the center of gravity of the weight 55 is positioned on one second reference point 112, and the laser deformation sensor 57 is weighted by the stand 61. It controls so that it may be located above 55. Then, the second reference point 112 is irradiated with laser light from the sensor 57 through the hole in the center of the weight 55, and the size of the film sinking amount 112D on the long side of the pellicle film 11 is measured. The controller 63 transmits a control signal to the sensor 57, and the position of the sensor 57, the timing of laser irradiation, and the like are controlled by this control signal. The measurement data of the sensor 57 is transmitted to the computer 65 via the controller 63. The computer 65 controls the controller 63 and calculates the value of the film sinking amount 112D on the long side from the measurement data transmitted through the controller 63. Similarly, for the other second reference point 112, the film sink amount on the long side is measured. Then, an average value of the film sink amount on the short side for one second reference point 112 and the film sink amount on the short side for the other second reference point 112 is calculated, and the average value is calculated as the short side The amount of film sinking on the side.

In addition, according to the present embodiment, since the film tension can be improved, it is possible to suppress the bending due to the weight of the pellicle film 11 that becomes conspicuous when the pellicle 1 is enlarged. Therefore, even with a large pellicle, highly accurate exposure processing can be realized. Further, the swelling of the pellicle film 11 caused by the surrounding atmosphere involved when being mounted on the exposure substrate can be suppressed. Thereby, the waiting time until the swelling of the pellicle film 11 returns is reduced, and the manufacturing time can be shortened.

In the present embodiment, all of the pair of long sides 10a and the pair of short sides 10b of the pellicle frame 10 are elastically deformed inward, but at least one of the four sides is inward. It may be deformed. Then, by selecting the side part to be deformed inside the pellicle frame 10, the film tension can be increased only in the direction in which the tension in the long side direction or the short side direction of the pellicle film 11 is desired to be expressed. When 11 is rectangular, it is possible to equalize the tension balance in the four directions, such as applying a strong tension in the long side direction.

Further, as shown in FIGS. 5B to 5D, when the pellicle frame 10 has an initial shape curved and bulged so that at least one side protrudes outward, the pellicle frame A large amount of deformation toward the inside of the 10 side portions can be ensured, and accordingly, a large amount of deformation can be secured when returning to the original state by the elastic restoring force (expansion force). Therefore, the pellicle film 11 can be pulled more strongly, and the film tension can be further increased.

Further, in the pellicle frame 10 shown in FIGS. 5 (B) to 5 (D), the pellicle frame 10 is bulged to the outside by pressing down the curved and bulged portion so as to protrude outward. By controlling the amount and the amount of pressing inside the pellicle frame 10, it is possible to develop an arbitrary film tension. The pressing can be performed with any force within the elastic deformation region of the frame, and the amount of bulging that protrudes outward from the pellicle frame 10 and the amount of pressing into the pellicle frame 10 are balanced. The pair of long side portions 10a and the pair of short side portions 10b are preferably adjusted to be substantially linear after the pellicle 1 is molded.

In the above embodiment, the frame 20 and the pellicle frame 10 have a bulging amount that protrudes outward from the sides in the initial shape of at least a pair of sides. Furthermore, the pair of side portions may be on either the long side or the short side, but it is preferable to form a bulging amount that protrudes outward on the long side. Moreover, you may form the bulging amount which becomes convex outside on all four sides. The bulging amount on the long side is preferably 3 mm or more and 20 mm or less, more preferably 3.5 mm or more and 20 mm or less, still more preferably 3.8 mm or more and 18 mm or less, and further preferably 4.0 mm or more and 15 mm or less. In addition, the bulging amount that protrudes outward from the side portion in the initial shape on the short side side is 2.8 mm to 15 mm, more preferably 2.9 mm to 12 mm, and still more preferably 3.0 mm to 9 mm. In particular, as the bulging amount when the pair of the long side and the short side are combined to have a bulging amount that protrudes outward, the bulging amount on the long side is 2.5 mm to 20 mm and short. The bulge amount on the side is preferably 0.5 mm or more and 15 mm or less, the bulge amount on the long side is 3.0 mm or more and 18 mm or less, and the bulge amount on the short side is 1.0 mm or more and 12 mm or less. More preferably, the bulging amount on the long side is 3.5 mm or more and 15 mm or less, and the bulging amount on the short side is more preferably 1.5 mm or more and 9 mm or less. As shown in FIG. 9, this bulge amount S is obtained when the straight line connecting the vertices C of the outer edges at the corners of each side of the pellicle frame 10 or the frame 20 is used as the virtual reference line L. The distance between the reference line L and the point P farthest from the reference line on the outer edge of the side.

The initial shape may be any shape as long as it has an outwardly convex bulge amount, but preferably has a bulge amount near the center as shown in FIG. It may be gradually convex outward from the vertex C, or may have a certain straight line from the vertex C and then convex outward.

Further, the radius of curvature R of the outer edge of the corner of the pellicle frame 10 is preferably 1 mm or more and 5 mm or less, and more preferably 2 mm or more and 5 mm or less. The radius of curvature R of the inner edge of the corner is preferably 1 mm or more and 3 mm or less, and most preferably 2 mm. This is because even if the pellicle frame 10 is narrow, if the curvature radius of the outer edge and the inner edge of the corner of the pellicle frame 10 is within the above range, stress can be prevented from concentrating on the corner. However, the corner can have a sufficient area. As a result, the rigidity of the corner portion can be maintained, and the shape of the corner portion can be maintained even when the pellicle frame 10 has a restoring force. Therefore, the shape of the pellicle frame 10 is changed from a rectangular shape to a parallelogram shape. This is because it is difficult to be distorted into other shapes such as the above, and wrinkles can be prevented from occurring in the pellicle film due to the deformation of the shape.

Further, when a film adhesive or a mask adhesive is applied to the pellicle frame 10, the amount of application to the corners of the pellicle frame 10 tends to increase, but the curvature radius of the outer edge and inner edge of the pellicle frame 10 is increased. Is within the above range, it is difficult to cause adhesive sag and the like, and therefore it is preferable that a film adhesive or a mask adhesive can be uniformly applied to the pellicle frame 10.

Also, the surface of the pellicle frame can be subjected to blackening treatment such as black chrome plating, black alumite, or black paint.

¡Handling grooves can be provided on the frame, and there are cases where the grooves are provided along the entire length of a pair of short sides, or where grooves are partially provided on the four sides. This groove is provided with a C surface, and C0.1 to 0.5 may be provided for deburring and the like.

On the film adhesive side of the frame, a C surface is provided at the angle formed by the outer surface and the inner surface. The C-plane having an angle with the outer side has C0.1 to 0.5, and the C-plane having the angle with the inner side has C0.5 to 2.5. It is preferable that the C surface of the outer surface is within the above range because when cutting an excess film, the cutter, jigs, etc. are smooth and the film does not break due to the occurrence of burrs. Moreover, it is preferable that the C surface of the inner surface is within the above range because the film adhesive is difficult to sag.

In this, the black alumite treatment will be further described.

As the frame body (support frame) for the pellicle, a 5000 series aluminum alloy is generally used in many cases, and an aluminum alloy will be described as an example.

In general black alumite treatment, a pellicle frame is formed with an aluminum alloy, then anodized, fine pores generated by this treatment are sealed with a blackening agent, and a sealing treatment is applied to close the fine pores. Black anodized. However, when the surface of the frame body thus made by a general method is observed with an electron microscope, generation of fine cracks (microcracks) is confirmed. Such micro-cracks have a problem that even if the pattern becomes finer and the wiring width is further narrowed, a very small foreign matter falling into the cracks also becomes a problem. Therefore, it is preferable to take the following method as a method for preventing the occurrence of such microcracks.

First, the surface of the pellicle frame is anodized. This alumite treatment is performed in a sulfuric acid concentration of 10 to 20%, a current density of 1 to 2 A / dm ² , an electrolyte temperature of 15 to 30 ° C., and an energization time of 10 to 30 minutes. At that time, a large number of microscopic holes (diameter 50 to 200 mm, pitch 500 to 1500 mm) are regularly formed on the surface of the alloy. Thereafter, a blackening process is performed using the holes. Since the blackening process is performed in order to prevent reflection of light from the frame, it is not limited to black, but also includes dark colors such as brown and dark blue that are close to black. Examples of the blackening treatment include dyeing and electrolytic coloring. Dyeing is a method of obtaining a color tone by adsorbing the dye in this hole by immersing it in a solution in which a black dye is dissolved, and electrolytic coloring is a method in which a metallic element is electrically deposited in this hole to change the color tone. How to get. For example, the dyeing is performed at a dye concentration of 3 to 10 g / L and a dyeing solution temperature of 50 to 65 ° C.

Subsequently, a sealing process is performed to close the hole. For this treatment, for example, boiling water to which 6 to 12 g / L of a hard wall 3 (trade name) sealing aid, which is called a low-temperature sealing agent, is used is used.

Although the fine pores on the surface of the alumite film are filled by the sealing at this time and the alumite film becomes dense, the temperature of the sealing is slightly lower than 100 ° C., for example, 70 to 95 ° C., more preferably 80 ° C. If the sealing treatment is performed at ˜90 ° C., a pellicle frame having a very uniform surface property and substantially free of microcracks can be produced.

In addition, the judgment of the presence or absence of a microcrack draws a 10 cm (actual dimension 0.1 mm) straight line in the photograph which expanded the frame body surface 1000 times with the electron microscope, and calculates the number of cracks which cross the straight line. As for the width of the crack, those that can be observed in the electron micrograph, that is, those having a crack width of 0.1 μm or more are counted. It is judged that cracks exist with higher density as this value increases.

If necessary, apply adhesive (acrylic, vinyl acetate, silicone, rubber, etc.) or grease (silicone, fluorine, etc.) to capture foreign substances on the inner wall surface or the entire surface of the pellicle frame. May be.

In addition, if necessary, a minute hole that penetrates the inside and outside of the pellicle frame body is made so that the pressure difference between the inside and outside of the space formed by the pellicle and photomask is eliminated, preventing swelling and dents in the film. I can do it.

Also, at this time, it is preferable to attach a foreign matter removing filter outside the fine hole because the atmospheric pressure can be adjusted and foreign matter can be prevented from entering the space formed by the pellicle and the photomask.

When the space volume formed by the pellicle and the photomask is large, it is preferable to provide a plurality of these holes and filters because the recovery time of the swelling and dent of the film due to atmospheric pressure fluctuation is shortened.

The pellicle frame according to the present embodiment can have both appropriate rigidity and flexibility by satisfying the above requirements, so there is no distortion of the frame due to stretching of the pellicle film, and the pellicle can be used alone. It is possible to follow the bending of the mask itself in the handling after the pasting to the mask as well as the bending in the case of handling. As a result, the pellicle is not wrinkled and can follow the bending of the mask, so that an excellent effect is obtained that no air path is generated.

The pellicle film 11 according to this embodiment is attached to the pellicle frame 10 having the opening F so as to cover the opening surface F. The tension of the attached pellicle film 11 is 1.8 gf / mm or more. 6 gf / mm or less, preferably 1.9 gf / mm or more and 5 gf / mm or less, more preferably 2.0 gf / mm or more and 4.5 gf / mm or less.

By adjusting the tension of the pellicle film 11 to be equal to or higher than the lower limit in the above range, the generation of wrinkles on the pellicle film 11 during the handling of the pellicle 1 is suppressed, and the handling property of the pellicle 1 is improved. Further, by adjusting the tension of the pellicle film 11 to be equal to or lower than the upper limit in the above range, cracks and breakage of the pellicle film 11 can be effectively suppressed.

The film adhesive for adhering the pellicle film and the pellicle frame is appropriately selected depending on the material of the pellicle film and the material of the pellicle frame. For example, an epoxy, acrylic, silicone or fluorine adhesive is used.

Also, as the curing method of the adhesive, a curing method (thermal curing, photocuring, anaerobic curing, etc.) suitable for each adhesive is adopted. From the viewpoint of dust generation, cost, and workability, an acrylic ultraviolet curable adhesive is preferable.

The mask adhesive for attaching the pellicle frame to the photomask is a hot-melt type (rubber-based or acrylic-based) that has adhesive force on itself, and a tape-based (base material) with adhesive material applied to both sides of the base material. Acrylic, PVC, etc. sheets or rubber, polyolefin, urethane, etc. foams can be applied, and rubber, acrylic, silicone, etc. adhesive materials are used as adhesives) The The adhesive material may be transparent, but may be black from the viewpoint of foreign matter inspection.

In the large pellicle according to the present embodiment, a relatively soft hot-melt material or foam is suitable as the mask adhesive material in order to uniformly apply the pellicle to the photomask with a low load. In the case of foam, dust generation from the foam can be prevented by covering the cross section with an acrylic or vinyl acetate adhesive material or a non-adhesive material.

The thickness of the mask adhesive is usually 0.2 mm or more, but preferably 1 mm or more for uniform sticking to the photomask. In order to protect the adhesive surface of the mask adhesive material until it is attached to the photomask, a polyester film that has been subjected to a release treatment with silicone or fluorine is used.

The preferred embodiments of the present invention have been described above with reference to the accompanying drawings, but the present invention is not limited to such examples. It is obvious for those skilled in the art that various modifications or modifications can be conceived within the scope of the idea described in the claims, and these naturally belong to the technical scope of the present invention. It is understood.
(Example)
Example 1

As a frame for a large pellicle, a material having an aluminum alloy, a thickness of 8 mm, a width of a long side portion and a short side portion of 20 mm, and an internal size of 1600 mm × 1600 mm was prepared. The frame has a shape that is curved and bulged so that the vicinity of the center of each side is convex outward, and the amount of bulging outward of the initial shape is 3.3 mm. Separately, as a pellicle frame for a large pellicle, the material is aluminum alloy, the thickness is 5.0 mm, the width of the long side and the short side is 9 mm, the inside dimension is 1350 mm × 1140 mm, and the vicinity of the center of each side is the outside As the amount of bulging to the outside of the initial shape, a shape having a long side portion of 9.0 mm and a short side portion side of 7.5 mm was prepared.

The large pellicle was manufactured as follows. Cellulose ester formed on the substrate on the frame while pressing the vicinity of the center of each side inward using a jig so that each side of the frame for the large pellicle is substantially linear Then, the pellicle film was peeled off from the substrate. After peeling from the substrate, the external force by the jig was released. A styrene ethylene butylene styrene mask adhesive was applied to the lower edge of the pellicle frame for a large pellicle. Apply an acrylic film adhesive to the upper edge of the pellicle frame, and use a jig to hold the center of each side inward so that each side of the pellicle frame is substantially straight. A pellicle film was adhered to the frame 10, and then the excess film was excised.

Here, the presence or absence of wrinkles generated when the pellicle film was spread and adhered to the pellicle frame was evaluated. The evaluation results are shown in FIG. In the evaluation result notation, “○” indicates that there is no wrinkle on the film, “△” indicates that the film is slightly wavy, and “×” indicates that the film is slightly wrinkled. , Shows.

The handling of the pellicle frame was carried out by gripping a part of each of the pair of short sides with a handling jig. Then, handling properties were evaluated in a series of handling steps from after the pellicle membrane was spread and adhered to the pellicle frame to storage in the storage container. The evaluation results are shown in FIG. In the notation of the evaluation results, “◯” indicates that the tool has not fallen from the jig once in the handling process, and “x” indicates that the tool has fallen from the jig even once.
(Example 2)

As a frame for a large pellicle, a material having an aluminum alloy, a thickness of 8 mm, a width of a long side and a short side of 20 mm, and an internal size of 1600 mm × 1600 mm was prepared. The frame used was an initial shape with straight sides. Separately, as a pellicle frame for a large pellicle, the material is an aluminum alloy, the thickness is 5.0 mm, the width of the long side and the short side is 9 mm, the inside dimension is 1350 mm × 1140 mm, and the vicinity of the center of each side is outside A shape bulging so as to be convex and having an initial bulging amount of 8.0 mm on the long side and 6.5 mm on the short side was prepared.

The large pellicle was manufactured as follows. A large pellicle frame was adhered to a cellulose ester pellicle film formed on the substrate, and then the pellicle film was peeled off from the substrate. A styrene ethylene butylene styrene mask adhesive was applied to the lower edge surface of the pellicle frame for a large pellicle. Acrylic film adhesive is applied to the upper edge surface of the pellicle frame, and the center of the long side is directed inward with a jig so that the amount of bulging out of the long side of the pellicle frame is 5 mm. Then, the pellicle film was adhered to the pellicle frame, and then the excess film was excised.

In the same manner as in Example 1, the presence of wrinkles and handling properties were evaluated. The evaluation results are shown in FIG.
(Example 3)

As a pellicle frame for a large pellicle, the inner dimension is 1200 mm × 760 mm, the thickness is 5 mm, the long side width is 9 mm, the short side width is 5 mm, and the long side width of the initial shape is 5 Using a 5 mm one, attach the pellicle film to the pellicle frame while pressing the center of the long side inward with a jig so that the amount of bulging to the outside of the long side is 3 mm. The excess membrane was excised. Other than that was the same as Example 2.

In the same manner as in Example 1, the presence of wrinkles and handling properties were evaluated. The evaluation results are shown in FIG.
(Example 4)

As a frame for a large pellicle, a material having an aluminum alloy, a thickness of 8 mm, a width of a long side and a short side of 20 mm, and an internal size of 1600 mm × 1600 mm was prepared. The frame used was an initial shape with straight sides. Separately, as a pellicle frame for a large pellicle, the material is aluminum alloy, the thickness is 5.5 mm, the corners are the outer corner R5, the inner corner R2, the long side width is 6 mm, the short side width is 12 mm, The inner dimension is 1336mm x 1128mm, the shape is curved and bulged so that the vicinity of the center of each side is convex outward, and the bulging amount to the outside of the initial shape is 13.0mm on the long side and the short side A 1.5 mm side was prepared.

The large pellicle was manufactured as follows. A large pellicle frame was adhered to a cellulose ester pellicle film formed on the substrate, and then the pellicle film was peeled off from the substrate. A styrene ethylene butylene styrene mask adhesive was applied to the lower edge surface of the pellicle frame for a large pellicle. Acrylic film adhesive is applied to the upper edge surface of the pellicle frame and pressed by a jig toward the inner side of the bulge of the long side of the pellicle frame by 1.2 mm (a straight line of 1.2 mmL from P in FIG. 9). The pellicle film was adhered to the pellicle frame while fixing the bulging portion with a jig (fixing the jig with P in the figure), and then the excess film was cut off.

In the same manner as in Example 1, the presence of wrinkles and handling properties were evaluated. The evaluation results are shown in FIG. In Example 4, the film sinking amount on the long side of the pellicle film was 2.23 mm, and the film sinking amount on the short side was 2.06 mm.
(Example 5)

A frame similar to that of Example 4 was prepared as a frame for a large pellicle. Separately, as a pellicle frame for a large pellicle, the material is aluminum alloy, the thickness is 5.5 mm, the corners are the outer corner R2, the inner corner R2, the long side width is 7 mm, the short side width is 6 mm, The inner dimension is 1348mm x 1126mm, the shape is curved and bulged so that the vicinity of the center of each side is convex outward, and the bulging amount to the outside of the initial shape is 9.0mm on the long side and the short side The side of 8.0mm was prepared.

The large pellicle was manufactured as follows. A large pellicle frame was adhered to a cellulose ester pellicle film formed on the substrate, and then the pellicle film was peeled off from the substrate. A styrene ethylene butylene styrene mask adhesive was applied to the lower edge surface of the pellicle frame for a large pellicle. Acrylic film adhesive is applied to the upper edge surface of the pellicle frame, and it is pressed by a jig from the bulging part of the long side part of the pellicle frame to the inside by 1.2 mm, and the short side part also bulges. The pellicle film was adhered to the pellicle frame while being pressed by a jig toward the inside by 1.2 mm from the part, and then the excess film was excised.

In the same manner as in Example 1, the presence of wrinkles and handling properties were evaluated. The evaluation results are shown in FIG. In Example 5, the film sink amount on the long side of the pellicle film was 2.15 mm, and the film sink amount on the short side was 1.89 mm.
(Example 6)

A frame similar to that of Example 4 was prepared as a frame for a large pellicle. Separately, as a pellicle frame for a large pellicle, the material is aluminum alloy, the thickness is 5.5 mm, the corners are the outer corner R3, the inner corner R2, the long side width is 9 mm, the short side width is 9 mm, The inner dimension is 1342mm x 1122mm, the shape is curved and bulged so that the vicinity of the center of each side is convex outward, and the bulging amount to the outside of the initial shape is 5.0mm on the long side and the short side The side of 4.0 mm was prepared.

The large pellicle was manufactured as follows. A large pellicle frame was adhered to a cellulose ester pellicle film formed on the substrate, and then the pellicle film was peeled off from the substrate. A styrene ethylene butylene styrene mask adhesive was applied to the lower edge surface of the pellicle frame for a large pellicle. Acrylic film adhesive is applied to the upper edge of the pellicle frame, and the short side of the pellicle frame is pressed inward by 4.6mm from the bulging part while the long side does nothing Then, the pellicle film was adhered to the pellicle frame, and then the excess film was excised.

In the same manner as in Example 1, the presence of wrinkles and handling properties were evaluated. The evaluation results are shown in FIG. In Example 6, the film sink amount on the long side of the pellicle film was 1.41 mm, and the film sink amount on the short side was 1.51 mm.
(Example 7)

A frame similar to that of Example 4 was prepared as a frame for a large pellicle. The frame used was an initial shape with straight sides. Separately, as a pellicle frame for a large pellicle, the material is aluminum alloy, the thickness is 5.5 mm, the corners are the outer corner R5, the inner corner R2, the long side width is 12 mm, the short side width is 4 mm, The inner dimension is 1352mm x 1116mm, and the shape is curved and bulged so that the vicinity of the center of each side is convex outward. The bulging amount to the outside of the initial shape is 3.0mm on the long side and the short side. The one whose side was 12.0 mm was prepared.

The large pellicle was manufactured as follows. A large pellicle frame was adhered to a cellulose ester pellicle film formed on the substrate, and then the pellicle film was peeled off from the substrate. A styrene ethylene butylene styrene mask adhesive was applied to the lower edge surface of the pellicle frame for a large pellicle. An acrylic film adhesive is applied to the upper edge surface of the pellicle frame, and the bulging portion of the long side portion of the pellicle frame is fixed with a jig, and the short side portion is 4.6 mm inside the bulging portion. The pellicle film was adhered to the pellicle frame while being pressed down with a jig, and then the excess film was excised.

In the same manner as in Example 1, the presence of wrinkles and handling properties were evaluated. The evaluation results are shown in FIG. In Example 7, the film sink amount on the long side of the pellicle film was 1.54 mm, and the film sink amount on the short side was 1.45 mm.
(Example 8)

A frame similar to that of Example 4 was prepared as a frame for a large pellicle. Separately, as a pellicle frame for a large pellicle, the material is aluminum alloy, the thickness is 5.5 mm, the corners are the outer corner R4, the inner corner R2, the long side width is 11 mm, the short side width is 7 mm, The inner dimension is 1346mm x 1118mm, the shape is curved and bulged so that the vicinity of the center of each side is convex outward, and the bulging amount to the outside of the initial shape is 5.0mm on the long side and the short side The side of 6.0 mm was prepared.

The large pellicle was manufactured as follows. A large pellicle frame was adhered to a cellulose ester pellicle film formed on the substrate, and then the pellicle film was peeled off from the substrate. A styrene ethylene butylene styrene mask adhesive was applied to the lower edge surface of the pellicle frame for a large pellicle. Acrylic film adhesive is applied to the upper edge surface of the pellicle frame, and it is pressed by a jig from the bulging part of the long side part of the pellicle frame to the inside by 2.3 mm, and the short side part also bulges. The pellicle film was adhered to the pellicle frame while being pressed by a jig toward the inside by 1.2 mm from the part, and then the excess film was excised.

In the same manner as in Example 1, the presence of wrinkles and handling properties were evaluated. The evaluation results are shown in FIG. In Example 8, the film sink amount on the long side of the pellicle film was 1.46 mm, and the film sink amount on the short side was 1.76 mm.
Example 9

A frame similar to that of Example 4 was prepared as a frame for a large pellicle. Separately, as a pellicle frame for a large pellicle, the material is an aluminum alloy, the thickness is 5.5 mm, the corners are the outer corner R4, the inner corner R2, the long side width is 10 mm, the short side width is 11 mm, The inner dimension is 1338mm x 1120mm, the shape is curved and bulged so that the vicinity of the center of each side protrudes to the outside, the amount of bulging outward from the initial shape is 4.0mm on the long side, and the short side The side of 4.0 mm was prepared.

The large pellicle was manufactured as follows. A large pellicle frame was adhered to a cellulose ester pellicle film formed on the substrate, and then the pellicle film was peeled off from the substrate. A styrene ethylene butylene styrene mask adhesive was applied to the lower edge surface of the pellicle frame for a large pellicle. Acrylic film adhesive is applied to the upper edge surface of the pellicle frame, and it is pressed by a jig from the bulging part of the long side part of the pellicle frame to the inside by 1.2 mm, and the short side part also bulges. The pellicle film was adhered to the pellicle frame while being pressed by a jig toward the inside by 2.3 mm from the part, and then the excess film was excised.

In the same manner as in Example 1, the presence of wrinkles and handling properties were evaluated. The evaluation results are shown in FIG. In Example 9, the film sink amount on the long side of the pellicle film was 1.05 mm, and the film sink amount on the short side was 0.89 mm.
(Example 10)

A frame similar to that of Example 4 was prepared as a frame for a large pellicle. Separately, as a pellicle frame for a large pellicle, the material is aluminum alloy, the thickness is 5.5 mm, the corners are the outer corner R5.5, the inner corner R2, the width of the long side is 11 mm, the width of the short side is 10mm, inner dimension is 1340mm x 1118mm, the shape is curved and bulged so that the vicinity of the center of each side is convex outward, the amount of bulging outward from the initial shape is 7.5mm on the long side A side having a side of 3.0 mm was prepared.

The large pellicle was manufactured as follows. A large pellicle frame was adhered to a cellulose ester pellicle film formed on the substrate, and then the pellicle film was peeled off from the substrate. A styrene ethylene butylene styrene mask adhesive was applied to the lower edge surface of the pellicle frame for a large pellicle. Acrylic film adhesive is applied to the upper edge surface of the pellicle frame, and it is pressed with a jig from the bulging part of the long side part of the pellicle frame to the inner side by 4.6 mm, and the short side part also bulges. The pellicle film was adhered to the pellicle frame while being pressed by a jig toward the inside by 1.2 mm from the part, and then the excess film was excised.

In the same manner as in Example 1, the presence of wrinkles and handling properties were evaluated. The evaluation results are shown in FIG. In Example 10, the film sink amount on the long side of the pellicle film was 1.00 mm, and the film sink amount on the short side was 0.95 mm.
(Example 11)

A frame similar to that of Example 4 was prepared as a frame for a large pellicle. Separately, as a pellicle frame for a large pellicle, the material is aluminum alloy, the thickness is 5.5 mm, the corners are the outer corner R3, the inner corner R2, the long side width is 11 mm, the short side width is 5 mm, The inner dimension is 1350mm x 1118mm, the shape is curved and bulged so that the vicinity of the center of each side is convex outward, and the bulging amount to the outside of the initial shape is 5.0mm on the long side and the short side The one whose side was 14.0 mm was prepared.

The large pellicle was manufactured as follows. A large pellicle frame was adhered to a cellulose ester pellicle film formed on the substrate, and then the pellicle film was peeled off from the substrate. A styrene ethylene butylene styrene mask adhesive was applied to the lower edge surface of the pellicle frame for a large pellicle. Acrylic film adhesive is applied to the upper edge surface of the pellicle frame, and it is pressed by a jig from the bulging part of the long side part of the pellicle frame to the inside by 2.3 mm, and the short side part also bulges. The pellicle film was adhered to the pellicle frame while being pressed with a jig toward the inside 7.0 mm from the part, and then the excess film was excised.

In the same manner as in Example 1, the presence of wrinkles and handling properties were evaluated. The evaluation results are shown in FIG. In Example 11, the film sink amount on the long side of the pellicle film was 1.67 mm, and the film sink amount on the short side was 1.98 mm.
(Comparative Example 1)

Using the large pellicle frame used in Example 1, the pellicle film was adhered to the frame without pressing down the center of the long side of the large pellicle frame. Other than that was the same as Example 1. As a result, a curved portion remains in the vicinity of the corner portion of the pellicle frame, and the corner portion is deformed, resulting in a defect in appearance.

In the same manner as in Example 1, the presence of wrinkles and handling properties were evaluated. The evaluation results are shown in FIG.
(Comparative Example 2)

Using the large pellicle frame used in Example 2, the pellicle film was adhered to the pellicle frame without pressing the long side of the large pellicle frame inward. Other than that was the same as Example 2. As a result, a curved portion remains in the vicinity of the corner portion of the pellicle frame, and the corner portion is deformed, resulting in a defect in appearance.

In the same manner as in Example 1, the presence of wrinkles and handling properties were evaluated. The evaluation results are shown in FIG.
(Comparative Example 3)

The frame for the large pellicle used in Example 3 with the bulging amount of the initial shape of the long side set to 0 mm is used, and the pellicle film is peeled without pressing down the long side of the pellicle frame for the large pellicle. Glued to the frame. Other than that was the same as Example 3. As a result, a curved portion remains in the vicinity of the corner portion of the pellicle frame, and the corner portion is deformed, resulting in a defect in appearance.

In the same manner as in Example 1, the presence of wrinkles and handling properties were evaluated. The evaluation results are shown in FIG.
(Comparative Example 4)

A frame similar to that of Example 4 was prepared as a frame for a large pellicle. Separately, as a pellicle frame for a large pellicle, the material is aluminum alloy, the thickness is 5.5 mm, the corners are the outer corner R9, the inner corner R2, the long side width is 9 mm, the short side width is 10 mm, The inner dimension is 1340mm x 1122mm, the shape is curved and bulged so that the vicinity of the center of each side is convex outward, and the bulging amount to the outside of the initial shape is 2.3mm on the long side and the short side A 1.5 mm side was prepared. Then, the pellicle film was bonded to the pellicle frame without pressing down the long side and the short side of the pellicle frame for the large pellicle.

In the same manner as in Example 1, the presence of wrinkles and handling properties were evaluated. The evaluation results are shown in FIG. In Comparative Example 4, the film sink amount on the long side of the pellicle film was 2.78 mm, and the film sink amount on the short side was 2.37 mm.
(Comparative Example 5)

A frame similar to that of Example 4 was prepared as a frame for a large pellicle. Separately, as a pellicle frame for a large pellicle, the material is aluminum alloy, the thickness is 5.5 mm, the corners are the outer corner R6, the inner corner R2, the long side width is 4 mm, the short side width is 4 mm, The inner dimension is 1352mm x 1132mm, the shape is curved and bulged so that the vicinity of the center of each side is convex outward, and the bulging amount to the outside of the initial shape is 30.0mm on the long side and the short side The one with a side of 22.0 mm was prepared.

The large pellicle was manufactured as follows. A large pellicle frame was adhered to a cellulose ester pellicle film formed on the substrate, and then the pellicle film was peeled off from the substrate. A styrene ethylene butylene styrene mask adhesive was applied to the lower edge surface of the pellicle frame for a large pellicle. Acrylic film adhesive is applied to the upper edge of the pellicle frame, and it is pressed inward by 7.0mm from the bulge of the long side of the pellicle frame, while the short side also bulges. The pellicle film was adhered to the pellicle frame while being pressed with a jig toward the inside 7.0 mm from the part, and then the excess film was excised.

In the same manner as in Example 1, the presence of wrinkles and handling properties were evaluated. The evaluation results are shown in FIG. In this comparative example, the pellicle frame did not become substantially rectangular.
In Comparative Example 4, the film sink amount on the long side of the pellicle film was 2.78 mm, and the film sink amount on the short side was 2.37 mm.
(Comparative Example 6)

A frame similar to that of Example 4 was prepared as a frame for a large pellicle. Separately, as a pellicle frame for a large pellicle, the material is aluminum alloy, the thickness is 5.5 mm, the corners are the outer corner R5, the inner corner R2, the long side width is 9 mm, the short side width is 7 mm, The inner dimension is 1346mm x 1122mm, the shape is curved and bulged so that the vicinity of the center of each side is convex outward, and the bulging amount to the outside of the initial shape is 8.0mm on the long side and the short side The side of 7.0 mm was prepared.

The large pellicle was manufactured as follows. A large pellicle frame was adhered to a cellulose ester pellicle film formed on the substrate, and then the pellicle film was peeled off from the substrate. A styrene ethylene butylene styrene mask adhesive was applied to the lower edge surface of the pellicle frame for a large pellicle. Acrylic film adhesive is applied to the upper edge surface of the pellicle frame, and the short side of the pellicle frame is pressed inward by 1.2mm from the bulging part, while the long side does nothing Then, the pellicle film was adhered to the pellicle frame, and then the excess film was excised.

In the same manner as in Example 1, the presence of wrinkles and handling properties were evaluated. The evaluation results are shown in FIG. In this comparative example, self-weight deflection occurred in the pellicle film during handling of the large pellicle. In Comparative Example 4, the film sink amount on the long side of the pellicle film was 2.53 mm, and the film sink amount on the short side was 2.21 mm.
(Comparative Example 7)

A frame similar to that of Example 4 was prepared as a frame for a large pellicle. Separately, as a pellicle frame for a large pellicle, the material is aluminum alloy, the thickness is 5.5 mm, the corners are the outer corner R6, the inner corner R2, the long side width is 8 mm, the short side width is 7 mm, The inner dimension is 1346mm x 1124mm, the shape is curved and bulged so that the vicinity of the center of each side is convex outward, and the bulging amount to the outside of the initial shape is 9.0mm on the long side and the short side The side of 8.0mm was prepared.

The large pellicle was manufactured as follows. A large pellicle frame was adhered to a cellulose ester pellicle film formed on the substrate, and then the pellicle film was peeled off from the substrate. A styrene ethylene butylene styrene mask adhesive was applied to the lower edge surface of the pellicle frame for a large pellicle. Acrylic film adhesive is applied to the upper edge of the pellicle frame, and the short side is left untouched with a jig from the bulge of the long side of the pellicle frame toward the inside by 2.3 mm. Then, the pellicle film was adhered to the pellicle frame, and then the excess film was excised.

In the same manner as in Example 1, the presence of wrinkles and handling properties were evaluated. The evaluation results are shown in FIG. In this comparative example, when handling a large pellicle, a jig hits the short side of the pellicle frame, and wrinkles were generated in the portion of the pellicle film adjacent to the portion hit by the jig. In Comparative Example 4, the film sink amount on the long side of the pellicle film was 1.97 mm, and the film sink amount on the short side was 2.35 mm.
(Comparative Example 8)

A frame similar to that of Example 4 was prepared as a frame for a large pellicle. Separately, as a pellicle frame for a large pellicle, the material is aluminum alloy, the thickness is 5.5 mm, the corners are the outer corner R5, the inner corner R2, the long side width is 8 mm, the short side width is 10 mm, The inner dimension is 1340mm x 1124mm, the shape is curved and bulged so that the vicinity of the center of each side is convex outward, and the bulging amount to the outside of the initial shape is 15.0mm on the long side, short side The side of 4.0 mm was prepared.

The large pellicle was manufactured as follows. A large pellicle frame was adhered to a cellulose ester pellicle film formed on the substrate, and then the pellicle film was peeled off from the substrate. A styrene ethylene butylene styrene mask adhesive was applied to the lower edge surface of the pellicle frame for a large pellicle. Acrylic film adhesive is applied to the upper edge surface of the pellicle frame, and the short side is left untouched with a jig from the bulging part of the long side of the pellicle frame to the inside of 7.0 mm. Then, the pellicle film was adhered to the pellicle frame, and then the excess film was excised.

As in Example 1, the presence or absence of wrinkles and handling properties were evaluated. The evaluation results are shown in FIG. In this comparative example, wrinkles occurred in the pellicle film near the short side of the pellicle frame. In Comparative Example 4, the film sink amount on the long side of the pellicle film was 1.35 mm, and the film sink amount on the short side was 1.8 mm.

DESCRIPTION OF SYMBOLS 1 ... Pellicle, 10 ... Pellicle frame, 10a ... Long side part, 10b ... Short side part, 11 ... Pellicle film, 12 ... Adhesive, 13 ... Protective film, 20 ... Frame, 20a ... Long side part, 20b ... Short Side, 30 ... substrate, F ... opening, G ... opening, S ... bulge amount.

Claims

A pellicle frame that is formed into a substantially rectangular frame shape by four sides and supports the pellicle film in a stretched manner,
The ratio of the long side width / long side length of the side part is 0.3% to 2.2%, and the ratio of the short side width / short side length of the side part is 0.3% to 3.8. % Or less,
A pellicle frame in which at least a pair of the side portions bulge to the outside of the pellicle frame.
The pellicle frame according to claim 1, wherein the long side width of the side portion is 5 mm or more and 15 mm or less, and the short side width of the side portion is 4 mm or more and 15 mm or less.
The pellicle according to claim 1 or 2, wherein a pair of long side portions of the side portions bulge outside the pellicle frame, and a bulge amount of the pair of long side portions is 3 mm or more and 20 mm or less. flame.
The pellicle according to any one of claims 1 to 3, wherein the long side length of the side portion is 400 mm or more and 2000 mm or less, and the short side length of the side portion is 200 mm or more and 1800 mm or less. flame.
The pellicle frame according to any one of claims 1 to 4, wherein the pellicle frame is formed of a material having a Young's modulus of 1 GPa to 80 GPa.
A pellicle frame according to any one of claims 1 to 5,
A pellicle membrane that is stretched and supported by the pellicle frame;
A pellicle having
A pellicle in which the pellicle film is attached to the pellicle frame in a state where at least the bulged side portion is elastically deformed toward the inside of the pellicle frame.
7. The pellicle according to claim 6, wherein the bulged side portion is formed in a substantially linear shape by a balance between a restoring force of the side portion and a film tension of the pellicle membrane.
The pellicle according to claim 6 or 7, wherein a film tension having a magnitude that satisfies all of the following conditions A, B, and C is applied to the pellicle film.
Condition A: a first reference point on the pellicle film in a state where the pellicle film is arranged substantially horizontally, and an inner edge of the long side part of the side part of the pellicle frame in plan view 1. When the weight of 10.6 g is placed on the first reference point 30 mm away from the center point of the long side in the direction orthogonal to the inner edge of the long side portion, the sinking amount of the first reference point is 0.4 mm or more. 4 mm or less.
Condition B: a second reference point on the pellicle film in a state where the pellicle film is arranged substantially horizontally, and an inner edge of the short side portion of the side portion of the pellicle frame in plan view The sinking amount of the second reference point when the weight of 10.6 g is placed on the second reference point that is 30 mm away from the central point in the direction orthogonal to the short side portion is 0.3 mm or more and 2.3 mm or less. It is.
Condition C: The absolute value of the difference between the sinking amount of the first reference point and the sinking amount of the second reference point is 0.4 mm or less.
(A) attaching a pellicle film made of a polymer material formed on a substrate to a frame having an opening so as to cover the opening;
(B) peeling off the pellicle film attached to the frame from the substrate;
(C) A pellicle frame formed in a substantially rectangular frame shape by four sides, wherein at least a pair of the sides protrudes outside the pellicle frame, and the long side width / length of the sides A pellicle frame having a side length ratio of 0.3% to 2.2% and a short side width / short side length ratio of the side part of 0.3% to 3.8% is prepared. And a process of
(D) applying an external force to the at least one pair of the side portions of the pellicle frame to elastically deform the at least one pair of the side portions so that the at least one pair of the side portions are substantially linear; ,
(E) After the step (d), the frame so that the pellicle frame is elastically deformed so that the at least one pair of the side portions are substantially linear so as to cover the opening of the pellicle frame. Attaching the pellicle film attached to the body;
(F) After the step (e), by removing the external force applied to the at least one pair of side portions, the pellicle film is stretched and supported by the pellicle frame;
(G) after the step (e), removing the excess portion of the pellicle film and the frame;
A method for manufacturing a pellicle.