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WO2010150365A1 - 半導体装置および半導体装置の製造方法 - Google Patents

半導体装置および半導体装置の製造方法 Download PDF

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Publication number
WO2010150365A1
WO2010150365A1 PCT/JP2009/061491 JP2009061491W WO2010150365A1 WO 2010150365 A1 WO2010150365 A1 WO 2010150365A1 JP 2009061491 W JP2009061491 W JP 2009061491W WO 2010150365 A1 WO2010150365 A1 WO 2010150365A1
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WO
WIPO (PCT)
Prior art keywords
thin film
semiconductor device
metal thin
semiconductor element
terminal
Prior art date
Application number
PCT/JP2009/061491
Other languages
English (en)
French (fr)
Inventor
隆 山地
加藤　貴章
Original Assignee
アオイ電子株式会社
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Filing date
Publication date
Application filed by アオイ電子株式会社 filed Critical アオイ電子株式会社
Priority to KR1020117029284A priority Critical patent/KR20140058698A/ko
Priority to PCT/JP2009/061491 priority patent/WO2010150365A1/ja
Priority to US13/375,719 priority patent/US8866296B2/en
Priority to JP2011519425A priority patent/JP5497030B2/ja
Priority to CN200980160041.4A priority patent/CN102804363B/zh
Publication of WO2010150365A1 publication Critical patent/WO2010150365A1/ja

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Definitions

  • the present invention relates to a semiconductor device and a method for manufacturing the semiconductor device.
  • a semiconductor device in which a semiconductor element is packaged without using a lead frame is known.
  • the number of recesses corresponding to the number of electrode pads is formed in advance in the lead frame, a plating layer is formed in the recess, and the electrode pad and the plating layer are wire-bonded and molded. After sealing with resin, the lead frame is removed.
  • the semiconductor device of the present invention includes a semiconductor element having a plurality of electrode pads on the upper surface, a plurality of thin film terminals provided separately on the lower surface of the semiconductor element by a separation unit, a semiconductor element and each thin film terminal, An insulating layer provided between the semiconductor element, a connection member for connecting the electrode pad of each semiconductor element and each thin film terminal, and the semiconductor element, a plurality of thin film terminals exposed from the semiconductor element, on the separation portion and covering the connection member And a provided resin layer.
  • the method for manufacturing a semiconductor device also includes a step of preparing a semiconductor element having electrode pads, a metal thin film having a larger area than the semiconductor element, and the semiconductor element is electrically connected to the metal thin film on the metal thin film.
  • the method for manufacturing a semiconductor device includes a step of preparing a semiconductor element having an electrode pad, a metal thin film having a larger area than the semiconductor element, and the semiconductor element on the metal thin film. Electrically insulating and fixing with each other, electrically connecting the electrode pad and the metal thin film with a connection member, and forming an insulating layer covering the semiconductor element and the connection member on the metal thin film And the step of forming the metal thin film on a thin film terminal having a predetermined shape are performed in the order of this step.
  • the present invention when forming a thin film terminal connected to the electrode pad of the semiconductor element, it is not necessary to use a lead frame, and therefore it is not necessary to process the lead frame, so that development efficiency and productivity can be improved. Can be improved.
  • FIG. 1 is an enlarged perspective view showing a first embodiment of a semiconductor device of the present invention.
  • FIG. 3 is a perspective view for explaining a method for manufacturing the semiconductor device of FIG. 1.
  • the perspective view for demonstrating the process following FIG. The perspective view for demonstrating the process following FIG.
  • the perspective view for demonstrating the process following FIG. The perspective view for demonstrating the process following FIG.
  • the perspective view for demonstrating the process following FIG. FIG. 8 is a perspective view for explaining a process following FIG. 7, in which the front and back surfaces are reversed with respect to FIGS. 2 to 7 and viewed from the back surface side.
  • FIG. 3 is an enlarged cross-sectional view for explaining a method of manufacturing the semiconductor device of FIG. 1, and shows the inside of one semiconductor device formation region in the process shown in FIG. 2.
  • FIG. 3 is an enlarged cross-sectional view for explaining a method of manufacturing the semiconductor device of FIG. 1, and shows the inside of one semiconductor device formation region in the process shown in FIG. 2.
  • FIG. 3 is an
  • FIG. 10 is an enlarged cross-sectional view for explaining a process following FIG. 9 and corresponds to the process shown in FIG. 3. It is an expanded sectional view for demonstrating the process following FIG. 10, and respond
  • FIG. 12 is an enlarged cross-sectional view for explaining a process following FIG. 11 and corresponds to the process shown in FIG. 5.
  • FIG. 13 is an enlarged cross-sectional view for explaining a process following FIG. 12 and corresponds to the process shown in FIG. 6.
  • FIG. 14 is an enlarged cross-sectional view for explaining a step following FIG. 13 and corresponds to the step shown in FIG. 7.
  • FIG. 18 is an enlarged cross-sectional view for explaining a process following FIG. 17.
  • FIG. 19 is an enlarged cross-sectional view for explaining a process following FIG. 18.
  • FIG. 20 is an enlarged cross-sectional view for explaining a step following FIG. 19.
  • FIG. 21 is an enlarged cross-sectional view for explaining a process following FIG. 20.
  • the expanded sectional view which shows the 1st modification of the semiconductor device of this invention.
  • FIG. 25 is an enlarged perspective view showing another example different from FIG. 24 regarding the method for manufacturing a semiconductor device of the present invention.
  • FIGS. 26A and 26B are diagrams for explaining a third embodiment of the semiconductor device of the present invention, FIG. 26A is a top view, and FIG. 26B is a sectional view taken along line XXVI B -XXVI B of FIG.
  • FIG. 26C is a cross-sectional view, and FIG. 26C is a bottom view.
  • FIG. 1 is an enlarged perspective view of a semiconductor device of the present invention.
  • the semiconductor device 10 has a plurality of thin film terminals 30 ⁇ / b> A separated by the separation unit 16 on the lower surface of the semiconductor element 11.
  • the semiconductor element 11 is obtained by dicing a semiconductor wafer on which an integrated circuit is formed.
  • the semiconductor element 11 has a plurality of electrode pads 12 whose surfaces are exposed.
  • a protective film such as a polyimide film or the like is formed around the electrode pad 12 although not shown.
  • the electrode pad 12 has a bump shape, but it does not necessarily have to protrude from the upper surface.
  • the thin film terminal 30A has a portion protruding from the periphery of the semiconductor element 11, and one end of a wire (connection member) 13 is bonded to the protruding portion. The other end of the wire 13 is bonded to the electrode pad 12. Accordingly, each thin film terminal 30 ⁇ / b> A is electrically connected to the corresponding electrode pad 12 by the wire 13.
  • the semiconductor element 11, the thin film terminal 30 ⁇ / b> A protruding from the outer shape of the semiconductor element 11, the separation portion 16, and the wire 13 are covered with a thermosetting resin layer 15 such as an epoxy resin.
  • the semiconductor device 10 of FIG. 1 is illustrated as an example having four electrode pads 12 and thin film terminals 30A of the semiconductor element 11, but this is for the convenience of illustration. Many electrode pads 12 are formed on the upper surface of the semiconductor element 11, and a number of thin film terminals 30 ⁇ / b> A corresponding to the electrode pads 20 are formed on the lower surface side of the semiconductor element 11.
  • the thin film terminal 30A is formed of a metal foil such as aluminum, and although not limited thereto, the thickness of the thin film terminal 30A is very thin, about 30 to 100 ⁇ m.
  • Each thin film terminal 30 ⁇ / b> A has a deformed portion 20.
  • FIG. 15 is an enlarged cross-sectional view of the deformable portion 20.
  • the deformable portion 20 protrudes from the surface side facing the resin layer 15 toward the outer surface side (in other words, from the upper surface side to the lower surface side in FIG. 15), and the outer shape is generally hemispherical, and the central portion thereof Has a shape having a depression.
  • the inner side of the hemispherical protruding portion 22 of the deformable portion 20 is a groove 23 having a deepest portion 23a, and a slope portion 23b that rises linearly from the deepest portion 23a of the groove 23 inward.
  • the central portion of the deformable portion 20 has a flat connecting portion 21 whose upper surface 21a is flush with the surrounding 20a of the deformable portion 20, and the inclined portion 23b of the groove 23 supports the connecting portion 21. ing.
  • a two-dot chain line indicates a bonding state of the wire 13.
  • the connection portion 21 and the slope portion 23b of the groove 23 form a conical depression 24 when viewed from the outside. As will be described later, the conductivity for connecting to an external terminal is provided in the depression 24.
  • the connecting material is filled.
  • the resin layer 15 is also filled in the groove 23 of the deformable portion 20, and as will be described later, each thin film terminal 30 ⁇ / b> A is securely held as the resin layer 15 is cured.
  • the external size of the semiconductor device 10 can be 2 to 5 mm (length) ⁇ 2 to 5 mm (width) ⁇ 0.3 to 0.8 mm (thickness). 10 can be produced efficiently with high production efficiency and reliability.
  • an example of the manufacturing method of the semiconductor device of the first embodiment will be described.
  • FIGS. 2 to 8 are enlarged perspective views for explaining an example of the semiconductor device manufacturing method of the present invention
  • FIGS. 9 to 14 are enlarged sectional views corresponding to FIGS. 2 to 7, respectively.
  • FIGS. 2 to 8 illustrate a method of simultaneously forming a large number of semiconductor devices
  • FIGS. 9 to 14 illustrate the manufacturing process of one semiconductor device for convenience of explanation. Sectional drawing for showing is shown.
  • a metal thin film 30 having a size capable of forming a large number of semiconductor devices 10 is prepared and bonded to a base 41 made of stainless steel (SUS) having the same size. It adheres with the insulating layer 42 which has property. As shown in FIG. 9, the base 41, the insulating layer 42, and the metal thin film 30 are stacked in close contact with each other in this order.
  • SUS stainless steel
  • each deformable portion 20 has the cross-sectional shape illustrated in FIG. 15, and has a shape having the connecting portion 21 at the center of the protruding portion 22.
  • the deformed portion 20 is formed so that the entirety thereof is accommodated in the insulating layer 42. That is, the height H of the deformed portion 20 is smaller than the thickness T of the insulating layer 42.
  • the height H of the deformed portion 20 can be 30 to 70 ⁇ m
  • the diameter D can be 200 to 300 ⁇ m
  • the thickness T of the insulating layer 42 can be 50 to 200 ⁇ m.
  • the semiconductor element 11 having the electrode pad 12 on the upper surface is fixed in each semiconductor device formation region of the metal thin film 30.
  • the semiconductor element 11 and the metal thin film 30 are fixed by interposing an insulating material 43 such as a die attach material between both members (see FIG. 11).
  • the insulating material 43 may be bonded to the lower surface of each semiconductor element 11 in advance, or may be bonded to the upper surface of the metal thin film 30.
  • each electrode pad 12 of the semiconductor element 11 is wire-bonded to the metal thin film 30 (see FIGS. 5 and 12).
  • the wire is heated by a capillary (not shown), one end of the wire is formed into a spherical shape, bonded to the connecting portion 21 of the deformed portion 20 of the metal thin film 30, and the other end is bonded to the electrode pad 12.
  • the electrode pad 12 and the metal thin film 30 are electrically connected by the wire 13.
  • the connecting portion 21 of the deformable portion 20 to which one end of the wire 13 is connected is formed at an arbitrary position of the metal thin film 30, bonding is performed at a predetermined position of the lead frame using the lead frame.
  • the metal thin film 30 is not yet formed into a separated terminal shape, so that each deformable portion 20 can be set to an optimum position for bonding the wire 13. it can.
  • the wire 13 can be bonded at an optimal position on the metal thin film 30 with an optimal size.
  • the resin is poured into the mold, and as shown in FIG. 6 and FIG. Cover with resin layer 15. That is, the resin layer 15 is formed on the upper surface and all side surfaces of the semiconductor element 11, the upper surface of the metal thin film 30 exposed from the semiconductor element 11, and the entire periphery of the wire 13.
  • the resin layer 5 is also filled in the groove 23 of the deformable portion 20. Then, the resin layer 15 is cooled. In the state illustrated in FIGS. 6 and 13, the metal thin film 30 is held only by the adhesive force of the insulating material 43 and the resin layer 15 to the metal thin film 30. However, in the present invention, since the resin layer 15 is also filled in the groove 23 of the deformable portion 20, the adhesive force between the metal thin film 30 and the resin layer 15 is reinforced by the resin layer 15 contracting by cooling. .
  • the base 41 and the insulating layer 42 are removed, and the lower surface of the metal thin film 30 is exposed (see FIG. 7). Then, as shown in FIG. 8, the metal thin film 30 located on the lower surface of each semiconductor element 11 is separated by the separation unit 16 in both the row direction and the column direction using a dicing blade 51. Disconnect.
  • the metal thin film 30 and the resin layer 15 are cut in the row direction and the column direction using the dicing blade 52 at the boundary between the semiconductor device formation regions, the metal thin films 30 are individually separated to form the thin film terminals 30A. As a result, as shown in FIGS. 14 and 1, the semiconductor device 10 of the present invention is obtained.
  • the metal thin film 30 and the resin layer 15 are cut using the dicing blade 52, if the adhesive force between the metal thin film 30 and the resin layer 15 is small, the metal thin film 30 peels off, making it difficult to form the thin film terminal 30A. May be.
  • the deformable portion 20 is provided in the metal thin film 30, and the resin layer 15 filled in the deformable portion 20 is formed on the projecting portion 22 of the deformable portion 20 when the resin layer 15 contracts. Since the pressure bonding is performed, the adhesion between the metal thin film 30 and the resin layer 15 is increased, and the thin film terminal 30 can be prevented from being peeled off.
  • the method of cutting the metal thin film 30 to form the separation portion 16 and the method of cutting the metal thin film 30 and the resin layer 15 at the boundary between the semiconductor device formation regions are not limited to the method by dicing using a dicing blade, but etching
  • a dry etching method such as a wet etching method using a liquid or a plasma etching method using a chemical reaction gas and / or an inert gas can be used.
  • the semiconductor device and the manufacturing method of the semiconductor device of the present invention it is not necessary to use a lead frame when forming a thin film terminal to be connected to the electrode pad of the semiconductor element. Therefore, development efficiency and productivity are improved. In particular, since a pattern mask for forming the lead frame is not required, the cost can be greatly reduced. Further, since the wire is bonded to an arbitrary position on the metal thin film 30 having an outer size larger than the outer size of the semiconductor element 11, it is possible to increase the bonding density by appropriately adjusting the position and size of the wire and the thin film terminal. In addition, since the thin film terminal can be made extremely thin, it is possible to reduce the cost and further reduce the thickness. Further, since the deformed portion 20 having the groove 23 is provided in the thin film terminal 30A, the fixing force between the thin film terminal 30A and the resin layer 15 can be improved.
  • FIG. 16 shows an enlarged cross-sectional view of a state in which the semiconductor device 10 of the present invention is mounted on the circuit board 60.
  • a connection terminal 61 is formed on the upper surface of the circuit board 60.
  • the thin film terminal 30A of the semiconductor device 10 is aligned with the connection terminal 61, and both members are joined by a joining material 62 such as solder.
  • the thin film terminal 30A has a depressed portion 24 formed at the center of the deformable portion 20, and the bonding material 62 fills the depressed portion 24 and enhances the bonding strength.
  • the bonding material 62 may be provided on the connection terminal 61 or may be provided on the surface of the protruding portion 22 of the deformable portion 20 and the recessed portion 24.
  • the bonding material 62 is not limited to solder, and it is also possible to apply a conductive connection material such as silver paste, an anisotropic conductive connection material that is insulative in the surface direction and exhibits conductivity only in the thickness direction. is there.
  • each thin film terminal 30 ⁇ / b> A of the semiconductor device 10 is formed with the deformed portion 20 only at a position where the wire 13 is connected.
  • FIG. 21 is an enlarged cross-sectional view of such a semiconductor device 70.
  • a large number of deformed portions 20 are formed in each thin film terminal 35 ⁇ / b> A of the semiconductor device 70.
  • transformation part 20 has the structure shown in 1st Embodiment, and the protrusion part 22 and the connection part 21 are alternately arranged along the longitudinal direction.
  • One end of a wire 13 having the other end connected to the electrode pad 12 is connected to one of the plurality of deformable portions 20.
  • a large number of the deforming portions 20 are arranged in a plurality of rows in the direction perpendicular to the drawing.
  • the metal thin film 35 is bonded to the base 41 by the insulating layer 42, and a large number of deformed portions 20 are formed in the metal thin film 35 by hot pressing.
  • a large number of deformed portions 20 are formed along the longitudinal direction of the metal thin film 35. That is, as shown in FIG. 17, along the longitudinal direction of the metal thin film 35, the connecting portions 21 and the protruding portions 22 having a flat upper surface are alternately and repeatedly formed.
  • a groove 23 is formed on the inner surface of the protruding portion 22 of each deformable portion 20, and a truncated cone-shaped recessed portion 24 is formed on the outer surface of the connecting portion 21.
  • the deforming portions 20 are arranged in multiple rows in the depth direction of the metal thin film 35 (direction perpendicular to the drawing). In this case, it is preferable that the deforming portions 20 are formed at equal intervals for each row because the number of deforming portions formed on each thin film terminal, which will be described later, is the same and the fixing force with the resin layer becomes uniform. . However, it is not always necessary to arrange them at regular intervals, and they may be provided at non-uniform intervals.
  • the semiconductor element 11 having the electrode pad 12 is fixed in each semiconductor device formation region of the metal thin film 35.
  • the semiconductor element 11 is fixed to the metal thin film 35 by the insulating material 43 as in the first embodiment.
  • the insulating material 43 is formed to cover at least one deformed portion 20 of the deformed portion 20 of the metal thin film 35. That is, as shown in FIG. 18, the grooves 23 of some of the deformable portions 20 are filled. For this reason, the adhering force between the insulating material 43 and the metal thin film 35 is strengthened as compared with the case of the first embodiment.
  • each electrode pad 12 is connected to one of the plurality of deformed portions 20 of the metal thin film 35 by a wire 13.
  • a large number of the deformable portions 20 are formed, but they may be connected to the connection portion 21 of the deformable portion 20 at the optimum position among them.
  • the entire metal thin film 35 is covered with the resin layer 15.
  • the resin layer 15 is formed to cover the upper surface and all side surfaces of the semiconductor element 11, the metal thin film 35 exposed from the semiconductor element 11, and the wire 13. Accordingly, the grooves 23 of all the deformed portions 20 exposed from the semiconductor element 11 are filled.
  • the resin layer 15 is filled in the groove 23 of the deformable portion 20 to reinforce the fixing force between the metal thin film 35 and the resin layer 15, but in the second embodiment, Since a larger number of deformed portions 20 are formed than in the first embodiment, the adhesion force between the metal thin film 35 and the resin layer 15 is further greater than that in the first embodiment.
  • the base 41 and the insulating layer 42 are removed, and the lower surface of the metal thin film 35 is exposed.
  • the metal thin film 35 located on the lower surface of the central portion of each semiconductor element 11 is removed by an appropriate method such as dicing.
  • the resin layer 15 and the metal thin film 35 are cut at the boundary portions of the respective semiconductor device formation regions, thereby obtaining the semiconductor device 70 having the individually separated thin film terminals 35A.
  • the same effect as that of the semiconductor device 10 of the first embodiment can be obtained.
  • the semiconductor device 70 of the second embodiment since a large number of deformed portions 20 are formed in addition to the portion connecting the wires 13, the adhesion between the metal thin film 35 and the resin layer 15 is further increased. Can be increased.
  • FIG. 22 shows a semiconductor device 10 ⁇ / b> A that is a modification of the semiconductor device 10.
  • the semiconductor device 10 ⁇ / b> A differs from the semiconductor device 10 in that the semiconductor device 10 ⁇ / b> A has a configuration in which the separating portion 16 penetrates not only the thin film terminal 30 ⁇ / b> A but also the insulating material 43 and reaches the lower surface portion of the semiconductor element 11. It is.
  • the metal thin film 30 is cut by the dicing blade 51 to form the thin film terminal 30 ⁇ / b> A.
  • the tip of the dicing blade 51 is placed on the lower surface of the semiconductor element 11. What is necessary is just to set it to the position which reaches the depth which cuts a part, and to cut.
  • FIG. 22 is illustrated as a modification of the semiconductor device 10, the separation portion 16 can be formed to a depth reaching the lower portion of the semiconductor element 11 in the same manner as the semiconductor device 70 illustrated in FIG. 21.
  • FIG. 23 shows a modified example 70 ⁇ / b> A of the semiconductor device 70.
  • the semiconductor device 70A is different from the semiconductor device 70 in that the separation part 16 is formed so as to open not only the thin film terminal 70A but also at least the lower part of the insulating material 43.
  • the metal thin film 70 is cut by a dicing blade to form the thin film terminal 70A.
  • the tip of the dicing blade 51 reaches the insulating material 43. May be set at a position that does not reach the semiconductor element 11 and cut.
  • FIG. 23 is illustrated as a modification of the semiconductor device 70, similarly to the semiconductor device 10, the separation portion 16 may have a depth that reaches the insulating material 43 but does not reach the semiconductor element 11. it can.
  • FIG. 24 is an enlarged perspective view showing a modification of the method for manufacturing a semiconductor device of the present invention.
  • the metal thin film 30 or 35 is connected to the electrode pad 12 of the semiconductor element 11 by the wire 13 to form the thin film terminal 30A or 35A. It was a method of forming.
  • the separation part 16 is formed together with the deformation part 20 on the metal thin film 36 before the semiconductor element 11 is mounted.
  • separation part 16 is extended in the row direction and column direction which pass the center part of the semiconductor element 11, and makes the length reach the position exceeding the external shape size of the thin film terminal formed.
  • the semiconductor element 11 is fixed to the metal thin film 36, the connection portion 21 of the deformable portion 20 and the electrode pad 12 are connected with a wire, and the whole is covered with a resin layer, and then the metal thin film 36 is positioned at a position indicated by a two-dot chain line. And the resin layer is cut. Thereby, the metal thin films 36 are individually separated to form thin film terminals 36A. In this method, since the external force such as impact applied to the metal thin film 36 is small in the step of forming the thin film terminal 36A, the formation of the thin film terminal 36A is easy and reliable.
  • FIG. 25 is an enlarged perspective view showing still another modification of the method for manufacturing a semiconductor device of the present invention.
  • the deformed portion 20 is mounted on the metal thin film 37 at a position corresponding to the central portion of the semiconductor element 11 to be mounted, rather than the outer size of the semiconductor element 11.
  • An opening 17 having a small outer size is formed.
  • the semiconductor element 11 is fixed to the metal thin film 37, the connecting portion 21 of the deformable portion 20 and the electrode pad 12 are connected with a wire, and the whole is covered with a resin layer.
  • the metal thin film 37 is removed along the row direction and the column direction passing through, and the separation part 16 is formed. Thereby, the metal thin film 37 is isolate
  • the individual semiconductor device can be obtained by cutting the metal thin film 37 and the resin layer into outer sizes.
  • FIG. 26 shows a third embodiment of the semiconductor device of the present invention.
  • the semiconductor device 80 of this embodiment shows an example in which thin film terminals are arranged along all side portions of the semiconductor element 11, FIG. 26 (A) is a top view, and FIG. 26 (B) is FIG.
  • FIG. 26A is a cross-sectional view taken along line XXVI B -XXVI B of FIG. 26A, and
  • FIG. 26C is a bottom view.
  • the semiconductor element 11 in this embodiment has electrode pads 12 arranged along all the side portions of the four sides.
  • the thin film terminals 38A are also arranged on the same side as the side where the electrode pads 12 to be connected are arranged.
  • Each thin film terminal 38 ⁇ / b> A is connected to the electrode pad 12 by the wire 13 while being fixed to the lower surface of the semiconductor element 11 by the insulating material 43.
  • the whole including the semiconductor element 11 and the thin film terminal 38 ⁇ / b> A is covered with the resin layer 15.
  • three electrode pads 12 and three thin film terminals 38A are arranged on each side portion, but the number of electrode pads 12 and thin film terminals 38A arranged on each side portion is the same as that of alignment and thin film terminal formation. There is no limit to the applicability of the present invention in this regard.
  • the deformed portion 20 having the groove portion 23 is provided on the surface facing the resin layer 15, and the resin layer 15 is contracted by the shrinkage of the resin layer 15 filled in the groove 23.
  • the structure increases the adhesion force with the metal thin film 30.
  • the method for increasing the adhesion between the resin layer 15 and the metal thin film 30 is not limited to the above structure.
  • fine irregularities having a surface roughness of, for example, about 6 to 10 ⁇ m may be formed on the side of the metal thin film 30 that contacts the resin layer 15. Further, in this way, fine irregularities are formed in the metal thin film 30, and as shown in the first to third embodiments, the deformed portion 20 having the groove portion 23 is provided on the surface facing the resin layer 15. It is good also as a structure.
  • the height of the upper surface 21a of the connecting portion 21 of the deformable portion 20 is the same surface as the upper surface 20a of the thin film terminal 30A.
  • the present invention is not limited to this, and the upper surface 21a of the connecting portion 21 may be lower than the thin film terminal 30A. There is no problem. In this case, the upper surface 21 a of the connecting portion 21 can be flush with the deepest portion 23 a of the deformable portion 20.
  • the method of forming the resin layer 15 has been described by a method in which the semiconductor element 11 is bonded to the metal thin film 30 and then stored in the mold together with the base 41 to form the resin layer 15 by molding.
  • the resin layer 15 may be molded after the semiconductor element 11 is bonded to the metal thin film 30 and the base 41 is removed.
  • the upper surface of the peripheral portion of the metal thin film 30 is pressed against the bottom surface of the upper mold, the mold is clamped with the lower surface of the peripheral portion pressed by the lower mold, and resin is introduced into the mold to form the resin layer 15. can do.
  • the semiconductor device of the present invention can be variously modified and configured within the scope of the invention.
  • a semiconductor element having a plurality of electrode pads on the upper surface and a lower surface of the semiconductor element.
  • a plurality of thin film terminals provided separately in the separation unit, an insulating layer provided between the semiconductor element and each thin film terminal, and an electrode pad of each semiconductor element and each thin film terminal are connected to each other What is necessary is just to comprise a connection member, the semiconductor element, the some thin film terminal exposed from the semiconductor element, the resin layer provided on the isolation
  • the method for manufacturing a semiconductor device also includes a step of preparing a semiconductor element having electrode pads, a metal thin film having a larger area than the semiconductor element, and the semiconductor element is electrically connected to the metal thin film on the metal thin film.
  • the step of forming the thin film terminal is also includes a step of preparing a semiconductor element having electrode pads, a metal thin film having a larger area than the semiconductor element, and the semiconductor element is electrically connected to the metal thin film on the metal thin film.

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Abstract

　本発明は、複数の半導体素子１１を金属薄膜３０上に、前記金属薄膜と電気的に絶縁して固定する工程と、半導体素子の電極パッド１２と前記金属薄膜とを接続部材１３により電気的に接続する工程と、前記金属薄膜の前記半導体素子および前記接続部材を樹脂層１５によって封止する工程と、前記金属薄膜を分割することにより薄膜端子３０A を形成する工程から半導体装置を製造することにより、生産性を向上したものである。

Description

半導体装置および半導体装置の製造方法
　この発明は、半導体装置および半導体装置の製造方法に関する。
　半導体素子を、リードフレームを用いることなくパッケージ化した半導体装置が知られている。このような半導体装置は、予め、リードフレームに電極パッドの数に対応した数の凹部を形成しておき、凹部内にめっき層を形成して、電極パッドとめっき層とをワイヤボンディングし、成形により樹脂封止をした後、リードフレームを除去する。（例えば、特許文献１参照）
日本特許第３１８１２２９号公報
　上記の方法では、工程数が多いので、生産性が低下する。また、半導体素子の電極パッドの数や位置は半導体素子の機能・用途・サイズによって異なるため、リードフレームの数および配置、さらには、リードフレームに形成するめっき層形成用の溝の位置を半導体素子ごとに設計し、形成する必要があり、開発効率が極めて悪い。
　本発明の半導体装置は、上面に複数の電極パッドを有する半導体素子と、半導体素子の下面に、それぞれ、分離部にて分離して設けられた複数の薄膜端子と、半導体素子および各薄膜端子との間に設けられた絶縁層と、各半導体素子の電極パッドと各薄膜端子とを接続する接続部材と、半導体素子、半導体素子から露出した複数の薄膜端子、分離部上および接続部材を覆って設けられた樹脂層と、を具備することを特徴とする。
　また、本発明の半導体装置の製造方法は、電極パッドを有する半導体素子を準備する工程と、半導体素子より大きい面積の金属薄膜を準備し、半導体素子を金属薄膜上に、金属薄膜と電気的に絶縁して固定する工程と、電極パッドと金属薄膜とを接続部材により電気的に接続する工程と、金属薄膜上に半導体素子および接続部材を覆う絶縁層を形成する工程と、金属薄膜を所定形状の薄膜端子に形成する工程と、を具備することを特徴とする。
　さらに、本発明の半導体装置の製造方法は、電極パッドを有する半導体素子を準備する工程と、前記半導体素子より大きい面積の金属薄膜を準備し、前記半導体素子を前記金属薄膜上に、前記金属薄膜と電気的に絶縁して固定する工程と、前記電極パッドと前記金属薄膜とを接続部材により電気的に接続する工程と、前記金属薄膜上に前記半導体素子および前記接続部材を覆う絶縁層を形成する工程と、前記金属薄膜を所定形状の薄膜端子に形成する工程と、をこの工程の順に行うことを特徴とする。
　この発明によれば、半導体素子の電極パッドに接続される薄膜端子を形成するに際し、リードフレームを用いる必要がなく、それゆえに、リードフレームに加工を施す必要がないので、開発効率および生産性を向上することができる。
この発明の半導体装置の第1の実施形態を示す拡大斜視図。 図１の半導体装置の製造方法を説明するための斜視図。 図２に続く工程を説明するための斜視図。 図３に続く工程を説明するための斜視図。 図４に続く工程を説明するための斜視図。 図５に続く工程を説明するための斜視図。 図６に続く工程を説明するための斜視図。 図７に続く工程を説明するための斜視図であり、図２～図７に対し表裏面を反転して裏面側からみたものである。 図１の半導体装置の製造方法を説明するための拡大断面図であり、図２に示す工程において、１個の半導体装置形成領域内を図示した図面である。 図９に続く工程を説明するための拡大断面図であり、図３に示す工程に対応する。 図１０に続く工程を説明するための拡大断面図であり、図４に示す工程に対応する。 図１１に続く工程を説明するための拡大断面図であり、図５に示す工程に対応する。 図１２に続く工程を説明するための拡大断面図であり、図６に示す工程に対応する。 図１３に続く工程を説明するための拡大断面図であり、図７に示す工程に対応する。 金属薄膜の変形部を詳細に説明するための拡大断面図。 本発明の半導体装置を回路基板に実装した状態を示す拡大断面図。 本発明の半導体装置およびその製造方法の第２の実施形態を説明するための拡大断面図。 図１７に続く工程を説明するための拡大断面図。 図１８に続く工程を説明するための拡大断面図。 図１９に続く工程を説明するための拡大断面図。 図２０に続く工程を説明するための拡大断面図。 本発明の半導体装置の第１の変形例を示す拡大断面図。 本発明の半導体装置の第２の変形例を示す拡大断面図。 本発明の半導体装置の製造方法の別の例を示す拡大斜視図。 本発明の半導体装置の製造方法に関し、図２４とは異なる別の例を示す拡大斜視図。 本発明の半導体装置の第３の実施形態を説明するための図であり、図２６(Ａ)は上面図であり、図２６（Ｂ）は図２６（Ａ）のＸＸＶＩB－ＸＸＶＩB線切断断面図であり、図２６（Ｃ）は、下面図である。
（実施形態１）
　以下、この発明の半導体装置の第１の実施形態について説明する。
　図１は、本発明の半導体装置の拡大斜視図である。半導体装置１０は、半導体素子１１の下面に、分離部１６で分離された複数の薄膜端子３０Ａを有する。半導体素子１１は、集積回路が形成された半導体ウエハをダイシングすることにより得られる。半導体素子１１は、表面が露出された複数の電極パッド１２を有する。電極パッド１２の周囲には、図示はしないが、酸化シリコン、あるいは、さらにその上にポリイミド膜等の保護膜が形成されている。図１において、電極パッド１２はバンプ状とされているが、必ずしも、上面から突き出しておく必要はない。
　薄膜端子３０Ａは半導体素子１１の周囲から突き出す部分を有しており、この突き出した部分において、ワイヤ(接続部材)１３の一端がボンディングされている。電極パッド１２にはワイヤ１３の他端がボンディングされている。したがって、各薄膜端子３０Ａは対応する電極パッド１２に、ワイヤ１３により電気的に接続されている。
　そして、半導体素子１１、半導体素子１１の外形から突き出した薄膜端子３０Ａおよび分離部１６およびワイヤ１３は、エポキシ樹脂等の熱硬化型の樹脂層１５により覆われている。
　なお、図１の半導体装置１０は、半導体素子１１の電極パッド１２および薄膜端子３０Ａを、それぞれ、４個有する例として図示されているが、これは、図示の都合であって、実際には、半導体素子１１の上面に多数の電極パッド１２が形成され、半導体素子１１の下面側には、電極パッド２０に対応する数の薄膜端子３０Ａが形成されている。
　薄膜端子３０Ａはアルミニウム等の金属箔により形成されており、限定する意味ではないが、その厚さは３０～１００μｍ程度と大変薄く形成されている。
　各薄膜端子３０Ａは、変形部２０を有する。図１５は変形部２０の拡大断面図である。
　変形部２０は、樹脂層１５に対向する面側から外面側（換言すれば、図１５の上面側から下面側）に向かって突き出されており、大略、外形が半球形状とされ、その中央部に陥没部を有する形状を有する。
　より詳細には、変形部２０の半球状の突出部２２の内側は、最深部２３ａを有する溝２３とされており、溝２３の最深部２３ａから内側に向かって直線状に立ち上がる斜面部２３ｂを有する。
　変形部２０の中央部分は、上面２１ａが、変形部２０の周囲の２０ａと同一面とされた平坦な接続部２１を有しており、この接続部２１を溝２３の斜面部２３ｂが支持している。接続部２１の上面２１ａにおいて、前述のワイヤ１３の一端がボンディングされる。２点鎖線は、ワイヤ１３のボンディング状態を示す。
　接続部２１および溝２３の斜面部２３ｂは、外側からみると、円錐体形状の陥没部２４を形成しており、後述するが、この陥没部２４内に、外部端子に接続するための導電性の接続材料が充填される。
　図１に戻って、樹脂層１５は、変形部２０の溝２３内にも充填されており、後述する如く、樹脂層１５の硬化に伴い各薄膜端子３０Ａを確実に保持する構成となっている。
　半導体装置１０の外形サイズは、２～５ｍｍ（長さ)×２～５ｍｍ(幅)×０．３～０．８ｍｍ（厚さ）とすることが可能であり、このように小さいサイズの半導体装置１０を、生産効率および信頼性が高く、且つ、効率的に生産することが可能である。
　以下、第１実施形態の半導体装置の製造方法の一例を説明する。
　図２～図８は、本発明の半導体装置の製造方法の一例を説明するための拡大斜視図であり、図９～図１４は、それぞれ、図２～図７対応する拡大断面図である。但し、図２～図８が多数の半導体装置を同時に形成する方法を図示しているに対し、図９～図１４は、説明の都合上、１個の半導体装置について、その製造過程を説明するための断面図を図示している。
　先ず、図２に図示されているように、多数の半導体装置１０を形成することができるサイズの金属薄膜３０を準備し、同様なサイズを有するステンレス（ＳＵＳ）等からなる基台４１に、接着性を有する絶縁層４２により接着する。
　図９に図示される通り、基台４１、絶縁層４２、金属薄膜３０が、この順に密着して積層される。
　次に、プレスにより、金属薄膜３０に多数の変形部２０を形成する(図３、図１０参照)。各変形部２０は、前述した如く、図１５に図示される断面形状を有しており、突出部２２の中央に接続部２１を有する形状を有する。変形部２０は、その全体が絶縁層４２内に収まるように形成される。すなわち、変形部２０の高さＨは、絶縁層４２の厚さＴよりも小さい。
　一例として、変形部２０の高さＨを３０～７０μｍ、直径Ｄを２００～３００μｍとし、絶縁層４２の厚さＴを５０～２００μｍとすることができる。但し、上記したＴ＞Ｈの条件付きである。
　次に、図４に図示されるように、金属薄膜３０の各半導体装置形成領域内に、上面に電極パッド１２を有する半導体素子１１を固着する。半導体素子１１と金属薄膜３０との固着はダイアタッチ材等の絶縁材４３を両部材の間に介在して行う(図１１参照)。絶縁材４３は、予め、各半導体素子１１の下面に接着しておいても良いし、金属薄膜３０の上面に接着しておいてもよい。
　次に、半導体素子１１の各電極パッド１２を金属薄膜３０にワイヤボンディングでする（図５および図１２参照）。
　キャピラリ(図示せず)によりワイヤを加熱して、ワイヤの一端を球状に成形して、金属薄膜３０の変形部２０の接続部２１にボンディングし、他端を電極パッド１２にボンディングする。これにより、ワイヤ１３により電極パッド１２と金属薄膜３０が電気的に接続される。
　前述した通り、ワイヤ１３の一端が接続される変形部２０の接続部２１は、金属薄膜３０の任意の位置に形成したものであるから、リードフレームを用いてそのリードフレームの所定の位置にボンディングする従来の方法の如く、予め、半導体素子の機能・用途・サイズに応じて、リードフレームのサイズ、形状、位置等を設計する必要は無い。つまり、この状態では、金属薄膜３０が、以下に説明する如く、まだ分離された端子形状とされていないため、各変形部２０はワイヤ１３をボンディングするうえで、最適な位置に設定することができる。このように、本発明では、ワイヤ１３を、金属薄膜３０における最適な位置に、最適なサイズでボンディングすることが可能となっている。
　次に、図５および図１２の状態のまま、図示しない金型内に装着し、金型内に樹脂を流入して、図６および図１３に図示するように、金属薄膜３０上の全体を樹脂層１５で覆う。つまり、半導体素子１１の上面および全側面、半導体素子１１から露出した金属薄膜３０の上面およびワイヤ１３の周囲全体に樹脂層１５を形成する。
　この状態では、変形部２０の溝２３内にも樹脂層５が充填されている。そして、樹脂層１５が冷却される。図６および図１３に図示された状態では、金属薄膜３０は、金属薄膜３０に対する絶縁材４３および樹脂層１５の接着力のみで保持される。しかし、本発明では、変形部２０の溝２３内にも樹脂層１５が充填されているため、冷却により樹脂層１５が収縮することにより、金属薄膜３０と樹脂層１５の固着力が補強される。
　次に、基台４１および絶縁層４２を除去して、金属薄膜３０の下面を露出する(図７参照)。
　そして、図８に図示されるように、各半導体素子１１の下面に位置する金属薄膜３０を、ダイシングブレード５１を用いて、行方向および列方向いずれの方向においても分離部１６で分離されるように切断する。
　次に、各半導体装置形成領域の境界部で金属薄膜３０および樹脂層１５を、ダイシングブレード５２を用いて行方向および列方向に切断すると、金属薄膜３０が個々に分離されて薄膜端子３０Ａが形成され、図１４および図１に図示されるように、本発明の半導体装置１０が得られる。
　ダイシングブレード５２を用いて金属薄膜３０と樹脂層１５を切断する際、金属薄膜３０と樹脂層１５の固着力が小さいと、金属薄膜３０が剥離してしまい、薄膜端子３０Ａを形成することが困難になることがある。これに対し、本発明では、金属薄膜３０に変形部２０が設けられており、樹脂層１５が収縮することにより、変形部２０内に充填された樹脂層１５が変形部２０の突出部２２に圧着されるので、金属薄膜３０と樹脂層１５の固着力が増大し、薄膜端子３０の剥離を防止することができる。
　金属薄膜３０を切断して分離部１６を形成する方法および各半導体装置形成領域の境界部で金属薄膜３０および樹脂層１５を切断する方法は、ダイシングブレードを用いたダイシングによる方法に限らず、エッチング液を用いたウエットエッチング法、化学反応ガスおよび／または不活性ガスを用いたプラズマエッチング等のドライエッチング法を用いることができる。
　上述した如く、本発明の半導体装置および半導体装置の製造方法によれば、半導体素子の電極パッドに接続される薄膜端子を形成するに際し、リードフレームを用いる必要がなく、それゆえに、リードフレームに加工を施す必要がないので、開発効率および生産性が向上する。特に、リードフレームを形成する際のパターンマスクが不要となるので、コストの大幅な低減が可能となる。また、半導体素子１１の外形サイズより大きい外形サイズの金属薄膜３０上の任意の位置にワイヤをボンディングするので、ワイヤおよび薄膜端子の位置、サイズを適切にしてボンディング密度を高めることが可能である。
　また、薄膜端子は、極めて薄い厚さにすることができるので、これによっても低コスト化および一層の薄型化を図ることができる。
　さらに、薄膜端子３０Ａに溝２３を有する変形部２０を設けているので、薄膜端子３０Ａと樹脂層１５との固着力の向上を図ることができる。
　図１６は、本発明の半導体装置１０を回路基板６０に実装した状態の拡大断面図を示す。
　回路基板６０には、上面に接続端子６１が形成されている。この接続端子６１に半導体装置１０の薄膜端子３０Ａを位置合わせして、半田等の接合材６２により両部材を接合する。
　薄膜端子３０Ａは変形部２０の中央部に陥没部２４が形成されており、接合材６２は、この陥没部２４内を充填し接合強度を強化する。接合材６２は、接続端子６１上に設けておいてもよいし、変形部２０の突出部２２の表面および陥没部２４内に設けておいてもよい。
　また、接合材６２は、半田に限らず、銀ペースト等の導電性接続材料、面方向には絶縁性で厚さ方向のみ導電性を示す異方導電性接続材等を適用することも可能である。
（実施形態２）
　第１の実施形態では、半導体装置１０の各薄膜端子３０Ａには、ワイヤ１３が接続される位置のみに変形部２０が形成されている。しかし、各薄膜端子３０Ａに変形部２０を多数個形成するようにしてもよい。
　図２１は、このような半導体装置７０の拡大断面図である。この半導体装置７０の各薄膜端子３５Ａには多数の変形部２０が形成されている。各変形部２０は第１の実施形態に示す構造を有しており、突出部２２と接続部２１とが、長手方向に沿って交互に配列されている。複数の変形部２０の１つに、他端が電極パッド１２に接続されたワイヤ１３の一端が接続されている。変形部２０は、図面に垂直な方向にも、多数個、複数列に配列されて形成されている。
　以下、図１７～図２１を参照して、図２１に図示された半導体装置の製造方法の一例を説明する。
　なお、第２の実施形態において、第１の実施形態と同一な部材は、同一の参照番号を付し、適宜、その説明を省略する。
　第１の実施形態と同様に金属薄膜３５を、絶縁層４２により基台４１上に接着し、熱プレスにより、金属薄膜３５に多数の変形部２０を形成する。この場合、第１の実施形態と異なり、金属薄膜３５の長手方向に沿って多数の変形部２０が形成されている。すなわち、図１７に図示されるように、金属薄膜３５の長手方向に沿って、平坦な上面を有する接続部２１と突出部２２とが、交互に、繰り返して形成されている。各変形部２０の突出部２２の内面には溝２３が形成され、接続部２１の外面には円錐台形状の陥没部２４が形成されている。この場合、図示はしないが、変形部２０は、金属薄膜３５の奥行き方向（図面に垂直な方向）に、多数列に亘って配列されている。この場合、変形部２０は、各列ごとに等間隔で形成すれば、後述する、各薄膜端子に形成される変形部の数が同一となり、樹脂層との固着力が均一となるため、好ましい。しかし、必ずしも、等間隔で配列する必要はなく、不均一な間隔で設けても良い。
　次に、金属薄膜３５の各半導体装置形成領域内に電極パッド１２を有する半導体素子１１を固着する。半導体素子１１は、第１の実施形態と同様に、絶縁材４３により金属薄膜３５に固着される。しかし、第１の実施形態と異なり、絶縁材４３は、金属薄膜３５の変形部２０の少なくとも一つの変形部２０を覆って形成される。すなわち、図１８に図示されるように、一部の変形部２０の溝２３内に充填される。このため、絶縁材４３と金属薄膜３５との固着力は第１の実施形態の場合よりも強化される。
　次に、図１９に図示されるように、各電極パッド１２を金属薄膜３５の複数の変形部２０の中の１つにワイヤ１３により接続する。この場合、変形部２０は多数個形成されているが、そのうちの最適な位置にある変形部２０の接続部２１に接続すればよい。
　次に、図２０に図示されるように、金属薄膜３５上の全体を樹脂層１５で覆う。樹脂層１５は、半導体素子１１の上面および全側面、半導体素子１１から露出した金属薄膜３５およびワイヤ１３の周囲を覆って形成する。従って、半導体素子１１から露出したすべての変形部２０の溝２３内に充填される。
　第１の実施形態で説明した通り、変形部２０の溝２３内に樹脂層１５が充填されることにより、金属薄膜３５と樹脂層１５の固着力が補強されるが、第２の実施形態では、第１の実施形態よりも多数の変形部２０が形成されているため、金属薄膜３５と樹脂層１５の固着力は、第１の実施形態よりもさらに大きくなる。
　次に、基台４１および絶縁層４２を除去して、金属薄膜３５の下面を露出する。
　そして、図２１に図示されるように、各半導体素子１１の中央部の下面に位置する金属薄膜３５を、ダイシング等適宜な方法により除去する。この後、各半導体装置形成領域の境界部で樹脂層１５および金属薄膜３５を切断することにより、個別に分離された薄膜端子３５Ａを有する半導体装置７０を得る。
　第２の実施形態の半導体装置７０の場合にも、第１の実施形態の半導体装置１０の場合と同様な効果を奏することができる。
　加えて、第２の実施形態の半導体装置７０の場合には、変形部２０がワイヤ１３を接続する部分以外にも多数個形成されているので、金属薄膜３５と樹脂層１５の固着力を一層高めることができる。
　（変形例）
　以下に、第１の実施形態および第２の実施形態に示された半導体装置の変形例を示す。
　図２２は、半導体装置１０の変形例である半導体装置１０Ａを示す。半導体装置１０Ａが半導体装置１０と異なる点は、半導体装置１０Ａでは、分離部１６が薄膜端子３０Ａのみでなく、絶縁材４３を貫通し、半導体素子１１の下面部にまで達する構成とされている点である。
　このような半導体装置１０Ａを形成するには、ダイシングブレード５１により金属薄膜３０を切断して薄膜端子３０Ａを形成する、図８に示す工程において、ダイシングブレード５１の先端を、半導体素子１１の下面の一部を切断する深さに達する位置に設定して切断すればよい。
　図２２は、半導体装置１０の変形例として図示されているが、図２１に示した半導体装置７０に対しても同様に、分離部１６を半導体素子１１の下部に達する深さとすることができる。
　図２３は、半導体装置７０の変形例７０Ａを示す。この半導体装置７０Ａが半導体装置７０と相違する点は、分離部１６が薄膜端子７０Ａのみでなく、絶縁材４３の少なくとも下部を開口するように形成されている点である。このような半導体装置７０Ａを形成するには、ダイシングブレードにより金属薄膜７０を切断して薄膜端子７０Ａを形成するには、図８に示す工程において、ダイシングブレード５１の先端を、絶縁材４３に達するが半導体素子１１には達しない位置に設定して切断すればよい。
　図２３は、半導体装置７０の変形例として図示されているが、半導体装置１０に対しても同様に、分離部１６を、絶縁材４３に達するが半導体素子１１には達しない深さとすることができる。
　図２４は、本発明の半導体装置の製造方法の変形例を示す拡大斜視図である。
　第１および第２の実施形態では、金属薄膜３０または３５を半導体素子１１の電極パッド１２にワイヤ１３により接続した後、金属薄膜３０または３５をダイシングブレードにより切断して、薄膜端子３０Ａまたは３５Ａに形成する方法であった。図２４に図示される方法では、半導体素子１１を搭載する前に、金属薄膜３６に変形部２０と共に分離部１６を形成しておく。分離部１６は、半導体素子１１の中央部を通る行方向および列方向に延出し、その長さは、形成される薄膜端子の外形サイズを超える位置に達する長さとする。
　そして、金属薄膜３６に半導体素子１１を固着し、変形部２０の接続部２１と電極パッド１２をワイヤで接続し、全体を樹脂層で覆った後、二点差線で示す位置で、金属薄膜３６および樹脂層を切断する。これにより、金属薄膜３６が個々に分離されて薄膜端子３６Ａが形成される。この方法による場合には、薄膜端子３６Ａを形成する工程において、金属薄膜３６に与える衝撃等の外力が小さいので、薄膜端子３６Ａの形成が容易で確実となる。
　図２５は、本発明の半導体装置の製造方法のさらに別の変形例を示す拡大斜視図である。
　図２５に図示された例では、半導体素子１１を搭載する前に、金属薄膜３７に変形部２０と共に、搭載される半導体素子１１の中央部に対応する位置に、半導体素子１１の外形サイズよりも小さい外形サイズの開口部１７を形成しておく。
　そして、金属薄膜３７に半導体素子１１を固着し、変形部２０の接続部２１と電極パッド１２をワイヤで接続し、全体を樹脂層で覆った後、二点差線で示すように、開口部１７を通過する行方向および列方向に沿って金属薄膜３７を除去し、分離部１６を形成する。これにより、金属薄膜３７が個々に分離される。
　この後、金属薄膜３７および樹脂層を外形サイズで切断すれば、個々の半導体装置が得られる。
（実施形態３）
　図２６は、本発明の半導体装置の第３の実施形態を示す。この実施形態の半導体装置８０は、薄膜端子が半導体素子１１の全側辺部に沿って配列された例を示しており、図２６（Ａ）は上面図、図２６（Ｂ）は図２６（Ａ）のＸＸＶＩB－ＸＸＶＩB線切断断面図であり、図２６（Ｃ）は、下面図である。
　この実施形態における半導体素子１１は、四辺のすべての側辺部に沿って配列された電極パッド１２を有する。また、薄膜端子３８Ａも接続されるべき電極パッド１２が配置された側辺部と同一の側辺部に配列されている。
　そして、各薄膜端子３８Ａは、絶縁材４３により半導体素子１１の下面に固着された状態で、ワイヤ１３により電極パッド１２に接続されている。また、半導体素子１１および薄膜端子３８Ａ上を含む全体は樹脂層１５により被覆されている。
　図２６では、電極パッド１２および薄膜端子３８Ａは各側辺部に３個づつ配置されているが、各側辺部に配置される電極パッド１２および薄膜端子３８Ａの数は、アライメントおよび薄膜端子形成時の解像度の限界まで増大することが可能であり、この点に関する本発明の適用可能性に制限はない。
　なお、上記第１～第３の実施形態においては、樹脂層１５に対向する面側に溝部２３を有する変形部２０を設け、溝２３内に充填された樹脂層１５の収縮により樹脂層１５と金属薄膜３０との固着力を増大する構造であった。しかし、樹脂層１５と金属薄膜３０と固着力を増大する方法としては上記の構造に限定されない。例えば、金属薄膜３０の樹脂層１５との接面側を、表面粗さが、例えば、６～１０μｍ程度の微細な凹凸を形成するようにしてもよい。また、このように、金属薄膜３０に微細な凹凸を形成し、且つ、第１～第３の実施形態に示した如く、樹脂層１５に対向する面側に溝部２３を有する変形部２０を設ける構造としてもよい。
　さらに、上記実施形態を以下のように変形して実施することができる。
　半導体素子として、集積回路を有する集積回路素子を例として説明した。
　しかし、この発明は、ＬＥＤ、ネットワーク用受動素子、半導体センサ等、ディスクリート部品や受動部品あるいはハイブリッド部品にも適用することができる。
　変形部２０の接続部２１の上面２１ａの高さは、薄膜端子３０Ａの上面２０ａと同一面としたが、これに限らず、接続部２１の上面２１ａは、薄膜端子３０Ａよりも低くしても差し支えない。この場合、接続部２１の上面２１ａを変形部２０の最深部２３ａと同一面とすることも可能である。
　樹脂層１５を形成する方法として、半導体素子１１を金属薄膜３０にボンディングした後、基台４１と共に金型内に収納して樹脂層１５を成形により形成する方法で説明した。しかし、半導体素子１１を金属薄膜３０にボンディングし、基台４１を除去した後、樹脂層１５を成形するようにしてもよい。一例として、金属薄膜３０の周縁部上面を上金型の底面に押し付け、周縁部下面を下金型で押さえ付けた状態で型締めし、金型内に樹脂を導入して樹脂層１５を形成することができる。
　その他、本発明の半導体装置は、発明の趣旨の範囲内において、種々、変形して構成することが可能であり、要は、上面に複数の電極パッドを有する半導体素子と、半導体素子の下面に、それぞれ、分離部にて分離して設けられた複数の薄膜端子と、半導体素子および各薄膜端子との間に設けられた絶縁層と、各半導体素子の電極パッドと各薄膜端子とを接続する接続部材と、半導体素子、半導体素子から露出した複数の薄膜端子、分離部上および接続部材を覆って設けられた樹脂層と、を具備するものであればよい。
　また、本発明の半導体装置の製造方法は、電極パッドを有する半導体素子を準備する工程と、半導体素子より大きい面積の金属薄膜を準備し、半導体素子を金属薄膜上に、金属薄膜と電気的に絶縁して固定する工程と、電極パッドと金属薄膜とを接続部材により電気的に接続する工程と、金属薄膜上に半導体素子および接続部材を覆う絶縁膜を形成する工程と、金属薄膜を所定形状の薄膜端子に形成する工程と、を具備するものであればよい。
　１０、１０Ａ　半導体装置
　１１　半導体素子
　１２　電極パッド
　１３　ワイヤ(接続部材)
　１５　樹脂層
　１６　分離部
　１７　開口部
　２０　変形部
　２０ａ、２１ａ　上面
　２１　接続部
　２２　突出部
　２３　溝
　２３ａ　最深部
　２４　陥没部
　３０、３５、３６、３７　金属薄膜
　３０Ａ、３５Ａ、３６Ａ、３８Ａ　薄膜端子
　３１　上面
　４１　基台
　４２　絶縁層
　４３　絶縁材
　７０、７０Ａ、８０　半導体装置

Claims (16)

  1. 　上面に複数の電極パッドを有する半導体素子と、
    　前記半導体素子の下面に、それぞれ、分離部にて分離して設けられた複数の薄膜端子と、
    　前記半導体素子および前記各薄膜端子との間に設けられた絶縁層と、
    　前記各半導体素子の電極パッドと前記各薄膜端子とを接続する接続部材と、
    　前記半導体素子、前記半導体素子から露出した前記複数の薄膜端子、前記分離部上および前記接続部材を覆って設けられた樹脂層と、
    　を具備することを特徴とする半導体装置。
  2. 　請求項１に記載の半導体装置において、前記各薄膜端子は、前記樹脂層との接面側に微細な凹凸を有することを特徴とする半導体装置。
  3. 　請求項１または請求項２のいずれか１項に記載の半導体装置において、前記薄膜端子は、前記樹脂層との対面側から外面側に突き出す変形部を有し、前記変形部内に前記樹脂層の一部が充填されていることを特徴とする半導体装置。
  4. 　請求項３に記載の半導体装置において、前記接続部材の一端が前記薄膜端子に接続される接続部が前記薄膜端子の変形部内に形成されていることを特徴とする半導体装置。
  5. 　請求項４に記載の半導体装置において、前記接続部は前記薄膜端子と一体に形成され、前記変形部の最深部よりも浅い位置に設けられていることを特徴とする半導体装置。
  6. 　請求項４に記載の半導体装置において、前記薄膜端子は、前記半導体素子の下面に積層される領域と前記半導体素子の外側の領域とを有し、前記変形部は、前記薄膜端子の前記半導体素子の外側の領域に形成されていることを特徴とする半導体装置。
  7. 　請求項１乃至請求項６のいずれか１項に記載の半導体装置において、前記変形部は前記接続部材よりも多く形成されていることを特徴とする半導体装置。
  8. 　請求項１乃至請求項７のいずれか１項に記載の半導体装置において、前記薄膜端子は、厚さ３０～２００μｍであることを特徴とする半導体装置。
  9. 　電極パッドを有する半導体素子を準備する工程と、
    　前記半導体素子より大きい面積の金属薄膜を準備し、前記半導体素子を前記金属薄膜上に、前記金属薄膜と電気的に絶縁して固定する工程と、
    　前記電極パッドと前記金属薄膜とを接続部材により電気的に接続する工程と、
    　前記金属薄膜上に前記半導体素子および前記接続部材を覆う絶縁層を形成する工程と、
    　前記金属薄膜を所定形状の薄膜端子に形成する工程と、
    　を具備することを特徴とする半導体装置の製造方法。
  10. 　請求項９に記載の半導体装置の製造方法において、前記金属薄膜を準備する工程は、前記半導体素子に対応する領域に開口部を形成する工程を含むことを特徴とする半導体装置の製造方法。
  11. 　請求項１０に記載の半導体装置の製造方法において、前記開口部は前記半導体素子に対応しない領域に延出された部分を有することを特徴とする半導体装置の製造方法。
  12. 　請求項９乃至請求項１１のいずれかに記載の半導体装置の製造方法において、前記金属薄膜を準備する工程は、前記金属薄膜に前記樹脂膜との対面側から外面に向かって突き出す変形部を形成する工程を含むことを特徴とする半導体装置の製造方法。
  13. 　請求項１２に記載の半導体装置の製造方法において、前記半導体素子より大きい面積の金属薄膜を準備する工程は、前記絶縁層を介して基台上に前記金属薄膜を接着する工程を含み、前記金属薄膜に前記変形部を形成する工程は、前記金属薄膜を前記絶縁層の内部に形成する工程を含むことを特徴とする半導体装置の製造方法。
  14. 　請求項請求項１３に記載の半導体装置の製造方法において、前記絶縁層を介して基台上に前記金属薄膜を接着する工程は、前記変形部内に前記絶縁層を充填する工程を含むことを特徴とする半導体装置の製造方法。
  15. 　請求項１３または請求項１４のいずれか１項に記載の半導体装置の製造方法において、前記金属薄膜上に前記半導体素子および前記接続部材を覆う絶縁膜を形成する工程の後、前記金属薄膜を所定形状の薄膜端子に形成する工程の前に、前記基台を除去する工程を含むことを特徴とする半導体装置の製造方法。
  16. 　電極パッドを有する半導体素子を準備する工程と、
    　前記半導体素子より大きい面積の金属薄膜を準備し、前記半導体素子を前記金属薄膜上に、前記金属薄膜と電気的に絶縁して固定する工程と、
    　前記電極パッドと前記金属薄膜とを接続部材により電気的に接続する工程と、
    　前記金属薄膜上に前記半導体素子および前記接続部材を覆う絶縁層を形成する工程と、
    　前記金属薄膜を所定形状の薄膜端子に形成する工程と、
    　をこの工程の順に行うことを特徴とする半導体装置の製造方法。
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