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TWI826870B - 噴嘴清洗裝置、噴嘴清洗方法以及塗佈裝置 - Google Patents

噴嘴清洗裝置、噴嘴清洗方法以及塗佈裝置 Download PDF

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Publication number
TWI826870B
TWI826870B TW110143934A TW110143934A TWI826870B TW I826870 B TWI826870 B TW I826870B TW 110143934 A TW110143934 A TW 110143934A TW 110143934 A TW110143934 A TW 110143934A TW I826870 B TWI826870 B TW I826870B
Authority
TW
Taiwan
Prior art keywords
nozzle
coating liquid
attachment removal
recovery
coating
Prior art date
Application number
TW110143934A
Other languages
English (en)
Chinese (zh)
Other versions
TW202233307A (zh
Inventor
柏野翔伍
高村幸宏
安陪裕滋
Original Assignee
日商斯庫林集團股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商斯庫林集團股份有限公司 filed Critical 日商斯庫林集團股份有限公司
Publication of TW202233307A publication Critical patent/TW202233307A/zh
Application granted granted Critical
Publication of TWI826870B publication Critical patent/TWI826870B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B15/00—Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
    • B05B15/50—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B15/00—Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
    • B05B15/50—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter
    • B05B15/52—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter for removal of clogging particles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B15/00—Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
    • B05B15/50—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter
    • B05B15/55—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter using cleaning fluids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B15/00—Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
    • B05B15/50—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter
    • B05B15/55—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter using cleaning fluids
    • B05B15/555—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter using cleaning fluids discharged by cleaning nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0254—Coating heads with slot-shaped outlet
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working

Landscapes

  • Coating Apparatus (AREA)
  • Details Or Accessories Of Spraying Plant Or Apparatus (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Cleaning By Liquid Or Steam (AREA)
TW110143934A 2021-02-26 2021-11-25 噴嘴清洗裝置、噴嘴清洗方法以及塗佈裝置 TWI826870B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021-029987 2021-02-26
JP2021029987A JP7279096B2 (ja) 2021-02-26 2021-02-26 ノズル洗浄装置、ノズル洗浄方法および塗布装置

Publications (2)

Publication Number Publication Date
TW202233307A TW202233307A (zh) 2022-09-01
TWI826870B true TWI826870B (zh) 2023-12-21

Family

ID=82974505

Family Applications (1)

Application Number Title Priority Date Filing Date
TW110143934A TWI826870B (zh) 2021-02-26 2021-11-25 噴嘴清洗裝置、噴嘴清洗方法以及塗佈裝置

Country Status (4)

Country Link
JP (1) JP7279096B2 (ko)
KR (1) KR102672523B1 (ko)
CN (1) CN114950809B (ko)
TW (1) TWI826870B (ko)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2024044924A (ja) * 2022-09-21 2024-04-02 株式会社Ｓｃｒｅｅｎホールディングス 基板洗浄装置および基板洗浄方法
CN117123406B (zh) * 2023-10-26 2024-01-02 山东金泰高温材料有限公司 用于石灰窑内衬快速修补的喷射设备及内衬快速修补方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006167508A (ja) * 2004-12-13 2006-06-29 Toray Ind Inc 塗布用ダイの清掃方法および清掃装置並びにディスプレイ用部材の製造方法および製造装置
JP2020037092A (ja) * 2018-09-06 2020-03-12 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置および基板処理方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3306838B2 (ja) * 1993-12-14 2002-07-24 東レ株式会社 カーテンフローコータの口金の清掃方法およびカラーフィルタ用塗膜の製造方法
JPH10216598A (ja) * 1997-02-04 1998-08-18 Toray Ind Inc 塗布方法および塗布装置並びにカラーフィルターの製造方法および製造装置
JP4091372B2 (ja) 2002-07-16 2008-05-28 大日本スクリーン製造株式会社 基板処理装置
JP4202934B2 (ja) 2004-01-23 2008-12-24 東京エレクトロン株式会社 塗布装置
JP2006075687A (ja) * 2004-09-08 2006-03-23 Seiko Epson Corp 液滴吐出装置、ヘッドのクリーニング方法、電気光学装置の製造方法、電気光学装置および電子機器
KR100708314B1 (ko) * 2005-11-04 2007-04-17 세메스 주식회사 노즐 처리 유닛 및 방법, 그리고 상기 유닛을 가지는 기판처리 장치
JP2010240550A (ja) 2009-04-03 2010-10-28 Dainippon Screen Mfg Co Ltd 基板処理装置
JP2011177707A (ja) * 2010-02-08 2011-09-15 Toray Ind Inc 塗布方法および塗布装置並びにディスプレイ用部材の製造方法
JP5766990B2 (ja) * 2011-03-23 2015-08-19 東レエンジニアリング株式会社 塗布装置
JP2013071033A (ja) 2011-09-27 2013-04-22 Dainippon Screen Mfg Co Ltd ノズル洗浄装置および該ノズル洗浄装置を備えた塗布装置
JP2014176812A (ja) * 2013-03-15 2014-09-25 Dainippon Screen Mfg Co Ltd ノズル洗浄装置、塗布装置、ノズル洗浄方法、および塗布方法
CN103286030B (zh) 2013-06-28 2016-08-31 深圳市华星光电技术有限公司 一种狭缝喷嘴清洁装置
JP6537243B2 (ja) * 2013-11-22 2019-07-03 キヤノン株式会社 液体吐出装置、液体吐出装置の制御方法、インプリント装置および部品の製造方法
JP6783105B2 (ja) * 2016-09-16 2020-11-11 株式会社Ｓｃｒｅｅｎホールディングス ノズル洗浄方法、塗布装置
JP6337184B2 (ja) * 2017-06-22 2018-06-06 株式会社Ｓｃｒｅｅｎホールディングス ノズル洗浄装置、塗布装置、ノズル洗浄方法、および塗布方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006167508A (ja) * 2004-12-13 2006-06-29 Toray Ind Inc 塗布用ダイの清掃方法および清掃装置並びにディスプレイ用部材の製造方法および製造装置
JP2020037092A (ja) * 2018-09-06 2020-03-12 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置および基板処理方法

Also Published As

Publication number Publication date
KR102672523B1 (ko) 2024-06-07
CN114950809B (zh) 2024-02-23
KR20220122492A (ko) 2022-09-02
TW202233307A (zh) 2022-09-01
JP2022131177A (ja) 2022-09-07
JP7279096B2 (ja) 2023-05-22
CN114950809A (zh) 2022-08-30

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