TWI850754B - 氣體處理爐及使用此氣體處理爐之廢氣處理裝置 - Google Patents
氣體處理爐及使用此氣體處理爐之廢氣處理裝置 Download PDFInfo
- Publication number
- TWI850754B TWI850754B TW111133190A TW111133190A TWI850754B TW I850754 B TWI850754 B TW I850754B TW 111133190 A TW111133190 A TW 111133190A TW 111133190 A TW111133190 A TW 111133190A TW I850754 B TWI850754 B TW I850754B
- Authority
- TW
- Taiwan
- Prior art keywords
- gas
- gas treatment
- furnace body
- furnace
- inlet
- Prior art date
Links
- 239000007789 gas Substances 0.000 title claims abstract description 234
- 239000002912 waste gas Substances 0.000 title claims abstract description 21
- 238000004519 manufacturing process Methods 0.000 claims abstract description 16
- 239000004065 semiconductor Substances 0.000 claims abstract description 15
- 238000010438 heat treatment Methods 0.000 claims abstract description 13
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 claims abstract description 12
- 235000011114 ammonium hydroxide Nutrition 0.000 claims abstract description 12
- WTHDKMILWLGDKL-UHFFFAOYSA-N urea;hydrate Chemical compound O.NC(N)=O WTHDKMILWLGDKL-UHFFFAOYSA-N 0.000 claims abstract description 11
- 238000012545 processing Methods 0.000 claims description 15
- 238000005979 thermal decomposition reaction Methods 0.000 claims description 9
- 238000004140 cleaning Methods 0.000 claims description 5
- 238000001816 cooling Methods 0.000 claims description 3
- GQPLMRYTRLFLPF-UHFFFAOYSA-N Nitrous Oxide Chemical compound [O-][N+]#N GQPLMRYTRLFLPF-UHFFFAOYSA-N 0.000 description 34
- 239000001272 nitrous oxide Substances 0.000 description 17
- 238000003860 storage Methods 0.000 description 17
- 239000007788 liquid Substances 0.000 description 15
- 229920006926 PFC Polymers 0.000 description 14
- 239000007921 spray Substances 0.000 description 14
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 10
- 238000001784 detoxification Methods 0.000 description 9
- 239000000463 material Substances 0.000 description 7
- 239000000126 substance Substances 0.000 description 7
- 238000003780 insertion Methods 0.000 description 6
- 230000037431 insertion Effects 0.000 description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- 239000011819 refractory material Substances 0.000 description 5
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 3
- 229910021529 ammonia Inorganic materials 0.000 description 3
- 238000004891 communication Methods 0.000 description 3
- 239000003814 drug Substances 0.000 description 3
- 239000000428 dust Substances 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000004973 liquid crystal related substance Substances 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- 239000007864 aqueous solution Substances 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- -1 etc. Substances 0.000 description 2
- 239000000945 filler Substances 0.000 description 2
- 229910000856 hastalloy Inorganic materials 0.000 description 2
- 229910000040 hydrogen fluoride Inorganic materials 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229910000069 nitrogen hydride Inorganic materials 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 1
- XPDWGBQVDMORPB-UHFFFAOYSA-N Fluoroform Chemical compound FC(F)F XPDWGBQVDMORPB-UHFFFAOYSA-N 0.000 description 1
- 101001121408 Homo sapiens L-amino-acid oxidase Proteins 0.000 description 1
- 102100026388 L-amino-acid oxidase Human genes 0.000 description 1
- 229910017563 LaCrO Inorganic materials 0.000 description 1
- 229910016006 MoSi Inorganic materials 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000000908 ammonium hydroxide Substances 0.000 description 1
- YXTPWUNVHCYOSP-UHFFFAOYSA-N bis($l^{2}-silanylidene)molybdenum Chemical compound [Si]=[Mo]=[Si] YXTPWUNVHCYOSP-UHFFFAOYSA-N 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- ZUGKWPRMAJSWDD-UHFFFAOYSA-N dioxido(dioxo)chromium titanium(4+) Chemical compound [Ti+4].[O-][Cr]([O-])(=O)=O.[O-][Cr]([O-])(=O)=O ZUGKWPRMAJSWDD-UHFFFAOYSA-N 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 150000002222 fluorine compounds Chemical class 0.000 description 1
- 238000011010 flushing procedure Methods 0.000 description 1
- 229960002050 hydrofluoric acid Drugs 0.000 description 1
- 229910001506 inorganic fluoride Inorganic materials 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 229910000953 kanthal Inorganic materials 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910021343 molybdenum disilicide Inorganic materials 0.000 description 1
- 229910000623 nickel–chromium alloy Inorganic materials 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 150000003254 radicals Chemical class 0.000 description 1
- 238000012552 review Methods 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 229920006337 unsaturated polyester resin Polymers 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- 238000010792 warming Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/46—Removing components of defined structure
- B01D53/54—Nitrogen compounds
- B01D53/56—Nitrogen oxides
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/46—Removing components of defined structure
- B01D53/68—Halogens or halogen compounds
- B01D53/70—Organic halogen compounds
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Biomedical Technology (AREA)
- Environmental & Geological Engineering (AREA)
- Analytical Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Treating Waste Gases (AREA)
- Incineration Of Waste (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2021/041172 WO2023084595A1 (ja) | 2021-11-09 | 2021-11-09 | ガス処理炉及びこれを用いた排ガス処理装置 |
| WOPCT/JP2021/041172 | 2021-11-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW202323725A TW202323725A (zh) | 2023-06-16 |
| TWI850754B true TWI850754B (zh) | 2024-08-01 |
Family
ID=86335290
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW111133190A TWI850754B (zh) | 2021-11-09 | 2022-09-01 | 氣體處理爐及使用此氣體處理爐之廢氣處理裝置 |
Country Status (2)
| Country | Link |
|---|---|
| TW (1) | TWI850754B (ja) |
| WO (1) | WO2023084595A1 (ja) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0882491B1 (en) * | 1996-10-09 | 2007-01-03 | Sumitomo Heavy Industries, Ltd. | Exhaust gas processing method |
| WO2011102084A1 (ja) * | 2010-02-17 | 2011-08-25 | カンケンテクノ株式会社 | 除害処理装置および除害処理方法 |
| TW201632252A (zh) * | 2014-11-07 | 2016-09-16 | 三菱日立電力系統股份有限公司 | 廢氣處理系統及處理方法 |
| CN207237675U (zh) * | 2017-08-18 | 2018-04-17 | 河北邯郸热电股份有限公司 | 用于电厂烟气脱硝的尿素溶液气化装置 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3636617B2 (ja) * | 1998-06-18 | 2005-04-06 | カンケンテクノ株式会社 | パーフルオロカーボンガスの除去方法及び除去装置 |
| JP3569677B2 (ja) * | 2000-10-10 | 2004-09-22 | カンケンテクノ株式会社 | 半導体排ガス処理装置の排ガス処理塔と該処理塔用の電熱ヒータ |
| JP2002326016A (ja) * | 2001-05-08 | 2002-11-12 | Ebara Corp | ガス化溶融炉施設における脱硝方法及び脱硝装置 |
| US7220396B2 (en) * | 2001-07-11 | 2007-05-22 | Battelle Memorial Institute | Processes for treating halogen-containing gases |
| JP2004349442A (ja) * | 2003-05-22 | 2004-12-09 | Sony Corp | 排ガスの除害方法及び排ガスの除害装置 |
| SE528119C2 (sv) * | 2004-08-06 | 2006-09-05 | Scania Cv Ab | Arrangemang för att tillföra ett medium till en avgasledning hos en förbränningsmotor |
| JP2009082893A (ja) * | 2007-10-03 | 2009-04-23 | Kanken Techno Co Ltd | 排ガス処理装置 |
| JP2009082892A (ja) * | 2007-10-03 | 2009-04-23 | Kanken Techno Co Ltd | 排ガス処理装置の温度制御方法及び該方法を用いた排ガス処理装置と排ガス処理システム |
| KR102248261B1 (ko) * | 2019-07-04 | 2021-05-04 | 한국기계연구원 | 스크러버 및 과불화합물과 질소산화물 제거 시스템 |
-
2021
- 2021-11-09 WO PCT/JP2021/041172 patent/WO2023084595A1/ja active Application Filing
-
2022
- 2022-09-01 TW TW111133190A patent/TWI850754B/zh active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0882491B1 (en) * | 1996-10-09 | 2007-01-03 | Sumitomo Heavy Industries, Ltd. | Exhaust gas processing method |
| WO2011102084A1 (ja) * | 2010-02-17 | 2011-08-25 | カンケンテクノ株式会社 | 除害処理装置および除害処理方法 |
| TW201632252A (zh) * | 2014-11-07 | 2016-09-16 | 三菱日立電力系統股份有限公司 | 廢氣處理系統及處理方法 |
| CN207237675U (zh) * | 2017-08-18 | 2018-04-17 | 河北邯郸热电股份有限公司 | 用于电厂烟气脱硝的尿素溶液气化装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2023084595A1 (ja) | 2023-05-19 |
| TW202323725A (zh) | 2023-06-16 |
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