TWI301626B - Capacitor use electrode foil - Google Patents

Capacitor use electrode foil Download PDF

Info

Publication number: TWI301626B
Authority: TW; Taiwan
Prior art keywords: film; titanium oxide; aluminum; capacitor; oxide film
Prior art date: 2005-04-27

Application number

TW95114887A

Other languages

English (en)

Chinese (zh)

Other versions

TW200644012A (en

Inventor

Koki Tanaka

Tomohito Tanaka

Youichi Matsuzaki

Hiromasa Shoji

Toyoshi Ogura

Masao Kimura

Original Assignee

Nippon Steel Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2005-04-27

Filing date

2006-04-26

Publication date

2008-10-01

2005-04-27 Priority claimed from JP2005130457A external-priority patent/JP2006310494A/ja

2005-04-27 Priority claimed from JP2005130455A external-priority patent/JP2006310493A/ja

2006-04-26 Application filed by Nippon Steel Corp filed Critical Nippon Steel Corp

2006-12-16 Publication of TW200644012A publication Critical patent/TW200644012A/zh

2008-10-01 Application granted granted Critical

2008-10-01 Publication of TWI301626B publication Critical patent/TWI301626B/zh

Links

239000011888 foil Substances 0.000 title claims description 58
239000003990 capacitor Substances 0.000 title claims description 40
GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 125
OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims description 123
229910052782 aluminium Inorganic materials 0.000 claims description 54
XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 54
239000013078 crystal Substances 0.000 claims description 23
239000010936 titanium Substances 0.000 claims description 20
229910052719 titanium Inorganic materials 0.000 claims description 20
RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 19
239000002131 composite material Substances 0.000 claims description 17
239000000463 material Substances 0.000 claims description 9
PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 6
239000010408 film Substances 0.000 description 173
239000007788 liquid Substances 0.000 description 45
239000000758 substrate Substances 0.000 description 37
239000010410 layer Substances 0.000 description 33
125000004429 atom Chemical group 0.000 description 30
238000010438 heat treatment Methods 0.000 description 25
238000000034 method Methods 0.000 description 25
238000007743 anodising Methods 0.000 description 24
239000007864 aqueous solution Substances 0.000 description 21
238000000151 deposition Methods 0.000 description 17
238000002048 anodisation reaction Methods 0.000 description 16
238000006243 chemical reaction Methods 0.000 description 15
239000000243 solution Substances 0.000 description 13
230000015572 biosynthetic process Effects 0.000 description 12
230000000052 comparative effect Effects 0.000 description 10
150000002500 ions Chemical class 0.000 description 9
230000003647 oxidation Effects 0.000 description 9
238000007254 oxidation reaction Methods 0.000 description 9
238000002474 experimental method Methods 0.000 description 8
QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 7
238000009826 distribution Methods 0.000 description 7
239000007791 liquid phase Substances 0.000 description 7
XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 7
VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 6
MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 6
WNLRTRBMVRJNCN-UHFFFAOYSA-N adipic acid Chemical compound OC(=O)CCCCC(O)=O WNLRTRBMVRJNCN-UHFFFAOYSA-N 0.000 description 6
235000011114 ammonium hydroxide Nutrition 0.000 description 6
QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 5
239000012190 activator Substances 0.000 description 5
KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 5
239000004327 boric acid Substances 0.000 description 5
230000008021 deposition Effects 0.000 description 5
230000000694 effects Effects 0.000 description 5
239000007789 gas Substances 0.000 description 5
125000004430 oxygen atom Chemical group O* 0.000 description 5
FLDCSPABIQBYKP-UHFFFAOYSA-N 5-chloro-1,2-dimethylbenzimidazole Chemical compound ClC1=CC=C2N(C)C(C)=NC2=C1 FLDCSPABIQBYKP-UHFFFAOYSA-N 0.000 description 4
239000001741 Ammonium adipate Substances 0.000 description 4
XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
239000002253 acid Substances 0.000 description 4
239000000654 additive Substances 0.000 description 4
230000000996 additive effect Effects 0.000 description 4
UQZIWOQVLUASCR-UHFFFAOYSA-N alumane;titanium Chemical compound [AlH3].[Ti] UQZIWOQVLUASCR-UHFFFAOYSA-N 0.000 description 4
235000019293 ammonium adipate Nutrition 0.000 description 4
QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 4
230000008859 change Effects 0.000 description 4
230000005611 electricity Effects 0.000 description 4
239000012535 impurity Substances 0.000 description 4
239000011261 inert gas Substances 0.000 description 4
TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 4
239000001301 oxygen Substances 0.000 description 4
229910052760 oxygen Inorganic materials 0.000 description 4
230000010287 polarization Effects 0.000 description 4
239000001361 adipic acid Substances 0.000 description 3
235000011037 adipic acid Nutrition 0.000 description 3
239000010407 anodic oxide Substances 0.000 description 3
238000004364 calculation method Methods 0.000 description 3
238000005229 chemical vapour deposition Methods 0.000 description 3
230000007547 defect Effects 0.000 description 3
NMGYKLMMQCTUGI-UHFFFAOYSA-J diazanium;titanium(4+);hexafluoride Chemical compound [NH4+].[NH4+].[F-].[F-].[F-].[F-].[F-].[F-].[Ti+4] NMGYKLMMQCTUGI-UHFFFAOYSA-J 0.000 description 3
239000003792 electrolyte Substances 0.000 description 3
239000001257 hydrogen Substances 0.000 description 3
229910052739 hydrogen Inorganic materials 0.000 description 3
230000007062 hydrolysis Effects 0.000 description 3
238000006460 hydrolysis reaction Methods 0.000 description 3
238000005468 ion implantation Methods 0.000 description 3
230000014759 maintenance of location Effects 0.000 description 3
238000001556 precipitation Methods 0.000 description 3
-1 sulphur ions Chemical class 0.000 description 3
238000012360 testing method Methods 0.000 description 3
229910018626 Al(OH) Inorganic materials 0.000 description 2
QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 description 2
UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
QIGBRXMKCJKVMJ-UHFFFAOYSA-N Hydroquinone Chemical compound OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 description 2
KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 2
229910008051 Si-OH Inorganic materials 0.000 description 2
229910006358 Si—OH Inorganic materials 0.000 description 2
229910052770 Uranium Inorganic materials 0.000 description 2
239000000956 alloy Substances 0.000 description 2
229910045601 alloy Inorganic materials 0.000 description 2
229910052786 argon Inorganic materials 0.000 description 2
JTSVYBPWSSQBEB-UHFFFAOYSA-N azanium;hexanoate Chemical compound [NH4+].CCCCCC([O-])=O JTSVYBPWSSQBEB-UHFFFAOYSA-N 0.000 description 2
QVQLCTNNEUAWMS-UHFFFAOYSA-N barium oxide Chemical compound [Ba]=O QVQLCTNNEUAWMS-UHFFFAOYSA-N 0.000 description 2
229910000420 cerium oxide Inorganic materials 0.000 description 2
239000008151 electrolyte solution Substances 0.000 description 2
238000005530 etching Methods 0.000 description 2
238000011156 evaluation Methods 0.000 description 2
238000007654 immersion Methods 0.000 description 2
238000004519 manufacturing process Methods 0.000 description 2
238000012544 monitoring process Methods 0.000 description 2
229910052757 nitrogen Inorganic materials 0.000 description 2
235000006408 oxalic acid Nutrition 0.000 description 2
BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 2
238000012545 processing Methods 0.000 description 2
238000007788 roughening Methods 0.000 description 2
229910052707 ruthenium Inorganic materials 0.000 description 2
CXMXRPHRNRROMY-UHFFFAOYSA-N sebacic acid Chemical compound OC(=O)CCCCCCCCC(O)=O CXMXRPHRNRROMY-UHFFFAOYSA-N 0.000 description 2
239000002689 soil Substances 0.000 description 2
230000003068 static effect Effects 0.000 description 2
229910052712 strontium Inorganic materials 0.000 description 2
CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 description 2
NNJPGOLRFBJNIW-HNNXBMFYSA-N (-)-demecolcine Chemical compound C1=C(OC)C(=O)C=C2[C@@H](NC)CCC3=CC(OC)=C(OC)C(OC)=C3C2=C1 NNJPGOLRFBJNIW-HNNXBMFYSA-N 0.000 description 1
WRIDQFICGBMAFQ-UHFFFAOYSA-N (E)-8-Octadecenoic acid Natural products CCCCCCCCCC=CCCCCCCC(O)=O WRIDQFICGBMAFQ-UHFFFAOYSA-N 0.000 description 1
229910019985 (NH4)2TiF6 Inorganic materials 0.000 description 1
VPSXHKGJZJCWLV-UHFFFAOYSA-N 2-[4-[2-(2,3-dihydro-1H-inden-2-ylamino)pyrimidin-5-yl]-3-(1-ethylpiperidin-4-yl)oxypyrazol-1-yl]-1-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)ethanone Chemical compound C1C(CC2=CC=CC=C12)NC1=NC=C(C=N1)C=1C(=NN(C=1)CC(=O)N1CC2=C(CC1)NN=N2)OC1CCN(CC1)CC VPSXHKGJZJCWLV-UHFFFAOYSA-N 0.000 description 1
XHKUTQNVGAHLPK-UHFFFAOYSA-N 2-fluorocyclohexa-2,5-diene-1,4-dione Chemical compound FC1=CC(=O)C=CC1=O XHKUTQNVGAHLPK-UHFFFAOYSA-N 0.000 description 1
LQJBNNIYVWPHFW-UHFFFAOYSA-N 20:1omega9c fatty acid Natural products CCCCCCCCCCC=CCCCCCCCC(O)=O LQJBNNIYVWPHFW-UHFFFAOYSA-N 0.000 description 1
QSBYPNXLFMSGKH-UHFFFAOYSA-N 9-Heptadecensaeure Natural products CCCCCCCC=CCCCCCCCC(O)=O QSBYPNXLFMSGKH-UHFFFAOYSA-N 0.000 description 1
NLXLAEXVIDQMFP-UHFFFAOYSA-N Ammonium chloride Substances [NH4+].[Cl-] NLXLAEXVIDQMFP-UHFFFAOYSA-N 0.000 description 1
229910052684 Cerium Inorganic materials 0.000 description 1
229910052691 Erbium Inorganic materials 0.000 description 1
229910003887 H3 BO3 Inorganic materials 0.000 description 1
239000005642 Oleic acid Substances 0.000 description 1
ZQPPMHVWECSIRJ-UHFFFAOYSA-N Oleic acid Natural products CCCCCCCCC=CCCCCCCCC(O)=O ZQPPMHVWECSIRJ-UHFFFAOYSA-N 0.000 description 1
VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
239000005864 Sulphur Substances 0.000 description 1
238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 1
230000009471 action Effects 0.000 description 1
239000004411 aluminium Substances 0.000 description 1
229910021529 ammonia Inorganic materials 0.000 description 1
150000003863 ammonium salts Chemical class 0.000 description 1
239000011260 aqueous acid Substances 0.000 description 1
238000005284 basis set Methods 0.000 description 1
230000033228 biological regulation Effects 0.000 description 1
210000004556 brain Anatomy 0.000 description 1
150000001768 cations Chemical class 0.000 description 1
GWXLDORMOJMVQZ-UHFFFAOYSA-N cerium Chemical compound [Ce] GWXLDORMOJMVQZ-UHFFFAOYSA-N 0.000 description 1
239000011248 coating agent Substances 0.000 description 1
238000000576 coating method Methods 0.000 description 1
230000003750 conditioning effect Effects 0.000 description 1
238000007796 conventional method Methods 0.000 description 1
238000002425 crystallisation Methods 0.000 description 1
230000008025 crystallization Effects 0.000 description 1
238000010586 diagram Methods 0.000 description 1
239000003989 dielectric material Substances 0.000 description 1
239000007772 electrode material Substances 0.000 description 1
238000000866 electrolytic etching Methods 0.000 description 1
238000001962 electrophoresis Methods 0.000 description 1
UYAHIZSMUZPPFV-UHFFFAOYSA-N erbium Chemical compound [Er] UYAHIZSMUZPPFV-UHFFFAOYSA-N 0.000 description 1
239000004744 fabric Substances 0.000 description 1
238000007730 finishing process Methods 0.000 description 1
239000012530 fluid Substances 0.000 description 1
RWSXRVCMGQZWBV-WDSKDSINSA-N glutathione Chemical compound OC(=O)[C@@H](N)CCC(=O)N[C@@H](CS)C(=O)NCC(O)=O RWSXRVCMGQZWBV-WDSKDSINSA-N 0.000 description 1
229960003180 glutathione Drugs 0.000 description 1
235000003969 glutathione Nutrition 0.000 description 1
150000002431 hydrogen Chemical class 0.000 description 1
238000002513 implantation Methods 0.000 description 1
238000011835 investigation Methods 0.000 description 1
QXJSBBXBKPUZAA-UHFFFAOYSA-N isooleic acid Natural products CCCCCCCC=CCCCCCCCCC(O)=O QXJSBBXBKPUZAA-UHFFFAOYSA-N 0.000 description 1
229910052746 lanthanum Inorganic materials 0.000 description 1
FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 1
GJJSDZSDOYNJSW-UHFFFAOYSA-N lanthanum(3+);borate Chemical compound [La+3].[O-]B([O-])[O-] GJJSDZSDOYNJSW-UHFFFAOYSA-N 0.000 description 1
230000002535 lyotropic effect Effects 0.000 description 1
238000005259 measurement Methods 0.000 description 1
229910044991 metal oxide Inorganic materials 0.000 description 1
150000004706 metal oxides Chemical class 0.000 description 1
238000005065 mining Methods 0.000 description 1
238000004776 molecular orbital Methods 0.000 description 1
239000002362 mulch Substances 0.000 description 1
ZQPPMHVWECSIRJ-KTKRTIGZSA-N oleic acid Chemical compound CCCCCCCC\C=C/CCCCCCCC(O)=O ZQPPMHVWECSIRJ-KTKRTIGZSA-N 0.000 description 1
230000033116 oxidation-reduction process Effects 0.000 description 1
230000001590 oxidative effect Effects 0.000 description 1
239000002245 particle Substances 0.000 description 1
239000012071 phase Substances 0.000 description 1
238000006116 polymerization reaction Methods 0.000 description 1
239000000843 powder Substances 0.000 description 1
230000001376 precipitating effect Effects 0.000 description 1
238000002360 preparation method Methods 0.000 description 1
230000008569 process Effects 0.000 description 1
230000035484 reaction time Effects 0.000 description 1
238000005096 rolling process Methods 0.000 description 1
150000003839 salts Chemical class 0.000 description 1
238000003980 solgel method Methods 0.000 description 1
239000002904 solvent Substances 0.000 description 1
PWEBUXCTKOWPCW-UHFFFAOYSA-N squaric acid Chemical compound OC1=C(O)C(=O)C1=O PWEBUXCTKOWPCW-UHFFFAOYSA-N 0.000 description 1
239000000126 substance Substances 0.000 description 1
239000001117 sulphuric acid Substances 0.000 description 1
235000011149 sulphuric acid Nutrition 0.000 description 1
239000002344 surface layer Substances 0.000 description 1
239000010409 thin film Substances 0.000 description 1
LLZRNZOLAXHGLL-UHFFFAOYSA-J titanic acid Chemical class O[Ti](O)(O)O LLZRNZOLAXHGLL-UHFFFAOYSA-J 0.000 description 1
WYXIGTJNYDDFFH-UHFFFAOYSA-Q triazanium;borate Chemical compound [NH4+].[NH4+].[NH4+].[O-]B([O-])[O-] WYXIGTJNYDDFFH-UHFFFAOYSA-Q 0.000 description 1
230000005612 types of electricity Effects 0.000 description 1
239000002699 waste material Substances 0.000 description 1
239000002023 wood Substances 0.000 description 1
229910052724 xenon Inorganic materials 0.000 description 1
FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G9/00—Electrolytic capacitors, rectifiers, detectors, switching devices, light-sensitive or temperature-sensitive devices; Processes of their manufacture
- H01G9/004—Details
- H01G9/04—Electrodes or formation of dielectric layers thereon
- H01G9/042—Electrodes or formation of dielectric layers thereon characterised by the material
- H01G9/045—Electrodes or formation of dielectric layers thereon characterised by the material based on aluminium
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G9/00—Electrolytic capacitors, rectifiers, detectors, switching devices, light-sensitive or temperature-sensitive devices; Processes of their manufacture
- H01G9/004—Details
- H01G9/04—Electrodes or formation of dielectric layers thereon
- H01G9/042—Electrodes or formation of dielectric layers thereon characterised by the material

Landscapes

Engineering & Computer Science (AREA)
Power Engineering (AREA)
Chemical & Material Sciences (AREA)
Materials Engineering (AREA)
Microelectronics & Electronic Packaging (AREA)
Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
Inorganic Compounds Of Heavy Metals (AREA)

TW95114887A 2005-04-27 2006-04-26 Capacitor use electrode foil TWI301626B (en)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
JP2005130457A JP2006310494A (ja)	2005-04-27	2005-04-27	コンデンサ用電極箔
JP2005130455A JP2006310493A (ja)	2005-04-27	2005-04-27	コンデンサ用電極箔

Publications (2)

Publication Number	Publication Date
TW200644012A TW200644012A (en)	2006-12-16
TWI301626B true TWI301626B (en)	2008-10-01

Family

ID=37307788

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
TW95114887A TWI301626B (en)	2005-04-27	2006-04-26	Capacitor use electrode foil

Country Status (2)

Country	Link
TW (1)	TWI301626B (fr)
WO (1)	WO2006117985A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
TWI635521B (zh) *	2017-02-13	2018-09-11	鈺邦科技股份有限公司	電容器封裝結構及其抗氧化複合式電極箔

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP5162926B2 (ja) *	2007-03-07	2013-03-13	三菱電機株式会社	半導体レーザ装置の製造方法
JPWO2009051133A1 (ja) *	2007-10-17	2011-03-03	昭和電工株式会社	コンデンサの製造方法、コンデンサ、配線板、電子機器及びｉｃカード
US8159811B2 (en) *	2007-10-19	2012-04-17	Oh Young Joo	Metal capacitor and manufacturing method thereof
WO2011099260A1 (fr) *	2010-02-15	2011-08-18	パナソニック株式会社	Feuille d'électrode, procédé pour produire celle-ci, et condensateur utilisant la feuille d'électrode
JP5471738B2 (ja) *	2010-04-08	2014-04-16	富士通株式会社	電解キャパシタ及びその製造方法
WO2017154461A1 (fr) *	2016-03-10	2017-09-14	パナソニックＩｐマネジメント株式会社	Procédé de production de feuille d'électrode et procédé de fabrication de condensateur électrolytique
CN109183116B (zh) *	2018-09-06	2020-07-17	南通海星电子股份有限公司	一种制备含TiO2介质层电子铝箔的前处理工艺
CN114446667B (zh) *	2022-01-17	2023-09-08	南通海星电子股份有限公司	一种高介电常数电极箔的制备方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4861439A (en) *	1988-07-05	1989-08-29	North American Philips Corporation	Method of improving the capacitance of anodized aluminum foil
JP3261482B2 (ja) *	1990-06-08	2002-03-04	東洋アルミニウム株式会社	アルミニウム電解コンデンサの電極およびその製造方法

2006
- 2006-04-05 WO PCT/JP2006/307683 patent/WO2006117985A1/fr active Application Filing
- 2006-04-26 TW TW95114887A patent/TWI301626B/zh active

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
TWI635521B (zh) *	2017-02-13	2018-09-11	鈺邦科技股份有限公司	電容器封裝結構及其抗氧化複合式電極箔

Also Published As

Publication number	Publication date
WO2006117985A1 (fr)	2006-11-09
TW200644012A (en)	2006-12-16

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TWI301626B (en)	2008-10-01	Capacitor use electrode foil
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Semenova et al.	2020	Porous silicon capacitor structures with embedded barium strontium titanates
Arab et al.	2014	Passivity characteristics on Ni (Cr)(Fe) SiB glassy alloys in phosphate solution
TWI282103B (en)	2007-06-01	An electrode foil used in condenser and a method of producing the same
JPS63160322A (ja)	1988-07-04	電解コンデンサ用アルミニウム電極材料
JP2006310494A (ja)	2006-11-09	コンデンサ用電極箔
JP2006310493A (ja)	2006-11-09	コンデンサ用電極箔

TWI301626B - Capacitor use electrode foil - Google Patents

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