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TW337589B - Loader and adapter to semi conductor processing machines - Google Patents

Loader and adapter to semi conductor processing machines

Info

Publication number
TW337589B
TW337589B TW083111388A TW83111388A TW337589B TW 337589 B TW337589 B TW 337589B TW 083111388 A TW083111388 A TW 083111388A TW 83111388 A TW83111388 A TW 83111388A TW 337589 B TW337589 B TW 337589B
Authority
TW
Taiwan
Prior art keywords
loader
semi conductor
adapter
processing machines
conductor processing
Prior art date
Application number
TW083111388A
Other languages
English (en)
Inventor
Scheler Werner
Lahne Berndt
Mages Andreas
Michl Uwe
Gemkow Eberhard
Schulz Alfred
Original Assignee
Jenoptik Technologie Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jenoptik Technologie Gmbh filed Critical Jenoptik Technologie Gmbh
Application granted granted Critical
Publication of TW337589B publication Critical patent/TW337589B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67775—Docking arrangements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/07—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for semiconductor wafers Not used, see H01L21/677
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/14—Wafer cassette transporting

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Feeding Of Workpieces (AREA)
  • Manufacturing Of Electrical Connectors (AREA)
TW083111388A 1994-07-16 1994-12-07 Loader and adapter to semi conductor processing machines TW337589B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4425208A DE4425208C2 (de) 1994-07-16 1994-07-16 Einrichtung zur Kopplung von Be- und Entladegeräten mit Halbleiterbearbeitungsmaschinen

Publications (1)

Publication Number Publication Date
TW337589B true TW337589B (en) 1998-08-01

Family

ID=6523369

Family Applications (1)

Application Number Title Priority Date Filing Date
TW083111388A TW337589B (en) 1994-07-16 1994-12-07 Loader and adapter to semi conductor processing machines

Country Status (7)

Country Link
US (1) US5655869A (zh)
EP (1) EP0696817B1 (zh)
JP (1) JP2674968B2 (zh)
KR (1) KR100272889B1 (zh)
AT (1) ATE194728T1 (zh)
DE (1) DE4425208C2 (zh)
TW (1) TW337589B (zh)

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DE60033056D1 (de) * 1999-12-02 2007-03-08 Asyst Technologies Wafer fördersystem
JP2004524673A (ja) * 2000-07-07 2004-08-12 セミトゥール・インコーポレイテッド 自動処理システム
EP1193736A1 (en) * 2000-09-27 2002-04-03 Infineon Technologies SC300 GmbH & Co. KG Vehicle for transporting a semiconductor device carrier to a semiconductor processing tool
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US6685419B2 (en) * 2001-07-10 2004-02-03 Christopher John Bayne Mobile elevator transporter for semi-automatic wafer transfer
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US7261508B2 (en) * 2002-04-22 2007-08-28 Taiwan Semiconductor Manufacturing Co., Ltd. Method for aligning a loadport to an overhead hoist transport system
JP4091380B2 (ja) * 2002-08-29 2008-05-28 東京エレクトロン株式会社 被処理体基板を収容した複数種類のカセットに対応可能なロードポート
KR100555620B1 (ko) * 2003-10-28 2006-03-03 주식회사 디엠에스 기판 운반시스템 및 운반방법
JP4579723B2 (ja) * 2005-03-07 2010-11-10 川崎重工業株式会社 搬送系ユニットおよび分割体
DE102006026363A1 (de) * 2006-04-13 2007-10-18 Colandis Gmbh Transport- und Dockingsystem für Reinraumanwendungen
JP4606388B2 (ja) * 2006-06-12 2011-01-05 川崎重工業株式会社 基板移載装置の搬送系ユニット
US9033638B2 (en) * 2007-04-17 2015-05-19 International Business Machines Corporation OHT accessible high density stocker and method
JP5168329B2 (ja) * 2010-08-31 2013-03-21 Ｔｄｋ株式会社 ロードポート装置
US8777548B2 (en) * 2012-04-11 2014-07-15 Shenzhen China Star Optoelectronics Technology Co., Ltd Pick-and-place apparatus for glass substrate
CN103496574B (zh) * 2013-10-12 2015-06-10 四川蓝彩电子科技有限公司 晶片引脚电镀用装夹输送装置及方法
CN104626039A (zh) * 2013-11-13 2015-05-20 旺宏电子股份有限公司 装卸治具
WO2015083679A1 (ja) * 2013-12-03 2015-06-11 サンヨー株式会社 フリーアクセス型の床構造、この床構造に対応する製造装置および運搬装置
JP2017103285A (ja) * 2015-11-30 2017-06-08 シンフォニアテクノロジー株式会社 ロードポートに設けられた載置台の上に載置されるアダプタ、およびロードポート
US10332769B2 (en) * 2016-01-15 2019-06-25 Taiwan Semiconductor Manufacturing Co., Ltd. Semiconductor processing station, semiconductor process and method of operating semiconductor processing station
US11303074B2 (en) * 2020-06-22 2022-04-12 Google Llc Enclosures to constrain the location of connectors in automation applications
CN118579462B (zh) * 2024-08-09 2024-11-05 江苏环亚医用科技集团股份有限公司 一种智慧医院用贴墙式储物输料装置

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Also Published As

Publication number Publication date
ATE194728T1 (de) 2000-07-15
KR960005925A (ko) 1996-02-23
EP0696817B1 (de) 2000-07-12
DE4425208C2 (de) 1996-05-09
US5655869A (en) 1997-08-12
JP2674968B2 (ja) 1997-11-12
JPH0846011A (ja) 1996-02-16
EP0696817A1 (de) 1996-02-14
DE4425208A1 (de) 1996-01-18
KR100272889B1 (ko) 2000-12-01

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Legal Events

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MK4A Expiration of patent term of an invention patent