TR202010936A2 - Yüksek performansli elektro-kromi̇k aygit üreti̇m yöntemi̇nde yeni̇li̇k - Google Patents
Yüksek performansli elektro-kromi̇k aygit üreti̇m yöntemi̇nde yeni̇li̇k Download PDFInfo
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- TR202010936A2 TR202010936A2 TR2020/10936A TR202010936A TR202010936A2 TR 202010936 A2 TR202010936 A2 TR 202010936A2 TR 2020/10936 A TR2020/10936 A TR 2020/10936A TR 202010936 A TR202010936 A TR 202010936A TR 202010936 A2 TR202010936 A2 TR 202010936A2
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- 238000004519 manufacturing process Methods 0.000 title abstract description 13
- 239000011521 glass Substances 0.000 abstract description 21
- 238000000034 method Methods 0.000 abstract description 9
- 239000003792 electrolyte Substances 0.000 abstract description 6
- 238000004544 sputter deposition Methods 0.000 abstract description 5
- 229910000314 transition metal oxide Inorganic materials 0.000 abstract description 5
- RUOJZAUFBMNUDX-UHFFFAOYSA-N propylene carbonate Chemical compound CC1COC(=O)O1 RUOJZAUFBMNUDX-UHFFFAOYSA-N 0.000 abstract description 4
- 150000002500 ions Chemical class 0.000 abstract description 3
- -1 transition metal chalcogens Chemical class 0.000 abstract description 3
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 abstract description 2
- 229910052798 chalcogen Inorganic materials 0.000 abstract description 2
- 150000001875 compounds Chemical class 0.000 abstract description 2
- 229910001882 dioxygen Inorganic materials 0.000 abstract description 2
- 229910052751 metal Inorganic materials 0.000 abstract description 2
- 239000002184 metal Substances 0.000 abstract description 2
- 239000000758 substrate Substances 0.000 abstract description 2
- 229910052723 transition metal Inorganic materials 0.000 abstract description 2
- 239000000956 alloy Substances 0.000 abstract 1
- 229910045601 alloy Inorganic materials 0.000 abstract 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 abstract 1
- MHCFAGZWMAWTNR-UHFFFAOYSA-M lithium perchlorate Chemical compound [Li+].[O-]Cl(=O)(=O)=O MHCFAGZWMAWTNR-UHFFFAOYSA-M 0.000 abstract 1
- 230000001590 oxidative effect Effects 0.000 abstract 1
- 239000000463 material Substances 0.000 description 9
- ZNOKGRXACCSDPY-UHFFFAOYSA-N tungsten trioxide Chemical compound O=[W](=O)=O ZNOKGRXACCSDPY-UHFFFAOYSA-N 0.000 description 9
- 239000004984 smart glass Substances 0.000 description 5
- 238000002834 transmittance Methods 0.000 description 4
- 229910001416 lithium ion Inorganic materials 0.000 description 3
- 230000035699 permeability Effects 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 230000002542 deteriorative effect Effects 0.000 description 2
- JKQOBWVOAYFWKG-UHFFFAOYSA-N molybdenum trioxide Chemical compound O=[Mo](=O)=O JKQOBWVOAYFWKG-UHFFFAOYSA-N 0.000 description 2
- 239000002086 nanomaterial Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000000576 coating method Methods 0.000 description 1
- 238000004040 coloring Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000002845 discoloration Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000007784 solid electrolyte Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/15—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on an electrochromic effect
- G02F1/153—Constructional details
- G02F1/155—Electrodes
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3464—Sputtering using more than one target
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3649—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer made of metals other than silver
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3668—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having electrical properties
- C03C17/3671—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having electrical properties specially adapted for use as electrodes
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/086—Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth
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- C—CHEMISTRY; METALLURGY
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/18—Metallic material, boron or silicon on other inorganic substrates
- C23C14/185—Metallic material, boron or silicon on other inorganic substrates by cathodic sputtering
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5846—Reactive treatment
- C23C14/5853—Oxidation
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/15—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on an electrochromic effect
- G02F1/1514—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on an electrochromic effect characterised by the electrochromic material, e.g. by the electrodeposited material
- G02F1/1523—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on an electrochromic effect characterised by the electrochromic material, e.g. by the electrodeposited material comprising inorganic material
- G02F1/1524—Transition metal compounds
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/15—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on an electrochromic effect
- G02F1/1514—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on an electrochromic effect characterised by the electrochromic material, e.g. by the electrodeposited material
- G02F1/1523—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on an electrochromic effect characterised by the electrochromic material, e.g. by the electrodeposited material comprising inorganic material
- G02F1/1525—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on an electrochromic effect characterised by the electrochromic material, e.g. by the electrodeposited material comprising inorganic material characterised by a particular ion transporting layer, e.g. electrolyte
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/90—Other aspects of coatings
- C03C2217/94—Transparent conductive oxide layers [TCO] being part of a multilayer coating
- C03C2217/948—Layers comprising indium tin oxide [ITO]
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- C03C2218/00—Methods for coating glass
- C03C2218/10—Deposition methods
- C03C2218/15—Deposition methods from the vapour phase
- C03C2218/154—Deposition methods from the vapour phase by sputtering
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- C03—GLASS; MINERAL OR SLAG WOOL
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- C03C2218/00—Methods for coating glass
- C03C2218/30—Aspects of methods for coating glass not covered above
- C03C2218/32—After-treatment
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Abstract
Geçiş metal oksit tabakalı bileşikleri içeren yüksek performanslı elektrokromik aygıtların üretim yöntemi ile ilgili olup, özelliği; saçtırma (Sputter) metodu ile cam(3) üzerine öncesinde büyütülmüş olan 80-150 nm kalınlıktaki Indiyum-kalay Oksit alaşımı (ITO) (2) üzerine bir kenarına Pt (1) saçtırma metodu ile metal kontak büyütülmesi, saçtırma (Sputter) metodu ile cam(3) üzerine öncesinde büyütülmüş olan 80-150 nm kalınlıktaki ITO(2) üzerine geçiş metal kalkojenlerinin hedefleri kullanılarak 15-25 mTorr, 300-500 °C alttaş sıcaklığında ve 3-45 dakika süre ile dikey nano-duvarlı yapılar büyütülmesi, büyütülen yapılar oksitleme fırınında 10-60 dakika boyunca oksijen gazı altında 300-450 °C’de oksitlenmesi, elektrokromik aygıt bir karşıt cam/ITO(80-150 nm) ile birlikte aralarında 0.5-1mm mesafe olan ve propilen karbonat (PC) içerisinde 1 Mol/Lit Lityum perklorat(LiClO4) iyon iletken elektrolit(6) ile yüz yüze gelecek şekilde kapatılarak elektro-kromik aygıt hazırlanması yöntem adımlarını içermesidir.
Description
TARIFNAME YUKSEK PERFORMANSLI ELEKTRO-KROMIK AYGIT URETIM Y'ONTEMINDE YENILIK Teknik Alan Bulus, geçis metal oksit tabanli bilesikleri içeren yüksek performansli elektrokromik aygitlarin üretim yöntemi ile ilgilidir. Bulus özellikle akilli cam teknolojisini gelistirmek üzere saçtirma metodu ile dikey nano duvarli geçis metal oksit tabanli özellikle WOa (tungsten trioksit) ve M003 (molibden trioksit) yapilarinin 'üzgün bir metotla üretilerek, yüzey alani genisletilmis nano yapilardan elektrokromik malzemelerin üretim yöntemi ile ilgilidir. Teknigin Bilinen Durumu Günümüzde akilli cam olarak adlandirabilecegimiz elektro-kromik camlar birçok alanda kullanilmaktadir. Ozellikle cep telefonlarinda, televizyon ekranlarinda, reklam panolarinda. günes gözlüklerinde ve dikiz aynalar kullanim alanlarinin sadece birkaç tanesidir. Elektrokromizm uygulanan voltaj ile cam üzerine kaplanmis olan elektrokromik ince filmin renginin çok kisa sürede degistirmesi Özelligidir ve uygulanan voltajin tersine çevrilmesiyle elektrokromik malzemeler tekrar eski orijinal seffaf durumlarina geri dbnerler. Ayrica bu malzemelerden üretilen akilli camlar enerji tasarrufu saglamakta ve yeni nesil ekranlarda kullanilmaktadir. Bu ekranlarin önemli bir özelligi uygulanan voltajin sifirlanmasiyla sahip oldugu durumu korumasinda yatmaktadir. Bu da bu akilli camlardan perdeleme yapma veya reklam panolari gibi alanlarda da kullanimlarini saglamaktadir. Birçok elektrokromik malzeme hali hazirda bulunmaktadir. Genel olarak geçis metal oksitleri bu anlamda elektrokromik özellik gösteren malzemelerdir. Bunlardan en önemli olanlari göstermis olduklari üstün performanslarindan dolayi (kisa açilma/kapanma zamani, uzun süre dayanim, zaman ile performans bozulmamasi, renklenme verimi vb.) W03 ve M003 olarak gösterilmektedir. Bu akilli camlar için en 'Önemli performans parametreleri voltaj uygulandiktan sonra renklenme hizlari ve tekrar seffaf hale geri dönüs hizlaridir. Bunun yaninda kaç tekrar sonucunda aygitin performansinin bozulmadan çalisabilecegi de yine 'Önemli bir parametredir. Son olarak önemli bir diger parametre de renklenme verimidir. Voltaj uygulandiktan sonra aygit renklendiginde, optik geçirgenlik degerindeki degisimin oldukça yüksek olmasi istenmektedir ve günümüzde %50-%60 degisimli elektro-kromik camlar hali hazirda mevcuttur. Bu geçirgenlik degerlerindeki degisim yeterince yüksek degildir. Sanayide 5 s ve üzerinde çalisan elektro-kromik camlar bulunmaktadir. Bu zaman aslinda yüksektir ve bu malzemelerin ticarilesmesindeki en önemli engellerden bir tanesidir. TR 2018/18520 numaralari patent basvurusunda bir elektrokromik cam imalat yönteminden bahsedilmektedir. Bu yöntem; iletken oksitin birinci ve ikinci tabakasi ile, elektrokromik elektrot, kati elektrolit, karsit elektrotun birlikte belli dalga boylarinda isinlanma ile isil islemi ve sonrasinda belli bir süre boyunca radyasyon altinda kalmasi ile bir elektrokromik cam imalat yöntemi olup, bahsedilen yöntem hem maliyetli açisindan yüksektir hemde istenilen faydayi verememektedir. Sonuç olarak, yukarida anlatilan olumsuzluklardan dolayi ve mevcut çözümlerin konu hakkindaki yetersizligi nedeniyle ilgili teknik alanda bir gelistirme yapilmasi gerekli kilinmistir. Bulusun Amaci Bulus, mevcut durumlardan esinlenerek olusturulup yukarida belirtilen olumsuzluklari çözmeyi amaçlamaktadir. Bulusun öncelikli amaci, elektrokromik aygitin açma/kapama zamanini 5 saniyenin altina düsürmektir. Bulusun diger bir amaci, kullaniciya sürekli maliyet olusturmadan, güvenli sekilde uzun süreler çalisabilen bir elektrokromik aygit üretmektir. Bulusun bir baska amaci, optik geçirgenlik degerindeki degisimin oldukça yüksek olmasi saglanarak elektrokromik aygitin renklenme verimini %60'Iar mertebesine çikarmaktir. Bulusun baska bir amaci, elektrokromik aygit üretmek için maliyet açisinda uygun ve verimli bir üretim yöntemi olusturmaktir. Bulusun yapisal ve karakteristik özellikleri ve tüm avantajlari asagida verilen sekiller ve bu sekillere atiflar yapilmak suretiyle yazilan detayli açiklama sayesinde daha net olarak anlasilacaktir ve bu nedenle degerlendirmenin de bu sekiller ve detayli açiklama göz önüne alinarak yapilmasi gerekmektedir. Bulusun Anlasilmasina Yardimci Olacak Sekiller Sekil 'I, bulusa konu olan elektrokromik aygit üretim yontemi adimlaridir. Sekil 2, bulusa konu olan elektrokromik aygitin perspektif görünümdür. Parça Referanslarinin Açiklamasi 2. ITO 3. Cam 4. W82 . WC?, 6. Iyon iletken elektrolit (LiCIO4) Bulusun Detayli Açiklamasi Bu detayli açiklamada, bulusa konu olan elektrokromik aygit üretim yöntemi için tercih edilen yapilanmalari, sadece konunun daha iyi anlasilmasina yönelik olarak açiklanmaktadir. Bulus konusu sanayiye uygun bir kaplama metodu olan saçtirma metodu ile dikey nano-duvarli W03(Tungsten trioksit )(5) ve iVloOa yapilarin özgün bir metotla üretilerek, yüzey alani oldukça genis olan nano yapilarin kullanilarak elektro-kromik malzemelerin üretilmesini içermektedir. Bu malzemeler ile üretilen W03(5) tabanli açilma/kapanma zamani Ss'nin altinda olan, binlerce saat çalisabilen ve renklenme verimi %60 mertebesinde olan elektro-kromik aygitlar üretmek mümkün olmustur. Olusan elektro-kromik aygitlarin yüksek performansli çalismasini saglayan özgün olarak üretilmis W03(5), MoOS gibi kromik tabakalarin ve aygitin üretim asamalari asagida adim adim verilen sekilde açiklanmistir; Ilk olarak saçtirma (Sputter) metodu ile cam(3) üzerine Öncesinde büyütülmüs olan 80- (1) saçtirma metodu ile metal kontak büyütülür. Elektrokromik aygitlarda karsit elektrot olarak Cam(3) ve ITO(2) elektrotu kullanilirBu noktada bu elektrokromik aygitlar yine kullanilarak da ayni aygitlar üretilebilir. Sonrasinda saçtirma (Sputter) metodu ile cam(3) üzerine öncesinde büyütülmüs olan üzerine geçis metal kalkojenlerinin (W82(Tungsten 0C alttas sicakliginda ve 3-45 dakika araliklarinda dikey nano-duvarli yapilar büyütülür. Büyütülen yapilar oksitleme firininda 10-60 dakika boyunca oksijen gazi altinda 300- 400 0C sicaklik araliginda oksitlenir. Bu sicaklik araligi büyütülen M082 ve W82 vs. gibi malzemenin kalinligina göre degisim göstermektedir. Sonrasinda elektro-kromik aygit bir karsit cam/ITO(80-150 nm) ile birlikte aralarinda 0.5-1mm mesafe olan ve propilen karbonat (PC) içerisinde 1 MolfLit Lityum perklorat(LiClO4) iyon iletken elektrolit(6) ile yüz yüze gelecek sekilde kapatilarak elektro-kromik aygit hazirlanir. Li iyonlari bu iyon iletken(6) çözelti içerisinde bulunur. Ayni zamanda bu aygitlar Cs tabanli ve Na tabanli elektrolitlerin kullanilmasiyla da gerçeklestirilebilir Cam(3)/ITO(2)/Elektro-kromik tabaka, dikey nano duvarli W03(5), M003 vb. geçis metal oksit tabakasidir. Li iyonlarinin bu tabakalara girerek yüksek performansli elektro-kromik aygit olusturmasini saglar. Aygit olusturulduktan sonra cam(3)/ITO(2)IPt(1) tabakasindan bulunan Pt(1) elektrotlar ile aygitin çalistirilabilmesi için bir güç kaynagi baglanir. Aygita -3 V uygulanir. Voltaj uygulandiktan sonra iyon iletken elektrolit(6) tabakasinda bulunan Li+ iyonlari cam(3)/ITO(2)IeIektro-kromik tabaka içerisine girer ve zamanla seffaf olan cam renklenmeye baslar. Elektrotlara +3 V uygulanmasiyla bu sefer renkli halde bulunan cam seffaf hale döner. Yüzde Geçirgenlik guçii'guilik dc Patent konusunu içeren metot ile olusturulmus olan Cam!ITO/WOB/elektrolit/ITO/Cam yapisindaki elektrokromik aygitin performans verisi yukaridaki sekilde gösterilmektedir. Bu veri 700 nm dalgaboyunda elektrokromik aygitin dinamik olarak geçirgenlik verisini göstermektedir. Sekildeki ilk 30 saniyelik bölümde elektrokromik aygita -3 V uygulanmis ve baslangiçtaki geçirgenlik degerinden aygitin geçirgenligi %10 degerlerinin altina düstügü gozlenmistir. Bu durum aygitin renklenme durumudur ve aygit kararmistir. Bu düsüsün ilk %67ilik kismi aygitin renklenme zamani olarak ifade edilmektedir ve sekilden de gözükt'üg'u gibi bu zaman 2.28 sadir. Ikinci 30 saniyelik kisimda ise aygita +3 V uygulanmis ve aygitin tekrar eski durumuna geri dönmesi olmasi saglanmistir. Burada da aygitin açilma zamani 1.28 5 olarak belirlenmistir. Bu veri patent konusu olan metot ile üretilen aygitin 'üstün performansini göstermektedir. TR TR TR
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